CN112629557A - Automatic test equipment of MEMS gyroscope - Google Patents
Automatic test equipment of MEMS gyroscope Download PDFInfo
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- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
Abstract
The invention discloses an automatic testing device of an MEMS gyroscope, which comprises: the temperature box is internally provided with a test board; the MEMS gyroscopes to be tested are arranged on the test bench; the industrial personal computer is connected with the incubator and the test bench; the industrial personal computer is used for sending a temperature adjusting command to the incubator, and the incubator adjusts the temperature according to the received temperature adjusting command until the temperature in the incubator reaches a preset value; the industrial personal computer is used for acquiring key information of the MEMS gyroscope to be detected, which is arranged on each channel, wherein the key information comprises Q value, frequency difference and temperature coefficient information of each MEMS gyroscope to be detected, and the key information is processed to obtain a data file containing the Q value, the frequency difference and the temperature coefficient of all the MEMS gyroscopes to be detected. The invention can integrate and collect the output signals of a plurality of MEMS gyroscopes and simply process the signals, thereby reducing the reject ratio of gyroscope products.
Description
Technical Field
The invention relates to the technical field of gyroscope testing, in particular to an automatic testing device of an MEMS gyroscope.
Background
The MEMS gyroscope is a novel gyroscope with low cost, light weight and small size, is mainly used in consumer and other low-end commercial fields, has completed the first beauty in the high-end inertial system market at present, but has a certain gap between the precision index and the stability thereof and the practical application of some industrial and tactical levels. The MEMS gyroscope is continuously improved, and through related technical attack, the price advantage and the characteristics of the MEMS gyroscope can be utilized as a new generation of gyroscope products to occupy the market in a short period.
Q value and frequency difference are key factors for restricting the precision of the gyroscope, the Q value of a gyroscope gauge head directly restricts the final precision level of the gyroscope, the frequency difference is derived from raw material errors and processing technology errors and directly influences the random drift of the gyroscope, the precision of the gyroscope is reduced, and when the external environment is changed, the temperature change of the gyroscope can cause the change of mechanical parameters and damping coefficients of the gyroscope gauge head and influence the precision of the gyroscope. The traditional performance test of the gyroscope is that a single gyroscope product is arranged in an incubator, different temperature gradients are set manually, and then data acquisition and processing are carried out through additional signal excitation acquisition equipment, so that the efficiency is low, and the consumed time is long.
Disclosure of Invention
The invention aims to provide the automatic test equipment for the MEMS gyroscope, which realizes the functions of integrating and acquiring output signals of a plurality of MEMS gyroscope chips with controllable temperature and simply processing the signals, can reduce the delivery reject ratio of gyroscope products, ensures high-efficiency production, improves quality control and reduces the production cost.
In order to achieve the above purpose, the invention is realized by the following technical scheme:
an automated MEMS gyroscope test apparatus comprising: the temperature box is internally provided with a test board;
the MEMS gyroscopes to be tested are arranged on the test bench; each MEMS gyroscope to be tested correspondingly occupies one test channel of the test bench; the industrial personal computer is connected with the incubator and the test bench; the industrial personal computer is used for sending a temperature adjusting command to the incubator, and the incubator adjusts the temperature according to the received temperature adjusting command until the temperature in the incubator reaches a preset value; the industrial personal computer is used for acquiring key information of the MEMS gyroscope to be detected, which is arranged on each channel, wherein the key information comprises Q value, frequency difference and temperature coefficient information of each MEMS gyroscope to be detected, and the key information is processed to obtain a data file containing the Q value, the frequency difference and the temperature coefficient of all the MEMS gyroscopes to be detected.
Preferably, the method further comprises the following steps: and each drive test circuit is correspondingly connected with one MEMS gyroscope to be tested respectively. Each of the drive test circuits includes: the device comprises a C/V conversion circuit, a differential amplification circuit, an A/D conversion module and an FPGA data processing module which are connected in sequence. And a D/A conversion module and a high voltage driving circuit. And the input end of the C/V conversion circuit is correspondingly connected with the output end of the MEMS gyroscope to be tested. And the output end of the FPGA data processing module is connected with the industrial personal computer. The input end of the D/A conversion module is connected with the A/D conversion module, and the output end of the D/A conversion module is connected with the input end of the high-voltage driving circuit. And the input end of the high-voltage driving circuit is connected with the input end of the MEMS gyroscope to be tested to form a closed-loop control system.
Preferably, each high-voltage driving circuit is used for inputting driving voltage to the MEMS gyroscope to be tested according to the corresponding design parameter of the MEMS gyroscope to be tested; and the MEMS gyroscope to be tested is used for outputting a capacitance signal during working. The C/V conversion circuit is used for converting the received capacitance signal into a voltage signal. The differential amplification circuit is used for amplifying the voltage signal. The A/D conversion module is used for converting the received amplified voltage signal into a digital signal and respectively calculating the Q value, the frequency and the temperature information of the X axis and the Q value, the frequency and the temperature information of the Y axis of the MEMS gyroscope to be detected according to the data signal. And the FPGA data processing module is used for calculating the Q value, the frequency difference and the temperature coefficient of the MEMS gyroscope to be detected on the channel according to the received Q value, the frequency and the temperature information of the X axis and the Q value, the frequency and the temperature information of the Y axis.
Preferably, the D/a conversion module is configured to convert the received digital signal into an analog signal as a control voltage. And the high-voltage driving circuit provides a driving voltage signal for the MEMS gyroscope to be tested according to the received control voltage so as to maintain the resonance of the MEMS gyroscope to be tested.
Preferably, the method further comprises the following steps: the serial port card is connected with the industrial personal computer, and the serial ports are connected with the serial port card; and each serial port is correspondingly connected with the FPGA data processing module so that the industrial personal computer can acquire the Q value, the frequency difference and the temperature coefficient of each MEMS gyroscope to be tested.
Compared with the prior art, the invention has at least one of the following advantages
The automatic test equipment for the MEMS gyroscope provided by the invention realizes the functions of integrating and acquiring output signals of a plurality of MEMS gyroscope chips with controllable temperature and simply processing the signals, can reduce the reject ratio of gyroscope products, ensures high-efficiency production, improves quality control and reduces the production cost.
Drawings
Fig. 1 is a block diagram of an automated testing apparatus for a MEMS gyroscope according to an embodiment of the present invention;
FIG. 2 is a block diagram of an interface of an automated test equipment for MEMS gyroscopes according to an embodiment of the present invention;
fig. 3 is a block diagram of a drive test circuit of an automated testing apparatus for a MEMS gyroscope according to an embodiment of the present invention.
Detailed Description
The following describes an automatic testing apparatus for a MEMS gyroscope according to the present invention in detail with reference to fig. 1 to 3 and the detailed description thereof. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are all used in a non-precise scale for the purpose of facilitating and distinctly aiding in the description of the embodiments of the present invention. To make the objects, features and advantages of the present invention comprehensible, reference is made to the accompanying drawings. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the implementation conditions of the present invention, so that the present invention has no technical significance, and any structural modification, ratio relationship change or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Referring to fig. 1 and 3, the present embodiment provides an automatic testing apparatus for a MEMS gyroscope, including: an incubator (high-low temperature chamber) 300, wherein a test bench 200 is arranged in the incubator 300;
a plurality of MEMS gyroscopes to be tested 400 (each MEMS gyroscope to be tested 400 is independent of each other and occupies one test channel of the test bench 200) are disposed on the test bench 200; each MEMS gyroscope 400 to be tested correspondingly occupies one test channel of the test bench 200.
And an industrial personal computer 100 connected with the incubator 300 and the test stand 200.
The industrial personal computer 100 is configured to send a temperature adjustment command to the incubator 300, and the incubator 300 adjusts the temperature according to the received temperature adjustment command until the temperature in the incubator 300 reaches a preset value.
The industrial personal computer 100 is configured to acquire key information of the to-be-tested MEMS gyroscopes 400 set in each channel, where the key information includes information about a Q value, a frequency difference, and a temperature coefficient of each to-be-tested MEMS gyroscope 400, and process the key information to obtain a data file that includes the Q values, the frequency differences, and the temperature coefficients of all to-be-tested MEMS gyroscopes and has a preset fixed format.
Please refer to fig. 2 and fig. 3, which further includes: and each drive test circuit is correspondingly connected with one MEMS gyroscope to be tested respectively.
Each of the drive test circuits includes: the device comprises a C/V conversion circuit, a differential amplification circuit, an A/D conversion module and an FPGA data processing module which are connected in sequence.
And a D/A conversion module and a high voltage driving circuit.
And the input end of the C/V conversion circuit is correspondingly connected with the output end of the MEMS gyroscope to be tested.
The output end of the FPGA data processing module is connected with the industrial personal computer 100.
The input end of the D/A conversion module is connected with the A/D conversion module, and the output end of the D/A conversion module is connected with the input end of the high-voltage driving circuit.
And the input end of the high-voltage driving circuit is connected with the input end of the MEMS gyroscope to be tested to form a closed-loop control system.
Each high-voltage driving circuit is used for inputting driving voltage to the MEMS gyroscope to be tested according to the corresponding design parameters of the MEMS gyroscope to be tested.
And the MEMS gyroscope to be tested is used for outputting a capacitance signal during working.
The C/V conversion circuit is used for converting the received capacitance signal into a voltage signal.
The differential amplification circuit is used for amplifying the voltage signal.
The A/D conversion module is used for converting the received amplified voltage signal into a digital signal and respectively calculating the Q value, the frequency and the temperature information of the X axis and the Q value, the frequency and the temperature information of the Y axis of the MEMS gyroscope to be detected according to the data signal.
And the FPGA data processing module is used for calculating the Q value, the frequency difference and the temperature coefficient of the MEMS gyroscope to be detected on the channel according to the received Q value, the frequency and the temperature information of the X axis and the Q value, the frequency and the temperature information of the Y axis.
The D/A conversion module is used for converting the received digital signal into an analog signal as a control voltage.
And the high-voltage driving circuit provides a driving voltage signal for the MEMS gyroscope to be tested according to the received control voltage so as to maintain the resonance of the MEMS gyroscope to be tested.
This embodiment still includes: the system comprises a serial port card connected with the industrial personal computer 100 and a plurality of serial ports connected with the serial port card; each serial port is correspondingly connected with the FPGA data processing module, so that the industrial personal computer 100 can obtain the Q value, the frequency difference and the temperature coefficient of each MEMS gyroscope to be tested.
The high voltage driving circuit, the C/V conversion circuit, and the differential amplification circuit are integrated on a test board on the test board 200.
In summary, since the internal structure of the MEMS gyroscope to be tested is composed of a plurality of electrode pairs, the external physical output information of the MEMS gyroscope to be tested during operation is capacitance and capacitance variation information. Because the capacitance of the MEMS gyroscope to be tested is very small, a capacitance signal needs to be converted into a voltage signal through a capacitance/voltage conversion (C/V) circuit; the differential amplification circuit amplifies the electric signal; the A/D conversion module converts the analog signals into digital signals for calculating the Q value, the frequency and the temperature of the MEMS gyroscope to be measured on the X axis; the D/A conversion circuit converts the digital signal into an analog signal, and the analog signal drives the MEMS gyroscope to be tested through the high-voltage driving circuit to form a closed-loop control system so that the MEMS gyroscope is stably resonated.
This embodiment still includes the power box, is connected with high low temperature case through power supply interface, for the power supply of high low temperature case. The incubator 300 is a high-temperature and low-temperature incubator and can be connected to the industrial personal computer 100 through an ethernet, so that the industrial personal computer 100 can control the incubator 300 to control the temperature of the incubator 300.
The test equipment provided by the embodiment can simultaneously test not less than 8 output signals of the MEMS gyro chips in the high-low temperature box. The test equipment provided by the embodiment can test and process signals such as frequency difference, Q value and temperature coefficient of the MEMS gyroscope. The test equipment console provided by the embodiment can be in data communication with the test bench, controls the high-low temperature box through the port, sets a specified temperature environment, and simultaneously excites, tests, acquires, stores and processes the MEMS gyroscope under a specified channel.
While the present invention has been described in detail with reference to the preferred embodiments, it should be understood that the above description should not be taken as limiting the invention. Various modifications and alterations to this invention will become apparent to those skilled in the art upon reading the foregoing description. Accordingly, the scope of the invention should be determined from the following claims.
Claims (5)
1. An automated MEMS gyroscope test apparatus, comprising:
the temperature box is internally provided with a test board;
the MEMS gyroscopes to be tested are arranged on the test bench; each MEMS gyroscope to be tested correspondingly occupies one test channel of the test bench;
the industrial personal computer is connected with the incubator and the test bench;
the industrial personal computer is used for sending a temperature adjusting command to the incubator, and the incubator adjusts the temperature according to the received temperature adjusting command until the temperature in the incubator reaches a preset value;
the industrial personal computer is used for acquiring key information of the MEMS gyroscope to be detected, which is arranged on each channel, wherein the key information comprises Q value, frequency difference and temperature coefficient information of each MEMS gyroscope to be detected, and the key information is processed to obtain a data file containing the Q value, the frequency difference and the temperature coefficient of all the MEMS gyroscopes to be detected.
2. The MEMS gyroscope automated test equipment of claim 1, further comprising: each drive test circuit is correspondingly connected with one MEMS gyroscope to be tested;
each of the drive test circuits includes: the system comprises a C/V conversion circuit, a differential amplification circuit, an A/D conversion module and an FPGA data processing module which are connected in sequence;
the D/A conversion module and the high-voltage driving circuit;
the input end of the C/V conversion circuit is correspondingly connected with the output end of the MEMS gyroscope to be tested;
the output end of the FPGA data processing module is connected with the industrial personal computer;
the input end of the D/A conversion module is connected with the A/D conversion module, and the output end of the D/A conversion module is connected with the input end of the high-voltage drive circuit;
and the input end of the high-voltage driving circuit is connected with the input end of the MEMS gyroscope to be tested to form a closed-loop control system.
3. The MEMS gyroscope automated test equipment of claim 2,
each high-voltage driving circuit is used for inputting driving voltage to the MEMS gyroscope to be tested according to the corresponding design parameter of the MEMS gyroscope to be tested;
the MEMS gyroscope to be tested is used for outputting a capacitance signal during working;
the C/V conversion circuit is used for converting the received capacitance signal into a voltage signal;
the differential amplification circuit is used for amplifying the voltage signal;
the A/D conversion module is used for converting the received amplified voltage signal into a digital signal and respectively calculating the Q value, the frequency and the temperature information of the X axis and the Q value, the frequency and the temperature information of the Y axis of the MEMS gyroscope to be detected according to the data signal;
and the FPGA data processing module is used for calculating the Q value, the frequency difference and the temperature coefficient of the MEMS gyroscope to be detected on the channel according to the received Q value, the frequency and the temperature information of the X axis and the Q value, the frequency and the temperature information of the Y axis.
4. The MEMS gyroscope automated test equipment of claim 3,
the D/A conversion module is used for converting the received digital signal into an analog signal as a control voltage;
and the high-voltage driving circuit provides a driving voltage signal for the MEMS gyroscope to be tested according to the received control voltage so as to maintain the resonance of the MEMS gyroscope to be tested.
5. The MEMS gyroscope automated test equipment of claim 4,
further comprising: the serial port card is connected with the industrial personal computer, and the serial ports are connected with the serial port card; and each serial port is correspondingly connected with the FPGA data processing module so that the industrial personal computer can acquire the Q value, the frequency difference and the temperature coefficient of each MEMS gyroscope to be tested.
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Cited By (1)
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| CN114777756A (en) * | 2022-06-20 | 2022-07-22 | 中国船舶重工集团公司第七0七研究所 | Resonance gyroscope based on closed-loop control and control method thereof |
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Application publication date: 20210409 |