CN112539698B - Method for on-line tracking and real-time feedback of laser beam acting material interior - Google Patents
Method for on-line tracking and real-time feedback of laser beam acting material interior Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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Abstract
The invention relates to a method for on-line tracking and real-time feedback of the interior of a laser beam acting material. The method comprises the following steps: measuring the intensity of scattered light when the laser interacts with the material; detecting the intensity of transmitted light when the laser interacts with the material; converting an optical signal into an electric signal by utilizing a photoelectric detection technology based on a transverse photoelectric effect; based on an image processing technology, converting an image signal of a detector into light spot position information; processing and analyzing the acquired signals by using a data acquisition processing module, and determining the coordinate value of the light spot by using a positioning algorithm; the method comprises the following steps of calibrating the position and depth information of a light spot in a space coordinate system by utilizing the plane coordinate value of the light spot, and constructing the three-dimensional coordinate of the light spot; and a data processing and online transmission mechanism is established, so that the real-time feedback of the three-dimensional accurate position information of the laser spot is realized.
Description
Technical Field
The invention relates to the technical fields of detection technology, laser processing technology and laser medical treatment, in particular to a method for positioning light spots and feeding back positioning information in real time when laser and materials interact.
Background
The laser positioning technology is a new technology integrating laser technology, semiconductor technology and computer technology, and the development of the technology benefits from the characteristics of high stability and high collimation of laser on one hand and the rapid development of the semiconductor technology and the computer technology in recent years on the other hand. The laser positioning technology is also an important component in the laser measurement technology, and is widely applied to the fields of laser measurement, laser communication, micro-particle measurement and the like. Related researches on accurate laser positioning mainly include basic and application researches on laser guidance, light spot positioning, internal heat source positioning and the like.
The divergence of laser is only 0.001rad, which is an ideal collimation measuring reference line. When the laser power is lower than 1mW, the retina cannot be damaged even if the retina is directly observed by naked eyes, so that a laser beam with proper energy in unit time and space can be used for indicating that a tool or instrument is positioned on the surface of the material. For the positioning of the laser beam or spot itself, there are mainly position sensors, charge coupling and four-quadrant positioning techniques.
The psd (position Sensitive detector) positioning technology is an application technology for determining the position of a light spot by converting the position of the light spot on a photosensitive surface into an electrical signal based on a transverse photoelectric effect. The PSD position sensor is also called a coordinate photocell, and is an optical detector capable of measuring the continuous position of a light spot on the surface of the detector. The method has the advantages of high position resolution, high response speed, simple processing circuit and the like. However, for realizing high-precision real-time laser detection and measurement, the PSD has low sensitivity, high noise, poor edge linearity of the photosensitive surface, and can only realize the positioning of the laser spot on the surface of the material.
The CCD (charge Coupled device) imaging positioning technology is a technology for determining the position of a light spot by using CCD high-resolution imaging and real-time processing of a two-bit image. The charge coupled device is a photoelectric conversion device which can store signal charges generated by light; when a pulse with a specific time sequence is applied to it, the stored signal charges can be directionally transferred in CCD to realize self-scanning. The advantages are high geometric accuracy, good stability, low noise and wide spectrum response range. However, since each element needs to be sampled and output in the measurement period, the resolution and the image transmission speed of the CCD are easily limited by the size of the pixel point, and the design of the driving circuit of the CCD device is complicated, and the manufacturing cost is high.
The four-Quadrant Detection (QD) positioning technology is also a technology for converting optical signals received on a photosensitive surface into electric signals, when light spots irradiate on a target surface of a detector, the four quadrants can generate photocurrent proportional to the optical power received by each quadrant, the photocurrent of each quadrant is in direct proportion to the area of the light spots, and the resolving position of the light spots can be obtained by utilizing the geometric relationship. The four-quadrant detection positioning technology has the characteristics of simple driving circuit, short response time, high resolution and interference resistance, but has general linearity and dead zones, and the existing four-quadrant detection technology is applied to positioning and feedback of materials or equipment surfaces with high-precision micro displacement or angle, and cannot detect depth information of laser spots in the materials.
The infrared thermal imaging positioning technology is used for determining the position of a heat source inside an action point by monitoring the distribution of a surface temperature field and heat transfer simulation of a specific model. The infrared thermal imaging technology can reflect the temperature condition of a target object in the form of infrared thermal images by using an infrared detector, the response speed can reach microsecond level, and the temperature change of various transient conditions can be acquired; the temperature measurement precision is high and can reach 0.01 ℃. The technical scheme of infrared thermal imaging positioning mainly utilizes the organic combination of an infrared thermal imaging technology and material temperature field simulation calculation, and only can qualitatively judge the heat source in the body by monitoring the surface temperature distribution of the material, but is limited by a calculation model and constraint conditions, and the position and the size of the focus in the body cannot be known according to the surface temperature distribution.
In conclusion, the research and application technologies provide abundant positioning or guiding schemes for laser spot positioning, and promote the development and promotion of laser positioning technologies. However, these studies only achieve the positioning of the spot on the surface of the material, and there is no good solution for the detection, tracking and feedback of the spot's internal position and depth when the laser interacts with the material.
Disclosure of Invention
The invention aims to provide a method for on-line tracking and real-time feedback inside a laser beam acting material. Based on the detection of the optical information of the laser transmission material, the laser transmission material adopts a light spot positioning detection technology to collect and process the position information of the laser transmission material on two groups of mutually perpendicular planes, and can realize three-dimensional accurate positioning and on-line feedback of laser light spots through signal processing, a positioning algorithm and a space coordinate transformation method, thereby meeting the requirements of guiding and feeding back real-time acting light spots in the laser material processing process.
To achieve the above object, the present invention provides a method comprising: the method for on-line tracking and real-time feedback of the inside of a laser beam acting material comprises the following steps:
according to the interaction rule of the laser and the material, the laser is scattered at the interaction part, and the light of the scattered light is measured by the photoelectric detector;
the laser is absorbed, reflected and refracted in the material, and the light transmitted through the surface of the material is measured by the photoelectric detector;
the scattered light and the transmitted light are received by the photoelectric detection device, and signals of the scattered light and the transmitted light are converted into electric signals or charge signals through the corresponding photoelectric detection device based on a transverse photoelectric effect, and the electric signals are displayed in the photoelectric detector in the forms of voltage, current or images;
in a Cartesian coordinate system, the received scattered light signals and transmitted light signals of the photoelectric detector are two-dimensional position information of the laser spot in two mutually perpendicular planes (such as an X-Y plane and a Y-Z plane);
converting the light spot image signal into a two-dimensional coordinate value based on an image processing technology according to the laser characteristic parameter, the geometric parameter of the action material and the position information;
the image processing technology specifically comprises image digitization, image change, image coding compression, image enhancement and restoration, image segmentation, image description, image identification and the like;
converting the electric signal output by the photoelectric detector into a two-dimensional coordinate value by utilizing a signal processing technology and a light spot positioning algorithm according to the laser characteristic parameter, the geometric parameter and the position information of the action material and the energy distribution characteristic of the laser light spot;
the signal processing technology specifically comprises the steps of filtering, amplifying and analog-to-digital converting of signals, wherein the positioning algorithm specifically comprises a light spot energy uniform distribution centroid positioning algorithm and a light spot energy Gaussian distribution centroid positioning algorithm;
the positioning algorithm of the spot energy uniform distribution centroid specifically comprises the following steps:
(x0,y0) Is the centroid of the light spot; k is pi r/4 as a proportionality coefficient, and r is the radius of the light spot; u shapeA、UB、UC、UDVoltage signals corresponding to quadrants of the detector A, B, C, D respectively, wherein A, B, C, D refers to four areas of the photosensitive surface of the detector which are uniformly divided by a cross line passing through the center point of the photosensitive surface;
the positioning algorithm of the Gaussian distribution centroid of the spot energy specifically comprises the following steps:
I(x,y)the light intensity at the center of the light spot; (x)0,y0) Is the centroid of the light spot; i is0/2πω2The light intensity at the centroid of the light spot; omega is the beam waist radius of which the light spot energy is in Gaussian distribution;
for a specific detector, the diameter or side length of a photosensitive surface of the detector is generally selected to be 2-4 times of the radius r of a light spot;
calibrating the photodetector according to the two-dimensional position information of the laser spot in two mutually perpendicular planes (such as an X-Y plane and a Y-Z plane), and utilizing the same component values (such as Y axes in the X-Y plane and the Y-Z plane) in the two-dimensional position information of the laser spot to construct the three-dimensional coordinate of the laser spot by utilizing the two-dimensional coordinate values in the two mutually perpendicular planes (such as the X-Y plane and the Y-Z plane) measured by the calibrated photodetector;
and the data transmission and control module is utilized to carry out real-time high-speed transmission and feedback of the accurate position data of the laser facula.
Preferably, the laser interacts with the material both diffusely reflecting off the surface of the material and absorbing, emitting and refracting within the material.
Preferably, the method further comprises:
the diffuse reflection light on the surface of the material and the transmission light in the material convert optical signals into electric signals or charge signals through the photoelectric detector, and the photoelectric detector can meet the requirements that the response time is not more than 1 mu s and the limit resolution is not more than 1 mu m when working.
Preferably, the photodetector may be a detection device based on a lateral photoelectric effect, and may also be an imaging device based on photoelectric conversion or temperature field detection.
Preferably, the reflected light and the transmitted light are respectively measured by a photoelectric detector and converted into coordinate values of the laser spots in two groups of mutually perpendicular planes by the data processing module.
Preferably, the adjustment and calibration of the photodetector is performed by comparing coordinate values of the same component in the two sets of mutually perpendicular planes.
Preferably, the three-dimensional position information of the laser spot in the material is determined through the coordinate values in the two groups of mutually perpendicular planes and the Cartesian coordinate conversion.
Preferably, the data feedback and control module is used for realizing the real-time feedback and display of the laser spot position information, and the data feedback and control module meets the requirements that the frequency is not lower than 1GHz and the bandwidth is not lower than 100 MHz.
Preferably, the method at least comprises a laser, an acting material, a photoelectric detection module, a data acquisition and pretreatment module, a power supply module, a data post-processing and display module and a data feedback and control module
The method for the accurate three-dimensional positioning and the real-time feedback of the laser spot provided by the embodiment of the invention is based on the detection of the light information of the laser penetrating through the material, adopts the spot positioning detection technology to collect and process the position information of the laser spot on two groups of planes which are perpendicular to each other, can realize the characteristics of the three-dimensional accurate positioning and the real-time on-line feedback of the laser spot in a processing object through signal processing, a positioning algorithm and a space coordinate transformation method, has no intervention and interference to the laser processing process, and can meet the requirements of accurate guide and feedback of the laser spot acting on the material in the high-precision laser processing process.
Drawings
FIG. 1 is a schematic diagram of a laser beam acting material internal on-line tracking and real-time feedback scheme provided by an embodiment of the present invention.
FIG. 2 is a schematic view of a measurement system for on-line tracking and real-time feedback inside a laser beam acting material according to an embodiment of the present invention.
Fig. 3 is a flow chart of the implementation of the internal on-line tracking and real-time feedback of the laser beam action material according to the embodiment of the present invention.
Detailed Description
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
The embodiment of the invention provides a method for collecting and processing position information of two groups of planes perpendicular to each other by adopting a light spot positioning detection technology, and performing three-dimensional accurate positioning and online feedback of laser light spots by a signal processing method, a positioning algorithm and a space coordinate transformation method.
According to the interaction rule of the laser and the material, by utilizing the scattered light generated at the interaction position of the laser and the light transmitted through the surface of the material after the laser is absorbed, reflected and refracted in the material, the light information is measured by a photoelectric detector (PSD, CCD or QD is taken as an example in fig. 1) and converted into an electric signal or a charge signal, and the position information of the laser spot in two groups of mutually vertical planes can be analyzed by analyzing and processing the electric signal or the charge signal.
The laser spot positioning in two mutually perpendicular planes is obtained through data processing and positioning algorithm. Taking a four-Quadrant Detector (QD) and uniform distribution of light spot energy as an example, the light spot centroid positioning algorithm specifically comprises the following steps:
wherein the selected photosensitive surface of the four-quadrant detector is circular, and the radius of the photosensitive surface is R; (x)0,y0) Is the centroid of the light spot; k is pi R/4 as a proportionality coefficient, and R is 0.5R as a spot radius; u shapeA、UB、UC、UDA, B, C, D refers to four areas of the detector photosurface evenly divided by a cross line passing through the center point of the detector, respectively, corresponding to the quadrants of detector A, B, C, D.
According to the invention, the three-dimensional information of the light spot position during the interaction of the laser and the material can be obtained according to the measured position information of the two groups of planes perpendicular to each other, and the real-time feedback of the light spot position information can be realized through the feedback and control module.
The embodiment of the invention provides a method for determining the position information of laser spots in two groups of mutually perpendicular planes by adopting a spot positioning detection technology, and performing three-dimensional accurate positioning and online feedback of the laser spots through a positioning algorithm and space coordinate transformation. The embodiment in fig. 3 may be specifically executed according to the following steps:
and step 110, the laser interacts with the material, short-time rapid thermal effect occurs at the center of the light spot, and meanwhile, light is subjected to diffuse reflection on the surface of the material, is absorbed, reflected and refracted inside the material and penetrates through the surface of the material.
Step 120, receiving the light reflected on the surface of the material by a detector and generating a photoelectric effect; the electric signal or charge signal generated by the detector is converted into a digital signal through the data processing module; and the digital signals are converted into horizontal plane two-dimensional coordinate values through a light spot positioning algorithm after being converted by the data processing module.
Step 130, receiving the light transmitted in the material by a detector and generating a photoelectric effect; the electric signal or charge signal generated by the detector is converted into a digital signal through the data processing module; and the digital signals are converted into vertical plane two-dimensional coordinate values through a light spot positioning algorithm after being converted by the data processing module.
Specifically, the photodetector is operated with a response time of not more than 1 μ s and a limit resolution of not more than 1 μm so that the generated emission light signal can be detected.
The spot positioning algorithm is a key signal processing module of the photoelectric detector, and is mainly used for carrying out approximate calculation on spot position information according to spot shape characteristics or energy distribution characteristics by using electric signals or charge signals detected by the photoelectric detector.
Step 140, calibrating the detector by using the same component values in the two-dimensional information of the two-dimensional coordinate values in the two mutually perpendicular planes.
Specifically, in a Cartesian coordinate system, two mutually perpendicular planes, such as an X-Y plane and a Y-Z plane, should have the same Y component in the X-Y plane and the Y-Z plane for the coordinates of the same point, whereas the adjustment and calibration of the detector can be performed by the Y component values in the X-Y plane and the Y-Z plane.
And 150, constructing a three-dimensional coordinate of the laser spot by using two groups of mutually perpendicular plane two-dimensional coordinate values measured by the calibrated detector, and displaying and feeding back the three-dimensional coordinate to the laser in real time through the data transmission and control module.
Specifically, the data feedback and control module meets the requirements that the frequency is not lower than 1GHz and the bandwidth is not lower than 100MHz, so that the laser spot position information can be fed back in real time.
In order to realize the method, the invention provides an example of a measuring system for on-line tracking and real-time feedback inside a laser beam acting material and an implementation process, the schematic diagram of which is shown in fig. 2 and 3 and mainly comprises the following steps: a reflected light signal detection device 2, a transmitted light detection device 7, a signal acquisition module, a data processing and coordinate transformation processing module (not shown in the figure) and a feedback control module;
working laser 1 and material 9 are in laser spot 10P (x)i,yi,zi) Point interaction, short-time rapid heat effect at the center of the light spot, diffuse reflection light 11 generated on the surface of the material, absorption, reflection and refraction generated inside the material and transmission through the surface of the material to generate transmissionIrradiating light 8; the reflected light 11 is detected by the detector 2 and converted into an electric signal or a charge signal, and the electric signal or the charge signal is converted into two-dimensional position information of a horizontal plane through the signal acquisition and processing module 3; the transmitted light 8 is detected by a detector 7 and converted into an electric signal or a charge signal, and the electric signal or the charge signal is converted into two-dimensional position information of a vertical surface through a signal acquisition and processing module 6; adjusting and calibrating the detector 2 and the detector 7 by utilizing the same component values in two-dimensional coordinate values in two groups of planes which are perpendicular to each other; the laser spot 10P (x) is constructed by two groups of mutually perpendicular plane two-dimensional coordinate values measured by the calibrated detectors 2 and 7i,yi,zi) And the three-dimensional coordinates are displayed in real time and fed back to the laser on line through the data transmission and control module 5.
The functions of the components included in the measurement system of fig. 2 are specifically as follows:
the working laser 1, the laser which interacts with the material 9 and realizes the preset processing of the material 9, the light spot center of the laser changes along with the interaction with the material 9;
a reflected light detector 2 that converts an optical signal into an electric signal or a charge signal by measurement of reflected light 11 generated by interaction of laser light with the material 9;
the reflected light detector signal acquisition and processing module 3 is used for processing the electric signal or the charge signal measured by the reflected light detector 2 to obtain two-dimensional position information of the laser spot in the horizontal plane;
the power supply module 4 is used for providing stabilized voltage direct current required by the signal acquisition and processing modules 3 and 6;
a data transmission and control module 5 for transmitting the laser spot 10P (x)i,yi,zi) The three-dimensional coordinates are displayed in real time and fed back to the laser on line, and are key components of the measuring device, and the measuring device has enough bandwidth and corresponding speed so as to realize real-time transmission and on-line feedback of laser spot information;
the transmission light detector signal acquisition and processing module 6 is used for processing the electric signal or the charge signal measured by the transmission light detector 7 to obtain two-dimensional position information of the laser spot in the vertical plane;
a transmitted light detector 7 for converting an optical signal into an electrical signal or charge signal by measuring transmitted light 8 generated by the interaction of the laser light with the material 9;
the transmitted light 8 is the transmitted light generated by the working laser 1 which is absorbed, reflected and refracted inside the material 9 and penetrates through the surface of the material 9;
a material 9, a material or medium that interacts with the working laser 1 and has predetermined processing requirements;
the reflected light 11 is the reflected light generated by the diffused reflection of the working laser beam 1 on the surface of the material 9.
The invention provides a method for accurately positioning a light spot in a laser processing process, which mainly utilizes a photoelectric detection technology to convert an optical signal into an electric signal or a charge signal, analyzes position information of the light spot in two groups of mutually perpendicular planes through a signal processing and positioning algorithm, and realizes the acquisition and online feedback of three-dimensional position information of the light spot by utilizing coordinate transformation. The capture and resolution capability of the photoelectric detector on the optical signal determines the strength and resolution of the converted electrical signal; because the spot geometric characteristics or energy distribution characteristics of different lasers are different, the spot positioning algorithm needs to be determined according to the selected laser spot characteristics, and the spot positioning algorithm is used as mathematical approximate expression of the laser spot energy distribution characteristics, the closer the expression is to the actual characteristics of the spot, the higher the accuracy and precision of the analyzed position information are, and meanwhile, the requirement of data processing is also improved.
The method for on-line tracking and real-time feedback inside a laser beam acting material provided by the embodiment of the invention adopts a light spot positioning detection technology to collect and process the position information of the laser beam acting material on two groups of mutually perpendicular planes, can realize the characteristics of three-dimensional accurate positioning and real-time on-line feedback of laser light spots inside a processing object through signal processing, a positioning algorithm and a space coordinate transformation method, has no intervention and interference to the laser processing process, and can meet the requirements of accurate guiding and feedback of the light spots acting on the inside of the material in the laser high-precision processing process.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (3)
1. A method for on-line tracking and real-time feedback inside a laser beam action material is characterized by comprising the following steps: according to the interaction rule of the laser and the material, the laser generates diffuse reflection at the interaction position of the surface of the material, and the diffuse reflection light is measured by a reflected light signal detection device;
the laser is absorbed, reflected and refracted in the material, and the light transmitted through the surface of the material is measured by a transmitted light detection device;
the diffuse reflection light and the transmission light are received by the reflection light signal detection device and the transmission light detection device, and based on the transverse photoelectric effect, the signals of the diffuse reflection light and the transmission light are converted into electric signals through the corresponding photoelectric detection devices, and the electric signals are displayed in the reflection light signal detection device and the transmission light signal detection device in the forms of voltage, current or images;
in a Cartesian coordinate system, the diffuse reflection light signals and the transmission light signals received by the reflection light signal detection device and the transmission light signal detection device are two-dimensional position information of laser spots in two mutually perpendicular planes respectively;
converting laser spot image signals into two-dimensional coordinate values based on an image processing technology according to the laser characteristic parameters, the geometric parameters and the position information of the action material;
the image processing technology specifically comprises image digitization, image change, image coding compression, image enhancement and restoration, image segmentation, image description and image identification;
converting the electric signal output by the photoelectric detector into a two-dimensional coordinate value by utilizing a signal processing technology and a light spot positioning algorithm according to the laser characteristic parameter, the geometric parameter and the position information of the action material and the energy distribution characteristic of the laser light spot;
the signal processing technology specifically comprises the steps of filtering, amplifying and analog-to-digital converting of signals, wherein the light spot positioning algorithm specifically comprises a light spot energy uniform distribution centroid positioning algorithm and a light spot energy Gaussian distribution centroid positioning algorithm;
the positioning algorithm of the spot energy uniform distribution centroid specifically comprises the following steps:
(x0,y0) Is the centroid of the light spot; k is pi r/4 as a proportionality coefficient, and r is the radius of the light spot; u shapeA、UB、UC、UDVoltage signals corresponding to quadrants of the detector A, B, C, D respectively, wherein A, B, C, D refers to four areas of the photosensitive surface of the detector which are uniformly divided by a cross line passing through the center point of the photosensitive surface;
the positioning algorithm of the Gaussian distribution centroid of the spot energy specifically comprises the following steps:
I(x,y)the light intensity at the center of the light spot; (x)0,y0) Is the centroid of the light spot; i is0/2πω2The light intensity at the centroid of the light spot; omega is the beam waist radius of which the light spot energy is in Gaussian distribution;
selecting the diameter or side length of a photosensitive surface of the detector as 2-4 times of the radius r of the light spot by the photoelectric detector;
calibrating the photoelectric detector by using the same component value in the two-dimensional position information of the laser spot according to the two-dimensional position information of the laser spot in two mutually perpendicular planes, and constructing a three-dimensional coordinate of the laser spot by using two-dimensional coordinate values in the two mutually perpendicular planes measured by the calibrated photoelectric detector;
and carrying out real-time transmission and feedback of the accurate position data of the laser light spot by using a data transmission and control module.
2. The method of claim 1, wherein the light signal is converted to an electrical signal by the photodetector from the diffuse reflected light on the surface of the material and from the transmitted light inside the material, and the photodetector is operated with a response time of not more than 1 μ s and a limiting resolution of not more than 1 μm.
3. The method according to claim 1, wherein the real-time feedback and display of the laser spot position information is realized through the data transmission and control module, and the data transmission and control module meets the requirements that the frequency is not lower than 1GHz and the bandwidth is not lower than 100 MHz.
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| CN113297643B (en) * | 2021-04-14 | 2023-02-03 | 西安理工大学 | Method for calculating light spot area in underwater blue-green laser communication |
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