CN105318983A - Flexible thin film thermocouple temperature sensor and preparation method thereof - Google Patents
Flexible thin film thermocouple temperature sensor and preparation method thereof Download PDFInfo
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- CN105318983A CN105318983A CN201510727789.5A CN201510727789A CN105318983A CN 105318983 A CN105318983 A CN 105318983A CN 201510727789 A CN201510727789 A CN 201510727789A CN 105318983 A CN105318983 A CN 105318983A
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- film
- thermopair
- flexible substrate
- temperature sensor
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Abstract
The invention discloses a flexible thin film thermocouple temperature sensor and a preparation method thereof. The sensor comprises a flexible substrate plated with an anode thermocouple film and a cathode thermocouple film; one end of the anode thermocouple film and one end of the cathode thermocouple film are in butt joint to form a film joint, and the other end of the anode thermocouple film and the other end of the cathode thermocouple film are respectively in connection with bonding pads; the bonding pad at the end of the anode thermocouple film is welded with an anode lead wire, and the bonding pad at the end of the cathode thermocouple film is welded with a cathode lead wire. The method comprises the steps of: S1: manufacturing a substrate; S2: moulding anode and cathode thermocouples; and S3: packaging lead wires. The flexible thin film thermocouple temperature sensor has the advantages of simple structure, fast response speed and wide application scope.
Description
Technical field
The present invention relates to thermometry, particularly relate to a kind of fexible film thermocouple temperature sensor and preparation method thereof.
Background technology
Temperature sensor is widely used in Aero-Space, Thermal Power Engineering etc., and the application of temperature sensor trends towards the application conditions of response and curved surface thermometric fast.
Traditional temperature sensor forms thermal cross with the welding of both positive and negative polarity thermocouple wire and carries out thermometric, and because thermocouple wire form thermocouple material is block materials, the thickness of its thermocouple contact is thicker, longer to the response time of temperature; Thermopair encapsulation has larger volume later, and encapsulate thermopair is the unyielding material of solid simultaneously, can not adapt to the thermometric requirement of abnormal curved surface.
Summary of the invention
The technical problem to be solved in the present invention overcomes the deficiencies in the prior art, provides that a kind of structure is simple, fast response time, fexible film thermocouple temperature sensor applied widely and preparation method thereof.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A kind of fexible film thermocouple temperature sensor, comprise flexible substrate, on described flexible substrate, plating is provided with positive pole thermopair film and negative pole thermopair film, docking forms membrane junction in one end for described positive pole thermopair film and negative pole thermopair film, pad is connected in the other end, the pad solder being positioned at positive pole thermopair film end has positive wire, and the pad solder being positioned at negative pole thermopair film end has negative wire.
Further improvement as technique scheme:
Described positive pole thermopair film and negative pole thermopair film surface plating have transition bed.
Plating matcoveredn on described transition bed, described protective seam extends the flexible substrate surface covering described positive pole thermopair film and negative pole thermopair thin membrane regions.
Described flexible substrate is polyimide base film.
A preparation method for fexible film thermocouple temperature sensor, comprises the following steps:
S1: make substrate: adopt flexible material to make shaping flexible substrate;
S2: shaping both positive and negative polarity thermopair: adopt thin film preparation process to plate on flexible substrate and establish positive pole thermopair film and negative pole thermopair film, and docking forms membrane junction in one end to make positive pole thermopair film and negative pole thermopair film;
S3: lead packages: be connected a pad respectively with the other end of negative pole thermopair film at positive pole thermopair film, is being positioned at the pad solder positive wire of positive pole thermopair film end, is being positioned at the pad solder negative wire of negative pole thermopair film end.
Further improvement as said method technical scheme:
Described step S1 comprises step by step following:
S1.1: draw materials shaping: get polyimide material and make the flexible substrate being of a size of 5 × 10mm, then precise polished process is carried out to flexible substrate;
S1.2: cleaning: first Ultrasonic Cleaning is carried out to flexible substrate surface, then ion beam bombardment cleaning is carried out to flexible substrate.
When carrying out step S2, adopting ion beam sputtering deposition mode to plate on flexible substrate and establishing positive pole thermopair film and negative pole thermopair film.
First Ultrasonic Cleaning is carried out to the flexible substrate of band both positive and negative polarity thermopair upon step s 2, then carry out subsequent step.
After step s 3, at positive pole thermopair film and negative pole thermopair film surface plating transition bed.
Plating protective seam on transition bed, makes protective seam extend the flexible substrate surface of covering positive pole thermopair film and negative pole thermopair thin membrane regions.
Compared with prior art, the invention has the advantages that:
Fexible film thermocouple temperature sensor of the present invention, more traditional thermocouple wire form temperature sensor, present invention employs film preparation mode to plate on flexible substrate and establish positive pole thermopair film and negative pole thermopair film, namely the thickness of positive pole thermopair film and negative pole thermopair film is very little, the membrane junction thickness that its docking is formed is also naturally very little, there is the function of quick response temperature change, substantially increase the accuracy of this temperature sensor; And in this structure, have employed the carrier of flexible substrate as both positive and negative polarity thermopair film, it no longer needs the solid clamshell encapsulating thermopair, has the function adapting to abnormal curved surface thermometric environment, substantially increases the scope of application of temperature sensor.The preparation method of fexible film thermocouple temperature sensor of the present invention, adopt the method, galvanic couple is made to be the film galvanic couple that thickness is very little, namely the membrane junction thickness of positive pole thermopair film and negative pole thermopair film docking formation is also very little, there is the function of quick response temperature change, substantially increase the accuracy of this temperature sensor; And, utilize flexible material to make the carrier of shaping flexible substrate as positive pole thermopair film and negative pole thermopair film, there is the function adapting to abnormal curved surface thermometric environment, substantially increase the scope of application of temperature sensor.
Accompanying drawing explanation
Fig. 1 is the structural representation of fexible film thermocouple temperature sensor of the present invention.
Fig. 2 is the structural representation (band lead-in wire) of fexible film thermocouple temperature sensor of the present invention.
Fig. 3 is the end construction schematic diagram of fexible film thermocouple temperature sensor of the present invention.
Fig. 4 is the schematic flow sheet of preparation method of the present invention.
Fig. 5 is the schematic flow sheet making substrate in preparation method of the present invention.
In figure, each label represents:
1, flexible substrate; 2, positive pole thermopair film; 3, negative pole thermopair film; 4, membrane junction; 5, pad; 6, positive wire; 7, negative wire; 8, transition bed; 9, protective seam.
Embodiment
Below with reference to Figure of description and specific embodiment, the present invention is described in further details.
Fig. 1 to Fig. 3 shows a kind of embodiment of fexible film thermocouple temperature sensor of the present invention, comprise flexible substrate 1, on flexible substrate 1, plating is provided with positive pole thermopair film 2 and negative pole thermopair film 3, docking forms membrane junction 4 in one end for positive pole thermopair film 2 and negative pole thermopair film 3, pad 5 is connected in the other end, the pad 5 being positioned at positive pole thermopair film 2 end is welded with positive wire 6, and the pad 5 being positioned at negative pole thermopair film 3 end is welded with negative wire 7.More traditional thermocouple wire form temperature sensor, present invention employs film preparation mode to plate on flexible substrate 1 and establish positive pole thermopair film 2 and negative pole thermopair film 3, namely the thickness of positive pole thermopair film 2 and negative pole thermopair film 3 is very little, membrane junction 4 thickness that its docking is formed is also naturally very little, there is the function of quick response temperature change, substantially increase the accuracy of this temperature sensor; And in this structure, have employed the carrier of flexible substrate 1 as both positive and negative polarity thermopair film, it no longer needs the solid clamshell encapsulating thermopair, has the function adapting to abnormal curved surface thermometric environment, substantially increases the scope of application of temperature sensor.
In the present embodiment, flexible substrate 1 is polyimide base film.In this structure, adopt flexible flexible polyimide material as flexible substrate 1, make flexible substrate 1 possess flexible, can the function of deformation, the thermometric environment of abnormal curved surface can be adapted to, its structure is simple, design ingenious.
In the present embodiment, positive pole thermopair film 2 is nickel-chromium thin film, and negative pole thermopair film 3 is nisiloy film, thus forms K type thermopair, and the thickness of thermocouple film is only 1 μm, substantially increases the accuracy of this temperature sensor.
In other embodiments, both positive and negative polarity thermopair film can be T-shaped thermocouple material, the R type thermocouple material of platinum rhodium 13-platinum, the S type thermocouple material of platinum rhodium 10-platinum, the Type B thermocouple material of platinum rhodium 30-platinum rhodium 6 of copper-copper nickel.Concrete selection exports according to the service condition of temperature sensor and signal and requires to determine.
In the present embodiment, positive pole thermopair film 2 and negative pole thermopair film 3 plated surface are covered with transition bed 8, plating matcoveredn 9 on transition bed 8, and protective seam 9 extends flexible substrate 1 surface covering positive pole thermopair film 2 and negative pole thermopair film 3 region.This transition bed 8 is Ta
2o
5layer, it is in order to the protective seam 9 of extenuating follow-up preparation and flexible substrate 1 and the lattice parameter of both positive and negative polarity thermopair film and the mismatch of thermal expansivity, and the thickness of transition bed is about 200nm; This protective seam 9 is SiO
2protective seam, ensure that stability and the reliability of positive pole thermopair film 2 and negative pole thermopair film 3 and this regional flexibility substrate 1.
Fig. 4 to Fig. 5 shows a kind of embodiment of the preparation method of fexible film thermocouple temperature sensor of the present invention, comprises the following steps:
S1: make substrate: adopt flexible material to make shaping flexible substrate 1;
S2: shaping both positive and negative polarity thermopair: adopt thin film preparation process to plate on flexible substrate 1 and establish positive pole thermopair film 2 and negative pole thermopair film 3, and docking forms membrane junction 4 in one end to make positive pole thermopair film 2 and negative pole thermopair film 3;
S3: lead packages: be connected a pad 5 respectively with the other end of negative pole thermopair film 3 at positive pole thermopair film 2, welds positive wire 6 at the pad 5 being positioned at positive pole thermopair film 2 end, is positioned at the pad 5 of negative pole thermopair film 3 end and welds negative wire 7.
Adopt the method, galvanic couple is made to be the film galvanic couple that thickness is very little, namely membrane junction 4 thickness of positive pole thermopair film 2 and negative pole thermopair film 3 docking formation is also very little, has the function of quick response temperature change, substantially increases the accuracy of this temperature sensor; And, utilize flexible material to make the carrier of shaping flexible substrate 1 as positive pole thermopair film 2 and negative pole thermopair film 3, there is the function adapting to abnormal curved surface thermometric environment, substantially increase the scope of application of temperature sensor.
In the present embodiment, step S1 comprises step by step following:
S1.1: draw materials shaping: get polyimide material and make the flexible substrate 1 being of a size of 5 × 10mm, then precise polished process is carried out to flexible substrate 1;
S1.2: cleaning: first ultrasonic cleaning is carried out to flexible substrate 1 surface, then ion beam bombardment cleaning is carried out to flexible substrate 1.
Adopting this step S1.1 and S1.2, make the making of flexible substrate 1 more specification, clean and tidy and health, is the shaping carrying basis provided of follow-up both positive and negative polarity thermopair.
In the present embodiment, when carrying out step S2, adopting ion beam sputtering deposition mode to plate on flexible substrate 1 and establishing positive pole thermopair film 2 and negative pole thermopair film 3.Establish positive pole thermopair film 2 and negative pole thermopair film 3 by the plating that hockets of the technique of photoetching and ion beam sputtering deposition, it is easy to operate, accurate.
In other embodiments, also can adopt magnetron sputtering, the technique of electron beam evaporation and chemical vapor deposition also can plate and establish positive pole thermopair film 2 and negative pole thermopair film 3.
In the present embodiment, first Ultrasonic Cleaning is carried out to the flexible substrate 1 of band both positive and negative polarity thermopair upon step s 2, then carry out subsequent step.Ensure that the cleaning of the flexible substrate 1 of band both positive and negative polarity thermopair, be convenient to the carrying out of subsequent step.
In the present embodiment, after step s 3, at positive pole thermopair film 2 and negative pole thermopair film 3 coating surface transition bed 8.Plating protective seam 9 on transition bed 8, makes protective seam 9 extend flexible substrate 1 surface in covering positive pole thermopair film 2 and negative pole thermopair film 3 region.This transition bed 8 is Ta
2o
5layer, it is in order to the protective seam 9 of extenuating follow-up preparation and flexible substrate 1 and the lattice parameter of both positive and negative polarity thermopair film and the mismatch of thermal expansivity, and the thickness of transition bed is about 200nm; This protective seam 9 is SiO
2protective seam, ensure that stability and the reliability of positive pole thermopair film 2 and negative pole thermopair film 3 and this regional flexibility substrate 1.
Although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention.Any those of ordinary skill in the art, when not departing from technical solution of the present invention scope, can utilize the technology contents of above-mentioned announcement to make many possible variations and modification to technical solution of the present invention, or being revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments, equivalent variations and modification, all should drop in the scope of technical solution of the present invention protection.
Claims (10)
1. a fexible film thermocouple temperature sensor, it is characterized in that: comprise flexible substrate (1), the upper plating of described flexible substrate (1) is provided with positive pole thermopair film (2) and negative pole thermopair film (3), docking forms membrane junction (4) in one end for described positive pole thermopair film (2) and negative pole thermopair film (3), pad (5) is connected in the other end, the pad (5) being positioned at positive pole thermopair film (2) end is welded with positive wire (6), the pad (5) being positioned at negative pole thermopair film (3) end is welded with negative wire (7).
2. fexible film thermocouple temperature sensor according to claim 1, is characterized in that: described positive pole thermopair film (2) and negative pole thermopair film (3) plated surface are covered with transition bed (8).
3. fexible film thermocouple temperature sensor according to claim 2; it is characterized in that: the upper plating matcoveredn (9) of described transition bed (8), described protective seam (9) extends flexible substrate (1) surface covering described positive pole thermopair film (2) and negative pole thermopair film (3) region.
4. fexible film thermocouple temperature sensor according to any one of claim 1 to 3, is characterized in that: described flexible substrate (1) is polyimide base film.
5. a preparation method for fexible film thermocouple temperature sensor, is characterized in that: comprise the following steps:
S1: make substrate: adopt flexible material to make shaping flexible substrate (1);
S2: shaping both positive and negative polarity thermopair: adopt thin film preparation process to establish positive pole thermopair film (2) and negative pole thermopair film (3) in the upper plating of flexible substrate (1), and docking forms membrane junction (4) in one end to make positive pole thermopair film (2) and negative pole thermopair film (3);
S3: lead packages: be connected a pad (5) respectively at positive pole thermopair film (2) and the other end of negative pole thermopair film (3), is being positioned at the pad (5) welding positive wire (6) of positive pole thermopair film (2) end, is being positioned at the pad (5) welding negative wire (7) of negative pole thermopair film (3) end.
6. the preparation method of fexible film thermocouple temperature sensor according to claim 5, is characterized in that: described step S1 comprises step by step following:
S1.1: draw materials shaping: get polyimide material and make the flexible substrate (1) being of a size of 5 × 10mm, then precise polished process is carried out to flexible substrate (1);
S1.2: cleaning: first Ultrasonic Cleaning is carried out to flexible substrate (1) surface, then ion beam bombardment cleaning is carried out to flexible substrate (1).
7. the preparation method of fexible film thermocouple temperature sensor according to claim 6, it is characterized in that: when carrying out step S2, adopting ion beam sputtering deposition mode to establish positive pole thermopair film (2) and negative pole thermopair film (3) in the upper plating of flexible substrate (1).
8. the preparation method of fexible film thermocouple temperature sensor according to claim 7, is characterized in that: first carry out Ultrasonic Cleaning to the flexible substrate (1) of band both positive and negative polarity thermopair upon step s 2, then carry out subsequent step.
9. the preparation method of the fexible film thermocouple temperature sensor according to any one of claim 5 to 8, it is characterized in that: after step s 3, at positive pole thermopair film (2) and negative pole thermopair film (3) coating surface transition bed (8).
10. the preparation method of fexible film thermocouple temperature sensor according to claim 9; it is characterized in that: at the upper plating protective seam (9) of transition bed (8), make protective seam (9) extend flexible substrate (1) surface in covering positive pole thermopair film (2) and negative pole thermopair film (3) region.
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105806503A (en) * | 2016-04-20 | 2016-07-27 | 中国科学院工程热物理研究所 | Multipoint film thermocouple structure for fluid dynamic temperature measurement |
| CN106124079A (en) * | 2016-09-20 | 2016-11-16 | 中国航空工业集团公司北京长城计量测试技术研究所 | Fexible film thermocouple |
| CN106197718A (en) * | 2016-08-31 | 2016-12-07 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of film temperature sensor and preparation method |
| CN106595886A (en) * | 2016-10-31 | 2017-04-26 | 惠州市德赛西威汽车电子股份有限公司 | Sheet-shaped thermocouple temperature measuring paster and temperature measuring method |
| CN106595894A (en) * | 2016-12-19 | 2017-04-26 | 美的集团股份有限公司 | Thin film thermocouple and temperature sensing device equipped with thin film thermocouple |
| CN109211428A (en) * | 2018-08-21 | 2019-01-15 | 北京印刷学院 | temperature sensor and preparation method |
| CN109781287A (en) * | 2019-03-04 | 2019-05-21 | 西安交通大学 | A kind of fexible film thermocouple temperature sensor with high spatial resolution |
| CN110501085A (en) * | 2018-12-11 | 2019-11-26 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of thermal barrier coating heat-proof quality measurement method based on film thermometric |
| CN110954230A (en) * | 2019-11-27 | 2020-04-03 | 东华大学 | Flexible thermocouple temperature sensor and preparation method thereof |
| CN112229533A (en) * | 2020-09-29 | 2021-01-15 | 西安交通大学 | Deformation-resistant flexible temperature sensor for temperature detection and preparation method thereof |
| CN112729580A (en) * | 2020-12-23 | 2021-04-30 | 西安交通大学 | Flexible temperature sensor and preparation method thereof |
| CN113008399A (en) * | 2021-01-26 | 2021-06-22 | 松诺盟科技有限公司 | High-temperature corrosion-resistant thermocouple and processing method thereof |
| CN114459624A (en) * | 2022-01-24 | 2022-05-10 | 清华大学 | Embedded film thermocouple and preparation method thereof |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105806503A (en) * | 2016-04-20 | 2016-07-27 | 中国科学院工程热物理研究所 | Multipoint film thermocouple structure for fluid dynamic temperature measurement |
| CN106197718A (en) * | 2016-08-31 | 2016-12-07 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of film temperature sensor and preparation method |
| CN106197718B (en) * | 2016-08-31 | 2019-08-27 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of film temperature sensor and preparation method |
| CN106124079A (en) * | 2016-09-20 | 2016-11-16 | 中国航空工业集团公司北京长城计量测试技术研究所 | Fexible film thermocouple |
| CN106595886A (en) * | 2016-10-31 | 2017-04-26 | 惠州市德赛西威汽车电子股份有限公司 | Sheet-shaped thermocouple temperature measuring paster and temperature measuring method |
| CN106595894A (en) * | 2016-12-19 | 2017-04-26 | 美的集团股份有限公司 | Thin film thermocouple and temperature sensing device equipped with thin film thermocouple |
| CN109211428A (en) * | 2018-08-21 | 2019-01-15 | 北京印刷学院 | temperature sensor and preparation method |
| CN110501085A (en) * | 2018-12-11 | 2019-11-26 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of thermal barrier coating heat-proof quality measurement method based on film thermometric |
| CN109781287A (en) * | 2019-03-04 | 2019-05-21 | 西安交通大学 | A kind of fexible film thermocouple temperature sensor with high spatial resolution |
| CN110954230A (en) * | 2019-11-27 | 2020-04-03 | 东华大学 | Flexible thermocouple temperature sensor and preparation method thereof |
| CN112229533A (en) * | 2020-09-29 | 2021-01-15 | 西安交通大学 | Deformation-resistant flexible temperature sensor for temperature detection and preparation method thereof |
| CN112729580A (en) * | 2020-12-23 | 2021-04-30 | 西安交通大学 | Flexible temperature sensor and preparation method thereof |
| CN113008399A (en) * | 2021-01-26 | 2021-06-22 | 松诺盟科技有限公司 | High-temperature corrosion-resistant thermocouple and processing method thereof |
| CN114459624A (en) * | 2022-01-24 | 2022-05-10 | 清华大学 | Embedded film thermocouple and preparation method thereof |
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Application publication date: 20160210 |