CN105531573A - 微微级测试泄漏装置 - Google Patents

微微级测试泄漏装置 Download PDF

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CN105531573A
CN105531573A CN201480045282.5A CN201480045282A CN105531573A CN 105531573 A CN105531573 A CN 105531573A CN 201480045282 A CN201480045282 A CN 201480045282A CN 105531573 A CN105531573 A CN 105531573A
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test
container
leaks
leaks device
gas
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CN105531573B (zh
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鲁迪·维迪特
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Inficon GmbH Deutschland
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/007Leak detector calibration, standard leaks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/207Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02DCONTROLLING COMBUSTION ENGINES
    • F02D41/00Electrical control of supply of combustible mixture or its constituents
    • F02D41/02Circuit arrangements for generating control signals
    • F02D41/14Introducing closed-loop corrections
    • F02D41/1438Introducing closed-loop corrections using means for determining characteristics of the combustion gases; Sensors therefor
    • F02D41/1493Details
    • F02D41/1495Detection of abnormalities in the air/fuel ratio feedback system
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0006Calibrating gas analysers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/007Arrangements to check the analyser

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

一种测试泄漏装置(10),包括被气体填充的容器(12)和穿通所述容器的壁延伸的毛细管(18),其特征在于:所述气体含有至少10%的大气空气(20)。

Description

微微级测试泄漏装置
技术领域
本发明涉及用于测试和校准气体泄漏探测器的测试泄漏装置。
背景技术
测试泄漏装置包括被用测试气体填充的壳体,并且设有具有预设的已知泄漏速率的泄漏处,所述测试气体通过所述泄漏处逸出到外界。气体泄漏探测器的功能或精度可以通过检测从测试性泄漏处逸出的气体来测试。
欧洲专利EP0742894B1描述了一种测试泄漏装置,其设有毛细管,所述毛细管可达到相对较低的约为10-7mbar·l/s或稍多的泄漏速率。这类毛细管不能被制造得无限小,因为它们很快将被空气中的湿气堵塞,而后变得无法使用。直到现在,用已知的测试泄漏装置达到10-12mbar·l/s或更低的泄漏速率一直都是不可能的。然而测试用于极小泄漏的泄漏测试装置需要这样的泄漏速率。
发明内容
本发明的一个目的是提供一种测试泄漏装置,其具有大约为10-12mbar·l/s的低泄漏速率。
所述测试泄漏装置由权利要求1的技术特征限定。
本发明提供的测试泄漏装置包括被含有至少10%大气空气的气体填充的容器。所述气体中其余的部分可以是例如氮气。所述容器的壁被至少一个毛细管穿通。所述毛细管应该具有处于大约从10-5mbar·l/s到10-7mbar·l/s的范围内,优选为10-6mbar·l/s的泄漏速率。大气空气不会造成所述毛细管的堵塞,并且通常含有一定比例的氦气和一定比例的氩气。氦气和氩气是用于气体泄漏检测中的传统测试气体。所述容器中的空气中的氦气的比例应该处于3到7ppm的范围内,优选为处于3.5到5.5ppm的范围内。一个特别优选的氦气比例为大约5ppm。在此处的描述中,所述术语“大约”意味着±10%的相对偏差。所述容器中的空气中的氩气的比例应该处于0.1%到2%的范围内,优选为处于大约0.8%到1.2%的范围内。一个特别优选的氩气比例为大约1%。
用大气空气填充所述测试泄漏容器进一步地使得位于测试性泄漏处的单独的填充喷嘴被废弃,该喷嘴会增加测试泄漏装置的外部尺寸并使得所述测试泄漏装置在较小的测试空间内的使用更加困难。
如果所述容器为具有位于其前端一侧上的盖体或者具有端盖的圆筒,则是特别有利的。所述端盖被所述毛细管穿通。所述圆筒的长度不应超过5厘米,直径不应超过大约1厘米。所述毛细管可以在所述圆筒内部沿着其中心轴线被引导。如果所述容器由玻璃制成,同时所述端盖由金属制成,则是特别有利的。这样的容器也可以适用于特别小的测试空间里,并且可以被用简单的方式充气。通过取下端盖并利用和大气空气一起流入所述容器的测试气体,即可简单地实现充气。由于没有裂隙和凹坑,所述圆筒形的测试泄漏容器具有较小的表面积,并且能够在测试空间内通过简单的方式被抽成真空。
所述容器中的气体应该具有小于50%,优选为小于40%的相对空气湿度,以便避免由空气中的湿气造成的毛细管堵塞。
附图说明
以下将结合附图说明本发明的实施方式。
图1示出了所述测试泄漏装置的纵向截面示意图。
具体实施方式
所述测试泄漏装置10包括由玻璃制成的圆筒形的容器12,其具有位于其一个端面上的封闭的底部14和位于其相对的另一个端面上的开口端。所述开口端被用由金属制成的端盖16紧密地封闭。一毛细管18被沿着所述圆筒12的纵向的中心轴线引导着穿通所述金属端盖16。
所述容器12被含有比例为5ppm的氦气和比例为1%的氩气的大气空气20充满。所述毛细管18具有10-6mbar·l/s的泄漏速率。所述大气空气的湿度为大约40%。对于所述测试泄漏装置10而言,这样会产生如下的有效气体流量:
氦气流量为1×10-6mbar·l/s×5ppm=5×10-12mbar·l/s;以及
氩气流量为1×10-6mbar·l/s×1%=1×10-8mbar·l/s。

Claims (9)

1.一种测试泄漏装置(10),具有被气体填充的容器(12)和穿通所述容器的壁的毛细管(18),其特征在于:所述气体中的大气空气(20)的比例为至少10%。
2.如权利要求1所述的测试泄漏装置(10),其特征在于:所述毛细管(18)具有至多为10-6mbar·l/s的泄漏速率。
3.如前述权利要求中任意一项所述的测试泄漏装置(10),其特征在于:所述大气空气(20)具有小于50%,优选为小于40%的相对湿度。
4.如前述权利要求中任意一项所述的测试泄漏装置(10),其特征在于:所述大气空气(20)中氦气的比例处于3到7ppm的范围内,优选为处于大约4.5到5.5ppm的范围内
5.如前述权利要求中任意一项所述的测试泄漏装置(10),其特征在于:所述大气空气(20)中氩气的比例为大约0.5%到2%,优选为大约0.8%到1.2%。
6.如前述权利要求中任意一项所述的测试泄漏装置(10),其特征在于:所述容器(12)为圆筒形的容器(12),具有可取下的端盖(16),所述毛细管(18)被引导着穿通所述端盖(18)。
7.如权利要求6所述的测试泄漏装置(10),其特征在于:所述圆筒(12)由玻璃制成。
8.如权利要求6或7所述的测试泄漏装置(10),其特征在于:所述端盖(16)由金属制成。
9.如权利要求6-8中任意一项所述的测试泄漏装置(10),其特征在于:所述容器(12)具有至多为5厘米,优选为大约4厘米的长度,以及至多为1厘米,优选为大约0.8厘米的直径。
CN201480045282.5A 2013-08-20 2014-08-13 微微级测试泄漏装置 Active CN105531573B (zh)

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PCT/EP2014/067309 WO2015024831A1 (de) 2013-08-20 2014-08-13 Pico-prüfleck

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WO (1) WO2015024831A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107314867A (zh) * 2017-06-30 2017-11-03 徐校竹 一种漏水检测装置
CN110494730A (zh) * 2017-03-31 2019-11-22 芝浦机械电子装置股份有限公司 加热管的气体泄漏检测装置以及加热管的气体泄漏检测方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013216450A1 (de) * 2013-08-20 2015-02-26 Inficon Gmbh Pico-Prüfleck
DE102020100830A1 (de) * 2020-01-15 2021-07-15 Inficon Gmbh Prüfgasapplikator

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0352371A2 (en) * 1988-07-27 1990-01-31 VARIAN S.p.A. Detector for helium leaks
US6595040B1 (en) * 1999-02-19 2003-07-22 Inficon Gmbh Test leak unit
EP1637861A1 (en) * 2004-09-17 2006-03-22 Ronald Douglas Collins Reference gas leak
CN1875257A (zh) * 2003-11-13 2006-12-06 因菲康有限公司 用于操作氢气检漏装置的方法
CN101133310A (zh) * 2005-03-03 2008-02-27 因菲康有限公司 具有嗅吸探头的测漏器
CN201749007U (zh) * 2010-08-12 2011-02-16 爱发科东方真空(成都)有限公司 标准漏孔
CN202836897U (zh) * 2012-10-24 2013-03-27 爱发科东方真空(成都)有限公司 检漏仪用内部校准漏孔

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940137A (ja) * 1982-08-30 1984-03-05 Shimadzu Corp リ−クテスト装置
DE3243752A1 (de) * 1982-11-26 1984-05-30 Leybold-Heraeus GmbH, 5000 Köln Testleck
DE3373010D1 (en) 1982-11-26 1987-09-17 Leybold Heraeus Gmbh & Co Kg Reference leak
DE3613694A1 (de) * 1986-04-23 1987-10-29 Leybold Heraeus Gmbh & Co Kg Vorrichtung zur kalibrierung des detektors eines lecksuchgeraetes
DE4038266A1 (de) 1990-11-30 1992-06-04 Siemens Ag Verfahren und vorrichtung zur pruefung der gasdichtigkeit von bauteilen, insbesondere sf(pfeil abwaerts)6(pfeil abwaerts)-dichtigkeit von kondensatoren
JP2625342B2 (ja) * 1993-01-06 1997-07-02 日本電信電話株式会社 質量分析型ガス漏れ検知器に適用されるガス濃度校正法及び校正器具
DE59504558D1 (de) 1994-02-02 1999-01-28 Leybold Ag Testleck mit einer leckratenbestimmenden kapillare
SE502355C2 (sv) * 1994-02-17 1995-10-09 Hans Stymne Sätt jämte anordning för att avge små mängder gas från ett ämne i kondenserad form till omgivningen med kontrollerbar hastighet
US5417105A (en) * 1994-02-18 1995-05-23 Hughes Aircraft Company Flow accelerator for leak detector probe
JP3897860B2 (ja) * 1997-07-11 2007-03-28 株式会社アルバック 密閉品のリークテスト方法
WO1999022215A1 (en) * 1997-10-29 1999-05-06 Stant Manufacturing Inc. Hand-held fuel cap leakage tester
JP2004340721A (ja) * 2003-05-15 2004-12-02 Ulvac Japan Ltd 液晶パネルの封止検査方法
CN100462706C (zh) * 2005-01-06 2009-02-18 清华大学 标准漏孔
JP4628193B2 (ja) * 2005-06-13 2011-02-09 旭化成ホームズ株式会社 トレーサーガスの放散方法及び放散容器
DE102005028557A1 (de) * 2005-06-21 2007-01-04 Inficon Gmbh Verfahren zum Kalibrieren eines spektrometrischen Schnüffellecksuchers
DE102006016747A1 (de) * 2006-04-10 2007-10-18 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Vorrichtung zur Leckprüfung
DE102009012213A1 (de) * 2009-03-07 2010-09-09 Inficon Gmbh Testleck
DE102010050505A1 (de) * 2010-11-08 2012-05-10 Fogtec Brandschutz Gmbh & Co. Kg Dichtheitsprüfung von Rohrleitungssystem für Brandbekämpfungsanlagen
DE102012220108A1 (de) * 2012-11-05 2014-05-22 Inficon Gmbh Verfahren zur Prüfung einer Dichtheitsprüfanlage
US9746410B2 (en) * 2013-02-08 2017-08-29 Schlumberger Technology Corporation System and methodology for determining properties of a substance
DE102013216450A1 (de) * 2013-08-20 2015-02-26 Inficon Gmbh Pico-Prüfleck

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0352371A2 (en) * 1988-07-27 1990-01-31 VARIAN S.p.A. Detector for helium leaks
US6595040B1 (en) * 1999-02-19 2003-07-22 Inficon Gmbh Test leak unit
CN1875257A (zh) * 2003-11-13 2006-12-06 因菲康有限公司 用于操作氢气检漏装置的方法
EP1637861A1 (en) * 2004-09-17 2006-03-22 Ronald Douglas Collins Reference gas leak
CN101133310A (zh) * 2005-03-03 2008-02-27 因菲康有限公司 具有嗅吸探头的测漏器
CN201749007U (zh) * 2010-08-12 2011-02-16 爱发科东方真空(成都)有限公司 标准漏孔
CN202836897U (zh) * 2012-10-24 2013-03-27 爱发科东方真空(成都)有限公司 检漏仪用内部校准漏孔

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110494730A (zh) * 2017-03-31 2019-11-22 芝浦机械电子装置股份有限公司 加热管的气体泄漏检测装置以及加热管的气体泄漏检测方法
CN107314867A (zh) * 2017-06-30 2017-11-03 徐校竹 一种漏水检测装置

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CN105531573B (zh) 2019-01-15
JP6722750B2 (ja) 2020-07-15
DE102013216450A1 (de) 2015-02-26
EP3036518B1 (de) 2018-10-10
US20160195448A1 (en) 2016-07-07
JP2016528509A (ja) 2016-09-15
US9933325B2 (en) 2018-04-03
JP2019066489A (ja) 2019-04-25
EP3036518A1 (de) 2016-06-29
WO2015024831A1 (de) 2015-02-26

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