CN111578923A - Closed-loop control method and system for resonant gyroscope - Google Patents
Closed-loop control method and system for resonant gyroscope Download PDFInfo
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
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- G—PHYSICS
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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Abstract
The invention discloses a closed-loop control method and a closed-loop control system for a resonant gyroscope, which comprises the steps of acquiring and converting vibration displacement signals in driving and detecting directions in driving and detecting modes; the driving displacement signal generates a control signal through a driving loop, and the control signal is input into a driving electrode to excite the harmonic oscillator to vibrate in a constant amplitude manner in the driving direction; the detection displacement signal is divided into two paths, and one path is input into a detection electrode through an orthogonal error suppression loop; the other path generates a detection signal through a force balance loop and is superposed with a correction demodulation signal; demodulating and amplitude-computing the signals demodulated by the two loops respectively; summing the amplitude results and performing PID control operation to obtain a scale compensation signal; and regulating the amplitude of the disturbance feedback force signal by using the scale compensation signal, and inputting the amplitude-controlled signal into the detection electrode to realize the automatic compensation of the scale factor of the gyroscope. The method and the system realize the complete closed-loop control function of the resonant gyroscope, solve the problems of poor adaptability, time consumption, labor consumption and the like in the prior art, and improve the stability of the scale factor in the running state of the gyroscope.
Description
Technical Field
The invention relates to the technical field of resonant gyroscopes, in particular to a Micro-Electro-Mechanical System (MEMS) resonant gyroscope closed-loop control method and System.
Background
The gyroscope is a sensor for measuring the rotation motion of a carrier relative to an inertial space, is a core device in the fields of aerospace, satellite navigation, ocean-going diving, attitude measurement and the like, and has very important application value in high-end industrial equipment and accurate percussion weapons such as aerospace, intelligent robots, guided munitions and the like. The traditional gyroscopes comprise a mechanical rotor gyroscope, an electrostatic gyroscope, a hemispherical resonator gyroscope, a laser gyroscope, a fiber optic gyroscope and the like, which have generally higher precision, but have the disadvantages of large volume, high power consumption, high price and the like, and are increasingly difficult to adapt to the requirements of small volume and low power consumption in the information age. The MEMS gyroscope based on the MEMS technology has the characteristics of small volume, low power consumption, long service life, batch production, low price and the like, and has inherent advantages in the application of large-batch and small-volume industrial and weaponry. However, compared with the traditional gyroscope, the precision of the current MEMS gyroscope is not high enough, and the application is mainly limited to the low-end fields of smart phones, micro unmanned planes, automobile stability control systems and the like. The MEMS gyroscope with high performance, small volume, low power consumption and low cost is urgently needed in emerging fields of satellite navigation, anti-interference and anti-cheating, indoor navigation, microminiature underwater unmanned platforms, individual soldier positioning, underground orientation while drilling systems and the like.
The scaling factor refers to the ratio between the gyro output data and the input angular velocity, i.e., the magnitude of the gyro output value corresponding to the unit angular velocity input. For the resonant micro-mechanical gyroscope, no matter in an open-loop control mode or a force balance closed-loop control mode, the change of external environment factors (especially temperature) can generate serious influence on the size of the scale factor, so that the stability and repeatability of the scale factor are poor. For a high-precision navigation system, the instability of the scale factor can cause a great accumulated error, and the exertion of the gyro precision level is limited. The traditional scale factor control method is mainly a fitting compensation method based on test data of scale factors and system parameters changing along with the environment, a large amount of early data tests are needed to determine a fitting compensation function, and meanwhile, the gyroscope is required to keep good stability so as to ensure the overall compensation precision. Such a method is not only time and labor consuming, but also difficult to adapt to a spinning top whose state may change. Therefore, the closed-loop method for researching the scale factor of the gyroscope has important significance and value for improving the stability of the scale factor.
Disclosure of Invention
The invention provides a closed-loop control method and system for a resonant gyroscope and the gyroscope, which are used for overcoming the defects that the prior art is poor in adaptability due to high requirement on the stability of the gyroscope, time and labor are consumed due to the fact that a large amount of early-stage data is needed, and the like.
In order to achieve the above object, the present invention provides a closed-loop control method for a resonant gyroscope, comprising the following steps:
the second signal is divided into two paths, one path generates a control signal after orthogonal demodulation and processing and inputs the control signal into an orthogonal error trimming electrode to inhibit an orthogonal error signal; the other path generates an angular velocity detection signal, namely a gyro output signal, after being demodulated and processed by a force balance loop, and the gyro output signal and a correction demodulation signal are superposed to obtain a feedback force signal with disturbance;
In order to achieve the above object, the present invention further provides a resonant gyroscope closed-loop control system, including:
the driving loop is used for converting and demodulating, controlling and modulating the input first signal in a closed loop mode under a driving mode, and finally generating a driving control signal to be input into the driving electrode so as to excite the harmonic oscillator to vibrate in a constant amplitude mode in the driving direction; the first signal is used for representing the vibration displacement of the gyroscope driving direction;
the detection loop is used for detecting the axial angular velocity input by the gyroscope; the method comprises the following steps:
the orthogonal error suppression loop is used for demodulating and processing the input second signal to generate an orthogonal control signal and inputting the orthogonal control signal into the orthogonal error trimming electrode under the detection mode so as to suppress the orthogonal error signal;
a force balance loop, which is used for demodulating and processing an input second signal to generate a detection signal of the angular velocity in the detection mode, wherein the signal can generate an electrostatic force after being input into the detection electrode, and the electrostatic force is used for offsetting the Coriolis force generated by the input angular velocity, so that the harmonic oscillator maintains a static balance state in the detection direction; the second signal is used for representing the vibration displacement of the gyroscope in the detection direction;
the scale compensation loop is used for respectively carrying out signal demodulation and amplitude calculation on the signal demodulated by the quadrature error suppression loop and the signal demodulated by the force balance loop; carrying out PID control operation with the amplitude value as a target to obtain a scale compensation signal;
and the force balance loop is also used for carrying out amplitude operation on the superposed angular velocity detection signal and the corrected and demodulated signal and the scale compensation signal and inputting the superposed angular velocity detection signal and the corrected and demodulated signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.
The closed-loop control method and the system of the resonant gyroscope provided by the invention adjust the output of the gyroscope through the scale compensation loop on the basis of the closed-loop control of the quadrature error suppression loop and the detection of the force balance loop, thereby realizing the control of the scale factor, compensating the variable quantity of the scale factor along with the environment, and ensuring the stability of the scale factor while realizing the detection of the gyro low-noise angular velocity.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1a is a schematic diagram of a first mode, i.e., a driving mode, in a degenerate mode of a resonant micro-electromechanical gyroscope;
FIG. 1b is a schematic diagram of a second mode, i.e., a detection mode, in the degenerate mode of the resonant micro-electromechanical gyroscope;
fig. 2 is a flow chart of measuring angular velocity in a force balance mode in the resonant gyroscope closed-loop control method according to an embodiment of the present invention;
fig. 3 is a flowchart illustrating a scale factor compensation loop in the resonant gyroscope closed-loop control method according to an embodiment of the present invention;
fig. 4 is a schematic block diagram of a resonant gyro closed-loop control system according to a second embodiment of the present invention;
FIG. 5 is a block diagram showing a detailed structure of a scale compensation loop (scale factor control loop);
FIG. 6 is a simulation result of a drive loop;
FIG. 7 is a simulation result of a quadrature error suppression loop;
FIG. 8 is a simulation result of a force balancing loop;
fig. 9 is a graph of the gyro steady state output at different angular velocities.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all directional indicators (such as up, down, left, right, front, and back) in the embodiments of the present invention are only used to explain the relative position relationship between the components, the motion situation, and the like in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; the connection can be mechanical connection, electrical connection, physical connection or wireless communication connection; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Example one
As shown in fig. 1a, 1b, 2, and 3, an embodiment of the present invention provides a closed-loop control method for a resonant gyroscope, including the following steps:
the second signal is divided into two paths, one path generates a control signal after orthogonal demodulation and processing and inputs the control signal into an orthogonal error trimming electrode to inhibit an orthogonal error signal; the other path generates an angular velocity detection signal, namely a gyro output signal, after being demodulated and processed by a force balance loop, and the gyro output signal and a correction demodulation signal are superposed to obtain a feedback force signal with disturbance; in an embodiment of the present invention, the calibration demodulation signal may be externally loaded on the gyroscope through other circuits or devices to be superimposed with the gyroscope output signal;
drive modality see fig. 1 a; detection mode referring to fig. 1b, steps 1 and 2 can both adopt known technology;
Referring to fig. 3, a correction demodulation signal is superimposed on a detection signal of an axial angular velocity of the gyro output from the force balance loop, vibration response of a detection axis (see a double-arrow line segment in fig. 1 b) of the gyro is detected, the signal is subjected to in-phase demodulation and quadrature demodulation, the obtained signal is input into the correction loop (a part in a dashed line frame) shown in fig. 5, the correction demodulation signal is subjected to in-phase demodulation and quadrature demodulation, and finally amplitude extraction is realized through a multiplier and an adder, so that influences of a secondary demodulation phase error and a correction demodulation phase error of the demodulation signal are eliminated.
Preferably, the step 3 comprises the steps of:
step 31, demodulating the processed second signal by a quadrature demodulator to generate a quadrature input signal, and demodulating the processed second signal by an in-phase demodulator to generate an in-phase input signal;
step 32, simultaneously inputting an in-phase demodulation signal and an orthogonal demodulation signal, and respectively demodulating the orthogonal input signal and the in-phase demodulation signal to generate four amplitude values;
step 33, performing multiplication, filtering and multiplication operation on the four amplitudes respectively, and summing the four amplitudes to obtain a final amplitude;
step 34, performing PID control operation on the amplitude by taking a preset value as a target to obtain a scale compensation signal and outputting the scale compensation signal;
and step 35, multiplying the superposed angular velocity detection signal and the corrected and demodulated signal with the scale factor compensation signal and inputting the multiplied angular velocity detection signal and the scale factor compensation signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.
Preferably, said step 32 comprises the steps of:
step 321, performing in-phase same-frequency demodulation on the orthogonal input signal by the in-phase demodulation signal to generate a first amplitude;
322, the in-phase demodulation signal performs in-phase same-frequency demodulation on the in-phase input signal to generate a second amplitude;
step 323, the orthogonal demodulation signal performs 90-degree phase difference co-frequency demodulation on the orthogonal input signal to generate a third amplitude;
in step 324, the quadrature demodulation signal performs a 90-degree phase difference co-frequency demodulation on the in-phase input signal to generate a fourth amplitude.
Preferably, said step 33 comprises the steps of:
step 331, sequentially performing first multiplication, filtering and second multiplication on the first amplitude to obtain a fifth amplitude;
step 332, sequentially performing primary multiplication, filtering and secondary multiplication on the second amplitude to obtain a sixth amplitude;
step 333, sequentially performing primary multiplication, filtering and secondary multiplication on the third amplitude to obtain a seventh amplitude;
step 334, sequentially performing primary multiplication, filtering and secondary multiplication on the fourth amplitude to obtain an eighth amplitude;
and step 335, adding the fifth amplitude, the sixth amplitude, the seventh amplitude and the eighth amplitude to obtain a final amplitude for extraction.
Preferably, said step 35 comprises the steps of:
351, inputting a modulation excitation signal with the same frequency as the in-phase demodulation signal and the orthogonal demodulation signal, and superposing the modulation excitation signal with the same frequency as the in-phase demodulation signal and the orthogonal demodulation signal with the axial angular velocity detection signal to obtain a feedback force signal with disturbance;
step 352, multiplying the disturbed feedback force signal by the scale factor compensation signal;
and step 353, inputting the calculated signal to the detection electrode after detection modulation and conversion.
The gyro disclosed by the patent is a resonant gyro which works in a force balance control mode. The resonance type gyroscope is of a full-symmetrical structure, such as a hemispherical shape, a circular ring shape, a nested ring shape, a honeycomb shape and the like. The working mode of the gyroscope is a second-order elliptic degenerated mode, namely the driving mode of a harmonic oscillator of the gyroscope is the same as the detection mode, as shown in fig. 1. The working principle is as follows: exciting a driving mode of the harmonic oscillator at a specific frequency in an electrostatic force driving mode, wherein the driving mode is a standing wave with the annular wave number of 2, the amplitude at an antinode point is maximum, the amplitude at a wave node is zero, and a connecting line of the antinode points forms an inherent rigid shaft system; when an axial angular velocity is input, the harmonic oscillator generates a detection mode under the action of the Coriolis force, the vibration of the detection mode of the harmonic oscillator is converted into a sensitive electric signal in a capacitance detection mode, the sensitive electric signal is in direct proportion to the input angular velocity, and the input angular velocity information can be obtained through processing such as filtering and amplification. In addition, because a certain manufacturing error inevitably exists in the harmonic oscillator, vibration mode deviation and frequency cracking caused by the error are main factors influencing the performance of the gyroscope, electrostatic trimming is needed to realize the dynamic balance of the gyroscope, and the adjustment of the equivalent stiffness of the system is realized by applying bias voltage on a trimming control electrode at a specific position, so that the mode matching and the dynamic balance of the harmonic oscillator are realized.
Fig. 2 shows a flow chart of measuring the angular velocity of the force feedback mode control model of the resonant gyroscope. When the gyroscope works, a driving shaft of the gyroscope is kept in a constant amplitude vibration state through the control of the automatic gain loop and the phase-locked loop in the driving direction; in the detection direction, the quadrature error signals are suppressed through a quadrature error suppression loop, and finally low-noise angular velocity detection is realized through a force balance loop. And the output of the PID controller of the force feedback loop is the output of the detection angular velocity of the gyroscope. In the case of stable loop control, the electrostatic force at the input of the sensing shaft should completely cancel the coriolis force caused by the angular velocity. The output of the in-phase force feedback loop PID controller is the detection angular speed output of the gyroscope. In the case of stable loop control, the electrostatic force at the input of the sensing shaft should completely cancel the coriolis force caused by the angular velocity. Without considering the frequency splitting (i.e. the driving modal frequency is exactly equal to the detection modal frequency), we can:
FElectric＝FCoriolis
namely:
wherein FElectricFor feedback of electrostatic force, FCoriolisIs the Coriolis force, is the dielectric constant, omega is the input angular velocity, omegadFor the resonant frequency of the drive shaft, n is the order of the mode shape, AgAs angular gain, meffTo an equivalent mass, x0For amplitude of vibration displacement of drive shaft, AsFor measuring the area of the shaft capacitance, VdsTo detect the shaft DC bias voltage, dosFor detecting a gap in the capacitor, VoutputIs the detection output value of the gyro,
for feedback of force phase error values, omegadFor the purpose of driving the resonant frequency of the shaft,
is the drive shaft vibration speed.
From the above equation, the output of the gyroscope is:
the force balance mode closed loop scaling factor is defined as:
in the control system, the controlled quantity for driving the constant amplitude control loop is to drive the differential capacitor instead of the actual oneSo that the amplitude x of the driving displacement in the formula is required0The transformation is carried out. An expression of the differential capacitance signal output by the gyro drive electrode is set as follows:
wherein xcThe amplitude of the signal is output for the differential capacitor; at this time, the expression of the driving displacement may be set as
Wherein x0The bit drives the displacement amplitude. Amplitude of drive displacement x0Amplitude x of output signal of differential capacitorcCan be expressed as:
namely:
wherein Δ CdTo drive the capacitance variation, AdTo drive the capacitor area, d0dTo drive the capacitive gap.
Substituting the above formula into the scale factor calculation formula can obtain:
the calculation formula of the scale factor comprises parameters of modal order, angle gain, equivalent mass, driving differential capacitance amplitude set value, driving frequency, driving capacitance area, detecting capacitance area, dielectric constant, detecting direct current bias, driving capacitance gap, detecting capacitance gap and feedback force phase error, wherein the modal order, the angle gain, the equivalent mass, the driving capacitance area, the detecting capacitance area, the dielectric constant and the detecting direct current bias can be regarded as fixed values, so that the quantity which causes the change of the scale factor is mainly analyzed theoretically, namely the driving differential capacitance amplitude set value, the driving frequency, the driving capacitance gap, the detecting capacitance gap and the feedback force phase error, wherein the scale factor is consistent with the driving differential capacitance amplitude set value, the driving frequency and the fourth power of the capacitance gap (the driving detecting capacitance gap is consistent, and varies synchronously with the environment) in inverse proportion to the feedback force phase error. In addition, frequency splitting (difference between the drive mode frequency and the detection mode frequency) also has an effect on the scaling factor.
In view of the situation, the patent provides a novel resonant gyro closed-loop control system with a scale factor self-compensation function, on the basis of orthogonal closed-loop control and force balance detection, the scale factor of the system is in a certain stable state by compensating the variation of the scale factor along with the environment through a scale factor control loop, a schematic block diagram of the whole system of a novel force balance control system 19 with the scale factor self-compensation function is shown in fig. 4, and a specific structural block diagram of a correction loop is shown in fig. 5. When the gyroscope works, capacitance changes corresponding to the vibration displacement of the gyroscope are respectively input into a driving loop and a detecting loop through the driving C-V converter 2, the detecting C-V converter 8, the driving A-D converter 3 and the detecting A-D converter 9. In the drive loop, the drive shaft of the gyro is kept in a constant amplitude vibration state by driving the phase controller 5 and the drive amplitude controller 4. In the detection loop, the quadrature error signal is suppressed by a quadrature error suppression loop (tuning axis control loop) including a quadrature demodulator 10, a quadrature suppression PID controller 11, and a quadrature trimming voltage block 12. The low noise angular velocity detection is achieved by an in-phase force balance control loop (i.e., a force balance loop) comprising an in-phase demodulation controller 13, a force feedback PID controller 14, a detection demodulation controller 15, and a detection D-a converter 18. The output of the force feedback loop PID controller 14 is a gyro output signal 105, which is the detected angular velocity output of the gyro. In addition, an additional calibration modulation signal 101 (i.e., calibration demodulation signal, which may be set to K in simplified form) is superimposed after the force feedback PID controller 14 of the in-phase force balance control loop1sinωrt) the frequency of the calibration modulation signal 101 needs to be greater than the loop bandwidth of the force balance and quadrature error rejection loop so that the gyroscope can align the signalA response is generated. After the gyroscope generates a response, an in-phase input signal 102 of an in-phase demodulation output and a quadrature input signal 103 of a quadrature demodulation output, which are obtained by detecting secondary demodulation, are input into the calibration loop on the basis of the original loop. Using in-phase correction of the demodulated signal 106 (i.e. the corrected demodulated signal is in-phase with the input modulated signal and has the same frequency, and is simply represented by K2sinωrt) and quadrature-corrected demodulated signal 107 (i.e., the corrected demodulated signal, which is the same frequency as the input modulated signal but 90 degrees out of phase, in simplified form, K3cosωrt) performs multiplication demodulation twice for each of the inphase input signal 102 and the quadrature input signal 103, and the corresponding multipliers are the first multiplier 24, the second multiplier 25, the third multiplier 26, and the fourth multiplier 27. The four demodulated outputs are filtered by a low-pass first filter 28, a second filter 29, a third filter 30, and a fourth filter 31 having cutoff frequencies lower than the frequency of the modulated signal, and the amplitudes of the filtered signals are extracted by four multipliers, namely, a fifth multiplier 32, a sixth multiplier 33, a seventh multiplier 34, and an eighth multiplier 35. The four amplitude signals are input into the adder 36, and the amplitude output by the adder 36 is input into the scale compensation loop PID controller 17, so as to obtain the scale compensation output signal 104 of the gyroscope. The scale compensation output signal 104 is multiplied by the pre-modulation force feedback signal to directly adjust the scale factor, which is determined primarily by the scale factor compensation loop PID controller set point. The work flow of the whole system is not shown in figure 3.
The theoretical analysis of the scaling factor control system is as follows. First, according to the literature [ Lynch, D., "VibratoryGyro Analysis by the Method of Averaging," Proc.2nd St.Petersburg Conf.onGyroscopic Technology and Navigation, St.Petersburg, Russia, May24-25, 1995, pp.26-34 ]. The equation of motion for the gyro detection axis can be expressed as:
wherein
k12＝ωΔω sin 2θω，
Wherein y is the detection axis vibration displacement,
in order to detect the shaft vibration speed,
for detecting shaft vibration acceleration, τyFor the time constant of the resonant structure on the detection axis, ω denotes the resonant frequency, τ denotes the time constant, fyRepresenting the force applied on the examination axis, k12Representing the stiffness coupling coefficient, c12Representing the damping coupling coefficient, ωyTo detect the shaft frequency, Δ ω represents the frequency split, and θ ω, θ τ are the stiffness and damping shaft slip angles, respectively.
The drive displacement signal, the feedback force signal and the virtual modulation voltage signal are respectively represented as:
x＝x0sin ωdt，fy＝Fycos ωdt，Vvir＝K sin ωrt
wherein the electrostatic force applied to the detection electrode is fyAmplitude of FyConsisting of two parts, one part fy1For force-balanced feedback force, amplitude FB(ii) a Another part fy2For the component of the detected axis electrostatic force generated by the virtual modulation voltage signal, the amplitude is K, and the frequency is omegarAnd t represents time, i.e.:
at this time, the detection axis motion equation may be expressed as:
namely:
the steady state solution of this equation is:
wherein M is defined for convenience of displaying results1、β1、M2、β2、M3、β3Six quantities, represented by the formula:
the steady state solution is the vibration response of the gyro detection axis after the virtual modulation signal is applied. The signals are respectively demodulated in phase and in quadrature, the obtained signals are input into a correction loop shown in figure 5, the signals are demodulated in phase and in quadrature by using a virtual modulation signal, and finally amplitude extraction is realized by using a multiplier and an adder, so that two signals are eliminatedSub-demodulation phase error and dummy modulation signal demodulation phase error. Let the final adder output signal be AddThen the expression is:
by numerical analysis, β2≈-β3So cos (β)2+β3) 1, so the above formula can be simplified as follows:
by controlling the output value of the adder in a closed loop manner by the PID controller, the main factors influencing the change of the scale factor can be eliminated. Analysis and simulation show that the correction loop can effectively inhibit scale factor change caused by the change of the driving resonant frequency and the gyro capacitance gap, but cannot inhibit scale factor change caused by frequency difference and force feedback phase error. The frequency difference change has a certain influence on the scale factor, but the influence is small in simulation, and for the fully-symmetrical mode matching gyroscope, the frequency of the driving mode and the frequency of the detection mode are basically linear along with the change of the temperature, and the coefficients are basically consistent, so that the change amount of the frequency difference is considered to be small in the temperature change process. For force feedback phase error, the influence of the force feedback phase error on the scale factor cannot be eliminated by the method, but according to the past debugging experience and test data analysis, the phase difference is basically determined by a circuit system, and the influence of external environment factors on the parameter is small and basically negligible. The two parameters of the driving resonant frequency and the driving detection capacitance gap (the driving and detection capacitance gaps are considered to be consistent and have the same variation with temperature), the variation amplitude is maximum in the variation process of the external environment (mainly temperature), and the influence on the scale factor is also maximum.
The correction demodulation signal is essentially a disturbance to the normal working state of the gyroscope, and the current state of the gyroscope is judged through the response of the gyroscope to the disturbance, so that the state is detected and controlled. The amplitude of the correction modulation signal cannot be too small, and if the amplitude is too small, the gyroscope does not respond to the disturbance, so that the state monitoring cannot be realized; but the amplitude value cannot be too large, if the amplitude value is too large, the normal working state of the gyroscope can be greatly interfered, so that the gyroscope works abnormally, and the aim of the scheme is to realize correction when the gyroscope works normally. Therefore, the amplitude of the correction signal needs to be comprehensively selected according to the characteristics of the gyroscope structure and the characteristics of the circuit.
And performing simulation verification on the control system and the control method by using Matlab Simulink software. The whole thought is as follows: firstly, a gyro resonance model and a circuit system model are established, and the accuracy of the model is verified through basic simulation. Next, how the scale factor of the gyro system changes in the case of various parameter changes is simulated separately for the case of adding a correction loop and the case of not adding a correction loop. If a parameter is changed so that the scaling factor changes accordingly when no correction loop is added, but remains substantially unchanged after the correction loop is added, the correction system can be interpreted so that the scaling factor of the system is not affected by the factor. Simulation results indicate that the system can effectively suppress the influence of the change of the driving resonant frequency and the capacitance gap on the scale factor, and the two factors are also main factors influencing the change of the scale factor.
The specific process of validity simulation verification is as follows:
verification of basic model
To facilitate the study of the effect of parameter variations on the scale factor and the function of the scale factor control loop by varying the parameters, the fundamental parameters of the resonant structure and the associated parameters of the circuitry are set as input parameters to the model, including the drive axis Q value Q1Drive shaft resonant frequency omegadAnd a detection axis Q value Q2Detecting the shaft frequency omegasInitial deflection angle theta of stiffness axisωDamping axis initial deflection angle thetaτDriving capacitor gap d0dDetecting the capacitance gap d0sDriving voltage-force conversion coefficient Dv-fDetecting the voltage-force conversion coefficient Sv-fDriving differential capacitance-to-voltage conversion coefficient Dc-vConversion system S for detecting differential capacitance-voltagec-vPhase error of feedback force
Second order demodulation phase error
And the like. As with the actual circuitry, the output of the in-phase loop PID is used as the output of the gyro system in response to the input angular velocity.
After the system model is established according to theory, the correctness of the model needs to be verified firstly, namely whether each loop works normally or not and the theoretical function of each loop is realized. The function of the driving closed loop is to realize constant amplitude vibration in the driving direction, and the judgment standard of the function is that whether the displacement output signal of the driving shaft of the gyroscope keeps stable after a period of time after the system is started. Fig. 6 is a simulation result in which upper and lower graphs respectively show the drive axis displacement signal output and the detection axis displacement signal output, the horizontal axis representing time in seconds and the vertical axis representing amplitude. In the simulation, in order to avoid disturbance, the error parameter of the stiffness off-axis angle (a factor causing the quadrature error) is set to 0, and the quadrature loop is opened. As can be seen from fig. 6, after the system was turned on, the driving displacement reached a steady state and was maintained for about 2 seconds. The driving closed loop control is normal.
Next, the quadrature error suppression loop is verified. In this simulation, the stiffness off-axis angle is set to be not 0, and a quadrature error is caused. The quadrature error appears as a detected displacement output caused by the driving displacement. When the error occurs, the quadrature error suppression circuit electrostatically adjusts the stiffness to suppress the error to 0. Fig. 7 is a simulation result in which upper and lower graphs respectively show the drive axis displacement signal output and the detection axis displacement signal output, the horizontal axis representing time in seconds and the vertical axis representing amplitude. As can be seen from the detected displacement curve, the quadrature error is gradually suppressed to 0 immediately after the quadrature error starts to appear, which indicates that the quadrature error suppression loop functions normally.
The force balance loop is then verified. Whether the force balance loop works normally is mainly shown in that after the angular speed is input into the system, whether the system can counteract the Coriolis force through the feedback force or not, the displacement in the detection direction is restrained to be 0, and the magnitude of the feedback force is in direct proportion to the magnitude of the input angular speed. In the verification, the system is started under the condition of no angular velocity input, and after the system is waited for stabilization, the angular velocities with different sizes are respectively input (0.1-0.2-0.4-0.8 in the embodiment). The simulated displacement output curves of the driving shaft and the detection shaft are shown in fig. 8, wherein the upper and lower subgraphs respectively represent the output of the driving shaft displacement signal and the output of the detection shaft displacement signal, the horizontal axis represents time, the unit is second, and the vertical axis represents amplitude. As can be seen from the detected displacement curve, after the angular velocity is input, the detected axis displacement is jittered, but is suppressed to 0 soon. Illustrating that the force feedback system is functioning.
Further, the output curves of the gyro steady state at different angular velocities are recorded, as shown in fig. 9, where the upper graph is the modulated feedback force signal, and the lower graph is the amplitude of the feedback force signal. The measured feedback force amplitudes corresponding to the input angular velocity sequence are respectively: -2.264, -4.526, -9.050, -18.10, gyro output is proportional to angular velocity input, indicating that the entire gyro model and control system is substantially accurate.
(II) analysis of scale factor influence factor under uncompensated condition
If the correction loop is added, the effect of the main scale factor on the scale factor is greatly reduced or completely eliminated, indicating that the scale factor control loop is functioning. Therefore, before verifying the validity of the scale factor correction loop, it is necessary to know the main factors that affect the scale factor.
When the simulation is verified, a group of parameters is set as a reference, and the scale factor at the moment is obtained through simulation. And then, changing various parameters of the resonance structure and the circuit system by adopting a principle of controlling variables, and measuring corresponding scale factors. Finally, the variation conditions of the parameter variable and the scale factor value are integrated and compared with the theory. For each group of parameters, when measuring the corresponding scale factor, firstly setting the input angular velocity as 0, starting simulation, and recording the PID output value of the in-phase loop at the moment after each loop of the system is controlled stably, namely the zero offset output value of the gyro system under the parameters; changing the angular velocity to 1 after recording, and recording the PID output value of the in-phase loop at the moment after the loop control of the system is stable, namely the output of the gyro system to the positive unit angular velocity; the value of the latter is subtracted by the zero offset value to obtain the scale factor corresponding to the set of parameters.
The simulation results after varying the parameters are shown in table 1. From the simulation results in the table, it can be analyzed that the Q value of the driving detection axis has no influence on the force balance mode parameters, the driving V-f coefficient has no influence on the scale, the detecting V-f coefficient is inversely proportional to the scale (the coefficient is mainly determined by the detection capacitance gap), the driving displacement-capacitance coefficient is inversely proportional to the scale (the larger the coefficient is, the smaller the driving displacement is because the driving differential capacitance is controlled in constant amplitude, the coefficient is mainly determined by the driving capacitance gap), the coefficient of the detecting displacement-capacitance coefficient has no influence on the scale, the frequency difference has little influence on the scale, the driving frequency is proportional to the scale, the gap variation and the scale are in the relation of 4 th power, the second demodulation phase error has no influence on the scale, the feedback force phase error has influence on the scale, the scale becomes cos value of the original scale multiplied by the error angle, the initial damping axis deflection angle has no influence on the scale, The initial stiffness off-axis angle has no effect on the scale. The overall simulation result is basically consistent with the theoretical analysis result.
The change of external environment factors such as temperature can cause the change of parameters such as the resonance frequency of a driving shaft of the gyroscope, capacitance clearance and the like, and the change of scale factors is caused. The traditional direct fitting method and the multi-parameter comprehensive fitting method are used for compensating the scale factors, a large amount of test data is needed, time and labor are consumed, and the compensation result is inaccurate if the state of the gyroscope changes. Therefore, a control method for the scaling factor is urgently needed to realize self-calibration of the scaling factor.
Table 1: under the condition that a scale factor correction loop is not started, the relationship between the scale factor and the parameters of a gyro system is verified through simulation
(III) Scale factor correction Loop validation
The validity of the scale factor correction loop is next verified. The method is the same as the idea of simulation verification of a scale factor calculation theory, when the effectiveness verification of the scale factor control method is carried out, a group of parameters are firstly determined as a reference, the scale factor at the moment is obtained through simulation, then, the parameters of the resonant structure and the circuit system are changed according to the principle of control variables, and the change condition of the scale factor is recorded. And according to the simulation result, synthesizing a part of simulation data, and comparing whether the influence of the change of each parameter on the scale factor is different in the standard force balance mode and the scale factor calibration control mode. The results of the simulation of the effect of parameter variation on the scaling factor after the addition of the correction loop are shown in table 2.
It can be seen from the table that with the addition of the correction loop, the scale factor variation caused by the drive resonance frequency and the gyro capacitance gap variation can be effectively suppressed, but the scale factor variation caused by the frequency difference and the force feedback phase error cannot be suppressed. The frequency difference change has a certain influence on the scale factor, but the influence is small in simulation, and for the fully-symmetrical mode matching gyroscope, the frequency of the driving mode and the frequency of the detection mode are basically linear along with the change of the temperature, and the coefficients are basically consistent, so that the change amount of the frequency difference is considered to be small in the temperature change process. For force feedback phase error, the influence of the force feedback phase error on the scale factor cannot be eliminated by the method, but according to the past debugging experience and test data analysis, the phase difference is basically determined by a circuit system, and the influence of external environment factors on the parameter is small and basically negligible. The two parameters of the driving resonant frequency and the driving detection capacitance gap (the driving and detection capacitance gaps are considered to be consistent and have the same variation with temperature), the variation amplitude is maximum in the variation process of the external environment (mainly temperature), and the influence on the scale factor is also maximum. The simulation results demonstrate the effectiveness of the scaling factor control method.
Table 2: when the scale factor correction loop is started, the change condition of the scale factor along with the main parameters is verified by simulation
Example two
Referring to fig. 4 and 5, correspondingly to the above embodiments, the present invention further provides a resonant gyro closed-loop control system, including: a drive loop, a detection loop, a scale compensation loop; the driving loop is used for converting and modulating, closed-loop controlling and modulating an input first signal in a driving mode, and finally generating a driving control signal to be input into a driving electrode so as to excite the harmonic oscillator to vibrate in a constant amplitude manner in a driving direction; the first signal is used for representing the driving direction of the gyroscope, namely the vibration displacement of the driving electrode; the detection loop is used for detecting the axial angular velocity input by the gyroscope; the detection loop includes: the orthogonal error suppression loop is used for demodulating and processing an input second signal to generate an orthogonal control signal under a detection mode, and inputting the orthogonal control signal into the orthogonal error trimming electrode to suppress an orthogonal error signal; the force balance loop is used for demodulating and processing an input second signal to generate a detection signal of the angular velocity in a detection mode, and the signal can generate electrostatic force after being input into the detection electrode and is used for offsetting the Coriolis force generated by the input angular velocity so as to enable the harmonic oscillator to maintain a static balance state in the detection direction and realize axial angular velocity detection in a stress balance state; the second signal is used for representing the detection direction of the gyroscope, namely the vibration displacement of the detection electrode; the scale compensation loop is used for respectively carrying out signal demodulation and amplitude calculation on the signal demodulated by the quadrature error suppression loop and the signal demodulated by the force balance loop; carrying out PID control operation with the amplitude value as a target to obtain a scale compensation signal; and the force balance loop is also used for carrying out amplitude operation on the superposed angular velocity detection signal and the corrected and demodulated signal and the extracted amplitude and inputting the superposed angular velocity detection signal and the corrected and demodulated signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.
Referring to fig. 4, the force balancing ring includes a detection C-V converter, a detection a-D converter, an in-phase demodulator, a force feedback PID controller, a detection modulator, and a detection D-a converter, which are sequentially connected in series;
the quadrature error suppression loop comprises a detection C-V converter, a detection A-D converter, a quadrature demodulator, a quadrature suppression PID controller and a quadrature trimming voltage module which are sequentially connected in series;
the driving loop comprises a driving C-V converter, a driving A-D converter, a driving controller, a driving modulator and a driving D-A converter which are sequentially connected in series; the driving controller is formed by connecting a driving phase controller and a driving amplitude controller in parallel. The components can adopt the existing components and can be directly purchased and obtained from the market.
Preferably, the scale compensation loop comprises: a signal generating source, a signal demodulation and amplitude extraction module 16, a scale compensation loop controller (in this embodiment, a scale compensation loop PID controller 17 is adopted); a signal generating source for generating a corrective demodulation signal having a frequency greater than the bandwidth of the quadrature error rejection loop and force balance loop input signals; so that the detection axis of the gyroscope correspondingly vibrates; the signal demodulation and amplitude extraction module 16 extracts the amplitude of the input signal demodulated by the quadrature error suppression loop and the input signal demodulated by the force balance loop after respectively demodulating and amplitude calculating the correction demodulation signal; the scale compensation loop controller performs PID control operation on the amplitude to obtain a scale compensation signal and outputs the scale compensation signal; and the force balance loop is used for multiplying the superposed axial angular velocity detection signal and the modulation and demodulation signal with the extracted amplitude value and inputting the multiplied signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.
Preferably, referring to fig. 5, the signal generating source is configured to generate an in-phase demodulation signal, a quadrature demodulation signal and a correction modulation signal of the same frequency; the signal demodulation and amplitude extraction module comprises: four amplitude operation units connected in parallel; each path of amplitude operation unit comprises a first-stage multiplier, a filter and a second-stage multiplier which are sequentially connected in series; the first amplitude value generated by carrying out in-phase and co-frequency demodulation on the in-phase demodulation signal and the orthogonal input signal, the second amplitude value generated by carrying out in-phase and co-frequency demodulation on the in-phase demodulation signal and the orthogonal demodulation signal, the third amplitude value generated by carrying out 90-degree phase difference and co-frequency demodulation on the orthogonal input signal and the fourth amplitude value generated by carrying out 90-degree phase difference and co-frequency demodulation on the in-phase input signal and the orthogonal demodulation signal are sequentially operated to generate a fifth amplitude value, a sixth amplitude value, a seventh amplitude value and an eighth amplitude value; and the adder is used for adding the generated fifth amplitude, sixth amplitude, seventh amplitude and eighth amplitude to obtain a final amplitude for extraction.
The harmonic oscillator structure of the gyroscope is made of high-thermal-conductivity materials such as monocrystalline silicon and the like, and the gyroscope comprises a plurality of groups of electrodes which are symmetrically distributed. The closed-loop control system of the resonant gyroscope adjusts the output of the gyroscope through the scale factor control loop on the basis of orthogonal closed-loop control and force balance detection, compensates the variable quantity of the scale factor along with the environment, and enables the scale factor of the system to be in a certain stable state, thereby ensuring the stability of the scale factor while realizing the detection of the gyro low-noise angular velocity.
The whole system consists of a driving loop, a quadrature error suppression loop, a force balance loop and a scale compensation loop, and can realize high-precision angular velocity signal detection and simultaneously keep the stability of a system scale factor. In the working process, capacitance change corresponding to the vibration displacement of the gyroscope is respectively input into the driving loop and the detection loop through the C-V converter and the A-D converter. In the driving loop, the driving shaft of the gyro is kept in a constant amplitude vibration state by driving the phase controller and the amplitude controller. In the detection loop, signals enter a force balance loop and a quadrature error suppression loop respectively through in-phase demodulation and quadrature demodulation. In the quadrature error suppression loop, an input signal is demodulated by a quadrature demodulator, filtered and input into a quadrature suppression PID controller, and the output of the PID controller controls a quadrature trimming voltage module to realize the closed-loop suppression of the quadrature error signal. In the force balance loop, an input signal is demodulated by an in-phase demodulator, filtered and input into a force feedback PID controller, the output of the PID controller is modulated to obtain an electrostatic force signal for counteracting the Coriolis force, and the output of the PID and the external input angular velocity are in a certain proportional relation, so that the output is the angular velocity measurement output of the gyroscope. The scale factor control loop is composed of a modulation signal module and a scale factor compensation loop, wherein the modulation signal is superposed after the output of the force feedback PID controller, the scale factor compensation loop is a double-input single-output functional loop, the input is the demodulation quantity of the force feedback loop and the quadrature control loop, and the output is a control signal for regulating and controlling the output size of the gyroscope. After the two paths of demodulation signals enter the scale factor compensation loop, in-phase multiplication demodulation and orthogonal multiplication demodulation which take the modulation signals as the reference are respectively carried out, a low-pass filter with the cut-off frequency lower than that of the modulation signals is used for filtering the thought demodulation output signals, a multiplier is used for extracting the demodulated amplitude values, and the sum of the four amplitude values is input into a PID controller to obtain a control signal for regulating and controlling the output size of the gyroscope. The design of the scale factor control loop can effectively reduce the phase error of a secondary demodulation link of a gyroscope vibration signal and the phase error of input signal demodulation of a correction loop, thereby realizing high-precision scale factor closed-loop control.
The frequency of the modulation signal in the scale compensation loop is within a certain range, if the frequency of the signal is too high, the response of the gyroscope to the modulation signal is too small, so that the input signal of the control loop is too small, the signal-to-noise ratio is very low, and the gyroscope is easily interfered by the outside, and if the frequency of the signal is too low, the signal output may influence the normal working state of the gyroscope and influence the output of the gyroscope. Therefore, the frequency of the applied modulation signal needs to be in a proper range, so that the signal input does not affect the normal working state of the gyroscope, and the gyroscope can generate a response with enough strength.
The modulation signal can be a sinusoidal signal or a periodic signal such as a square wave signal. The scale compensation loop is a multi-input single-output system, the input of the scale compensation loop is the demodulation quantity of the orthogonal loop and the force feedback loop, the output of the scale compensation loop is the output of a PID controller at the tail end of the loop, the output of the gyroscope is regulated and controlled, and the control of a scale factor is realized.
In the signal demodulation and amplitude extraction module of the scale compensation loop, two signals with the same frequency as the modulation signal and the phases of 0 degree and 90 degrees (in-phase and orthogonal) are used as demodulation signals, two modes of demodulation are carried out on the two input signals, and the amplitude of each path of demodulation signal is calculated through the multiplication operation of the signal. The scheme is applicable to any resonant gyroscope based on the Goldfish force effect. A control mode that uses the force feedback principle to suppress quadrature signals is also included.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (9)
1. A closed-loop control method for a resonant gyroscope is characterized by comprising the following steps:
step 1, collecting a first signal representing the vibration displacement of a gyroscope in a driving direction and inputting the first signal into a driving loop in a driving mode; in the detection mode, acquiring a second signal representing the vibration displacement of the gyroscope in the detection direction and inputting the second signal into a detection loop;
step 2, the first signal is converted, demodulated, closed-loop controlled and modulated to generate a driving control signal which is input into a driving electrode so as to excite the harmonic oscillator to vibrate in a driving direction at a constant amplitude;
the second signal is divided into two paths, one path generates a control signal after orthogonal demodulation and processing and inputs the control signal into an orthogonal error trimming electrode to inhibit an orthogonal error signal; the other path generates an angular velocity detection signal, namely a gyro output signal, after being demodulated and processed by a force balance loop, and the gyro output signal and a correction demodulation signal are superposed to obtain a feedback force signal with disturbance;
step 3, respectively carrying out signal demodulation and amplitude extraction operation on the signal demodulated by the quadrature error suppression loop and the signal demodulated by the force balance loop; calculating the amplitude to obtain a scale compensation signal; and superposing the angular velocity detection signal and the correction demodulation signal, and then carrying out amplitude calculation on the angular velocity detection signal and the scale compensation signal, inputting the obtained signal into a detection electrode, and controlling the amplitude of the disturbance feedback force signal by the scale compensation signal so as to realize automatic compensation of the scale factor of the gyroscope.
2. A resonant gyro closed-loop control method according to claim 1, characterized in that the step 3 comprises the steps of:
step 31, demodulating the processed second signal by a quadrature demodulator to generate a quadrature input signal, and demodulating the processed second signal by an in-phase demodulator to generate an in-phase input signal;
step 32, simultaneously inputting an in-phase demodulation signal and an orthogonal demodulation signal, and respectively demodulating the orthogonal input signal and the in-phase demodulation signal to generate four amplitude values;
step 33, performing multiplication, filtering and multiplication operation on the four amplitudes respectively, and summing the four amplitudes to obtain a final amplitude;
step 34, performing PID control operation on the amplitude by taking a preset value as a target to obtain a scale compensation signal and outputting the scale compensation signal;
and step 35, multiplying the superposed angular velocity detection signal and the corrected and demodulated signal with the scale factor compensation signal and inputting the multiplied angular velocity detection signal and the scale factor compensation signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.
3. A resonant gyro closed-loop control method as claimed in claim 2, wherein the step 32 comprises the steps of:
step 321, performing in-phase same-frequency demodulation on the orthogonal input signal by the in-phase demodulation signal to generate a first amplitude;
322, the in-phase demodulation signal performs in-phase same-frequency demodulation on the in-phase input signal to generate a second amplitude;
step 323, the orthogonal demodulation signal performs 90-degree phase difference co-frequency demodulation on the orthogonal input signal to generate a third amplitude;
in step 324, the quadrature demodulation signal performs a 90-degree phase difference co-frequency demodulation on the in-phase input signal to generate a fourth amplitude.
4. A resonant gyro closed-loop control method according to claim 3, characterized in that the step 33 comprises the steps of:
step 331, sequentially performing first multiplication, filtering and second multiplication on the first amplitude to obtain a fifth amplitude;
step 332, sequentially performing primary multiplication, filtering and secondary multiplication on the second amplitude to obtain a sixth amplitude;
step 333, sequentially performing primary multiplication, filtering and secondary multiplication on the third amplitude to obtain a seventh amplitude;
step 334, sequentially performing primary multiplication, filtering and secondary multiplication on the fourth amplitude to obtain an eighth amplitude;
and step 335, adding the fifth amplitude, the sixth amplitude, the seventh amplitude and the eighth amplitude to obtain a final amplitude for extraction.
5. A resonant gyro closed-loop control method according to claim 4, characterized in that the step 35 comprises the steps of:
step 351, inputting a modulation excitation signal with the same frequency as the in-phase demodulation signal and the orthogonal demodulation signal, and superposing the modulation excitation signal with the same frequency as the in-phase demodulation signal and the orthogonal demodulation signal with the angular velocity detection signal to obtain a feedback force signal with disturbance;
step 352, multiplying the disturbed feedback force signal by the scale factor compensation signal;
and step 353, inputting the calculated signal to the detection electrode after detection modulation and conversion.
6. A resonant gyro closed-loop control system, comprising:
the driving loop is used for converting and demodulating, controlling and modulating the input first signal in a closed loop mode under a driving mode, and finally generating a driving control signal to be input into the driving electrode so as to excite the harmonic oscillator to vibrate in a constant amplitude mode in the driving direction; the first signal is used for representing the vibration displacement of the gyroscope driving direction;
the detection loop is used for detecting the axial angular velocity input by the gyroscope; the method comprises the following steps:
the orthogonal error suppression loop is used for demodulating and processing the input second signal to generate an orthogonal control signal and inputting the orthogonal control signal into the orthogonal error trimming electrode under the detection mode so as to suppress the orthogonal error signal;
a force balance loop, which is used for demodulating and processing an input second signal to generate a detection signal of the angular velocity in the detection mode, wherein the signal can generate an electrostatic force after being input into the detection electrode, and the electrostatic force is used for offsetting the Coriolis force generated by the input angular velocity, so that the harmonic oscillator maintains a static balance state in the detection direction; the second signal is used for representing the vibration displacement of the gyroscope in the detection direction;
the scale compensation loop is used for respectively carrying out signal demodulation and amplitude calculation on the signal demodulated by the quadrature error suppression loop and the signal demodulated by the force balance loop; carrying out PID control operation with the amplitude value as a target to obtain a scale compensation signal;
and the force balance loop is also used for carrying out amplitude operation on the superposed angular velocity detection signal and the corrected and demodulated signal and the scale compensation signal and inputting the superposed angular velocity detection signal and the corrected and demodulated signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.
7. A resonant gyro closed loop control system in accordance with claim 6 wherein the force balance loop includes an in-phase demodulator; the quadrature error suppression loop comprises a quadrature demodulator;
a scale compensation loop comprising:
a signal generating source for generating a corrective demodulation signal having a frequency greater than the bandwidth of the quadrature error rejection loop and force balance loop input signals;
the signal demodulation and amplitude extraction module is used for respectively carrying out signal demodulation and amplitude calculation on the input signal demodulated by the quadrature error suppression loop and the input signal demodulated by the force balance loop;
and the scale compensation loop controller is used for carrying out PID control operation on the amplitude to obtain a scale compensation signal and outputting the scale compensation signal.
8. A resonant gyro closed-loop control system in accordance with claim 7, wherein the signal generating source is adapted to generate in-phase demodulation signal, quadrature demodulation signal and correction modulation signal of the same frequency;
the signal demodulation and amplitude extraction module comprises:
four amplitude operation units connected in parallel; each path of amplitude operation unit comprises a first-stage multiplier, a filter and a second-stage multiplier which are sequentially connected in series; the first amplitude value generated by carrying out in-phase and co-frequency demodulation on the in-phase demodulation signal and the orthogonal input signal, the second amplitude value generated by carrying out in-phase and co-frequency demodulation on the in-phase demodulation signal and the orthogonal input signal, the third amplitude value generated by carrying out orthogonal and co-frequency demodulation on the orthogonal input signal and the fourth amplitude value generated by carrying out orthogonal and co-frequency demodulation on the in-phase input signal and the orthogonal demodulation signal are sequentially operated to generate a fifth amplitude value, a sixth amplitude value, a seventh amplitude value and an eighth amplitude value;
and the adder is used for adding the generated fifth amplitude, sixth amplitude, seventh amplitude and eighth amplitude to obtain a final amplitude for extraction.
9. A resonant gyroscope closed-loop control system as claimed in any one of claims 6 to 8 wherein the force balance loop further comprises a detection C-V converter, a detection A-D converter, an in-phase demodulator, a force feedback PID controller, a detection modulator and a detection D-A converter connected in series in sequence;
the quadrature error suppression loop comprises a detection C-V converter, a detection A-D converter, a quadrature demodulator, a quadrature suppression PID controller and a quadrature trimming voltage module which are sequentially connected in series;
the driving loop comprises a driving C-V converter, a driving A-D converter, a driving controller, a driving modulator and a driving D-A converter which are sequentially connected in series; the driving controller is formed by connecting a driving phase controller and a driving amplitude controller in parallel.
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