CN109781086A - A kind of annular microelectromechanicgyroscope gyroscope sensitive structure - Google Patents
A kind of annular microelectromechanicgyroscope gyroscope sensitive structure Download PDFInfo
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- CN109781086A CN109781086A CN201711129755.1A CN201711129755A CN109781086A CN 109781086 A CN109781086 A CN 109781086A CN 201711129755 A CN201711129755 A CN 201711129755A CN 109781086 A CN109781086 A CN 109781086A
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Abstract
The invention belongs to inertial survey technique fields, and in particular to a kind of annular microelectromechanicgyroscope gyroscope sensitive structure；The structure includes outer ring, is anchored point, combination beam, driving electrodes group, detecting electrode group and tuning electrode group；It is anchored point and is located at center, outer ring passes through multiple combination beams and is anchored point connection, and outer ring and anchor point are concentric, and the upper and lower bottom surface of outer ring is vacantly arranged, driving electrodes group and detecting electrode group are alternately uniformly arranged on the outside of outer ring, and tuning electrode group is uniformly arranged on the inside of outer ring；When work, outer ring keeps the driven-mode vibration shape under driving electrodes group electrostatic force, when there is angular speed effect in the external world, it is closed by brother's formula couple of force, excitation-detection Mode Shape, detecting electrode group realizes the sensing of extraneous input by the variation of detection capacitance gap, and tuning electrode group realizes that the frequency of driving and sensed-mode matches.The present invention uses center single-point support symmetrical structure, and anchor point is greatly reduced support loss, obtains high q-factor in the vibration shape node location of driving and sensed-mode.
Description
Technical field
The invention belongs to inertial survey technique fields, and in particular to a kind of annular microelectromechanicgyroscope gyroscope sensitive structure.
Background technique
Gyro is a kind of instrument for sensitive carrier relative to inertial space angular movement, is Inertial Navigation and Guidance system
Core devices.
Annular microelectromechanicgyroscope gyroscope be it is a kind of fusion traditional electro-mechanical gyro working principle and modern times MEMS manufacturing process it is novel
Microelectromechanicgyroscope gyroscope compares tuning-fork-type, wing type microelectromechanicgyroscope gyroscope, and annular microelectromechanicgyroscope gyroscope has symmetrical sexual clorminance in structure,
It can inhibit interference to greatest extent, improve robustness.
A kind of annular microelectromechanicgyroscope gyroscope sensitive structure of the prior art is as shown in Figure 1, center is an annulus 11, by circumferentially
Several folded beams 12 of distribution are connected with external structure 13, and annulus 11 and folded beam 12 can be made by MEMS technology.Annulus 11
Inside is a cylindrical permanent magnet 14, and forms field circuit in 11 upper and lower surface of annulus by soft magnetic component 15, using electromagnetism
Mode is driven and is detected.
The above-mentioned structure is primarily present following problems:
(1) outside multi-point support is used, symmetrical centered on supporting beam, non-axis symmetry is lost bigger than normal, is unfavorable for obtaining high Q
Value, high sensitivity；
(2) it is related to the accurate micro-group dress of sensitive structure (characteristic size is in micron dimension), permanent magnet and soft magnetic component etc.,
The requirements such as pack clearance, magnetic gap are stringent, realize that difficulty is larger；
(3) magnetic assembly parameter is influenced vulnerable to factors such as external magnetic field interference, mechanical shock, temperature, to restrict gyro essence
The promotion of degree；
(4) it for frequency mismatch caused by structure manufacturing defect etc. etc., needs to carry out machine using the equipment that trims costly
Tool trims, higher cost, and once encapsulation is completed to modify again.
Summary of the invention
For the above-mentioned prior art, the purpose of the present invention is to provide a kind of annular microelectromechanicgyroscope gyroscope sensitive structures, are obtaining
The technique that gauge outfit component is reduced while taking the advantages such as high q-factor, high anti-interference, strong robustness realizes difficulty.
In order to achieve the above object, the present invention uses following technical scheme.
A kind of annular microelectromechanicgyroscope gyroscope sensitive structure structure of the present invention includes outer ring, is anchored point, combination beam, driving electrodes
Group, detecting electrode group and tuning electrode group；
It is anchored point and is located at center, outer ring passes through multiple combination beams and is anchored point connection, and outer ring and anchor point are concentric, outer ring
Upper and lower bottom surface is vacantly arranged, and driving electrodes group and detecting electrode group are alternately uniformly arranged on the outside of outer ring, and tuning electrode group is uniformly distributed
It is arranged on the inside of outer ring；
When work, outer ring keeps the driven-mode vibration shape under driving electrodes group electrostatic force, when there is angular speed work in the external world
Used time is closed, excitation-detection Mode Shape by brother's formula couple of force, and detecting electrode group is realized extraneous by the variation of detection capacitance gap
The sensing of input, tuning electrode group realize that the frequency of driving and sensed-mode matches.
The anchor point solid cylinder structure is anchored point bottom surface and is arranged in external structure, and the outer diameter being anchored a little is less than
The half of bore diameter of outer ring.
Described combination beam one end end is connect with point outer wall is anchored, and other end end is connect with outer ring inner wall, in combination beam
Between beam section structure be non-rectilinear girder construction, the perimeter of beam section, which is greater than, among combination beam is anchored point and outer spacing, and combination beam is with it
Both ends end line is that line of symmetry is in symmetrical structure, and multiple combination beams are symmetrical as symmetrical centre to be anchored a center of circle.
The combination beam includes two single-beams, and two single-beams bilateral symmetries, an outer wall is put with anchor respectively in two single-beam ends
It is connected with outer ring inner wall, beam section is in " U-shaped " detour structure among each single-beam, and " U-shaped " mouth of two single-beam intermediate beams is opposite to be set
It sets；The quantity of combination beam is 8.
The outer ring thick ring structure, outer ring thickness is less than 500 μm, and diameter is less than 10mm, highly less than 200 μm.
The driving electrodes group includes driving electrodes group and driving sensitive electrode group, and the detecting electrode group includes detection electricity
Pole group and detection sensitive electrode group；
Driving electrodes group, driving sensitive electrode group, detecting electrode group and detection sensitive electrode group include two identical function
The electrode of 180 ° of settings can be separated by；
Driving electrodes group, detection sensitive electrode group drive the electrode of sensitive electrode group and detecting electrode group successively alternately equal
Cloth is arranged on the outside of outer ring.
Further, the gap between adjacent electrode is less than 20 μm.
The tuning electrode group includes driving tuning first electrode group, detection tuning first electrode group, detection tuning second
Electrode group and driving tuning second electrode group；
Driving tuning first electrode group, detection tuning first electrode group, detection tuning second electrode group and driving tuning the
Two electrode groups include the electrode that four identical functions are separated by 90 ° of settings；
Driving tuning first electrode group, detection tuning first electrode group, detection tuning second electrode group and driving tuning the
The electrode of two electrode groups is successively sequentially arranged on the inside of outer ring.
Further, the gap between adjacent electrode is less than 20 μm.
The present invention makes entirely through MEMS technology；The anchor point, combination beam and outer ring rapidoprint are silicon or melting
Quartz.
Technical solution provided in an embodiment of the present invention has the benefit that
(1) a kind of annular microelectromechanicgyroscope gyroscope sensitive structure of the present invention, using center single-point support holohedral symmetry pattern, while anchor
Point, so that support loss be greatly reduced, obtains high q-factor at the vibration shape node location of driving and sensed-mode.
(2) a kind of annular microelectromechanicgyroscope gyroscope sensitive structure of the present invention, is driven and is detected using capacitor, sensitive structure integrally may be used
It is made by MEMS technology, reduces realization difficulty, also avoiding each disturbing factor relevant to electromagnetic drive detection influences.
(3) a kind of annular microelectromechanicgyroscope gyroscope sensitive structure of the present invention, using tuning electrode, using electrostatic negative stiffness effect,
Modal stiffness is adjusted, realizes the frequency matching of driven-mode and sensed-mode；Without valuableness compared with machinery trims
It trims that equipment, cost is relatively low, furthermore there is apparent on piece to adjust advantage, can also be controlled by closed loop appropriate and realize and exist
Line trims in real time.
Detailed description of the invention
Fig. 1 is a kind of conventional annular microelectromechanicgyroscope gyroscope sensitive structure of the prior art；
Fig. 2 is a kind of annular microelectromechanicgyroscope gyroscope sensitive structure of the present invention；
Fig. 3 is driving and the detection vibration shape schematic diagram of a kind of annular microelectromechanicgyroscope gyroscope sensitive structure of the present invention；
Fig. 4 is a kind of detection vibration shape schematic diagram of annular microelectromechanicgyroscope gyroscope sensitive structure of the present invention；
In figure: 11- annulus, 12- folded beam, 13- external structure, 14- permanent magnet, 15- soft magnetic component；21- outer ring, 22-
It is anchored point, 23- combination beam, 241- driving electrodes group, 242- detecting electrode group, 243- driving sensitive electrode group, 244- detects quick
Sense electrode group, 251- driving tuning first electrode group, 252- detection tuning first electrode group, 253- detection tuning second electrode
Group, 254- driving tuning second electrode group, 231- single-beam, the 31- driven-mode vibration shape, the 32- sensed-mode vibration shape, 33- drive mould
State main shaft, 34- sensed-mode main shaft.
Specific embodiment
Annular microelectromechanicgyroscope gyroscope sensitive structure a kind of to the present invention elaborates With reference to embodiment.
As shown in Fig. 2, a kind of annular microelectromechanicgyroscope gyroscope sensitive structure of the present invention, including outer ring 21, anchor point 22, combination beam
23, driving electrodes group, detecting electrode group and tuning electrode group；
Point 22 is anchored positioned at center, outer ring 21 is connect by multiple combination beams 23 with point 22 is anchored, outer ring 21 and anchor point
22 with one heart, and the upper and lower bottom surface of outer ring 21 is vacantly arranged, and driving electrodes group and detecting electrode group are alternately uniformly arranged outside outer ring 21
Side, tuning electrode group are uniformly arranged in 21 inside of outer ring；
When work, outer ring 21 keeps the driven-mode vibration shape under driving electrodes group electrostatic force, when there is angular speed in the external world
It when effect, is closed by brother's formula couple of force, excitation-detection Mode Shape, detecting electrode group is realized outer by the variation of detection capacitance gap
The sensing of boundary's input, tuning electrode group realize that the frequency of driving and sensed-mode matches.
The 22 solid cylinder structure of anchor point is anchored 22 bottom surfaces of point and is arranged in external structure, plays a supportive role, anchor
The outer diameter of contact 22 is less than the half of 21 internal diameter of outer ring；
23 one end end of combination beam is connect with 22 outer walls of point are anchored, and other end end is connect with 21 inner wall of outer ring, group
Conjunction 23 intermediate beam segment structure of beam is non-rectilinear girder construction, and the perimeter of the intermediate beam section of combination beam 23, which is greater than, is anchored point 22 and outer ring 21
Spacing, combination beam 23 are in symmetrical structure by line of symmetry of its both ends end line, and multiple combination beams 23 are to be anchored 22 centers of circle of point
Symmetrical centre is symmetrical；
It is preferred that combination beam 23 includes two single-beams 231, two single-beams, 231 bilateral symmetry, two 231 ends of single-beam respectively with
It is anchored 22 outer walls of point connect with 21 inner wall of outer ring, the intermediate beam section of each single-beam 231 is in " U-shaped " detour structure, in two single-beams 231
Between " U-shaped " mouth of beam be oppositely arranged；It is preferred that the quantity of combination beam 23 is 8；
The 21 thick ring structure of outer ring, 21 thickness of outer ring is less than 500 μm, and diameter is less than 10mm, highly less than 200 μ
m；
The driving electrodes group includes driving electrodes group 241 and driving sensitive electrode group 243, and the detecting electrode group includes
Detecting electrode group 242 and detection sensitive electrode group 244；
Driving electrodes group 241, driving sensitive electrode group 243, detecting electrode group 242 and detection sensitive electrode group 244 are wrapped
Include the electrode that two identical functions are arranged with respect to 180 °；
Driving electrodes group 241, detection sensitive electrode group 244, the electricity for driving sensitive electrode group 243 and detecting electrode group 242
Pole is successively alternately uniformly arranged in 21 outside of outer ring；Gap between adjacent electrode is less than 20 μm；
The tuning electrode group includes driving tuning first electrode group 251, and detection tunes first electrode group 252, and detection is adjusted
Humorous second electrode group 253 and driving tuning second electrode group 254；
Driving tuning first electrode group 251, detection tuning first electrode group 252, detects tuning second electrode group 253 and drives
Dynamic tuning second electrode group 254 includes the electrode that four identical functions are separated by 90 ° of settings, for correcting mode major axes orientation simultaneously
Realize modal frequency matching；
Driving tuning first electrode group 251, detection tuning first electrode group 252, detects tuning second electrode group 253 and drives
The electrode of dynamic tuning second electrode group 254 is successively sequentially arranged the gap between 21 inside of outer ring, adjacent electrode less than 20 μ
m；
The present invention is the full symmetrical configuration that anchor point 22 is center single-point support, is anchored point 22 in driving and sensed-mode
It shakes at shape node location, so that support loss be greatly reduced, obtains high q-factor.
The preferred silicon of the material of structure of the invention, vitreous silica etc., can integrally be made by MEMS technology, and it is difficult to reduce realization
Degree, each related interference factors for also avoiding conventional electromagnetic driving detection mode influence.
When work, outer ring 21 keeps the driven-mode vibration shape 31 under the electrode electrostatic force of driving electrodes group, such as Fig. 3 institute
Show, when there is angular speed effect in the external world, is closed by brother's formula couple of force, excitation-detection Mode Shape 32, as shown in figure 4, causing in turn
The electrode gap of detecting electrode group changes, and can obtain extraneous input by extracting relevant capacitor variation.
Furthermore the driven-mode main shaft 33 caused by structure fabrication process defect etc. and sensed-mode main shaft 34 offset and
When two modal frequency mismatches, by adjusting the voltage on each electrode of electrode group is tuned on the inside of outer ring 21, mode master can be realized
The correction of axis and frequency matching, compared to conventional mechanical method for repairing and regulating, are set to obtain maximum machine gain without expensive trimming
It is standby, cost is relatively low, furthermore there is apparent on piece to adjust advantage, can also be controlled by closed loop appropriate realize it is online real-time
It trims.
Claims (10)
1. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure, it is characterised in that: the structure includes outer ring, is anchored point, combination beam, driving
Electrode group, detecting electrode group and tuning electrode group；
Be anchored point and be located at center, outer ring is by multiple combination beams and is anchored point connection, outer ring and be anchored it is concentric, outer ring it is upper,
Bottom surface is vacantly arranged, and driving electrodes group and detecting electrode group are alternately uniformly arranged on the outside of outer ring, and tuning electrode group is laid
It sets on the inside of outer ring；
When work, outer ring keeps the driven-mode vibration shape under driving electrodes group electrostatic force, when there is angular speed effect in the external world,
It is closed by brother's formula couple of force, excitation-detection Mode Shape, detecting electrode group realizes extraneous input by the variation of detection capacitance gap
Sensing, tuning electrode group realize driving and sensed-mode frequency match.
2. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 1, it is characterised in that: the anchor point is solid
Cylindrical structure is anchored point bottom surface and is arranged in external structure, is anchored the half that outer diameter a little is less than bore diameter of outer ring.
3. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 1, it is characterised in that: described combination beam one end
End is connect with point outer wall is anchored, and other end end is connect with outer ring inner wall, and combination beam intermediate beam segment structure is non-rectilinear beam knot
Structure, the perimeter of combination beam centre beam section, which is greater than, is anchored point and outer spacing, and combination beam is in using its both ends end line as line of symmetry
Symmetrical structure, multiple combination beams are symmetrical as symmetrical centre to be anchored a center of circle.
4. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 3, it is characterised in that: the combination beam includes
Two single-beams, two single-beam bilateral symmetries, two single-beam ends are connect with anchor point outer wall and outer ring inner wall respectively, each single-beam
Intermediate beam section is in " U-shaped " detour structure, and " U-shaped " mouth of two single-beam intermediate beams is oppositely arranged；The quantity of combination beam is 8.
5. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 1, it is characterised in that: the outer ring heavy wall circle
Ring structure, outer ring thickness is less than 500 μm, and diameter is less than 10mm, highly less than 200 μm.
6. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 1, it is characterised in that: the driving electrodes group
Including driving electrodes group and driving sensitive electrode group, the detecting electrode group includes detecting electrode group and detection sensitive electrode group；
Driving electrodes group, driving sensitive electrode group, detecting electrode group and detection sensitive electrode group include two identical function phases
Every the electrode that 180 ° are arranged；
Driving electrodes group, drives the electrode of sensitive electrode group and detecting electrode group successively alternately to lay at detection sensitive electrode group
It sets on the outside of outer ring.
7. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 6, it is characterised in that: between adjacent electrode
Gap is less than 20 μm.
8. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 1, it is characterised in that: the tuning electrode group
First electrode group, detection tuning first electrode group, the second electricity of detection tuning second electrode group and driving tuning are tuned including driving
Pole group；
Driving tuning first electrode group, detection tuning first electrode group, the second electricity of detection tuning second electrode group and driving tuning
Pole group includes the electrode that four identical functions are separated by 90 ° of settings；
Driving tuning first electrode group, detection tuning first electrode group, the second electricity of detection tuning second electrode group and driving tuning
The electrode of pole group is successively sequentially arranged on the inside of outer ring.
9. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 8, it is characterised in that: between adjacent electrode
Gap is less than 20 μm.
10. a kind of annular microelectromechanicgyroscope gyroscope sensitive structure according to claim 1, it is characterised in that: the present invention is integrally led to
Cross MEMS technology production；The anchor point, combination beam and outer ring rapidoprint are silicon or vitreous silica.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111504291A (en) * | 2020-04-30 | 2020-08-07 | 瑞声声学科技(深圳)有限公司 | Gyroscope |
| CN112857352A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Redundant double-ring type micromechanical gyroscope structure with good impact resistance |
| WO2021217667A1 (en) * | 2020-04-30 | 2021-11-04 | 瑞声声学科技(深圳)有限公司 | Gyroscope |
| WO2022007039A1 (en) * | 2020-07-09 | 2022-01-13 | 瑞声声学科技(深圳)有限公司 | Gyroscope |
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| CN103913159A (en) * | 2014-04-29 | 2014-07-09 | 重庆大学 | Tunnel type MEMS (Micro-electromechanical Systems) gyroscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111504291A (en) * | 2020-04-30 | 2020-08-07 | 瑞声声学科技(深圳)有限公司 | Gyroscope |
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| CN112857352B (en) * | 2021-04-15 | 2022-03-25 | 中北大学 | Redundant double-ring type micromechanical gyroscope structure with good impact resistance |
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Application publication date: 20190521 |