CN207833013U - Ten two quadrant laser detectors - Google Patents

Ten two quadrant laser detectors Download PDF

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Publication number
CN207833013U
CN207833013U CN201721805289.XU CN201721805289U CN207833013U CN 207833013 U CN207833013 U CN 207833013U CN 201721805289 U CN201721805289 U CN 201721805289U CN 207833013 U CN207833013 U CN 207833013U
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Prior art keywords
quadrant
inner circle
photosurface
laser
axis
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CN201721805289.XU
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魏永旺
史泽林
罗海波
常铮
于洋
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Shenyang Institute of Automation of CAS
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Shenyang Institute of Automation of CAS
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Abstract

The utility model is related to a kind of ten two quadrant laser detectors, including round photosurface, and the round photosurface is divided into inner circle and outer shroud, wherein within the round heart be that origin establishes two-dimensional coordinate system, X-axis and Y-axis inner circle is divided into 4 right angle fan regions;Outer shroud is divided into 8 outer regions, so that each quadrant is had and only there are two outer regions.The utility model is mainly used in faint, fast-changing optical signal detection, as laser transit, the first-class photoelectric tracking of las er-guidance, positioning and collimation etc. have very important meaning, existing four-quadrant, double four quadrant photoelectric laser acquisition spatial resolution can be significantly increased, to improve laser orientation or tracking system performance, and it is reasonable for structure, there is certain value and dissemination.

Description

Ten two quadrant laser detectors
Technical field
The utility model is related to photodetector and component design field, specifically a kind of ten two quadrant laser Detector.
Background technology
In faint, fast-changing optical signal detection, such as laser transit, the first-class photoelectric tracking of las er-guidance, positioning, standard Straight and microdisplacement measurement etc., uses four-quadrant laser detector and component as sensing unit more.Especially to big Majority for military target detections or the directional detection occasion in industry, use four-quadrant PIN or APD laser detector into The azimuthal orientation of target on row two-dimensional directional needs to determine using continuous or pulse laser as lasing source for irradiating To or tracking target.The later reflected light of target diffusing reflection is similar to directional light, into optical system after image in object lens On back focal plane, since structure adjustment makes the position of four-quadrant laser detector photosurface slightly have defocus, then connect on photosurface The picture for receiving target is a circular disperse hot spot in Gaussian Profile.When system optical axis alignment target, circular light Spot center is overlapped with 4 quadrant detector center, and four quadrants export approximately equal arteries and veins because the facula area being illuminated by the light is identical Rush voltage.When target relative to optical axis when X, Y-direction have any offset, the position of the round disperse hot spot of target picture is just in four-quadrant There are correspondingly a degree of offset, four detectors to obtain difference due to by facula area difference is shone on limit detector photosurface Radiation energy, to voltage pulse output amplitude it is also different.
By being continually striving to for numerous scientific workers, to four-quadrant laser detector, spot diameter is equal to detector light When the half of quick face diameter, detector photosurface is fully utilized, and has preferable linear zone, as shown in Figure 1.
Since only there are four photosurface subregions for four-quadrant laser detector, imaging facula can only be to output signal voltage Ux、Uy With spot displacement (it is between Δ x, Δ y) only in a linear relationship in a certain range, so the low defect of spatial resolution is often Orientation and the relatively low problem of tracking accuracy is caused to highlight.
Utility model content
In view of the deficiencies of the prior art, the utility model provides a kind of ten two quadrant laser detectors, solves spatial discrimination Rate is low, the problem for causing to orient and tracking accuracy is relatively low, response speed is partially slow.
The utility model technical solution used for the above purpose is:
The round photosurface is divided into inner circle and outer by a kind of ten two quadrant laser detectors, including round photosurface Ring, wherein within the round heart be that origin establishes two-dimensional coordinate system, X-axis and Y-axis inner circle is divided into 4 inner circle regions;Outer shroud etc. It is divided into 8 outer regions, so that each quadrant is had and only there are two outer regions.
A diameter of 3~the 6mm of inner circle.
The outer annular diameter is 10~20mm.
Each inner circle region connects a transimpedance operational amplification circuit by inner circle signal lead-out wire;Each outer region A transimpedance operational amplification circuit is connected by outer ring signal lead-out wire;Inner circle region and outer region output current signal, Current signal is converted into voltage signal through transimpedance operational amplification circuit, and is exported after amplifying.
The transimpedance operational amplification circuit uses thick film manufacturing process, and integrated circuit is made.
The inner circle signal lead-out wire is drawn from the outer ledge of inner circle, and is arranged close to X-axis or Y-axis;The outer shroud letter Number lead-out wire is drawn from the outer ledge of outer shroud, and is arranged close to X-axis or Y-axis.
Round photosurface is divided by photosensitive cut-off rule, and the width of photosensitive cut-off rule is 10 μm~120 μm.
The utility model has the advantages that and advantage:
1. the utility model design space photosurface subregion is 12, wherein 4 quadrants of inner circle, 8 quadrants of outer shroud, institute With comparison four-quadrant, double four quadrant photoelectric laser detector, photosensitive subregion is finer, and spatial resolution significantly improves;
2. the method that the utility model calculates spot center position offset using ten two quadrant laser detectors calculates light The offset of spot center is (when Δ x, Δ y), due to having carried out weighted sum difference operation in corresponding X, Y-direction, so meter Result is calculated closer in actual deviation situation, comparison four-quadrant, double four quadrant photoelectric laser detector, due to calculating offset error more It is small, so can more improve the response speed of detection system;
3. the spot diameter of the utility model design optical defocus is only equal to the half of the photosurface diameter of inner circle, make detection The incident laser energy intensity peak that device receives significantly improves, and compares the four-quadrant of identical photosurface size, double four quadrant photoelectric laser is visited Survey device, other parameters are constant, identical responsivity when, the projectile energy needed is lower, can make the detection of detection system away from From farther.
Description of the drawings
Fig. 1 is 4 quadrant detector laser orientation principle schematic;Wherein, 1 it is 4 quadrant detector photosurface, 2 is light Spot;
Fig. 2 is the photosensitive EDS maps of each quadrant and outlet schematic diagram of the utility model;
Fig. 3 is the transimpedance operational amplification circuit schematic diagram of the utility model.
Specific implementation mode
The utility model is described in further detail with reference to the accompanying drawings and embodiments.
Ten two quadrant laser detectors and component make machinability based on detector, target surface outlet does not influence light as possible Spot receives, subsequent conditioning circuit receiving circuit complexity cannot it is too high on the basis of, improve as possible of both deflecting angle and resolution ratio Inherent accuracy is more quadrant laser acquisition components of target design.
It is the photosensitive EDS maps of each quadrant and outlet schematic diagram of the utility model as shown in Figure 2.
In the photosurface of this ten dual-quadrant detector, it is assumed that inner circle is 4 quadrant detector, and photosurface is denoted as S respectively (1,2,3,4), a diameter of 4mm of inner circle photosurface;Outer shroud be eight quadrant detectors, each photosurface be denoted as S (5,6,7,8,9, 10,11,12), outer annular diameter 20mm.Design laser spot diameter is 2mm.Arrow line is all quadrants photosurface transducing signal Lead-out wire, corresponding output voltage UI (i=1~12)
Equally, this ten dual-quadrant detector can be placed near optical system back focal plane, optical axis passes through photosurface cross Channel center.Distant object reflected light is similar to directional light and enters optical system imaging on the back focal plane of object lens, detector light Because position slightly has defocus, the picture for then receiving target is a circular light spot in quick face.When system optical axis alignment target, Circular light spot center is overlapped with detector center.Unlike, here, the spot diameter for designing optical defocus is only equal to inner circle The half of photosurface diameter, rather than the half of entire detector photosurface diameter, this way can obtain two big benefits:
(1) the incident laser energy peak value that detector receives significantly improves.When clear aperature, photosurface diameter, detector are rung When the external conditions such as response are constant, optical defocus amount reduces, and obtains the incident laser energy intensity bigger of aggregation, works as incident radiation When energy is weaker, target is more easily found using this ten dual-quadrant detector in advance.
(2) four-quadrant laser detector is compared, spatial resolution significantly improves.And use similar following offset (Δ X, Δ y) calculations:
In formula, k1、k2For offset correction coefficient, UI (i=1~12)Output voltage signal is corresponded to for 12 quadrant photosurfaces. (when Δ x, Δ y), due to having respectively reduced corresponding Vertical Square upward component, make solving result more can focal zone solving offset Point it is the offset in respective direction, more prominent offset information calculates migration result closer to the actual angle of deviation obtained from.
This ten dual-quadrant detectors chip photosensitive area is divided into 12 relatively independent photosurfaces, wherein inner circle subregion It is 4, a diameter of 3~6mm of inner circle photosurface;Outer shroud subregion is 8, a diameter of 10~20mm of outer shroud photosurface.Ten two quadrants Detector laser acquisition device assembly is the combination of ten dual-quadrant detector laser detectors and 12 tunnels across resistance operational amplification circuit. When there is optical signal to be irradiated to photosurface, and when radiation intensity is more than detector response lag, the ten of the output of ten dual-quadrant detectors Two road current signals, through exporting to obtain 12 road voltage analog signals across resistance amplifying circuit, gain amplifier control circuit.In component When structure design, 12 road trans-impedance amplifiers and gain amplifier control circuit make thick film hybrid, around detector Tube core is attached to around tube socket, 12 road voltage signal lines and power supply and ground wire is drawn, then lead sealing is closed, and top layers of shell is adopted Plane mirror is used to be packaged as incident window.In this way, ten dual-quadrant detector laser acquisition device assemblies not only take full advantage of Shell space reduces device volume, but also shields many external disturbances using the Can after lead sealing, to improve The reliability and anti-interference of component.
Detector chip photosensitive area is divided into 12 relatively independent photosurfaces, and wherein inner circle is circle, according to 90 ° points For the identical right angle fan of 4 shapes, a diameter of 3~6mm of inner circle photosurface;Outer shroud is annulus, is divided into 8 shapes according to 45 ° Identical sector, a diameter of 10~20mm of outer shroud photosurface.
There are two types of implementation methods for segmentation between each quadrant photosurface of detector:Method one, utilizes IC etching Technology, by a photosurface be divided into identical several shapes, area equation, positional symmetry region;Method two, utilizes all quadrants Electric field isolation is used between photosurface.The back side of two methods all remains as a full wafer, each photosensitive region is equivalent to one Photodiode.In ideal conditions, photodiode arrangement of more quadrant laser detectors as one group of reverse bias, often The photoelectric surface of a quadrant should performance parameter having the same, according to the photogenerated current calculation formula of photodiode:IP=S E, in formula, S is photodiode detectivity, and E is light radiation illumination.If incident optical signal is after optical system shaping Hot spot average shot is on all photosurfaces, since the light radiation illumination of each photosurface is identical, then being generated in each quadrant Photogenerated current approximately equal.
It is corresponding with an extraction wire respectively on each quadrant photosurface of detector, is commonly called as " gold thread ", which corresponds to The output signal line of all quadrants photosurface photogenerated current, the base area lead at the detector back side is as public pole, in guided optical mode work When making, it to be used for external bias high voltage power supply;When photovoltaic mode works, then by base area wire ground.
It is sanctified by usage, photosurface photoetching is divided into several regions, then referred to as several quadrant detectors.Most of more quadrant laser Detector is made of photoetching process, this is a kind of micrometer-nanometer processing technology of precision, and principle is reacted using photo-chemical Principle and chemistry, physical etchings method, design configuration is transmitted on single-crystal surface or dielectric layer, formed effective graphical window or The technology of functional graphic.Interval is referred to as dead zone, wanting in technique between each quadrant of more quadrant detectors after photoetching It asks and is made narrow.Because if dead zone is too wide, and when launching spot is smaller, the position of hot spot can not be just differentiated;But dead zone Cannot be excessively narrow, the mutual crosstalk between signal may be caused, while being not easy to reach in technique, so when actual fabrication, It has to take into account the two aspects.In general, skip distance is between 10 μm~120 μm.Divide on each quadrant photosurface of detector It is not corresponding with an extraction wire, is commonly called as " gold thread ", which corresponds to the output signal line of all quadrants photosurface photogenerated current, The base area lead at the detector back side is as public pole, when guided optical mode works, is used for external bias high voltage power supply;In photovoltaic mould When formula works, then by base area wire ground.
Ten dual-quadrant detector laser acquisition device assemblies are that ten dual-quadrant detector laser detectors and 12 tunnels are transported across resistance Calculate the combination of amplifying circuit.
To with the current-voltage conversion circuit for using resistor, being referred to as transimpedance operational amplification circuit.
It is illustrated in figure 3 the transimpedance operational amplification circuit schematic diagram of the utility model.
U1B is FET operational amplifiers, and No. 5 feet are in-phase input end, and No. 6 feet are reverse input end, and No. 7 feet are output end. VCC is laser detector reverse bias voltage, and PD is the photodiode schematic diagram for representing some quadrant of laser detector.CIN Be photoelectric sensor interpolar distribution capacity and operational amplifier interpolar distribution capacity summation.With feedback resistance RfIn parallel Capacitance CFIt is a decoupling capacitance.Usual operational amplifier is easy for generating self-oscillation there are input capacitance.Utilize CFInto Row phase compensation, so that it may so that this self-oscillation characteristic of operational amplifier is improved.
When there is optical signal to be irradiated to photosurface, and when radiation intensity is more than detector response lag, ten dual-quadrant detectors 12 road current signals of output obtain 12 road voltage analog letters through being exported across resistance amplifying circuit, gain amplifier control circuit Number.When modular construction designs, 12 road trans-impedance amplifiers and gain amplifier control circuit make thick film hybrid, around The tube core of detector is attached to around tube socket, 12 road voltage signal lines and power supply and ground wire is drawn, then lead sealing is closed, shell Top layers are packaged using plane mirror as incident window.In this way, ten dual-quadrant detector laser acquisition device assemblies are not only abundant Shell space is utilized, reduces device volume, but also many external disturbances are shielded using the Can after lead sealing, from And improve the reliability and anti-interference of component.
12 road current signals of ten dual-quadrant detectors output, through defeated across resistance amplifying circuit, gain amplifier control circuit Go out to obtain 12 road voltage analog signals.When modular construction designs, 12 road trans-impedance amplifiers and gain amplifier control circuit Thick film hybrid is made, the tube core around detector is attached to around tube socket, by 12 road voltage signal lines and power supply and ground Line is drawn, and then lead sealing is closed, and top layers of shell is packaged using plane mirror as incident window.

Claims (7)

1. a kind of ten two quadrant laser detectors, including round photosurface, it is characterised in that:The round photosurface is divided into Inner circle and outer shroud, wherein within the round heart be that origin establishes two-dimensional coordinate system, X-axis and Y-axis inner circle is divided into 4 inner circle areas Domain;Outer shroud is divided into 8 outer regions, so that each quadrant is had and only there are two outer regions.
2. ten two quadrants laser detector according to claim 1, it is characterised in that:A diameter of 3~the 6mm of inner circle.
3. ten two quadrants laser detector according to claim 1, it is characterised in that:The outer annular diameter be 10~ 20mm。
4. ten two quadrants laser detector according to claim 1, it is characterised in that:Believed by inner circle in each inner circle region Number lead-out wire connects a transimpedance operational amplification circuit;Each outer region connects one across resistance by outer ring signal lead-out wire Anti- operational amplification circuit;Inner circle region and outer region output current signal, through transimpedance operational amplification circuit by current signal Voltage signal is converted to, and is exported after amplifying.
5. ten two quadrants laser detector according to claim 4, it is characterised in that:The transimpedance operational amplification circuit Using thick film manufacturing process, integrated circuit is made.
6. ten two quadrants laser detector according to claim 4, it is characterised in that:The inner circle signal lead-out wire is from interior Round outer ledge is drawn, and is arranged close to X-axis or Y-axis;The outer ring signal lead-out wire is drawn from the outer ledge of outer shroud, and It is arranged close to X-axis or Y-axis.
7. ten two quadrants laser detector according to claim 1, it is characterised in that:By photosensitive cut-off rule to circular light Quick face is divided, and the width of photosensitive cut-off rule is 10 μm~120 μm.
CN201721805289.XU 2017-12-21 2017-12-21 Ten two quadrant laser detectors Active CN207833013U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111024220A (en) * 2019-12-26 2020-04-17 中国科学院长春光学精密机械与物理研究所 Signal processing system for eliminating crosstalk of quadrant photoelectric detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111024220A (en) * 2019-12-26 2020-04-17 中国科学院长春光学精密机械与物理研究所 Signal processing system for eliminating crosstalk of quadrant photoelectric detector

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