CN208283557U - A kind of profile scanner device vision measurement device - Google Patents

A kind of profile scanner device vision measurement device Download PDF

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Publication number
CN208283557U
CN208283557U CN201820457231.9U CN201820457231U CN208283557U CN 208283557 U CN208283557 U CN 208283557U CN 201820457231 U CN201820457231 U CN 201820457231U CN 208283557 U CN208283557 U CN 208283557U
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China
Prior art keywords
lens group
photodetector
testee
vision measurement
laser
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Application number
CN201820457231.9U
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Chinese (zh)
Inventor
丁海鹏
王国安
孙久春
吴伟锋
周飞
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Hebson Technology (shenzhen) Co Ltd
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Hebson Technology (shenzhen) Co Ltd
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Abstract

The utility model discloses a kind of profile scanner device vision measurement devices, including semiconductor laser, diversing lens group, receiving lens group and photodetector, the semiconductor laser and the coaxial front end for being sequentially arranged in testee of diversing lens group form transmitting terminal;The receiving lens group and photodetector are coplanar with receiving end and form receiving end;Shaping of the laser beam of the semiconductor laser Jing Guo diversing lens group, three position A being radiated on testee0、B0And C0, three position A on testee0、B0And C0Reflection light through inclination and eccentric setting receiving lens group after corresponding facula position A is formed on photodetector1、B1And C1.High-precision micro-displacement measurement is realized, emitting portion is equivalent to laser shaping system, and hot spot was not only thin but also long, and performance is stable and at low cost, realized the measurement to profiling object surface.

Description

A kind of profile scanner device vision measurement device
Technical field
The utility model relates to a kind of measuring device, in particular to a kind of profile scanner device vision measurement device.
Background technique
Laser triangulation method is lacked because that can exclude measured piece surface color, pattern, texture, identifier and various surfaces Sunken interference, and can on various plates and cylindrical surface hole and slot be imaged, and automatic measurement hole, the position of slot, aperture, hole The geometric dimensions such as depth, flute length, groove width, groove depth and be widely used.The existing displacement sensor based on laser triangulation principle, Also there are the clear superiorities such as non-contact, high-precision, high reliability.Currently, domestic carried out much laser triangulation method Exploration, but it still has many problems, for example actual measurement demand is not achieved in measurement accuracy, and performance is when in use Nor very stable.
Utility model content
The purpose of the utility model is to provide a kind of profile scanner device vision measurement device, the device measurement accuracy is high, Performance is stablized.
To achieve the above object, the technical solution adopted in the utility model is, a kind of profile scanner device vision measurement dress It sets, including semiconductor laser, diversing lens group, receiving lens group and photodetector, the semiconductor laser and transmitting The coaxial front end for being sequentially arranged in testee of lens group, forms transmitting terminal, and transmitting terminal can produce uniform elongated line and swash Light;The receiving lens group and photodetector are coplanar with receiving end and form receiving end, are radiated at testee for receiving On line laser;Shaping of the laser beam of the semiconductor laser Jing Guo diversing lens group, three be radiated on testee A position A0、B0And C0, three position A on testee0、B0And C0Reflection light by tiltedly and eccentric setting reception it is saturating Corresponding facula position A is formed after microscope group on photodetector1、B1And C1
Preferably, the laser beam that the semiconductor laser generates is formed after diversing lens group shaping it is uniformly thin Long line laser, is radiated on testee, realizes high-precision micro-displacement measurement, hot spot is not only thin but also long, performance It is stable and at low cost, realize the measurement to profiling object surface.
Preferably, the receiving lens group is lens barrel, primary optical axis c inclination or bias relative to the system of reception Setting improves the performance of sensor, and does not have to the cost in addition increasing manufacture and assembly.
Preferably, the photodetector is linear array photosensitive element or face battle array photosensitive element, the preferred photoelectricity of this patent Detector is the face battle array photosensitive element of high pixel, and small in size, light-weight and performance is good.
Preferably, the diversing lens group is made of a piece of Bao Weier prism and several coaxial spherical lenses.It is described Receiving lens group is made of several coaxial spherical lenses.
Connecting in this patent with photodetector is signal processing circuit, and the signal processing circuit includes FPGA/ CPLD processor, signal conditioning unit, analog digital converting unit, serial/parallel conversion transmission unit;The signal conditioning unit with Photodetector is connected to receive the electric signal of photodetector, and output end is connect with analog digital converting unit to export Digital signal, FPGA/CPLD processor is for handling above-mentioned signal and obtaining the displacement of testee.
The line Scanning Detction of the utility model belongs to laser triangulation method, when exactly detecting measured object, utilizes machine Vision means obtain the image of measured object, the detection side that image is used as the means or carrier for detecting and transmitting information Method obtains the image of objective things instead of human eye, passes through computer and image the purpose is to extract useful signal from image Processing technique is handled the image of acquisition, analyzed and is identified that it is based on contemporary optics, and fusion electronics calculates The modern detecting that the science and technology such as machine iconology, information processing, computer vision is integrated.
The utility model has the beneficial effects that the laser line scanning machine vision metrology device of the utility model, realizes height The micro-displacement measurement of precision, emitting portion are equivalent to laser shaping system, and hot spot is not only thin but also long, performance stabilization and cost It is low, realize the measurement to profiling object surface.The design margin of optical system in the utility model is big, product seriation and The compatibility of photosensitive element is more preferable, and is increased without any cost, need to only adjust the reception lens barrel position of optical system, be done Inclination or bias put the photoelectric properties that can optimize the present apparatus.
Detailed description of the invention
It, below will be to institute in embodiment or description of the prior art in order to illustrate more clearly of the technical solution of the utility model Attached drawing to be used is needed to be briefly described.
Fig. 1 is the top view of the utility model;
Fig. 2 is the left view of the utility model transmitting terminal;
Fig. 3 is the schematic diagram of face battle array photosensitive element and Fig. 2 corresponding line laser focal imaging position;
In figure: 1. semiconductor lasers, 2. diversing lens groups, 3. position A0, 4. position B0, 5. position C0, 6. receiving lens Group, 7. photodetectors, 8. facula position A1, 9. facula position B1, 10. facula position C1, the optical axis of a. diversing lens group, b. The optical axis of receiving lens group, c. receive the primary optical axis of system.
Specific embodiment
In order to make those skilled in the art better understand the technical solutions in the application, below in conjunction with embodiment pair Technical solution in the application is clearly and completely described.
As shown in Figure 1, the utility model discloses a kind of profile scanner device vision measurement device, including semiconductor laser 1, diversing lens group 2, receiving lens group 6 and photodetector 7, the semiconductor laser 1 and diversing lens group 2 are coaxial successively It is arranged in the front end of testee, forms transmitting terminal, can produce uniform elongated line laser;The receiving lens group 6 and light Electric explorer 7 is coplanar with receiving end and forms receiving end, receives the line laser being radiated on testee;The semiconductor swashs Shaping of the laser beam of light device 1 Jing Guo diversing lens group 2, three position A being radiated on testee0、B0And C0, i.e., in figure 3,4 and 5, three position A on testee0、B0And C03, reception of 4 and 5 reflection light by inclination and eccentric setting Corresponding facula position A is formed after lens group 6 on photodetector1、B1And C1
In this patent, position A0For line laser position, B0Center position, C for range0For line laser position.It is described The laser beam that semiconductor laser 1 generates forms elongated line laser after 2 shaping of diversing lens group, is radiated at testee On;If testee is in the range ability of this vision measurement device, the line laser of reflection or scattering is by inclining Tiltedly and the lens barrel of eccentric setting, i.e., after the receiving lens group 6 in this patent, so that it may the focal imaging on photodetector 7, from And the region for irradiating line laser is detected;Then the features such as corresponding object appearance can be found out by software algorithm, Achieve the purpose that measurement.
The laser beam that the semiconductor laser 1 generates forms uniform elongated line after 2 shaping of diversing lens group Laser is radiated on testee, realizes high-precision micro-displacement measurement, and hot spot is not only thin but also long, performance it is stable and It is at low cost, realize the measurement to profiling object surface.
The receiving lens group 6 is lens barrel, primary optical axis c inclination or eccentric setting relative to the system of reception, The primary optical axis that system is received in this patent includes the optical axis of object plane receiving lens group and photodetector.It will deform originally and non-circular Symmetrical hot spot is processed into symmetrical hot spot, to achieve the purpose that photoelectric properties.The performance of sensor is improved, and is not had to another The outer cost for increasing manufacture and assembly.
The photodetector 7 is linear array photosensitive element or face battle array photosensitive element, this patent preferred photodetector are The face battle array photosensitive element of high pixel, small in size, light-weight and performance is good.
The diversing lens group 2 is made of a piece of Bao Weier prism and several coaxial spherical lenses;The receiving lens Group 6 is made of several coaxial spherical lenses.
The line laser topographic profile schematic diagram being illustrated in figure 2 within the scope of the useful range of the utility model, i.e. transmitting terminal Left view.Line laser position A0, range center position B0With line laser position C03,4,5 areas surrounded i.e. in figure Domain, that is, shadow region is the range ability of the laser line scanning machine vision metrology device of the utility model;Obviously it can be same The height fluctuations of pacing amount object;The laser line scanning machine vision metrology device of the utility model is allowed vertically to transport It is dynamic, so that it may to realize measuring three-dimensional profile.
As shown in figure 3, planar object, along beam direction, when moving in range ability, the laser rays of the utility model is swept Retouch the hot spot pattern (shadow region) that machine vision metrology device is formed on photosensitive element;The photodetector is high density Linear array photosensitive element or face battle array photosensitive element, high-resolution photosensitive element is preferentially used in the utility model, small in size, Light-weight and performance is good.
The signal processing circuit include FPGA/CPLD processor, signal conditioning unit, analog digital converting unit, string/ And converting transmission unit;The signal conditioning unit is connect to receive the electric signal of photodetector with photodetector, defeated Outlet is connect to output digit signals with analog digital converting unit, and FPGA/CPLD processor is used to carry out above-mentioned signal It handles and obtains the displacement of testee.
Its working principle is that: as shown in Figure 1, laser 1 issues beam of laser, after diversing lens group 2, laser beam becomes Three position A on testee have been arrived at the thin laser irradiation of a branch of narrowband0、B0And C0That is on the label 3,4,5 in Fig. 1. The scattering light of testee enters receiving lens group 6 and focuses on photodetector 7, is obtained by signal processing circuit processing tested Ohject displacement.
Described embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on this reality It is obtained by those of ordinary skill in the art without making creative efforts every other with the embodiment in novel Embodiment is fallen within the protection scope of the utility model.

Claims (7)

1. a kind of profile scanner device vision measurement device, including semiconductor laser (1), diversing lens group (2), receiving lens group , (6) and photodetector (7) semiconductor laser (1) and the coaxial testee that is sequentially arranged in of diversing lens group (2) Front end forms transmitting terminal;The receiving lens group (6) and photodetector (7) are coplanar with receiving end and form receiving end;It is special Sign is that the laser beam of the semiconductor laser (1) passes through the shaping of diversing lens group (2), is radiated on testee Three position A0(3)、B0(4) and C0(5), three position A on testee0(3)、B0(4) and C0(5) reflection light is passed through Corresponding facula position A is formed on photodetector (7) after the receiving lens group (6) of inclination and eccentric setting1(8)、B1 (9) and C1(10)。
2. profile scanner device vision measurement device according to claim 1, which is characterized in that the semiconductor laser (1) laser beam generated forms uniform elongated line laser after diversing lens group (2) shaping, is radiated at testee On.
3. profile scanner device vision measurement device according to claim 1 or 2, which is characterized in that the receiving lens group It (6) is lens barrel, primary optical axis c inclination or eccentric setting relative to the system of reception.
4. profile scanner device vision measurement device according to claim 2, which is characterized in that the diversing lens group (2) It is made of a piece of Bao Weier prism and several coaxial spherical lenses.
5. profile scanner device vision measurement device according to claim 1, which is characterized in that the receiving lens group (6) It is made of several coaxial spherical lenses.
6. profile scanner device vision measurement device according to claim 1, which is characterized in that the photodetector is line Battle array photosensitive element or face battle array photosensitive element.
7. profile scanner device vision measurement device according to claim 6, which is characterized in that the photodetector is height The face battle array photosensitive element of pixel.
CN201820457231.9U 2018-04-03 2018-04-03 A kind of profile scanner device vision measurement device Active CN208283557U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820457231.9U CN208283557U (en) 2018-04-03 2018-04-03 A kind of profile scanner device vision measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820457231.9U CN208283557U (en) 2018-04-03 2018-04-03 A kind of profile scanner device vision measurement device

Publications (1)

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CN208283557U true CN208283557U (en) 2018-12-25

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CN201820457231.9U Active CN208283557U (en) 2018-04-03 2018-04-03 A kind of profile scanner device vision measurement device

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110687687A (en) * 2019-09-25 2020-01-14 腾景科技股份有限公司 Laser facula homogenizing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110687687A (en) * 2019-09-25 2020-01-14 腾景科技股份有限公司 Laser facula homogenizing device
CN110687687B (en) * 2019-09-25 2021-05-04 腾景科技股份有限公司 Laser facula homogenizing device

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Address after: 518000 Floor 1, Building E, Huafeng International Robot Industrial Park, Nanchang Community Avenue, Xixiang Street, Baoan District, Shenzhen City, Guangdong Province

Patentee after: Hebson Technology (Shenzhen) Co., Ltd.

Address before: 518100 Room 526, Block A, Baoan Zhigu Science Park, 4 Yintian Road, Xixiang Street, Baoan District, Shenzhen City, Guangdong Province

Patentee before: Hebson Technology (Shenzhen) Co., Ltd.

CP02 Change in the address of a patent holder