CN104406705A - Internal temperature-humidity-heat flow density distribution measuring insertion sheet of fuel cell - Google Patents
Internal temperature-humidity-heat flow density distribution measuring insertion sheet of fuel cell Download PDFInfo
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- CN104406705A CN104406705A CN201410638222.6A CN201410638222A CN104406705A CN 104406705 A CN104406705 A CN 104406705A CN 201410638222 A CN201410638222 A CN 201410638222A CN 104406705 A CN104406705 A CN 104406705A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses an internal temperature-humidity-heat flow density distribution measuring insertion sheet of a fuel cell. The internal temperature-humidity-heat flow density distribution measuring insertion sheet of the fuel cell is a measuring device for the internal temperature, the humidity and the heat flow density of the fuel cell. A leaking seam and a rib corresponding to a flow field plate runner and a ridge of the fuel cell are arranged on a conductive base plate, and a temperature-humidity-heat flow density simultaneous detection sensor is distributed on the rib; the temperature-humidity-heat flow density simultaneous detection sensor is manufactured by adopting a vacuum evaporation coating method, and comprises eight layers of films. A lead wire is also manufactured by adopting the vacuum evaporation coating method and used for transmitting an electric signal, and amplifying to form a pin for conveniently connecting with external data acquisition equipment while extending to the edge of the flow field plate. The internal temperature-humidity-heat flow density distribution measuring insertion sheet of the fuel cell can be used for realizing synchronous on-line measurement of the internal temperature distribution, the humidity distribution and the heat flow density distribution of the fuel cell. The device is independent from the fuel cell, and can be adaptive to the fuel cell flow field plates with parallel runners, S-shaped runner, staggered type runners or runners in other shapes without the need of specially modifying the structure of the fuel cell.
Description
Technical field
The present invention relates to a kind of fuel battery inside temperature-humidity-heat flux distribution and measure inserted sheet, belong to fuel cell detection technique field.
Background technology
Fuel cell is very responsive for the change of temperature, if the structural design of fuel cell is unreasonable, internal heat will be caused to discharge in time, destroys internal temperature field, causes local anomaly high temperature, thus the membrane electrode of fuel cell can be caused to lose efficacy.Equally, the humidity of fuel battery inside also has a great impact its performance, and the height of humidity not only affects the proton transfer ability of fuel cell inner proton exchange membrane, also can affect fuel battery inside generate water number.If humidity is inadequate, PEM dries up, and the performance of fuel cell will significantly reduce, and humidity is too high, fuel battery inside can gather too much condensate water, and serious meeting produces water logging phenomenon, hinder reactant to the transmission of membrane electrode, also can cause the decline of fuel battery performance.
This shows, the distribution understanding fuel battery inside temperature, humidity and heat flow density by the design of optimization fuel cell structure, choose optimal operating condition and have important directive significance.Traditional research concentrates on the research of single parameter mostly, as the measurement by carrying out temperature at fuel battery inside implantation thermopair, thermal resistance or microsensor; The measurement that humidity sensor carries out humidity is implanted by special processing fuel-cell flow-field plate.These methods need to carry out special transformation to fuel cell mostly, and make complicated, cost is high, and often kind of parameter measurement transformation to fuel cell does not have versatility, even needs being dismounted for multiple times fuel cell, have had a strong impact on the stable of fuel battery performance.
The present invention is furnished with temperature-humidity-heat flow density translocation sensor on the muscle of conductive substrate, achieves synchronous on-line measurement fuel battery inside Temperature Distribution, moisture distribution and heat flux distribution; This measurement mechanism, independent of tested fuel cell, without the need to carrying out structure of modification to fuel cell, decreases the dismounting number of times to fuel cell, thus ensure that the stable of fuel battery performance.
Summary of the invention
The object of the present invention is to provide the device of a kind of energy synchronous on-line measurement fuel battery inside Temperature Distribution, moisture distribution and heat flux distribution.This device can be used as individual member and is installed on fuel battery inside, and structure is simple, and easy to make, without the need to carrying out special transformation to fuel battery inside structure, the step that fuel battery inside temperature, humidity and heat flux distribution are measured is simplified.
For realizing above-mentioned technical purpose, technical scheme of the present invention is as follows: fuel battery inside temperature-humidity-heat flux distribution measures inserted sheet, comprises conductive substrate 1, crack 2, muscle 3, temperature-humidity-heat flow density translocation sensor 4, lead-in wire 5, pilot hole 7; Described crack 2, muscle 3 are arranged on conductive substrate 1, muscle 3 is between two adjacent cracks 2, crack 2 is identical with the shape and size of ridge with fuel cell flow field board upper runner respectively with the shape and size of muscle 3, and crack 2 is corresponding with fuel cell flow field board runner and ridge respectively with the position of muscle 3; Described temperature-humidity-heat flow density translocation sensor 4 is arranged on muscle 3; One end of lead-in wire 5 connects with the wiring exit of temperature-humidity-heat flow density translocation sensor 4, and the other end extends to the edge of conductive substrate 1 and amplifies formation pin 6; Pilot hole 7 is symmetrical, be evenly arranged on conductive substrate 1 surrounding, in order to be fixed on fuel cell flow field board by conductive substrate 1; During fuel cell assembling, fuel battery inside temperature-humidity-heat flux distribution is measured inserted sheet and is arranged in the middle of fuel cell flow field board and membrane electrode, its be provided with temperature-humidity-heat flow density translocation sensor 4 facing to membrane electrode side also close contact with it.
Described temperature-humidity-heat flow density translocation sensor 4 comprises film thermocouple temperature measuring unit, humicap hygrometric unit and film thermal flowmeter calorimetric stream unit, vacuum evaporation coating film method is adopted to make, comprise eight layer films: ground floor is the thick silicon dioxide insulating layer 16 for 0.08-0.12 μm of evaporation on muscle 3, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 17 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 16, third layer is above bottom electrode aluminium coat 17, apply the high molecular polymer humidity-sensitive medium layer 18 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 19 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 18, described top electrode aluminium coat 19, high molecular polymer humidity-sensitive medium layer 18 and bottom electrode aluminium coat 17 constitute humicap, and head end is humicap wiring exit 37, and wherein the shape of top electrode aluminium coat 19 is snakelike, layer 5 is the thick copper coating 20 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, and layer 6 is the thick nickel coating 21 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, described copper coating 20 comprises film thermocouple copper coating and film thermal flowmeter copper coating simultaneously, described nickel coating 21 comprises film thermocouple nickel coating and film thermal flowmeter nickel coating simultaneously, the shape of described film thermocouple copper coating and film thermocouple nickel coating is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node 32, and head end is film thermocouple wiring exit 33, the shape of described film thermal flowmeter copper coating and film thermal flowmeter nickel coating is the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint forms thermoelectric pile, and comprising node 35 under node 34 on film thermal flowmeter and film thermal flowmeter, head end is film thermal flowmeter wiring exit 36, layer 7 is the thick silicon dioxide layer of protection 22 for 0.08-0.12 μm of evaporation above top electrode aluminium coat 19, copper coating 20 and nickel coating 21, the 8th layer for evaporation thick layer above silicon dioxide coating corresponding to node 34 on film thermal flowmeter be the thick thermoresistance layer 23 of silicon dioxide of 1.2-2.0 μm.
Described film thermocouple wiring exit 33, film thermal flowmeter wiring exit 36 and humicap wiring exit 37 are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer 16.
The shape of described conductive substrate 1 can be made into square, circular, polygon, trapezoidal, triangle, irregular figure; On conductive substrate 1, the shape of crack 2 can be snakelike crack, parallel crack, poroid crack, staggered crack.
The coat of metal material of described humicap top electrode and bottom electrode, also can select gold, copper, platinum to replace.
The shape of described top electrode aluminium coat 19 sets according to the shape of mask, and its shape also can be zigzag, pectination.
In described thermometric and calorimetric stream unit, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
In described temperature-humidity-heat flow density translocation sensor 4, the shape of film thermocouple copper coating and film thermocouple nickel coating sets according to the shape of mask, its shape can also be ellipse, arc, waveform, rhombus and irregularly shaped, and the shape mutually after overlap joint can be arc, waveform, serrate; The shape of film thermal flowmeter copper coating and film thermal flowmeter nickel coating also sets according to the shape of mask, and its shape can also be strip, arc, rhombus, and the shape after the first overlap joint mutually can be serrate, arc, waveform, zigzag.
The thick thermoresistance layer 23 of described silicon dioxide also can be positioned at the top of node 35 under film thermal flowmeter.
In described temperature-humidity-heat flow density translocation sensor 4, film thermal flowmeter at least to comprise on a pair film thermal flowmeter node 35 under node 34, film thermal flowmeter.
The shape of described film thermocouple wiring exit 33, film thermal flowmeter wiring exit 36 and humicap wiring exit 37 also can be ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer 16 that its position can be symmetrical.
The width of described lead-in wire 5 is 0.1-0.2mm, amplifies in the edge of conductive substrate 1, forms pin 6.
Lead-in wire 5 adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer 38 of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating 39 of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate 40 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 41 of thick 0.05-0.1 μm; Wherein, at pin 6 place not evaporation lead-in wire silicon dioxide layer of protection.
Compared with prior art, the present invention has following beneficial effect.
The muscle of the present invention between the adjacent crack of conductive substrate two is furnished with temperature-humidity-heat flow density translocation sensor, can be used as independently Components installation between fuel cell flow field board and membrane electrode, do not affect the diffusion of reactant to membrane electrode direction, the synchro measure to its interior temperature distribution, moisture distribution and heat flux distribution when achieving fuel cell on-line operation; The use of this device does not need to carry out special transformation to other structures such as fuel cell flow field board or pole plate, reduces by the impact of the implantation of measurement mechanism on fuel battery performance; Meanwhile, this apparatus structure is simple, easy to make, applied widely, can adapt to the fuel cell of various flow channel shape, as parallel fluid channels, serpentine flow path, staggered runner or other abnormal flow road shape.
Accompanying drawing explanation
Fig. 1 is that the parallel crack of fuel battery inside temperature-humidity-heat flux distribution measures the subjective schematic diagram of inserted sheet;
Fig. 2 is the subjective schematic diagram that fuel battery inside temperature-humidity-heat flux distribution measures single temperature-humidity-heat flow density translocation sensor on inserted sheet;
Fig. 3 is the Making programme figure that fuel battery inside temperature-humidity-heat flux distribution measures single temperature-humidity-heat flow density translocation sensor on inserted sheet;
Fig. 4 is the subjective schematic diagram in cross section that fuel battery inside temperature-humidity-heat flux distribution measures temperature-humidity-heat flow density translocation sensor lead on inserted sheet;
Fig. 5 is that fuel battery inside temperature-humidity-heat flux distribution crack that interlocks measures the subjective schematic diagram of inserted sheet;
Fig. 6 is that the snakelike single crack of fuel battery inside temperature-humidity-heat flux distribution measures the subjective schematic diagram of inserted sheet;
Fig. 7 is that fuel battery inside temperature-humidity-heat flux distribution snakelike pair of crack measures the subjective schematic diagram of inserted sheet;
In figure, 1, conductive substrate, 2, crack, 3, muscle, 4, temperature-humidity-heat flow density translocation sensor, 5, lead-in wire, 6, pin, 7, pilot hole;
8-15 is each layer mask of temperature-humidity-heat flow density translocation sensor: 8, silicon dioxide insulating layer mask, 9, bottom electrode aluminium coat mask, 10, high molecular polymer humidity-sensitive medium layer mask, 11, top electrode aluminium coat mask, 12, copper coating mask, 13, nickel coating mask, 14, silicon dioxide layer of protection mask, 15, the thick thermoresistance layer mask of silicon dioxide;
16-23 is the temperature-humidity-each rete of heat flow density translocation sensor according to mask fabrication: 16, silicon dioxide insulating layer, 17, bottom electrode aluminium coat, 18, high molecular polymer humidity-sensitive medium layer, 19, top electrode aluminium coat, 20, copper coating, 21, nickel coating, 22, silicon dioxide layer of protection, 23, the thick thermoresistance layer of silicon dioxide;
24-31 is the making step of temperature-humidity-heat flow density translocation sensor: 24, step one, 25, step 2,26, step 3,27, step 4,28, step 5,29, step 6,30, step 7,31, step 8;
32, film thermocouple hot junction node, 33, film thermocouple wiring exit, 34, node on film thermal flowmeter, 35, node under film thermal flowmeter, 36, film thermal flowmeter wiring exit, 37, humicap wiring exit;
38, go between silicon dioxide insulating layer, 39, lead-in wire copper coating, 40, lead-in wire gold plate, 41, lead-in wire silicon dioxide layer of protection.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to shown in Fig. 1, fuel battery inside temperature-humidity of the present invention-heat flux distribution measures inserted sheet, comprises conductive substrate 1, crack 2, muscle 3, temperature-humidity-heat flow density translocation sensor 4, lead-in wire 5, pin 6, pilot hole 7; Crack 2 and muscle 3 are arranged on conductive substrate 1, and it is identical in shape and size with ridge with the runner on tested fuel cell flow field board, and position is mutually corresponding, and muscle 3 is furnished with temperature-humidity-heat flow density translocation sensor 4; 5 one end that go between are connected with temperature-humidity-heat flow density translocation sensor 4, and the other end extends to the edge of conductive substrate 1, for transmitting the electric signal that temperature-humidity-heat flow density translocation sensor 4 produces; Pin 6 is arranged in the edge of conductive substrate 1 and is connected with lead-in wire 5; Be furnished with pilot hole 7 in the surrounding of conductive substrate, facilitate this temperature-humidity-heat flux distribution measure the location of inserted sheet and fuel cell flow field board and fix.For the mating shapes with tested fuel cell, the shape of conductive substrate 1 can be made into square, circular, polygon, trapezoidal, triangle etc.During measurement, this measurement inserted sheet is implanted between fuel cell flow field board and membrane electrode assembly, be fixed on fuel cell flow field board by pilot hole 7, be furnished with temperature-humidity-heat flow density translocation sensor 4 facing to fuel cell membrane electrode assembly direction, and with membrane electrode assembly close contact, crack 2 is corresponding with the runner on fuel cell flow field board, muscle 3 is corresponding with the ridge on fuel cell flow field board, does not affect the diffusion of reactant to membrane electrode direction to make the implantation of measurement inserted sheet.Simultaneously, be arranged in the temperature of the temperature-humidity-heat flow density translocation sensor 4 pairs of fuel battery insides measured on inserted sheet, humidity and heat flow density to measure, the electric signal produced is passed to pin 6 by lead-in wire 5, the data input pin of data acquisition equipment is connected with pin 6 electric signal that can collect and measure inserted sheet and export, and computational analysis goes out fuel battery inside Temperature Distribution, moisture distribution and heat flux distribution.
With reference to shown in Fig. 2, temperature-humidity of the present invention-heat flow density translocation sensor 4 comprises film thermocouple temperature measuring unit, humicap hygrometric unit and film thermal flowmeter calorimetric stream unit, vacuum evaporation coating film method is adopted to make, comprise eight layer films: ground floor is the thick silicon dioxide insulating layer 16 for 0.08-0.12 μm on the muscle 3 of evaporation between the adjacent crack 2 of conductive substrate 1 liang, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 17 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 16, third layer is above bottom electrode aluminium coat 17, apply the high molecular polymer humidity-sensitive medium layer 18 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 19 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 18, layer 5 is the thick copper coating 20 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 6 is the thick nickel coating 21 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 7 is at top electrode aluminium coat 19, above copper coating 20 and nickel coating 21, evaporation thick is the silicon dioxide layer of protection 22 of 0.08-0.12 μm, 8th layer for evaporation thick layer above silicon dioxide coating corresponding to node 34 on film thermal flowmeter be the thick thermoresistance layer 23 of silicon dioxide of 1.2-2.0 μm.
Film thermal flowmeter copper coating, film thermal flowmeter nickel coating, silicon dioxide layer of protection 22 and the thick thermoresistance layer of silicon dioxide 23 constitute complete film thermal flowmeter; to realize the measurement of heat flow density; its measuring principle is: by film thermal flowmeter copper coating and film thermal flowmeter nickel coating head and the tail mutually overlap joint form thermoelectric pile, its lap-joint to form on film thermal flowmeter node under node and film thermal flowmeter.Because node on film thermal flowmeter is different with the silicon dioxide thermoresistance layer thickness on node under film thermal flowmeter, thus make thermoelectric pile produce thermoelectric force, it is relevant to the thickness difference of silicon dioxide thermoresistance layer on upper node and lower node, and heat flow density is relevant to the temperature difference, silicon dioxide thermoresistance layer thickness difference and coefficient of heat conductivity, because silicon dioxide coefficient of heat conductivity is known, therefore the size of heat flow density can be calculated.
Fig. 3 is Making programme figure: 8-15 of single temperature-humidity-heat flow density translocation sensor is each layer mask of temperature-humidity-heat flow density translocation sensor, 16-23 is the temperature-humidity-each rete of heat flow density translocation sensor according to mask fabrication, and 24-31 is the making step of temperature-humidity-heat flow density translocation sensor.First on the muscle 3 of conductive substrate 1 according to silicon dioxide insulating layer mask 8 evaporation layer of silicon dioxide insulation course 16, as the dielectric substrate of sensor, fully to insulate with conductive substrate, thus completing steps 1; Step 2 25 is according to bottom electrode aluminium coat mask 9 evaporation one deck bottom electrode aluminium coat 17 on silicon dioxide insulating layer 16, step 3 26 for apply high molecular polymer humidity-sensitive medium layer 18 according to high molecular polymer humidity-sensitive medium layer mask 10 above bottom electrode aluminium coat 17, and step 4 27 is according to top electrode aluminium coat mask 11 evaporation one deck top electrode aluminium coat 19 above high molecular polymer humidity-sensitive medium layer 18; Wherein, bottom electrode aluminium coat 17, high score polymkeric substance humidity-sensitive medium layer 18 and top electrode aluminium coat 19 constitute humicap, achieve the measurement of humidity; Step 5 28 is according to copper coating mask 12 evaporation one deck copper coating 20 on silicon dioxide insulating layer 16, step 6 29 is according to nickel coating mask 13 evaporation one deck nickel coating 21 on silicon dioxide insulating layer 16, wherein, copper coating 20 includes film thermocouple copper coating and film thermal flowmeter copper coating simultaneously, and nickel coating 21 includes film thermocouple nickel coating and film thermal flowmeter nickel coating simultaneously; Step 7 30 for above institute's copper facing coating 20, nickel coating 21 and top electrode aluminium coat 19 according to silicon dioxide layer of protection mask 14 evaporation layer of silicon dioxide protective seam 22, it is namely as the protective seam of thin film thermoelectric even summation humicap top electrode, again as the thin thermoresistance layer of film thermal flowmeter; Step 8 31 on film thermal flowmeter node 34 to above silicon dioxide coating according to the thick thermoresistance layer 23 of silicon dioxide thick thermoresistance layer mask 15 evaporation layer of silicon dioxide; Form temperature-humidity-heat flow density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside temperature, humidity and heat flow density.
Wherein, the coat of metal material of the humicap top electrode that completes of step 2 25 and step 4 27 and bottom electrode also can select other metal substitutes such as gold, copper, platinum; The shape of humicap top electrode aluminium coat 19 sets according to the shape of mask, and what not only can be shown in Fig. 3 is snakelike, also can be other shapes such as zigzag, pectination.The shape of film thermocouple copper coating and film thermocouple nickel coating is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node 32; The shape of film thermocouple copper coating and film thermocouple nickel coating sets according to the shape of mask, its shape can also be ellipse, arc, waveform, rhombus and other shape such as irregularly shaped, and the shape mutually after overlap joint can be arc, waveform, serrate etc.The shape of film thermal flowmeter copper coating and film thermal flowmeter nickel coating is the quadrilateral be parallel to each other, and head and the tail overlap mutually, and lap-joint forms thermoelectric pile, wherein at least to comprise on a pair film thermal flowmeter node 35 under node 34, film thermal flowmeter; The shape of film thermal flowmeter copper coating and film thermal flowmeter nickel coating sets according to the shape of mask, its shape can also be strip, arc, rhombus etc., and the shape after the first overlap joint mutually can be other shapes such as serrate, arc, waveform, zigzag; The thick thermoresistance layer 23 of silicon dioxide also can be positioned at the top of node 35 under film thermal flowmeter.In thin film thermoelectric even summation film thermal flowmeter, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt etc. to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
The head end of film thermocouple is film thermocouple wiring exit 33, the head end of film thermal flowmeter is film thermal flowmeter wiring exit 36, the head end of humicap is humicap wiring exit 37, and it act as and is conveniently connected with lead-in wire 5, carries out the conduction of electric signal.Film thermocouple wiring exit 33, film thermal flowmeter wiring exit 36 and humicap wiring exit 37 not only can be made into shape as shown in Figure 3, also can be other shapes such as ellipse, rectangle, trapezoidal, triangle, its position can be arranged in the same side of silicon dioxide insulating layer 16, also the both sides being arranged in silicon dioxide insulating layer 16 that can be symmetrical, to facilitate the layout of sensor lead 5 on conductive substrate.
Fig. 4 is the schematic cross-section of temperature-humidity-heat flow density translocation sensor lead, and the width of lead-in wire 5 is 0.1-0.2mm, amplifies in the edge of conductive substrate 1, forms pin 6, is connected to facilitate with external metering circuit and equipment.This lead-in wire adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer 38 of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating 39 of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate 40 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 41 of thick 0.05-0.1 μm; Wherein, at pin 6 place not evaporation lead-in wire silicon dioxide layer of protection.
Fig. 5 is that fuel battery inside temperature-humidity-heat flux distribution crack that interlocks measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner on staggered fluid flow on channel plate and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with temperature-humidity-heat flow density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of temperature-humidity-heat flow density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of temperature-humidity-heat flow density translocation sensor 4 electric signal.
Fig. 6 is that the snakelike single crack of fuel battery inside temperature-humidity-heat flux distribution measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner on snakelike single channel flow field and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with temperature-humidity-heat flow density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of temperature-humidity-heat flow density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of temperature-humidity-heat flow density translocation sensor 4 electric signal.
Fig. 7 is that fuel battery inside temperature-humidity-heat flux distribution snakelike pair of crack measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner in snakelike binary channels flow-field plate and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with temperature-humidity-heat flow density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of temperature-humidity-heat flow density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of temperature-humidity-heat flow density translocation sensor 4 electric signal.
Adopt fuel battery inside of the present invention temperature-humidity-heat flux distribution to measure inserted sheet, synchronous on-line measurement fuel battery inside Temperature Distribution, moisture distribution and heat flux distribution can be realized easily; This measurement mechanism and tested fuel cell independently, do not need to carry out special transformation to the structure of fuel cell, and structure is simple, and easy to make, usable range is wide.
Claims (10)
1. fuel battery inside temperature-humidity-heat flux distribution measures inserted sheet, comprises conductive substrate (1), crack (2), muscle (3), temperature-humidity-heat flow density translocation sensor (4), lead-in wire (5), pilot hole (7); Described crack (2), muscle (3) are arranged on conductive substrate (1), muscle (3) is positioned between two adjacent cracks (2), crack (2) is identical with the shape and size of ridge with fuel cell flow field board upper runner respectively with the shape and size of muscle (3), and crack (2) is corresponding with fuel cell flow field board runner and ridge respectively with the position of muscle (3); It is characterized in that: described temperature-humidity-heat flow density translocation sensor (4) is arranged on muscle (3); One end of lead-in wire (5) connects with the wiring exit of temperature-humidity-heat flow density translocation sensor (4), and the other end extends to the edge of conductive substrate (1) and amplifies formation pin (6); Pilot hole (7) is symmetrical, be evenly arranged on conductive substrate (1) surrounding, in order to be fixed on fuel cell flow field board by conductive substrate (1); During fuel cell assembling, fuel battery inside temperature-humidity-heat flux distribution is measured inserted sheet and is arranged in the middle of fuel cell flow field board and membrane electrode, its be provided with temperature-humidity-heat flow density translocation sensor (4) facing to membrane electrode side also close contact with it;
Described temperature-humidity-heat flow density translocation sensor (4) comprises film thermocouple temperature measuring unit, humicap hygrometric unit and film thermal flowmeter calorimetric stream unit, vacuum evaporation coating film method is adopted to make, comprise eight layer films: ground floor is the thick silicon dioxide insulating layer (16) for 0.08-0.12 μm of evaporation on muscle (3), as dielectric substrate, the second layer is the thick bottom electrode aluminium coat (17) for 1.0-1.2 μm at the upper evaporation of silicon dioxide insulating layer (16), the high molecular polymer humidity-sensitive medium layer (18) of third layer at bottom electrode aluminium coat (17) top coating thick layer being 0.5-1 μm, 4th layer is the thick top electrode aluminium coat (19) for 1.0-1.2 μm at high molecular polymer humidity-sensitive medium layer (18) top evaporation, described top electrode aluminium coat (19), high molecular polymer humidity-sensitive medium layer (18) and bottom electrode aluminium coat (17) constitute humicap, head end is humicap wiring exit (37), and wherein the shape of top electrode aluminium coat (19) is snakelike, layer 5 is the thick copper coating (20) for 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (16), and layer 6 be the nickel coating (21) of 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (16) thick, described copper coating (20) comprises film thermocouple copper coating and film thermal flowmeter copper coating simultaneously, described nickel coating (21) comprises film thermocouple nickel coating and film thermal flowmeter nickel coating simultaneously, the shape of described film thermocouple copper coating and film thermocouple nickel coating is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node (32), and head end is film thermocouple wiring exit (33), the shape of described film thermal flowmeter copper coating and film thermal flowmeter nickel coating is the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint forms thermoelectric pile, comprising node (35) under node (34) on film thermal flowmeter and film thermal flowmeter, head end is film thermal flowmeter wiring exit (36), layer 7 is the thick silicon dioxide layer of protection (22) for 0.08-0.12 μm at top electrode aluminium coat (19), copper coating (20) and nickel coating (21) top evaporation, the 8th layer of be the top evaporation thick layer of silicon dioxide coating corresponding to node (34) on film thermal flowmeter the be thick thermoresistance layer of silicon dioxide (23) of 1.2-2.0 μm,
Described film thermocouple wiring exit (33), film thermal flowmeter wiring exit (36) and humicap wiring exit (37) are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer (16).
2. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the shape of described conductive substrate (1) can be made into square, circular, polygon, trapezoidal, triangle, irregular figure; The shape of the upper crack (2) of conductive substrate (1) can be snakelike crack, parallel crack, poroid crack, staggered crack.
3. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the coat of metal material of described humicap top electrode and bottom electrode, gold, copper, platinum also can be selected to replace.
4. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the shape of described top electrode aluminium coat (19) sets according to the shape of mask, and its shape also can be zigzag, pectination.
5. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: in described thermometric and calorimetric stream unit, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
6. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: in described temperature-humidity-heat flow density translocation sensor (4), the shape of film thermocouple copper coating and film thermocouple nickel coating sets according to the shape of mask, its shape can also be ellipse, arc, waveform, rhombus and irregularly shaped, and the shape mutually after overlap joint can be arc, waveform, serrate; The shape of film thermal flowmeter copper coating and film thermal flowmeter nickel coating also sets according to the shape of mask, and its shape can also be strip, arc, rhombus, and the shape after the first overlap joint mutually can be serrate, arc, waveform, zigzag.
7. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the thick thermoresistance layer of described silicon dioxide (23) also can be positioned at the top of node (35) under film thermal flowmeter.
8. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: in described temperature-humidity-heat flow density translocation sensor (4), film thermal flowmeter at least to comprise on a pair film thermal flowmeter node (35) under node (34), film thermal flowmeter.
9. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the shape of described film thermocouple wiring exit (33), film thermal flowmeter wiring exit (36) and humicap wiring exit (37) also can be ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer (16) that its position can be symmetrical.
10. fuel battery inside temperature-humidity according to claim 1-heat flux distribution measures inserted sheet, it is characterized in that: the width of described lead-in wire (5) is 0.1-0.2mm, amplify in the edge of conductive substrate (1), form pin (6);
Lead-in wire (5) adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer (38) of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating (39) of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate (40) of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection (41) of thick 0.05-0.1 μm; Wherein, at pin (6) place not evaporation lead-in wire silicon dioxide layer of protection.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112432719A (en) * | 2020-11-06 | 2021-03-02 | 中国空气动力研究与发展中心超高速空气动力研究所 | Novel thermopile heat flow sensor |
| CN113035446A (en) * | 2021-03-04 | 2021-06-25 | 上海超导科技股份有限公司 | Superconducting tape structure with quench protection and quench protection method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS606863A (en) * | 1983-06-25 | 1985-01-14 | Unitika Ltd | Measuring device of temperature, humidity, heat flow rate or the like |
| CN102116679A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion piece for measuring transient heat flow density distribution in fuel cell |
| CN102116680A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion sheet for measuring internal temperature distribution of fuel cell |
| CN102157743A (en) * | 2011-02-18 | 2011-08-17 | 北京工业大学 | Transient temperature distribution sensor in fuel cell |
| CN102175339A (en) * | 2011-02-18 | 2011-09-07 | 北京工业大学 | Internal transient film heat-flow sensor of fuel cell |
-
2014
- 2014-11-05 CN CN201410638222.6A patent/CN104406705A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS606863A (en) * | 1983-06-25 | 1985-01-14 | Unitika Ltd | Measuring device of temperature, humidity, heat flow rate or the like |
| CN102116679A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion piece for measuring transient heat flow density distribution in fuel cell |
| CN102116680A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion sheet for measuring internal temperature distribution of fuel cell |
| CN102157743A (en) * | 2011-02-18 | 2011-08-17 | 北京工业大学 | Transient temperature distribution sensor in fuel cell |
| CN102175339A (en) * | 2011-02-18 | 2011-09-07 | 北京工业大学 | Internal transient film heat-flow sensor of fuel cell |
Non-Patent Citations (2)
| Title |
|---|
| 曲远方: "《现代陶瓷材料及技术》", 31 May 2008, 华东理工大学出版社 * |
| 鄂旭等: "《物联网电子技术》", 31 January 2014, 物联网电子技术 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112432719A (en) * | 2020-11-06 | 2021-03-02 | 中国空气动力研究与发展中心超高速空气动力研究所 | Novel thermopile heat flow sensor |
| CN113035446A (en) * | 2021-03-04 | 2021-06-25 | 上海超导科技股份有限公司 | Superconducting tape structure with quench protection and quench protection method |
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