CN106124079A - Fexible film thermocouple - Google Patents
Fexible film thermocouple Download PDFInfo
- Publication number
- CN106124079A CN106124079A CN201610834628.0A CN201610834628A CN106124079A CN 106124079 A CN106124079 A CN 106124079A CN 201610834628 A CN201610834628 A CN 201610834628A CN 106124079 A CN106124079 A CN 106124079A
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- China
- Prior art keywords
- thermocouple
- fexible film
- wire
- film thermocouple
- surface temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/04—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The present invention relates to a kind of fexible film thermocouple, belong to surface temperature measurement field.It is mainly used in body surface temperature survey.This fexible film thermocouple passes through thin-film-coating technology, is coated with thermocouple sensitive layer, the most again by adding protective layer and lead-in wire, forms the membranaceous temperature sensor that can produce certain deformation on flexible insulation bottom.The invention has the beneficial effects as follows the thermal contact resistance farthest reduced between sensor and flexible insulation bottom, the accuracy of measurement of wall surface temperature can be effectively improved, this sensor can adapt to the change of shape on testee surface, can be fitted on testee surface by self-deformation, substantially increase the convenience of surface temperature measurement, in addition this sensor can design and produce intensive multi-point measurement system by mask or photoetching process, and this is that traditional measuring method cannot realize.
Description
Technical field
The present invention relates to a kind of fexible film thermocouple, belong to surface temperature measurement field.
Background technology
In a lot of fields, it is required for the surface temperature of Measuring Object.Surface temperature often characterizes the operation shape of system
State, closely bound up with the problem such as safety and life-span, therefore it is a very important parameter in a lot of occasions.Body surface temperature
The measurement of degree can use contact measurement method and contactless measurement, it accurately measure not only with the measurement used
Method is relevant, also has measurand, environmental working condition to be around correlated with, and several factors affects final measurement result.For connecing
For touch measuring method, the most commonly used is thermoelectricity occasionally platinum resistance temperature sensor by surface patch volt or fluting,
The mode that perforate is hidden measures surface temperature.On the one hand, it is difficult to control due to contact area, contact tightness degree and thermal contact resistance
System, various mounting means are notable on measurement result impact；On the other hand, concrete implementation process there is also a lot of inconvenience
Link, especially for needing to arrange that the application of big measuring point, aforesaid way almost cannot be implemented.Therefore, current surface
Thermometry is problematic in that in terms of accuracy of measurement and measurement feasibility, have impact on surface temperature to a great extent
The measurement of degree.
Summary of the invention
The invention aims to solve prior art and there is accuracy of measurement and the problem measuring feasibility, it is provided that
A kind of fexible film thermocouple.
It is an object of the invention to be achieved through the following technical solutions.
A kind of fexible film thermocouple, is coated with galvanic couple positive pole and thermocouple negative pole, galvanic couple on flexible insulation bottom successively
Positive pole is thermocouple junction with the binding site of thermocouple negative pole, i.e. obtains fexible film thermocouple.
Described thermocouple positive pole, thermocouple negative pole and thermocouple junction are referred to as thermocouple, described thermocouple by mask or
Photoetching process is coated on flexible insulation bottom.
Described thermocouple can be designed with the multi-point temperature measurement system of multiple measuring point.
The galvanic couple positive pole of described thermocouple and thermocouple negative pole are connected with lead-in wire respectively, and by lead-in wire and electric logging equipment phase
Connect.
It is that the technique by glueing joint, crimping or weld completes that described galvanic couple positive pole and thermocouple negative pole are connected with lead-in wire.
Protective layer is fixedly connected on fexible film thermocouple upper surface.Protective layer for fexible film thermocouple not
Must comprise, but in the case of measuring conducting medium, Korrosionsmedium or strong fluid scouring, it is contemplated that add protection
Layer.
Described protective layer is that the technique by glueing joint is fixing with fexible film thermocouple to be connected, must when measuring conducting medium
Must possess protective layer.
Lead-in wire uses and makes with the thermocouple consistent thermocouple wire material of indexing or compensating wire, note simultaneously connection time
Positive pole is connected time with positive pole, negative pole is connected with negative pole.
By heatproof glue, fexible film thermocouple is bonded in testee surface, measures thermocouple by electric logging equipment
Output, i.e. can get object surface temperature.
The thickness of described heatproof glue is not more than 0.1mm.
Beneficial effect
1, a kind of fexible film thermocouple of the present invention, uses thin-film-coating technology, thermocouple is coated on flexibility
On insulating bottom layer, it is integrally forming with flexible insulation bottom, farthest reduces between thermocouple and flexible insulation bottom
Thermal contact resistance, it is possible to be effectively improved the accuracy of measurement of wall surface temperature；
2, a kind of fexible film thermocouple of the present invention, it is possible to adapt to the change of shape on testee surface, can pass through
Self-deformation is fitted on testee surface, substantially increases the convenience of surface temperature measurement.
3, a kind of fexible film thermocouple of the present invention, it is possible to design and produce intensive multiple spot by mask or photoetching process
Measurement system, this is that traditional measuring method cannot realize.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the application schematic diagram of the present invention；
Fig. 3 is the mask plate schematic diagram that thermocouple sensitive layer of the present invention is coated with.
Detailed description of the invention
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
Embodiment 1
Fexible film thermocouple disclosed by the invention, as it is shown in figure 1, mainly by flexible insulation bottom, thermocouple sensitive layer,
Protective layer and lead-in wire composition.
Flexible insulation bottom selects polyamide film, thickness 0.3mm, and polyamide film is cut out the square into 40mm × 80mm
Shape rectangle.The rectangular mask plate of design 40mm × 80mm, mask plate is metallic plate, the mask plate method system by machining
Make, in plate, mill out the lead-in wire figure of thermocouple, as it is shown on figure 3, this mask plate devises two thermocouple measuring points.
Use K-type thermocouple as thermocouple sensitive layer, according to the two-stage material of K-type thermocouple prepare respectively NiCr and
The alloy target material of NiSi, is then coated with at twice by the method for magnetron sputtering.It is coated with NiCr layer for the first time, will be poly-with mask plate
Amide film is covered, and is placed on the thermocouple cabling figure of hollow out in the middle of being coated with in district of magnetic control sputtering device, mask plate and exposes
In being coated with district, underlayer temperature controls at 200 DEG C ± 2 DEG C, and vacuum is not more than 10-3Pa, is coated with power 150W, is coated with the time 3
Hour, form thicknesses of layers and be coated with lines at 2 μm left and right NiCr；Second time is coated with NiSi layer, is placed by mask plate mirror image, is coated with
Technological parameter ibid, forms thicknesses of layers and is coated with lines at 2 μm left and right NiSi, NiCr and NiSi is coated with lines at end weight
Folded, form thermocouple junction.Material is thus formed two complete K-type thermocouple measuring points.Then, the K-type thermoelectricity of 0.3mm is used
Even, positive pole, to positive pole, negative pole anticathode, uses conducting resinl to connect wire respectively.Finally, then cut out the polyamide of 40mm × 80mm
Thermoelectricity double-layer, as protective layer, is protected in the middle of two-layer polyamide film by thin film.
When Measuring Object surface temperature, by heatproof glue, fexible film thermocouple is bonded in testee surface, logical
Cross electric logging equipment and measure the output of thermocouple, i.e. can get object surface temperature.
In order to verify the accuracy of measurement of fexible film thermocouple, the fexible film thermocouple completed is sticked with glue
On one piece of iron plate, as in figure 2 it is shown, the two of fexible film thermocouple measuring point numbered 1# and 2# respectively.In fexible film heat
Two measuring points of galvanic couple are placed around an armoured K-thermocouple as reference temperature.By above-mentioned fexible film thermocouple and ginseng
Examine thermocouple to put in demarcation stove together with iron plate, the cold end of thermocouple is put in mixture of ice and water.Regulate and control stove
Middle temperature, in each comparison point record reference standard thermocouple and the output signal of 1#, 2# measuring point, converts according to phasing meter
Become temperature value, see table.
Table 1 fexible film thermocouple test data
| Reference standard (DEG C) | 1# measuring point (DEG C) | 2# measuring point (DEG C) |
| 33.9 | 31.7 | 32.1 |
| 80.5 | 78.9 | 79.1 |
| 127.2 | 125.7 | 125.2 |
| 173.7 | 173.1 | 171.7 |
As can be seen from Table 1,1# and the 2# measuring point of fexible film thermocouple and reference standard thermocouple are at each comparison point
Temperature consistency fine, maximum temperature difference is not more than 2 DEG C, has reached the level of accuracy of conventional thermocouple thermometric.
Claims (8)
1. a fexible film thermocouple, it is characterised in that: be coated with successively on flexible insulation bottom (1) galvanic couple positive pole (2) with
Thermocouple negative pole (3), galvanic couple positive pole (2) is thermocouple junction (4) with the binding site of thermocouple negative pole (3), i.e. obtains flexible thin
Film thermocouple.
2. a kind of fexible film thermocouple as claimed in claim 1, it is characterised in that: described galvanic couple positive pole (2), thermocouple are born
Pole (3) and thermocouple junction (4) are referred to as thermocouple, and described thermocouple is coated on flexible insulation bottom by mask or photoetching process
(1) on.
3. a kind of fexible film thermocouple as claimed in claim 2, it is characterised in that: the galvanic couple positive pole (2) of described thermocouple
It is connected with lead-in wire (5) respectively with thermocouple negative pole (3), and is connected with electric logging equipment by lead-in wire (5).
4. a kind of fexible film thermocouple as described in claim 1 or 2 or 3, it is characterised in that: described thermocouple positive pole (2)
Being connected with lead-in wire (5) with thermocouple negative pole (3) is that the technique by glueing joint, crimping or weld completes.
5. a kind of fexible film thermocouple as claimed in claim 1, it is characterised in that: described protective layer (6) is fixedly connected on
Fexible film thermocouple upper surface.
6. a kind of fexible film thermocouple as described in claim 1 or 5, it is characterised in that: described protective layer (6) and flexible thin
Film thermocouple is that the technique by glueing joint is fixing to be connected.
7. a kind of fexible film thermocouple as claimed in claim 1, it is characterised in that: described lead-in wire (5) uses and thermocouple
Index consistent thermocouple wire material or compensating wire makes.
8. a kind of fexible film thermocouple as claimed in claim 2, it is characterised in that: the quantity of described thermocouple is at least one
Individual.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610834628.0A CN106124079A (en) | 2016-09-20 | 2016-09-20 | Fexible film thermocouple |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610834628.0A CN106124079A (en) | 2016-09-20 | 2016-09-20 | Fexible film thermocouple |
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| Publication Number | Publication Date |
|---|---|
| CN106124079A true CN106124079A (en) | 2016-11-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610834628.0A Pending CN106124079A (en) | 2016-09-20 | 2016-09-20 | Fexible film thermocouple |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108489627A (en) * | 2018-03-13 | 2018-09-04 | 大连交通大学 | A kind of thin-film thermocouple temperature sensor of embedded multi-layer PCB board, transient temperature monitor system and method |
| CN109752111A (en) * | 2019-01-23 | 2019-05-14 | 杭州嘉诚机械有限公司 | Simple portable speed reducer special axis temperature detection module and detection method |
| CN109798995A (en) * | 2019-01-17 | 2019-05-24 | 上海交通大学 | A kind of flexibility high sensitivity thin-film thermocouple type heat flow transducer and preparation method |
| WO2021237602A1 (en) * | 2020-05-28 | 2021-12-02 | 南昌欧菲显示科技有限公司 | Thin film type thermocouple, temperature sensor, and intelligent wearable device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03214031A (en) * | 1990-01-18 | 1991-09-19 | Matsushita Electric Ind Co Ltd | Temperature sensor comprising platinum thin film |
| CN104701449A (en) * | 2015-02-13 | 2015-06-10 | 国家电网公司 | Flexible pyroelectric thin film device |
| CN105318983A (en) * | 2015-10-30 | 2016-02-10 | 中国电子科技集团公司第四十八研究所 | Flexible thin film thermocouple temperature sensor and preparation method thereof |
| CN205157074U (en) * | 2015-10-30 | 2016-04-13 | 中国电子科技集团公司第四十八研究所 | Flexible thin film thermocouple temperature sensor |
-
2016
- 2016-09-20 CN CN201610834628.0A patent/CN106124079A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03214031A (en) * | 1990-01-18 | 1991-09-19 | Matsushita Electric Ind Co Ltd | Temperature sensor comprising platinum thin film |
| CN104701449A (en) * | 2015-02-13 | 2015-06-10 | 国家电网公司 | Flexible pyroelectric thin film device |
| CN105318983A (en) * | 2015-10-30 | 2016-02-10 | 中国电子科技集团公司第四十八研究所 | Flexible thin film thermocouple temperature sensor and preparation method thereof |
| CN205157074U (en) * | 2015-10-30 | 2016-04-13 | 中国电子科技集团公司第四十八研究所 | Flexible thin film thermocouple temperature sensor |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108489627A (en) * | 2018-03-13 | 2018-09-04 | 大连交通大学 | A kind of thin-film thermocouple temperature sensor of embedded multi-layer PCB board, transient temperature monitor system and method |
| CN108489627B (en) * | 2018-03-13 | 2020-07-03 | 大连交通大学 | Thin-film thermocouple temperature sensor embedded in multilayer PCB (printed Circuit Board), transient temperature monitoring system and method |
| CN109798995A (en) * | 2019-01-17 | 2019-05-24 | 上海交通大学 | A kind of flexibility high sensitivity thin-film thermocouple type heat flow transducer and preparation method |
| CN109752111A (en) * | 2019-01-23 | 2019-05-14 | 杭州嘉诚机械有限公司 | Simple portable speed reducer special axis temperature detection module and detection method |
| WO2021237602A1 (en) * | 2020-05-28 | 2021-12-02 | 南昌欧菲显示科技有限公司 | Thin film type thermocouple, temperature sensor, and intelligent wearable device |
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