CN104360278A - Fuel cell internal temperature-humidity-heat flux-current density distribution measurement male tab - Google Patents
Fuel cell internal temperature-humidity-heat flux-current density distribution measurement male tab Download PDFInfo
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- CN104360278A CN104360278A CN201410638224.5A CN201410638224A CN104360278A CN 104360278 A CN104360278 A CN 104360278A CN 201410638224 A CN201410638224 A CN 201410638224A CN 104360278 A CN104360278 A CN 104360278A
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Abstract
A fuel cell internal temperature-humidity-heat flux-current density distribution measurement male tab is a measurement device for internal temperature, humidity, heat flux and current density distribution inside a fuel cell. Leaks and ribs corresponding to flow channels and ridges of a fuel cell flow field plate are arranged in a conductive substrate, and temperature-humidity-heat flux-current density synchronous measurement sensors are arranged on the ribs; each temperature-humidity-heat flux-current density synchronous measurement sensor made by a vacuum evaporation coating method comprises tenth layers of films. Leads made by the vacuum evaporation coating method are used for transmitting electrical signals, and are enlarged to form pins when extending to the edges of the flow field plate in order to facilitate connection with eternal data acquisition equipment. The fuel cell internal temperature-humidity-heat flux-current density distribution measurement male tab realizes synchronous online measurement of internal temperature, humidity, heat flux and current density distribution of the fuel cell and can be mounted inside the fuel cell as an independent component, and special modification on the structure of the fuel cell is not required.
Description
Technical field
The present invention relates to a kind of fuel battery inside temperature-humidity-heat flow density-electric current distribution and measure inserted sheet, belong to fuel cell detection technique field.
Background technology
The performance of fuel cell is subject to the interference of many factors, by the distribution situation of monitoring fuel battery inside multiparameter, Parameters variation situation during fuel battery inside performance change can be understood, contribute to the optimization with fuel cell structure design of choosing of fuel cell optimal operating condition.But due to the feature of fuel cell self, inner space is little, compact conformation, causes the measurement of its inner multiparameter comparatively difficult, measurement for multiparameter needs being dismounted for multiple times fuel cell or makes multiple special test fuel cell, adds the complexity of work.
Temperature survey, mostly by implanting thermopair, thermal resistance at fuel battery inside or micro temperature sensor and membrane electrode being made into one, carries out the measurement of temperature; The cost compare of this kind of method making is high, complicated to the transformation of fuel cell, also easily causes the hydraulic performance decline of fuel cell.For moisture measurement, most employing transformation fuel cell structure is measured its humidity to implant humidity sensor, the method needs to carry out special process and remould to the flow-field plate of fuel cell, and difficulty of processing is large, and has certain destructiveness to the sealing of fuel cell; Also have the method adopting photoetching and lithographic technique to make humidity sensor implantation fuel cell measurement humidity, although the method does not need to carry out special transformation to the structure of fuel cell, etching technics is comparatively complicated, and cost is higher.Measurement for heat flow density is also more common in and is measured at fuel battery inside implantation heat flow meter, needs process and remould fuel battery pole board equally.The measuring method of current density mainly contains sub-battery method, film-electrode method, magnet ring group method etc., to the transformation more complicated of fuel cell, uses inconvenience.If measure the temperature of fuel battery inside, humidity, heat flow density and current density respectively by classic method, then need to carry out very complicated transformation to fuel cell, or being dismounted for multiple times fuel cell implantation different sensors is measured, this will make workload become very large, also be unfavorable for the stable of fuel battery performance.
The present invention arranges temperature-humidity-heat flow density-current density translocation sensor on the muscle of conductive substrate, it can be used as individual member and is arranged between fuel cell flow field board and membrane electrode, do not affect reactant to spread to membrane electrode direction, achieve synchro measure fuel battery inside Temperature Distribution, moisture distribution, heat flux distribution and electric current distribution, without the need to carrying out special transformation to the structure of fuel cell, decrease the dismounting number of times of fuel cell, ensure that the stable of fuel battery performance.
Summary of the invention
The object of the present invention is to provide a kind of device that can carry out synchronous on-line measurement to fuel battery inside Temperature Distribution, moisture distribution, heat flux distribution and electric current distribution.This device is independent of tested fuel cell, and structure is simple, easy to make, without the need to carrying out special transformation to fuel battery inside structure, decreases the dismounting number of times of fuel cell, ensure that the stable of fuel battery performance.
For realizing above-mentioned technical purpose, technical scheme of the present invention is as follows: fuel battery inside temperature-humidity-heat flow density-electric current distribution measures inserted sheet, comprises conductive substrate 1, crack 2, muscle 3, temperature-humidity-heat flow density-current density translocation sensor 4, lead-in wire 5, pilot hole 7; Described crack 2, muscle 3 are arranged on conductive substrate 1, muscle 3 is between two adjacent cracks 2, crack 2 is identical with the shape and size of ridge with fuel cell flow field board upper runner respectively with the shape and size of muscle 3, and crack 2 is corresponding with fuel cell flow field board runner and ridge respectively with the position of muscle 3; Described temperature-humidity-heat flow density-current density translocation sensor 4 is arranged on muscle 3; One end of lead-in wire 5 connects with the wiring exit of temperature-humidity-heat flow density-current density translocation sensor 4, and the other end extends to the edge of conductive substrate 1 and amplifies formation pin 6; Pilot hole 7 is symmetrical, be evenly arranged on conductive substrate 1 surrounding, in order to be fixed on fuel cell flow field board by conductive substrate 1; During fuel cell assembling, fuel battery inside temperature-humidity-heat flow density-electric current distribution is measured inserted sheet and is arranged in the middle of fuel cell flow field board and membrane electrode, its be provided with temperature-humidity-heat flow density-current density translocation sensor 4 facing to membrane electrode side also close contact with it.
Described temperature-humidity-heat flow density-current density translocation sensor 4 comprises film thermocouple temperature measuring unit, humicap hygrometric unit, film thermal flowmeter calorimetric stream unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to make, comprise ten layer films: ground floor is the thick silicon dioxide insulating layer 18 for 0.08-0.12 μm of evaporation on muscle 3, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 19 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 18, third layer is above bottom electrode aluminium coat 19, apply the high molecular polymer humidity-sensitive medium layer 20 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 19 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 18, described top electrode aluminium coat 21, high molecular polymer humidity-sensitive medium layer 20 and bottom electrode aluminium coat 19 constitute humicap, and head end is humicap wiring exit 43, and wherein the shape of top electrode aluminium coat 21 is snakelike, layer 5 is the thick copper coating 22 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 18, and layer 6 is the thick nickel coating 23 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 18, described copper coating 22 comprises film thermocouple copper coating and film thermal flowmeter copper coating simultaneously, described nickel coating 23 comprises film thermocouple nickel coating and film thermal flowmeter nickel coating simultaneously, the shape of described film thermocouple copper coating and film thermocouple nickel coating is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node 38, and head end is film thermocouple wiring exit 39, the shape of described film thermal flowmeter copper coating and film thermal flowmeter nickel coating is the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint forms thermoelectric pile, and comprising node 41 under node 40 on film thermal flowmeter and film thermal flowmeter, head end is film thermal flowmeter wiring exit 42, layer 7 is at copper coating 22, the top evaporation of nickel coating 23 and top electrode aluminium coat 19 thick is the silicon dioxide layer of protection 24 of 0.08-0.12 μm, 8th layer on film thermal flowmeter node 40 be the thick thermoresistance layer 25 of silicon dioxide of 1.2-2.0 μm to evaporation thick layer above silicon dioxide coating, 9th layer by above copper coating 22 and the right silicon dioxide layer of protection of nickel coating 23 and thick thermoresistance layer evaporation thick layer be that the current density of 1.5-2.0 μm measures copper coating 26, tenth layer for measuring the current density measurement gold plate 27 that evaporation thick layer above copper coating 26 is 0.1-0.12 μm in current density, described current density measures copper coating 26 and current density measurement gold plate 27 is overlapped, forms current density and measures the coat of metal 44, and head end is that current density measures coat of metal wiring exit 45.
Described film thermocouple wiring exit 39, film thermal flowmeter wiring exit 42, humicap wiring exit 43 and current density are measured coat of metal wiring exit 45 and are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer 18.
The shape of described conductive substrate 1 can be made into square, circular, polygon, trapezoidal, triangle, irregular figure; On conductive substrate 1, the shape of crack 2 can be snakelike crack, parallel crack, poroid crack, staggered crack.
The coat of metal material of top electrode and bottom electrode in described humicap, also can select gold, copper, platinum to replace; In described thin film thermoelectric even summation film thermal flowmeter, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
The shape of described top electrode aluminium coat 21 sets according to the shape of mask, and its shape also can be zigzag, pectination.
In described temperature-humidity-heat flow density-current density translocation sensor 4, the shape of film thermocouple copper coating and film thermocouple nickel coating sets according to the shape of mask, its shape can also be ellipse, arc, waveform, rhombus and irregularly shaped, and the shape mutually after overlap joint can be arc, waveform, serrate.
In described temperature-humidity-heat flow density-current density translocation sensor 4, the shape of film thermal flowmeter copper coating and film thermal flowmeter nickel coating sets according to the shape of mask, its shape can also be strip, arc, rhombus, and the shape after head and the tail overlap mutually can be serrate, arc, waveform, zigzag.
Node 41 under node 40, film thermal flowmeter is at least comprised on a pair film thermal flowmeter in the film thermal flowmeter of described calorimetric stream unit; The thick thermoresistance layer 25 of silicon dioxide also can be positioned at the top of node 41 under film thermal flowmeter.
The shape that described current density measures copper coating 26 and current density measurement gold plate 27 sets according to the shape of mask, can be rectangle, ellipse, circle, triangle, trapezoidal, irregular figure.
The shape that described film thermocouple wiring exit 39, film thermal flowmeter wiring exit 42, humicap wiring exit 43 and current density measure coat of metal wiring exit 45 also can be other shapes such as ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer 18 that its position also can be relative.
The width of described lead-in wire 5 is 0.1-0.2mm, amplifies in the edge of conductive substrate 1, forms pin 6.
Lead-in wire 5 adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer 46 of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating 47 of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate 48 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 49 of thick 0.05-0.1 μm; Wherein, at pin 6 place not evaporation lead-in wire silicon dioxide layer of protection.
Compared with prior art, the present invention has following beneficial effect.
The present invention can realize the synchro measure to fuel battery inside Temperature Distribution, moisture distribution, heat flux distribution and electric current distribution while not affecting fuel cell operation; This device can be used as independently Components installation, in the middle of fuel cell flow field board and membrane electrode, not to be needed to carry out special transformation to other structures such as fuel cell flow field board or pole plate, reduces by the impact of the implantation of measurement mechanism on fuel battery performance; Meanwhile, this apparatus structure is simple, easy to make, applied widely, can adapt to the fuel cell of various flow channel shape, as parallel fluid channels, serpentine flow path, staggered runner or other abnormal flow road shape.
Accompanying drawing explanation
Fig. 1 is that the parallel crack of fuel battery inside temperature-humidity-heat flow density-electric current distribution measures the subjective schematic diagram of inserted sheet;
Fig. 2 is the subjective schematic diagram that fuel battery inside temperature-humidity-heat flow density-electric current distribution measures single temperature-humidity-heat flow density-current density translocation sensor on inserted sheet;
Fig. 3 is the Making programme figure that fuel battery inside temperature-humidity-heat flow density-electric current distribution measures single temperature-humidity-heat flow density-current density translocation sensor on inserted sheet;
Fig. 4 is the subjective schematic diagram in cross section that fuel battery inside temperature-humidity-heat flow density-electric current distribution measures temperature-humidity-heat flow density-current density translocation sensor lead on inserted sheet;
Fig. 5 is that fuel battery inside temperature-humidity-heat flow density-electric current distribution crack that interlocks measures the subjective schematic diagram of inserted sheet;
Fig. 6 is that the snakelike single crack of fuel battery inside temperature-humidity-heat flow density-electric current distribution measures the subjective schematic diagram of inserted sheet;
Fig. 7 is that fuel battery inside temperature-humidity-snakelike pair of heat flow density-electric current distribution crack measures the subjective schematic diagram of inserted sheet;
In figure, 1, conductive substrate, 2, crack, 3, muscle, 4, temperature-humidity-heat flow density-current density translocation sensor, 5, lead-in wire, 6, pin, 7, pilot hole;
8-17 is each layer mask of temperature-humidity-heat flow density-current density translocation sensor: 8, silicon dioxide insulating layer mask, 9, bottom electrode aluminium coat mask, 10, high molecular polymer humidity-sensitive medium layer mask, 11, top electrode aluminium coat mask, 12, copper coating mask, 13, nickel coating mask, 14, silicon dioxide layer of protection mask, 15, the thick thermoresistance layer mask of silicon dioxide, 16, current density measures copper coating mask, 17, current density measures gold plate mask;
18-27 is the temperature-humidity-heat flow density-each rete of current density translocation sensor according to mask fabrication: 18, silicon dioxide insulating layer, 19, bottom electrode aluminium coat, 20, high molecular polymer humidity-sensitive medium layer, 21, top electrode aluminium coat, 22, copper coating, 23, nickel coating, 24, silicon dioxide layer of protection, 25, the thick thermoresistance layer of silicon dioxide, 26, current density measure copper coating, 27, current densities measure gold plate;
28-37 is the making step of temperature-humidity-heat flow density-current density translocation sensor: 28, step one, 29, step 2,30, step 3,31, step 4,32, step 5,33, step 6,34, step 7,35, step 8,36 step 9,37, step 10;
38, film thermocouple hot junction node, 39, film thermocouple wiring exit, 40, node on film thermal flowmeter, 41, node under film thermal flowmeter, 42, film thermal flowmeter wiring exit, 43, humicap wiring exit, 44, current density measures the coat of metal, 45, current density measures coat of metal wiring exit;
46, go between silicon dioxide insulating layer, 47, lead-in wire copper coating, 48, lead-in wire gold plate, 49, lead-in wire silicon dioxide layer of protection.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to shown in Fig. 1, fuel battery inside temperature-humidity-heat flow density of the present invention-electric current distribution measures inserted sheet, comprises conductive substrate 1, crack 2, muscle 3, temperature-humidity-heat flow density-current density translocation sensor 4, lead-in wire 5, pin 6, pilot hole 7; Crack 2 and muscle 3 are arranged on conductive substrate 1, and it is identical in shape and size with ridge with the runner on tested fuel cell flow field board, and position is mutually corresponding, and muscle 3 is furnished with temperature-humidity-heat flow density-current density translocation sensor 4; 5 one end that go between are connected with temperature-humidity-heat flow density-current density translocation sensor 4, and the other end extends to the edge of conductive substrate 1, for transmitting the electric signal that temperature-humidity-heat flow density-current density translocation sensor 4 produces; Pin 6 is arranged in the edge of conductive substrate 1 and is connected with lead-in wire 5; Be furnished with pilot hole 7 in the surrounding of conductive substrate, facilitate this temperature-humidity-heat flow density-electric current distribution measure the location of inserted sheet and fuel cell flow field board and fix.For the mating shapes with tested fuel cell, the shape of conductive substrate 1 can be made into square, circular, polygon, trapezoidal, triangle etc.During measurement, this measurement inserted sheet is implanted between fuel cell flow field board and membrane electrode assembly, be fixed on fuel cell flow field board by pilot hole 7, be furnished with temperature-humidity-heat flow density-current density translocation sensor 4 facing to fuel cell membrane electrode assembly direction, and with membrane electrode assembly close contact, crack 2 is corresponding with the runner on fuel cell flow field board, muscle 3 is corresponding with the ridge on fuel cell flow field board, does not affect the diffusion of reactant to membrane electrode direction to make the implantation of measurement inserted sheet.Simultaneously, be arranged in the temperature of the temperature-humidity-heat flow density-current density translocation sensor 4 pairs of fuel battery insides measured on inserted sheet, humidity, heat flow density and current density to measure, the electric signal produced is passed to pin 6 by lead-in wire 5, the data input pin of data acquisition equipment is connected with pin 6 electric signal that can collect and measure inserted sheet and export, and computational analysis goes out fuel battery inside Temperature Distribution, moisture distribution, heat flux distribution and electric current distribution.
With reference to shown in Fig. 2, temperature-humidity-heat flow density of the present invention-current density translocation sensor 4 comprises film thermocouple temperature measuring unit, humicap hygrometric unit, film thermal flowmeter calorimetric stream unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to be made, comprise ten layer films: ground floor is the thick silicon dioxide insulating layer 18 for 0.08-0.12 μm on the muscle 3 of evaporation between the adjacent crack 2 of conductive substrate 1 liang, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 19 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 18, third layer is above bottom electrode aluminium coat 19, apply the high molecular polymer humidity-sensitive medium layer 20 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 21 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 20, layer 5 is the thick copper coating 22 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 18, layer 6 is the thick nickel coating 23 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 18, layer 7 is at copper coating 22, the top evaporation of nickel coating 23 and top electrode aluminium coat 21 thick is the silicon dioxide layer of protection 24 of 0.08-0.12 μm, 8th layer on film thermal flowmeter node 40 be the thick thermoresistance layer 25 of silicon dioxide of 1.2-2.0 μm to evaporation thick layer above silicon dioxide coating, 9th layer by above copper coating 22 and the right silicon dioxide layer of protection of nickel coating 23 and thick thermoresistance layer evaporation thick layer be that the current density of 1.5-2.0 μm measures copper coating 26, tenth layer for measuring the current density measurement gold plate 27 that evaporation thick layer above copper coating 26 is 0.1-0.12 μm in current density, because copper and gold are the good conductor of heat, coefficient of heat conductivity is very high, in addition the current density of evaporation is measured copper coating and current density to measure gold plate all very thin, and therefore evaporation is measured copper coating and current density in the current density on film thermal flowmeter and film thermocouple upper strata and measured gold plate and can not cause interference to the measuring accuracy of film thermal flowmeter and film thermocouple.
Film thermal flowmeter copper coating, film thermal flowmeter nickel coating, silicon dioxide layer of protection 24 and the thick thermoresistance layer of silicon dioxide 25 constitute complete film thermal flowmeter, to realize the measurement of heat flow density, its measuring principle is: mutually overlapped by film thermal flowmeter copper coating and film thermal flowmeter nickel coating head and the tail and form thermoelectric pile, because node on film thermal flowmeter is different with the silicon dioxide thermoresistance layer thickness on node under film thermal flowmeter, thus make thermoelectric pile produce thermoelectric force, it is relevant to the thickness difference of silicon dioxide thermoresistance layer on upper node and lower node, and heat flow density and the temperature difference, silicon dioxide thermoresistance layer thickness difference and coefficient of heat conductivity are correlated with, because silicon dioxide coefficient of heat conductivity is known, therefore the size of heat flow density can be calculated.
Fig. 3 is Making programme figure: 8-17 of single temperature-humidity-heat flow density-current density translocation sensor is each layer mask of temperature-humidity-heat flow density-current density translocation sensor, 18-27 is the temperature-humidity-heat flow density-each rete of current density translocation sensor according to mask fabrication, and 28-37 is the making step of temperature-humidity-heat flow density-current density translocation sensor.First on the muscle 3 of conductive substrate 1 according to silicon dioxide insulating layer mask 8 evaporation layer of silicon dioxide insulation course 18, as the dielectric substrate of sensor, fully to insulate with conductive substrate, thus completing steps 1; Step 2 29 is according to bottom electrode aluminium coat mask 9 evaporation one deck bottom electrode aluminium coat 19 on silicon dioxide insulating layer 18, step 3 30 for apply one deck high molecular polymer humidity-sensitive medium layer 20 according to high molecular polymer humidity-sensitive medium layer mask 10 above bottom electrode aluminium coat 19, and step 4 31 is according to top electrode aluminium coat mask 11 evaporation one deck top electrode aluminium coat 21 above high molecular polymer humidity-sensitive medium layer 20; Wherein, bottom electrode aluminium coat 19, high score polymkeric substance humidity-sensitive medium 20 and top electrode aluminium coat 21 constitute humicap, achieve the measurement of humidity; Step 5 32 is according to copper coating mask 12 evaporation one deck copper coating 22 on silicon dioxide insulating layer 18, and step 6 33 is according to nickel coating mask 13 evaporation one deck nickel coating 23 on silicon dioxide insulating layer 18; Wherein, copper coating 22 includes film thermocouple copper coating and film thermal flowmeter copper coating simultaneously, and nickel coating 23 includes film thermocouple nickel coating and film thermal flowmeter nickel coating simultaneously; Step 7 34 for above institute's copper facing coating 22, nickel coating 23 and top electrode aluminium coat 21 according to silicon dioxide layer of protection mask 14 evaporation layer of silicon dioxide protective seam 24, it is namely as the protective seam of thin film thermoelectric even summation humicap top electrode, again as the thin thermoresistance layer of film thermal flowmeter; Step 8 35 on film thermal flowmeter node 40 to above silicon dioxide coating according to the thick thermoresistance layer 25 of silicon dioxide thick thermoresistance layer mask 15 evaporation layer of silicon dioxide; Wherein film thermal flowmeter copper coating, film thermal flowmeter nickel coating, silicon dioxide layer of protection 24 and the thick thermoresistance layer of silicon dioxide 25 constitute complete film thermal flowmeter, achieve the measurement of heat flow density; Step 9 36 is by above copper coating 22 and the right silicon dioxide coating of nickel coating 23, copper coating mask 16 is measured according to current density, evaporation one Lyer current density measures copper coating 26, and step 10 37 is measure above copper coating 26 in current density to measure gold plate mask 17 evaporation one Lyer current density measurement gold plate 27 according to current density; Wherein current density is measured copper coating 26 and current density to measure gold plate 27 overlapped, constitutes current density and measures the coat of metal 44, achieve the measurement of current density; Form temperature-humidity-heat flow density-current density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside temperature, humidity, heat flow density and current density.
Wherein, the coat of metal material of the humicap top electrode that step 2 29 and step 4 31 complete and bottom electrode also can select other metal substitutes such as gold, copper, platinum, wherein, it is snakelike that the shape of top electrode aluminium coat 21 not only can be shown in Fig. 3, also can be other shapes such as zigzag, pectination.The shape of film thermocouple copper coating and film thermocouple nickel coating is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node 38; The shape of film thermocouple copper coating and film thermocouple nickel coating sets according to the shape of mask, its shape can also be ellipse, arc, waveform, rhombus and other shape such as irregularly shaped, and the shape mutually after overlap joint can be arc, waveform, serrate etc.The shape of film thermal flowmeter copper coating and film thermal flowmeter nickel coating is the quadrilateral be parallel to each other, and head and the tail overlap mutually, and lap-joint forms thermoelectric pile, wherein at least to comprise on a pair film thermal flowmeter node 41 under node 40, film thermal flowmeter; The shape of film thermal flowmeter copper coating and film thermal flowmeter nickel coating sets according to the shape of mask, its shape can also be strip, arc, rhombus etc., and the shape after film head and the tail overlap mutually can be other shapes such as serrate, arc, waveform, zigzag; The thick thermoresistance layer 25 of silicon dioxide also can be positioned at the top of node 41 under film thermal flowmeter.In thin film thermoelectric even summation film thermal flowmeter, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt etc. to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.The shape that the current density that step 9 36 and step 10 37 complete measures copper coating 26 and current density measurement gold plate 27 also sets according to the shape of mask, its shape not only can be rectangle as shown in Figure 3, also can be other shapes such as ellipse, circle, triangle, trapezoidal, irregular figure.
The head end of film thermocouple is film thermocouple wiring exit 39, the head end of film thermal flowmeter is film thermal flowmeter wiring exit 42, the head end of humicap is humicap wiring exit 43, the head end that current density measures the coat of metal is that current density measures coat of metal wiring exit 45, it act as and is conveniently connected with lead-in wire 5, carries out the conduction of electric signal.Film thermocouple wiring exit 39, film thermal flowmeter wiring exit 42, humicap wiring exit 43 and current density measurement coat of metal wiring exit 45 not only can be made into shape as shown in Figure 3, also can be other shapes such as ellipse, rectangle, trapezoidal, triangle, its position can be arranged in the same side of silicon dioxide insulating layer 18, also the both sides being arranged in silicon dioxide insulating layer 18 that can be relative, to facilitate the layout of sensor lead 5 on conductive substrate.
Fig. 4 is the schematic cross-section of temperature-humidity-heat flow density-current density translocation sensor lead, and the width of this lead-in wire 5 is 0.1-0.2mm, amplifies in the edge of conductive substrate 1, forms pin 6, is connected to facilitate with external metering circuit and equipment.This lead-in wire adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer 46 of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating 47 of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate 48 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 49 of thick 0.05-0.1 μm; Wherein, at pin 6 place not evaporation lead-in wire silicon dioxide layer of protection.
Fig. 5 is that fuel battery inside temperature-humidity-heat flow density-electric current distribution crack that interlocks measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner on staggered fluid flow on channel plate and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with temperature-humidity-heat flow density-current density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of temperature-humidity-heat flow density-current density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of temperature-humidity-heat flow density-current density translocation sensor 4 electric signal.
Fig. 6 is that the snakelike single crack of fuel battery inside temperature-humidity-heat flow density-electric current distribution measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner on snakelike single channel flow field and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with temperature-humidity-heat flow density-current density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of temperature-humidity-heat flow density-current density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of temperature-humidity-heat flow density-current density translocation sensor 4 electric signal.
Fig. 7 is that fuel battery inside temperature-humidity-snakelike pair of heat flow density-electric current distribution crack measures the subjective schematic diagram of inserted sheet, crack 2 on its conductive substrate 1 and muscle 3 and the runner in snakelike binary channels flow-field plate and ridge mutually corresponding, muscle 3 between two adjacent cracks 2 is furnished with temperature-humidity-heat flow density-current density translocation sensor 4, one end of lead-in wire 5 connects with the wiring exit of temperature-humidity-heat flow density-current density translocation sensor 4, the other end extends to the outward flange of conductive substrate 1 and amplifies formation pin 6, for the transmission of temperature-humidity-heat flow density-current density translocation sensor 4 electric signal.
Adopt fuel battery inside of the present invention temperature-humidity-heat flow density-electric current distribution to measure inserted sheet, the synchronous on-line measurement of fuel battery inside moisture distribution, heat flux distribution and electric current distribution can be realized; This measurement mechanism can be used as individual member and is installed on fuel battery inside, does not need to carry out special transformation to the structure of fuel cell, and structure is simple, easy to make, and usable range is wide, is adapted to the fuel cell of multiple flow channel shape.
Claims (10)
1. fuel battery inside temperature-humidity-heat flow density-electric current distribution measures inserted sheet, comprises conductive substrate (1), crack (2), muscle (3), temperature-humidity-heat flow density-current density translocation sensor (4), lead-in wire (5), pilot hole (7); Described crack (2), muscle (3) are arranged on conductive substrate (1), muscle (3) is positioned between two adjacent cracks (2), crack (2) is identical with the shape and size of ridge with fuel cell flow field board upper runner respectively with the shape and size of muscle (3), and crack (2) is corresponding with fuel cell flow field board runner and ridge respectively with the position of muscle (3); It is characterized in that: described temperature-humidity-heat flow density-current density translocation sensor (4) is arranged on muscle (3); One end of lead-in wire (5) connects with the wiring exit of temperature-humidity-heat flow density-current density translocation sensor (4), and the other end extends to the edge of conductive substrate (1) and amplifies formation pin (6); Pilot hole (7) is symmetrical, be evenly arranged on conductive substrate (1) surrounding, in order to be fixed on fuel cell flow field board by conductive substrate (1); During fuel cell assembling, fuel battery inside temperature-humidity-heat flow density-electric current distribution is measured inserted sheet and is arranged in the middle of fuel cell flow field board and membrane electrode, its be provided with temperature-humidity-heat flow density-current density translocation sensor (4) facing to membrane electrode side also close contact with it;
Described temperature-humidity-heat flow density-current density translocation sensor (4) comprises film thermocouple temperature measuring unit, humicap hygrometric unit, film thermal flowmeter calorimetric stream unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to make, comprise ten layer films: ground floor is the thick silicon dioxide insulating layer (18) for 0.08-0.12 μm of evaporation on muscle (3), as dielectric substrate, the second layer is the thick bottom electrode aluminium coat (19) for 1.0-1.2 μm at the upper evaporation of silicon dioxide insulating layer (18), the high molecular polymer humidity-sensitive medium layer (20) of third layer at bottom electrode aluminium coat (19) top coating thick layer being 0.5-1 μm, 4th layer is the thick top electrode aluminium coat (19) for 1.0-1.2 μm at high molecular polymer humidity-sensitive medium layer (18) top evaporation, described top electrode aluminium coat (21), high molecular polymer humidity-sensitive medium layer (20) and bottom electrode aluminium coat (19) constitute humicap, head end is humicap wiring exit (43), and wherein the shape of top electrode aluminium coat (21) is snakelike, layer 5 is the thick copper coating (22) for 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (18), and layer 6 be the nickel coating (23) of 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (18) thick, described copper coating (22) comprises film thermocouple copper coating and film thermal flowmeter copper coating simultaneously, described nickel coating (23) comprises film thermocouple nickel coating and film thermal flowmeter nickel coating simultaneously, the shape of described film thermocouple copper coating and film thermocouple nickel coating is strip, and mesophase spherule lap connects, and lap-joint forms film thermocouple hot junction node (38), and head end is film thermocouple wiring exit (39), the shape of described film thermal flowmeter copper coating and film thermal flowmeter nickel coating is the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint forms thermoelectric pile, comprising node (41) under node (40) on film thermal flowmeter and film thermal flowmeter, head end is film thermal flowmeter wiring exit (42), layer 7 is in copper coating (22), the top evaporation of nickel coating (23) and top electrode aluminium coat (19) thick is the silicon dioxide layer of protection (24) of 0.08-0.12 μm, 8th layer on film thermal flowmeter node (40) be the thick thermoresistance layer of silicon dioxide (25) of 1.2-2.0 μm to the top evaporation thick layer of silicon dioxide coating, measure copper coating (26) by the current density being 1.5-2.0 μm at the top evaporation thick layer of copper coating (22) and the right silicon dioxide layer of protection of nickel coating (23) and thick thermoresistance layer for 9th layer, tenth layer of current density measurement gold plate (27) at the top evaporation thick layer of current density measurement copper coating (26) being 0.1-0.12 μm, described current density measures copper coating (26) and current density measurement gold plate (27) is overlapped, form current density and measure the coat of metal (44), head end is that current density measures coat of metal wiring exit (45),
Described film thermocouple wiring exit (39), film thermal flowmeter wiring exit (42), humicap wiring exit (43) and current density are measured coat of metal wiring exit (45) and are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer (18).
2. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: the shape of described conductive substrate (1) can be made into square, circular, polygon, trapezoidal, triangle, irregular figure; The shape of the upper crack (2) of conductive substrate (1) can be snakelike crack, parallel crack, poroid crack, staggered crack.
3. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: the coat of metal material of top electrode and bottom electrode in described humicap, gold, copper, platinum also can be selected to replace; In described thin film thermoelectric even summation film thermal flowmeter, the simple metal coating be made up of copper and mickel can also select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
4. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: the shape of described top electrode aluminium coat (21) sets according to the shape of mask, and its shape also can be zigzag, pectination.
5. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: in described temperature-humidity-heat flow density-current density translocation sensor (4), the shape of film thermocouple copper coating and film thermocouple nickel coating sets according to the shape of mask, its shape can also be ellipse, arc, waveform, rhombus and irregularly shaped, and the shape mutually after overlap joint can be arc, waveform, serrate.
6. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: in described temperature-humidity-heat flow density-current density translocation sensor (4), the shape of film thermal flowmeter copper coating and film thermal flowmeter nickel coating sets according to the shape of mask, its shape can also be strip, arc, rhombus, and the shape after head and the tail overlap mutually can be serrate, arc, waveform, zigzag.
7. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: at least to comprise on a pair film thermal flowmeter node (41) under node (40), film thermal flowmeter in the film thermal flowmeter of described calorimetric stream unit; The thick thermoresistance layer of silicon dioxide (25) also can be positioned at the top of node (41) under film thermal flowmeter.
8. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: the shape that described current density measures copper coating (26) and current density measurement gold plate (27) sets according to the shape of mask, can be rectangle, ellipse, circle, triangle, trapezoidal, irregular figure.
9. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: the shape that described film thermocouple wiring exit (39), film thermal flowmeter wiring exit (42), humicap wiring exit (43) and current density measure coat of metal wiring exit (45) also can be other shapes such as ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer (18) that its position also can be relative.
10. fuel battery inside temperature-humidity-heat flow density according to claim 1-electric current distribution measures inserted sheet, it is characterized in that: the width of described lead-in wire (5) is 0.1-0.2mm, amplify in the edge of conductive substrate (1), form pin (6);
Lead-in wire (5) adopts the four-level membrane of vacuum evaporation coating film method evaporation to form: ground floor is the lead-in wire silicon dioxide insulating layer (46) of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating (47) of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate (48) of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection (49) of thick 0.05-0.1 μm; Wherein, at pin (6) place not evaporation lead-in wire silicon dioxide layer of protection.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040095127A1 (en) * | 2002-10-28 | 2004-05-20 | Masahiro Mohri | Apparatus for measuring current density of fuel cell |
| CN1664603A (en) * | 2005-03-28 | 2005-09-07 | 西安交通大学 | Current density distribution measuring shim inside fuel cells |
| CN101324641A (en) * | 2008-04-15 | 2008-12-17 | 西安交通大学 | Flow field plate for measuring fuel battery local current density |
| CN102116680A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion sheet for measuring internal temperature distribution of fuel cell |
| CN102116679A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion piece for measuring transient heat flow density distribution in fuel cell |
| CN102175339A (en) * | 2011-02-18 | 2011-09-07 | 北京工业大学 | Internal transient film heat-flow sensor of fuel cell |
| CN103245920A (en) * | 2013-04-10 | 2013-08-14 | 同济大学 | Multifunctional fuel cell on-line testing printed circuit board |
| CN103576095A (en) * | 2012-08-02 | 2014-02-12 | 同济大学 | System and method for detecting internal performance of fuel cell in real time |
| CN103675694A (en) * | 2012-09-26 | 2014-03-26 | 同济大学 | Fuel cell pile online regional detection system and method |
-
2014
- 2014-11-05 CN CN201410638224.5A patent/CN104360278A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040095127A1 (en) * | 2002-10-28 | 2004-05-20 | Masahiro Mohri | Apparatus for measuring current density of fuel cell |
| CN1664603A (en) * | 2005-03-28 | 2005-09-07 | 西安交通大学 | Current density distribution measuring shim inside fuel cells |
| CN101324641A (en) * | 2008-04-15 | 2008-12-17 | 西安交通大学 | Flow field plate for measuring fuel battery local current density |
| CN102116680A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion sheet for measuring internal temperature distribution of fuel cell |
| CN102116679A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion piece for measuring transient heat flow density distribution in fuel cell |
| CN102175339A (en) * | 2011-02-18 | 2011-09-07 | 北京工业大学 | Internal transient film heat-flow sensor of fuel cell |
| CN103576095A (en) * | 2012-08-02 | 2014-02-12 | 同济大学 | System and method for detecting internal performance of fuel cell in real time |
| CN103675694A (en) * | 2012-09-26 | 2014-03-26 | 同济大学 | Fuel cell pile online regional detection system and method |
| CN103245920A (en) * | 2013-04-10 | 2013-08-14 | 同济大学 | Multifunctional fuel cell on-line testing printed circuit board |
Non-Patent Citations (1)
| Title |
|---|
| 曲远方: "《现代陶瓷材料及技术》", 31 May 2008 * |
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