CN107356197A - A kind of spot location method of four-quadrant photo detector based on Gaussian Profile - Google Patents
A kind of spot location method of four-quadrant photo detector based on Gaussian Profile Download PDFInfo
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- CN107356197A CN107356197A CN201610301117.2A CN201610301117A CN107356197A CN 107356197 A CN107356197 A CN 107356197A CN 201610301117 A CN201610301117 A CN 201610301117A CN 107356197 A CN107356197 A CN 107356197A
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- spot
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- spot center
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
Abstract
The present invention provides a kind of spot location method of the 4 quadrant detector based on Gaussian Profile, using light distribution of the Gauss model equivalent laser hot spot on four-quadrant photo detector photosurface, is solved according to spot center coordinate solution formulaOrOrThen obtained by searching standardized normal distribution tableOrOrValue, so as to solve spot center coordinate (x0, y0).The present invention improves the measurement accuracy of Position of Laser-Spot Center, while largely reduces amount of calculation, so as to obtain Position of Laser-Spot Center in real time.
Description
Technical field
The invention belongs to technical field of photoelectric detection, is related to a kind of hot spot of four-quadrant photo detector based on Gaussian Profile
Localization method.
Background technology
Four-quadrant photo detector is a kind of common position measurement device, and it passes through circular or square photosensitive face-port mouth
Four quadrants that photoetching technique even partition forming shape is identical, parameter is equal, is axisymmetricly distributed are to carry out position measurement.Four-quadrant
It is excellent that limit photodetector has that small volume, spectral region are wide, position resolution is high, high sensitivity and responding range are wide etc.
Gesture, it can be widely applied to position measurement, laser alignment, be automatically positioned, in the accurate photodetector system such as target following.
The measuring principle of four-quadrant photo detector is worked using semiconductor photovoltaic effect, and each quadrant can regard one as
Individual independent photodiode.When laser facula is irradiated on detector photosurface, all quadrants in region according to being received
Light spot energy produces correspondingly sized photoelectric current, by being changed and being calculated to photoelectric current, it is possible to determine spot center
Position coordinates.Four-quadrant photo detector basic structure is as shown in figure 1, circular photosurface is divided into A, B, C, D tetra- by blind area
Region.When detector works, laser is mapped on detector photosurface through optical system convergence, and Position of Laser-Spot Center is sat
It is designated as a (x0,y0).Now light energy of the laser facula on the four-quadrant of detector is respectively IA、IB、IC、ID, so as to corresponding each
The photoelectric current that quadrant negative electrode is exported is respectively iA、iB、iC、iD, shown in the corresponding relation such as formula (1) of light energy and photoelectric current,
In∝in, n=A, B, C, D (1)
When laser facula is producing displacement on photosurface, the light energy that all quadrants receive will produce change, so as to
The photoelectric current for causing all quadrants to export produces respective change.Therefore, can be according to the photoelectric current that all quadrants export according to certain meter
Calculation method solves the centre coordinate a (x of laser facula0,y0)。
For calculate laser spot center sit calibration method be influence four-quadrant photo detector measurement accuracy it is important because
One of element.Existing method is included circle model, Gaussian Profile, model of ellipse and statistical distribution pattern etc. and visited with equivalent laser hot spot
The distribution surveyed on device photosurface, so as to obtain different spot center position calculating methods.Wherein, the calculating side based on circle model
Method is a kind of algorithm earliest and being most widely used, and its model is simple, amount of calculation is small, but measurement accuracy is relatively low.And it is based on
The computational methods of Gaussian distribution model are closer to actual facula light distribution, but what is brought therewith is to calculate complexity, it is difficult to realize
Detection in real time.
The content of the invention
It is an object of the invention to provide a kind of spot location method of 4 quadrant detector based on Gaussian Profile, improve
The measurement accuracy of Position of Laser-Spot Center, while amount of calculation is largely reduced, so as to obtain laser in real time
Spot center position.
In order to solve the above-mentioned technical problem, the present invention provides a kind of hot spot of the four-quadrant photo detector based on Gaussian Profile
Localization method, using light distribution of the Gauss model equivalent laser hot spot on four-quadrant photo detector photosurface, according to light
Spot centre coordinate solution formula solvesOrOrThen by searching standardized normal distribution
Table obtainsOrOrValue, so as to solve spot center coordinate (x0, y0)；The spot center coordinate is asked
Shown in solution formula such as formula (1) and (2),
Wherein, (x0, y0) be spot center coordinate, σ be Laser beam energy distribution waist radius, UA、UB、UCAnd UDRespectively
For the voltage of four quadrant output, UAlways=UA+UB+UC+UDFor four-quadrant output voltage summation,WithPoint
Not Biao Shi independent variable beWithJust too distribution function.
Further, the waist radius σ of Calibration of Laser Energy distribution method is：
First, four-quadrant photo detector is fixed on the table, laser is arranged on turntable；
Then, turntable rotates θ angles along the x-axis direction, and the distance, delta x of spot center movement is calculated according to formula (3),
Δ x=ftan θ (3)
Wherein, f is the focal length of four-quadrant photo detector optical lens；
Finally, according to four quadrant voltage output value UA, UB, UC, UDDistance, delta x with spot center movement is according to formula
(1) methods described is obtainedValue, so as to obtain the waist radius σ of Laser beam energy distribution.
Further, turntable rotates multiple angles along the x-axis direction, so as to obtain the waist radius of multiple Laser beam energy distributions,
The average value of the waist radius of multiple Laser beam energy distributions is taken as final Laser beam energy distribution waist radius.
Compared with prior art, its remarkable advantage is the present invention, and the inventive method uses Gauss model equivalent laser light
Light distribution of the spot on four-quadrant photo detector photosurface, closer to actual facula light distribution, measurement accuracy is improved,
There is reference significance to the engineer applied of reality.
Brief description of the drawings
Fig. 1 is four-quadrant photo detector photosurface schematic diagram.
Fig. 2 is the laser facula model that energy is in Gaussian Profile.
Fig. 3 is the experiment porch schematic diagram that the present invention uses.
Fig. 4 is laser facula movement schematic diagram.
Embodiment
It is readily appreciated that, according to technical scheme, in the case where not changing the connotation of the present invention, this area
Those skilled in the art can imagine a variety of realities of spot location method of the 4 quadrant detector of the present invention based on Gaussian Profile
Apply mode.Therefore, detailed description below and accompanying drawing are only the exemplary illustrations to technical scheme, without should
It is considered as the whole of the present invention or is considered as limitation or restriction to technical solution of the present invention.
The Integral Thought of the present invention is that hot spot is equivalent using Gauss model first, derives all quadrants light energy size；Root
According to light energy and the corresponding relation of photoelectric current, the relational equation of facula position coordinate is obtained；Standardized normal distribution table is established, is passed through
Query method rapid solving glossing up center position coordinates；Waist radius σ values are demarcated, and σ value is updated to spot center coordinate
For (x0, y0) solution relational expression in, obtain revised spot center position coordinates.
Such as Fig. 2, in general, common lasers emergent light spot energy is in Gaussian Profile, and light spot energy is at its center most
By force, it is rounded to external diffusion, and energy is gradually weak.
Laser facula falls after optical system converges on the photosurface of photodetector, and spot center position coordinates is
(x0,y0), wherein I (x, y) represents the light intensity value at (x, y) place on photosurface, then general in the equivalent light spot energy of dimensional gaussian distribution
Rate density function such as formula (2),
Wherein, I0For whole hot spot light energy summation, I0/2πσ2For spot center point light intensity；σ is Laser beam energy distribution
Waist radius, which determine the hot spot rate of decay and range of exposures.
For laser facula of the energy in Gaussian Profile, four-quadrant photo detector photosurface border limits function
Limit of integration, but can be approximately to nothing because hot spot overwhelming majority energy is all in photosurface, therefore to photosurface boundary integral
Poor domain is integrated, the light energy summation I of hot spot on whole photosurfaceAlwaysAs shown in formula (3),
Generally, due to four tunnel output light current signals are smaller, for the ease of subsequent treatment, generally to all quadrants photoelectric current
Signal carries out equimultiple enhanced processing, if amplifying circuit gain be E, then the voltage U that exports after amplificationnIt can be represented by formula (4).
Un=Ein, n=A, B, C, D (4)
Wherein, inFor the photoelectric current size of the n-th quadrant.With reference to formula (1), (3) and (4), four-quadrant output voltage is obtained
With light energy equivalent relation such as formula (5).
UAlways=UA+UB+UC+UD=MIAlways=MI0 (5)
Wherein, M is proportionality coefficient, is a constant.According to formula (5), four-quadrant output voltage and spot center position
Relation is as follows：
It is (x to solve spot center coordinate0, y0), abbreviation is carried out to formula (6), is solving x0When by dual-integration
First it is changed into a multiple integral, obtains formula (7),
Formula (5) is updated in formula (7), and abbreviation obtains formula (8),
Similarly, can obtain on y0Solution formula, see formula (9),
Formula (8) and (9) are respectively spot center position coordinates x0、y0Solution relational expression, it can be seen that x0、y0Tool
Body numerical value is contained in the integration of gauss of distribution function, and its formula can not use elementary function table, therefore need to be by standardized normal distribution
Table changes into look-up table (LUT) on a hardware platform, so as to real-time and accurately obtain spot center position coordinates using look-up table
Coordinate (x0, y0)。
The precision of look-up table has been largely fixed the precision of spot center position measurement.As σ=1, x0=0, y0=0,
Normal distribution is standardized normal distribution, such as formula (10),
Because Standard Normal Distribution is the integration on infinite domain, it is contemplated that the application in engineering, during x ∈ [- 3,3]
The 99.6% of whole normal distribution area is included, therefore look-up table (root is made by N number of point is divided into x-axis [- 3,3] section
The amount of storage of look-up table is can determine that according to different required precisions).Due to f (x) waveforms to y-axis into axial symmetry, therefore it need to only demarcate x
>N/2 point when 0.Work as x<When 0, it can pass throughSolution obtains, and accurately can thus solve in glossing up
Heart coordinate.Table 1 is the value of part of standards normal distribution, and wherein the longitudinal axis of table represents the individual position of x values, and transverse axis represents x value decimal points
Latter position, data are corresponding with x in tableValue.
The part of standards gaussian distribution table of table 1
Tab.1Part of the standard normal distribution table
Because spot center coordinate is (x0, y0) solution relational expression be not standard gaussian distribution, therefore need to convert it into
Standard profile solves, as shown in formula (11) and (12), wherein UAlways=UA+UB+UC+UDFor four-quadrant output voltage summation.
From formula (11) and (12), it is desirable to which it is (x to solve spot center coordinate0, y0) only it need to know UA、UB、UC、UDAnd
σ.By the respective output voltage U of four-quadrantA、UB、UC、UDIt is updated in formula (11) (12) and solvesOrRepresent that independent variable is respectively
WithJust too distribution function, now obtained using standardized normal distribution table searchOrDemarcating
During good waist radius σ, (x0, y0) also just solve and.With x0Exemplified by, whenFor 0.6815 when,
Standardized normal distribution table is updated to, lookup obtainsThen x during the σ now demarcated=10=0.5.
Because waist radius σ is determined by laser in actually measuring and front end optical system, therefore, each four-quadrant photoelectricity
Detector all needs to calibrate σ values when measuring.The experiment porch of demarcation such as Fig. 3, when detector carries out spot location measurement
When, detector is fixed on the table, and laser is then arranged on and accurately controlled on the turntable of angle.
First, demarcating four-quadrant photodetector center is needed, as four-quadrant output voltage values UA=UB=UC=UD
When, spot center and 4 quadrant detector center superposition.Now, turntable rotational angle θ along the x-axis direction, as shown in Figure 4, four-quadrant
The optical lens focal length limited before photodetector is f, and the distance, delta x of wherein hot spot movement can be tried to achieve by formula (13),
Δ x=ftan θ (13)
Now, four-quadrant voltage output value is UA, UB, UC, UD, numerical value is updated in formula (11) and tried to achieveValue, from
And obtain laser beam waist radius sigma.Above step can carry out repeatedly, obtaining σ1, σ2…σn, averaged, using average value as most
It is (x that whole σ values, which are updated to spot center coordinate,0, y0) solution relational expression in.Thus, whole Facula Center Location mistake is completed
Journey.
Claims (3)
1. spot location method of a kind of four-quadrant photo detector based on Gaussian Profile, it is characterised in that using Gauss model
Light distribution of the equivalent laser hot spot on four-quadrant photo detector photosurface, solved according to spot center coordinate solution formula
Go outOrOrThen obtained by searching standardized normal distribution tableOrOr
Value, so as to solve spot center coordinate (x0, y0)；Shown in the spot center coordinate solution formula such as formula (1) and (2),
Wherein, (x0, y0) be spot center coordinate, σ be Laser beam energy distribution waist radius, UA、UB、UCAnd UDRespectively four
The voltage of individual quadrant output, UAlways=UA+UB+UC+UDFor four-quadrant output voltage summation,WithPoint
Not Biao Shi independent variable beWithJust too distribution function.
2. spot location method of the four-quadrant photo detector as claimed in claim 1 based on Gaussian Profile, it is characterised in that mark
The method for determining the waist radius σ of Laser beam energy distribution is：
First, four-quadrant photo detector is fixed on the table, laser is arranged on turntable；
Then, turntable rotates θ angles along the x-axis direction, and the distance, delta x of spot center movement is calculated according to formula (3),
Δ x=ftan θ (3)
Wherein, f is the focal length of four-quadrant photo detector optical lens；
Finally, according to four quadrant voltage output value UA, UB, UC, UDDistance, delta x with spot center movement is according to formula (1) institute
The method of stating is obtainedValue, so as to obtain the waist radius σ of Laser beam energy distribution.
3. spot location method of the four-quadrant photo detector as claimed in claim 2 based on Gaussian Profile, it is characterised in that turn
Platform rotates multiple angles along the x-axis direction, so as to obtain the waist radius of multiple Laser beam energy distributions, takes multiple Laser beam energy distributions
Waist radius average value as final Laser beam energy distribution waist radius.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108180886A (en) * | 2017-12-24 | 2018-06-19 | 安凯 | Array 4 quadrant detector and its angle-measuring method |
| CN110085533A (en) * | 2019-04-30 | 2019-08-02 | 歌尔股份有限公司 | A kind of detection method and detection device of LED light spot symmetry |
| CN110793435A (en) * | 2019-10-15 | 2020-02-14 | 天津大学 | Rapid calibration method for position measurement of four-quadrant photoelectric detector |
| CN110836634A (en) * | 2019-09-16 | 2020-02-25 | 南京理工大学 | Four-quadrant detector calibration method capable of adapting to various light beams |
| CN111272084A (en) * | 2020-03-03 | 2020-06-12 | 丹阳钒曦光电科技有限公司 | Calibration method of four-quadrant detector |
| CN111355530A (en) * | 2020-03-13 | 2020-06-30 | 山东师范大学 | Method and device for improving performance of wireless optical communication system |
| CN112729546A (en) * | 2020-12-28 | 2021-04-30 | 中国科学院合肥物质科学研究院 | Imaging spectrometer waveband PRNU characteristic correction method, system and equipment |
| CN113776789A (en) * | 2021-11-10 | 2021-12-10 | 武汉普赛斯电子技术有限公司 | Focal length test method of detector |
| CN115046475A (en) * | 2022-05-26 | 2022-09-13 | 中国地质大学（武汉） | High-precision laser spot position detection method based on four-quadrant detector |
| CN117315011A (en) * | 2023-11-30 | 2023-12-29 | 吉林珩辉光电科技有限公司 | Method and device for positioning light spot center in atmospheric turbulence |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6484458A (en) * | 1987-09-26 | 1989-03-29 | Nikon Corp | Magneto-optical recording and reproducing device |
| CN1033416A (en) * | 1987-11-28 | 1989-06-14 | 天津大学 | Parameters of laser beam and holographic grating bar detection device and method |
| JPH09280946A (en) * | 1996-04-11 | 1997-10-31 | Nikon Corp | Laser-beam measuring apparatus |
| CN101509760A (en) * | 2009-03-27 | 2009-08-19 | 中国科学院上海光学精密机械研究所 | Apparatus and method for detecting gauss light beam waist position and dimension |
| CN101776516A (en) * | 2010-01-13 | 2010-07-14 | 北京理工大学 | Position detector-based dividing plane-sharing multispectral target |
| CN103148935A (en) * | 2013-02-27 | 2013-06-12 | 长春理工大学 | Industrial laser beam parameter measuring device |
-
2016
- 2016-05-09 CN CN201610301117.2A patent/CN107356197B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6484458A (en) * | 1987-09-26 | 1989-03-29 | Nikon Corp | Magneto-optical recording and reproducing device |
| CN1033416A (en) * | 1987-11-28 | 1989-06-14 | 天津大学 | Parameters of laser beam and holographic grating bar detection device and method |
| JPH09280946A (en) * | 1996-04-11 | 1997-10-31 | Nikon Corp | Laser-beam measuring apparatus |
| CN101509760A (en) * | 2009-03-27 | 2009-08-19 | 中国科学院上海光学精密机械研究所 | Apparatus and method for detecting gauss light beam waist position and dimension |
| CN101776516A (en) * | 2010-01-13 | 2010-07-14 | 北京理工大学 | Position detector-based dividing plane-sharing multispectral target |
| CN103148935A (en) * | 2013-02-27 | 2013-06-12 | 长春理工大学 | Industrial laser beam parameter measuring device |
Non-Patent Citations (3)
| Title |
|---|
| WU JIABIN,ZHAO BO，WU ZHIYONG: "Improved measurement accuracy of the spot position on an InGaAs quadrant detector by introducing Boltzmann function", 《2015 INTERNATIONAL CONFERENCE ON OPTOELECTRONICS AND MICROELECTRONICS》 * |
| 张辉等: "四象限探测器位置检测精度的主要影响因素研究", 《中国激光》 * |
| 陈梦苇等: "四象限探测器光斑中心定位算法研究", 《武汉理工大学学报（交通科学与工程版）》 * |
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| CN108180886A (en) * | 2017-12-24 | 2018-06-19 | 安凯 | Array 4 quadrant detector and its angle-measuring method |
| CN110085533A (en) * | 2019-04-30 | 2019-08-02 | 歌尔股份有限公司 | A kind of detection method and detection device of LED light spot symmetry |
| CN110836634B (en) * | 2019-09-16 | 2021-09-03 | 南京理工大学 | Four-quadrant detector calibration method capable of adapting to various light beams |
| CN110836634A (en) * | 2019-09-16 | 2020-02-25 | 南京理工大学 | Four-quadrant detector calibration method capable of adapting to various light beams |
| CN110793435A (en) * | 2019-10-15 | 2020-02-14 | 天津大学 | Rapid calibration method for position measurement of four-quadrant photoelectric detector |
| CN111272084A (en) * | 2020-03-03 | 2020-06-12 | 丹阳钒曦光电科技有限公司 | Calibration method of four-quadrant detector |
| CN111355530B (en) * | 2020-03-13 | 2021-07-20 | 山东师范大学 | Method and device for improving performance of wireless optical communication system |
| CN111355530A (en) * | 2020-03-13 | 2020-06-30 | 山东师范大学 | Method and device for improving performance of wireless optical communication system |
| CN112729546A (en) * | 2020-12-28 | 2021-04-30 | 中国科学院合肥物质科学研究院 | Imaging spectrometer waveband PRNU characteristic correction method, system and equipment |
| CN112729546B (en) * | 2020-12-28 | 2022-10-28 | 中国科学院合肥物质科学研究院 | Imaging spectrometer waveband PRNU characteristic correction method, system and equipment |
| CN113776789A (en) * | 2021-11-10 | 2021-12-10 | 武汉普赛斯电子技术有限公司 | Focal length test method of detector |
| CN113776789B (en) * | 2021-11-10 | 2022-01-11 | 武汉普赛斯电子技术有限公司 | Focal length test method of detector |
| CN115046475A (en) * | 2022-05-26 | 2022-09-13 | 中国地质大学（武汉） | High-precision laser spot position detection method based on four-quadrant detector |
| CN115046475B (en) * | 2022-05-26 | 2023-03-14 | 中国地质大学（武汉） | High-precision laser spot position detection method based on four-quadrant detector |
| CN117315011A (en) * | 2023-11-30 | 2023-12-29 | 吉林珩辉光电科技有限公司 | Method and device for positioning light spot center in atmospheric turbulence |
| CN117315011B (en) * | 2023-11-30 | 2024-04-02 | 吉林珩辉光电科技有限公司 | Method and device for positioning light spot center in atmospheric turbulence |
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