CN111220358A - High-power laser light source continuous stability testing system and method - Google Patents
High-power laser light source continuous stability testing system and method Download PDFInfo
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- CN111220358A CN111220358A CN201811420106.1A CN201811420106A CN111220358A CN 111220358 A CN111220358 A CN 111220358A CN 201811420106 A CN201811420106 A CN 201811420106A CN 111220358 A CN111220358 A CN 111220358A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
The embodiment of the application belongs to the technical field of laser, and relates to a system and a method for testing the continuous stability of a high-power laser light source, wherein the system comprises a laser generating device, a focusing mirror, a light attenuation device and a detection device; the laser generating device is used for generating a laser light source; the focusing mirror is arranged on an output optical path of the laser generating device and used for focusing the laser beam generated by the laser generating device; the light attenuation device receives the focused laser beam and attenuates the laser beam at least twice, so that the detection device receives the attenuated laser beam, the detection device can be effectively protected, the detection surface of the detection device is prevented from being burnt out, the aging degree of the detection device is reduced, the maintenance cost of the detection device is reduced, the loss cost of testing and detecting high-power laser light source equipment is reduced, the accuracy of data is guaranteed, and reliable scientific basis is provided for developing a high-power laser light source system.
Description
Technical Field
The application relates to the technical field of laser, in particular to a high-power laser light source continuous stability testing system.
Background
Because the novel high-power laser light source of research and development is constantly emerging at present, power/energy detection equipment must be constantly updated, these factors lead to detection equipment to increase cost of maintenance and purchase cost in the research and development laser light source in-process, and in production, quality control, research and development each department, power, energy detection equipment test laser instrument aging process for a long time, because monitoring probe under the ageing light-emitting of long-time high power, can burn out power or energy detection equipment's detection face frequently easily frequently with the possibility of mild and severe ageing degree, lead to frequent maintenance and change.
Disclosure of Invention
The invention aims to provide a high-power laser light source continuous stability testing system aiming at the technical problems in the prior art, which can reduce the loss cost of high-power laser light source testing equipment and ensure the accuracy of data.
In order to solve the above-mentioned problems, embodiments of the present invention provide the following technical solutions:
a high-power laser light source continuous stability testing system,
comprises a laser generating device, a focusing mirror, a light attenuating device and a detecting device;
the laser generating device is used for generating a laser light source;
the focusing mirror is arranged on an output optical path of the laser generating device and used for focusing the laser beam generated by the laser generating device;
the light attenuation device receives the focused laser beam and attenuates the laser beam at least in two ways so that the detection device receives the attenuated laser beam.
By adopting the technical scheme, the laser beam is attenuated by at least two paths in the testing process, so that the laser energy is reduced to the range that the detection surface of the detection device can bear, the detection device can be effectively protected, the detection surface of the detection device is prevented from being burnt out, the aging degree of the detection device is reduced, the maintenance cost of the detection device is reduced, the loss cost of testing high-power laser light source equipment is reduced, the accuracy of data is also ensured, and a reliable scientific basis is provided for developing a high-power laser light source system.
Further, the light attenuating device comprises two groups of attenuating lenses, the laser beam is projected onto the first group of attenuating lenses through a preset incident angle, the first group of attenuating lenses reflects the current laser beam onto the second group of attenuating lenses at the same incident angle, and the second group of attenuating lenses reflects the current laser beam onto the detecting device in a direction parallel to the laser beam projected onto the first group of attenuating lenses.
By adopting the technical scheme, the laser beam is reflected to the second group of attenuating lenses through the first group of attenuating lenses and then is reflected to the detection surface of the detection device through the second group of attenuating lenses, and in the reflection process of the two groups of attenuating lenses, the attenuating lenses attenuate the laser beam, so that the energy of the laser beam finally incident to the detection surface of the detection device is greatly reduced.
Further, the incident light angles of the two groups of attenuating lenses are both 9-11 degrees.
By adopting the technical scheme, when the incident angle of the attenuation lens is 9-11 degrees, the P light and the S light of the laser reach a balanced state, the angle change is overlarge, the unbalance of the P light and the S light is serious, the stability is changed, and the accuracy is reduced.
Further, the attenuation lens is made of infrared optical quartz materials, and the focusing lens is a collimating quartz material focusing lens.
Through adopting above-mentioned technical scheme, quartz material has high temperature resistant, corrosion resistant special effect, has high transmissivity, and thermal stability is good, is fit for the light beam collection, does not receive the environmental impact, and when laser passed through the attenuation lens reflection, because the high transmissivity of attenuation lens can transmit most laser to when testing the laser stability of high power, more laser energy can be attenuated to two sets of attenuation lenses, so that incide detecting device's laser energy, reach the energy scope that detecting device can bear.
Furthermore, the high-power laser light source continuous stability test system further comprises a heat dissipation device, wherein the heat dissipation device is one of a water cooling device, a semiconductor cooling device and an air cooling device, and the heat dissipation devices are arranged in two groups and are respectively arranged on one side of the two groups of attenuation lenses in backlight.
Through adopting above-mentioned technical scheme, follow the vast majority of laser of attenuating lens transmission and absorbed by heat abstractor, take away the heat through the heat abstractor heat dissipation, provide good assurance for the test.
Furthermore, the high-power laser light source continuous stability testing system also comprises an optical base, and the laser generating device, the focusing mirror, the light attenuation device and the detection device are arranged on the optical base.
By adopting the technical scheme, the influence of vibration on the test can be reduced.
Furthermore, the high-power laser light source continuous stability testing system also comprises an ultraviolet-proof sealing cover which covers the laser generating device, the focusing mirror, the light attenuating device and the detecting device.
By adopting the technical scheme, the ultraviolet-proof sealing cover has a protective effect on laser scattering in the testing process and also has a better protective effect on dust.
Further, the high-power laser light source continuous stability test system further comprises a detection device and a controller; the detection device is connected with the heat dissipation device and the detection device to acquire working parameters of the heat dissipation device and the detection device, and the detection device and the laser generation device are connected with the controller.
By adopting the technical scheme, the detection device detects the temperatures of the heat dissipation device and the detection device and feeds the temperatures back to the controller, and the controller controls the on/off or laser power adjustment of the laser generation device by judging whether the temperatures of the heat dissipation device and the detection device are abnormal, so that the laser power of the laser generation device can be turned off or reduced when the working parameters of the heat dissipation device and the detection device are abnormal, the continuous temperature rise of the heat dissipation device and the detection device is avoided, and the heat dissipation device and the detection device are prevented from being damaged due to overhigh temperature.
In order to solve the technical problem mentioned above, an embodiment of the present invention further provides a method for testing continuous stability of a high-power laser light source, including the following steps:
debugging a laser generating device to ensure that the emitted laser beam is parallel to the horizontal direction;
and debugging the light attenuation device, performing at least two paths of attenuation on the laser beam, and ensuring that the attenuated laser beam and the laser beam are projected to the detection device from the direction parallel to the emitting direction of the focusing mirror.
Further, the step of adjusting the light attenuation device to attenuate the laser beam in at least two ways and ensure that the attenuated laser beam is projected to the detection device in a direction parallel to the emitting direction of the laser beam specifically includes:
in a laser debugging mode, debugging a first group of attenuation lenses to enable laser beams to be projected to the center of the first attenuation lenses through a preset incidence angle;
debugging a second set of attenuation lens to enable the laser beams reflected by the first set of attenuation lens to be reflected to the center of the second set of attenuation lens at the same incidence angle;
the laser beam reflected by the second set of attenuating mirrors is reflected to the center of the detecting means in a direction parallel to the laser beam projected to the first set of attenuating mirrors.
Compared with the prior art, the embodiment of the invention mainly has the following beneficial effects:
the continuous stability test system and method for the high-power laser light source have the advantages that the laser energy is reduced to the range which can be borne by the detection surface of the detection device through the attenuation of at least two paths of laser beams, the detection device can be effectively protected, the detection surface of the detection device is prevented from being burnt out, the aging degree of the detection device is reduced, the maintenance cost of the detection device is reduced, the loss cost of test high-power laser light source equipment is reduced, and the accuracy of data is guaranteed, so that reliable scientific basis is provided for the development of a high-power laser light source system, the accuracy of the data is guaranteed, and reliable scientific basis is provided for the development of the high-power laser light source system.
Drawings
In order to illustrate the solution of the invention more clearly, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are some embodiments of the invention, and that other drawings may be derived from these drawings by a person skilled in the art without inventive effort.
Fig. 1 is a schematic structural diagram of a high-power laser light source continuous stability testing system in an embodiment of the invention.
Description of reference numerals:
1. an optical mount; 2. a focusing mirror; 31. a first set of attenuating lenses; 32. a second set of attenuating lenses; 4. a heat sink; 5. a detection device; 6. a laser beam.
Detailed Description
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The terms "comprising" and "having," and any variations thereof, in the description and claims of the present invention and the description of the above figures are intended to cover non-exclusive inclusions. The terms "first," "second," and the like in the description and in the claims, or in the drawings, are used for distinguishing between different objects and not necessarily for describing a particular sequential order.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the invention. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
A high power laser light source continuous stability test system, as shown in figure 1,
comprises a laser generating device, a focusing mirror 2, a light attenuating device and a detecting device 5;
the laser generating device is a laser and is used for generating a laser light source;
the focusing mirror 2 is arranged on an output light path of the laser generating device and used for focusing a laser beam 6 generated by the laser generating device;
the light attenuation device receives the focused laser beam 6, and attenuates the laser beam 6 at least in two ways, so that the detection device 5 receives the attenuated laser beam 6.
The application provides a high power laser light source stability test system in succession, through the decay to 6 at least two ways of laser beam, make laser energy reduce the scope that detection device 5's detection face can bear, can effectively protect detection device 5, prevent that detection device 5's detection face from being burnt out, detection device 5 ageing degree has been reduced, reduce detection device 5's cost of maintenance, reduce the loss cost of testing high power laser light source equipment, the accuracy of data has been guaranteed again, thereby provide reliable scientific foundation for developing high power laser light source system.
The light attenuating device comprises two groups of attenuating mirrors, the laser beam 6 is projected onto the first group of attenuating mirrors 31 through a preset incident angle, the first group of attenuating mirrors 31 reflects the current laser beam 6 onto the second group of attenuating mirrors 32 at the same incident angle, and the second group of attenuating mirrors 32 reflects the current laser beam 6 onto the detecting device 5 in a direction parallel to the laser beam 6 projected onto the first group of attenuating mirrors 31.
The laser beam 6 is reflected to the second set of attenuation lens 32 through the first set of attenuation lens 31, and then is reflected to the detection surface of the detection device 5 through the second set of attenuation lens 32, and in the reflection process of the two sets of attenuation lens, the laser beam 6 is attenuated, so that the energy of the laser beam 6 finally incident to the detection surface of the detection device 5 is greatly reduced.
In the embodiment of the present invention, the laser beam 6 emitted by the laser generating device is in the horizontal direction, the attenuating lenses are arranged in an inclined manner, an incident angle is formed between the incident direction of the laser beam 6 and the normal direction of the attenuating lenses, the focused laser beam 6 is projected onto the first set of attenuating lenses 31 at a preset incident angle, the inclined angles of the two sets of attenuating lenses are the same, the incident angles of the laser beam 6 projected onto the two sets of attenuating lenses are also the same, and finally, the laser beam 6 reflected by the second set of attenuating lenses 32 is also in the horizontal direction, so that the detection device 5 receives the laser beam.
In other embodiments, the optical attenuation device can also be two sets of optical attenuators, which can be any one of a fixed attenuator, a step adjustable attenuator, and a continuously adjustable attenuator.
The incident light angles of the two groups of attenuating lenses are both 9-11 degrees, in the embodiment of the invention, the incident light angles of the two groups of attenuating lenses are both 10 degrees, namely the preset incident angle is 10 degrees.
According to the Fresnel reflection formula, i.e.
Wherein, theta1Is the angle of incidence, θ2Angle of refraction, rpIs the amplitude reflectivity of P light, rsIs the amplitude reflectivity of S light, tpIs the amplitude transmittance of P light, tsIs the amplitude transmittance of the S light.
When the incident angle of the lens is 10 degrees, the P light and the S light of the laser reach a balanced state, which is an optimal state, the angle is changed too much, the P light and the S light are unbalanced seriously, the stability is changed along with the change, the accuracy is reduced, and in other embodiments, the incident angle of the attenuating lens can be 9 degrees or 11 degrees.
In the embodiment of the invention, the attenuation lens is made of infrared optical quartz material, the focusing lens 2 is a collimating quartz material focusing lens 2, the quartz material has special effects of high temperature resistance and corrosion resistance, high transmittance and good thermal stability, is suitable for light beam collection and is not influenced by the environment, when a laser beam 6 is reflected by the attenuation lens, because the attenuating lenses have high transmittance and can transmit most of laser, when the stability of the high-power laser is tested, the two groups of attenuating lenses can attenuate more laser energy, so that the energy of the laser light incident on the detection device 5 is reduced to the energy range that the detection device 5 can bear, the detection device 5 can be effectively protected, the detection surface of the detection device 5 is prevented from being damaged by high-energy laser, the maintenance cost of the detection device 5 is reduced, and the loss cost of testing high-power laser light source equipment is reduced.
The high-power laser light source continuous stability test system further comprises heat dissipation devices 4, wherein the heat dissipation devices are arranged in two groups and are respectively arranged on the backlight sides of the two groups of attenuating lenses, in the embodiment of the invention, the heat dissipation devices 4 comprise two groups of water-cooled laser radiators, absorption heads of the water-cooled laser radiators face the attenuating lenses, most of laser transmitted from the attenuating lenses is absorbed by the absorption heads, heat is taken away through heat dissipation of the water-cooled laser radiators, good guarantee is provided for testing, and in other embodiments, the heat dissipation devices can also be other liquid refrigeration devices except for water cooling, and can also be semiconductor refrigeration devices or air cooling devices.
The high-power laser light source continuous stability test system also comprises a detection device and a controller; the detection device is connected with the heat dissipation device 4 and the detection device 5 to obtain working parameters of the heat dissipation device 4 and the detection device 5, and the detection device and the laser generation device are connected with the controller.
In the embodiment of the invention, the detection device comprises a first detector and a second detector, the first detector and the second sensor can be temperature sensors, the first detector is matched with the heat dissipation device 4, the second detector is matched with the detection device 5, the detection device detects the temperatures of the heat dissipation device 4 and the detection device 5 and feeds the temperatures back to the controller, and the controller controls the on and off of the laser generation device or the laser power adjustment by judging whether the temperatures of the heat dissipation device 4 and the detection device 5 are abnormal, so that when the working parameters of the heat dissipation device 4 and the detection device 5 are abnormal, the laser generation device can be turned off or the laser power of the laser generation device can be reduced, the continuous temperature rise of the heat dissipation device 4 and the detection device 5 is avoided, and the heat dissipation device 4 and the detection device 5 are prevented from being damaged due to overhigh temperature.
The controller comprises a control panel, a main control unit, a collection interface and a control interface are arranged on the control panel, the main control unit collects working parameters acquired by the detection device 5 through the collection interface and receives the working parameters output by the heat dissipation device 4, corresponding laser control commands are acquired based on the acquired working parameters, and the laser control commands are transmitted to the laser generation device through the control interface so as to control the working state of the laser generation device.
The high-power laser light source continuous stability testing system further comprises a display device and an alarm device, the display device, the alarm device and the controller are connected, the display device is used for displaying working parameters, such as temperature data, of the detection device 5 and the heat dissipation device 4 in real time, in the embodiment of the invention, the display device can be a part of external equipment, the alarm device is used for giving an abnormal alarm and recording abnormal information when the working parameters of the detection device 5 and the heat dissipation device 4 are abnormal, and in other embodiments, the abnormal information can be displayed in the display device.
High power laser light source continuous stability test system still includes optical pedestal 1, laser generating device, focusing mirror 2, light attenuating device and detecting device 5 are installed on optical pedestal 1, and reducible vibrations are to the influence of test, and wherein, modes such as focusing mirror 2, detecting device 5 accessible threaded connection, joint are installed on optical pedestal 1, and light attenuating device accessible anchor clamps or support mounting are on optical pedestal 1, and anchor clamps or support rotate with optical pedestal 1 and are connected to realize light attenuating device's angle modulation.
The high-power laser light source continuous stability test system further comprises an ultraviolet-proof sealing cover which is covered on the laser generating device, the focusing mirror 2, the light attenuating device and the detecting device 5, in the test process, a laser scattering phenomenon is avoided, the peripheral environment of the test system is influenced, external dust falls into the test system and also can cause certain interference to the test, the ultraviolet-proof sealing cover is arranged, the laser scattering in the test process is protected, and the dust is also well protected.
In order to solve the technical problem mentioned above, an embodiment of the present invention further provides a method for testing continuous stability of a high-power laser light source, including the following steps:
debugging a laser generating device to ensure that the emitted laser beam 6 is parallel to the horizontal direction;
and debugging the light attenuation device, performing at least two-path attenuation on the laser beam 6, and ensuring that the attenuated laser beam 6 and the laser beam 6 are projected to the detection device 5 from the direction parallel to the emitting direction of the focusing mirror 2.
The step of adjusting the light attenuation device to attenuate the laser beam 6 in at least two ways and ensure that the attenuated laser beam 6 is projected to the detection device 5 in a direction parallel to the emitting direction of the laser beam 6 specifically comprises the following steps:
in the laser debugging mode, debugging the first group of attenuating lenses 31 to enable the laser beam 6 to be projected to the center of the first attenuating lenses 31 through a preset incident angle;
the second set of attenuating mirrors 32 are adapted such that the laser beam 6 reflected by the first set of attenuating mirrors 31 is reflected to the center of the second set of attenuating mirrors 32 at the same incident angle;
the laser beam 6 reflected by the second set of attenuating mirrors 32 is reflected to the center of the detecting means 5 in a direction parallel to the laser beam 6 projected to the first set of attenuating mirrors 31.
Specifically, the optical fiber of the laser is connected to the coupling seat of the focusing mirror 2, the mirror sleeve is stretched back and forth, in the laser debugging mode, the emitted laser beam 6 is ensured to be parallel to the horizontal direction, the light spot is made by using photosensitive photographic paper for demonstration, then, a first set of attenuating lens 31 is installed, the first set of attenuating lens is preset by guiding red light, the inclined angle is adjusted to form a preset incident angle, the preset incident angle is 10 degrees, the red light is guided to be projected to the center of the first set of attenuating lens 31 through a diaphragm, then a second set of attenuating lens 32 is debugged, the same inclined angle is adjusted to form an incident angle of 10 degrees, the first set of attenuating lens 31 reflects the guided red light to the center of the second set of attenuating lens 32, and finally the detecting device 5 is installed behind the second set of attenuating lens 32, the red light is directed to fall in the center of the detection plane of the detection device 5 also in a direction parallel to the horizontal direction.
The application provides a high power laser light source continuous stability test method, through the attenuation to 6 at least two ways of laser beams, make laser energy reduce to the scope that the detection face of detecting device 5 can bear, test the laser light source that can bear 2000W power at the utmost through this method, can effectively protect detecting device 5, prevent that the detection face of detecting device 5 from being burnt out, reduced detecting device 5's ageing degree, reduce detecting device 5's cost of maintenance, can reduce test high power laser light source equipment loss cost, the accuracy of data has been guaranteed again, thereby provide reliable scientific foundation for developing high power laser light source system.
It is to be understood that the above-described embodiments are merely illustrative of some, but not restrictive, of the broad invention, and that the appended drawings illustrate preferred embodiments of the invention without limiting its scope. This invention may be embodied in many different forms and, on the contrary, these embodiments are provided so that this disclosure will be thorough and complete. Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and modifications can be made, and equivalents may be substituted for elements thereof. All equivalent structures made by using the contents of the specification and the attached drawings of the invention can be directly or indirectly applied to other related technical fields, and are also within the protection scope of the patent of the invention.
Claims (10)
1. A high-power laser light source continuous stability test system is characterized in that,
comprises a laser generating device, a focusing mirror, a light attenuating device and a detecting device;
the laser generating device is used for generating a laser light source;
the focusing mirror is arranged on an output optical path of the laser generating device and used for focusing the laser beam generated by the laser generating device;
the light attenuation device receives the focused laser beam and attenuates the laser beam at least in two ways so that the detection device receives the attenuated laser beam.
2. The high power laser light source continuous stability test system of claim 1,
the light attenuating device comprises two groups of attenuating lenses, laser beams are projected onto the first group of attenuating lenses through a preset incident angle, the first group of attenuating lenses reflect current laser beams onto the second group of attenuating lenses at the same incident angle, and the second group of attenuating lenses reflect the current laser beams to the detecting device in a direction parallel to the laser beams projected onto the first group of attenuating lenses.
3. The high power laser light source continuous stability test system of claim 2,
the incident light angles of the two groups of attenuating lenses are 9-11 degrees.
4. The high power laser light source continuous stability test system of claim 2,
the attenuating lens is made of infrared optical quartz materials, and the focusing lens is a collimating quartz material focusing lens.
5. The high power laser light source continuous stability test system of claim 2,
the high-power laser light source continuous stability testing system further comprises a heat dissipation device, wherein the heat dissipation device is one of a water cooling device, a semiconductor cooling device and an air cooling device, and the heat dissipation devices are arranged in two groups and are respectively arranged on one side of the two groups of attenuation lenses in backlight.
6. The high power laser light source continuous stability test system of claim 1,
the high-power laser light source continuous stability testing system further comprises an optical base, and the laser generating device, the focusing mirror, the light attenuating device and the detecting device are installed on the optical base.
7. The high power laser light source continuous stability test system of claim 1,
the high-power laser light source continuous stability testing system further comprises an anti-ultraviolet sealing cover which covers the laser generating device, the focusing mirror, the light attenuating device and the detecting device.
8. The high power laser light source continuous stability test system of claim 1,
the high-power laser light source continuous stability test system also comprises a detection device and a controller; the detection device is connected with the heat dissipation device and the detection device to acquire working parameters of the heat dissipation device and the detection device, and the detection device and the laser generation device are connected with the controller.
9. A continuous stability testing method of a high-power laser light source, which is based on the continuous stability testing system of the high-power laser light source as claimed in any one of claims 2 to 8,
the method comprises the following steps:
debugging a laser generating device to ensure that the emitted laser beam is parallel to the horizontal direction;
and debugging the light attenuation device, performing at least two paths of attenuation on the laser beam, and ensuring that the attenuated laser beam and the laser beam are projected to the detection device from the direction parallel to the emitting direction of the focusing mirror.
10. The continuous stability testing method of the high power laser light source according to claim 9,
the step of debugging the optical attenuation device, which is to attenuate the laser beam in at least two ways and ensure that the attenuated laser beam is projected to the detection device in the direction parallel to the emitting direction of the laser beam, specifically comprises the following steps:
in a laser debugging mode, debugging a first group of attenuation lenses to enable laser beams to be projected to the center of the first attenuation lenses through a preset incidence angle;
debugging a second set of attenuation lens to enable the laser beams reflected by the first set of attenuation lens to be reflected to the center of the second set of attenuation lens at the same incidence angle;
the laser beam reflected by the second set of attenuating mirrors is reflected to the center of the detecting means in a direction parallel to the laser beam projected to the first set of attenuating mirrors.
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| CN112903247A (en) * | 2021-01-20 | 2021-06-04 | 江苏亮点光电科技有限公司 | Stability testing device and method for driving beam guidance laser |
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| CN105466666A (en) * | 2015-11-26 | 2016-04-06 | 湖北三江航天红峰控制有限公司 | Variable focusing optical path-based laser beam quality measurement device |
| CN107356407A (en) * | 2016-05-10 | 2017-11-17 | 南京理工大学 | The device of synchro measure high-capacity optical fiber laser power, spectrum and beam quality |
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| CN108548481A (en) * | 2018-02-24 | 2018-09-18 | 厦门盈趣科技股份有限公司 | A kind of measuring system and method for laser spot size |
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| CN112903247A (en) * | 2021-01-20 | 2021-06-04 | 江苏亮点光电科技有限公司 | Stability testing device and method for driving beam guidance laser |
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