CN104976996B - Nested ring type MEMS oscillation gyros with period profile lumped mass block - Google Patents
Nested ring type MEMS oscillation gyros with period profile lumped mass block Download PDFInfo
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- CN104976996B CN104976996B CN201510478298.1A CN201510478298A CN104976996B CN 104976996 B CN104976996 B CN 104976996B CN 201510478298 A CN201510478298 A CN 201510478298A CN 104976996 B CN104976996 B CN 104976996B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5649—Signal processing
Abstract
The present invention provides a kind of nested ring type MEMS oscillation gyros with period profile lumped mass block, including the nested ring type harmonic oscillator with period profile lumped mass block and it is arranged on electrode inside harmonic oscillator or/and outside, harmonic oscillator includes the anchor point of nested ring type flexible frame, the mass being arranged on nested ring type flexible frame and fixed harmonic oscillator, and whole harmonic oscillator is firmly anchored by the anchor point positioned at resonance subcenter with substrate.The nested ring type flexible frame is made up of nested rings and spoke-like support beam, mass can be added on nested ring type flexible frame using various ways, and electrode can be arranged on the internal or external of harmonic oscillator, can also set electrode simultaneously inside and outside harmonic oscillator.The present invention has higher thermoelasticity Q values；Larger tuned mass；Larger driving amplitude；If using built-in electrode design or interior external electrode and deposit design, then also there is many advantages, such as detection capacity area is big, observing and controlling electrode number is more.
Description
Technical field
The present invention relates to a kind of micro-electro-mechanical gyroscope, and more particularly to a kind of MEMS oscillation gyros.
Background technology
Gyroscope is the sensor for measuring the motion of carrier relative inertness Space Rotating, is motion measurement, inertial navigation, guidance
The core devices in the fields such as control, it is military in the high-end industrial equipment such as Aero-Space, intelligent robot, guided munition and precision strike
There is very important application value in device.Traditional gyroscope includes mechanical rotor gyro, electrostatic gyroscope, hemispherical resonator top
Spiral shell, laser gyro, optical fibre gyro, dynamic tuned gyroscope etc., although their precision are high, volume, power consumption, price etc. are difficult to
Meet to require.MEMS gyroscope based on micro electro mechanical system (MEMS) technology has small volume, low in energy consumption, long lifespan, can be mass, valency
The features such as lattice are cheap, there is innate advantage in high-volume and the industry of small size and weaponry application.But with classical spinning top
Instrument is compared, and the precision of MEMS gyroscope is high not enough at present, and using being mainly limited to, smart mobile phone, MAV, automobile are steady
The low side fields such as fixed control, micro- inertia/satellite combined guidance system.The anti-interference anti-deception of satellite navigation, indoor navigation, microminiature
The emerging fields such as underwater unmanned platform, individual soldier's positioning, underground orientation with drilling system are to high-performance, small size, low-power consumption, low cost
Gyroscope proposes active demand.
It is high q-factor, big tuned mass, big driving amplitude and big detection electricity to realize the high performance key of MEMS gyroscope
Hold, and the oscillation gyro for being operated in degenerate modes (driven-mode is identical with sensed-mode) is relatively operated in orthogonal modes (driving
Mode differs and orthogonal with sensed-mode) oscillation gyro there is higher Precision Potential.
Influenceing the principal element of Q values has thermoelastic damping, support loss, press-filming damping, slide-film damping and other dampings, right
In under high vacuum environment and for W/S plane micro-structural, wherein thermoelastic damping plays decisive role.
Thermoelastic damping is as caused by irreversible hot-fluid in structure, by taking girder construction as an example, is occurred under vibrational state curved
Bent beam side tension, opposite side are pressurized, and by the hot expansion property of material stress field are coupled with temperature field.Zener
In document [C.Zener, " Internal Friction in Solids II:General Theory of
Thermoelastic Internal Friction, " Physical Review, vol.53, pp.230-235,1938.] in give
The general expression of vibrational structure thermoelastic damping is gone out：
Wherein E is young modulus of material, and α is material thermal expansion coefficient, T0For nominal mean temperature 300K, CvFor material
Thermal capacity, ω are mechanical resonant frequency, and τ is thermal relaxation time, for simple girder construction, is had：
Wherein b is the width of beam, and κ is material thermal conductivity.
The Phenomenological Explanation of the machinery-thermal coupling is：The temperature rise of structure compression side, tension side temperature reduce, so as to
Thermograde is produced, the thermograde causes heat transfer to cause energy loss.Thermal relaxation time τ physical significance be from it is cold and hot not
Equilibrating to the time needed for cold and hot balance claims.When the vibration period t and thermal relaxation time τ of structure are close, the loss of energy reaches
To maximum.If vibration period t is much larger than thermal relaxation time τ, structure is generally in thermal equilibrium state in vibration, claims so
State be " isothermal " state, the energy of structural loss is less under the state；If vibration period t is much smaller than thermal relaxation time τ,
The thermal unbalance of vibrational structure has little time relaxation, as state be referred to as " thermal insulation " state, under the state same energy loss compared with
It is few.
Thermoelasticity Q values (QTED) influence curve as shown in figure 1, abscissa is structural natural frequencies f and thermal relaxation frequency in figure
Rate f0Ratio, wherein thermal relaxation frequency be thermal relaxation time inverse, i.e.,：f0=1/ τ.Therefore high Q is obtainedTEDThe key of value is
Thermal relaxation frequency is avoided by the resonant frequency of structure design arrangement works mode.For silicon materials micro-structural, its
Thermal relaxation time is shorter, and the smaller thermal relaxation time of structure is shorter.
Because silicon is a kind of high thermal conductivity material, from (2) formula, if producing the yardstick very little of the structure of deformation,
Thermal relaxation time τ (the very big thermal relaxation frequency f of very little can be realized0).Common high QTEDValue silicon micro element is in " isothermal
State ", i.e. f<<f0, such as the harmonic oscillator described in patent CN102388292A, the harmonic oscillator is using nested multiple resonant rings
Composition, the Q of the designTEDValue is in 105Magnitude, multiple nested rings also provide larger tuned mass.But the matter of the design
Amount and rigidity are couplings, i.e., to realize that bigger tuned mass necessarily causes the increase of rigidity, the mechanical resonant frequency of structureWherein m* and k* is respectively structure equivalent mass and equivalent stiffness, and rigidity of structure increase necessarily causes structure machine
Tool resonant frequency increases, and is unfavorable for the lifting of Q values, and employ distributed mass.Although the design embodies higher performance,
But the Q values and tuned mass of the structure still have much room for improvement.
Also having makes micro element be in " adiabatci condition " to realize high QTEDValue, such as described in patent CN101553734A
Harmonic oscillator, the design realizes high intrinsic frequency (MHz ranks) and relatively low thermal relaxation by abundant structure
Frequency, i.e. f>>f0.Although the structure limits with higher Q values and larger tuned mass, the driving amplitude of very little
The raising of its performance.
The content of the invention
In view of the deficienciess of the prior art, it is an object of the invention to provide a kind of with the embedding of period profile lumped mass block
Lantern ring type MEMS oscillation gyros.
The technical scheme is that：
A kind of nested ring type MEMS oscillation gyros with period profile lumped mass block, including band period profile lumped mass
The nested ring type harmonic oscillator of block and the electrode for being arranged on inside harmonic oscillator or/and outside, the harmonic oscillator include nested ring type
The anchor point of flexible frame, the mass being arranged on nested ring type flexible frame and fixed harmonic oscillator, whole harmonic oscillator pass through
Anchor point positioned at resonance subcenter is firmly anchored with substrate, the nested ring type flexible frame generally axially symmetric structure, described
Nested ring type flexible frame is made up of nested rings and spoke-like support beam, and the nested rings are multiple annulus using anchor point as the center of circle
And, uniformly divided by more between the nested rings and anchor point between adjacent nested rings and positioned at innermost layer between annulus equidistantly
The spoke-like support beam support connection of cloth, mass are arranged in the ring between adjacent nested rings, and multiple masses are in circumferential
Cycle is evenly distributed in multiple rings, and all mass distributions in same ring are on same circumference, each ring
The number of interior mass is equal.
Further, the mass in the present invention has a variety of set-up modes, and mass can be arranged directly on spoke
In shape support beam, i.e., described mass is each attached in spoke-like support beam.
Further, the mass of the invention can be set by the way of " suspension ", i.e., the present invention is also comprising use
In the cantilever beam for setting mass, more cantilever beams are uniformly arranged on the medial/lateral of nested rings, and cantilever beam one end is fixedly connected
In nested rings, the end of cantilever beam is stretched in the ring of nested rings medial/lateral, and the adjacent cantilever beam in same ring with
And the spacing between adjacent cantilever beam and spoke-like support beam is equal, the end of every cantilever beam is respectively and fixedly provided with a mass.
Further, the mass of the invention can be arranged directly in spoke-like support beam, while also use
The mode of " suspension " is set.I.e. the present invention also includes the cantilever beam for being used for setting mass, and more cantilever beams are uniformly arranged on embedding
The medial/lateral of the collar, cantilever beam one end are fixedly connected in nested rings, and nested rings medial/lateral is stretched in the end of cantilever beam
Ring in, and the spacing between adjacent cantilever beam in same ring and adjacent cantilever beam and spoke-like support beam is equal,
Mass is provided with cantilever beam and spoke-like support beam in same ring.
Further, the nested ring type harmonic oscillator of the invention with period profile lumped mass block uses high thermal conductivity material system
Form.
Further, the nested ring type harmonic oscillator with period profile lumped mass block of the invention made using monocrystalline silicon and
Into.
Further, electrode of the present invention is arranged on outside harmonic oscillator, and multiple electrodes are evenly distributed in the circumferential cycle
The periphery of harmonic oscillator, the ring formed between adjacent nested rings are provided with equally distributed mass of circumferential cycle.
Further, electrode of the present invention is arranged on inside harmonic oscillator, at least one ring formed by adjacent nested rings
It is distributed with circle in equally distributed multiple electrodes of circumferential cycle, is provided with the ring that remaining adjacent nested rings is formed in week
To cycle equally distributed mass.
Further, harmonic oscillator of the present invention is outwardly and inwardly provided with electrode, and multiple electrodes are equal in the circumferential cycle
The even periphery for being distributed in harmonic oscillator, and be distributed with least one ring formed by adjacent nested rings and uniformly divide in the circumferential cycle
The multiple electrodes of cloth, it is provided with equally distributed mass of circumferential cycle in the ring that remaining adjacent nested rings is formed.
Further, harmonic oscillator of the present invention is internally provided with electrode, and multiple rings inside the harmonic oscillator are used for
Built-in electrode, places two circle electrodes in two adjacent rings of anchor point and this two circles electrode is used to drive and trim, remote
Built in one ring circle of anchor point two circle electrodes and this two circle electrode be used for detect and trim.
The present invention is realized by adding the lumped mass block of period profile on axisymmetric nested ring type flexible frame
The decoupling of quality and rigidity, that is, do not interfere with or the only rigidity of minimal effect structure after increasing tuned mass, nested ring type
Flexible frame should have the characteristic that rigidity is low, and be axially symmetric structure, in a particular embodiment of the present invention, flexible box
Frame is nested multiple ring structures, is connected between nested rings by equally distributed spoke-like support beam of circumferential cycle.
On nested ring type flexible frame addition set the main points of period profile lumped mass block be to try to avoid to influence it is whole
The rigidity of body structure, mass can be added by the way of " suspension " on nested ring type flexible frame, i.e., from nested rings
A cantilever beam is stretched out on formula flexible frame, then lumped mass block is added in the end of cantilever beam, if the width of the cantilever beam
Degree is little, and this mode only produces slight influence to the rigidity of nested rings framework.
Furthermore it is possible to period profile lumped mass is being added to the less position of nested ring type flexible frame stiffness effect
Period profile lumped mass block is added on block, such as the support beam of the spoke-like of nested ring type flexible frame.All additions are concentrated
The mode of mass all must take into consideration influence of the gravity for flexible structure, and (flexible frame caused by mass gravity and connection are used
The deformation of cantilever beam), because under minute yardstick, the isometric power of gravity influences slightly, and flexible structure deformation is smaller caused by gravity,
Therefore the mode of addition lumped mass block is particularly suitable for the quality and rigidity Decoupling design of micro-structural.
The nested ring type harmonic oscillator with period profile lumped mass block of the present invention has relatively low equivalent stiffness and larger
Equivalent mass, therefore there is relatively low intrinsic frequency.And the nested ring type with period profile lumped mass block of the present invention
Harmonic oscillator is made using high thermal conductivity materials such as monocrystalline silicon, causes construction machine-thermal coupling of thermoelastic damping to appear in structure
Nested ring type flexible frame on, but nested ring type flexible frame can realize very thin design, therefore structure can be realized
The thermal relaxation time (i.e. very high thermal relaxation frequency) of very little.Relatively low intrinsic frequency f and higher thermal relaxation are learnt by Fig. 1
Frequency f0Very high Q can be obtainedTEDValue.
The nested ring type MEMS oscillation gyros with period profile lumped mass block of the present invention are that one kind is typically operated in
The micro-vibration gyro of degenerate modes, i.e., the driven-mode of its harmonic oscillator is as sensed-mode.Band period profile lumped mass block
The operation principles of nested ring type MEMS oscillation gyros be：By static-electronic driving mode, resonance is gone out with specific frequency excitation
The first mode (i.e. driven-mode) of son as shown in Figure 2 A, its first mode is the standing wave that ring wave number is 2, wherein at antinodal point
Amplitude it is maximum, the amplitude at nodal point is zero, and antinodal point line forms intrinsic rigidity shafting；When there is axial turning rate input
When, the second mode that harmonic oscillator produces another intrinsic rigidity shafting as shown in Figure 2 B in the presence of coriolis force (detects mould
State), the vibration of harmonic oscillator second mode is converted into sensitive electrical signal, the sensitive electrical signal and input by capacitance detecting mode
Angular speed is directly proportional, it is filtered involve amplification etc. processing can obtain input angular velocity information.
Additionally due to harmonic oscillator unavoidably has certain foozle, vibration shape skew and frequency are split caused by the error
Solution is the principal element for influenceing gyro performance, it is necessary to the dynamic equilibrium for realizing gyro be trimmed using electrostatic, by ad-hoc location
Trim and apply bias voltage in coordination electrode and realize the regulation of system equivalent stiffness, so as to realizing the mode vectors correlation of harmonic oscillator
And dynamic equilibrium.
Nested ring type MEMS oscillation gyros with period profile lumped mass block realize resonance by the way of electrostatic/electric capacity
The driving of son, detect and trim, therefore the design of electrode has important influence for the performance of MEMS oscillation gyros.The band cycle
The design for the external electrode being looped around around harmonic oscillator can be used by being distributed the nested ring type MEMS oscillation gyros of lumped mass block,
Can also be in the void designs built-in electrode inside harmonic oscillator, while external electrode and built-in electrode can also be used and that deposits set
Meter.If electrode number is more, the capacity area of single electrode is bigger, then the driving of electrode, detect and to trim effect better.
The advantageous effects of the present invention：
The present invention makes full use of the microscopic heat conduction of micro-structural, using the concentration matter that period profile is added on flexible frame
Gauge block, realize quality and the rigidity decoupling of harmonic oscillator so that structure can be provided simultaneously with larger tuned mass and less
The rigidity of structure.This is designed to reach many outstanding speciality for being beneficial to gyro performance：High QTEDValue, big tuned mass and
Big driving amplitude, if using built-in electrode design or inside and outside putting electrode and depositing design, additionally it is possible to realize that big detection is electric
Hold and trim electrode number with abundant.
In order to be further understood that the feature of the present invention and technology contents, refer to below in connection with the present invention specifically
Bright, accompanying drawing and subordinate list, but institute's accompanying drawing only provides reference and explanation, is not used for being any limitation as the present invention.
Brief description of the drawings
Fig. 1 shows thermoelasticity QTEDValue and structural natural frequencies f and thermal relaxation frequency f0Ratio relation curve；
Fig. 2A shows that the degenerate modes gyros such as the nested ring type MEMS oscillation gyros with period profile lumped mass block are humorous
First mode (driven-mode) schematic diagram of oscillator；
Fig. 2 B show that the degenerate modes gyros such as the nested ring type MEMS oscillation gyros with period profile lumped mass block are humorous
Second mode (sensed-mode) schematic diagram of oscillator；
Fig. 3 A show the lumped mass block that period profile is added in the spoke-like support beam of nested ring type flexible frame
Nested ring type harmonic oscillator topological form (left side) and structural representation (right side)；
Fig. 3 B are shown adds 8 cycles point in each nested rings of nested ring type flexible frame in a manner of " suspension "
The topological form (left side) and structural representation (right side) of the nested ring type harmonic oscillator of the lumped mass block of cloth；
Fig. 3 C are shown adds 16 cycles in each nested rings of nested ring type flexible frame in a manner of " suspension "
The topological form (left side) and structural representation (right side) of the nested ring type harmonic oscillator of the lumped mass block of distribution；
Fig. 3 D show while add period profile in the spoke-like support beam and nested rings of nested ring type flexible frame
The topological form (left side) and structural representation (right side) of the nested ring type harmonic oscillator of lumped mass block；
Fig. 4 shows some masses inside removing to form the band period profile concentration that vacancy places built-in electrode
The structural representation of the nested ring type harmonic oscillator of mass；
Fig. 5 shows static(al) simulation result, for illustrating that the miniature nested ring type for adding period profile lumped mass block is humorous
The static deformation of the very little of oscillator under gravity；
Fig. 6 A show the first mode bending vibation mode picture of the nested ring type harmonic oscillator with period profile lumped mass block；
Fig. 6 B show the second mode bending vibation mode picture of the nested ring type harmonic oscillator with period profile lumped mass block；
Fig. 7 A show the nesting with period profile lumped mass block using circumferential equally distributed multiple external electrodes
Ring type MEMS oscillation gyro structural representations；
Fig. 7 B show the vibration tops of the nested ring type MEMS with period profile lumped mass block using multiple built-in electrodes
Spiro structure schematic diagram；
Fig. 7 C show while using the nested ring types with period profile lumped mass block of external electrode with built-in electrode
MEMS oscillation gyro structural representations.
Embodiment
The present invention realizes quality and rigidity by adding lumped mass block on axisymmetric nested ring type flexible frame
Decoupling, that is, do not interfered with after increasing tuned mass or the only rigidity of minimal effect structure.As shown in Fig. 3 A, 3B, 3C, 3D
To add the topological schematic diagram (left figure) of four embodiments of the harmonic oscillator of lumped mass block and knot on nested ring type flexible frame
Nested ring type flexible frame 1 is made up of nested rings 2 and spoke-like support beam 3 in structure schematic diagram (right figure) embodiment, total
Firmly it is anchored with substrate by anchor point 4.
In Fig. 3 A illustrated embodiments, mass 5 is set in the spoke-like support beam 3 of nested ring type flexible frame 1, it is adjacent
Spacing is equal between nested rings 2 and adjacent nested rings 2 between form ring, be uniformly distributed between adjacent nested rings 2 by 8
Support beam 3 connect, 8 circumferential cycle equally distributed masses 6 are equipped with each ring, mass 6 is arranged on support
On beam 3.
Embodiment shown in Fig. 3 B, 3C is to be set in the nested rings 2 of nested ring type flexible frame 1 using " suspension " mode
The mass 6 of varying number.More cantilever beams 7 are uniformly arranged on the inner side of nested rings 2, and the phase in same ring in annular
Spacing between adjacent cantilever beam 7 and adjacent cantilever beam 7 and support beam 3 is equal, and the mass 6 is each attached on cantilever beam 7.
In figure 3b, each nested rings 2 are provided with 8 cantilever beams 7, and the one end of cantilever beam 7 is connected with nested rings 2, and the end of cantilever beam 7 is used
8 circumferential cycle equally distributed masses 6, quality are equipped with ring between setting mass 6, adjacent nested rings 2
Block 6 is arranged on the end of hanging beam 7.In fig. 3 c, each nested rings 2 are provided with 16 cantilever beams, between 7 adjacent nested rings 2
Ring in be equipped with 16 circumferential cycle equally distributed masses 6, mass 6 is arranged at the end of hanging beam 7.Quality
Block 6 is connected by the way of " suspension " with nested ring type flexible frame, for the stiffness effect very little of framework；
Embodiment shown in Fig. 3 D " suspension " mass 6 in the nested rings 2 of nested ring type flexible frame 1, while embedding
Mass 5 is set in the spoke-like support beam 3 of lantern ring type flexible frame 1.
Increasing electrode number can be with increasing detection capacitance area, while can also lift gyro driving and control efficiency, can be with
Further lift gyro performance.In the embodiment shown in fig. 4, the nested ring type of lumped mass block is uniformly distributed with the circumferential cycle
Harmonic oscillator 11 includes nested ring type flexible box 1, the mass 6 being arranged on nested ring type flexible frame 1 and fixed harmonic oscillator
11 anchor point 4, whole harmonic oscillator 11 are firmly anchored by the anchor point 4 positioned at the center of harmonic oscillator 11 with substrate, the nested ring type
The generally axially symmetric structure of flexible frame 1, the nested ring type flexible frame 1 are made up of nested rings 2 and spoke-like support beam 3,
The nested rings 2 are multiple equidistant between the annulus and annulus in the center of circle with anchor point 4, between adjacent nested rings 2 and are located at
By the more equally distributed support of support beam 3 connections between the nested rings 2 and anchor point 4 of innermost layer, whole support beams 3 are overall to be in
Spoke-like is distributed, and the ring 8 for setting mass or electrode is formed between adjacent nested rings 2, can be used for multiple rings 8 are vacant
Built-in electrode is placed, to increase electrode number.
Under microscopic heat conduction, the isometric power of gravity influences slightly, and the mass hung by thinner cantilever beam will not
Larger sagging deflections are produced, while relatively thin nested ring type framework can also support the structure of larger quality larger without producing
Deformation.Static state of the nested ring type harmonic oscillator of addition mass under the effect of axial acceleration of gravity is emulated by finite element software
Deform, gravity acceleration g is arranged to 9.81m/s in simulation analysis2, direction is along harmonic oscillator axial direction.Each embodiment band in emulation
This structural parameters of the nested ring type Harmonic oscillator basis of period profile lumped mass block are as shown in table 1, and the artificial material of harmonic oscillator is single
Crystal silicon, emulation obtain the (displacement in figure as shown in Figure 5 of the nested ring type harmonic oscillator sagging deflections with period profile lumped mass block
Processing is amplified, preferably to observe deformation), the maximum distortion number of the harmonic oscillator of each embodiment under gravity
Value is as shown in table 2.Shown by simulation result, although the nested ring type harmonic oscillator with period profile lumped mass block has hung quality
Block, but gravity sag displacement is in the minimum level of nanometer scale, will not be had an impact for the normal work of gyro.
With the nested ring type Harmonic oscillator basis of period profile lumped mass block this structure ginseng in each embodiment that the emulation of table 1 uses
Number
Table 2 emulates the nested ring type harmonic oscillator gravity sag position with period profile lumped mass block in obtained each embodiment
Move
The harmonic oscillator of the present embodiment has a relatively low equivalent stiffness and larger equivalent mass, therefore with relatively low intrinsic
Frequency.Because the construction machine-thermal coupling for causing thermoelastic damping is appeared on the nested ring type flexible frame of structure, but
Nested ring type flexible frame thickness can realize very thin design, therefore structure has the thermal relaxation time of very little (i.e. very high
Thermal relaxation frequency).Relatively low intrinsic frequency f and higher thermal relaxation frequency f are learnt by Fig. 10Very high Q can be obtainedTED
Value.
Nested ring type harmonic oscillator with period profile lumped mass block is carried out using COMSOL Multiphysics softwares
The thermoelastic damping simulation study of operation mode, the material of harmonic oscillator is arranged to the work of monocrystalline silicon, wherein harmonic oscillator in emulation
Mode is the standing wave mode that ring wave number is 2, as shown in Figure 6.Pass through each embodiment resonance that simulation architecture parameter is as shown in table 1
The thermoelastic properties of son, while contrast simulation does not add the thermoelastic properties of the nested rings framework of mass, simulation result such as table 3
It is shown.Simulation result shows, adds the nested ring type harmonic oscillator of mass compared to the nested rings framework for not adding lumped mass
The Q of operation modeTEDValue improves several times.
Table 3 emulates the nested ring type harmonic oscillator operation mode with period profile lumped mass block in obtained each embodiment
Thermoelasticity QTEDValue
The operation principle of the nested ring type MEMS oscillation gyros with period profile lumped mass block is in embodiment：By quiet
Driven by power mode, the driven-mode of harmonic oscillator as shown in Figure 6A is motivated, when there is axial turning rate input, harmonic oscillator is in brother
Sensed-mode as shown in Figure 6B is produced in the presence of family name's power, the vibration of harmonic oscillator sensed-mode is turned by capacitance detecting mode
Change sensitive electrical signal into, the sensitive electrical signal is directly proportional to input angular velocity, it is filtered involve amplification etc. processing can obtain it is defeated
Enter angular velocity information.
The setting of electrode has important influence for the performance of MEMS oscillation gyros.In the embodiment shown in Fig. 7 A,
Nested ring type MEMS oscillation gyros with period profile lumped mass block are designed using external electrode, can be set according to being actually needed
Electrode number is counted, general 8 circumferential cycle equally distributed electrodes can make gyro normal work, but the manufacture of harmonic oscillator misses
Difference can influence the performance of gyro, therefore better way is to set 16 or more circumferential cycle equally distributed electrodes, is driven
Electrode corresponding to moving axis (x-O-y) and sensitive axes (x '-O-y ') is used for the driving and detection of gyro, and remaining electrode is used for gyro
Electrostatic force trims, and realizes the dynamic equilibrium of gyro.
In the embodiment shown in Fig. 7 B, in the nested ring type MEMS oscillation gyros use with period profile lumped mass block
Electrode design is put, built-in electrode is arranged in the inner collar of harmonic oscillator 11, and multiple rings are used for built-in electrode inside harmonic oscillator,
Two circle electrodes 12 can be placed in a ring circle of harmonic oscillator anchor point, these built-in electrodes can be used for driving and trim,
Two circle electrodes 13 can also be placed in a ring circle away from harmonic oscillator anchor point, these built-in electrodes can be used for detecting and repair
Adjust.Designed compared to external electrode, built-in electrode is designed to increase electrode number, is advantageous to gyro performance boost.
In the embodiment shown in Fig. 7 C, the nested ring type MEMS oscillation gyros with period profile lumped mass block use outer
Electrode and built-in electrode and the design deposited are put, the two circle built-in electrodes 12 close to anchor point can be used for driving and trim, away from humorous
Two circle built-in electrodes 13 of oscillator anchor point can be used for detecting and trimming, and external electrode 14 can also be used for detecting and trim.
The explanation of the preferred embodiment of the present invention contained above, this be in order to describe the technical characteristic of the present invention in detail, and
It is not intended to the content of the invention being limited in the concrete form described by embodiment, according to other of present invention purport progress
Modifications and variations are also protected by this patent.The purport of present invention is to be defined by the claims, rather than by embodiment
Specific descriptions are defined.
Claims (10)
- A kind of 1. nested ring type MEMS oscillation gyros with period profile lumped mass block, it is characterised in that：Including the band cycle point The nested ring type harmonic oscillator of cloth lumped mass block and the electrode for being arranged on inside harmonic oscillator or/and outside, the resonance attached bag The anchor point of nested ring type flexible frame, the mass being arranged on nested ring type flexible frame and fixed harmonic oscillator is included, entirely Harmonic oscillator is firmly anchored by the anchor point positioned at resonance subcenter with substrate, the nested ring type flexible frame generally axial symmetry Structure, the nested ring type flexible frame are made up of nested rings and spoke-like support beam, the nested rings be it is multiple using anchor point as Between the annulus and annulus in the center of circle equidistantly, pass through between the nested rings and anchor point between adjacent nested rings and positioned at innermost layer More equally distributed spoke-like support beam support connections, mass are arranged in the ring between adjacent nested rings, Duo Gezhi Gauge block is evenly distributed in multiple rings in the circumferential cycle, and all mass distributions in same ring are in same circumference On, the number of the mass in each ring is equal.
- 2. the nested ring type MEMS oscillation gyros according to claim 1 with period profile lumped mass block, its feature exist In：The mass is each attached in spoke-like support beam.
- 3. the nested ring type MEMS oscillation gyros according to claim 1 with period profile lumped mass block, its feature exist In：The cantilever beam that being used for, mass is set also is included, more cantilever beams are uniformly arranged on the medial/lateral of nested rings, cantilever beam One end is fixedly connected in nested rings, and the end of cantilever beam is stretched in the ring of nested rings medial/lateral, and in same ring Spacing between adjacent cantilever beam and adjacent cantilever beam and spoke-like support beam is equal, and the end of every cantilever beam is respectively and fixedly provided with One mass.
- 4. the nested ring type MEMS oscillation gyros according to claim 1 with period profile lumped mass block, its feature exist In：The cantilever beam that being used for, mass is set also is included, more cantilever beams are uniformly arranged on the medial/lateral of nested rings, cantilever beam One end is fixedly connected in nested rings, and the end of cantilever beam is stretched in the ring of nested rings medial/lateral, and in same ring Spacing between adjacent cantilever beam and adjacent cantilever beam and spoke-like support beam is equal, the cantilever beam in same ring with And it is provided with mass in spoke-like support beam.
- 5. the nested ring type MEMS oscillation gyros with period profile lumped mass block according to claim 1,2,3 or 4, its It is characterised by：Nested ring type harmonic oscillator with period profile lumped mass block is made using high thermal conductivity material.
- 6. the nested ring type MEMS oscillation gyros according to claim 5 with period profile lumped mass block, its feature exist In：Nested ring type harmonic oscillator with period profile lumped mass block is made using monocrystalline silicon.
- 7. the nested ring type MEMS oscillation gyros according to claim 6 with period profile lumped mass block, its feature exist In：The electrode is arranged on outside harmonic oscillator, and multiple electrodes are evenly distributed on the periphery of harmonic oscillator, adjacent nesting in the circumferential cycle The ring formed between ring is provided with equally distributed mass of circumferential cycle.
- 8. the nested ring type MEMS oscillation gyros according to claim 6 with period profile lumped mass block, its feature exist In：The electrode is arranged on inside harmonic oscillator, is distributed with least one ring formed by adjacent nested rings in the circumferential cycle Equally distributed multiple electrodes, it is provided with equally distributed quality of circumferential cycle in the ring that remaining adjacent nested rings is formed Block.
- 9. the nested ring type MEMS oscillation gyros according to claim 6 with period profile lumped mass block, its feature exist In：The harmonic oscillator is outwardly and inwardly provided with electrode, and multiple electrodes are evenly distributed on the periphery of harmonic oscillator in the circumferential cycle, And be distributed with least one ring formed by adjacent nested rings in equally distributed multiple electrodes of circumferential cycle, remaining is adjacent It is provided with the ring that nested rings are formed in equally distributed mass of circumferential cycle.
- 10. the nested ring type MEMS oscillation gyros with period profile lumped mass block according to claim 8 or claim 9, it is special Sign is：The harmonic oscillator is internally provided with electrode, and multiple rings inside the harmonic oscillator are used for built-in electrode, close to anchor point Two adjacent rings in place two circle electrodes and this two circle electrode be used for drive and trim, away from anchor point a ring circle built in Two circle electrodes and this two circle electrode be used for detect and trim.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN111156982A (en) * | 2019-12-31 | 2020-05-15 | 瑞声科技（南京）有限公司 | MEMS gyroscope |
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| CN111854722B (en) * | 2020-07-30 | 2022-05-10 | 中国人民解放军国防科技大学 | Nested ring type micro-electromechanical vibration gyro with zigzag flexible ring |
| CN112857352B (en) * | 2021-04-15 | 2022-03-25 | 中北大学 | Redundant double-ring type micromechanical gyroscope structure with good impact resistance |
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Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US7493814B2 (en) * | 2006-12-22 | 2009-02-24 | The Boeing Company | Vibratory gyroscope with parasitic mode damping |
| RU2379630C1 (en) * | 2008-10-16 | 2010-01-20 | Московский государственный институт электронной техники (технический университет) | Sensitive element of angular speed sensor |
| GB201120536D0 (en) * | 2011-11-29 | 2012-01-11 | Atlantic Inertial Systems Ltd | Fault detection using skewed transducers |
| EP2607849A1 (en) * | 2011-12-22 | 2013-06-26 | Tronics Microsystems S.A. | Multiaxial micro-electronic inertial sensor |
| CN103213939B (en) * | 2012-01-19 | 2016-01-20 | 北京自动化控制设备研究所 | A kind of processing method of four mass silicon microelectromechanicgyroscope gyroscope structures |
| WO2015108989A1 (en) * | 2014-01-14 | 2015-07-23 | Qualtre, Inc. | Mems apparatus with intentional geometrical imperfections for alignment of resonant modes and to compensate for manufacturing variations |
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