TW201741624A - Gyroscopic apparatus and method for controlling gyroscopic apparatus - Google Patents

Abstract

A gyroscopic apparatus provided with: a single two-dimensional oscillator driven by a drive signal corresponding to a first rotary oscillation mode and a drive signal corresponding to a second rotary oscillation mode; a first detector for detecting, from a signal outputted from the two-dimensional oscillator, the amplitude and phase of a component that corresponds to the first rotary oscillation mode; and a second detector for detecting, from a signal outputted from the two-dimensional oscillator, the amplitude and phase of a component that corresponds to the second rotary oscillation mode.

Description

Gyro device and control method of gyroscope device

The present invention relates to a control method for a gyro device and a gyro device, for example, relating to the use of a single (one) modal matching (the resonance frequencies of two orthogonal axes are identical) A gyro device for a vibrating element and a control method for the gyro device.

From the prior art, a gyro device useful for detecting the angular velocity of rotation has been proposed. For example, in the following document (Non-Patent Document 1), a gyro device is used in which two resonant elements are used, and each resonant element is oriented in a clockwise direction (CW). In the counter-clockwise direction (CCW (Counter-Clockwise rotation)), the input angular velocity is extracted based on the frequency difference of each resonant element. In the following Patent Document 1, there is described a device in which a ring-shaped vibratory gyroscope is excited by a rotational vibration in a clockwise direction and a counterclockwise direction.

[Previous Technical Literature] [Non-patent literature]

[Non-Patent Document 1] [MEMS 2013] QUADRATURE FM GYROSCOPE, MH Kline1, Y.-C. Yeh1, B. Eminoglu1, H. Najar2, M.Daneman3, DA Horsley2, BE Boser1, 1UC Berkeley, 2UC Davis, 3Invensense, Pp. 604-608, 087-We

[Patent Document 1] Japanese Patent Laid-Open No. Hei 6-241810

However, the gyro device described in Non-Patent Document 1 has a problem that it is necessary to make the characteristics of the two vibration elements used completely the same. Moreover, since two vibrating elements are used, there is a problem that the miniaturization of the apparatus becomes difficult. Further, since the characteristics such as the resonance frequency and the Q value of the resonance element change depending on the temperature change, it is necessary to use the environmental temperature of the two resonance elements in order to make the characteristics of the two resonance elements the same. The problem of consistent conditions. Further, in Patent Document 1, the specific configuration of the component that detects the CW:CCW mode based on the output of the vibratory gyroscope is not explicitly shown.

It is an object of the present invention to provide a novel and useful gyroscope device and a method of controlling a gyroscope device for solving such problems.

In order to solve the above problems, the present invention is a gyro device comprising: a single two-dimensional vibration element corresponding to a first rotational vibration mode (for example, a clockwise rotation (CW) vibration mode) a driving signal and a driving signal corresponding to a second rotational vibration mode (for example, a counterclockwise rotation (CCW) vibration mode); and the first detecting portion is based on a signal output from the two-dimensional vibration element And detecting the amplitude and phase of the component corresponding to the first rotational vibration mode; and the second detecting unit detects the component corresponding to the second rotational vibration mode based on the signal output from the two-dimensional vibration element Amplitude and phase.

Another aspect of the present invention is a method for controlling a gyro device, which is characterized in that a single driving signal is driven by a driving signal corresponding to a first rotating vibration mode and a driving signal corresponding to a second rotating vibration mode. The two-dimensional vibration element detects the amplitude and phase of the component corresponding to the first rotational vibration mode based on the signal output from the two-dimensional vibration element, and detects the corresponding signal based on the signal output from the two-dimensional vibration element. The amplitude and phase of the component of the second rotational vibration mode.

According to the present invention, since a single vibration element is used, the apparatus can be miniaturized. Further, since it is not necessary to use a plurality of vibration elements, there is no difference in performance between the vibration elements, and the performance of the gyro device can be improved. In addition, the content of the present invention should not be construed as being limited by the effects exemplified by the present specification.

10‧‧‧Gyroscope device

15‧‧‧2 dimensional vibrating element

20‧‧‧Drive Signal Generation Department

30a‧‧‧1st detection department

30b‧‧‧2nd Detection Department

40a‧‧‧1st PLL circuit

40b‧‧‧2nd PLL circuit

50a‧‧‧1st gain control unit

50b‧‧‧2nd gain control unit

70‧‧‧Angle velocity detection department

80a, 80b‧‧‧ Angle Detection Department

91~94‧‧‧ Phase Adjustment Department

95~98‧‧‧Amplitude Adjustment Department

CW‧‧‧1st mode

CCW‧‧‧2nd Modal

Fig. 1 is a view for explaining one example of vibration in a ring resonator.

Fig. 2 is a view for explaining one example of vibration in a ring resonator.

Fig. 3 is a view for explaining a general synchronous detection method.

Fig. 4 is a view for explaining a configuration and a method for detecting a component of a CW mode and a component of a CCW mode based on an input signal.

Fig. 5 is a view for explaining in detail a configuration and a method for detecting a component of a CW mode and a component of a CCW mode based on an input signal.

Fig. 6 is a view for explaining an example of an output when a case is detected by a specific reference signal.

Fig. 7 is a view for explaining another example of output when a case is detected by a specific reference signal.

FIG. 8 is a diagram for explaining another example of output when the detection is performed by a specific reference signal. FIG.

FIG. 9 is a diagram for explaining another example of output when the detection is performed by a specific reference signal. FIG.

FIG. 10 is a gyroscope for an embodiment of the present invention. FIG. The configuration of the device is shown as a diagram.

[Fig. 11] Fig. 11 is a view showing a configuration example of a first detecting unit according to an embodiment of the present invention.

Fig. 12 is a view showing a configuration example of a second detecting unit according to an embodiment of the present invention.

Fig. 13 is a view schematically showing a flow of a signal in a gyro device according to an embodiment of the present invention.

[ Fig. 14] Fig. 14 is a view showing a configuration example of an angular velocity detecting unit according to the first embodiment of the present invention.

FIG. 15A and FIG. 15B are diagrams for explaining a Hall angle mode. FIG.

[Fig. 16] Fig. 16A and Fig. 16B are views showing a configuration example of an angle detecting unit according to a second embodiment of the present invention.

FIG. 17A and FIG. 17B are diagrams for explaining the ideal vibration with respect to the driving signal. FIG.

18A and FIG. 18B are diagrams for explaining the case where the amplitude of the X direction and the amplitude of the Y direction coincide with each other in the ideal frequency, and the phase difference is 90°. .

19A and 19B are diagrams for explaining problems caused by incompleteness of the vibrating element.

FIG. 20A and FIG. 20B are diagrams for explaining problems caused by incompleteness of the vibrating element. FIG.

Fig. 21 is a view for explaining a problem caused by the incompleteness of the vibrating element.

22A and 22B are diagrams for explaining a method for solving a problem caused by incompleteness of a vibrating element.

Fig. 23 is a view for explaining a problem caused by the incompleteness of the vibrating element.

Fig. 24A and Fig. 24B are diagrams for explaining problems caused by incompleteness of the vibrating element.

25A and 25B are diagrams for explaining a method for solving a problem caused by incompleteness of a vibrating element.

Fig. 26 is a block diagram showing a configuration example of a gyro apparatus according to a third embodiment.

FIG. 27A and FIG. 27B are views for explaining effects obtained by the third embodiment.

FIG. 28A and FIG. 28B are views for explaining effects obtained by the third embodiment.

Hereinafter, embodiments of the present invention and the like will be described with reference to the drawings. In addition, the description is made in the following order.

<1. First embodiment>

<2. Second embodiment>

<3. Third embodiment>

<4. Modifications>

The embodiments described below are suitable specific examples of the present invention, and the contents of the present invention are not limited by the embodiments and the like.

<1. First embodiment>

"About general gyroscope devices"

In order to facilitate the understanding of the present invention, a general gyroscope device (gyroscope) will be described first. In the following description, a small vibration type gyro device using MEMS (Micro Electro Mechanical Systems) will be described as an example. In the gyro apparatus, a process of detecting an angular velocity of rotation (hereinafter, referred to as a rotational angular velocity as appropriate) and integrating the rotational angular velocity to obtain a rotational angle (hereinafter, referred to as a rotational angle as appropriate) is performed. As a method of detecting the rotational angular velocity Ω _z , a method of plural is known. As the first method, a method called an AM (Amplitude Modulation) mode is known. In the AM mode, the amplitude (displacement) in the direction of the sensing axis (for example, the Y-axis) which changes due to the Coriolis force when vibration is given in the direction of the driving shaft (for example, the X-axis) is made. Calculate and get the angular velocity. Since the amplitude of the sensing axis direction is proportional to the rotational angular velocity Ω _z , the rotational angular velocity Ω _z can be detected by detecting the amplitude. In the AM mode, the vibration applied to the direction of the drive shaft is directly excited in the direction of the sense axis, so that the resonance frequencies in the direction of the drive shaft and the sense axis are mutually phased. Different ways are set (modal mismatch, mode mismatch). However, in the AM mode, since the measurement is performed at a frequency separated from the resonance frequency, there is a problem that the sensitivity is lowered.

The second method is a method called force rebalance, and applies feedback control so that the amplitude of the sense axis direction of the AM mode is constantly zero, and according to the magnitude of the feedback signal. To get the method of rotating angular velocity. In this case, it is possible to use a vibrating element in which the resonance frequencies of the drive shaft and the sensing shaft are matched with each other (modally matched). However, there is a problem that the scale factor (the magnitude of the output relative to the rotational angular velocity) may vary due to temperature or the like.

In view of the above-described problems of the first and second methods, in the embodiment of the present invention, the driving of the gyro device by the FM (Frequency Modulation) mode is employed. As a feature of the FM mode, compared with other methods, the sensitivity (scale factor) is correct and stable, and in principle, it is excellent in temperature characteristics and is in the dynamic range. There are no features that have advantages such as restrictions.

Here, the principle of the basicity of the FM mode is explained. In addition, since the principle of the FM mode is known per se, it is only briefly described herein. The FM mode gyro is composed of a vibrating element (also referred to as a resonant element or a resonator) that vibrates in two orthogonal directions (independent). In the FM mode, a vibration element (modal matching) that makes the resonance frequencies on the respective axes coincide with each other is used. In this state, if the rotational angular velocity is given to the vibrating element, the following formula 1 is derived, and this is known. In addition, λ in Equation 1 is the resonance frequency, and ω is the resonance frequency when no rotation is applied (the modulo matching is performed, so the two-axis system is the same resonance frequency) , Ω _z , represents the angular velocity of rotation imparted to the vibrating element.

In addition, the vibrations mentioned below are not limited to the linear direction (for example, the X direction and the Y direction), and any type of orthogonal vibration mode that is modally matched in a plane is used. Vibration can be used. For example, in the case of a ring resonator, as shown in FIGS. 1 and 2, two vibration systems that are orthogonal to each other do not absolutely become a simple linear vibration, but if they are vibration modes in each case, The state of the displacement in the middle is expressed as a modal coordinate (generalized coordinate), and can be regarded as being processed exactly the same as the linear vibration. Hereinafter, the modal coordinates (generalized coordinates) are also included, and one modal is referred to as "X-axis (or X-direction)", and the modality orthogonal thereto is referred to as "Y-axis (or Y-direction)" (In addition, the modes 1, 2 in Figs. 1, 2 represent mathematical or vibrometrically orthogonal states).

[Expression 1] λ ² = (ω ² + Ω _z ² ) ± 2ω Ω _z (1)

According to the formula 1, the following formula 2 is derived.

[Expression 2] λ = ω ± Ω _z (2)

That is, as shown in the equation 2, when the rotation is not given, the resonance frequencies in the X-axis and the Y-axis directions are identical to each other, that is, modal matching is performed, but by giving With the rotation, the resonance frequency λ becomes ω + Ω _z and ω - Ω _{z , respectively} . If the two resonance frequencies are λ ₁ and λ ₂ , since the difference (deviation) between the resonance frequencies λ _{1 and} λ ₂ is proportional to the rotational angular velocity Ω _z , if two resonance frequencies λ are detected, ₁ and λ ₂ , the rotational angular velocity Ω _z can be obtained based on the following Equation 3.

Here, the motion corresponding to λ ₁ (ω+Ω _z ) corresponds to clockwise rotation (CW), and the motion corresponding to λ ₂ (ω-Ω _z ) corresponds to counterclockwise rotation (CCW). . In other words, when the rotation is applied to the modally matched vibration element, the natural vibration mode is not a straight line (in the X direction or the Y direction alone vibration), but becomes a rotation vibration (X). The phase of the vibration in the direction and the Y direction is a two-dimensional vibration with an offset of ±90 degrees (°). In addition, the actual rotation of the vibrating element is an overlap of such CW modes and CCW modes.

"How to detect the components of each mode"

The above is explained for the FM mode. In the embodiment of the present invention, one of the vibration elements (hereinafter, referred to as a two-dimensional vibration element) which is modally matched in two dimensions in the FM mode described above is excited. Therefore, in order to obtain the rotational angular velocity Ω _z , it is necessary to combine the component of the CW mode (first rotational vibration mode) and the CCW mode (the second rotational vibration) included in the rotational vibration (output) of the two-dimensional vibration element. The components of the modality are detected independently. Therefore, a method of separating and detecting the components of the CW mode and the components of the CCW mode from the output of the two-dimensional vibration element will be described.

Fig. 3 is a diagram for explaining a general synchronous detection method. In the input signal (SI), a signal having a certain amplitude (Amplitude) and a phase (Phase) is input. The input signal SI is branched and input to each of the multipliers 1, 3. In the synchronous detection method, two signals whose phases are shifted by 90 degrees are used as reference signals, and the reference signals are multiplied by the respective multipliers 1, 3 After the calculation, a filtering process is performed, whereby a demodulated output is obtained. For example, as a reference signal, a cos wave and a sin wave are used, and the processing of multiplying the cos wave at the input signal SI by the multiplier 1 is performed, and the input signal SI is performed by the multiplier 3 Multiply the processing of the sin wave.

The signal output from the multiplier 1 is input to the LPF (Low Pass Filter) 2 and subjected to filtering processing. By the filtering process by LPF2, from LPF2, only the components having the same frequency as the reference signal (in this example, the cos wave) and having the same phase are output.

On the other hand, the signal output from the multiplier 3 is input to the LPF 4 and subjected to filtering processing. With the filtering process caused by LPF4, from LPF4, it is only the parameter in the multiplier 3 The test number (in this case, the sin wave) is the same frequency and the components with the same phase are output.

The input signal SI is demodulated by the output from the LPFs 2, 4. Based on the demodulated output, the amplitude r and the phase θ of the input signal SI are detected.

In the embodiment of the present invention, the synchronous detection method is developed and applied, and a process of detecting a component of a CW mode and a component of a CCW mode is performed. In the following description, an example in which only the components of the CW mode are detected based on the signals obtained by combining the CW mode and the CCW mode generated in the two-dimensional vibration element will be described. However, the composition of the CCW mode can be detected by the same process.

4 is a diagram for explaining a method of detecting a component of a CW mode based on an input signal SI. As the input signal SI, a signal output from the two-dimensional vibration element is input. In the case where a two-dimensional vibration element is used, as shown in the figure, the input signal SI can be expressed by a vector mark including a component in the X and Y directions.

The input signal SI is branched and input to each of the multipliers 1, 3. As a reference signal, the signal CW-I (In phase) and CW-Q (Quadrature Phase) are used to perform the processing of multiplying the signal CW-I at the input signal SI by means of the multiplier 1. The multiplier 3 performs processing for multiplying the signal CCW-I at the input signal SI. The signal CW-I, signal CW-Q, as shown in the symbolic representation in Figure 4, is the same amplitude, frequency, and direction of rotation. The bit is offset by a 90 degree signal.

For the input signal SI, the signal CW-I is multiplied by the multiplier 1, and the output is supplied to the LPF2. For the input signal SI, the signal CW-Q is multiplied by the multiplier 3, and the output is supplied to the LPF 4. After the filtering process by each of the LPFs 2 and 4, as a result, the input signal SI is demodulated, and based on the demodulated output, the amplitude of the component of the CW mode included in the input signal SI can be r and phase θ are detected.

Fig. 5 is a view for explaining a detailed configuration example of the above-described multipliers 1 and 3. The multiplier 1 is provided with, for example, a multiplier 1a, a multiplier 1b, and an adder 1c. The multiplier 3 is provided with, for example, a multiplier 3a, a multiplier 3b, and an adder 3c.

As described above, in the case of the two-dimensional vibration element, as the input signal SI, signals (amplitude) (hereinafter, referred to as signals SIX and SIY) in the X-axis and Y-axis directions are input to the multiplier 1. The multiplier 1a multiplies the component of the X-axis direction of the signal CW-I for the signal SIX, and the multiplier 1b multiplies the component of the Y-axis direction of the signal CW-I for the signal SIY. The adder 1c adds the outputs of the multipliers 1a, 1b and outputs them to the LPF 2.

The multiplier 3a multiplies the component of the X-axis direction of the signal CW-Q for the signal SIX, and the multiplier 3b multiplies the component of the Y-axis direction of the signal CW-Q for the signal SIY. The adder 3c adds the outputs of the multipliers 3a, 3b and outputs them to the LPF 4.

According to the above method, it is possible to detect the 2-dimensional vibration The components of the CW mode included in the output of the moving element will be described in more detail with reference to FIGS. 6 to 9. The example shown in Fig. 6 is an example in which the signal CW-I is used as a reference signal for detection. Further, in this example, the signal of the X-axis direction of the CW-I is set to the sin wave, and the signal of the Y-axis direction is set to the cos wave. When it is assumed that the input signal SI is only a component of the signal CW-I, the output waveform of the multiplier 1a becomes the waveform WA1a, and the output waveform of the multiplier 1b becomes the waveform WA2a. The waveform of the signal after adding the output of each multiplier by the adder 1c is the waveform WA3a. If the signal waveform is passed through the LPF 2, since the filtering process by the LPF 2 is equivalent to the process of averaging, the waveform of the obtained signal is the same waveform WA4a as the waveform WA3a (DC ingredient). That is, when the component of the signal CW-I is included in the input signal SI, the component can be detected by using the detection with the signal CW-I.

The example shown in FIG. 7 is an example in which the signal CW-I is used as a reference signal for detection, but it is assumed that the input signal SI has only a phase different from the signal CW-I by 90 degrees. An example of the case of the component of the signal CW-Q. In this case, the output waveform of the multiplier 1a becomes the waveform WA1b, and the output waveform of the multiplier 1b becomes the waveform WA2b. The signal obtained by adding the waveforms of these waveforms to the adder 1c is 0 as shown in the figure. Therefore, the output of the LPF 2 is also 0 as shown in the figure.

The example shown in FIG. 8 is an example in which the signal CW-I is used as a reference signal for detection, but it is assumed to be an input signal. The SI system is only an example in the case where the direction of rotation is a component of the signal CCW-I that rotates counterclockwise from the signal CW-I. In this case, the output waveform of the multiplier 1a becomes the waveform WA1c, and the output waveform of the multiplier 1b becomes the waveform WA2c. The waveform of the signal after the addition of the output of each multiplier by the adder 1c is a waveform WA3c which is symmetrical with respect to 0. If the signal of this waveform WA3a is passed through the LPF 2, its output becomes 0 as shown in the figure.

The example shown in FIG. 9 is an example in which the signal CW-I is used as a reference signal for detection, but it is assumed that the input signal SI is rotated counterclockwise in a direction different from the signal CW-I. The signal is only an example of a case where the phase is a component of the signal CCW-Q which is different from the signal CCW-I by 90 degrees. In this case, the output waveform of the multiplier 1a becomes the waveform WA1d, and the output waveform of the multiplier 1b becomes the waveform WA2d. The waveform of the signal after the addition of the output of each multiplier by the adder 1c is a waveform WA3d which is symmetrical with respect to 0. If the signal of this waveform WA3d is passed through the LPF2, its output becomes 0 as shown in the figure.

That is, if the signal CW-I is used as the reference signal, and any two-dimensional vibration generated in the two-dimensional vibration element (linear combination of CW-I, CW-Q, CCW-I, CCW-Q) In the case of synchronous detection, only the component of the signal CW-I included in the output signal of the two-dimensional vibrating element can be obtained. In this case, the component detected when other signals are used as the reference signal can also be applied. If you summarize the above, you can get the following table. 1.

As shown in Table 1, when the component of the signal CW-Q is included in the output of the 2-dimensional vibrating element, the reference signal can be detected by the signal CW-Q, and on the other hand, The component of the signal, the output will become 0. When the component of the signal CCW-I is included in the output of the two-dimensional vibrating element, the reference signal can be detected by the signal CCW-I, and on the other hand, the output of the other signal component becomes 0. When the component of the signal CCW-Q is included in the output of the two-dimensional vibrating element, the reference signal can be detected by the signal CCW-Q, and on the other hand, the output of the other signal component becomes 0. That is, for example, if two detectors are set, and the reference signals at the respective detectors are respectively set to a combination of the signals CW-I and the signals CW-Q, the combination of the signals CCW-I and the signals CCW-Q, Then, it is possible to independently detect the components of the CW mode and the components of the CCW mode from the output of the two-dimensional vibration element.

"Configuration example of gyroscope device"

In the above description, the gyro device according to the first embodiment of the present invention will be described. FIG. 10 is a view showing a configuration example of a gyro device (gyro device 10) according to the first embodiment of the present invention. The gyro device 10 includes, for example, a single two-dimensional vibration element 15 , a drive signal generation unit 20 , a first detection unit 30 a , and a first PLL (Phase Locked Loop) circuit as an example of the first oscillation circuit. 40a and the first AGC (Automatic Gain Control) unit 50a and the second detecting unit 30b, which are examples of the first gain control unit, and the second PLL circuit 40b as an example of the second oscillation circuit, and the second gain. The second AGC unit 50b, which is one example of the control unit, and the amplifiers 61a and 61b provided on the input side of the two-dimensional vibration element 15 and the amplifiers 62a and 62b provided on the output side of the two-dimensional vibration element 15 are provided.

Further, although not shown, the gyro device 10 may be provided with a DA (Digital to Analog) converter and an AD (Analog to Digital) converter, and is realized by digital signal processing. In this case, the DA converter is, for example, disposed in the preceding stage of the amplifiers 61a, 61b, and is configured to convert the digital form of the driving signal outputted from the driving signal generating portion 20 into an analog form. Further, an AD converter, for example, is disposed at a subsequent stage of the amplifiers 62a, 62b, and is configured to convert an analog form signal output from the two-dimensional vibration element 15 into a digital form.

The two-dimensional vibration element 15 is, for example, a ring shape, and is a vibration member that can be excited by a drive signal corresponding to each of the CW mode and the CCW mode. Further, the shape of the two-dimensional vibration element 15 is not limited to the ring shape, and may be a square plate, a column, a square prism, or a four-mass block using four mass poles. Any shape.

The driving signal generating unit 20 generates a driving signal corresponding to the CW mode and a driving signal corresponding to the CCW mode, and supplies the multiplexed driving signals to the two-dimensional vibration element 15. The two-dimensional vibration element 15 is excited by the drive signal supplied from the drive signal generating unit 20. In this example, as the drive signal corresponding to the X-axis direction of the CW mode, a cos wave (hereinafter, _{referred to} as cos _cw signal) is used as the drive signal in the Y-axis direction, and the -sin wave is used (hereinafter, the mark For the -sin _cw signal). In addition, as the driving signal, as long as the Y-direction signal is 90 degrees further than the X-direction signal, it is not absolutely necessary to be a cos wave or a -sin wave. Further, as the driving signal corresponding to the X-axis direction of the CCW mode, a -cos wave (hereinafter, referred to as -cos _CCW signal) is used as the driving signal in the Y-axis direction, and a -sin wave is used (hereinafter, marked as -sin _CCW signal). In addition, the driving signal, as long as the Y direction signal is delayed by 90 degrees compared to the X direction signal, it is not absolutely necessary to be a -cos wave or a -sin wave. More specifically, the drive signal generating unit 20 is provided with, for example, a multiplier 201, a multiplier 202, a multiplier 203, a multiplier 204, an adder 205, and an adder 206.

The first detecting unit 30a detects the amplitude r _cw and the phase θ _cw of the CW component included in the output of the two-dimensional vibrating element 15 . The details of the first detecting unit 30a will be described later.

The first PLL circuit 40a includes a phase comparator 41a, a PID (Proportional Integral Differential) control unit 42a, and a VCO (Voltage Controlled Oscillator) or NCO (Numerical Controlled Oscillator) oscillator 43a capable of changing the oscillation frequency. . In order to avoid complication of the illustration, the detailed illustration is omitted. However, the output of the first PLL circuit 40a (which may be all outputs or a part of the output) is fed back to the drive signal generating section 20 Each of the first detecting units 30a.

The first AGC unit 50a includes an amplitude comparator 51a and a PID control unit 52a. The output of the first AGC unit 50a is fed back to the drive signal generating unit 20.

The second detecting unit 30b detects the amplitude r _ccw and the phase θ _ccw of the CCW component included in the output of the two-dimensional vibrating element 15 . The details of the second detecting unit 30b will be described later.

The second PLL circuit 40b includes a phase comparator 41b, a PID control unit 42b, and an oscillator 43b capable of changing the oscillation frequency such as a VCO or an NCO. In order to avoid complication of the illustration, the detailed illustration is omitted. However, the output of the second PLL circuit 40b (which may be all outputs or a part of the output) is fed back to Each of the drive signal generating unit 20 and the second detecting unit 30b.

The second AGC unit 50b includes an amplitude comparator 51b and a PID control unit 52b. The output of the second AGC unit 50b is fed back to the drive signal generating unit 20.

"Example of the configuration of the first and second detection units"

FIG. 11 is a view for explaining an example of the configuration of the first detecting unit 30a. The first detecting unit 30a is provided with detectors 31a and 32a for making signals output from the two-dimensional vibrating element 15 diverged and input, and an LPF 33a for filtering the output of the detector 31a, and for the detector. The LPF 34a for filtering the output of 32a and the amplitude phase detection for detecting the amplitude r _cw and the phase θ _cw of the CW component included in the output signal of the two-dimensional vibrating element 15 based on the output from the LPF 33a and the LPF 34a Part 35a.

The detector 31a includes a multiplier 310a to which a component in the X-axis direction of the output from the two-dimensional vibrating element 15 is input, and an output that is input from the two-dimensional vibrating element 15 The multiplier 311a of the components in the Y-axis direction and the adder 312a which adds the outputs of each of the multipliers 310a and 311a. The detector 32a includes a multiplier 320a to which a component in the X-axis direction of the output from the two-dimensional vibrating element 15 is input, and an output to which the output from the two-dimensional vibrating element 15 is input. The multiplier 321a of the components in the Y-axis direction and the adder 322a of the output of each of the multipliers 320a and 321a are added.

In addition, in this example, the CW-I in the X-axis direction is formed. The sub-signal is set to the sin signal, and the CW-I component in the Y-axis direction is set to the cos signal, and the CW-Q component in the X-axis direction is set to the cos signal, and the CW-Q component in the Y-axis direction is set to -sin. Signal.

FIG. 12 is a view for explaining a configuration example of the second detecting unit 30b. The second detecting unit 30b is provided with detectors 31b and 32b for making signals output from the two-dimensional vibrating element 15 diverged and input, and an LPF 33b for filtering the output of the detector 31b, and for the detector. The LPF 34b for filtering the output of 32b and the amplitude phase detection for detecting the amplitude r _ccw and the phase θ _ccw of the CCW component included in the output signal of the two-dimensional vibrating element 15 based on the output from the LPF 33b and the LPF 34b Part 35b.

The detector 31b includes a multiplier 310b to which a component in the X-axis direction of the output from the two-dimensional vibrating element 15 is input, and an output to which the output from the two-dimensional vibrating element 15 is input. The multiplier 311b of the component in the Y-axis direction and the adder 312b which adds the output of each of the multipliers 310b and 311b. The detector 32b includes a multiplier 320b to which a component in the X-axis direction of the output from the two-dimensional vibrating element 15 is input, and an output to which the output from the two-dimensional vibrating element 15 is input. The multiplier 321b of the component in the Y-axis direction and the adder 322b which adds the output of each of the multipliers 320b and 321b.

Further, in this example, the CCW-I component in the X-axis direction is set to the -sin signal, and the CCW-I component in the Y-axis direction is set to the cos signal, and the CCW-Q component in the X-axis direction is set to -cos signal, and set the CCW-Q component in the Y-axis direction to the -sin signal.

"Example of operation of gyroscope device"

Next, an operation example of the gyro apparatus 10 will be described with reference to Figs. 10 to 12 . The drive signal generating unit 20 generates a drive signal for the two-dimensional vibrating element 15. The signal fed back from the PID control unit 52a for each of the cos _cw signal and the -sin _cw signal is multiplied by the multipliers 201 and 202, and then output from the multiplier 201. The signal is supplied to the adder 205, and the output signal from the multiplier 202 is supplied to the adder 206. The signal fed back from the PID control unit 52b for each of the -cos _ccw signal and the -sin _ccw signal is multiplied by the multipliers 203, 204, and then from the multiplier 203. The output signal is supplied to the adder 205, and the output signal from the multiplier 204 is supplied to the adder 206. The adder 205 adds and outputs an output signal from the multiplier 201 and an output signal from the multiplier 203. After the output signal coming from the adder 205 by the amplifier 61a and amplified with an appropriate amplification factor made, as an input X _d is input to the vibration member 15 at two-dimensional. On the other hand, the adder 206 adds and outputs the output signal from the multiplier 202 and the output signal from the multiplier 204. After the output signal coming from the adder 206 by the amplifier 61b and amplified with an appropriate amplification factor made, as an input Y _d is input to a two-dimensional vibrating element at 15.

By inputting X _d and Y _d , the two-dimensional vibrating element 15 is excited, and the outputs X _s and Y _s from the two-dimensional vibrating element 15 are obtained. After the outputs X _s and Y _s from the two-dimensional vibrating element 15 are amplified by the amplifiers 62a and 62b at an appropriate amplification factor, the output X _s is branched and input to the first and second detections. portions 30a, 30b of each of the persons, the output Y _s train is inputted to the bifurcation and the first and second detection portions 30a, 30b of the respective person.

The first detecting unit 30a detects the CW component included in the output of the two-dimensional vibrating element 15. Specifically, the detector 31a in the first detecting unit 30a performs detection using the signal CW-I, and detects the result in the two-dimensional vibration element 15 by performing filtering processing by the LPF 33a on the result. The CW-I component included in the output is supplied to the amplitude phase detecting portion 35a. Further, the detector 32a in the first detecting unit 30a performs detection using the signal CW-Q, and detects the output of the two-dimensional vibrating element 15 by performing filtering processing by the LPF 34a on the result. The CW-Q component included in the CW-Q component is supplied to the amplitude phase detecting portion 35a. The amplitude phase detecting unit 35a detects the amplitude r _cw and the phase θ _cw of the CW component included in the output signal of the two-dimensional vibrating element 15 based on the outputs from the LPF 33a and the LPF 34a. That is, as described above, by performing synchronous detection by using each of the signal CW-I and the signal CW-Q as a reference signal, it is possible to detect only the CW component included in the output of the two-dimensional vibration element 15. come out.

The phase θ _cw detected by the first detecting unit 30a is supplied to the first PLL circuit 40a. The phase comparator 41a in the first PLL circuit 40a compares the phase θ _cw with the set phase θ _cw,set (described as θ _{cw and set} =0 in the following description), based on the comparison result. The PID control unit 42a performs control for making the phase θ _cw 0, that is, the resonance frequency f _cw . The oscillator 43a is controlled by the output from the PID control unit 42a, whereby the signal sin _cw and the signal cos _cw which match the phase (in other words, the resonance frequency f _cw ) are output from the oscillator 43a. These signals are fed back to the input side and control is performed such that the resonant frequency of the drive signal corresponding to the CW mode is maintained at the resonant frequency f _cw . Further, the signal sin _cw and the signal cos _cw are fed back to the first detecting unit 30a, and based on this, a signal CW-I and a signal CW-Q as reference signals are generated. In this example, the relationship between sin=sin _cw , cos=cos _cw , and -sin=-1*sin _cw is established between the signal being fed back and the reference signal.

The amplitude r _cw obtained by the first detecting unit 30a is supplied to the first AGC unit 50a. The amplitude comparator 51a in the first AGC unit 50a compares the amplitude r _cw with the specific first set values R _{set and cw} , and based on the comparison result, the PID control unit 52a performs the first step of setting the amplitude r _{cw to} be specific. Set the value of R _{set, cw} control. The output from the PID control unit 52a is fed back to the drive signal generating unit 20, and the amplitude of the drive signal corresponding to the CW mode is maintained at the first set value R _{set, cw} . Control of gain control.

The same processing is performed for detecting the CCW component included in the output of the two-dimensional vibration element 15. Specifically, the detector 31b in the second detecting unit 30b performs detection using the signal CCW-I, and detects the result in the 2-dimensional vibrating element 15 by performing filtering processing by the LPF 33b on the result. The CCW-I component included in the output is supplied to the amplitude phase detecting unit 35b. Further, the detector 32b in the second detecting unit 30b performs detection using the signal CCW-Q, and detects the output of the two-dimensional vibrating element 15 by performing filtering processing by the LPF 34b on the result. The CCW-Q component included in the component is supplied to the amplitude phase detecting portion 35b. The amplitude phase detecting unit 35b detects the amplitude r _ccw and the phase θ _ccw of the CCW component included in the output signal of the two-dimensional vibrating element 15 based on the outputs from the LPF 33b and the LPF 34b. That is, as described above, by performing synchronous detection using each of the signals CCW-I and CCW-Q as reference signals, it is possible to detect only the CCW components included in the output of the two-dimensional vibration element 15. come out.

The amplitude r _ccw obtained by the second detecting unit 30b is supplied to the second PLL circuit 40b. The phase comparator 41b in the second PLL circuit 40b compares the phase θ _ccw with 0, and based on the comparison result, the PID control unit 42b _performs control for making the phase θ _cbw 0, that is, the resonance frequency f _cw . The oscillator 43b is controlled by the output from the PID control unit 42b, whereby the signal sin _ccw and the signal cos _ccw which match the phase (in other words, the resonance frequency f _ccw ) are output from the oscillator 43b. The resonance frequency f _ccw is fed back to the input side, and control is performed to maintain the resonance frequency of the drive signal corresponding to the CCW mode at the resonance frequency f _ccw . Further, the signal sin _ccw and the signal cos _ccw are fed back to the second detecting unit 30b, and based on this, a signal CCW-I and a signal CCW-Q are generated as reference signals. In this example, the relationship between -sin=sin _ccw , cos=cos _ccw , and -cos=-1*cos _ccw is established between the signal being fed back and the reference signal.

The amplitude r _ccw obtained by the second detecting unit 30b is supplied to the second AGC unit 50b. The amplitude comparator 51b in the second AGC unit 50b compares the amplitude r _ccw with the second set value R _{set and ccw} , and based on the comparison result, the PID control unit 52 b _performs the amplitude r _ccw to the second set value R _{set . , ccw} control. The output from the PID control unit 52b is fed back to the drive signal generating unit 20, and the amplitude of the drive signal corresponding to the CCW mode is maintained at the second set value R _{set, ccw} . Control of gain control.

Figure 13 is a diagram showing a schematic representation of the flow of signals in the gyroscope device 10. In Figure 13, the thick line represents the flow of the signal. The CCW component included in the output of the two-dimensional vibration element 15 is cut off by the first detecting unit 30a, and is looped only to one of the CW components (the upper side in FIG. 13). Department). The CW component included in the output of the two-dimensional vibration element 15 is cut off by the second detecting unit 30b, and only the CCW component is looped to the other side (the lower side in FIG. 13). Department).

"Example of the configuration of the angular velocity detecting unit"

Next, a configuration example of the angular velocity detecting unit (angular velocity detecting unit 70) according to the first embodiment of the present invention will be described. Further, although the angular velocity detecting unit 70 is described as being incorporated in the gyro device 10, it may be incorporated into another device.

FIG. 14 is a view showing a configuration example of the angular velocity detecting unit 27. The angular velocity detecting unit 70 includes, for example, a subtractor 71 and a multiplier 72. The angular velocity detecting unit 70 obtains the resonance frequency f _cw output from the first PLL circuit 40a and the resonance frequency f _CCW output from the second PLL circuit 40b, and reduces the two resonance frequencies by the subtractor 71, and then subtracts As a result, the multiplier 72 is set to a multiple (in the case of an ideal vibrating element, it is 1/2 times). In other words, the angular velocity detecting unit 70 detects the rotational angular velocity Ω _z by performing the same calculation as in the above Equation 3. By integrating this rotational angular velocity Ω _z , the gyro device 10 can detect the rotated angle.

"effect"

According to the first embodiment of the present invention, the following effects can be obtained. Since it is constituted by a single two-dimensional vibration element, it is possible to miniaturize the device, and it is also unnecessary to make the characteristics and environment of the vibration element generally as in the case where a plurality of vibration elements are used. Consistent with each other. Further, since the single two-dimensional vibration element is driven by the modal matching, it is possible to realize a high-Q value and realize a high-performance gyro device. Further, the components corresponding to the CW and CCW modes can be independently detected from the output of the two-dimensional vibration element, and the rotational angular velocity can be detected based on the detection results, and finally, the rotated state can be detected. angle.

<2. Second embodiment>

Next, the second embodiment will be described. In the following description, the same names and component symbols are denoted by the same or similar components unless otherwise specified, and the description thereof will be omitted as appropriate. The second embodiment is an embodiment in which a gyro device is used as a full angle mode (also referred to as an integral gyro or the like, and is a representative example, a Foucault pendulum). The full-angle modal gyroscope device is capable of detecting the angle of rotation.

Referring to Figure 15, a schematic illustration of the full angle mode is provided. If the vibration element is given a rotation of the CW mode (resonance frequency ω + Ω _z ) and the CCW mode (resonance frequency ω - Ω _z ), then the amplitudes of the two rotations are the same and there is no phase difference Φ (Φ = In the case of 0), it is a linear vibration as shown in Fig. 15A. Here, if rotation is applied to the vibrating element, a phase difference Φ occurs due to the phase difference Φ, and as shown in Fig. 15B, the direction of the vibration is rotated. The angle of rotation in the direction of vibration is 1/2 of the phase difference Φ, which is well known. For example, Fig. 15B shows an example in which the phase difference Φ is 60 degrees, and the direction of vibration is a rotation of the amount of 1/2 (30 degrees) of the phase difference Φ. That is, in the gyroscopic apparatus of the full-angle mode, the phase difference Φ is detected, and by multiplying the phase difference Φ by 1/2, the rotated angle can be detected.

The gyro device of the second embodiment can be configured in the same manner as the gyro device 10 of the first embodiment described above. In the configuration of the gyro device 10, a configuration for detecting the rotation angle may be provided. FIG. 16A is a view showing a configuration example of an angle detecting unit (angle detecting unit 80a) that detects a rotation angle. The angle detecting unit 80a includes a reducer 81a and a multiplier 82a. If the phase of each mode of CW and CCW is different from θ _cw , θ _CCW (these are the phases of the actual vibration of the excitation signal with respect to each mode), θ' _cw , θ ' _CCW , then these can be obtained, for example, by reading internal variables of the NCO or the like. At the subtractor 81a, the phases θ' _cw and θ' _CCW are input. The subtracter 81a subtracts the phase θ' _cw and the phase θ' _CCW to obtain a phase difference Φ, and sets the result by a fixed number of times by the multiplier 82a (in the ideal XY vibration element, 1/2 times), whereby the angle of rotation can be detected.

Fig. 16B is a view showing another configuration example of the angle detecting portion. The angle detecting unit 80b shown in FIG. 16B includes, for example, a demodulating unit 81b, a phase difference detecting unit 82b that detects at least a phase difference, and a multiplier 83b. The demodulation unit 81b demodulates (synchronously detects) the cos _CCW signal supplied from the second PLL circuit 40b using the cos _cw signal and the sin _cw signal. Based on the result, the phase difference detecting unit 82b detects the phase difference Φ, and causes the multiplier 83b to set the detected phase difference Φ to a fixed number (in the ideal XY vibration element, it is 1/1). 2 times), the rotation angle can be detected.

Further, the angle detecting units 80a and 80b may be incorporated in another device different from the gyro device 10, and the other device may perform the process of detecting the rotation angle. Further, the gyro device 10 may include an angular velocity detecting unit 70 (refer to FIG. 14) and The angle detecting unit 80a (which may be the angle detecting unit 80b) is configured. With this configuration, it is possible to create a gyro device that corresponds to both the FM mode and the full-angle mode. Further, since the rotation angle can be detected without performing numerical integration, it is possible to avoid an occurrence of an error caused by numerical calculation, an increase in power consumption due to a calculation load, and a cause. The problem of the limitation of the width of the band caused by the calculation speed.

Further, in the second embodiment, for example, the following general modifications can be made. As in the second embodiment, the driving of the gyro device 10 in the full-angle mode can be mechanically continued even in the state where power is not provided by the same principle as the Foucault pendulum. Integral action. With this feature, intermittent control can be performed and power consumption at the gyro device 10 can be reduced.

For example, in a certain period of time, electric power is supplied from a power source (not shown), and the gyro device 10 is operated to excite the two-dimensional vibrating element 15, and then the supply of electric power is stopped, whereby The power supply of the gyro device 10 is intermittently performed. Even when the supply of electric power is stopped, the mechanical integral operation is continued while the vibration of the two-dimensional vibration element 15 continues. Of course, if the supply of the electric power is stopped, the vibration of the two-dimensional vibration element 15 is attenuated. Therefore, after a certain period of time, the supply of electric power is resumed. This control can also be used as a mode (power saving mode) different from the mode in which the normal operation is performed, for the user to set. Further, it is also possible to adopt a configuration in which a timer is provided in the gyro apparatus 10, and after the power supply is started, the supply of electric power is automatically stopped after a lapse of a certain period of time. It is also possible to stop the supply of electric power at a stage where the amplitude r _cw and the amplitude r _CCW output from the first detecting unit 30a and the second detecting unit 30b have reached a certain value. For example, the gyro device 10 is provided with a power supply unit (whether it is a primary battery, a secondary battery, a solar power generation device, or the like). It is a control unit that turns ON/OFF the switch between the power supply unit and the power supply unit (all or part of the gyro unit 10).

<3. Third embodiment>

Next, a third embodiment will be described. Unless otherwise specified, the matters described in the first and second embodiments described above can be applied to the third embodiment. Incidentally, the same components are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

The third embodiment is an embodiment for avoiding performance deterioration caused by incompleteness (X-Y asymmetry) of the vibration element. The incompleteness of the vibrating element mainly refers to the difference between the resonance frequency and the attenuation coefficient in the X and Y directions caused by the asymmetry of the structure caused by the manufacturing error of the vibrating element.

Here, an ideal vibration element (a vibration element driven by modal matching) will be described with reference to FIGS. 17 and 18. The upper part of Fig. 17A is a graph showing an example of the driving signal in the X direction. The lower section of 17A is a chart showing an example of a driving signal in the Y direction. The vertical axis in each chart represents the level of the drive signal, and the horizontal axis represents the time (t). As shown in the figure, the phase difference (Δθ) of the driving signals in the X direction and the Y direction is 90°.

Fig. 17B is a view showing the vibration in the case where the vibrating element is excited by the driving vibration shown in Fig. 17A, and the upper portion of Fig. 17B shows the vibration in the X direction in the output of the vibrating element. The lower section of Fig. 17B shows the vibration in the Y direction in the output of the vibrating element. The vibration in each direction is such that the phase of the drive signal in the corresponding direction is delayed by 90°, and the phase difference between the vibration in the X direction and the vibration in the Y direction is maintained at 90°. That is, when the vibrating element is excited by a driving signal having a phase difference of 90 in the X direction and the Y direction, ideally, as shown in FIGS. 18A and 18B At the resonance point (resonance frequency f ₀ ), the amplitudes of the vibrations in the X direction and the Y direction are the same, and the phase difference of the vibration in the X direction and the Y direction is 90°.

However, due to the incompleteness (modal mismatch) of the above-described vibration element, the vibration of the vibration element may be a vibration that is not ideal. For example, if the resonance frequencies of the X direction and the Y direction are different as shown in Fig. 19A, as shown in Fig. 19B, the phase retardation amount with respect to the vibration of the drive signal (frequency f ₀ ), The system will vary in the X and Y directions. Therefore, as shown in Fig. 19B, the phase retardation amount in the X and Y directions at the driving frequency f ₀ does not become 90°, and a phase difference ΔΦ is generated.

As a result, as shown in FIGS. 20A and 20B, due to the incompleteness of the vibrating element, there is a phase delay which is a vibration in the X direction, which is 90° with respect to the phase of the driving signal in the X direction. Smaller (or larger), the phase delay of the vibration in the Y direction is greater (or smaller) than 90° with respect to the phase of the drive signal in the Y direction. In this case, the phase difference of the vibration in the X direction and the Y direction of the excited vibration does not become 90°.

The influence of the mismatch described above on the processing system of the gyro device 10 described in the first embodiment will be described. Figure 21 is a block diagram showing the gyro device 10 in a simplified manner. In addition, as described in the first embodiment, the first detecting unit 30a detects the CW component included in the vibration of the two-dimensional vibrating element 15, and therefore, in Fig. 21, Marked as a CW detector. Similarly, since the second detecting unit 30b detects the CCW component included in the vibration of the two-dimensional vibrating element 15, it is labeled as a CCW detector in FIG.

In the above-mentioned so-called phase difference in the driving frequency, it is said that even if it is driven by CW (CCW), it is impossible to excite pure CW (CCW) vibration (in each of the X and Y directions). The phase difference of the vibration is 90° (-90°), and at the same time, the CCW (CW) component is generated.

As described in the first embodiment (refer to FIG. 13 and the like), in the gyro device 10, the system in which the components of the CW mode are circulated and the components of the CCW mode are circulated, which should be mutually Independent, however, the components of the unnecessary CCW modalities contained in the components of the CW modality pass through the CCW detector. That is, the signal having the information of the CW mode is leaked into the loop of the CCW mode, and the information of the CW mode enters the PLL (the second PLL circuit 40b) in the loop of the CCW mode. . As a result, the operation of the second PLL circuit 40b is disturbed by the components of the unnecessary CCW mode included in the CW mode, and the frequency locked by the second PLL circuit 40b is disturbed.

Further, in the above example, although an example in which a component of the CW mode component contains an unnecessary CCW mode component has been described, even if it is included in the component of the CCW mode, The same is true for the case of the necessary CW mode components. That is, the frequency locked by the first PLL circuit 40a is disturbed due to a component of the unnecessary CW mode included in the component of the CCW mode.

Therefore, in order to cope with this problem, the phase of the drive signal is previously shifted (phase adjustment processing) in order to cancel the unnecessary phase difference caused by the incompleteness of the two-dimensional vibration element 15. As shown in the upper section of FIG. 22A and FIG. 22B, respectively, for example, when the phase difference between the phase of the driving vibration in the X direction and the phase of the vibration is smaller than 90°, the driving is performed in advance. The phase of the signal is delayed by the amount corresponding to the phase difference. Further, as shown in the lower portions of Figs. 22A and 22B, respectively, for example, when the phase difference between the phase of the driving vibration in the Y direction and the phase of the vibration is larger than 90°, Make the phase of the drive signal and the phase The advance of the amount corresponding to the difference in position. Thereby, the phase difference between the vibration in the X direction and the vibration in the Y direction can be set to 90°, and the pure natural mode can be excited.

The phase difference to be compensated, for example, can be taken out based on the difference in resonance frequency. In addition, the phase difference between the vibration in the X direction and the vibration in the Y direction may be extracted by an experiment or the like in advance, and the phase of the drive signal may be delayed or advanced by the amount corresponding to the phase difference. Make compensation.

The incompleteness of the vibrating element not only causes the above-mentioned deviation of the frequency, but also causes a deviation between the Q value (attenuation) in the X direction and the Q value in the Y direction. If there is a deviation in the Q values in the X direction and the Y direction, as shown in FIG. 23 and FIG. 24, at the resonance point, the amplitude of the vibration in the X direction and the amplitude of the vibration in the Y direction may be Different. If the amplitude of the vibration in the X direction is different from the amplitude of the vibration in the Y direction, it will not become a natural vibration (circular vibration). In the same manner as described above, it is included in the vibration of the CW mode. There is a problem with the component of the CCW mode (the component of the CW mode is included in the vibration of the CCW mode).

Therefore, as shown in Fig. 25, the deviation (mismatch) of the Q value is compensated by shifting the amplitude of the drive signal in advance. For example, as shown in FIG. 25B, the amplitude of the vibration in the X direction and the amplitude of the vibration in the Y direction which are coincident at the resonance point are assumed to be the amplitude A _C . The amplitude of the driving signal in the X direction and the amplitude of the driving signal in the Y direction are offset in advance by an amount corresponding to the deviation from the amplitude A _C . In the example shown in the upper part of Fig. 25A, the amplitude of the driving signal is used as the attenuation amount of the vibration (ΔA _x ) between the amplitude of the driving signal in the X direction and the amplitude of the vibration in the X direction. Increase. In the example shown in the lower part of Fig. 25A, the amplitude of the driving signal is increased by the amount of vibration (ΔA _y ) generated between the amplitude of the driving signal in the Y direction and the amplitude of the vibration in the Y direction. The reduction. Of course, there is a case where the amplitude of the driving signal in the X direction is reduced or the amplitude of the driving signal in the Y direction is increased.

The amount of compensation for the amplitude is obtained, for example, based on the difference in Q values. In addition, it is also possible to obtain the amount of compensation of the amplitude of the most orthogonal vibration of the vibration in the X direction and the vibration in the Y direction by experiments or the like in advance, and to make the amplitude of the driving signal correspond to the amount of compensation of the amplitude. Increase or decrease.

Fig. 26 is a block diagram showing a configuration example of a gyro device (gyro device 10A) according to a third embodiment to which the above-described function for adjusting the phase or amplitude is applied. The same components as those of the gyro apparatus 10 are denoted by the same reference numerals. In addition to the configuration of the drive signal generating unit 20 in the first embodiment, the drive signal generating unit 20A of the gyro apparatus 10A further includes phase adjustment units 91, 92, 93, and 94 and amplitude adjustment units 95 and 96. , 97, 98. The phase adjustment units 91 and 92 and the amplitude adjustment units 95 and 96 constitute a first phase and amplitude adjustment unit, and the phase adjustment units 93 and 94 and the amplitude adjustment units 97 and 98 constitute a second phase and amplitude adjustment. unit.

The phase adjustment unit 91 is connected to the input section of the multiplier 201 The connection, amplitude adjustment unit 95 is connected to the output section of the multiplier 201. The phase adjustment unit 91 and the amplitude adjustment unit 95 are driving signals for the X direction of the CW mode in order to eliminate unnecessary phase difference or Q value deviation caused by the incompleteness of the two-dimensional vibration element 15. The phase adjustment processing and the amplitude adjustment processing described above are carried out.

The phase adjustment unit 92 is connected to the input section of the multiplier 202, and the amplitude adjustment unit 96 is connected to the output section of the multiplier 202. The phase adjustment unit 92 and the amplitude adjustment unit 96 are driving signals for the Y direction of the CW mode in order to eliminate unnecessary phase difference or Q value deviation caused by the incompleteness of the two-dimensional vibration element 15. The phase adjustment processing and the amplitude adjustment processing described above are carried out.

The phase adjustment unit 93 is connected to the input section of the multiplier 203, and the amplitude adjustment unit 97 is connected to the output section of the multiplier 203. The phase adjustment unit 93 and the amplitude adjustment unit 97 are driving signals for the X direction of the CCW mode in order to eliminate unnecessary phase difference or Q value deviation caused by the incompleteness of the two-dimensional vibration element 15. The phase adjustment processing and the amplitude adjustment processing described above are carried out.

The phase adjustment unit 94 is connected to the input section of the multiplier 204, and the amplitude adjustment unit 98 is connected to the output section of the multiplier 204. The phase adjustment unit 94 and the amplitude adjustment unit 98 are driving signals for the Y direction of the CCW mode in order to eliminate unnecessary phase difference or Q value deviation caused by the incompleteness of the two-dimensional vibration element 15. The phase adjustment processing and the amplitude adjustment processing described above are carried out. In addition, although each phase adjustment unit may be disposed at an output section of each multiplier, In the case where the phase of the drive signal is adjusted before the arithmetic processing (multiplication) by the multiplier, the circuit configuration can be simplified. Further, the amplitude adjustment can be realized by individually adjusting the magnifications of the multipliers 201 to 204.

The outputs of the amplitude adjustment units 95 and 97 are added by the adder 205, amplified by the amplifier 61a, and supplied to the two-dimensional vibration element 15 as the drive signal in the X direction. The outputs of the amplitude adjustment units 96 and 98 are added by the adder 206, amplified by the amplifier 61b, and supplied to the two-dimensional vibration element 15 as a drive signal in the Y direction. The two-dimensional vibration element 15 is excited by driving vibration corresponding to the direction of each. As in the above, since the phase and amplitude of the driving signal are adjusted in advance, the driving signal of the CW mode can only excite the vibration of the pure CW mode (the driving signal of the CCW mode is only excited). Pure CCW mode vibration).

The effect caused by the processing applied in the present embodiment will be described. The horizontal axis of the graph shown in Figs. 27A and 27B represents time (t) (s), and the vertical axis represents the difference between the frequency f _{cw of the} oscillator 43a and the number of cycles f _{ccw of the} oscillator 43b. f (Hz). The graph of Fig. 27A is shown for the results of the case where the processing in the present embodiment is not applied, and the graph of Fig. 27B is shown for the result of the case where the processing in the present embodiment is applied. As shown in Fig. 27A, due to the phase delay amount and the mismatch of the Q value, since the CW mode and the CCW mode are not orthogonal, even if it is rotated at a certain speed, it is still found. There are periodic variations in the frequency caused by interference. On the other hand, when the processing in the present embodiment is applied and the phase and amplitude of the driving signal are adjusted, the orthogonality between the modes is added, and it is not found as shown in Fig. 27A. The periodic variation of the general frequency. Therefore, the angular velocity can be detected correctly.

The processing described in the third embodiment can also be applied to the second embodiment (the all-angle mode gyro device). In this case, the same effect can be obtained. Explain this effect. The horizontal axis of the graph shown in Figs. 28A and 28B represents time (t) (s), and the vertical axis represents the rotation angle θ detected by the gyro device of the second embodiment. The graph of Fig. 28A is shown for the results of the case where the processing in the present embodiment is not applied, and the graph of Fig. 28B is shown for the result of the case where the processing in the present embodiment is applied. Since the two-dimensional vibrating element 15 is rotated at a certain angular velocity, the detected angle should become a straight line, but as shown in Fig. 28A, the difference in phase retardation due to the direction is caused. And the mismatch of the Q values, there is a periodic error in the detected angle. On the other hand, when the processing in the present embodiment is applied and the phase and amplitude of the drive signal are adjusted, the orthogonality between the modes is added, and it is not found as shown in Fig. 28A. General periodic error. Therefore, the angle can be detected correctly.

<4. Modifications>

The above is specific to the embodiment of the present invention. It should be noted that the present invention is not limited to the above embodiments, and various modifications can be made.

In the present invention, the shape and the excitation method (electrostatic, electromagnetic, piezoelectric, etc.) are not limited to a specific method or the like as long as it is a vibration element that is modally matched in a two-dimensional manner.

The circuit for processing the output of the two-dimensional vibration element 15 can be configured by an integrated circuit such as an ASIC (Application Specific Integrated Circuit).

The gyro device 10 may be configured to include other circuit elements or the like within a range in which the effects of the present invention can be exerted.

The gyro device of the present invention can also be incorporated into other devices (for example, various electronic devices such as game machines, video cameras, smart phones, mobile phones, personal computers, etc.), or cars, trams, airplanes, helicopters. It is used among mobile bodies, robots, etc., such as small flying bodies and space machines.

The configurations, methods, engineering, shapes, materials, numerical values, and the like listed in the above embodiments are merely examples, and configurations, methods, shapes, materials, and numerical values different from each other may be used as needed. Wait. Further, the present invention can be realized by a device, a method, a system (cloud system or the like) formed by a plurality of devices, and the matters described in the plural embodiments and modifications, as long as the technology is not generated. Sexual contradictions can be combined with each other.

10‧‧‧Gyroscope device

15‧‧‧2 dimensional vibrating element

20‧‧‧Drive Signal Generation Department

30a‧‧‧1st detection department

30b‧‧‧2nd Detection Department

40a‧‧‧1st PLL circuit

40b‧‧‧2nd PLL circuit

41a, 41b‧‧‧ phase comparator

42a, 42b‧‧‧ PID Control Department

43a, 43b‧‧‧Oscillator

50a‧‧‧1st gain control unit

50b‧‧‧2nd gain control unit

51a, 51b‧‧‧Amplitude comparator

52a, 52b‧‧‧ PID Control Department

61a, 61b, 62a, 62b‧ ‧ amplifier

201, 202, 203, 204‧‧‧ multiplier

205, 206‧‧‧Adder

CW‧‧‧1st mode

CCW‧‧‧2nd Modal

Claims (10)

A gyro device characterized in that: a single two-dimensional vibration element is driven by a driving signal corresponding to a first rotational vibration mode and a driving signal corresponding to a second rotational vibration mode; And the first detecting unit detects an amplitude and a phase of a component corresponding to the first rotational vibration mode based on a signal output from the two-dimensional vibration element; and the second detecting unit is based on the two-dimensional The signal output from the vibrating element detects the amplitude and phase of the component corresponding to the second rotational vibration mode. The gyro device according to the first aspect of the invention, wherein the first oscillating circuit is configured to output a phase corresponding to the first rotating vibration mode based on a phase detected by the first detecting unit The first resonant frequency and phase of the state are signals that coincide with the phase detected by the first detecting unit; and the first gain control unit causes the amplitude detected by the first detecting unit to be The first set value is controlled to control the gain; and the second oscillating circuit outputs the second resonance corresponding to the second rotational vibration mode based on the phase detected by the second detecting unit. The frequency and the phase are signals that coincide with the phase detected by the second detecting unit; and The second gain control unit controls the gain so that the amplitude detected by the second detecting unit becomes the second set value. The gyro device according to the second aspect of the invention, wherein the frequency and the amplitude of the driving signal corresponding to the first rotational vibration mode are the first resonance frequency and the first setting. In response to the value, the feedback is performed, and the frequency and the amplitude of the drive signal corresponding to the second rotational vibration mode are fed back to the second resonance frequency and the second set value. The signal output from the oscillation circuit is fed back to the first detecting unit, and the signal output from the second oscillation circuit is fed back to the second detecting unit. The gyro device according to the third aspect of the invention, wherein the first detecting unit performs synchronous detection by using a signal fed back from the first oscillating circuit, and detects that the first detecting unit corresponds to the first The amplitude and phase of the component of the rotational vibration mode, the second detecting unit performs synchronous detection using a signal fed back from the second oscillation circuit, and detects a second rotational vibration mode corresponding to the second rotational vibration mode. The amplitude and phase of the component. The gyro apparatus according to any one of the first aspect of the present invention, wherein the angular velocity detecting unit detects the rotation based on the first resonance frequency and the second resonance frequency. Angular velocity. The gyro device according to any one of claims 1 to 5, wherein the angle detecting unit includes a component corresponding to the first rotational vibration mode and corresponds to the second The phase difference between the components of the rotational vibration mode is used to detect the angle of rotation. The gyro device according to any one of claims 1 to 6, wherein the gyro device is configured to supply electric power intermittently. The gyro apparatus according to any one of the first aspect of the present invention, wherein the first phase and the amplitude adjustment unit are provided for driving signals corresponding to the first rotational vibration mode. The phase and the amplitude are adjusted; and the second phase and amplitude adjustment unit adjusts the phase and amplitude of the drive signal corresponding to the second rotational vibration mode. A method for controlling a gyro device, wherein a single two-dimensional vibration element is driven by a driving signal corresponding to a first rotational vibration mode and a driving signal corresponding to a second rotational vibration mode, according to the foregoing The amplitude and phase of the component corresponding to the first rotational vibration mode are detected by the signal output from the two-dimensional vibration element, and the second rotational vibration corresponding to the second rotational vibration is detected based on the signal output from the two-dimensional vibration element. The amplitude and phase of the components of the modality. The control method of the gyro device according to the ninth application of the patent application, wherein The aforementioned two-dimensional vibration element is intermittently driven.