CN105571576A - Automatic testing method of mode matching voltage of MEMS gyroscope - Google Patents
Automatic testing method of mode matching voltage of MEMS gyroscope Download PDFInfo
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- CN105571576A CN105571576A CN201410554758.XA CN201410554758A CN105571576A CN 105571576 A CN105571576 A CN 105571576A CN 201410554758 A CN201410554758 A CN 201410554758A CN 105571576 A CN105571576 A CN 105571576A
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Abstract
The invention relates to an automatic testing method of a mode matching voltage of an MEMS gyroscope. The automatic testing method comprises the following steps: step 1, adding a driving closed control loop between a driving electrode of a driving mode of the MEMS gyroscope and a driving detection electrode to ensure that the driving mode of the MEMS gyroscope vibrates at resonant frequency and a specified indicated constant amplitude is maintained, and acquiring a driving displacement voltage signal VDP at the moment; step 2, connecting a sensitive mode detection electrode of the MEMS gyroscope with a preposition read-out circuit, and converting a quadrature error displacement variable quantity generated by the sensitive mode of the gyroscope into a voltage variable quantity through the preposition read-out circuit, so as to obtain a quadrature error voltage signal Vsp of the sensitive mode of the gyroscope; step 3, adjusting the controlled quantity VT inputted to the sensitive mode of the gyroscope, so that the phase difference between the driving displacement voltage signal VDP and the quadrature error voltage signal Vsp is 0, and the controlled quantity VT at the moment is the mode matching voltage. The automatic testing method disclosed by the invention can automatically test the mode matching voltage under different environmental temperatures in real time.
Description
Technical field
The present invention relates to a kind of automatic test approach, particularly about a kind of micromechanics (MEMS) gyro mode vectors correlation voltage automatic test approach.
Technical background
MEMS gyro is at the inertia device of micron dimension by the characteristic dimension of microelectronic technique processing, for measuring the angular motion information of carrier in inertial space, be widely used in the military domain such as the industry such as automobile, consumer electronics, civil area and tactical missile guidance.
MEMS gyro is made up of brace summer and mass, the form adopting electrostatic driving, capacitance detecting more.MEMS gyro comprises two mode: driven-mode and sense mode.Mass does simple harmonic oscillation along driving shaft direction under the effect of driving force, is called driven-mode; When there is angular velocity signal along angular speed input direction (Z axis), the coriolis force produced by Coriolis effect makes mass produce vibration in sensitive axes direction, is called sense mode.
Usually, driven-mode resonance frequency is less than sense mode resonance frequency.When driven-mode resonance frequency and sense mode equal, when namely reaching mode vectors correlation, the mechanical sensitivity of gyro reaches maximum, if carry out the quality factor that Vacuum Package reaches higher again, the resolution of gyro, noiseproof feature and zero drift etc. can be made to be significantly improved.
At present, there are two kinds of methods in MEMS gyro mode vectors correlation: the first adopts physics to trim, and such as laser trimming or Polycrystalline Silicon Precipitation regulate the quality of modal mass block and then regulate model frequency; The second adopts electricity to regulate produce electrostatic negative stiffness adjustment modal stiffness and then regulate model frequency.First method needs precision to trim equipment, and cost is higher, to trim personnel to trim level requirement higher, trim process time longer, efficiency is not high, and cost is also too high.Second method regulates owing to adopting electricity, uses suitable control circuit just can complete mode vectors correlation, can remove the impact of environmental change on test, simple and practical.In electricity control method, mode vectors correlation voltage is very crucial, first must test out mode vectors correlation voltage and just can carry out mode vectors correlation operation.
Summary of the invention
Goal of the invention
The object of this invention is to provide one for MEMS gyro mode vectors correlation voltage automatic test approach, automatically can test the mode voltage under condition of different temperatures in real time, shorten the test duration, significantly improve testing efficiency.
Technical scheme
The present invention is a kind of MEMS gyro mode vectors correlation voltage automatic test approach, and described MEMS gyro comprises two mode, i.e. driven-mode and sense mode, and sense mode resonance frequency is higher than driven-mode resonance frequency; Described driven-mode comprises drive electrode and drives detecting electrode; Described sense mode comprises responsive detecting electrode and tuning electrode; Described mode vectors correlation voltage is the voltage be added in when gyro driven-mode is equal with sense mode resonance frequency on tuning electrode;
Wherein, comprise the steps:
Step 1, MEMS gyro driven-mode drive electrode and drive between detecting electrode and add driving close loop control circuit, described MEMS gyro driven-mode is vibrated at its resonance frequency place, and the constant amplitude that maintenance is specified, obtain drive displacement voltage signal V now
dP;
Step 2, MEMS gyro sense mode detecting electrode is connected preposition sensing circuit, the quadrature error displacement variable produced by gyro sense mode is converted to voltage variety through described preposition sensing circuit, obtains the quadrature error voltage signal V of gyro sense mode
sp;
Step 3, input to the controlled quentity controlled variable V of gyro sense mode by regulating
t, make described drive displacement voltage signal V
dPwith described quadrature error voltage signal V
spphase differential be 0, obtain controlled quentity controlled variable V now
tfor mode vectors correlation voltage.
A kind of MEMS gyro mode vectors correlation voltage automatic test approach as above, wherein, in step 3, described drive displacement voltage signal V
dPwith described quadrature error voltage signal V
spinput to phase detector simultaneously, obtain the d. c. voltage signal V representing phase differential
q_DC; Described phase differential is inputed to controller as controlled volume and obtains control errors amount V
t, then by described control errors amount V
tfeed back input, to the tuning electrode of sense mode, forms closed feedback loop; When described phase differential reaches 0 by above-mentioned closed feedback loop, driven-mode resonance frequency is equal with sense mode resonance frequency, reaches mode vectors correlation state, described control errors amount V
tbe mode vectors correlation voltage; The control algolithm of described controller adopts PID to control.
Beneficial effect
The present invention is owing to adopting above technical scheme, and it has following advantage: automatically can test the mode vectors correlation voltage at varying environment temperature in real time; Test loop adopts close-loop feedback to control, and without the need to operations such as frequently debugging, thread-changings, significantly shorten the manual shift method testing time, raises the efficiency, simple and practical.The present invention is applicable to MEMS gyro mode vectors correlation voltage automatic measurement.
Accompanying drawing explanation
Fig. 1 is the frequency response curve of MEMS gyro under the non-matching condition of mode;
Fig. 2 is the frequency response curve of MEMS gyro under mode vectors correlation condition;
Fig. 3 is MEMS gyro driven-mode close loop control circuit schematic diagram;
Fig. 4 is MEMS gyro mode vectors correlation voltage tester schematic diagram.
Embodiment
Below, by reference to the accompanying drawings and embodiment, the present invention is described further.
Below in conjunction with drawings and Examples, the present invention is described in detail.
MEMS gyro of the present invention comprises two mode, i.e. driven-mode and sense mode (also known as sensed-mode), and sense mode resonance frequency is higher than driven-mode resonance frequency; Described driven-mode comprises drive electrode and drives detecting electrode; Described sense mode comprises responsive detecting electrode and tuning electrode; Described mode vectors correlation voltage is the voltage be added in when gyro driven-mode is equal with sense mode resonance frequency on tuning electrode.
If Fig. 1 and Fig. 2 is that MEMS gyro is not mated and the frequency response curve under mode vectors correlation condition in mode, when MEMS gyro mode is under non-matching condition, because sense mode resonance frequency is higher than driven-mode resonance frequency, compared with MEMS gyro mode is under matching condition, when when not mating, sense mode gain will be far smaller than coupling.
The implementation step that example of the present invention is used for MEMS gyro mode vectors correlation voltage automatic test approach is as follows:
1) between the drive electrode and driving detecting electrode of MEMS gyro driven-mode, add driving close loop control circuit, described MEMS gyro driven-mode in the vibration of its resonance frequency place, and keeps constant amplitude, obtains drive displacement voltage signal V
dP;
As shown in Figure 3, MEMS gyro driven-mode 1 comprises drive electrode 12, resonance structure 11 and driven-mode detecting electrode 13 3 parts.Resonance structure is at driving force F
dunder effect, export drive displacement X, described drive displacement X through driven-mode detecting electrode and obtain drive displacement voltage signal V after preposition sensing circuit 14
dP.Described drive displacement voltage signal V
dPmove 90 degree of phase places through phase shifter 15, obtain and drive displacement voltage signal V
dPorthogonal drive displacement phase-shifting voltages signal V
dPQ.Meanwhile, described drive displacement voltage signal V
dPthrough full-wave rectification block 16, obtain rectified signal V
dP_rec, and after through low-pass filter 17, obtain the direct current signal V of reflection drive displacement voltage signal amplitude
dP_DC.Described direct current signal V
dP_DCwith reference voltage signal V
rinput to comparer 18 simultaneously, obtain error signal V
e.Described error signal V
evia controller 19 obtains d. c. voltage signal V
c.Described d. c. voltage signal V
cwith described drive displacement phase-shifting voltages signal V
dPQinput to modulator 20 simultaneously, obtain sinusoidal drive signals V
d, be added on MEMS gyro drive electrode, and then produce driving force F
d, make gyro driven-mode in the vibration of its resonance frequency place, and the constant amplitude that maintenance is specified, amplitude size is by voltage signal V
rspecify.
2) MEMS gyro sense mode detecting electrode is connected preposition sensing circuit, produced quadrature error displacement variable is converted to voltage variety through described preposition sensing circuit, obtain quadrature error voltage signal V
sp;
3) by step 1) described in drive displacement voltage signal and step 2) described in quadrature error voltage signal input to phase detector simultaneously, obtain and represent the d. c. voltage signal V of phase differential
q_DC, phase detector is made up of detuner 25 and low-pass filter 26 herein; Described phase differential is inputed to controller as controlled volume and obtains control errors amount V
t, then by described control errors amount V
tfeed back input, to the tuning electrode of sense mode, forms closed feedback loop; Described control errors amount V
tact on the tuning electrode of sense mode and produce electrostatic negative stiffness, to reduce sense mode resonance frequency.When described phase differential reaches 0 by above-mentioned closed feedback loop, driven-mode resonance frequency is equal with sense mode resonance frequency, namely reaches mode vectors correlation state, described control errors amount V
tbe mode vectors correlation voltage; Concrete control algolithm can adopt the various methods such as PID controls, and is known technology.
4) according to test needs, can serviceability temperature sensor measurement environment temperature;
5) gather mode matching voltage at measuring tempeature and this temperature and be automatically stored in test file.
As shown in Figure 4, MEMS gyro sense mode 2 comprises tuning electrode 22, resonance structure 21 and sense mode detecting electrode 23 3 parts.Sense mode detecting electrode produces quadrature error displacement variable Y, through preposition sensing circuit 24, obtains quadrature error voltage signal V
sP.Described quadrature error voltage signal V
sPwith described drive displacement voltage signal V
dPthrough phase detector 3, obtain phase voltage signal V
q_DC.Described phase detector 3 comprises detuner 25 and low-pass filter 26 two parts.Described phase voltage signal V
q_DCas controlled volume, after via controller 27, obtain control errors amount V
t.Described control errors amount V
tfeed back on the tuning electrode 22 of sense mode, form closed feedback loop; Described control errors amount V
tact on the tuning electrode 22 of sense mode and produce electrostatic negative stiffness, to reduce sense mode resonance frequency.As described phase differential V
q_DCwhen reaching 0 by above-mentioned closed feedback loop, driven-mode resonance frequency is equal with sense mode resonance frequency, namely reaches mode vectors correlation state, described control errors amount V
tbe mode vectors correlation voltage.
Although be described in detail a kind of MEMS gyro mode vectors correlation voltage automatic test approach of the present invention by above-described embodiment, but above-mentioned explanation is not limitation of the invention, without departing from the spirit and scope of the invention, various distortion and change can be carried out, such as, optimized method can be selected in the various methods of prior art.
Claims (2)
1. a MEMS gyro mode vectors correlation voltage automatic test approach, described MEMS gyro comprises two mode, i.e. driven-mode and sense mode, and sense mode resonance frequency is higher than driven-mode resonance frequency; Described driven-mode comprises drive electrode and drives detecting electrode; Described sense mode comprises responsive detecting electrode and tuning electrode; Described mode vectors correlation voltage is the voltage be added in when gyro driven-mode is equal with sense mode resonance frequency on tuning electrode;
It is characterized in that, comprise the steps:
Step 1, MEMS gyro driven-mode drive electrode and drive between detecting electrode and add driving close loop control circuit, described MEMS gyro driven-mode is vibrated at its resonance frequency place, and the constant amplitude that maintenance is specified, obtain drive displacement voltage signal V now
dP;
Step 2, MEMS gyro sense mode detecting electrode is connected preposition sensing circuit, the quadrature error displacement variable produced by gyro sense mode is converted to voltage variety through described preposition sensing circuit, obtains the quadrature error voltage signal V of gyro sense mode
sp;
Step 3, input to the controlled quentity controlled variable V of gyro sense mode by regulating
t, make described drive displacement voltage signal V
dPwith described quadrature error voltage signal V
spphase differential be 0, obtain controlled quentity controlled variable V now
tfor mode vectors correlation voltage.
2. a kind of MEMS gyro mode vectors correlation voltage automatic test approach as claimed in claim 1, is characterized in that, in step 3, and described drive displacement voltage signal V
dPwith described quadrature error voltage signal V
spinput to phase detector simultaneously, obtain the d. c. voltage signal V representing phase differential
q_DC; Described phase differential is inputed to controller as controlled volume and obtains control errors amount V
t, then by described control errors amount V
tfeed back input, to the tuning electrode of sense mode, forms closed feedback loop; When described phase differential reaches 0 by above-mentioned closed feedback loop, driven-mode resonance frequency is equal with sense mode resonance frequency, reaches mode vectors correlation state, described control errors amount V
tbe mode vectors correlation voltage; The control algolithm of described controller adopts PID to control.
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| CN107966141A (en) * | 2016-10-20 | 2018-04-27 | 北京自动化控制设备研究所 | A kind of silicon micro-resonator fast start-up device and beam oscillating method |
| CN109781086A (en) * | 2017-11-15 | 2019-05-21 | 北京自动化控制设备研究所 | A kind of annular microelectromechanicgyroscope gyroscope sensitive structure |
| CN109931959A (en) * | 2019-03-27 | 2019-06-25 | 河海大学常州校区 | Silicon micro-gyroscope quadrature error bearing calibration |
| CN110134005A (en) * | 2019-05-28 | 2019-08-16 | 重庆大学 | A kind of multiplex control system of electromagnetic type raster micro mirror |
| CN110426025A (en) * | 2019-08-27 | 2019-11-08 | 浙江大学 | A kind of real-time automatic modality matching process of micromechanical gyro |
| CN110567450A (en) * | 2019-08-26 | 2019-12-13 | 北京自动化控制设备研究所 | parameter matching method of MEMS Coriolis vibration gyroscope and ASIC circuit |
| CN111536994A (en) * | 2020-04-29 | 2020-08-14 | 中国人民解放军国防科技大学 | Resonant micro gyroscope multi-mode cooperative control method and system and resonant micro gyroscope |
| CN112066968A (en) * | 2020-08-24 | 2020-12-11 | 南京理工大学 | Micro-electromechanical multi-ring gyroscope real-time mode automatic matching system |
| CN112444240A (en) * | 2019-08-30 | 2021-03-05 | 北京大学 | Rigid spindle positioning and laser balance matching algorithm of silicon micro-ring resonator gyroscope |
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| CN106441359A (en) * | 2016-09-19 | 2017-02-22 | 浙江大学 | High precision on-site mode matching method of micromechanical gyroscope |
| CN107966141A (en) * | 2016-10-20 | 2018-04-27 | 北京自动化控制设备研究所 | A kind of silicon micro-resonator fast start-up device and beam oscillating method |
| CN109781086A (en) * | 2017-11-15 | 2019-05-21 | 北京自动化控制设备研究所 | A kind of annular microelectromechanicgyroscope gyroscope sensitive structure |
| CN109931959A (en) * | 2019-03-27 | 2019-06-25 | 河海大学常州校区 | Silicon micro-gyroscope quadrature error bearing calibration |
| CN110134005A (en) * | 2019-05-28 | 2019-08-16 | 重庆大学 | A kind of multiplex control system of electromagnetic type raster micro mirror |
| CN110567450A (en) * | 2019-08-26 | 2019-12-13 | 北京自动化控制设备研究所 | parameter matching method of MEMS Coriolis vibration gyroscope and ASIC circuit |
| CN110426025A (en) * | 2019-08-27 | 2019-11-08 | 浙江大学 | A kind of real-time automatic modality matching process of micromechanical gyro |
| CN112444240A (en) * | 2019-08-30 | 2021-03-05 | 北京大学 | Rigid spindle positioning and laser balance matching algorithm of silicon micro-ring resonator gyroscope |
| CN111536994A (en) * | 2020-04-29 | 2020-08-14 | 中国人民解放军国防科技大学 | Resonant micro gyroscope multi-mode cooperative control method and system and resonant micro gyroscope |
| CN111536994B (en) * | 2020-04-29 | 2021-09-24 | 中国人民解放军国防科技大学 | Resonant micro gyroscope multi-mode cooperative control method and system and resonant micro gyroscope |
| CN112066968A (en) * | 2020-08-24 | 2020-12-11 | 南京理工大学 | Micro-electromechanical multi-ring gyroscope real-time mode automatic matching system |
| CN112066968B (en) * | 2020-08-24 | 2024-04-12 | 南京理工大学 | Real-time mode automatic matching system of micro-electromechanical multi-ring gyroscope |
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