CN107966141B - Quick oscillation starting device and oscillation starting method for silicon micro-resonator - Google Patents
Quick oscillation starting device and oscillation starting method for silicon micro-resonator Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
The invention relates to a microelectronic process processing technology, and particularly discloses a silicon micro-resonator rapid oscillation starting device and an oscillation starting method. In the method, threshold judgment is carried out on the amplitude of a vibration voltage signal in a self-excited oscillation circuit, a driving signal of the silicon micro-resonator is selected, and initial frequency test and circuit parameter configuration of the resonator are not required in advance. The self-excited oscillation circuit is composed of the preposed readout circuit, the comparator and the selection switch, the resonance frequency of the silicon micro-resonator can be quickly obtained by the self-excited oscillation circuit, the frequency information is sent to the closed-loop control circuit, and the banner oscillation of the silicon micro-resonator is realized by the closed-loop control circuit, so that the oscillation starting time is shortened, the debugging time is saved, and the production cost is saved.
Description
Technical Field
The invention relates to a microelectronic process technology, in particular to a silicon micro-resonator rapid oscillation starting device and an oscillation starting method using the same.
Background
The silicon micro-resonator is a device with the characteristic dimension in the micron order processed by the microelectronic process, has the advantages of small volume, low cost, suitability for batch processing and the like, and is widely applied to various MEMS devices, such as: a resonance micro cantilever, a micro mechanical gyroscope, a resonance micro accelerometer and the like. Silicon microresonators typically operate at a modal resonant frequency with peripheral drive circuitry and maintain constant amplitude vibration. The existing silicon micro-resonator can adopt analog closed-loop drive or digital closed-loop drive, and the digital closed-loop drive can conveniently acquire frequency and phase information and is convenient for subsequent digital signal processing, so that the silicon micro-resonator has better adaptability and flexibility than the analog closed-loop drive. Digital closed-loop driving requires the application of a phase-locked loop to 90-degree phase-lock the driving signal and the vibration displacement output signal, at which time the resonator vibrates at its resonant frequency.
For any silicon micro-resonator, if the initial frequency of the phase-locked loop numerically-controlled oscillator is very close to the resonant frequency of the resonator, the time for the phase-locked loop to capture the resonant frequency is very fast, and therefore fast oscillation can be achieved. In practice, due to process errors, the resonant frequencies of different silicon micro-resonators are different and differ greatly. And when the silicon micro-resonator has a relatively large Q value, the amplitude gain at a frequency point relatively far from the resonant frequency will become very small, resulting in a relatively slow oscillation starting speed of the silicon micro-resonator. Furthermore, when the driving frequency is far from the resonant frequency, the digital circuit takes a relatively long time to converge to the resonant frequency or even not.
Currently, there are several methods for achieving fast start-up of a silicon microresonator: the first method is a frequency sweep method, which is realized based on the amplitude-frequency characteristics of gyro resonance. Because the gyroscope has the maximum amplitude gain at the resonant frequency, the resonant frequency of the gyroscope can be found only by finding out the point with the maximum amplitude gain of the gyroscope, and then the initial frequency of the phase-locked loop is configured. The scheme has the advantages that the implementation is simple, but the disadvantages that when the Q value of the gyroscope is higher, the required frequency step length is smaller, and the requirement on hardware is higher; meanwhile, each frequency point needs a certain time to establish stable output. The second method is a white noise oscillation method, a white noise signal is applied to the driving end of a resonator, the resonator has the maximum response to the noise signal at the resonance frequency, the frequency of the maximum amplitude response point is detected, the resonance frequency can be obtained, and the initial frequency of a phase-locked loop is configured. Compared with a frequency sweep method, the method has the advantage that the speed of acquiring the resonant frequency is increased. The disadvantages are that a large number of multiplication operations are needed for Fourier transform, the performance requirement of the data processor is high, and the method is only suitable for high-Q value resonators. The third is an impact response method, which adopts a pulse impact signal to excite the resonator to vibrate, after the impact signal disappears, the resonator carries out attenuation oscillation at the natural resonant frequency, and the resonant frequency of the gyroscope can be obtained by adopting a program counting method to calculate the number of oscillation cycles in a certain specific time. This method is only applicable to high Q resonators. The fourth method is an additional signal driving method, firstly, the resonance frequency of the resonator is obtained through testing, then a signal processor is used for generating a same-frequency square wave signal according to the measured resonance frequency, the same-frequency square wave signal is added to the driving end of the resonator, under the excitation action of the signal, the resonator generates vibration with corresponding amplitude, the vibration signal generates a driving signal with larger amplitude through automatic gain control, and the gyroscope is promoted to quickly reach a constant amplitude vibration state. The disadvantage of this solution is that the resonant frequency of the resonator also needs to be obtained in advance, and for high Q-value gyros, frequency test errors sometimes do not effectively excite the resonator.
In summary, several methods currently used in the mainstream have certain disadvantages, and it is necessary to find a new fast oscillation starting method, so that the circuit can find the resonant frequency of the resonator in a short time after power is turned on, and the oscillation starting time is shortened.
Disclosure of Invention
The invention aims to provide a quick oscillation starting device and an oscillation starting method for a silicon micro resonator, which can realize quick oscillation starting for the silicon micro resonators with different resonant frequencies, do not need to carry out initial frequency test and circuit parameter configuration on the resonators in advance, are suitable for low-Q and high-Q resonators, can save debugging time and save production cost.
The technical scheme of the invention is as follows:
a quick oscillation starting device of a silicon micro-resonator comprises a preposed readout circuit connected with the output end of the silicon micro-resonator, a selection switch connected with the input end of the silicon micro-resonator, a comparator connected with one input end of the preposed readout circuit and the selection switch, and a closed-loop control device, wherein the output end of the preposed readout circuit is simultaneously connected with the input end of the closed-loop control device, and the other input end of the selection switch is connected with the output end of the closed-loop control device.
In the above-described silicon micro-resonator rapid oscillation device: the closed-loop control device comprises a digital signal processor, an A/D converter connected with the input end of the digital signal processor, and a D/A converter connected with the output end of the digital signal processor, wherein the input end of the A/D converter is used as the input end of the closed-loop control device, and the output end of the D/A converter is used as the output end of the closed-loop control device.
In the above-described silicon micro-resonator rapid oscillation device: the digital signal processor comprises a phase-locked loop, an automatic gain controller and a multiplier, wherein the output end of the A/D converter is respectively connected with the input ends of the phase-locked loop and the automatic gain controller, the output ends of the phase-locked loop and the automatic gain controller are respectively connected with two comparison input ends of the multiplier, and the output end of the multiplier is connected with the input end of the D/A converter.
In the above-described silicon micro-resonator rapid oscillation device: the selection switch is a single-pole double-throw analog selection switch.
A method for rapidly starting oscillation of a silicon micro-resonator comprises the following steps:
1) connecting a detection electrode on the vibration pickup structure of the silicon micro-resonator to a preposed reading circuit to obtain a vibration voltage signal of the vibration structure of the silicon micro-resonator;
2) sending the vibration voltage signal to a comparator to obtain a saturated alternating current signal;
3) inputting the obtained saturated alternating current signal to one end of a selection switch;
4) sending the obtained vibration voltage signal to an input end of a closed-loop driving control device to obtain a closed-loop driving signal, and sending the closed-loop driving signal to the other input end of the selection switch;
5) selecting and judging an input signal of the silicon micro-resonator;
when the system is powered on, the selection switch sends the saturated alternating current signal to the driving mechanism through the driving electrode;
and when the amplitude of the vibration voltage signal reaches a preset threshold value, the selection switch sends the closed-loop driving signal to the driving mechanism through the driving electrode.
In the above method for rapidly starting oscillation of a silicon micro-resonator, the step 4) of converting the oscillation voltage signal into the closed-loop driving signal includes the following specific steps:
1) carrying out A/D conversion on the vibration voltage signal to obtain a vibration voltage digital signal;
2) simultaneously sending the vibration voltage digital signal to a phase-locked loop and an automatic gain controller to respectively obtain a phase-locked signal and an amplitude control signal;
3) converting the phase-locked signal and the amplitude control signal into a driving voltage digital signal through a multiplier;
4) D/A conversion is carried out on the driving voltage digital signal to obtain a closed loop driving signal.
In the above method for starting the oscillation of the silicon micro-resonator, the selection switch is a single-pole double-throw analog selection switch.
The invention has the following remarkable effects: the device is simultaneously provided with a self-excited oscillation circuit and a closed-loop control circuit, wherein the self-excited oscillation circuit and the closed-loop control circuit are composed of a front-mounted reading circuit, a comparator and a selection switch, the self-excited oscillation circuit can be used for quickly obtaining the resonant frequency of the silicon micro-resonator, the frequency information is sent to the closed-loop control circuit, and the closed-loop control circuit is used for realizing the amplitude oscillation of the silicon micro-resonator, so that the oscillation starting time is shortened, the debugging time is saved, and the production cost is saved.
Furthermore, threshold judgment is carried out on the amplitude of the vibration voltage signal in the self-excited oscillation circuit, the selection switch is used for selecting the driving signal of the silicon micro-resonator, initial frequency test and circuit parameter configuration do not need to be carried out on the resonator in advance, the method is suitable for both low-Q-value resonators and high-Q-value resonators, debugging time can be saved, and production cost is saved.
Drawings
FIG. 1 is a schematic diagram of a silicon microresonator useful in the present invention;
FIG. 2 is a schematic diagram of a silicon microresonator rapid start-up apparatus;
in the figure: 1. a silicon microresonator; 2. a drive structure; 3. a vibrating structure; 4. a vibrating pick-up structure; 5. a detection electrode; 6. a drive electrode; 7. a driving force; 8. a comparator; 9. a selector switch; an A/D converter; a D/A converter; 12. a phase-locked loop; 13. an automatic gain controller; 14. a multiplier; 15. a voltage variation; 16. a saturation voltage signal; 17. a closed loop drive signal; 18. a closed loop drive control device; 19. a digital signal processor; 20. a pre-sensing circuit.
Detailed Description
The invention is described in further detail below with reference to the figures and the embodiments.
As shown in FIG. 1, a silicon microresonator 1 to which the present invention is applicable includes a drive structure 2, a vibrating structure 3, and a vibration pickup structure 4. The driving structure 2 may be driven by static electricity, electromagnetism, or piezoelectricity. The vibrating structure 3 is connected to the fixed fulcrum by the elastic beam, thereby constituting a vibratable structure. The vibration pickup structure 4 may employ a capacitive structure, an electromagnetic structure, or a piezoelectric structure. The drive structure 2 has drive electrodes 6 and the vibration pick-up structure 4 has detection electrodes 5. Because the driving structure 2 adopts electrostatic driving, electromagnetic driving or piezoelectric driving, the driving structure 2 generates a driving force 7 with the same frequency as the driving voltage to the movable vibration structure 3. Driven by the driving force 7, the vibrating structure 3 generates vibration, and the displacement variation amount of the vibration is acquired by the vibration pickup structure 4. The vibration pickup structure 4 converts the obtained displacement variation into charge variation, and outputs the charge variation through the detection electrode 5.
As shown in FIG. 2, the silicon micro-resonator rapid oscillation starting device comprises a preposed reading circuit 20, a comparator 8 and a selection switch 9.
The structure electrode 5 of the vibration pickup structure 4 of the silicon micro resonator is connected to the input terminal of the pre-sensing circuit 20, and the output terminal of the pre-sensing circuit 20 is connected to the comparator 8. The pre-readout circuit 20 converts the charge variation output from the mechanism electrode 5 into a voltage variation 15 to obtain vibration information of the vibrating structure 3, and supplies the voltage variation 15 to the comparator 8. The comparator 8 receives the voltage variation 15 output by the pre-sensing circuit 20 and outputs a saturation voltage signal 16, wherein the saturation voltage signal 16 has the same frequency and phase as the voltage variation 15, and the amplitude is equal to the power voltage of the comparator 8.
The output of the comparator 8 is connected to one input of a selection switch 9.
The quick start-up device of the micro resonator further comprises a closed-loop control device 18, wherein the closed-loop control device 18 consists of the following three parts: an a/D converter 10, a digital signal processor 19 consisting of a phase locked loop 12, a multiplier 14 and an automatic gain controller 13, and a D/a converter 11.
The output of the pre-sensing circuit 20 is simultaneously connected to the a/D converter 10 in a closed-loop drive control device 18, and the output of the closed-loop drive control device 18 (i.e. the D/a converter 11) is connected to the other input of the selector switch 9. When the closed-loop driving control device 18 is arranged, the closed-loop driving control device comprises an A/D converter 10, a digital signal processor 19 and a D/A converter 11, the output end of the preposed readout circuit 20 is sequentially connected with the A/D converter 10 and the digital signal processor 19, the output end of the digital signal processor 19 is connected with the input end of the D/A converter 11, and finally the output end of the D/A converter 11 is connected with the driving electrode 6 of the driving structure 2.
Wherein the digital signal processor 19 comprises a phase locked loop 12, an automatic gain controller 13 and a multiplier 14. First, the output of the a/D converter 10 is connected to the input of both the phase locked loop 12 and the automatic gain controller 14; then, the output terminals of the phase locked loop 12 and the automatic gain controller 13 are simultaneously connected to both input terminals of the multiplier 14, and the output terminal of the multiplier 14 is connected to the input terminal of the D/a converter 11.
The implementation steps of the method for quickly starting the oscillation of the silicon micro-resonator are as follows:
1) and connecting a detection electrode on the vibration pickup structure of the silicon micro-resonator to a preposed reading circuit to obtain a vibration voltage signal of the vibration structure of the silicon micro-resonator, and connecting the vibration voltage signal to a comparator to obtain a saturated alternating current signal. The saturated alternating current signal and the vibration voltage signal have the same frequency and phase, and the amplitude is the power supply voltage of the comparator. And then the obtained saturated alternating current signal is input to one end of the selection switch.
2) The oscillating voltage signal is connected to a closed loop drive control device 18 to obtain a closed loop drive signal 17, and the closed loop drive signal 17 is connected to the other end of the selection switch. The closed-loop driving control device 18 comprises an AD converter, a digital signal processor 19 and a D/A converter, the output end of the preposed reading circuit is sequentially connected with the A/D converter and the digital signal processor 19, the output end of the digital signal processor 19 is connected with the input end of the D/A converter, and finally the output end of the D/A converter is connected with a driving electrode of a driving structure in the silicon micro-resonator.
3) When the digital signal processor 19 is provided, first, a phase-locked loop and an automatic gain controller 14, which are connected to the output terminal of the a/D converter 10 at the same time, are provided in the digital signal processor; then, the output terminals of the phase locked loop 12 and the automatic gain controller 13 are simultaneously connected to two input terminals of a multiplier 14, and the output terminal of the multiplier 14 is connected to the input terminal of the D/a converter 11.
4) After the system is powered on, the digital signal processor 19 controls the selection switch 9 to connect the drive electrode 6 of the silicon microresonator drive structure 2 to the output of the comparator 8, so that the silicon microresonator 1, the pre-sense circuit 20 and the comparator 8 form a saturated self-oscillating loop, at which time the silicon microresonator 1 rapidly oscillates at its resonant frequency, causing the pre-sense circuit 20 to output an oscillating voltage signal that is converted to a digital signal by the A/D converter 10.
5) The phase and amplitude of the oscillating voltage signal are detected by the phase-locked loop 12 and the automatic gain controller 13 in the digital signal processor 19, when the amplitude reaches a preset threshold value, the phase-locked loop 12 locks the phase of its output signal with the oscillating voltage signal and records the control parameters of the phase-locked loop 12 at this time.
6) The selection switch 9 is controlled by the digital signal processor 19 to connect the driving electrode of the driving structure of the silicon micro-resonator to the output end of the DA converter 11, so that the silicon micro-resonator, the preposed readout circuit and the closed-loop driving control device form a digital closed-loop driving circuit, the control parameter of the phase-locked loop 12 in the closed-loop driving control device 18 is the parameter recorded in the step 4), and the silicon micro-resonator performs constant amplitude vibration at the resonance frequency of the silicon micro-resonator according to the amplitude value preset in the automatic gain controller 13 at the moment, and the vibration starting process is completed.
Claims (2)
1. A quick oscillation starting method of a silicon micro resonator is based on a quick oscillation starting device of the silicon micro resonator and is characterized in that: the quick oscillation starting device of the silicon micro-resonator comprises a preposed readout circuit (20) connected with the output end of the silicon micro-resonator, a selection switch (9) connected with the input end of the silicon micro-resonator, a comparator (8) connected with the output end of the preposed readout circuit (20) and one input end of the selection switch, and a closed-loop driving control device (18), wherein the output end of the preposed readout circuit (20) is simultaneously connected with the input end of the closed-loop driving control device (18), and the other input end of the selection switch is connected with the output end of the closed-loop driving control device (18);
the closed-loop driving control device (18) comprises a digital signal processor (19), an A/D converter (10) connected with the input end of the digital signal processor (19), and a D/A converter (11) connected with the output end of the digital signal processor (19), wherein the input end of the A/D converter (10) is used as the input end of the closed-loop driving control device (18), and the output end of the D/A converter (11) is used as the output end of the closed-loop driving control device (18);
the digital signal processor (19) comprises a phase-locked loop (12), an automatic gain controller (13) and a multiplier (14), the output end of the A/D converter (10) is respectively connected with the input ends of the phase-locked loop (12) and the automatic gain controller (13), the output ends of the phase-locked loop (12) and the automatic gain controller (13) are respectively connected with two comparison input ends of the multiplier (14), and the output end of the multiplier (14) is connected with the input end of the D/A converter (11); the selection switch (9) is a single-pole double-throw analog selection switch;
the method comprises the following steps:
1) acquiring the voltage variation (15) of the vibrating structure of the silicon micro resonator from a detection electrode (5) on the vibrating pick-up structure (4) of the silicon micro resonator to a preposed reading circuit (20);
2) sending the voltage variation (15) to a comparator (8) to obtain a saturation voltage signal (16);
3) then inputting the obtained saturation voltage signal (16) to one end of a selection switch (9);
4) sending the obtained voltage variation (15) to an input end of a closed-loop driving control device (18) to obtain a closed-loop driving signal (17), and sending the signal to the other input end of the selector switch (9);
5) selecting and judging an input signal of the silicon micro-resonator;
when the system is powered on, the selection switch (9) sends a saturation voltage signal (16) to the driving mechanism through the driving electrode (6);
specifically, a selection switch (9) is controlled to enable a driving electrode (6) of a silicon micro-resonator driving structure (2) to be connected to the output end of a comparator (8), so that a silicon micro-resonator (1), a preposed reading circuit (20) and the comparator (8) form a saturated self-oscillation loop, and at the moment, the silicon micro-resonator (1) rapidly vibrates at the resonance frequency of the silicon micro-resonator, so that the preposed reading circuit (20) outputs a vibration voltage signal and converts the vibration voltage signal into a digital signal through an A/D converter (10);
when the amplitude of the voltage variation (15) reaches a preset threshold value, the selection switch (9) sends a closed-loop driving signal (17) to the driving mechanism through the driving electrode (6);
specifically, a selective switch (9) is controlled to enable a driving electrode of a silicon micro-resonator driving structure to be connected to the output end of a D/A converter (11), the silicon micro-resonator, a preposed reading circuit and a closed-loop driving control device form a digital closed-loop driving circuit, a phase-locked loop (12) in the closed-loop driving control device (18) controls parameters to be parameters recorded in the step 4), and at the moment, the silicon micro-resonator performs constant amplitude vibration at the resonance frequency of the silicon micro-resonator according to the amplitude preset in an automatic gain controller (13) to finish the vibration starting process.
2. The method for rapidly starting oscillation of a silicon micro-resonator according to claim 1, wherein the step 4) of converting the voltage variation (15) into the closed-loop driving signal (17) comprises the following specific steps:
1) carrying out A/D conversion on the voltage variation (15) to obtain a vibration voltage digital signal;
2) simultaneously sending the vibration voltage digital signal to a phase-locked loop (12) and an automatic gain controller (13) to respectively obtain a phase-locked signal and an amplitude control signal;
3) converting the phase-locked signal and the amplitude control signal into a driving voltage digital signal through a multiplier (14);
4) D/A conversion is carried out on the driving voltage digital signal to obtain a closed loop driving signal (17).
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