CN104409756B - Fuel cell internal humidity-heat flux density-current density distribution measurement insert - Google Patents
Fuel cell internal humidity-heat flux density-current density distribution measurement insert Download PDFInfo
- Publication number
- CN104409756B CN104409756B CN201410638226.4A CN201410638226A CN104409756B CN 104409756 B CN104409756 B CN 104409756B CN 201410638226 A CN201410638226 A CN 201410638226A CN 104409756 B CN104409756 B CN 104409756B
- Authority
- CN
- China
- Prior art keywords
- electric current
- layer
- heat
- thin film
- current density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04007—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids related to heat exchange
- H01M8/04067—Heat exchange or temperature measuring elements, thermal insulation, e.g. heat pipes, heat pumps, fins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/04492—Humidity; Ambient humidity; Water content
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04701—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04746—Pressure; Flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04791—Concentration; Density
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04828—Humidity; Water content
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Abstract
A fuel cell internal humidity-heat flux density-current density distribution measurement insert is a fuel cell internal humidity-heat flux density-current density distribution measurement device, a leakage seam and a rib which are corresponding to a fuel cell flow field plate flow passage and ridge are arranged on a conductive substrate, and a humidity-heat flux density-current density combined measurement sensor is arranged on the rib; the humidity-heat flux density-current density combined measurement sensor is prepared by vacuum evaporation coating method, and comprises ten layers of thin films. A leading wire is also prepared by the vacuum evaporation coating method, is used to transmit electrical signals, and extends to the flow field plate edge to form a lead foot by magnifying to facilitate connecting with external connection data acquisition equipment. The fuel cell internal humidity-heat flux density-current density distribution measurement insert realizes the synchronous online measurement of fuel cell internal humidity distribution, heat flux density distribution and current density distribution without special transformation of a fuel cell structure, and is suitable for a fuel cell flow field plate with a parallel flow passage, a serpentine flow passage, an interleaved flow passage or a flow passage with other shape.
Description
Technical field
The present invention relates to a kind of fuel battery inside humidity-heat flow density-electric current distribution survey
Amount inserted sheet, belongs to fuel cell detection technique field.
Background technology
Electrochemical reaction speed on fuel cell membrane electrode decides the height of fuel battery performance
Low, but, the electrochemical reaction speed on membrane electrode surface is not identical, and this just leads
The difference of fuel battery inside temperature field and electric current distribution, meanwhile, fuel cell are caused
The regional temperature of inside and the difference that electrochemical reaction speed can be aggravated the most again of humidity.
By the monitoring to fuel battery inside humidity, heat flow density and electric current distribution,
Contribute to finding optimal fuel cell operation parameter and structural design scheme, to improve fuel
The performance of battery.
The measurement of humidity, method has by perforate on fuel cell flow field board, implants humidity
The humidity of fuel battery inside is measured by sensor, but the method needs fuel electricity
The flow-field plate in pond carries out special processing transformation, and difficulty of processing is big, and close to fuel cell
The destructiveness that Feng Xingyou is certain；Photoetching and lithographic technique is used to make humidity biography it addition, also have
Sensor also implants the method that fuel battery inside measures, although the method need not combustion
The structure of material battery carries out special transformation, but etching technics is complex.For heat flow density
Measurement, be mostly implantation heat-flow meter measure, these methods would generally with regard to fuel electricity
The flow-field plate in pond carries out special transformation, and often difficulty of processing is big, and cost is high, in-convenience in use,
Also the performance of fuel cell is had a certain impact simultaneously.The measurement of electric current density has sub-battery
Method, membrane electrode split-run, magnet ring group method etc., it is also desirable to fuel cell is carried out special transformation,
Processed complex, cost is high.
If respectively certain single parameter being measured, then need fuel cell is repeatedly transformed or
Make special test fuel cell, add the dismounting number of times of fuel cell, it will right
Stablizing of fuel battery performance has a negative impact.
The present invention is disposed with humidity-heat flow density-electric current density translocation on the muscle of conductive substrate
Sensor, can be arranged between fuel cell flow field board and membrane electrode as individual member, no
Affect reactant to spread to membrane electrode direction, achieve during fuel cell operation
Synchro measure fuel battery inside moisture distribution, heat flux distribution and electric current distribution,
Need not the structure to fuel cell and carry out special transformation, decrease the dismounting time of fuel cell
Number, thus ensure that stablizing of fuel battery performance.
Summary of the invention
It is an object of the invention to provide one can be to fuel battery inside moisture distribution, hot-fluid
Density Distribution and electric current distribution carry out the device of translocation, wet to solve fuel battery inside
Degree distribution, heat flux distribution and the synchronization on-line measurement problem of electric current distribution.This dress
Put and can be installed on fuel battery inside as individual member, simple in construction, easy to make, nothing
Fuel battery inside structure need to be carried out special transformation, decrease the dismounting number of times of fuel cell,
Ensure that stablizing of fuel battery performance.
For realizing above-mentioned technical purpose, technical scheme is as follows: fuel battery inside
Humidity-heat flow density-electric current distribution measures inserted sheet, including conductive substrate 1, crack 2,
Muscle 3, humidity-heat flow density-electric current density translocation sensor 4, lead-in wire 5, hole 7, location；Institute
State crack 2, muscle 3 is arranged on conductive substrate 1, muscle 3 between two adjacent cracks 2,
The shape and size of crack 2 and muscle 3 respectively with fuel cell flow field board upper runner and the shape of ridge
Shape and equivalently-sized, the position of crack 2 and muscle 3 respectively with fuel cell flow field board runner and
Ridge is corresponding；Described humidity-heat flow density-electric current density translocation sensor 4 is arranged on muscle 3；
One end of lead-in wire 5 and the wiring exit of humidity-heat flow density-electric current density translocation sensor 4
Connecting, the other end extends to the edge of conductive substrate 1 and amplifies formation pin 6；Hole 7, location
Symmetrical, be uniformly arranged on conductive substrate 1 surrounding, in order to conductive substrate 1 is fixed on fuel
On cell flow field plate；When fuel cell assembles, fuel battery inside humidity-heat flow density-electric current
Density Distribution is measured inserted sheet and is arranged in the middle of fuel cell flow field board and membrane electrode, and it is provided with
Humidity-heat flow density-electric current density translocation sensor 4 facing to membrane electrode side the tightst
Contact.
Described humidity-heat flow density-electric current density translocation sensor 4 includes humicap hygrometric list
Unit, thin film heat-flow meter calorimetric stream unit and electric current density are measured the coat of metal and are surveyed current unit,
Vacuum evaporation coating film method is used to make, including ten layer films: ground floor is for being deposited with at muscle 3
On the silicon dioxide insulating layer that thickness is 0.08-0.12 μm 18, as dielectric substrate, the second layer
For on silicon dioxide insulating layer 18 evaporation the bottom electrode aluminium coat 19 that thickness is 1.0-1.2 μm,
Third layer is at the polyphosphazene polymer that bottom electrode aluminium coat 19 thick layer applied over is 0.5-1 μm
Compound humidity-sensitive medium layer 20, the 4th layer is to steam above high molecular polymer humidity-sensitive medium layer 20
The upper electrode aluminium coat 21 that thickness is 1.0-1.2 μm of plating；Described upper electrode aluminium coat 21, height
Molecularly Imprinted Polymer humidity-sensitive medium layer 20 and bottom electrode aluminium coat 19 constitute humicap, head end
For humicap wiring exit 41, wherein go up electrode aluminium coat 21 be shaped as snakelike；The
Five layers is the thin film heat-flow meter that thickness is 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 18
Copper coating 22, layer 6 is that the thickness of evaporation is 0.1-0.12 μm on silicon dioxide insulating layer 18
Thin film heat-flow meter nickel coating 23；Described thin film heat-flow meter copper coating 22 and thin film heat-flow meter nickel
The tetragon being shaped as being parallel to each other of coating 23, head and the tail mutually overlap joint, lap-joint constitutes thin
Film thermoelectric pile, including node 39 under node 38 on thin film heat-flow meter and thin film heat-flow meter,
Head end is thin film heat-flow meter wiring exit 40；Layer 7 be thin film heat-flow meter copper coating 22,
The thickness of the top evaporation of thin film heat-flow meter nickel coating 23 and upper electrode aluminium coat 21 is
The silicon dioxide layer of protection 24 of 0.08-0.12 μm, the 8th layer is node 38 on thin film heat-flow meter
The top of silicon dioxide coating is deposited with the silicon dioxide thickness thermal resistance that thick layer is 1.2-2.0 μm
Layer 25, the 9th layer in thin film heat-flow meter copper coating 22 and thin film heat-flow meter nickel coating 23 institute
To silicon dioxide layer of protection and the electricity that top evaporation thick layer is 1.5-2.0 μm of thick thermoresistance layer
Current density measures copper coating 26, and the tenth layer is to measure in electric current density to steam above copper coating 26
Plating thick layer is that the electric current density of 0.1-0.12 μm measures gold plate 27；Described electric current density is surveyed
It is overlapped that amount copper coating 26 and electric current density measure gold plate 27, constitutes electric current density and surveys
The amount coat of metal 42, head end is that electric current density measures coat of metal wiring exit 43.
Described thin film heat-flow meter wiring exit 40, humicap wiring exit 41 and electric current
Density measure coat of metal wiring exit 43 is all fabricated to circle, and is all arranged in titanium dioxide
The same side of silicon insulating barrier 18.
The shape of described conductive substrate 1 can be fabricated to square, circular, polygon, trapezoidal,
Triangle, irregular figure；On conductive substrate 1 shape of crack 2 can be snakelike crack,
Parallel crack, poroid crack, staggered crack.
Upper electrode and the coat of metal material of bottom electrode in described humicap, also can be selected for gold,
Copper, platinum replace；In described thin film heat-flow meter coat of metal material, it is made up of copper and mickel
Simple metal coating tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt can also be selected to substitute,
May be used without metal mixture material such as copper and constantan to substitute.
The shape of described upper electrode aluminium coat 21 is to set according to the shape of mask, its shape
Shape can be also zigzag, pectination.
The shape of described thin film heat-flow meter copper coating 22 and thin film heat-flow meter nickel coating 23 is root
Setting according to the shape of mask, its shape can also be strip, arc, rhombus, first
After tail mutually overlaps, shape can be zigzag, arc, waveform, zigzag.
Described silicon dioxide thickness thermoresistance layer 25 may be additionally located at the upper of node 39 under thin film heat-flow meter
Side.
Described thin film heat-flow meter at least includes node 38 on a pair thin film heat-flow meter, thin film heat
Node 39 under flowmeter.
Described electric current density measures copper coating 26 and the shape of electric current density measurement gold plate 27
To set according to the shape of mask, can be rectangle, ellipse, circle, triangle,
Trapezoidal, irregular figure.
Described thin film heat-flow meter wiring exit 40, humicap wiring exit 41 and electric current
The shape of density measure coat of metal wiring exit 43 can be also ellipse, rectangle, trapezoidal,
Other shape such as triangle, what its position also can be relative is arranged in silicon dioxide insulating layer 18
Both sides.
The width of described lead-in wire 5 is 0.1-0.2mm, and the edge at conductive substrate 1 puts
Greatly, pin 6 is formed.
Lead-in wire 5 is that the four-level membrane using vacuum evaporation coating film method evaporation is constituted: ground floor
For the lead-in wire silicon dioxide insulating layer 44 of thick 0.08-0.12 μm, the second layer is thick 0.1-0.12 μm
Lead-in wire copper coating 45, third layer is the lead-in wire gold plate 46 of thick 0.1-0.12 μm, most goes up one
Layer is the lead-in wire silicon dioxide layer of protection 47 of thick 0.05-0.1 μm；Wherein, at pin 6 not
Evaporation lead-in wire silicon dioxide layer of protection.
Compared with prior art, the present invention has the advantages that.
The present invention can realize combustion while the diffusion in membrane electrode direction not affecting reactant
The synchronization of material inside battery moisture distribution, heat flux distribution and electric current distribution is surveyed online
Amount；This device can be installed in the middle of fuel cell flow field board and membrane electrode as independent component,
Need not other structures such as fuel cell flow field board or pole plate are carried out special transformation, reduce
By the implantation of the measurement apparatus impact on fuel battery performance；Meanwhile, this apparatus structure is simple,
Easy to make, applied widely, the fuel cell of various flow channel shape can be adapted to, as flat
Row runner, serpentine flow path, staggered runner or other abnormal flow road shape.
Accompanying drawing explanation
Fig. 1 is that fuel battery inside humidity-parallel crack of heat flow density-electric current distribution is measured
Inserted sheet subjectivity schematic diagram；
Fig. 2 is that fuel battery inside humidity-heat flow density-electric current distribution is measured on inserted sheet single
The subjective schematic diagram of individual humidity-heat flow density-electric current density translocation sensor；
Fig. 3 is that fuel battery inside humidity-heat flow density-electric current distribution is measured on inserted sheet single
The Making programme figure of individual humidity-heat flow density-electric current density translocation sensor；
Fig. 4 is that fuel battery inside humidity-heat flow density-electric current distribution is measured on inserted sheet wet
The cross section subjectivity schematic diagram of degree-heat flow density-electric current density translocation sensor lead；
Fig. 5 be fuel battery inside humidity-heat flow density-electric current distribution interlock crack measure
Inserted sheet subjectivity schematic diagram；
Fig. 6 is that fuel battery inside humidity-snakelike single crack of heat flow density-electric current distribution is surveyed
Amount inserted sheet subjectivity schematic diagram；
Fig. 7 is that fuel battery inside humidity-snakelike pair of heat flow density-electric current distribution crack is surveyed
Amount inserted sheet subjectivity schematic diagram；
In figure, 1, conductive substrate, 2, crack, 3, muscle, 4, humidity-heat flow density-electric current
Density translocation sensor, 5, lead-in wire, 6, pin, 7, hole, location；
8-17 is humidity-heat flow density-electric current density translocation sensor each layer mask: 8, dioxy
SiClx insulating barrier mask, 9, bottom electrode aluminium coat mask, 10, wet Jie of high molecular polymer sense
Matter layer mask, 11, upper electrode aluminium coat mask, 12, thin film heat-flow meter copper coating mask, 13,
Thin film heat-flow meter nickel coating mask, 14, silicon dioxide layer of protection mask, 15, silicon dioxide
Thick thermoresistance layer mask, 16, electric current density measure copper coating mask, 17, electric current density measures
Gold plate mask；
18-27 is that the humidity-heat flow density-electric current density translocation sensor according to mask fabrication is each
Film layer: 18, silicon dioxide insulating layer, 19, bottom electrode aluminium coat, 20, high molecular polymerization
Thing humidity-sensitive medium layer, 21, upper electrode aluminium coat, 22, thin film heat-flow meter copper coating, 23,
Thin film heat-flow meter nickel coating, 24, silicon dioxide layer of protection, 25, silicon dioxide thickness thermoresistance layer,
26, electric current density measure copper coating, 27, electric current density measure gold plate；
28-37 is the making step of humidity-heat flow density-electric current density translocation sensor: 28,
Step one, 29, step 2,30, step 3,31, step 4,32, step 5,33,
Step 6,34, step 7,35, step 8,36, step 9,37, step 10；
38, node on thin film heat-flow meter, 39, node under thin film heat-flow meter, 40, thin film heat
Flowmeter wiring exit, 41, humicap wiring exit, 42, electric current density measure gold
Belong to coating, 43, electric current density measure coat of metal wiring exit；
44, lead-in wire silicon dioxide insulating layer, 45, lead-in wire copper coating, 46, lead-in wire gold plate,
47, lead-in wire silicon dioxide layer of protection.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings.
Shown in reference Fig. 1, the fuel battery inside humidity-heat flow density-electric current density of the present invention
Distribution measuring inserted sheet, including conductive substrate 1, crack 2, muscle 3, humidity-heat flow density-electric current
Density translocation sensor 4, lead-in wire 5, pin 6, hole 7, location；Crack 2 and muscle 3 are arranged
On conductive substrate 1, its with tested fuel cell flow field board on runner and ridge in shape and
In size identical, position is the most corresponding, is disposed with humidity-heat flow density-electric current close on muscle 3
Degree translocation sensor 4；Go between 5 one end and humidity-heat flow density-electric current density translocation sensor
4 are connected, and the other end extends to the edge of conductive substrate 1, be used for transmitting humidity-heat flow density-
The signal of telecommunication that electric current density translocation sensor 4 produces；Pin 6 is arranged in conductive substrate 1
Edge is also connected with lead-in wire 5；Surrounding at conductive substrate is disposed with hole 7, location, facilitates this wet
Degree-heat flow density-electric current distribution is measured the location of inserted sheet and fuel cell flow field board and consolidates
Fixed.For the mating shapes with tested fuel cell, the shape of conductive substrate 1 can be fabricated to
Square, circular, polygon, trapezoidal, triangle etc..During measurement, this measurement inserted sheet is implanted
Between fuel cell flow field board and membrane electrode assembly, it is fixed in fuel by hole 7, location
On cell flow field plate, it is disposed with facing of humidity-heat flow density-electric current density translocation sensor 4
To fuel cell membrane electrode assembly direction, and be in close contact with membrane electrode assembly, crack 2 with
Runner on fuel cell flow field board is corresponding, muscle 3 and the ridge phase on fuel cell flow field board
Correspondence, so that the implantation measuring inserted sheet does not affect the reactant diffusion to membrane electrode direction.With
Time, it is arranged in the humidity-heat flow density-electric current density translocation sensor 4 measured on inserted sheet to combustion
The material humidity of inside battery, heat flow density and electric current density measure, the signal of telecommunication of generation
Being transferred to pin 6 by lead-in wire 5, the data input pin of data acquisition equipment is connected with pin 6
Can collect the signal of telecommunication measuring inserted sheet output, and computational analysis to go out fuel battery inside wet
Degree distribution, heat flux distribution and electric current distribution.
With reference to shown in Fig. 2, humidity-heat flow density of the present invention-electric current density translocation senses
Device 4 includes that humicap hygrometric unit, thin film heat-flow meter calorimetric stream unit and electric current density are surveyed
The amount coat of metal surveys current unit, uses vacuum evaporation coating film method to be made, including ten
Layer film: ground floor is on evaporation muscle 3 between the adjacent crack 2 of conductive substrate 1 liang
Thickness is the silicon dioxide insulating layer 18 of 0.08-0.12 μm, as dielectric substrate, the second layer be
The bottom electrode aluminium coat 19 that thickness is 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 18, the
Three layers at the high molecular polymerization that bottom electrode aluminium coat 19 thick layer applied over is 0.5-1 μm
Thing humidity-sensitive medium layer 20, the 4th layer is to be deposited with above high molecular polymer humidity-sensitive medium layer 20
The upper electrode aluminium coat 21 that thickness is 1.0-1.2 μm, layer 5 is at silicon dioxide insulating layer
The thin film heat-flow meter copper coating 22 that thickness is 0.1-0.12 μm of evaporation on 18, layer 6 is two
The thin film heat-flow meter nickel coating 23 that thickness is 0.1-0.12 μm of evaporation on insulating layer of silicon oxide 18,
Layer 7 is at thin film heat-flow meter copper coating 22, thin film heat-flow meter nickel coating 23 and upper electrode aluminum
The silicon dioxide layer of protection that thickness is 0.08-0.12 μm 24 of the top evaporation of coating 21, the 8th
Layer for node 38 on thin film heat-flow meter to above silicon dioxide coating evaporation thick layer be
The silicon dioxide thickness thermoresistance layer 25 of 1.2-2.0 μm, the 9th layer is at thin film heat-flow meter copper coating 22
With thin film heat-flow meter nickel coating 23 to silicon dioxide layer of protection and the top of thick thermoresistance layer steam
Plating thick layer is that the electric current density of 1.5-2.0 μm measures copper coating 26, and the tenth layer is close at electric current
Degree is measured the electric current density that top evaporation thick layer is 0.1-0.12 μm of copper coating 26 and is measured gold
Coating 27；Owing to copper and gold are the good conductor of heat, heat conductivity is the highest, is deposited with in addition
Electric current density measures copper coating and electric current density measurement gold plate is the thinnest, is therefore deposited with thin
The electric current density on film heat-flow meter upper strata measures copper coating and electric current density measures gold plate to thin film
The interference of heat-flow meter can be ignored.
Thin film heat-flow meter copper coating 22, thin film heat-flow meter nickel coating 23, silicon dioxide layer of protection
24 and silicon dioxide thickness thermoresistance layer 25 constitute complete thin film heat-flow meter, close to realize hot-fluid
The measurement of degree, its measuring principle is: plated by thin film heat-flow meter copper coating and thin film heat-flow meter nickel
Layer head and the tail mutually overlap joint constitutes thermoelectric pile, and thermoelectric pile includes node and thin film on thin film heat-flow meter
Node under heat-flow meter, above node under node and thin film heat-flow meter on thin film heat-flow meter
Silicon dioxide thermoresistance layer thickness is different, so that thermoelectric pile produces thermoelectric force, and itself and upper knot
Point is relevant with the thickness difference of silicon dioxide thermoresistance layer on lower node, and heat flow density and the temperature difference,
Silicon dioxide thermoresistance layer thickness difference and heat conductivity are correlated with, due to silicon dioxide heat conductivity
Know, therefore the size of heat flow density can be calculated.
Fig. 3 is the Making programme figure of single humidity-heat flow density-electric current density translocation sensor:
8-17 is humidity-heat flow density-electric current density translocation sensor each layer mask, according to 18-27
Humidity-the heat flow density of mask fabrication-electric current density translocation sensor each film layer, 28-37 is wet
The making step of degree-heat flow density-electric current density translocation sensor.First at conductive substrate 1
It is deposited with layer of silicon dioxide insulating barrier 18 according to silicon dioxide insulating layer mask 8 on muscle 3, makees
For the substrate of sensor, fully insulate with conductive substrate, thus complete step one 28；Step
2 29 for be deposited with one layer according to bottom electrode aluminium coat mask 9 on silicon dioxide insulating layer 18
Bottom electrode aluminium coat 19, step 3 30 is according to macromolecule above bottom electrode aluminium coat 19
Polymer humidity-sensitive medium layer mask 10 coats a floor height Molecularly Imprinted Polymer humidity-sensitive medium layer 20, step
Rapid 4 31 be above high molecular polymer humidity-sensitive medium layer 20 according on electrode aluminium coat
Mask 11 is deposited with one layer of upper electrode aluminium coat 21；Wherein, bottom electrode aluminium coat 19, macromolecule
Polymer humidity-sensitive medium layer 20 and upper electrode aluminium coat 21 constitute humicap, it is achieved that
The measurement of humidity；Step 5 32 is in titanium dioxide according to thin film heat-flow meter copper coating mask 12
Being deposited with thin film heat-flow meter copper coating 22 on silicon insulating barrier 18, step 6 33 is according to thin
Film heat-flow meter nickel coating mask 13 is deposited with thin film hot-fluid on silicon dioxide insulating layer 18
Meter nickel coating 23；Thin film heat-flow meter copper coating 22 and thin film heat-flow meter nickel coating 23 constitute
Thin film heat-flow meter thermoelectric pile, step 7 34 is at upper electrode aluminium coat 21, thin film heat-flow meter copper
The top of coating 22 and thin film heat-flow meter nickel coating 23 is according to silicon dioxide layer of protection mask 14
Evaporation layer of silicon dioxide protective layer 24, it is i.e. as the protective layer of electrode in humicap,
Again as the thin thermoresistance layer of thin film heat-flow meter；Step 8 35 is node 38 on thin film heat-flow meter
To the top of silicon dioxide coating be deposited with one layer according to silicon dioxide thickness thermoresistance layer mask 15
Silicon dioxide thickness thermoresistance layer 25；Wherein thin film heat-flow meter copper coating 22, the plating of thin film heat-flow meter nickel
Layer 23, silicon dioxide layer of protection 24 and silicon dioxide thickness thermoresistance layer 25 constitute complete thin
Film heat-flow meter, it is achieved that the measurement of heat flow density；Step 9 36 is to plate at thin film heat-flow meter copper
Layer 22 and thin film heat-flow meter nickel coating 23 to silicon dioxide coating above, according to electric current
Density measure copper coating mask 16, is deposited with a Lyer current density and measures copper coating 26, step 10
37 is to measure in electric current density to measure gold plate mask according to electric current density above copper coating 26
17 evaporation one Lyer current densities measure gold plate 27；Wherein electric current density measures copper coating 26
Overlapped with electric current density measurement gold plate 27, constitute electric current density and measure the coat of metal
42, it is achieved that the measurement of electric current density；Humidity-heat flow density-electric current it is made up of close above step
Degree translocation sensor, external measuring circuit and data acquisition equipment can realize fuel cell
The synchro measure of interior humidity, heat flow density and electric current density.
Wherein, electrode and bottom electrode in the humicap that step 2 29 and step 4 31 complete
Coat of metal material also can be selected for other metal substitutes such as gold, copper, platinum；Wherein, wet sensitive
On electric capacity the shape of electrode aluminium coat 21 not only can snakelike for shown in Fig. 3, can be also sawtooth
Other shapes such as shape, pectination.The thin film heat-flow meter copper that step 5 32 and step 6 33 complete
Coating 22 and thin film heat-flow meter nickel coating 23 are the tetragon being parallel to each other, phase lap from beginning to end
Connecing, lap-joint constitutes film thermopile, and at least a part of which includes node on a pair thin film heat-flow meter
38, node 39 under thin film heat-flow meter；Thin film heat-flow meter copper coating 22 and the plating of thin film heat-flow meter nickel
Layer 23 shape be to set according to the shape of mask, its shape can also be strip,
Arc, rhombus etc., after head and the tail overlap joint, shape can be zigzag, arc, waveform, zigzag
Deng other shape；The material of the thin film heat-flow meter coat of metal can be also tungsten and nickel, copper and cobalt,
Molybdenum and nickel, antimony and cobalt etc. substitute, it is possible to use metal mixture material such as copper and constantan to substitute；
The position of silicon dioxide thickness thermoresistance layer 25 may be additionally located at the top of node 39 under thin film heat-flow meter.
The electric current density that step 9 36 and step 10 37 are completed measures copper coating 26 and electric current density
The shape measuring gold plate 27 is also to set according to the shape of mask, and its shape not only may be used
For rectangle as shown in Figure 3, can be also ellipse, circle, triangle, trapezoidal, do not advise
Then other shape such as figure.
The head end of thin film heat-flow meter is thin film heat-flow meter wiring exit 40, the head of humicap
End is humicap wiring exit 41, and it is electric current that electric current density measures the head end of the coat of metal
Density measure coat of metal wiring exit 43, it act as conveniently being connected with lead-in wire 5, enters
The conduction of horizontal electrical signal.Thin film heat-flow meter wiring exit 40, humicap wiring exit
41 and electric current density measure coat of metal wiring exit 43 shape not only can be for shown in Fig. 3
Shape, can be also other shapes such as ellipse, rectangle, trapezoidal, triangle, its position
The same side of silicon dioxide insulating layer 18 can be arranged in, it is possible to relative is arranged in titanium dioxide
The both sides of silicon insulating barrier 18, to facilitate the sensor lead 5 layout on conductive substrate.
Fig. 4 is the schematic cross-section of humidity-heat flow density-electric current density translocation sensor lead,
The width of lead-in wire 5 is 0.1-0.2mm, and the edge at conductive substrate 1 is amplified, and is formed
Pin 6, is attached with external measuring circuit and equipment to facilitate.This lead-in wire is to use vacuum
The four-level membrane of evaporation coating method evaporation is constituted: ground floor is the lead-in wire of thick 0.08-0.12 μm
Silicon dioxide insulating layer 44, the second layer is the lead-in wire copper coating 45 of thick 0.1-0.12 μm, the 3rd
Layer be the lead-in wire gold plate 46 of thick 0.1-0.12 μm, last layer be drawing of thickness 0.05-0.1 μm
Line silicon dioxide layer of protection 47；Wherein, at pin 6, or not is not deposited with lead-in wire silicon dioxide protection
Layer.
Fig. 5 be fuel battery inside humidity-heat flow density-electric current distribution interlock crack measure
Inserted sheet subjectivity schematic diagram, crack 2 on its conductive substrate 1 and muscle 3 and staggered runner stream
Runner and ridge on field plate are the most corresponding, the muscle 3 between two adjacent cracks 2 are disposed with wet
Degree-heat flow density-electric current density translocation sensor 4, one end of lead-in wire 5 and humidity-heat flow density
The wiring exit of-electric current density translocation sensor 4 connects, and the other end extends to conductive substrate
The outward flange of 1 also amplifies formation pin 6, passes for humidity-heat flow density-electric current density translocation
The transmission of sensor 4 signal of telecommunication.
Fig. 6 is that fuel battery inside humidity-snakelike single crack of heat flow density-electric current distribution is surveyed
Amount inserted sheet subjectivity schematic diagram, crack 2 on its conductive substrate 1 and muscle 3 and snakelike single channel
Runner and ridge in flow-field plate are the most corresponding, and the muscle 3 between two adjacent cracks 2 is disposed with
Humidity-heat flow density-electric current density translocation sensor 4, one end of lead-in wire 5 is close with humidity-hot-fluid
The wiring exit of degree-electric current density translocation sensor 4 connects, and the other end extends to conductive base
The outward flange of sheet 1 also amplifies formation pin 6, for humidity-heat flow density-electric current density translocation
The transmission of sensor 4 signal of telecommunication.
Fig. 7 is that fuel battery inside humidity-snakelike pair of heat flow density-electric current distribution crack is surveyed
Amount inserted sheet subjectivity schematic diagram, crack 2 on its conductive substrate 1 and muscle 3 and the snakelike dual pathways
Runner and ridge in flow-field plate are the most corresponding, and the muscle 3 between two adjacent cracks 2 is disposed with
Humidity-heat flow density-electric current density translocation sensor 4, one end of lead-in wire 5 is close with humidity-hot-fluid
The wiring exit of degree-electric current density translocation sensor 4 connects, and the other end extends to conductive base
The outward flange of sheet 1 also amplifies formation pin 6, for humidity-heat flow density-electric current density translocation
The transmission of sensor 4 signal of telecommunication.
Fuel battery inside humidity-heat flow density-the electric current distribution using the present invention is measured
Inserted sheet, it is possible to realize fuel battery inside moisture distribution, heat flux distribution and electric current density
The synchronization on-line measurement of distribution；This measurement apparatus is independent with tested fuel cell, it is not necessary to right
The structure of fuel cell carries out special transformation, simple in construction, and easy to make, range is wide.
Claims (10)
1. fuel battery inside humidity-heat flow density-electric current distribution measures inserted sheet, including leading
Electric substrate (1), crack (2), muscle (3), humidity-heat flow density-electric current density translocation sensing
Device (4), lead-in wire (5), hole, location (7)；Described crack (2), muscle (3) are arranged on and lead
On electric substrate (1), muscle (3) is positioned between two adjacent cracks (2), crack (2) and
The shape and size of muscle (3) respectively with fuel cell flow field board upper runner and the shape of ridge and chi
Very little identical, the position of crack (2) and muscle (3) respectively with fuel cell flow field board runner and
Ridge is corresponding；It is characterized in that: described humidity-heat flow density-electric current density translocation sensor (4)
It is arranged on muscle (3)；One end of lead-in wire (5) and humidity-heat flow density-electric current density translocation
The wiring exit of sensor (4) connects, and the other end extends to the limit of conductive substrate (1)
Edge also amplifies formation pin (6)；Hole, location (7) is symmetrical, be uniformly arranged on conductive substrate (1)
Surrounding, in order to be fixed on conductive substrate (1) on fuel cell flow field board；Fuel cell unit
During dress, fuel battery inside humidity-heat flow density-electric current distribution is measured inserted sheet and is arranged in combustion
In the middle of material cell flow field plate and membrane electrode, it is provided with humidity-heat flow density-electric current density translocation
Sensor (4) facing to membrane electrode side intimate contact therewith；
Described humidity-heat flow density-electric current density translocation sensor (4) includes that humicap is surveyed
Wet unit, thin film heat-flow meter calorimetric stream unit and electric current density are measured the coat of metal and are surveyed electric current list
Unit, uses vacuum evaporation coating film method to make, including ten layer films: ground floor exists for evaporation
The silicon dioxide insulating layer that thickness is 0.08-0.12 μm (18) on muscle (3), as insulation lining
The end, the second layer is that the thickness of evaporation is under 1.0-1.2 μm on silicon dioxide insulating layer (18)
Electrode aluminium coat (19), third layer is at bottom electrode aluminium coat (19) thick layer applied over
For high molecular polymer humidity-sensitive medium layer (20) of 0.5-1 μm, the 4th layer is at polyphosphazene polymer
The upper electrode aluminium coat that thickness is 1.0-1.2 μm of compound humidity-sensitive medium layer (20) top evaporation
(21)；Described upper electrode aluminium coat (21), high molecular polymer humidity-sensitive medium layer (20)
Constituting humicap with bottom electrode aluminium coat (19), head end is humicap wiring exit
(41), wherein go up electrode aluminium coat (21) be shaped as snakelike；Layer 5 is in titanium dioxide
Thin film heat-flow meter copper coating (22) that thickness is 0.1-0.12 μm of the upper evaporation of silicon insulating barrier (18),
Layer 6 is the thin film that thickness is 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (18)
Heat-flow meter nickel coating (23)；Described thin film heat-flow meter copper coating (22) and thin film heat-flow meter nickel
The tetragon being shaped as being parallel to each other of coating (23), head and the tail mutually overlap joint, lap-joint's structure
Become film thermopile, including under node (38) on thin film heat-flow meter and thin film heat-flow meter
Node (39), head end is thin film heat-flow meter wiring exit (40)；Layer 7 is at thin film
Heat-flow meter copper coating (22), thin film heat-flow meter nickel coating (23) and upper electrode aluminium coat (21)
Top evaporation the silicon dioxide layer of protection that thickness is 0.08-0.12 μm (24), the 8th layer is
On thin film heat-flow meter node (38) the top of silicon dioxide coating be deposited with thick layer be
Silicon dioxide thickness thermoresistance layer (25) of 1.2-2.0 μm, the 9th layer is at thin film heat-flow meter copper coating
(22) and thin film heat-flow meter nickel coating (23) to silicon dioxide layer of protection and thick thermal resistance
The electric current density that top evaporation thick layer is 1.5-2.0 μm of layer measures copper coating (26), the
Ten layers is 0.1-0.12 μm for measuring the top evaporation thick layer of copper coating (26) in electric current density
Electric current density measure gold plate (27)；Described electric current density measures copper coating (26) and electricity
It is overlapped that current density measures gold plate (27), constitutes electric current density and measures the coat of metal (42),
Head end is that electric current density measures coat of metal wiring exit (43)；
Described thin film heat-flow meter wiring exit (40), humicap wiring exit (41)
Measure coat of metal wiring exit (43) with electric current density and be all fabricated to circle, and uniform
It is placed in the same side of silicon dioxide insulating layer (18).
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: the shape of described conductive substrate (1) can make
Squarely is circular or trapezoidal or triangle or irregular figure；The upper crack of conductive substrate (1)
(2) be shaped as snakelike crack or parallel crack or poroid crack or staggered crack.
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: upper electrode and bottom electrode in described humicap
Coat of metal material, additionally it is possible to select gold, copper, platinum to replace；Described thin film heat-flow meter
In coat of metal material, the simple metal coating being made up of copper and mickel can also select tungsten and nickel,
Copper and cobalt, molybdenum and nickel, antimony and cobalt substitute, it is also possible to use copper and constantan metal mixture material
Material substitutes.
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: the shape of described upper electrode aluminium coat (21) is
Setting according to the shape of mask, its shape can also be zigzag, pectination.
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: described thin film heat-flow meter copper coating (22) and thin
The shape of film heat-flow meter nickel coating (23) is to set according to the shape of mask, its shape
Can also be strip, arc, rhombus, after head and the tail mutually overlap joint shape can be zigzag,
Arc, waveform, zigzag.
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: described silicon dioxide thickness thermoresistance layer (25) can also
Enough it is positioned at the top of node (39) under thin film heat-flow meter.
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: described thin film heat-flow meter at least includes a pair thin
Node (39) under node (38), thin film heat-flow meter on film heat-flow meter.
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: described electric current density measure copper coating (26) and
It is to set according to the shape of mask that electric current density measures the shape of gold plate (27), energy
It is enough rectangle, ellipse, circle, triangle, trapezoidal, irregular figure.
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: described thin film heat-flow meter wiring exit (40),
Humicap wiring exit (41) and electric current density measure coat of metal wiring exit (43)
Shape can also be oval or rectangle or trapezoidal or triangle, its position can also be relative
The both sides being arranged in silicon dioxide insulating layer (18).
Fuel battery inside humidity-heat flow density-electric current the most according to claim 1 is close
Degree distribution measuring inserted sheet, it is characterised in that: the width of described lead-in wire (5) is 0.1-0.2mm,
Edge at conductive substrate (1) is amplified, and forms pin (6)；
Lead-in wire (5) is that the four-level membrane using vacuum evaporation coating film method evaporation is constituted: first
Layer is the lead-in wire silicon dioxide insulating layer (44) of thick 0.08-0.12 μm, and the second layer is thick
The lead-in wire copper coating (45) of 0.1-0.12 μm, third layer is the lead-in wire gold plating of thick 0.1-0.12 μm
Layer (46), last layer are the lead-in wire silicon dioxide layer of protection (47) of thick 0.05-0.1 μm；
Wherein, lead-in wire silicon dioxide layer of protection it is not deposited with at pin (6) place.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410638226.4A CN104409756B (en) | 2014-11-05 | 2014-11-05 | Fuel cell internal humidity-heat flux density-current density distribution measurement insert |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410638226.4A CN104409756B (en) | 2014-11-05 | 2014-11-05 | Fuel cell internal humidity-heat flux density-current density distribution measurement insert |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104409756A CN104409756A (en) | 2015-03-11 |
| CN104409756B true CN104409756B (en) | 2017-01-11 |
Family
ID=52647366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410638226.4A Active CN104409756B (en) | 2014-11-05 | 2014-11-05 | Fuel cell internal humidity-heat flux density-current density distribution measurement insert |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104409756B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105161739B (en) * | 2015-06-30 | 2017-08-01 | 中国东方电气集团有限公司 | Fuel-cell device |
| CN104916855B (en) * | 2015-06-30 | 2017-04-12 | 中国东方电气集团有限公司 | Fuel cell device |
| CN110061269B (en) * | 2018-09-26 | 2021-03-02 | 南方科技大学 | Online measuring device for current density and gas pressure distribution in fuel cell stack |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009081117A (en) * | 2007-09-27 | 2009-04-16 | Nissan Motor Co Ltd | Current density distribution sensor, manufacturing method thereof, and fuel cell system |
| CN102175339B (en) * | 2011-02-18 | 2013-07-24 | 北京工业大学 | Internal transient film heat-flow sensor of fuel cell |
| CN202171511U (en) * | 2011-02-18 | 2012-03-21 | 北京工业大学 | Fuel cell internal transient heat-flow density distribution measurement inserting piece |
| CN102116679B (en) * | 2011-02-18 | 2012-08-15 | 北京工业大学 | Insertion piece for measuring transient heat flow density distribution in fuel cell |
| JP6144060B2 (en) * | 2013-02-01 | 2017-06-07 | 本田技研工業株式会社 | Fuel cell current density distribution measuring device |
-
2014
- 2014-11-05 CN CN201410638226.4A patent/CN104409756B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104409756A (en) | 2015-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102175339B (en) | Internal transient film heat-flow sensor of fuel cell | |
| CN102116680B (en) | Insertion sheet for measuring internal temperature distribution of fuel cell | |
| CN102157743B (en) | Transient temperature distribution sensor in fuel cell | |
| CN102116679B (en) | Insertion piece for measuring transient heat flow density distribution in fuel cell | |
| CN104409756B (en) | Fuel cell internal humidity-heat flux density-current density distribution measurement insert | |
| CN202171511U (en) | Fuel cell internal transient heat-flow density distribution measurement inserting piece | |
| CN102520249A (en) | Method for measuring conductivity at film thickness direction of semiconductor film | |
| CN202216773U (en) | Sensor for transient thin film heat flow inside fuel cell | |
| CN104466210B (en) | Fuel cell interior humidity-current density distribution measurement male tab | |
| CN104409754B (en) | Fuel cell internal humidity-current density combined measurement sensor | |
| CN104409753B (en) | Fuel cell internal temperature-humidity distribution measurement insert piece | |
| CN104359574A (en) | Fuel cell internal temperature-heat flux synchronous measurement sensor | |
| CN202109997U (en) | Fuel cell internal transient temperature distribution sensor | |
| CN104359572B (en) | Fuel cell internal temperature-heat flux-current density distribution measurement male tab | |
| CN104409755A (en) | Fuel cell internal temperature-heat flux density distribution measurement insert | |
| CN104360272A (en) | Fuel cell internal temperature-humidity-current density distribution measurement male tab | |
| CN104406705A (en) | Internal temperature-humidity-heat flow density distribution measuring insertion sheet of fuel cell | |
| CN104374485B (en) | Measurement inserting piece for heat flow density and current density distribution in fuel cell | |
| CN104360276A (en) | Fuel cell internal temperature-humidity-heat flux-current density synchronous measurement sensor | |
| CN104359951B (en) | Plug-in piece for measuring internal humidity and heat flux density distribution of fuel battery | |
| CN104377373B (en) | The manufacture method of fuel battery inside temperature humidity translocation sensor | |
| CN104359571A (en) | Fuel cell internal temperature-current density distribution measurement male tab | |
| CN104360278A (en) | Fuel cell internal temperature-humidity-heat flux-current density distribution measurement male tab | |
| RU2748862C2 (en) | System for monitoring sealing capacity of waterproofing roof covering layer | |
| CN104360277A (en) | Fuel cell internal heat flux-current density synchronous measurement sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |