CN105445186A - 太赫兹波检测装置、照相机、成像装置以及计测装置 - Google Patents

太赫兹波检测装置、照相机、成像装置以及计测装置 Download PDF

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Publication number
CN105445186A
CN105445186A CN201510601469.5A CN201510601469A CN105445186A CN 105445186 A CN105445186 A CN 105445186A CN 201510601469 A CN201510601469 A CN 201510601469A CN 105445186 A CN105445186 A CN 105445186A
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CN
China
Prior art keywords
terahertz wave
layer
detection device
wave detection
metal layer
Prior art date
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Pending
Application number
CN201510601469.5A
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English (en)
Chinese (zh)
Inventor
富冈纮斗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN105445186A publication Critical patent/CN105445186A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Power Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
CN201510601469.5A 2014-09-24 2015-09-18 太赫兹波检测装置、照相机、成像装置以及计测装置 Pending CN105445186A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-194032 2014-09-24
JP2014194032A JP2016065767A (ja) 2014-09-24 2014-09-24 テラヘルツ波検出装置、カメラ、イメージング装置、および計測装置

Publications (1)

Publication Number Publication Date
CN105445186A true CN105445186A (zh) 2016-03-30

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Family Applications (1)

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CN201510601469.5A Pending CN105445186A (zh) 2014-09-24 2015-09-18 太赫兹波检测装置、照相机、成像装置以及计测装置

Country Status (3)

Country Link
US (1) US9638578B2 (https=)
JP (1) JP2016065767A (https=)
CN (1) CN105445186A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108831988A (zh) * 2018-06-12 2018-11-16 中国科学院上海技术物理研究所 一种工作频率可调的非制冷型太赫兹探测器
CN109451252A (zh) * 2018-10-31 2019-03-08 中国科学院半导体研究所 紧凑型太赫兹波阵列图像传感器芯片
CN111448794A (zh) * 2017-12-13 2020-07-24 佳能株式会社 太赫兹波相机和检测模块
US20240344978A1 (en) * 2021-08-05 2024-10-17 Sony Semiconductor Solutions Corporation Terahertz detection device

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10288563B1 (en) * 2018-01-22 2019-05-14 The Florida International University Board Of Trustees Sensor platform based on toroidal resonances for rapid detection of biomolecules
US11237103B2 (en) * 2018-05-31 2022-02-01 Socovar Sec Electronic device testing system, electronic device production system including same and method of testing an electronic device
US20230154227A1 (en) * 2020-03-13 2023-05-18 Fingerprint Cards Anacatum Ip Ab A terahertz biometric imaging package
CN113994394A (zh) 2020-03-13 2022-01-28 指纹卡安娜卡敦知识产权有限公司 显示器下的无源太赫兹生物特征成像装置
EP4118570A4 (en) * 2020-03-13 2023-10-25 Fingerprint Cards Anacatum IP AB UNDER-SCREEN TERAHERTZ BIOMETRIC IMAGING ARRANGEMENT
US11888233B2 (en) * 2020-04-07 2024-01-30 Ramot At Tel-Aviv University Ltd Tailored terahertz radiation
CN112213082A (zh) * 2020-11-10 2021-01-12 上海亨临光电科技有限公司 一种太赫兹图像的分辨率测试装置
US20230268244A1 (en) * 2022-02-21 2023-08-24 Taiwan Semiconductor Manufacturing Company, Ltd. Thermal dissipation in power ic using pyroelectric materials

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CN1692504A (zh) * 2002-12-05 2005-11-02 松下电器产业株式会社 热电器件及其制造方法与红外线传感器
US20090101297A1 (en) * 2007-10-23 2009-04-23 Honeywell International Inc. System and method for characterizing fibrous materials using stokes parameters
CN102564601A (zh) * 2010-12-22 2012-07-11 精工爱普生株式会社 热式光检测装置、电子设备、热式光检测器及其制造方法
JP2013044703A (ja) * 2011-08-26 2013-03-04 Konica Minolta Holdings Inc 光センサー
JP2013171020A (ja) * 2012-02-23 2013-09-02 Seiko Epson Corp 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器
US20130314765A1 (en) * 2012-05-25 2013-11-28 The Trustees Of Boston College Metamaterial Devices with Environmentally Responsive Materials
JP2014163674A (ja) * 2013-02-21 2014-09-08 Seiko Epson Corp テラヘルツ波検出装置、カメラ、イメージング装置、および計測装置

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JPWO2004051760A1 (ja) * 2002-12-05 2006-04-06 松下電器産業株式会社 焦電体素子及びその製造方法並びに赤外線センサ
JP2009141661A (ja) 2007-12-06 2009-06-25 Optical Comb Inc 電磁波検出素子及び電磁波検出装置
JP2014235144A (ja) 2013-06-05 2014-12-15 セイコーエプソン株式会社 テラヘルツ波検出装置、カメラ、イメージング装置および計測装置
JP2014235145A (ja) 2013-06-05 2014-12-15 セイコーエプソン株式会社 テラヘルツ波検出装置、カメラ、イメージング装置および計測装置
JP2014235146A (ja) 2013-06-05 2014-12-15 セイコーエプソン株式会社 テラヘルツ波検出装置、カメラ、イメージング装置および計測装置
WO2015017703A2 (en) * 2013-08-01 2015-02-05 The Regents Of The University Of California Pyroelectric aluminum nitride mems infrared sensor with selective wavelength infrared absorber

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1692504A (zh) * 2002-12-05 2005-11-02 松下电器产业株式会社 热电器件及其制造方法与红外线传感器
US20090101297A1 (en) * 2007-10-23 2009-04-23 Honeywell International Inc. System and method for characterizing fibrous materials using stokes parameters
CN102564601A (zh) * 2010-12-22 2012-07-11 精工爱普生株式会社 热式光检测装置、电子设备、热式光检测器及其制造方法
JP2013044703A (ja) * 2011-08-26 2013-03-04 Konica Minolta Holdings Inc 光センサー
JP2013171020A (ja) * 2012-02-23 2013-09-02 Seiko Epson Corp 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器
US20130314765A1 (en) * 2012-05-25 2013-11-28 The Trustees Of Boston College Metamaterial Devices with Environmentally Responsive Materials
JP2014163674A (ja) * 2013-02-21 2014-09-08 Seiko Epson Corp テラヘルツ波検出装置、カメラ、イメージング装置、および計測装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111448794A (zh) * 2017-12-13 2020-07-24 佳能株式会社 太赫兹波相机和检测模块
CN111448794B (zh) * 2017-12-13 2023-08-29 佳能株式会社 太赫兹波相机和检测模块
US11770596B2 (en) 2017-12-13 2023-09-26 Canon Kabushiki Kaisha Terahertz wave camera and detection module
CN108831988A (zh) * 2018-06-12 2018-11-16 中国科学院上海技术物理研究所 一种工作频率可调的非制冷型太赫兹探测器
CN109451252A (zh) * 2018-10-31 2019-03-08 中国科学院半导体研究所 紧凑型太赫兹波阵列图像传感器芯片
CN109451252B (zh) * 2018-10-31 2020-12-25 中国科学院半导体研究所 紧凑型太赫兹波阵列图像传感器芯片
US20240344978A1 (en) * 2021-08-05 2024-10-17 Sony Semiconductor Solutions Corporation Terahertz detection device

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US9638578B2 (en) 2017-05-02
JP2016065767A (ja) 2016-04-28
US20160084702A1 (en) 2016-03-24

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Application publication date: 20160330