CN110567450A - parameter matching method of MEMS Coriolis vibration gyroscope and ASIC circuit - Google Patents
parameter matching method of MEMS Coriolis vibration gyroscope and ASIC circuit Download PDFInfo
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- CN110567450A CN110567450A CN201910788548.XA CN201910788548A CN110567450A CN 110567450 A CN110567450 A CN 110567450A CN 201910788548 A CN201910788548 A CN 201910788548A CN 110567450 A CN110567450 A CN 110567450A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
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Abstract
The invention provides a parameter matching method of an MEMS Coriolis vibration gyroscope and an ASIC circuit, which comprises the following steps: acquiring gauge head mechanical parameters of the MEMS Coriolis vibration gyroscope; adjusting ASIC circuit parameters according to the gauge head mechanical parameters to complete the mode configuration of the MEMS Coriolis vibration gyroscope; and sequentially testing and judging various performances of the MEMS Coriolis vibration gyroscope, and if any performance does not meet the preset performance index, returning to adjust the parameters of the ASIC circuit to optimize the mode configuration of the MEMS Coriolis vibration gyroscope until the performances meet the preset performance index so as to complete the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit. By applying the technical scheme of the invention, the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit can be completed quickly, comprehensively and effectively, so that the performance index of the MEMS Coriolis vibration gyroscope meets the performance requirement.
Description
Technical Field
The invention relates to the technical field of gyroscopes, in particular to a parameter matching method of an MEMS Coriolis vibration gyroscope and an ASIC circuit.
Background
The miniaturization and low power consumption requirements of the micro inertial system push the MEMS inertial device and the ASIC technology to be combined more and more widely and more deeply, so that the advantages of small volume, low power consumption, low cost and the like of the MEMS inertial device can be better exerted. At present, a measurement and control system matched with a high-precision MEMS Coriolis vibration gyroscope is gradually switched to an ASIC circuit from a PCB circuit. When an ASIC circuit is integrated with a meter head system of a gyroscope, how to combine processing errors, vacuum packaging characteristics, installation schemes and the like of a gyroscope meter head structure to carry out parameter configuration and matching optimization of the ASIC measurement and control circuit is an important link for determining whether the potential of the head structure precision of the MEMS Coriolis vibration gyroscope meter can be exerted and realizing the expected performance index of the gyroscope. In the prior art, the parameter matching process of the MEMS Coriolis vibration gyroscope and the ASIC circuit is simple without a verification optimization link, so that the parameters of the ASIC circuit cannot be adjusted in time, and the performance index of the MEMS Coriolis vibration gyroscope does not meet the performance requirement.
Disclosure of Invention
the invention provides a parameter matching method of an MEMS Coriolis vibration gyroscope and an ASIC circuit, which can solve the technical problem that in the prior art, the performance index of the MEMS Coriolis vibration gyroscope does not meet the performance requirement due to the fact that the parameter matching process of the MEMS Coriolis vibration gyroscope and the ASIC circuit is simple and has no verification optimization.
according to an aspect of the present invention, there is provided a parameter matching method of a MEMS coriolis vibration gyro and an ASIC circuit, the parameter matching method including: acquiring gauge head mechanical parameters of the MEMS Coriolis vibration gyroscope; adjusting ASIC circuit parameters according to the gauge head mechanical parameters to complete the mode configuration of the MEMS Coriolis vibration gyroscope; and sequentially testing and judging various performances of the MEMS Coriolis vibration gyroscope, and if any performance does not meet the preset performance index, returning to adjust the parameters of the ASIC circuit to optimize the mode configuration of the MEMS Coriolis vibration gyroscope until the performances meet the preset performance index so as to complete the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit.
Further, adjusting the ASIC circuit parameters according to the gauge head mechanical parameters to complete the mode configuration of the MEMS coriolis vibration gyroscope specifically includes: adjusting ASIC circuit parameters according to the gauge head mechanical parameters to complete the configuration of the drive mode of the MEMS Coriolis vibration gyroscope; and adjusting the parameters of the ASIC circuit according to the mechanical parameters of the gauge head so as to complete the configuration of the detection mode of the MEMS Coriolis vibration gyroscope.
Further, adjusting the ASIC circuit parameters according to the gauge head mechanical parameters to complete configuration of the driving mode of the MEMS coriolis vibration gyroscope specifically includes: adjusting the phase control module parameters of the ASIC circuit according to the gauge outfit mechanical parameters to enable the drive mode of the MEMS Coriolis vibration gyroscope to realize resonance on the drive inherent resonance frequency of the MEMS Coriolis vibration gyroscope; and adjusting parameters of a driving amplitude control module of the ASIC circuit to enable the vibration amplitude of the driving mode of the MEMS Coriolis vibration gyroscope to reach an expected value.
Further, adjusting the ASIC circuit parameters according to the gauge head mechanical parameters to complete configuration of the detection mode of the MEMS coriolis vibration gyroscope specifically includes: and adjusting the detection channel parameters of the ASIC circuit according to the mechanical parameters of the gauge head so as to complete the configuration of the detection mode of the MEMS Coriolis vibration gyroscope.
further, sequentially testing and judging various performances of the MEMS coriolis vibration gyroscope, and if any of the performances does not satisfy the preset performance index, returning to adjust the ASIC circuit parameter to optimize the modal configuration of the MEMS coriolis vibration gyroscope until each of the performances satisfies the preset performance index specifically includes: testing and judging the static performance of the MEMS Coriolis vibration gyroscope, and if the static performance does not meet the preset static performance index, returning to adjust the parameters of an ASIC circuit to optimize the mode configuration of the MEMS Coriolis vibration gyroscope until the static performance meets the preset static performance index; when the static performance meets a preset static performance index, testing and judging the full-temperature performance of the MEMS Coriolis vibration gyroscope, and if the full-temperature performance does not meet the preset full-temperature performance index, returning to adjust the parameters of an ASIC circuit to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the full-temperature performance meets the preset full-temperature performance index; and when the static performance meets the preset static performance index and the full-temperature performance meets the preset full-temperature performance index, testing and judging the mechanical environment of the MEMS Coriolis vibration gyroscope, and if the mechanical environment does not meet the preset mechanical environment index, returning to adjust the ASIC circuit parameters to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the mechanical environment meets the preset mechanical environment index.
Further, testing and judging the static performance of the MEMS coriolis vibration gyroscope, and if the static performance does not satisfy the preset static performance index, returning to adjust the ASIC circuit parameter to optimize the modal configuration of the MEMS coriolis vibration gyroscope until the static performance satisfies the preset static performance index specifically includes: and testing and judging the starting time and the static performance of the MEMS Coriolis vibration gyroscope, and if the starting time of the MEMS Coriolis vibration gyroscope is too long or the drive mode of the MEMS Coriolis vibration gyroscope cannot resonate, returning to adjust the parameters of the ASIC circuit to optimize the mode configuration of the MEMS Coriolis vibration gyroscope until the static performance meets the preset static performance index.
Further, the testing and judging of the full-temperature performance of the MEMS coriolis vibration gyroscope specifically includes: and performing static and dynamic temperature calibration tests on the MEMS Coriolis vibration gyroscope, establishing a temperature compensation model, programming relevant parameters in temperature compensation into a corresponding register of an ASIC circuit, and judging whether the full-temperature performance of the MEMS Coriolis vibration gyroscope meets a preset full-temperature performance index.
Further, the testing and judging of the mechanical environment of the MEMS Coriolis vibration gyroscope specifically comprises the bandwidth testing and judging and the random vibration testing and judging of the MEMS Coriolis vibration gyroscope.
Further, testing and judging the mechanical environment of the MEMS coriolis vibration gyroscope, and if the mechanical environment does not satisfy the preset mechanical environment index, returning to adjust the ASIC circuit parameter to optimize the modal configuration of the MEMS coriolis vibration gyroscope until the mechanical environment satisfies the preset mechanical environment index specifically includes: performing bandwidth test and judgment on the MEMS Coriolis vibration gyroscope, and if the bandwidth does not meet the preset bandwidth index, returning to adjust the parameters of the ASIC circuit to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the bandwidth of the MEMS Coriolis vibration gyroscope meets the preset bandwidth index; and when the bandwidth of the MEMS Coriolis vibration gyroscope meets a preset bandwidth index, performing random vibration test and judgment on the MEMS Coriolis vibration gyroscope, and if the vibration performance in the random vibration test does not meet the preset vibration index, returning to adjust the parameters of the ASIC circuit to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the vibration performance of the MEMS Coriolis vibration gyroscope meets the preset vibration index.
Further, the random vibration test and judgment of the MEMS coriolis vibration gyroscope specifically includes: and testing and judging the noise level of the MEMS Coriolis vibration gyroscope.
The technical scheme of the invention is applied to provide a parameter matching method of the MEMS Coriolis vibration gyroscope and the ASIC circuit, and the parameter matching method tests and judges various performances of the MEMS Coriolis vibration gyroscope and iteratively optimizes parameters of the ASIC circuit according to a judgment result so as to realize parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit. Compared with the prior art, the parameter matching method of the MEMS Coriolis vibration gyroscope and the ASIC circuit provided by the invention can be used for iteratively optimizing the parameters of the ASIC circuit according to the judgment results of various performances, and can be used for quickly, comprehensively and effectively completing the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit, so that the performance indexes of the MEMS Coriolis vibration gyroscope meet the performance requirements.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a flow chart diagram illustrating a method for matching parameters of a MEMS Coriolis vibratory gyroscope to ASIC circuitry provided in accordance with an exemplary embodiment of the present invention;
fig. 2 is a flow chart of a parameter matching method of a MEMS coriolis vibration gyroscope and an ASIC circuit according to another embodiment of the present invention.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
it is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
As shown in fig. 1, a parameter matching method of a MEMS coriolis vibration gyroscope and an ASIC circuit is provided according to an embodiment of the present invention, and includes: acquiring gauge head mechanical parameters of the MEMS Coriolis vibration gyroscope; adjusting ASIC circuit parameters according to the gauge head mechanical parameters to complete the mode configuration of the MEMS Coriolis vibration gyroscope; and sequentially testing and judging various performances of the MEMS Coriolis vibration gyroscope, and if any performance does not meet the preset performance index, returning to adjust the parameters of the ASIC circuit to optimize the mode configuration of the MEMS Coriolis vibration gyroscope until the performances meet the preset performance index so as to complete the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit.
By applying the configuration mode, the parameter matching method of the MEMS Coriolis vibration gyroscope and the ASIC circuit is provided, and the parameter matching method tests and judges various performances of the MEMS Coriolis vibration gyroscope and iteratively optimizes parameters of the ASIC circuit according to a judgment result so as to realize parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit. Compared with the prior art, the parameter matching method of the MEMS Coriolis vibration gyroscope and the ASIC circuit provided by the invention can be used for iteratively optimizing the parameters of the ASIC circuit according to the judgment results of various performances, and can be used for quickly, comprehensively and effectively completing the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit, so that the performance indexes of the MEMS Coriolis vibration gyroscope meet the performance requirements.
Further, in order to realize parameter matching of the MEMS coriolis vibration gyroscope and the ASIC circuit, first, a header mechanical parameter of the MEMS coriolis vibration gyroscope is obtained. As a specific embodiment of the present invention, a vacuum probe test machine may be used to obtain the gauge head mechanical parameters of the MEMS coriolis vibration gyroscope, where the gauge head mechanical parameters include a Q value, a driving resonant frequency, a detection resonant frequency, and an orthogonal coupling characteristic. The vacuum probe test machine comprises a vacuum probe station, a probe card, a data acquisition system and the like.
In addition, in the invention, after the gauge head mechanical parameters of the MEMS Coriolis vibration gyroscope are obtained, the ASIC circuit parameters are adjusted according to the gauge head mechanical parameters to complete the mode configuration of the MEMS Coriolis vibration gyroscope. As an embodiment of the present invention, as shown in fig. 2, the mode configuration of the MEMS coriolis vibration gyroscope specifically includes: adjusting ASIC circuit parameters according to the gauge head mechanical parameters to complete the configuration of the drive mode of the MEMS Coriolis vibration gyroscope; and adjusting the parameters of the ASIC circuit according to the mechanical parameters of the gauge head so as to complete the configuration of the detection mode of the MEMS Coriolis vibration gyroscope.
Further, in the present invention, the configuration of the driving mode of the MEMS coriolis vibration gyroscope by adjusting the ASIC circuit parameters according to the header mechanical parameters specifically includes: adjusting the phase control module parameters of the ASIC circuit according to the gauge outfit mechanical parameters to enable the drive mode of the MEMS Coriolis vibration gyroscope to realize resonance on the drive inherent resonance frequency of the MEMS Coriolis vibration gyroscope; and adjusting parameters of a driving amplitude control module of the ASIC circuit to enable the vibration amplitude of the driving mode of the MEMS Coriolis vibration gyroscope to reach an expected value. As a specific embodiment of the present invention, the phase control module of the ASIC circuitry includes phase locked loop control; the driving amplitude control module parameters of the ASIC circuit comprise driving direct current voltage configuration, driving alternating current voltage configuration, driving loop PGA gain and the like. The vibration amplitude of the driving mode of the MEMS Coriolis vibration gyroscope can be adjusted to be maximum or optimal according to the requirement of the performance index of the MEMS Coriolis vibration gyroscope.
In addition, in the present invention, the configuration of adjusting the ASIC circuit parameters according to the gauge head mechanical parameters to complete the detection mode of the MEMS coriolis vibration gyroscope specifically includes: and adjusting the detection channel parameters of the ASIC circuit according to the mechanical parameters of the gauge head so as to complete the configuration of the detection mode of the MEMS Coriolis vibration gyroscope. As an embodiment of the present invention, the detection channel parameters of the ASIC circuit include PGA block gain, low pass filter bandwidth, and the like.
After the configuration of the driving mode and the detection mode of the MEMS Coriolis vibration gyroscope is completed, the overall configuration of the MEMS Coriolis vibration gyroscope is completed, including the configuration of the measuring range, the linearity and the bandwidth of the MEMS Coriolis vibration gyroscope.
Further, in the invention, after the configuration of the driving mode and the detection mode of the MEMS Coriolis vibration gyroscope is completed, the performance of the MEMS Coriolis vibration gyroscope is tested and judged in sequence, if any performance does not meet the preset performance index, the ASIC circuit parameters are returned to be adjusted to optimize the mode configuration of the MEMS Coriolis vibration gyroscope until all the performances meet the preset performance index so as to complete the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit. As one embodiment of the present invention, as shown in fig. 1 and 2, various performances of the MEMS coriolis vibration gyroscope include a static performance, a full temperature performance, and a mechanical environment of the MEMS coriolis vibration gyroscope. The preset performance indexes of various performances can be set in advance according to actual conditions. In an embodiment of the present invention, the testing and determining the performance of the MEMS coriolis vibration gyroscope specifically includes the following steps.
Firstly, testing and judging the static performance of the MEMS Coriolis vibration gyroscope, and specifically comprises testing and judging the starting time and the static performance of the MEMS Coriolis vibration gyroscope. If the starting time of the MEMS Coriolis vibration gyroscope is too long or the drive mode of the MEMS Coriolis vibration gyroscope cannot resonate, parameters of an ASIC circuit are returned to be adjusted according to a driving force-voltage theoretical formula and relevant engineering experience, such as parameters of driving direct current voltage configuration, driving alternating current voltage configuration, PGA gain of a driving loop and the like are adjusted, so that the driving mode configuration of the MEMS Coriolis vibration gyroscope is optimized, and the static performance of the MEMS Coriolis vibration gyroscope meets preset static performance indexes.
Secondly, when the static performance meets the preset static performance index, testing the full-temperature performance of the MEMS Coriolis vibration gyroscope, specifically comprising performing static and dynamic temperature calibration tests on the MEMS Coriolis vibration gyroscope, establishing a temperature compensation model, programming relevant parameters in temperature compensation into a corresponding register of an ASIC circuit, and judging whether the full-temperature performance of the MEMS Coriolis vibration gyroscope meets the preset full-temperature performance index. If the full-temperature performance does not meet the preset full-temperature performance index, returning and adjusting ASIC circuit parameters, such as adjusting parameters of driving direct-current voltage configuration, driving alternating-current voltage configuration, driving loop PGA gain and the like, according to a driving force-voltage theoretical formula and related engineering experience so as to optimize the driving mode configuration of the MEMS Coriolis vibration gyroscope, and enabling the full-temperature performance to meet the preset full-temperature performance index. As a specific embodiment of the invention, the full temperature range is-40 ℃ to +60 ℃, the temperature change rate is 1 ℃/min, after the temperature compensation model is established, relevant temperature compensation coefficients, such as a single-stage 3-stage temperature compensation coefficient and a 1-stage temperature compensation coefficient, are programmed into corresponding registers of an ASIC circuit, and then the full temperature performance judgment is carried out.
And finally, testing and judging the mechanical environment of the MEMS Coriolis vibration gyroscope when the static performance meets the preset static performance index and the full-temperature performance meets the preset full-temperature performance index, and if the mechanical environment does not meet the preset mechanical environment index, returning to adjust the ASIC circuit parameters to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the mechanical environment meets the preset mechanical environment index.
as an embodiment of the present invention, as shown in fig. 2, the testing and determining the mechanical environment of the MEMS coriolis vibration gyroscope specifically includes performing a bandwidth test and determination and a random vibration test and determination on the MEMS coriolis vibration gyroscope. And if the bandwidth of the MEMS Coriolis vibration gyroscope in the bandwidth test does not meet the preset bandwidth index, returning and adjusting ASIC circuit parameters such as the bandwidth of a low-pass filter according to a driving force-voltage theoretical formula and related engineering experience so as to optimize the detection mode configuration of the MEMS Coriolis vibration gyroscope until the bandwidth of the MEMS Coriolis vibration gyroscope meets the preset bandwidth index. And when the bandwidth of the MEMS Coriolis vibration gyroscope meets a preset bandwidth index, performing random vibration test and judgment on the MEMS Coriolis vibration gyroscope, and if the vibration performance in the random vibration test does not meet the preset vibration index, returning and adjusting the parameters of an ASIC circuit according to a driving force-voltage theoretical formula and related engineering experience to optimize the driving mode configuration of the MEMS Coriolis vibration gyroscope until the vibration performance of the MEMS Coriolis vibration gyroscope meets the preset vibration index.
Further, as a specific embodiment of the present invention, the testing and determining of the random vibration of the MEMS coriolis vibration gyroscope includes testing and determining a noise level of the MEMS coriolis vibration gyroscope, and if the vibration noise is too large, returning to adjust the ASIC circuit parameter according to the driving force-voltage theoretical formula and related engineering experience to optimize the driving mode configuration of the MEMS coriolis vibration gyroscope until the noise level of the MEMS coriolis vibration gyroscope meets a preset noise index.
In the invention, when the static performance, the full-temperature performance and the mechanical environment of the MEMS Coriolis vibration gyroscope all meet respective performance indexes, the MEMS Coriolis vibration gyroscope and the ASIC circuit complete comprehensive and effective parameter matching.
In order to further understand the present invention, the parameter matching method of the MEMS coriolis vibration gyroscope and the ASIC circuit according to the present invention will be described in detail with reference to fig. 1 and 2.
As shown in fig. 1 and fig. 2, a parameter matching method of a MEMS coriolis vibration gyroscope and an ASIC circuit is provided according to an embodiment of the present invention, and specifically includes the following steps.
The method comprises the steps of firstly, obtaining gauge head mechanical parameters of the MEMS Coriolis vibration gyroscope.
and step two, adjusting ASIC circuit parameters according to the mechanical parameters of the gauge head so as to complete the configuration of the drive mode of the MEMS Coriolis vibration gyroscope.
And step three, adjusting ASIC circuit parameters according to the mechanical parameters of the gauge outfit to complete the detection mode configuration of the MEMS Coriolis vibration gyroscope.
And step four, testing and judging the static performance of the MEMS Coriolis vibration gyroscope, if the static performance does not meet the preset static performance index, repeating the step two to the step four, and optimizing the configuration of the driving mode and the detection mode of the MEMS Coriolis vibration gyroscope by adjusting the ASIC circuit parameters until the static performance meets the preset static performance index.
and step five, testing and judging the full-temperature performance of the MEMS Coriolis vibration gyroscope, if the full-temperature performance does not meet the preset full-temperature performance index, repeating the step two to the step five, and optimizing the driving mode and the detection mode configuration of the MEMS Coriolis vibration gyroscope by adjusting the ASIC circuit parameters until the full-temperature performance meets the preset full-temperature performance index.
And step six, testing and judging the bandwidth of the MEMS Coriolis vibration gyroscope, if the bandwidth does not meet the preset bandwidth index, repeating the step three to the step six, and optimizing the detection mode configuration of the MEMS Coriolis vibration gyroscope by adjusting the ASIC circuit parameters until the bandwidth meets the preset bandwidth index.
And step seven, carrying out random vibration test and judgment on the MEMS Coriolis vibration gyroscope, if the vibration performance does not meet the preset vibration index, repeating the step two to the step seven, optimizing the configuration of the driving mode and the detection mode of the MEMS Coriolis vibration gyroscope by adjusting the parameters of the ASIC circuit until the vibration performance meets the preset vibration index, and completing the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit.
In summary, the present invention provides a parameter matching method for an MEMS coriolis vibration gyroscope and an ASIC circuit, which tests and determines various performances of the MEMS coriolis vibration gyroscope and iteratively optimizes parameters of the ASIC circuit according to a determination result to match the parameters of the MEMS coriolis vibration gyroscope and the ASIC circuit. Compared with the prior art, the parameter matching method of the MEMS Coriolis vibration gyroscope and the ASIC circuit provided by the invention can be used for iteratively optimizing the parameters of the ASIC circuit according to the judgment results of various performances, and can be used for quickly, comprehensively and effectively completing the parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit, so that the performance indexes of the MEMS Coriolis vibration gyroscope meet the performance requirements.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. a parameter matching method of a MEMS Coriolis vibration gyroscope and an ASIC circuit is characterized by comprising the following steps:
Acquiring gauge head mechanical parameters of the MEMS Coriolis vibration gyroscope;
Adjusting ASIC circuit parameters according to the gauge head mechanical parameters to complete the mode configuration of the MEMS Coriolis vibration gyroscope;
and sequentially testing and judging various performances of the MEMS Coriolis vibration gyroscope, and if any performance does not meet preset performance indexes, returning to adjust the parameters of the ASIC circuit to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the performances meet the preset performance indexes so as to complete parameter matching of the MEMS Coriolis vibration gyroscope and the ASIC circuit.
2. The method for matching parameters of a MEMS coriolis vibration gyroscope and an ASIC circuit according to claim 1, wherein adjusting the ASIC circuit parameters according to the header mechanical parameters to complete the modal configuration of the MEMS coriolis vibration gyroscope specifically comprises:
Adjusting ASIC circuit parameters according to the gauge outfit mechanical parameters to complete the configuration of the driving mode of the MEMS Coriolis vibration gyroscope;
And adjusting the parameters of an ASIC circuit according to the mechanical parameters of the gauge outfit to complete the configuration of the detection mode of the MEMS Coriolis vibration gyroscope.
3. The method for matching parameters of a MEMS coriolis vibration gyroscope and an ASIC circuit according to claim 2, wherein adjusting the ASIC circuit parameters according to the header mechanical parameters to complete the configuration of the drive mode of the MEMS coriolis vibration gyroscope specifically comprises:
Adjusting phase control module parameters of the ASIC circuit according to the gauge outfit mechanical parameters to enable a driving mode of the MEMS Coriolis vibration gyroscope to realize resonance on a driving natural resonant frequency of the MEMS Coriolis vibration gyroscope;
And adjusting the parameters of a driving amplitude control module of the ASIC circuit to enable the vibration amplitude of the driving mode of the MEMS Coriolis vibration gyroscope to reach an expected value.
4. The method for matching parameters of a MEMS coriolis vibration gyroscope and an ASIC circuit according to claim 2 or 3, wherein adjusting the parameters of the ASIC circuit according to the header mechanical parameters to complete the configuration of the detection mode of the MEMS coriolis vibration gyroscope specifically comprises: and adjusting the detection channel parameters of the ASIC circuit according to the gauge outfit mechanical parameters to complete the configuration of the detection mode of the MEMS Coriolis vibration gyroscope.
5. The method for matching parameters of the MEMS coriolis vibration gyroscope and the ASIC circuit according to any one of claims 1 to 4, wherein the steps of sequentially testing and determining the performances of the MEMS coriolis vibration gyroscope, and if any one of the performances does not satisfy a preset performance index, returning to adjust the ASIC circuit parameters to optimize the modal configuration of the MEMS coriolis vibration gyroscope until each of the performances satisfies the preset performance index specifically include:
Testing and judging the static performance of the MEMS Coriolis vibration gyroscope, and if the static performance does not meet a preset static performance index, returning to adjust the ASIC circuit parameters to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the static performance meets the preset static performance index;
When the static performance meets the preset static performance index, testing and judging the full-temperature performance of the MEMS Coriolis vibration gyroscope, and if the full-temperature performance does not meet the preset full-temperature performance index, returning to adjust the ASIC circuit parameters to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the full-temperature performance meets the preset full-temperature performance index;
And when the static performance meets the preset static performance index and the full-temperature performance meets the preset full-temperature performance index, testing and judging the mechanical environment of the MEMS Coriolis vibration gyroscope, and if the mechanical environment does not meet the preset mechanical environment index, returning to adjust the ASIC circuit parameters to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the mechanical environment meets the preset mechanical environment index.
6. The method for matching parameters of the MEMS coriolis vibration gyroscope and the ASIC circuit according to claim 5, wherein testing and determining a static performance of the MEMS coriolis vibration gyroscope, and if the static performance does not satisfy a preset static performance index, returning to adjust the ASIC circuit parameters to optimize the modal configuration of the MEMS coriolis vibration gyroscope until the static performance satisfies the preset static performance index specifically includes: and testing and judging the starting time and the static performance of the MEMS Coriolis vibration gyroscope, and if the starting time of the MEMS Coriolis vibration gyroscope is too long or the drive mode of the MEMS Coriolis vibration gyroscope cannot resonate, returning to adjust the parameters of the ASIC circuit to optimize the mode configuration of the MEMS Coriolis vibration gyroscope until the static performance meets the preset static performance index.
7. the method for matching parameters of a MEMS coriolis vibration gyroscope and an ASIC circuit according to claim 5, wherein the testing and determining the full temperature performance of the MEMS coriolis vibration gyroscope specifically comprises: and performing static and dynamic temperature calibration tests on the MEMS Coriolis vibration gyroscope, establishing a temperature compensation model, programming relevant parameters in temperature compensation into a corresponding register of the ASIC circuit, and judging whether the full-temperature performance of the MEMS Coriolis vibration gyroscope meets the preset full-temperature performance index.
8. The method for matching parameters of a MEMS coriolis vibration gyroscope and an ASIC circuit according to claim 5, wherein the testing and determining the mechanical environment of the MEMS coriolis vibration gyroscope specifically includes performing a bandwidth test and determination and a random vibration test and determination on the MEMS coriolis vibration gyroscope.
9. The method for matching parameters of the MEMS coriolis vibration gyroscope and the ASIC circuit according to claim 8, wherein testing and determining a mechanical environment of the MEMS coriolis vibration gyroscope, and if the mechanical environment does not satisfy a preset mechanical environment index, returning to adjust the ASIC circuit parameter to optimize the modal configuration of the MEMS coriolis vibration gyroscope until the mechanical environment satisfies the preset mechanical environment index specifically includes:
Performing the bandwidth test and judgment on the MEMS Coriolis vibration gyroscope, and if the bandwidth does not meet a preset bandwidth index, returning to adjust the parameters of the ASIC circuit to optimize the mode configuration of the MEMS Coriolis vibration gyroscope until the bandwidth of the MEMS Coriolis vibration gyroscope meets the preset bandwidth index;
And when the bandwidth of the MEMS Coriolis vibration gyroscope meets the preset bandwidth index, performing the random vibration test and judgment on the MEMS Coriolis vibration gyroscope, and if the vibration performance in the random vibration test does not meet the preset vibration index, returning to adjust the ASIC circuit parameters to optimize the modal configuration of the MEMS Coriolis vibration gyroscope until the vibration performance of the MEMS Coriolis vibration gyroscope meets the preset vibration index.
10. The method for matching parameters of a MEMS coriolis vibration gyroscope and an ASIC circuit according to claim 9, wherein the performing the random vibration test and the determination of the MEMS coriolis vibration gyroscope specifically comprises: and testing and judging the noise level of the MEMS Coriolis vibration gyroscope.
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