CN105424780A - 一种氮化镓传感器、制备方法和多传感器系统 - Google Patents
一种氮化镓传感器、制备方法和多传感器系统 Download PDFInfo
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- CN105424780A CN105424780A CN201510845956.6A CN201510845956A CN105424780A CN 105424780 A CN105424780 A CN 105424780A CN 201510845956 A CN201510845956 A CN 201510845956A CN 105424780 A CN105424780 A CN 105424780A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0214—Biosensors; Chemical sensors
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
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- Molecular Biology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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Abstract
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CN201510845956.6A CN105424780B (zh) | 2015-11-26 | 2015-11-26 | 一种氮化镓传感器、制备方法和多传感器系统 |
PCT/CN2016/098989 WO2017088560A1 (zh) | 2015-11-26 | 2016-09-14 | 传感器、制备方法和多传感器系统 |
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Cited By (23)
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CN105806913A (zh) * | 2016-05-17 | 2016-07-27 | 西安电子科技大学 | 具有集成式固态薄膜参比电极的GaN生物传感器及制作方法 |
WO2017088560A1 (zh) * | 2015-11-26 | 2017-06-01 | 北京代尔夫特电子科技有限公司 | 传感器、制备方法和多传感器系统 |
CN107356649A (zh) * | 2017-06-14 | 2017-11-17 | 浙江大学 | 多路生物传感器及其制造方法 |
CN107421994A (zh) * | 2016-05-24 | 2017-12-01 | 上海新昇半导体科技有限公司 | 基于二维电子气的低功耗氢气传感器及其制造方法 |
WO2018011697A1 (en) * | 2016-07-11 | 2018-01-18 | Epitronic Holdings Pte. Ltd. | Surface acoustic wave rfid sensor for hemodynamic wearables |
WO2018037296A1 (en) * | 2016-08-22 | 2018-03-01 | Epitronic Holdings Pte. Ltd. | Surface acoustic wave rfid sensor for material and structure sensing |
CN108400232A (zh) * | 2018-03-12 | 2018-08-14 | 浙江大学 | 一种基于镍锗合金/锗肖特基结的压力传感器件及其制造方法 |
CN108931566A (zh) * | 2017-05-26 | 2018-12-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种传感器件及其制备方法以及测试所述传感器件的方法 |
CN109037050A (zh) * | 2018-07-17 | 2018-12-18 | 中山市华南理工大学现代产业技术研究院 | 基于TiN的GaN基HEMT无金欧姆接触电极的制备方法 |
CN109540988A (zh) * | 2018-11-09 | 2019-03-29 | 中山大学 | 基于叉指凹槽结构的无参比电极GaN基pH传感器及其制备方法 |
CN109540987A (zh) * | 2018-11-09 | 2019-03-29 | 中山大学 | 基于凹槽结构的无参比电极GaN基pH传感器及其制备方法 |
CN110023748A (zh) * | 2016-08-16 | 2019-07-16 | 艾皮乔尼克控股有限公司 | 用于化学检测和(生物)分子诊断的表面声波rfid传感器 |
CN110459471A (zh) * | 2019-07-25 | 2019-11-15 | 中山大学 | 一种双栅结构GaN基pH传感器的制备方法 |
CN110470713A (zh) * | 2019-07-03 | 2019-11-19 | 大连理工大学 | 一种氮化镓基高电子迁移率晶体管的葡萄糖传感器 |
CN110988065A (zh) * | 2019-12-03 | 2020-04-10 | 中国科学院微电子研究所 | 氮化镓传感器件及其制备方法 |
CN111044575A (zh) * | 2019-12-03 | 2020-04-21 | 中国科学院微电子研究所 | GaN基集成器件及其制作方法 |
CN111551619A (zh) * | 2020-04-09 | 2020-08-18 | 济南大学 | 一种磺氨生物素修饰氮化铟糊电极传感器的制备方法 |
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CN112713183A (zh) * | 2020-12-28 | 2021-04-27 | 光华临港工程应用技术研发(上海)有限公司 | 气体传感器的制备方法及气体传感器 |
CN112881485A (zh) * | 2021-01-14 | 2021-06-01 | 西安电子科技大学 | 一种用于检测次氯酸根的GaN传感器及检测方法 |
CN113108813A (zh) * | 2020-12-15 | 2021-07-13 | 南京工业职业技术大学 | 纳米图形化转移的氮化镓基柔性差分式无栅生物传感器 |
WO2021196724A1 (zh) * | 2020-04-02 | 2021-10-07 | 中国科学技术大学 | 一种基于hemt气体传感器的气体检测装置和方法 |
CN117147023A (zh) * | 2023-11-01 | 2023-12-01 | 合肥美镓传感科技有限公司 | 氮化镓压力传感器及其制作方法 |
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CN112924515A (zh) * | 2021-01-20 | 2021-06-08 | 南方科技大学 | 一种气体传感器及其制备方法 |
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CN105424780B (zh) * | 2015-11-26 | 2018-06-22 | 深圳代尔夫特电子科技有限公司 | 一种氮化镓传感器、制备方法和多传感器系统 |
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CN104737009A (zh) * | 2012-10-16 | 2015-06-24 | 皇家飞利浦有限公司 | 基于纳米线平台的宽动态范围流体传感器 |
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CN205193005U (zh) * | 2015-11-26 | 2016-04-27 | 北京代尔夫特电子科技有限公司 | 一种氮化镓传感器和多传感器系统 |
Cited By (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017088560A1 (zh) * | 2015-11-26 | 2017-06-01 | 北京代尔夫特电子科技有限公司 | 传感器、制备方法和多传感器系统 |
CN105806913A (zh) * | 2016-05-17 | 2016-07-27 | 西安电子科技大学 | 具有集成式固态薄膜参比电极的GaN生物传感器及制作方法 |
CN107421994A (zh) * | 2016-05-24 | 2017-12-01 | 上海新昇半导体科技有限公司 | 基于二维电子气的低功耗氢气传感器及其制造方法 |
CN107421994B (zh) * | 2016-05-24 | 2019-11-15 | 上海新昇半导体科技有限公司 | 基于二维电子气的低功耗氢气传感器及其制造方法 |
WO2018011697A1 (en) * | 2016-07-11 | 2018-01-18 | Epitronic Holdings Pte. Ltd. | Surface acoustic wave rfid sensor for hemodynamic wearables |
EP3500851B1 (en) * | 2016-08-16 | 2020-09-16 | Epitronic Holdings Pte. Ltd. | Surface acoustic wave rfid sensor for chemical detection and (bio)molecular diagnostics |
US10720902B2 (en) | 2016-08-16 | 2020-07-21 | Epitronic Holdings Pte. Ltd | Surface acoustic wave RFID sensor for chemical detection and (bio)molecular diagnostics |
CN110023748A (zh) * | 2016-08-16 | 2019-07-16 | 艾皮乔尼克控股有限公司 | 用于化学检测和(生物)分子诊断的表面声波rfid传感器 |
WO2018037296A1 (en) * | 2016-08-22 | 2018-03-01 | Epitronic Holdings Pte. Ltd. | Surface acoustic wave rfid sensor for material and structure sensing |
US10523181B2 (en) | 2016-08-22 | 2019-12-31 | Epitronic Holdings Pte. Ltd. | Surface acoustic wave RFID sensor for material and structure sensing |
CN108931566A (zh) * | 2017-05-26 | 2018-12-04 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种传感器件及其制备方法以及测试所述传感器件的方法 |
CN107356649A (zh) * | 2017-06-14 | 2017-11-17 | 浙江大学 | 多路生物传感器及其制造方法 |
CN107356649B (zh) * | 2017-06-14 | 2020-02-28 | 浙江大学 | 多路生物传感器及其制造方法 |
CN108400232A (zh) * | 2018-03-12 | 2018-08-14 | 浙江大学 | 一种基于镍锗合金/锗肖特基结的压力传感器件及其制造方法 |
CN108400232B (zh) * | 2018-03-12 | 2020-02-21 | 浙江大学 | 一种基于镍锗合金/锗肖特基结的压力传感器件及其制造方法 |
CN109037050A (zh) * | 2018-07-17 | 2018-12-18 | 中山市华南理工大学现代产业技术研究院 | 基于TiN的GaN基HEMT无金欧姆接触电极的制备方法 |
CN109037050B (zh) * | 2018-07-17 | 2021-09-17 | 中山市华南理工大学现代产业技术研究院 | 基于TiN的GaN基HEMT无金欧姆接触电极的制备方法 |
CN109540987A (zh) * | 2018-11-09 | 2019-03-29 | 中山大学 | 基于凹槽结构的无参比电极GaN基pH传感器及其制备方法 |
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