CN105466666B - A kind of apparatus for measuring quality of laser beam based on variable focus light path - Google Patents
A kind of apparatus for measuring quality of laser beam based on variable focus light path Download PDFInfo
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- CN105466666B CN105466666B CN201510851520.8A CN201510851520A CN105466666B CN 105466666 B CN105466666 B CN 105466666B CN 201510851520 A CN201510851520 A CN 201510851520A CN 105466666 B CN105466666 B CN 105466666B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention discloses a kind of apparatus for measuring quality of laser beam and method based on variable focus light path, it forms negative lens, positive lens, attenuation module and the photo-sensitive cell included in same optical axis, and two line slideways for driving negative lens and photo-sensitive cell to move, for controlling the data processing module of line slideway movement and collection analysis photo-sensitive cell image；Variable focus optical routing negative lens and positive lens groups are into wherein negative lens is arranged on line slideway, can be moved in the stroke range of line slideway, and positive lens is fixedly mounted.Data processing module can accurately control the spacing between negative lens and positive lens by controlling the shift position of line slideway, realize the purpose of variable focus；Attenuation module realizes the decay to incident laser beam power, and it is suitable to incide laser power on photo-sensitive cell with guarantee；Photo-sensitive cell is arranged on line slideway, can be moved in the stroke range of line slideway, and the size of laser beam spot is measured in different positions with realizing.The present invention can greatly expand the scope of application of laser beam quality measuring system, improve measurement accuracy.
Description
Technical field
The invention belongs to laser beam quality testing field, more particularly, to a kind of swashing based on variable focus light path
Light beam quality measurement apparatus and method.
Background technology
Laser industry is the emerging strategic industries of 21st century, and with the development of laser technology, it is in industry, scientific research
The application in field is more and more extensive.The particularly energy type application of laser, as a kind of machining tool, Laser Processing equipment is to me
Manufacturing transition and upgrade serves the effect of greatly facilitating in recent years for state.For the energy type application of laser, laser
Beam quality is a very important parameter, and it is a critically important input parameter of light path design in laser equipment,
It has been largely fixed laser and has equipped final performance indications.Therefore the importance of laser beam quality measuring technology is increasingly convex
Aobvious, it is that market is badly in need of to have applied widely and high measurement accuracy laser beam quality test equipment concurrently.
According to the hyperbola transmission characteristic of Gaussian beam, the spot radius w of laser beam is expressed as light path z function, A,
B, C is respectively equation coefficient：
w2(z)=A+Bz+Cz2 (1)
Existing laser beam quality tester is that (focal length f) is focused to laser beam to be measured, remakes beam with simple lens
After waist, using line slideway, (stroke l) drives photo-sensitive cell, and near focal point (namely remake with a tight waist near) is at least after the lens
Z at 10 different light pathsiMeasure the spot radius size w of laser beami, then this group of data (z by measuringi,wi) according to most
Small square law fits coefficient A, B, C of above-mentioned Hyperbolic Equation, then the beam quality M of testing laser beam2After the factor and focusing
Waist radius wfIt is given by：
(2)
Wherein λ is the wavelength of testing laser beam.
However, the accuracy in order to ensure measurement, it is necessary to meet two conditions：(a) beam waist diameter after focusing on must be big
In the minimum light spot measurement diameter D of photo-sensitive cell0；(b) after focusing of the stroke of line slideway at least above 5 times laser beam it is auspicious
Sharp distance.Assuming that the initial waist radius of testing laser beam is w0, then above-mentioned two condition can use following Mathematical inequalities to represent：
(3)
Clearly for given condenser lens focal length f, line slideway stroke l and photo-sensitive cell minimum light spot measurement diameter
D0, only a range of (M2,w0) above-mentioned constraint inequality could be met, it means that swash by existing method is a set of given
Light beam quality test equipment, its applicable testing laser beam scope is limited, or is difficult to ensure that the precision of measurement.
The content of the invention
The defects of can not taking into account contradiction between broad applicability and measurement accuracy for prior art, the purpose of the present invention exists
In providing a kind of apparatus for measuring quality of laser beam and method based on variable focus light path, for different testing laser beams,
The beam waist diameter and Rayleigh distance for meeting constraints requirement are remake out by variable focus light path；Laser can greatly be expanded
The scope of application of beam quality measuring system, improve measurement accuracy.
The invention provides a kind of apparatus for measuring quality of laser beam based on variable focus light path, including：Variable focus
Module, photo-sensitive cell, for driving the first straight line guide rail and data processing module of the photo-sensitive cell movement；Variable focus mould
Block is used to carry out variable focus processing to the testing laser light beam of receiving so that the position of focusing is adjustable；Photo-sensitive cell, it is inputted
Laser after holding for collectiong focusing, and output facula view data；Data processing module, its input are connected to photo-sensitive cell
Output end, the first output end is connected to the control terminal of first straight line guide rail, and the second output end is connected to variable focus module
Control terminal；For controlling first straight line guide rail to drive photo-sensitive cell movement, control second straight line guide rail drives negative lens movement, adopted
Collect light spot image data of the photo-sensitive cell in diverse location, and quality for outputting laser beam after handling light spot image data
M2The factor.
Further, the variable focus module includes the negative lens and positive lens set successively with optical axis, Yi Jiyong
In the second straight line guide rail for driving the negative lens to be moved along optical axis direction；Negative lens is driven along optical axis side by line slideway
To motion, change the spacing between negative lens and positive lens, realize that variable focus is handled.
Further, the surface of the negative lens and the positive lens is coated with the anti-reflection medium to match with optical maser wavelength
Film.
Further, the apparatus for measuring quality of laser beam also includes attenuation module, is arranged on the variable focus
Between module and the photo-sensitive cell, for decaying to the laser after focusing.
Further, the data processing module includes：Control unit, control first straight line guide rail drive photo-sensitive cell
Mobile, control second straight line guide rail drives negative lens movement；Collecting unit, for gathering hot spot of the photo-sensitive cell in diverse location
View data；And processing unit, for quality for outputting laser beam M after handling light spot image data2The factor.
Further, the photo-sensitive cell can be CCD or CMOS.
Laser beam quality is surveyed based on above-mentioned apparatus for measuring quality of laser beam present invention also offers a kind of
The method of amount, comprises the steps：
(1) first straight line guide rail is controlled to drive photo-sensitive cell to be moved along optical axis, at least ten is not in guide rail stroke range
With z at light pathiThe light spot image data after the focusing of variable focus module are measured, and are obtained after handling light spot image data
Obtain laser beam radius wi,
According to the light path ziWith laser beam radius wiCalculate the beam quality M of testing laser beam2After the factor and focusing
Waist radius wf；
According to the beam quality M of testing laser beam2With the waist radius w after focusingfAcquisition incoming laser beam is initial to girdle the waist
Radius w0, and by beam quality M2With waist radius w0The first class value of testing laser light beams mass parameter is obtained after combination
(M2,w0)1；
(2) according to the first class value (M2,w0)1Spacing d ' between negative lens and positive lens is calculated, passes through data processing module control
Second straight line guide rail processed drives negative lens to be moved to target range d ' places；
(3) repeat step (1) obtains the second class value (M of testing laser light beams mass parameter2,w0)2；
(4) the second class value (M is calculated2,w0)2With the first class value (M2,w0)1Relative error, and with control errors factor ε phases
Compare；IfThen obtain the Beam quality parameter (M of testing laser beam2,w0)2；IfThen according to second group of parameter (M of incoming laser beam beam quality2,w0)2, repeat step (2)
To step (4).
Further, the initial waist radius w of incoming laser beam is calculated according to below equation0：
Further, according to above-mentioned formula andBetween obtaining between negative lens and positive lens
Away from d '.
The present invention is by introducing variable focus light path, drives negative lens motion using first straight line guide rail, changes negative
Spacing d between lens and positive lens realizes above-mentioned purpose, to ensure the suitable extensively of laser beam quality test device simultaneously
Answering property and high measurement accuracy.
Brief description of the drawings
Fig. 1 is that the structure of the apparatus for measuring quality of laser beam provided in an embodiment of the present invention based on variable focus light path is shown
It is intended to；
Fig. 2 is the apparatus for measuring quality of laser beam measuring method provided in an embodiment of the present invention based on variable focus light path
Implementation process figure；
1 is negative lens, and 2 be positive lens, and 3 be attenuation module, and 4 be photo-sensitive cell, and 5 be second straight line guide rail, and 6 be first straight
Line guide rail, 7 be data processing module.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
A kind of apparatus for measuring quality of laser beam based on variable focus light path provided by the invention, including sharing the same light successively
Negative lens, positive lens, attenuation module and the photo-sensitive cell of axle, for first straight line guide rail, the dynamic for driving negative lens to move
The second straight line guide rail of optical element movement and the data processing module for system control analysis.Negative lens, positive lens, decay mode
Block, photo-sensitive cell are in same optical axis；The data wire of described photo-sensitive cell, the control line of first straight line guide rail and described
The control line of two line slideways is connected with data processing module respectively.Data processing module has Image Data Acquisition Card, control
Card and calculating laser beam quality M2The data processor of the factor, realize that the motion to two line slideways is controlled, enter
And the locus of negative lens and photo-sensitive cell is accurately controlled, realize and photo-sensitive cell institute is adopted into laser beam spot view data
Set analysis, laser beam spot size is obtained, is realized to laser beam beam quality M2The calculating of the factor.
In embodiments of the present invention, second straight line guide rail is used to drive negative lens to move along optical axis direction, and is accurately positioned
The position of negative lens.Attenuation module can decay to incident laser power, and can be selected according to the size of incident laser power
The attenuator of appropriate attenuation multiplying power is changed.First straight line guide rail is used to drive photo-sensitive cell to move along optical axis direction, and essence
It is determined that the position of position photo-sensitive cell.Photo-sensitive cell can carry out analysis calculating to the spot size of incoming laser beam；Line slideway can
To be moved with photo-sensitive cell along optical axis direction, and the position of photo-sensitive cell is accurately positioned, it is different at least ten so as to realize
Light path at laser beam spot size is measured.Data processing module has Image Data Acquisition Card, control card and calculating
Laser beam quality M2The data processor of the factor, it is connected by data wire with photo-sensitive cell, it is straight with second by control line
Line guide rail is connected, and is connected by control line with line slideway (6), realizes the motion to second straight line guide rail and first straight line guide rail
It is controlled, and then the accurate position for controlling negative lens and photo-sensitive cell, realize the light spot image data obtained to photo-sensitive cell
Collection analysis, obtain laser beam spot size, realize to laser beam beam quality M2The calculating of the factor.
In embodiments of the present invention, f1For the focal length of negative lens；f2For the focal length of positive lens；D be negative lens and positive lens it
Between spacing；l1For the stroke of first straight line guide rail；l2For the stroke of second straight line guide rail.According to the q parameter table of Gaussian laser beam
Show theory, by q parameter q of the testing laser beam at the incident preceding surface of negative lens0It is expressed as following formula：
Wherein d0For the distance of laser emitting mouth to negative lens, λ is the wavelength of testing laser beam, w0For testing laser beam
Initial waist radius, M2For the beam quality factor of testing laser beam.
It is theoretical according to the Transfer-matrix of Gaussian beam, can be by the air layer between negative lens, negative lens and positive lens, just saturating
Mirror three is expressed in matrix as following formula：
Then the total transmission matrix of three is represented by following formula：
The then laser beam q parameter q after lens transformation after positive lens outgoing at surface1It is expressed as following formula：
Then the Rayleigh distance of laser beam and waist radius are after the focusing of variable focus lens group：
Now, foregoing constraints can be expressed as：
For given testing laser beam parameter (M2,w0), and the f determined1And f2, can be expired by the value for changing d
The above-mentioned constraint inequality of foot, it is ensured that measurement accuracy.
Fig. 1 shows the knot of the apparatus for measuring quality of laser beam provided in an embodiment of the present invention based on variable focus light path
Structure schematic diagram, for convenience of description, the part related to the embodiment of the present invention is illustrate only, details are as follows：
It forms negative lens 1, positive lens 2, attenuation module 3 and the photo-sensitive cell 4 for including same optical axis successively, for driving
At line slideway 5, the line slideway 6 of the drive movement of photo-sensitive cell 4 and the data for system control analysis that negative lens 1 moves
Manage module 7.Described negative lens 1, positive lens 2, attenuation module 3, photo-sensitive cell 4 are in same optical axis；Described photo-sensitive cell 4
Data wire 8, described line slideway 5 control line 10 and described line slideway 6 control line 9 respectively with described data
Processing module 7 is connected.Described data processing module has Image Data Acquisition Card, control card and calculates laser beam quality M2
The data processor of the factor, realize that the motion to two line slideways is controlled, and then the accurate negative lens and photosensitive of controlling
The locus of element, realize to photo-sensitive cell into laser beam spot view data collection analysis, obtain laser beam spot
Size, realize to laser beam beam quality M2The calculating of the factor.
Fig. 2 shows the apparatus for measuring quality of laser beam measurement provided in an embodiment of the present invention based on variable focus light path
The workflow sketch of method, is comprised the following steps that：
The first step：Second straight line guide rail 5 is not moved, is allowed negative lens 1 and the spacing of positive lens 2 to be in initial value, is passed through number
Mobile first straight line guide rail 6 is controlled according to processing module 7, photo-sensitive cell 4 is moved along optical axis, at least 10 in guide rail stroke range
Z at individual different light pathsiMeasure the laser beam radius w after line focus microscope group focuses oni, then this group of data (z by measuringi,wi)
Go out coefficient A, B, C of (1) formula Hyperbolic Equation according to least square fitting, the light beam of testing laser beam is calculated according to (2) formula
Mass M2Waist radius w after the factor and focusingf, initial with a tight waist of incoming laser beam is then calculated according to (4)~(8) formulas
Radius w0, thus obtain the first class value (M of testing laser light beams mass parameter2,w0)1。
Second step：The input laser beam parameters obtained according to the first step, calculated according to (4)~(9) formula rational negative saturating
Spacing value d ' between mirror and positive lens, to meet constraints (9) formula.Then mobile the is controlled by data processing module 7
Two line slideways 5 arrive target range d ' places.
3rd step：Mobile first straight line guide rail 6 is controlled by data processing module 7, photo-sensitive cell 4 is moved along optical axis,
The z at least ten difference light path in guide rail stroke range againiMeasure the laser beam radius w after line focus microscope group focuses oni,
Then this group of data (z by measuringi,wi) go out coefficient A, B, C of (1) formula Hyperbolic Equation according to least square fitting, according to
(2) formula calculates the beam quality M of testing laser beam2Waist radius w after the factor and focusingf, then calculated according to (4)~(8) formula
Obtain the initial waist radius w of incoming laser beam0, thus obtain the second class value (M of testing laser light beams mass parameter2,
w0)2。
4th step：Calculate incoming laser beam the second class value of Beam quality parameter (M2,w0)2With the first class value (M2,w0)1Phase
To error, and compared with control errors factor ε.IfMeasurement is then completed, is provided to be measured sharp
The Beam quality parameter of light beam is (M2,w0)2.IfThen according to incoming laser beam beam quality
Second group of parameter (M2,w0)2, second step is repeated to the 4th step, until completing measurement.Wherein, control errors factor ε is laser light
The measurement relative error of beam quality measurement apparatus；Specifically, filled for a set of measurement apparatus product, measurement relative error by measurement
Put and determined in the design phase, such as 10%, 5%, 1% etc., finally it is labeled as the measurement accuracy index of product.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (5)
1. a kind of method measured based on apparatus for measuring quality of laser beam to laser beam quality, the laser beam matter
Measuring device includes：Variable focus module, photo-sensitive cell (4), for driving the mobile first straight line of the photo-sensitive cell (4)
Guide rail (6) and data processing module (7)；The variable focus module includes the negative lens (1) and just saturating set successively with optical axis
Mirror (2), and the second straight line guide rail (5) for driving the negative lens (1) to be moved along optical axis direction；
Variable focus module is used to carry out variable focus processing to the testing laser light beam of receiving so that the position of focusing is adjustable；
Photo-sensitive cell (4), the laser that its input is used for after collectiong focusing, and output facula view data；Data processing module (7),
Its input is connected to the output end of photo-sensitive cell (4), and the first output end is connected to the control terminal of first straight line guide rail (6), the
Two output ends are connected to the control terminal of variable focus module；For controlling first straight line guide rail (6) to drive photo-sensitive cell (4) to move
Dynamic, control second straight line guide rail (5) drives negative lens (1) mobile, light spot image number of the collection photo-sensitive cell (4) in diverse location
According to, and quality for outputting laser beam M after handling light spot image data2The factor；Characterized in that, under methods described includes
State step：
(1) first straight line guide rail is controlled to drive photo-sensitive cell to be moved along optical axis, at least ten is not shared the same light in guide rail stroke range
Z at journeyiThe light spot image data after the focusing of variable focus module are measured, and are swashed after handling light spot image data
Light beam radius wi,
According to the light path ziWith laser beam radius wiCalculate the beam quality M of testing laser beam2It is with a tight waist after the factor and focusing
Radius wf；
According to the beam quality M of testing laser beam2With the waist radius w after focusingfObtain the initial waist radius of incoming laser beam
w0, and by beam quality M2With waist radius w0The first class value (M of testing laser light beams mass parameter is obtained after combination2,w0
)1；
(2) according to the first class value (M2,w0)1Spacing d ' between negative lens and positive lens is calculated, passes through data processing module control the
Two line slideways drive negative lens to be moved to target range d ' places；
(3) repeat step (1) obtains the second class value (M of testing laser light beams mass parameter2,w0)2；
(4) the second class value (M is calculated2,w0)2With the first class value (M2,w0)1Relative error, and compared with control errors factor ε
Compared with；IfThen obtain the Beam quality parameter (M of testing laser beam2,w0)2；IfThen according to second group of parameter (M of incoming laser beam beam quality2,w0)2, repeat step (2) is extremely
Step (4)；
The initial waist radius w of incoming laser beam is calculated according to below equation0：
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According to above-mentioned formula andSpacing d ' between negative lens and positive lens is obtained, wherein, D0For sense
The minimum light spot measurement diameter of optical element；
Wherein, q0For q parameter of the laser beam at the incident preceding surface of negative lens, q1It is laser beam after positive lens outgoing at surface
Laser beam q parameter, Im (q1) refer to q1Imaginary part, d0For the distance of testing laser exit portal to negative lens, d is for negative lens and just
Spacing between lens, w0For the initial waist radius of testing laser beam, M2For the beam quality factor of testing laser beam, λ is to treat
Survey the wavelength of laser beam, ZRfFor the Rayleigh distance of laser beam after focusing, wfFor the waist radius of laser beam after focusing, f1It is saturating to bear
The focal length of mirror；f2For the focal length of positive lens, l1For the stroke of first straight line guide rail；l2For the stroke of second straight line guide rail, T1、T2、
T3Air layer, the transmission matrix of positive lens three respectively between negative lens, negative lens and positive lens, T are variable focus mould
The total transmission matrix of block, t11、t12、t21、t22Respectively four matrix elements of the total transmission matrix of variable focus module.
2. the method as described in claim 1, it is characterised in that the surface of the negative lens (1) and the positive lens (2) is coated with
The anti-reflection deielectric-coating to match with optical maser wavelength.
3. the method as described in claim 1, it is characterised in that the apparatus for measuring quality of laser beam also includes attenuation module
(3), it is arranged between the variable focus module and the photo-sensitive cell (4), for decaying to the laser after focusing.
4. the method as described in claim 1, it is characterised in that the data processing module (7) includes：
Control unit, control first straight line guide rail (6) drive photo-sensitive cell (4) mobile, and control second straight line guide rail (5) drives negative
Lens (1) are mobile；
Collecting unit, for gathering light spot image data of the photo-sensitive cell (4) in diverse location；And
Processing unit, for quality for outputting laser beam M after handling light spot image data2The factor.
5. the method as described in claim 1, it is characterised in that the photo-sensitive cell (4) is CCD or CMOS.
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| CN107065155B (en) * | 2017-01-20 | 2023-04-07 | 武汉创恒世纪激光科技有限公司 | Variable-focus optical unit for laser cleaning and laser cleaning device |
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