CN104377373B - The manufacture method of fuel battery inside temperature humidity translocation sensor - Google Patents
The manufacture method of fuel battery inside temperature humidity translocation sensor Download PDFInfo
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- CN104377373B CN104377373B CN201410637413.0A CN201410637413A CN104377373B CN 104377373 B CN104377373 B CN 104377373B CN 201410637413 A CN201410637413 A CN 201410637413A CN 104377373 B CN104377373 B CN 104377373B
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- 239000000446 fuel Substances 0.000 title claims abstract description 92
- 230000005945 translocation Effects 0.000 title claims abstract description 67
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000010410 layer Substances 0.000 claims abstract description 141
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 119
- 239000011248 coating agent Substances 0.000 claims abstract description 71
- 238000000576 coating method Methods 0.000 claims abstract description 71
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 64
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 64
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 48
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 42
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000004411 aluminium Substances 0.000 claims abstract description 38
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 37
- 229910052802 copper Inorganic materials 0.000 claims abstract description 37
- 239000010949 copper Substances 0.000 claims abstract description 37
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 24
- 238000001704 evaporation Methods 0.000 claims abstract description 19
- 230000008020 evaporation Effects 0.000 claims abstract description 19
- 229920000642 polymer Polymers 0.000 claims abstract description 17
- 238000007738 vacuum evaporation Methods 0.000 claims abstract description 11
- 239000011241 protective layer Substances 0.000 claims abstract description 5
- 230000004888 barrier function Effects 0.000 claims abstract description 4
- 239000010408 film Substances 0.000 claims description 68
- 210000004027 cell Anatomy 0.000 claims description 53
- ZGUQQOOKFJPJRS-UHFFFAOYSA-N lead silicon Chemical compound [Si].[Pb] ZGUQQOOKFJPJRS-UHFFFAOYSA-N 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 10
- 229910052737 gold Inorganic materials 0.000 claims description 10
- 239000010931 gold Substances 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000010941 cobalt Substances 0.000 claims description 6
- 229910017052 cobalt Inorganic materials 0.000 claims description 6
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 230000001788 irregular Effects 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 229910001006 Constantan Inorganic materials 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims description 3
- 229910052787 antimony Inorganic materials 0.000 claims description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052697 platinum Chemical group 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 210000000170 cell membrane Anatomy 0.000 claims description 2
- 229920000344 molecularly imprinted polymer Polymers 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- VJPLIHZPOJDHLB-UHFFFAOYSA-N lead titanium Chemical compound [Ti].[Pb] VJPLIHZPOJDHLB-UHFFFAOYSA-N 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000004408 titanium dioxide Substances 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 6
- 230000009466 transformation Effects 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000012212 insulator Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- -1 18th Substances 0.000 description 1
- 241000790917 Dioxys <bee> Species 0.000 description 1
- 241000272183 Geococcyx californianus Species 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000005619 thermoelectricity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04007—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids related to heat exchange
- H01M8/04067—Heat exchange or temperature measuring elements, thermal insulation, e.g. heat pipes, heat pumps, fins
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/04492—Humidity; Ambient humidity; Water content
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04694—Processes for controlling fuel cells or fuel cell systems characterised by variables to be controlled
- H01M8/04701—Temperature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fuel Cell (AREA)
Abstract
Fuel battery inside temperature humidity translocation sensor disclosed by the invention, belongs to fuel battery inside parameter measurement field, and its temperature humidity translocation sensor adopts vacuum evaporation coating film method to make, including seven layer films：It is deposited with layer of silicon dioxide insulating barrier first; it is deposited with bottom electrode aluminium coat above it; it is then coated with high molecular polymer humidity-sensitive medium; top is in evaporation Top electrode aluminium coat; secondly difference evaporated film thermocouple copper coating and film thermocouple nickel coating on silicon dioxide insulating layer, finally in evaporation layer of silicon dioxide protective layer.Present invention achieves synchro measure to the fuel battery inside temperature and humidity and structures such as fuel cell flow field board need not be carried out with special transformation it is ensured that fuel battery performance is stablized；It is simple that this invention has a structure, easy to make, the advantages of small volume, can be disposed at and synchronizes measurement to the temperature and humidity of fuel battery inside on the fuel cell flow field board of various flow channel shapes.
Description
Technical field
The invention belongs to fuel battery inside thermal parameter measurement field, it is related to the survey of fuel battery inside temperature and humidity
Amount, particularly to fuel battery inside temperature-humidity translocation sensor.
Background technology
In fuel cell operation, temperature and humidity is two very important parameters, and the performance of fuel cell is had
Very big impact.The performance of fuel cell is more sensitive to temperature, due to the compact conformation of fuel cell body, with electrochemistry
The carrying out of reaction, inside battery heat can constantly gather, and leads to temperature to raise, if temperature is in suitable scope, can be to fuel
The performance of battery produces wholesome effect；If temperature exceedes the scope that membrane electrode can bear, can lead under membrane electrode performance
Fall even lost efficacy.Therefore in fuel cell operation, climate control issues are the problems having to solve, and will solve this problem
It is necessary for will be clear that the Temperature Distribution of inside battery and change procedure.
The impact no less important to fuel battery performance for the humidity.The humidity of fuel battery inside affects the matter of PEM
Son transmission, if relative humidity is too high, the vapor that inside battery can not be produced is taken out of, and inside battery will gather substantial amounts of solidifying
Bear water and cause water logging, have a strong impact on the performance of fuel cell, if humidity is too low, membrane electrode can be led to dry up, make fuel cell performance
Can decline it is therefore necessary to the humidity of monitoring inside battery, so that the performance of fuel cell is reached most preferably by adjusting humidity.
Traditional temp measuring method is the runner that micro temperature sensor, thermoelectricity occasionally thermal resistance is imbedded fuel cell mostly
In, or be integrated with the membrane electrode hot pressing of fuel cell, it generally requires the structure to fuel cell and carries out special transformation, and this is not
Only destroy fuel cell overall structure, also the performance of fuel cell is had a great impact；For hygrometric means, method has logical
Cross perforate on fuel cell flow field board, implantation business humidity sensor the humidity of fuel battery inside is measured, should
Method needs the flow-field plate to fuel cell to carry out special processing transformation, and difficulty of processing is big, and the sealing to fuel cell
There is certain destructiveness；Make the method that humidity sensor measures, the making of the method also by using etching technics
Complex process, cost of manufacture is high.
The present invention is to be made using vacuum evaporation coating film method, simplifies manufacturing process, reduces cost of manufacture, and
And temperature measuring unit and hygrometric unit are integrated on a sensor, fuel battery inside temperature and humidity can be carried out same
Pacing amount, can be convenient, flexible be arranged on fuel cell flow field board it is not necessary to special transformation is carried out to fuel cell flow field board,
Ensure that stablizing of fuel battery performance, it is simple that this invention also has a structure, easy to make, small volume, the advantages of sensitivity is high.
Content of the invention
It is an object of the invention to provide a kind of sensor of energy synchro measure fuel battery inside temperature and humidity.This
Bright using vacuum evaporation coating film method, temperature measuring unit and hygrometric unit are integrated in one, have that structure is simple, easy to make, body
Long-pending little the advantages of, facilitate the measurement Research of fuel cell internal temperature of battery and humidity.
For realizing above-mentioned technical purpose, technical scheme is as follows：Fuel battery inside temperature-humidity translocation senses
Device, including fuel cell flow field board 1, temperature-humidity translocation sensor 4, lead 5, is provided with runner on fuel cell flow field board 1
2 and ridge 3, temperature-humidity translocation sensor 4 is arranged on the ridge 3 between 1 liang of adjacent channels 2 of fuel cell flow field board, lead 5
One end connect with the wiring exit of temperature-humidity translocation sensor 4, the other end extends to the side of fuel cell flow field board 1
Edge；Fuel cell assembling when, fuel cell flow field board 1 is disposed with temperature-humidity translocation sensor 4 facing to fuel cell
Membrane electrode side is simultaneously intimate contact therewith.
Described temperature-humidity translocation sensor 4 is integrated with film thermocouple temperature measuring unit and humicap hygrometric unit, adopts
Make of vacuum evaporation coating film method, including seven layer films：Ground floor is thickness on ridge 3 for the evaporation is the two of 0.08-0.12 μm
Insulating layer of silicon oxide 13, the second layer is the bottom electrode aluminium coat that the thickness being deposited with silicon dioxide insulating layer 13 is 1.0-1.2 μm
14, third layer is that coating thick layer is 0.5-1 μm of high molecular polymer humidity-sensitive medium layer 15 above bottom electrode aluminium coat 14,
4th layer is the Top electrode aluminium coat 16 that the thickness being deposited with above high molecular polymer humidity-sensitive medium layer 15 is 1.0-1.2 μm；Institute
State Top electrode aluminium coat 16, high molecular polymer humidity-sensitive medium layer 15 and bottom electrode aluminium coat 14 and constitute humicap, head end
For humicap wiring exit 29, wherein Top electrode aluminium coat 16 be shaped as snakelike；Layer 5 is in silicon dioxide insulator
On layer, the thickness of evaporation is 0.1-0.12 μm of film thermocouple copper coating 17, and layer 6 is evaporation on silicon dioxide insulating layer
The thick film thermocouple nickel coating 18 for 0.1-0.12 μm；Described film thermocouple copper coating 17 and film thermocouple nickel coating 18
Be shaped as strip, mesophase mutually overlaps, and lap-joint constitutes film thermocouple hot junction node 28, and head end couples for thin film thermoelectric
Line exit 27；Layer 7 is the thickness of previously evaporation on the basis of coating is 0.08-0.12 μm of silicon dioxide layer of protection 19.
Described film thermocouple wiring exit 27 and humicap wiring exit 29 all make circular, and all arrange
The same side in silicon dioxide insulating layer 13.
The making step of temperature-humidity translocation sensor include step one 20, step 2 21, step 3 22, step 4 23,
Step 5 24, step 6 25, step 7 26；Specifically, step one 20, according to dioxy on the ridge 3 of fuel cell flow field board 1
SiClx insulating barrier mask 6 is deposited with layer of silicon dioxide insulating barrier 13, as dielectric substrate；Step 2 21, in silicon dioxide insulator
On layer 13, one layer of bottom electrode aluminium coat 14 is deposited with according to bottom electrode aluminium coat mask 7；Step 3 22, according to high molecular polymer sense
Humid medium layer mask 8 coats a floor height Molecularly Imprinted Polymer humidity-sensitive medium layer 15 above bottom electrode aluminium coat 14；Step 4 23,
The top of high molecular polymer humidity-sensitive medium layer 15 is deposited with one layer of Top electrode aluminium coat 16 according to Top electrode aluminium coat mask 9；Step
Rapid 5 24, thin film thermocouple copper coating is deposited with silicon dioxide insulating layer 13 according to film thermocouple copper coating mask 10
17；Step 6 25, is deposited with thin film thermocouple according to film thermocouple nickel coating mask 11 on silicon dioxide insulating layer 13
Nickel coating 18；Step 7 26, is previously deposited with layer of silicon dioxide according to silicon dioxide layer of protection mask 12 on the basis of coating
Protective layer 19, to protect the sensor from the interference of fuel cell internal current；It is made up of temperature-humidity translocation to pass above step
Sensor, external measuring circuit data collecting device can achieve the synchro measure to fuel battery inside temperature and humidity.
In described temperature-humidity translocation sensor 4, silicon dioxide insulating layer 13 can make squarely, circle, polygon, ladder
Shape, triangle, irregular figure.
The coat of metal material of described humicap upper/lower electrode, also can be selected for gold, copper and platinum and replaces.
The shape of described Top electrode aluminium coat 16 is to be set according to the shape of mask, its shape also can for zigzag,
Pectination.
In described film thermocouple coat of metal material, the simple metal coating that is made up of copper and mickel can also from tungsten and
Nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt substitute, and metal mixture material such as copper may also be employed and constantan substitutes.
The shape of described film thermocouple copper coating 17 and film thermocouple nickel coating 18 is to be set according to the shape of mask
Fixed, can also be ellipse, arc, waveform, rhombus and irregularly shaped, the shape after mutually overlapping can be arc,
Waveform, zigzag.
Described film thermocouple wiring exit 27 and humicap wiring exit 29 can respectively relative to be arranged in two
The both sides of insulating layer of silicon oxide 13, its shape can be also ellipse, rectangle, trapezoidal, triangle.
The width of described lead 5 is 0.1-0.2mm, is to be constituted using the four-level membrane of vacuum evaporation coating film method evaporation：
Ground floor is thick 0.08-0.12 μm of lead silicon dioxide insulating layer 30, and the second layer is thick 0.1-0.12 μm of lead copper coating
31, third layer is thick 0.1-0.12 μm of lead gold plate 32, and last layer is that thick 0.05-0.1 μm of lead silicon dioxide is protected
Sheath 33.
Lead silicon dioxide insulating layer 30 is equal in shape, positions and dimensions with lead copper coating 31 and lead gold plate 32
Unanimously, lead silicon dioxide layer of protection 33 is identical in shape and position with three first layers, but near flow-field plate edge, outline
It is shorter than three first layers.
The shape of described fuel cell flow field board 1 upper runner 2 can for parallel fluid channels, snakelike single channel runner, snakelike lead to more
Road runner, interdigitated gas distributor stream, irregular runner.
Compared with prior art, the present invention has the advantages that.
The present invention is to be made using vacuum evaporation coating film method, simplifies the manufacturing process of sensor, by thin film heat
Galvanic couple temperature measuring unit and humicap hygrometric unit are integrated, solve fuel battery inside temperature and humidity synchro measure
Problem is it is not necessary to carry out special transformation to fuel cell flow field board, and adopts film thermocouple as temperature measuring unit, with thermal resistance
Phase specific sensitivity is higher, and the linearity is more preferable；Meanwhile, to have a structure simple for this invention, easy to make, the advantages of small volume, is suitable for
In the fuel cell flow field board of various flow channel shapes, can a certain position of synchro measure fuel battery inside temperature and humidity,
Measurement can be synchronized to multiple positions.
Brief description
The subjective schematic diagram that Fig. 1 arranges in parallel fluid channels flow-field plate for temperature-humidity translocation sensor；
Fig. 2 is the subjective schematic diagram of single temperature-humidity translocation sensor on fuel cell flow field board；
Fig. 3 is the Making programme figure of single temperature-humidity translocation sensor on fuel cell flow field board；
Fig. 4 is the section subjectivity schematic diagram of temperature-humidity translocation sensor lead；
The subjective schematic diagram that Fig. 5 arranges in interdigitated gas distributor flow-field plate for temperature-humidity translocation sensor；
The subjective schematic diagram that Fig. 6 arranges on snakelike single channel fluid flow on channel plate for temperature-humidity translocation sensor；
The subjective schematic diagram that Fig. 7 arranges on serpentine multichannel fluid flow on channel plate for temperature-humidity translocation sensor；
In figure, 1, fuel cell flow field board, 2, runner, 3, ridge, 4, temperature-humidity translocation sensor, 5, lead；
6-12 is each layer mask of temperature-humidity translocation sensor：6th, silicon dioxide insulating layer mask, 7, bottom electrode aluminium coat
Mask, 8, high molecular polymer humidity-sensitive medium layer mask, 9, Top electrode aluminium coat mask, 10, film thermocouple copper coating mask,
11st, film thermocouple nickel coating mask, 12, silicon dioxide layer of protection mask；
13-19 is each film layer of temperature-humidity translocation sensor according to mask fabrication：13rd, silicon dioxide insulating layer, 14,
Bottom electrode aluminium coat, 15, high molecular polymer humidity-sensitive medium layer, 16, Top electrode aluminium coat, 17, film thermocouple copper coating,
18th, film thermocouple nickel coating, 19, silicon dioxide layer of protection；
20-26 is the making step of temperature-humidity translocation sensor：20th, step one, 21, step 2,22, step 3,
23rd, step 4,24, step 5,25, step 6,26, step 7；
27th, film thermocouple wiring exit, 28, film thermocouple hot junction node, 29, humicap wiring exit；
30th, lead silicon dioxide insulating layer, 31, lead copper coating, 32, lead gold plate, 33, the protection of lead silicon dioxide
Layer.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
With reference to shown in Fig. 1, the fuel battery inside temperature-humidity translocation sensor of the present invention includes fuel cell flow field board
1st, temperature-humidity translocation sensor 4, lead 5, is provided with runner 2 and ridge 3, temperature-humidity translocation on fuel cell flow field board 1
Sensor 4 is arranged on the ridge 3 between 1 liang of adjacent channels 2 of fuel cell flow field board, one end of lead 5 and temperature-humidity translocation
The wiring exit of sensor 4 connects, and the other end extends to the edge of fuel cell flow field board 1, produces for transmitting sensor
The signal of telecommunication；Fuel cell assembling when, fuel cell flow field board 1 is disposed with temperature-humidity translocation sensor 4 facing to combustion
Material cell membrane-electrode side is simultaneously intimate contact therewith.
With reference to shown in Fig. 2, temperature-humidity translocation sensor 4 of the present invention is integrated with film thermocouple temperature measuring unit
With humicap hygrometric unit, it is made using vacuum evaporation coating film method, including seven layer films：Ground floor is evaporation in combustion
The thickness on ridge 3 between material 1 liang of adjacent channels 2 of cell flow field plate is 0.08-0.12 μm of silicon dioxide insulating layer 13, the second layer
It is the bottom electrode aluminium coat 14 that the thickness being deposited with silicon dioxide insulating layer 13 is 1.0-1.2 μm, third layer is in bottom electrode aluminum
Coating 14 top coating thick layer is 0.5-1 μm of high molecular polymer humidity-sensitive medium layer 15, and the 4th layer is in macromolecule membrane
The thickness of humidity-sensitive medium layer 15 top evaporation is 1.0-1.2 μm of Top electrode aluminium coat 16, and layer 5 is in silicon dioxide insulating layer
On 13, the thickness of evaporation is 0.1-0.12 μm of film thermocouple copper coating 17, and layer 6 is evaporation on silicon dioxide insulating layer 13
Thickness be 0.1-0.12 μm of film thermocouple nickel coating 18, layer 7 is that the thickness of previously evaporation on the basis of coating is
0.08-0.12 μm of silicon dioxide layer of protection 19.
Fig. 3 is the Making programme figure of single temperature-humidity translocation sensor：6-12 is that temperature-humidity translocation sensor is each
Layer mask, 13-19 is each film layer of temperature-humidity translocation sensor according to mask fabrication, and 20-26 passes for temperature-humidity translocation
The making step of sensor.It is deposited with one layer two according to silicon dioxide insulating layer mask 6 first on the ridge 3 of fuel cell flow field board 1
Insulating layer of silicon oxide 13, as the substrate of sensor, and is fully insulated with fuel cell flow field board, thus completing step one 20；
Step 2 21 is to be deposited with one layer of bottom electrode aluminium coat 14, step according to bottom electrode aluminium coat mask 7 on silicon dioxide insulating layer 13
Rapid 3 22 is to coat a floor height molecule aggregation according to high molecular polymer humidity-sensitive medium layer mask 8 above bottom electrode aluminium coat 14
Thing humidity-sensitive medium layer 15, step 4 23 is according to Top electrode aluminium coat mask above high molecular polymer humidity-sensitive medium layer 15
9 one layer of Top electrode aluminium coat 16 of evaporation；Wherein, bottom electrode aluminium coat 14, high score polymer humidity-sensitive medium layer 15 and Top electrode aluminum
Coating 16 constitutes humicap it is achieved that the measurement of humidity；Step 5 24 is to be existed according to film thermocouple copper coating mask 10
It is deposited with thin film thermocouple copper coating 17, step 6 25 is to cover according to film thermocouple nickel coating on silicon dioxide insulating layer 13
Film 11 is deposited with thin film thermocouple nickel coating 18 on silicon dioxide insulating layer 13；Wherein film thermocouple copper coating 17 and thin
Film thermocouple nickel coating 18 constitutes film thermocouple, it is achieved thereby that temperature survey；Step 7 26 is the base of previously coating
On plinth, layer of silicon dioxide protective layer 19 is deposited with according to silicon dioxide layer of protection mask 12, to protect the sensor from fuel cell
The interference of internal current；It is made up of temperature-humidity translocation sensor above step, external measuring circuit data collecting device is
Can achieve the synchro measure to fuel battery inside temperature and humidity.
Wherein, the global shape of temperature-humidity translocation sensor is to be determined by the shape of silicon dioxide insulating layer, its
Not only can be fabricated to square shown in Fig. 3, can be also circle, polygon, trapezoidal, other shape such as triangle, irregular figure
Shape.The humicap Top electrode that step 2 21 and step 4 23 complete and the metal material of bottom electrode also can be selected for gold, copper, platinum etc.
Other metal substitutes, wherein, the shape of humicap Top electrode aluminium coat 16 can be not only snakelike shown in Fig. 3, can be also saw
The other shapes such as dentation, pectination.Film thermocouple copper coating 17 and film thermocouple nickel that step 5 24 and step 6 25 complete
Coating 18 be shaped as strip, mesophase mutually overlaps, and lap-joint constitutes film thermocouple hot junction node 28；Film thermocouple copper
The shape of coating 17 and film thermocouple nickel coating 18 is different according to the difference of mask, can be also ellipse, arc, wave
Shape, rhombus and the other shapes such as irregularly shaped, the shape after mutually overlapping can be arc, waveform, zigzag etc.；Thin film
The material of thermo-electric metal coating also can substitute for tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt etc., and metal mixed may also be employed
Thing material such as copper and constantan substitute.
The head end of film thermocouple is film thermocouple wiring exit 27, and the head end of humicap is humicap wiring
Exit 29, its effect, for convenience of being connected with lead 5, enters the conduction of horizontal electrical signal.Film thermocouple wiring exit 27 and wet
The shape of quick electric capacity wiring exit 29 can be not only the shape shown in Fig. 3, can be also ellipse, rectangle, trapezoidal, triangle etc.
Other shapes, its position can be arranged in the same side of silicon dioxide insulating layer 13, also can be relative to be arranged in silicon dioxide exhausted
The both sides of edge layer 13, that is, when film thermocouple wiring exit 27 is in the upside of silicon dioxide insulating layer 13, humicap
Wiring exit 29 may be arranged at the opposite side of the silicon dioxide insulating layer 13 relative with film thermocouple wiring exit 27, with
Facilitate sensor lead 5 arrangement on flow field plates.
Fig. 4 is the schematic cross-section of temperature-humidity translocation sensor lead, and the width of this lead 5 is 0.1-0.2mm, is
It is made up of the four-level membrane that vacuum evaporation coating film method is deposited with：Ground floor is thick 0.08-0.12 μm of lead silicon dioxide insulator
Layer 30, the second layer is thick 0.1-0.12 μm of lead copper coating 31, and third layer is thick 0.1-0.12 μm of lead gold plate 32,
Last layer is thick 0.05-0.1 μm of lead silicon dioxide layer of protection 33；Lead silicon dioxide insulating layer 30 and lead copper coating 31
All consistent in shape, positions and dimensions with lead gold plate 32, lead silicon dioxide layer of protection 33 and three first layers in shape and
Identical on position, but near flow-field plate edge, three first layers to be slightly shorter than, to facilitate the lead with external data collecting device
Connect.
Fig. 5 is arrangement schematic diagram in interdigitated gas distributor flow-field plate for the temperature-humidity translocation sensor, in interdigitated gas distributor
Temperature-humidity translocation sensor 4 is disposed with the ridge of flow-field plate, lead 5 one end is drawn with temperature-humidity translocation sensor wire
End connects, and the other end extends to flow-field plate edge.
Fig. 6 is arrangement schematic diagram on snakelike single channel fluid flow on channel plate for the temperature-humidity translocation sensor, in flow-field plate
Ridge on be disposed with temperature-humidity translocation sensor 4, lead 5 one end and temperature-humidity translocation sensor wire exit phase
Connect, the other end extends to flow-field plate edge.
Fig. 7 is arrangement schematic diagram on serpentine multichannel fluid flow on channel plate for the temperature-humidity translocation sensor, in flow-field plate
Ridge on be disposed with temperature-humidity translocation sensor 4, lead 5 one end and temperature-humidity translocation sensor wire exit phase
Connect, the other end extends to flow-field plate edge.
The temperature-humidity translocation sensor of the present invention is to be made using vacuum evaporation coating film method, thin including seven layers
Film, will be integrated for thin film thermoelectric even summation humicap it is achieved that the synchro measure of fuel battery inside temperature and humidity；This
Bright structure is simple, makes easily, small volume, and the performance impact being arranged in fuel battery inside to fuel cell is little.
Claims (9)
1. fuel battery inside temperature-humidity translocation sensing system manufacture method it is characterised in that：In described fuel cell
Portion's temperature-humidity translocation sensing system includes fuel cell flow field board (1), temperature-humidity translocation sensor (4), lead
(5) runner (2) and ridge (3), are provided with fuel cell flow field board (1), temperature-humidity translocation sensor (4) is arranged on fuel
On ridge (3) between cell flow field plate (1) two adjacent channels (2)；During fuel cell assembling, the upper cloth of fuel cell flow field board (1)
It is equipped with the facing to fuel cell membrane electrode side and intimate contact therewith of temperature-humidity translocation sensor (4)；
Described temperature-humidity translocation sensor (4) is integrated with film thermocouple temperature measuring unit and humicap hygrometric unit, adopts
Vacuum evaporation coating film method makes, including seven layer films：Ground floor is thickness on ridge (3) for the evaporation is the two of 0.08-0.12 μm
Insulating layer of silicon oxide (13), the second layer is the bottom electrode aluminum in the upper thickness being deposited with of silicon dioxide insulating layer (13) for 1.0-1.2 μm
Coating (14), third layer is that the high molecular polymer sense for 0.5-1 μm for the coating thick layer is wet above bottom electrode aluminium coat (14)
Dielectric layer (15), the 4th layer is the upper electricity that the thickness being deposited with above high molecular polymer humidity-sensitive medium layer (15) is 1.0-1.2 μm
Pole aluminium coat (16)；Described Top electrode aluminium coat (16), high molecular polymer humidity-sensitive medium layer (15) and bottom electrode aluminium coat
(14) constitute humicap, the head end of described Top electrode aluminium coat (16) is humicap wiring exit (29), wherein goes up
Being shaped as of electrode aluminium coat (16) is snakelike；Layer 5 is that the thickness of evaporation on silicon dioxide insulating layer is thin for 0.1-0.12 μm
Film thermocouple copper coating (17), layer 6 is the film thermocouple that the thickness being deposited with silicon dioxide insulating layer is 0.1-0.12 μm
Nickel coating (18)；Described film thermocouple copper coating (17) and film thermocouple nickel coating (18) be shaped as strip, middle
Mutually overlap, lap-joint constitutes film thermocouple hot junction node (28), film thermocouple copper coating (17) head end is thin film thermoelectric
Couple line exit (27)；Layer 7 is the thickness of previously evaporation on the basis of coating is that 0.08-0.12 μm of silicon dioxide is protected
Sheath (19)；
Described film thermocouple wiring exit (27) and humicap wiring exit (29) all make circular, and all arrange
In the same side of silicon dioxide insulating layer (13), one end of described lead (5) and the wiring of temperature-humidity translocation sensor (4)
Exit connects, and the other end extends to the edge of fuel cell flow field board (1)；
The making step of described temperature-humidity translocation sensor includes step one (20), step 2 (21), step 3 (22), step
Rapid four (23), step 5 (24), step 6 (25), step 7 (26)；Specifically, step one (20), in fuel battery flow field
On the ridge (3) of plate (1), layer of silicon dioxide insulating barrier (13) is deposited with according to silicon dioxide insulating layer mask (6), as insulation lining
Bottom；Step 2 (21), is deposited with one layer of bottom electrode aluminum plating according to bottom electrode aluminium coat mask (7) on silicon dioxide insulating layer (13)
Layer (14)；Step 3 (22), coats above bottom electrode aluminium coat (14) according to high molecular polymer humidity-sensitive medium layer mask (8)
One floor height Molecularly Imprinted Polymer humidity-sensitive medium layer (15)；Step 4 (23), in the top of high molecular polymer humidity-sensitive medium layer (15)
One layer of Top electrode aluminium coat (16) is deposited with according to Top electrode aluminium coat mask (9)；Step 5 (24), plates according to film thermocouple copper
Layer mask (10) is in silicon dioxide insulating layer (13) upper evaporation thin film thermocouple copper coating (17)；Step 6 (25), according to
Film thermocouple nickel coating mask (11) is in silicon dioxide insulating layer (13) upper evaporation thin film thermocouple nickel coating (18)；Step
Rapid seven (26), previously on the basis of coating, layer of silicon dioxide protective layer is deposited with according to silicon dioxide layer of protection mask (12)
(19), to protect the sensor from the interference of fuel cell internal current；It is made up of temperature-humidity translocation sensing above step
Device, the synchro measure to fuel battery inside temperature and humidity realized by external measuring circuit data collecting device.
2. the manufacture method of fuel battery inside temperature-humidity translocation sensing system according to claim 1, its feature
It is：In described temperature-humidity translocation sensor (4), silicon dioxide insulating layer (13) makes squarely, circle, trapezoidal or triangle
Shape.
3. the manufacture method of fuel battery inside temperature-humidity translocation sensing system according to claim 1, its feature
It is：The coating material of humicap upper/lower electrode, is replaced with gold or copper or platinum.
4. the manufacture method of fuel battery inside temperature-humidity translocation sensing system according to claim 1, its feature
It is：The shape of described Top electrode aluminium coat (16) is replaced by zigzag or pectination, its shape be shape according to mask and
Set.
5. the manufacture method of fuel battery inside temperature-humidity translocation sensing system according to claim 1, its feature
It is：In film thermocouple coating material, the coating tungsten being made up of copper and mickel and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt or
Copper and constantan substitute.
6. the manufacture method of fuel battery inside temperature-humidity translocation sensing system according to claim 1, its feature
It is：In described temperature-humidity translocation sensor (4), silicon dioxide insulating layer (13) is fabricated to polygon.
7. the manufacture method of fuel battery inside temperature-humidity translocation sensing system according to claim 1, its feature
It is：" described film thermocouple wiring exit (27) and humicap wiring exit (29) all make circular, and uniformly
It is placed in the same side of silicon dioxide insulating layer (13) " it is replaced by " described film thermocouple wiring exit (27) and humicap
Wiring exit (29) respectively relative to the both sides being arranged in silicon dioxide insulating layer (13), film thermocouple wiring exit
(27) and the shape of humicap wiring exit (29) is replaced by ellipse, rectangle, trapezoidal or triangle ".
8. the manufacture method of fuel battery inside temperature-humidity translocation sensing system according to claim 1, its feature
It is：The width of described lead (5) is 0.1-0.2mm, is to be constituted using the four-level membrane of vacuum evaporation coating film method evaporation：The
One layer of lead silicon dioxide insulating layer (30) for thick 0.08-0.12 μm, the second layer is thick 0.1-0.12 μm of lead copper coating
(31), third layer is thick 0.1-0.12 μm of lead gold plate (32), and last layer is thick 0.05-0.1 μm of lead titanium dioxide
Silicon protective layer (33)；
Lead silicon dioxide insulating layer (30) and lead copper coating (31) and lead gold plate (32) are in shape, positions and dimensions
All consistent, lead silicon dioxide layer of protection (33) is identical in shape and position with three first layers, but in close flow-field plate edge,
Three first layers to be slightly shorter than.
9. the manufacture method of fuel battery inside temperature-humidity translocation sensing system according to claim 1, its feature
It is：Described fuel cell flow field board (1) upper runner (2) be shaped as parallel fluid channels, snakelike single channel runner, serpentine multichannel
Runner, interdigitated gas distributor or irregular runner.
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| TW200810224A (en) * | 2006-08-15 | 2008-02-16 | Univ Yuan Ze | Method for producing fuel cell with micro-sensor and polymer material |
| CN102157743B (en) * | 2011-02-18 | 2013-03-27 | 北京工业大学 | Transient temperature distribution sensor in fuel cell |
| CN102116679B (en) * | 2011-02-18 | 2012-08-15 | 北京工业大学 | Insertion piece for measuring transient heat flow density distribution in fuel cell |
| CN102175339B (en) * | 2011-02-18 | 2013-07-24 | 北京工业大学 | Internal transient film heat-flow sensor of fuel cell |
| CN102116680B (en) * | 2011-02-18 | 2012-07-11 | 北京工业大学 | Insertion sheet for measuring internal temperature distribution of fuel cell |
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