CN105437078B - 研磨盘清洁装置 - Google Patents
研磨盘清洁装置 Download PDFInfo
- Publication number
- CN105437078B CN105437078B CN201410465414.1A CN201410465414A CN105437078B CN 105437078 B CN105437078 B CN 105437078B CN 201410465414 A CN201410465414 A CN 201410465414A CN 105437078 B CN105437078 B CN 105437078B
- Authority
- CN
- China
- Prior art keywords
- grinding
- skin
- planetary
- planetary piece
- piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Brushes (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410465414.1A CN105437078B (zh) | 2014-09-12 | 2014-09-12 | 研磨盘清洁装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410465414.1A CN105437078B (zh) | 2014-09-12 | 2014-09-12 | 研磨盘清洁装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105437078A CN105437078A (zh) | 2016-03-30 |
CN105437078B true CN105437078B (zh) | 2018-10-19 |
Family
ID=55547951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410465414.1A Active CN105437078B (zh) | 2014-09-12 | 2014-09-12 | 研磨盘清洁装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105437078B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108262678B (zh) * | 2016-12-30 | 2021-01-01 | 上海新昇半导体科技有限公司 | 一种硅片研磨装置及其研磨方法 |
CN107520754A (zh) * | 2017-08-11 | 2017-12-29 | 郑州磨料磨具磨削研究所有限公司 | 一种研磨机清洗机构 |
CN109420965B (zh) * | 2017-08-24 | 2020-05-26 | 中微半导体设备(上海)股份有限公司 | 一种静电吸盘翻新工装及其翻新方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013202488A1 (de) * | 2013-02-15 | 2014-09-04 | Siltronic Ag | Verfahren zum Abrichten von Poliertüchern zur gleichzeitig beidseitigen Politur von Halbleiterscheiben |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004098264A (ja) * | 2002-09-12 | 2004-04-02 | Shin Etsu Handotai Co Ltd | 研磨布のドレッシング方法及びワークの研磨方法 |
JP2007253294A (ja) * | 2006-03-24 | 2007-10-04 | Konica Minolta Opto Inc | 研磨パッドのドレッシング方法 |
CN101927457A (zh) * | 2009-06-26 | 2010-12-29 | 宋健民 | 组合式修整器 |
CN101708594A (zh) * | 2009-12-18 | 2010-05-19 | 南京华联兴电子有限公司 | 研磨机盘面整形修正轮 |
CN103522188B (zh) * | 2012-07-02 | 2018-07-20 | 中芯国际集成电路制造(上海)有限公司 | 研磨垫整理方法、研磨垫整理器及研磨机台 |
CN203460048U (zh) * | 2013-09-18 | 2014-03-05 | 天津市环欧半导体材料技术有限公司 | 磨片机游星片的改良构造 |
CN204195517U (zh) * | 2014-09-12 | 2015-03-11 | 南昌欧菲光学技术有限公司 | 研磨盘清洁装置 |
-
2014
- 2014-09-12 CN CN201410465414.1A patent/CN105437078B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013202488A1 (de) * | 2013-02-15 | 2014-09-04 | Siltronic Ag | Verfahren zum Abrichten von Poliertüchern zur gleichzeitig beidseitigen Politur von Halbleiterscheiben |
Also Published As
Publication number | Publication date |
---|---|
CN105437078A (zh) | 2016-03-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105437078B (zh) | 研磨盘清洁装置 | |
CN102573697B (zh) | 家用器具 | |
CN109174732B (zh) | 一种数码产品屏幕清洁装置 | |
CN204195517U (zh) | 研磨盘清洁装置 | |
CN205996783U (zh) | 一种磁力抛光机 | |
CN203196953U (zh) | 一种液晶玻璃研磨后清洗机 | |
CN205947688U (zh) | 一种手摇搅拌机 | |
CN203438062U (zh) | 手机玻璃平面研磨机 | |
CN203317237U (zh) | 磨砂轮 | |
CN102862121B (zh) | 一种cmp研磨垫修整结构 | |
CN202174074U (zh) | 一种研磨盘清洗用刷轮 | |
CN215588840U (zh) | 一种自清洁抛光皮修整器 | |
CN207223679U (zh) | 一种高效抛光机构 | |
CN102336571A (zh) | 片式陶瓷元件的制造方法 | |
CN109048629B (zh) | 抛光设备 | |
CN201872031U (zh) | 一种旋转式自动磨平机 | |
CN205947687U (zh) | 一种手摇搅拌机 | |
CN212880894U (zh) | 一种训练用篮球批量自动清洁装置 | |
CN208373627U (zh) | 一种蓝宝石晶体片的刷片系统 | |
CN208629263U (zh) | 一种移动终端玻璃研磨盘 | |
CN203993489U (zh) | 一种具有自动分离产品功能的振动研磨机 | |
JP3221364U (ja) | 掃除ばけ構造 | |
CN208961749U (zh) | 一种半导体的金刚石研磨盘及研磨装置 | |
CN206911473U (zh) | 研磨机齿圈清理装置 | |
CN202200182U (zh) | 研磨垫整理器和研磨机台 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee after: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee after: Nanchang OFilm Tech. Co.,Ltd. Patentee after: Ophiguang Group Co.,Ltd. Patentee after: SUZHOU OFILM TECH Co.,Ltd. Address before: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: OFilm Tech Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. Address after: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee after: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee after: Nanchang OFilm Tech. Co.,Ltd. Patentee after: OFilm Tech Co.,Ltd. Patentee after: SUZHOU OFILM TECH Co.,Ltd. Address before: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: Shenzhen OFilm Tech Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210104 Address after: 231323 Building 1, precision electronics industrial park, Hangbu Town, Shucheng County, Lu'an City, Anhui Province Patentee after: Anhui jingzhuo optical display technology Co.,Ltd. Address before: 330013 Fuying Road No. 18, Nanchang economic and Technological Development Zone, Jiangxi Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: Ophiguang Group Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. |