CN103148935A - Industrial laser beam parameter measuring device - Google Patents
Industrial laser beam parameter measuring device Download PDFInfo
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- CN103148935A CN103148935A CN2013100618692A CN201310061869A CN103148935A CN 103148935 A CN103148935 A CN 103148935A CN 2013100618692 A CN2013100618692 A CN 2013100618692A CN 201310061869 A CN201310061869 A CN 201310061869A CN 103148935 A CN103148935 A CN 103148935A
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Abstract
The invention provides an industrial laser beam parameter measuring device, which comprises a first spectroscope (1), a second spectroscope (2), a first photoelectric detector (3), a first processing circuit (4), a light intensity adjusting unit (5), a focusing lens (6), a third spectroscope (7), a second photoelectric detector (8), a second processing circuit (9), an image detection and acquisition unit (10), an electrical control moving table (11), an adjusting device (12), a motion control card (13) and an upper computer (14). Adjustment of measured light intensity is realized by using an electro-optical or magneto-optical type light intensity adjuster, and continuous adjustment of light intensity of a high-power laser is easy to realize; two photoelectric detectors are adopted to detect measured laser spots as a basis for adjustment of the light path before testing; and the on-line measurement requirement of the industrial laser beam parameter is met by using the manual adjusting device (12). The measuring device is convenient and fast to use and is particularly suitable for meeting the on-line measurement requirement of a production line.
Description
Technical field
The present invention relates to a kind of industrial laser beam parameter measuring apparatus, belong to the laser parameter measurement technical field.
Background technology
Since the First laser instrument was born in the world, laser technology played the important and pivotal role in national economy and national defense construction.The application of laser instrument has been deep into our every aspect of living to get, and its level of application has become one of important symbol of weighing a national industrial technology advance.
In design, manufacturing and the application of laser instrument, evaluation to its performance is particularly important, except the performance parameters such as power/energy, polarization state and pulse width, to its light beam parameters such as beam divergence angle, optical field distribution, spot size with a tight waist, beamwidth is long-pending and the evaluation of light beam limit multiplying power diffraction factor M2 etc. has caused widely and pays close attention to.
In the market the circulation device for measuring laser beam parameters with Coherent Inc., Spiricon Inc., Thorlabs Inc., the product of the production of units such as Newport Inc is main.the relevant researchist of China has also declared multinomial corresponding patent, as patent " laser beam quality M2 factor real-time detector (application number is: 200510030096.7) ", " apparatus for measuring quality of laser beam (application number is: 200610023419.4) ", " embedded type laser beam quality measuring device (application number is: 200810051666.4) " reach " laser flare measuring device and measuring method thereof (application number is: 200810189771.4) " etc., these measurement mechanisms need operating personnel to adjust the measured laser bundle before actual measurement all to be on the test surface of detector in whole measuring process, the light path adjustment comparatively bothers.Patent " a kind of device for measuring laser beam parameters (application number is: 201110044053.X) " provides a kind of method of launching pilot light in device, facilitated the optical path adjustment, but this device weak point is between condenser lens and CCD camera that light path is mid-enters the optics element, introduce additional optical distance, reduced measuring accuracy.
Summary of the invention
Deficiency for the prior art existence, the invention provides a kind of industrial laser beam parameter measuring apparatus, this device is convenient to the tester and is adjusted optical path, be particularly useful for industrial laser beam Parameter Measuring and monitoring, and automaticity is high, cost is low, uses efficient and convenient.
as shown in Figure 1, a kind of industrial laser beam parameter measuring apparatus provided by the invention comprises the first spectroscope 1, the second spectroscope 2, the first photodetector 3, the first treatment circuit 4, light intensity regulating unit 5, condenser lens 6, the 3rd spectroscope 7, the second photodetector 8, the second treatment circuit 9, image detection collecting unit 10, automatically controlled sports platform 11, regulating device 12, motion control card 13 and host computer 14, the measured laser bundle incides on the first spectroscope 1, a part sees through the first spectroscope 1, another part light beam is passed the second spectroscope 2 successively by the first spectroscope 1 reflection, light intensity regulating unit 5, condenser lens 6 and the 3rd spectroscope 7, incide at last on the test surface of image detection collecting unit 10, image detection collecting unit 10 sends to host computer 14 process and show its facula information that collects, the light of the second spectroscope 2 and the 3rd spectroscope 7 reflections is received by the first photodetector 3 and the second photodetector 8 respectively, the first treatment circuit 4 and the second treatment circuit 9 are respectively to processing and send to host computer 14 to show result from the first photodetector 3 and the second photodetector 8 acquisition electric signal, the automatically controlled sports platform 11 of one dimension drives condenser lens 6 and takes exercises along optical axis under the control of motion control card 13, thereby realizes the acquisition and processing of axial diverse location hot spot,
Described the first spectroscope 1, the second spectroscope 2 and the 3rd spectroscope 7 are the planar optics of quartzy material, and its surface is coated with the spectro-film to tested optical maser wavelength, are used for gathering the measured laser bundle;
Described the first photodetector 3 and the second preferred 4 quadrant detector of photodetector 8 or 2 D photoelectric position transducer, foundation is adjusted as light path before the test of this measurement mechanism in the spot center position that is used for following the tracks of the measured laser bundle;
Described the first treatment circuit 4 and the second treatment circuit 9 are photoelectricity acquisition and processing circuit, be used for to gather the light spot position signal of irradiation on the first photodetector 3 and the second photodetector 8, and give host computer 14 with it and show;
The preferred electric light formula in described light intensity regulating unit 5 or magneto-optic formula light intensity equalizer, optical element surface wherein is coated with the anti-reflection film to the measured laser wavelength, between condenser lens 6 and the second spectroscope 2, is used for the intensity of regulating tested light beam;
Described condenser lens 6 is the plano-convex lens of quartzy material, is fixed on an end of automatically controlled sports platform 11 by jig, is used for measured laser Shu Jinhang is focused on, and the space that produces the measured laser bundle is with a tight waist;
The preferred CCD camera image collector of described image detection collecting unit 10 or CMOS camera image collector, be fixed on by jig on the slide block of automatically controlled sports platform 11, be used for to survey the measured laser hot spot, and give host computer 14 with the facula information that collects and process and display;
Described automatically controlled sports platform 11 is the automatically controlled sports platform of one dimension of leading screw transmission, and it drives image detection collecting unit 10 and does motion in one dimension under the control of motion control card 13, thereby satisfies the laser spot detection along the optical axis direction diverse location;
Described regulating device 12 is with graduated manual two-dimentional turntable for being made of the turbine and worm pair, is used for realizing pitching and the adjustment of rotation two dimension of automatically controlled sports platform 11, thereby realizes this measurement device light path and measured laser device light path coaxial;
Described host computer 14 is industrial computer, is the control center of this measurement mechanism.
Beneficial effect: the present invention adopts electric light formula or magneto-optic formula light intensity equalizer to realize the adjusting of tested light intensity, is easy to realize the continuous adjusting of high power laser light intensity; Adopt two photodetectors to survey the measured laser hot spot, thereby provide foundation for testing front light path adjustment; Adopt the manual adjustments 2-d rotating platform to satisfy industrial laser light beam parameters on-line measurement requirement.This measurement mechanism is convenient to use, is particularly useful for the requirement of industrial laser production line on-line measurement.
Description of drawings
Fig. 1 is a kind of industrial laser beam parameter measuring apparatus schematic diagram.
In figure: 1-the first spectroscope, 2-the second spectroscope, 3-the first photodetector, 4-the first treatment circuit, 5-light intensity regulating unit, 6-condenser lens, 7-the 3rd spectroscope, 8-the second photodetector, 9-the second treatment circuit, 10-image detection collecting unit, the automatically controlled sports platform of 11-, the 12-regulating device, 13-motion control card, 14-host computer.
Embodiment
Embodiment 1A kind of industrial laser beam parameter measuring apparatus.
as shown in Figure 1, the invention provides a kind of industrial laser beam parameter measuring apparatus and comprise as shown in Figure 1, a kind of industrial laser beam parameter measuring apparatus provided by the invention comprises the first spectroscope 1, the second spectroscope 2, the first photodetector 3, the first treatment circuit 4, light intensity regulating unit 5, condenser lens 6, the 3rd spectroscope 7, the second photodetector 8, the second treatment circuit 9, image detection collecting unit 10, automatically controlled sports platform 11, regulating device 12, motion control card 13 and host computer 14, the measured laser bundle incides on the first spectroscope 1, a part sees through the first spectroscope 1, another part light beam is passed the second spectroscope 2 successively by the first spectroscope 1 reflection, light intensity regulating unit 5, condenser lens 6 and the 3rd spectroscope 7, incide at last on the test surface of image detection collecting unit 10, image detection collecting unit 10 sends to host computer 14 process and show its facula information that collects, the light of the second spectroscope 2 and the 3rd spectroscope 7 reflections is received by the first photodetector 3 and the second photodetector 8 respectively, the first treatment circuit 4 and the second treatment circuit 9 are respectively to processing and send to host computer 14 to show result from the first photodetector 3 and the second photodetector 8 acquisition electric signal, the automatically controlled sports platform 11 of one dimension drives condenser lens 6 and takes exercises along optical axis under the control of motion control card 13, thereby realizes the acquisition and processing of axial diverse location hot spot,
Described the first spectroscope 1, the second spectroscope 2 and the 3rd spectroscope 7 are the planar optics of quartzy material, and its surface is coated with the spectro-film to tested optical maser wavelength, and transmitted light and reflected light ratio are 49:1, are used for gathering the measured laser bundle;
Described the first photodetector 3 and the second photodetector 8 are 4 quadrant detector or 2 D photoelectric position transducer, and useful detection area is 8mm, are used for following the tracks of the spot center position of measured laser bundle, adjust foundation as light path before the test of this measurement mechanism;
Described the first treatment circuit 4 and the second treatment circuit 9 are photoelectricity acquisition and processing circuit, be used for to gather the light spot position signal of irradiation on the first photodetector 3 and the second photodetector 8, and give host computer 14 with it and show;
Described light intensity regulating unit 5 is electric light formula or magneto-optic formula light intensity equalizer, clear aperature is 20mm, optical element surface wherein is coated with the anti-reflection film to the measured laser wavelength, between condenser lens 6 and the second spectroscope 2, is used for the intensity of regulating tested light beam;
Described condenser lens 6 is the plano-convex lens of quartzy material, and bore is 20mm, and focal length is 100mm, is fixed on an end of automatically controlled sports platform 11 by jig, is used for measured laser Shu Jinhang is focused on, and the space that produces the measured laser bundle is with a tight waist;
Described image detection collecting unit 10 is CCD camera image collector or CMOS camera image collector, fix by jig on the slide block of automatically controlled sports platform 11, guarantee when being installed on the optical axis that is centered close to condenser lens 6 of its test surface, be used for to survey the measured laser hot spot, and give host computer 14 with the facula information that collects and process and display;
Described automatically controlled sports platform 11 is the automatically controlled sports platform of one dimension of leading screw transmission, stroke is 200mm, resolution is 0.00032mm, and it drives image detection collecting unit 10 and does motion in one dimension under the control of motion control card 13, thereby satisfies the laser spot detection along the optical axis direction diverse location;
Described regulating device 12 is with graduated manual two-dimentional turntable for being made of the turbine and worm pair, is used for realizing pitching and the adjustment of rotation two dimension of automatically controlled sports platform 11, thereby realizes this measurement device light path and measured laser device light path coaxial;
Described host computer 14 is industrial computer, is the control center of this measurement mechanism; When the measured laser light path is adjusted before measurement, show in real time to be incident on the first photodetector 3 and the second surperficial hot spot of photodetector 8 center; When measuring, the measured laser bundle facula information that image detection collecting unit 10 obtains is carried out two and three dimensions demonstration and computing, control simultaneously light intensity regulating unit 5 and satisfy and measure sampling requirement so that incide the light intensity of image detection collecting unit 10, control automatically controlled sports platform 11 and drive condenser lenses 6 and take exercises along optical axis, thereby realize the acquisition and processing of axial diverse location hot spot.
Calculate the coordinate of the barycenter of hot spot
, according to formula
Calculate spot size.According to the Hyperbolic Equation of laser beam at free space transmission
The software interface of host computer 14 shows laser beam X-direction and Y-direction beam waist position
, waist radius ω 0, divergence half-angle θ, Beam parameter product BPP and the beam quality M2 factor, show simultaneously spot size and the axial coordinate half interval contour of each measurement point.
Claims (5)
1. an industrial laser beam parameter measuring apparatus, is characterized in that comprising the first spectroscope (1), the second spectroscope (2), the first photodetector (3), the first treatment circuit (4), light intensity regulating unit (5), condenser lens (6), the 3rd spectroscope (7), the second photodetector (8), the second treatment circuit (9), image detection collecting unit (10), automatically controlled sports platform (11), regulating device (12), motion control card (13) and host computer (14), the measured laser bundle incides on the first spectroscope (1), a part sees through the first spectroscope (1), another part light beam is passed the second spectroscope (2) successively by the first spectroscope (1) reflection, light intensity regulating unit (5), condenser lens (6) and the 3rd spectroscope (7), incide at last on the test surface of image detection collecting unit (10), image detection collecting unit (10) sends to host computer (14) process and show its facula information that collects, the light of the second spectroscope (2) and the 3rd spectroscope (7) reflection is received by the first photodetector (3) and the second photodetector (8) respectively, the first treatment circuit (4) and the second treatment circuit (9) are respectively to processing and send to host computer (14) to show result from the first photodetector (3) and the second photodetector (8) acquisition electric signal, the automatically controlled sports platform of one dimension (11) drives condenser lens (6) and takes exercises along optical axis under the control of motion control card (13), thereby realizes the acquisition and processing of axial diverse location hot spot,
Described the first spectroscope (1), the second spectroscope (2) and the 3rd spectroscope (7) are the planar optics of quartzy material, and its surface is coated with the spectro-film to tested optical maser wavelength;
Described the first treatment circuit (4) and the second treatment circuit (9) are photoelectricity acquisition and processing circuit;
Described condenser lens (6) is the plano-convex lens of quartzy material;
The preferred CCD camera image collector of described image detection collecting unit (10) or CMOS camera image collector;
Described automatically controlled sports platform (11) is the automatically controlled sports platform of one dimension of leading screw transmission;
Described regulating device (12) is with graduated manual two-dimentional turntable for being made of the turbine and worm pair;
Described host computer (14) is industrial computer, is the control center of this measurement mechanism.
2. a kind of industrial laser beam parameter measuring apparatus as claimed in claim 1, is characterized in that, before described measurement mechanism measured, optical path adjusting is to adopt two photodetectors to follow the tracks of the spot center position of measured laser bundle as adjusting foundation.
3. a kind of industrial laser beam parameter measuring apparatus as claimed in claim 1, is characterized in that, described the first photodetector (3) and the second photodetector (8) are 4 quadrant detector or 2 D photoelectric position transducer.
4. a kind of industrial laser beam parameter measuring apparatus as claimed in claim 1, is characterized in that, the adjusting of described measurement mechanism optical path and measured laser device light path coaxial is to realize by regulating device (12).
5. a kind of industrial laser beam parameter measuring apparatus as claimed in claim 1, is characterized in that, described light intensity regulating unit (5) is electric light formula light intensity equalizer or magneto-optic formula light intensity equalizer.
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Cited By (6)
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| CN107356197A (en) * | 2016-05-09 | 2017-11-17 | 南京理工大学 | A kind of spot location method of four-quadrant photo detector based on Gaussian Profile |
| CN107449590A (en) * | 2017-10-11 | 2017-12-08 | 长春理工大学 | A kind of laser beam pointing stability measurement apparatus |
| TWI647430B (en) * | 2017-10-12 | 2019-01-11 | 致茂電子股份有限公司 | Optical measuring device |
| CN109655232A (en) * | 2017-10-12 | 2019-04-19 | 致茂电子(苏州)有限公司 | Optical measurement device |
| CN110411348A (en) * | 2019-08-28 | 2019-11-05 | 中国人民解放军国防科技大学 | Automatic detection and positioning device and method for laser spot focus |
| CN111076811A (en) * | 2019-12-20 | 2020-04-28 | 华中科技大学鄂州工业技术研究院 | Composite laser protection system |
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| CN107356197A (en) * | 2016-05-09 | 2017-11-17 | 南京理工大学 | A kind of spot location method of four-quadrant photo detector based on Gaussian Profile |
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| CN110411348A (en) * | 2019-08-28 | 2019-11-05 | 中国人民解放军国防科技大学 | Automatic detection and positioning device and method for laser spot focus |
| CN111076811A (en) * | 2019-12-20 | 2020-04-28 | 华中科技大学鄂州工业技术研究院 | Composite laser protection system |
| CN111076811B (en) * | 2019-12-20 | 2022-05-20 | 华中科技大学鄂州工业技术研究院 | Composite laser protection system |
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Inventor after: Wang Fei Inventor after: Wang Xiaohua Inventor after: Yang Jinhua Inventor after: Zhang Guoyu Inventor after: Li Yuyao Inventor after: Li Chuzhong Inventor after: Luo Kuan Inventor after: Pei Xianzi Inventor after: Tian Ming Inventor after: Jiang Long Inventor after: Fu Xiuhua Inventor after: Che Ying Inventor before: Li Yuyao Inventor before: Wang Fei Inventor before: Wang Xiaohua Inventor before: Zhang Guoyu Inventor before: Che Ying Inventor before: Yang Jinhua Inventor before: Luo Kuan |
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Effective date of registration: 20201223 Address after: 223800 Room 201, Germany industrial complex building, No.1 Kangcheng Road, Suqian Port Industrial Park, canal, Sucheng District, Suqian City, Jiangsu Province Patentee after: Jiangsu majike Industrial Automation Co.,Ltd. Address before: 130022 No. 7089 Satellite Road, Changchun, Jilin, Chaoyang District Patentee before: CHANGCHUN University OF SCIENCE AND TECHNOLOGY |