CN105549064B - A kind of high-resolution X-ray energy disperse spectroscopy based on Si-PIN detector arrays - Google Patents
A kind of high-resolution X-ray energy disperse spectroscopy based on Si-PIN detector arrays Download PDFInfo
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- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
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Abstract
The invention discloses a kind of high-resolution X-ray energy disperse spectroscopies based on Si PIN detector arrays, the detector of energy disperse spectroscopy selects the Si PIN detector arrays of m rows × n row, each row detector shares a charge amplifier, shared n row, the X-ray that detector detects is admitted to time discriminator unit and the filtration combined weighted unit of signal respectively after amplifier amplifies, and forms n road time signals and single channel energy signal.In the inside of digital multichannel pulse scope-analyzer, accurate pulse amplitude, the power spectrum of final output X-ray are extracted in time signal and processing of the energy signal through off-line correction module and trapezoidal shaping module.The beneficial effects of the invention are as follows increase detector detection X-ray especially sigmatron when detection efficient, it solves the problems, such as to use under regular situation and introduces larger noise when detector array, signal-to-noise ratio is improved, the energy resolution of X-ray energy spectrometer is effectively increased.
Description
Technical field
The present invention relates to nuclear instrument technical field more particularly to a kind of high-resolution X using Si-PIN detector arrays
Gamma ray spectrometer.
Background technology
X-ray energy spectrometer is a kind of difference using different elemental characteristic X-ray energies to open up spectrum to carry out ingredient point
The instrument of analysis, it is mainly made of detector, amplifier, pulse-height analyzer, is surveyed in ore dressing, chemical industry, metallurgy, geology
It looks into, environmental monitoring, the fields such as biomedicine play a significant role.Currently, high-resolution X-ray energy spectrometer is developed to have become
The research hotspot in nuclear instrument field.
Si-PIN detectors be one kind using semi-conducting material Si as detector matrix, using P-I-N (Positive-
Intrinsic-Negative) structure, including one layer of P-type semiconductor (majority carrier is hole, and acceptor impurity is leading), one
Layer N-type semiconductor (majority carrier is electronics, donor impurity be it is leading) and the two among I layers of intrinsic semiconductor, in conjunction with
The high-performance nuclear radiation detector that planar technology and ion implantation technology are produced, it has, and junction capacity is small, leakage current is low, response
The features such as time is fast, diamagnetic field interference performance is strong, position resolution is good, energy resolution is high, therefore be to be suitable for high-resolution
The ideal detector of energy disperse spectroscopy.
General energy disperse spectroscopy is broadly divided into analogue type and numeric type two major classes.In recent years, with the quick hair of microelectric technique
Exhibition, large-scale field programmable gate array (Field-Programmable Gate Array, abbreviation FPGA) are achieved,
Digital multi-channel energy spectrometer based on FPGA is also developed in succession.Digital energy disperse spectroscopy passes through digital filtering, the anti-heap of digit pulse
Product and digital peak holding scheduling algorithm replace traditional simulation forming amplifying circuit, peak value sampling circuit etc., to realize high meter
Digit rate, Low Drift Temperature and miniaturization, therefore as the preferred option of current X-ray energy disperse spectroscopy design.
Invention content
In order to solve the above technical problems, the object of the present invention is to provide a kind of high-resolution based on Si-PIN detector arrays
Rate X-ray energy spectrometer, solve under regular situation using single Si-PIN detector measurements X-ray especially sigmatron when
The problem of detection efficient is low, and counting rate declines, and energy resolution is deteriorated.
A kind of high-resolution X-ray energy disperse spectroscopy based on Si-PIN detector arrays, including Si-PIN detector arrays, electricity
Lotus sensitive amplifier array, RC active power filterings unit, signal weighting unit, time discriminator unit and digital multichannel pulse scope point
Parser；
The Si-PIN detector arrays are the detector array at m rows × n row by Si-PIN combinations of detectors, are owned
Si-PIN detector cathodes are connected, in parallel per a line Si-PIN detectors anode, and connect high voltage power supply by biasing resistor；
It is described that the same charge amplifier, the charge-sensitive that difference in the ranks uses are used per a line Si-PIN detectors
Amplifier forms charge amplifier array；
The X-ray received is converted to charge signal by Si-PIN detector arrays, and passes through charge amplifier battle array
Core pulse signal is obtained after row amplification.
Compared with prior art, one or more embodiments of the invention can have the following advantages that：
The disadvantage that detection efficient is low, counting rate is insufficient when improving single Si-PIN detectors applied to X-ray detection, together
When solve the problems, such as using extensive Si-PIN detector arrays when noise is big, signal-to-noise ratio is low, system capacity resolution ratio is poor.
Description of the drawings
Fig. 1 is the high-resolution X-ray energy disperse spectroscopy systematic schematic diagram based on Si-PIN detector arrays；
Fig. 2 is Si-PIN detector arrays and charge amplifier array structure schematic diagram；
Fig. 3 is digital multi-channel energy spectrometer internal system block diagram；
Fig. 4 is charge sensitive amplifier circuit figure of the present invention；
Fig. 5 (a) and 5 (b) are the time to screen functional schematic and time discriminator circuit figure；
Fig. 6 is RC active filter circuits figure of the present invention；
Fig. 7 is signal weighting circuit diagram of the present invention；
Fig. 8 is off-line correction functional schematic.
Specific implementation mode
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with embodiment and attached drawing to this hair
It is bright to be described in further detail.
It is as shown in Figure 1 the systematic schematic diagram of the present invention, which includes detector array, charge amplifier battle array
Row, RC active power filterings unit, signal weighting unit, time discriminator unit and digital multichannel pulse scope-analyzer.
Above-mentioned detector array and charge amplifier array as shown in Fig. 2, the Si-PIN detector arrays be by
Si-PIN combinations of detectors is at the detector array of m rows × n row, and all Si-PIN detectors cathodes are connected, per a line Si-PIN
Detector anode is in parallel, and connects high voltage power supply by biasing resistor；
It is described that the same charge amplifier, the charge-sensitive that difference in the ranks uses are used per a line Si-PIN detectors
Amplifier forms charge amplifier array；The X-ray received is converted to charge signal by Si-PIN detector arrays, and
Core pulse signal is obtained after amplifying by charge amplifier array.
Above-mentioned charge amplifier array is the capacitance-resistance reaction type charge spirit powered respectively by the roads n low noise power supply module
Quick amplifier array, and time examination electricity is separately connected after every charge amplifier all the way in charge amplifier array
Road and RC active filter circuits.Single channel is formed after the weighted circuit superposition of signal after the filtering forming of RC active filter circuits
Be conveyed into digital multi-channel energy spectrometer together with energy signal, the energy signal and the time discriminator signal in time discriminator circuit into
After row processing, X-ray energy spectrum is exported.
Further, the charge amplifier uses AC coupled capacitance-resistance reaction type structure, the capacitance in feedback network
For collecting charge, resistance provides access of releasing for charge, and amplifier input stage uses JFET field-effect tube, and amplifying stage is using folding
Stack-type circuit structure, amplified signal improve signal-to-noise ratio using the secondary amplification of level-one high-speed low-noise amplifier.
Further, using comparator chip as core, the signal of charge amplifier output touches the time discriminator circuit
The square-wave signal that comparator generates the corresponding moment is sent out, realizes and screens function.
Further, the RC active filter circuits are made of operational amplifier, the letter of charge sensitive preamplifier output
The gaussian signal of output low noise after number filtered forming.
Further, the weighting circuit is made of the reversed summation operation circuit that operational amplifier forms, and realizes different electricity
The superposition of lotus sense amplifier channel signal.
Further, the digital multi-channel energy spectrometer is based on speed binary channels trapezoidal shaping device, Ke Yishi using FPGA as core
The work(such as existing off-line correction, correction of the count rate, rise time screen, impulse amplitude extraction, baseline estimations and recovery, soft gain-adjusted
Energy.
All detectors provide bias voltage by same high voltage power supply in above-mentioned array.When incident X-rays enter Si-PIN
Interaction occurs with it behind the sensitive volume of detector and generates electron hole pair, bias current is formed under bias voltage effect,
The current pulse signal forms the increased double exponential signals of amplitude after charge amplifier.
Due to the limitation of manufacture craft, the sensitive volume area of single Si-PIN detectors cannot be too big, results in using single
One Si-PIN detector measurements X-ray especially sigmatron when counting rate it is relatively low, and made using Si-PIN detector arrays
The equivalent sensitive volume area of detector becomes larger, and to improve detection efficient, can obtain higher counting rate.According to charge-sensitive
The calculation formula of amplifier equivalent noise charge, ENC=EC0+kCi (wherein EC0 is zero capacitance noise, and k is noise slope,
Ci is equivalent input capacitance), if all detector parallel connections share a charge amplifier, equivalent input capacitance compared with
Greatly, larger noise can be introduced, energy resolution is influenced.Therefore each row detector in detector array is shared one by the present invention
A charge amplifier simplifies circuit while ensureing energy resolution.
For above-mentioned charge sensitive amplifier circuit as shown in figure 4, wherein D is represented per the total detector of a line, R4 is detector
Biasing resistor, in order to keep noise minimum, it should be ensured that pressure difference on biasing resistor is 0.5V, therefore biasing resistor resistance value should be
50M will be selected according to the leakage current of actual detector to 200M ranges, specific value.R4 is constituted with ac coupling capacitor C10
One discharge loop, time constant are τ 1, the feedback resistance R20-R24 and feedback capacity C19 of charge amplifier itself
A discharge loop is constituted, time constant is nthdifferential wave-shaping circuit after τ 2, C11 and R11 are constituted, and time constant is τ 3, is
Make the circuit there is no apparent pole zero τ 3 to be necessarily less than τ 1 and τ 2, to select the suitable resistance in each circuit, capacitance accordingly.
Input signal is coupled to late-class circuit by C10, while DC voltage is isolated by C10, to ensure that input stage JFET has stabilization
Quiescent point.Because of the C of input stage JFETissSignal-to-noise ratio highest when equal with detector equivalent capacity, it is therefore desirable to according to
The suitable JFET of how much selections of each row detector quantity.When detector is more, equivalent capacity is larger, selects at this time
2SK147,2N6550 or multiple JFET are in parallel；When detector quantity is less, equivalent capacity is smaller, selects at this time
2SK152、2N4416.The amplifying stage of amplifier uses folding structure, and R12, R14, Q4 and R2, R6, Q1 respectively constitute two perseverances
Stream source, because the electric current for flowing into input stage JFET is to flow through the electric current of R2 to subtract the electric current for flowing into Q1, therefore can be according to difference
The required drain-source currents of JFET of model determine the current value of two constant-current sources so that JFET has maximum gain.In order into
One step improves signal-to-noise ratio, the signal that the present invention exports prime using OPA683 types high-speed low-noise current mode operational amplifier into
Row amplification.Due to the timeconstantτ 1 of prime output signal, τ 2 is larger, cannot be directly amplified to the signal, otherwise in height
In the case of counting rate, the output of amplifier can expire amplitude overload, therefore it is micro- first to carry out CR to the signal of pre-amplifier output
Divide shaping, adjust its curring time, and then obtains ideal double exponential signals.
The signal of amplifier output will be weighted the processing of unit and time discriminator unit respectively, be re-fed into digital multiple tracks
In pulse-height analyzer.Wherein signal weighting element circuit is as shown in fig. 7, the circuit is with LMH6639 type operational amplifiers
Core constitutes reverse phase summing circuit, and the signal that each road amplifier exports is overlapped, total single channel energy signal is obtained.With
This can also be weighted circuit superposition per the noise of signal all the way, the signal-to-noise ratio of single channel energy signal is caused to be greatly reduced simultaneously, because
This needs is in advance filtered each road signal.Filter circuit as shown in fig. 6, the circuit with AD8011 type operational amplifiers
For core, Order RC active filter circuit is constituted, the high-frequency noise of input signal can be effectively filtered out, to reduce list after superposition
The noise of road energy signal improves signal-to-noise ratio.Time screens shown in realization process such as Fig. 5 (a) of function, works as charge sensitive amplifier
When device has signal output, the corresponding moment generates corresponding square-wave signal, and the address signal to form corresponding channel is realized
Screen function.Shown in the circuit of the time discriminator unit such as Fig. 5 (b), it is inputted using CMP402 comparators as core by being arranged
The reference voltage (reference voltage level should be greater than the noise figure of signal, be less than the amplitude of signal) at end, when input signal is more than reference
Square-wave signal can be generated when voltage.
It is above-mentioned number multichannel pulse scope-analyzer internal structure as shown in figure 3, it using fpga chip as core, single channel energy
Amount signal is admitted to time discriminator signal to be handled.Since the signal after RC active power filterings becomes gaussian signal, at this time not
It is handled conducive to digital multiple tracks, it is therefore desirable to carry out deconvolution operation, the energy signal after superposition is reduced to two fingers number letter
Number, then fast channel is respectively fed to slow channel, it is extracted by the amplitude of digital trapezoidal shaping, ultimately forms power spectrum.
Due to each Si-PIN detector and per charge amplifier will not be completely the same all the way, cause different logical
It is had differences between road, it is therefore necessary to which spectral line synthesis could be carried out by carrying out off-line correction to each channel, otherwise can not be ensured
Synthesize the energy resolution of spectrum.The realization process of off-line correction function is as shown in figure 8, off-line correction module can be according to each time
The square-wave signal of discriminator circuit output judges the channel address corresponding to each signal in single channel energy signal, Jin Er
The correction factor of respective channel is multiplied by when the trapezoidal shaping of slow channel, and (correction factor is according to the mistake between each channel and reference channel
Difference establishes the binary crelation formula of going out), to obtain accurate signal amplitude, improve system capacity resolution ratio.
, mainly there are following three points in the advantages of program：1. being increased instead of conventional single detector using detector array
The effective area of detector sensitive volume, improves the counting rate of detector.2. being replaced using charge amplifier array normal
The single charge amplifier of rule can substantially reduce equivalent input capacitance, reduce equivalent noise charge, improve signal-to-noise ratio.
3. increasing off-line correction function, signal amplitude most can be accurately extracted, improves system capacity resolution ratio.
Although disclosed herein embodiment it is as above, the content is only to facilitate understanding the present invention and adopting
Embodiment is not limited to the present invention.Any those skilled in the art to which this invention pertains are not departing from this
Under the premise of the disclosed spirit and scope of invention, any modification and change can be made in the implementing form and in details,
But the scope of patent protection of the present invention, still should be subject to the scope of the claims as defined in the appended claims.
Claims (2)
1. a kind of high-resolution X-ray energy disperse spectroscopy based on Si-PIN detector arrays, which is characterized in that the X-ray energy spectrum
Instrument includes Si-PIN detector arrays, charge amplifier array, RC active power filterings unit, signal weighting unit, time Zhen
Other unit, digital multichannel pulse scope-analyzer and off-line correction module；
The Si-PIN detector arrays are the detector array at m rows × n row, all Si-PIN by Si-PIN combinations of detectors
Detector cathode is connected, in parallel per a line Si-PIN detectors anode, and connects high voltage power supply by biasing resistor；
It is described that the same charge amplifier, the charge sensitive amplifier that difference in the ranks uses are used per a line Si-PIN detectors
Device forms charge amplifier array；
The X-ray received is converted to charge signal by Si-PIN detector arrays, and is put by charge amplifier array
Core pulse signal is obtained after big；
The charge amplifier array is that the capacitance-resistance reaction type charge-sensitive powered respectively by the roads n low noise power supply module is put
Big device array, and in charge amplifier array per charge amplifier all the way after be separately connected time discriminator circuit and
RC active filter circuits；
The energy signal of single channel, the energy are formed after the weighted circuit superposition of signal after the filtering forming of RC active filter circuits
It is conveyed into together with signal and the time discriminator signal in time discriminator circuit after being handled in digital multi-channel energy spectrometer, exports X
Ray energy spectrum；
It will be filtration combined weighted by signal weighting circuit in RC active filter circuits in RC active power filtering units and signal weighting unit
Energy signal deconvolution processing afterwards, obtains double exponential signals of low noise；
The off-line correction module judges each signal of single channel energy signal according to the roads the n time signal that time discriminator unit provides
Corresponding channel address, the correction factor to be multiplied by respective channel in trapezoidal shaping extract accurate impulse amplitude
Value.
2. the high-resolution X-ray energy disperse spectroscopy based on Si-PIN detector arrays as described in claim 1, which is characterized in that
The time discriminator unit judges the time that each channel current pulse signal generates by time discriminator circuit, and according to it is described when
Between determine channel address information in total single channel energy signal corresponding to each signal, at off-line correction module
Reason.
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