CN105437078A - 研磨盘清洁装置 - Google Patents
研磨盘清洁装置 Download PDFInfo
- Publication number
- CN105437078A CN105437078A CN201410465414.1A CN201410465414A CN105437078A CN 105437078 A CN105437078 A CN 105437078A CN 201410465414 A CN201410465414 A CN 201410465414A CN 105437078 A CN105437078 A CN 105437078A
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- Prior art keywords
- abrasive disk
- cleaning device
- planetary piece
- grinding skin
- grinding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 title claims abstract description 36
- 230000002093 peripheral effect Effects 0.000 claims abstract description 8
- 210000003491 skin Anatomy 0.000 claims description 57
- 229920002799 BoPET Polymers 0.000 claims description 4
- 239000005041 Mylar™ Substances 0.000 claims description 4
- 210000002615 epidermis Anatomy 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 210000000085 cashmere Anatomy 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 239000004814 polyurethane Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 abstract description 5
- 239000011521 glass Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- -1 grounds travel Substances 0.000 description 5
- 238000011001 backwashing Methods 0.000 description 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- MFJDFPRQTMQVHI-UHFFFAOYSA-N 3,5-dioxabicyclo[5.2.2]undeca-1(9),7,10-triene-2,6-dione Chemical compound O=C1OCOC(=O)C2=CC=C1C=C2 MFJDFPRQTMQVHI-UHFFFAOYSA-N 0.000 description 1
- WSQZNZLOZXSBHA-UHFFFAOYSA-N 3,8-dioxabicyclo[8.2.2]tetradeca-1(12),10,13-triene-2,9-dione Chemical compound O=C1OCCCCOC(=O)C2=CC=C1C=C2 WSQZNZLOZXSBHA-UHFFFAOYSA-N 0.000 description 1
- 229920001634 Copolyester Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000874 polytetramethylene terephthalate Polymers 0.000 description 1
- 229920002215 polytrimethylene terephthalate Polymers 0.000 description 1
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Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410465414.1A CN105437078B (zh) | 2014-09-12 | 2014-09-12 | 研磨盘清洁装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410465414.1A CN105437078B (zh) | 2014-09-12 | 2014-09-12 | 研磨盘清洁装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105437078A true CN105437078A (zh) | 2016-03-30 |
CN105437078B CN105437078B (zh) | 2018-10-19 |
Family
ID=55547951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410465414.1A Active CN105437078B (zh) | 2014-09-12 | 2014-09-12 | 研磨盘清洁装置 |
Country Status (1)
Country | Link |
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CN (1) | CN105437078B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107520754A (zh) * | 2017-08-11 | 2017-12-29 | 郑州磨料磨具磨削研究所有限公司 | 一种研磨机清洗机构 |
CN108262678A (zh) * | 2016-12-30 | 2018-07-10 | 上海新昇半导体科技有限公司 | 一种硅片研磨装置及其研磨方法 |
CN109420965A (zh) * | 2017-08-24 | 2019-03-05 | 中微半导体设备(上海)有限公司 | 一种静电吸盘翻新工装及其翻新方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004098264A (ja) * | 2002-09-12 | 2004-04-02 | Shin Etsu Handotai Co Ltd | 研磨布のドレッシング方法及びワークの研磨方法 |
JP2007253294A (ja) * | 2006-03-24 | 2007-10-04 | Konica Minolta Opto Inc | 研磨パッドのドレッシング方法 |
CN101708594A (zh) * | 2009-12-18 | 2010-05-19 | 南京华联兴电子有限公司 | 研磨机盘面整形修正轮 |
CN101927457A (zh) * | 2009-06-26 | 2010-12-29 | 宋健民 | 组合式修整器 |
CN103522188A (zh) * | 2012-07-02 | 2014-01-22 | 中芯国际集成电路制造(上海)有限公司 | 研磨垫整理方法、研磨垫整理器及研磨机台 |
CN203460048U (zh) * | 2013-09-18 | 2014-03-05 | 天津市环欧半导体材料技术有限公司 | 磨片机游星片的改良构造 |
DE102013202488A1 (de) * | 2013-02-15 | 2014-09-04 | Siltronic Ag | Verfahren zum Abrichten von Poliertüchern zur gleichzeitig beidseitigen Politur von Halbleiterscheiben |
CN204195517U (zh) * | 2014-09-12 | 2015-03-11 | 南昌欧菲光学技术有限公司 | 研磨盘清洁装置 |
-
2014
- 2014-09-12 CN CN201410465414.1A patent/CN105437078B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004098264A (ja) * | 2002-09-12 | 2004-04-02 | Shin Etsu Handotai Co Ltd | 研磨布のドレッシング方法及びワークの研磨方法 |
JP2007253294A (ja) * | 2006-03-24 | 2007-10-04 | Konica Minolta Opto Inc | 研磨パッドのドレッシング方法 |
CN101927457A (zh) * | 2009-06-26 | 2010-12-29 | 宋健民 | 组合式修整器 |
CN101708594A (zh) * | 2009-12-18 | 2010-05-19 | 南京华联兴电子有限公司 | 研磨机盘面整形修正轮 |
CN103522188A (zh) * | 2012-07-02 | 2014-01-22 | 中芯国际集成电路制造(上海)有限公司 | 研磨垫整理方法、研磨垫整理器及研磨机台 |
DE102013202488A1 (de) * | 2013-02-15 | 2014-09-04 | Siltronic Ag | Verfahren zum Abrichten von Poliertüchern zur gleichzeitig beidseitigen Politur von Halbleiterscheiben |
CN203460048U (zh) * | 2013-09-18 | 2014-03-05 | 天津市环欧半导体材料技术有限公司 | 磨片机游星片的改良构造 |
CN204195517U (zh) * | 2014-09-12 | 2015-03-11 | 南昌欧菲光学技术有限公司 | 研磨盘清洁装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108262678A (zh) * | 2016-12-30 | 2018-07-10 | 上海新昇半导体科技有限公司 | 一种硅片研磨装置及其研磨方法 |
CN108262678B (zh) * | 2016-12-30 | 2021-01-01 | 上海新昇半导体科技有限公司 | 一种硅片研磨装置及其研磨方法 |
CN107520754A (zh) * | 2017-08-11 | 2017-12-29 | 郑州磨料磨具磨削研究所有限公司 | 一种研磨机清洗机构 |
CN109420965A (zh) * | 2017-08-24 | 2019-03-05 | 中微半导体设备(上海)有限公司 | 一种静电吸盘翻新工装及其翻新方法 |
Also Published As
Publication number | Publication date |
---|---|
CN105437078B (zh) | 2018-10-19 |
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CP01 | Change in the name or title of a patent holder |
Address after: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee after: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee after: Nanchang OFilm Tech. Co.,Ltd. Patentee after: Ophiguang Group Co.,Ltd. Patentee after: SUZHOU OFILM TECH Co.,Ltd. Address before: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: OFilm Tech Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. Address after: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee after: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee after: Nanchang OFilm Tech. Co.,Ltd. Patentee after: OFilm Tech Co.,Ltd. Patentee after: SUZHOU OFILM TECH Co.,Ltd. Address before: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: Shenzhen OFilm Tech Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20210104 Address after: 231323 Building 1, precision electronics industrial park, Hangbu Town, Shucheng County, Lu'an City, Anhui Province Patentee after: Anhui jingzhuo optical display technology Co.,Ltd. Address before: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: Ophiguang Group Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. |
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