CN104359572B - Fuel cell internal temperature-heat flux-current density distribution measurement male tab - Google Patents
Fuel cell internal temperature-heat flux-current density distribution measurement male tab Download PDFInfo
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- CN104359572B CN104359572B CN201410636188.9A CN201410636188A CN104359572B CN 104359572 B CN104359572 B CN 104359572B CN 201410636188 A CN201410636188 A CN 201410636188A CN 104359572 B CN104359572 B CN 104359572B
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Abstract
A fuel cell internal temperature-heat flux-current density distribution measurement male tab is a measurement device for internal temperature, heat flux and current density distribution inside a fuel cell. A temperature-heat flux-current density synchronous measurement sensor is arranged on a rib between every two adjacent leaks of a conductive substrate; the leaks and the ribs on the conductive substrate correspond to flow channels and ribs on a fuel cell flow field plate, and electrical signals are transmitted to an external measurement circuit and data acquisition equipment through leads; each temperature-heat flux-current density synchronous measurement sensor is composed of seven layers of films evaporated by a vacuum evaporation coating method. The fuel cell internal temperature-heat flux-current density distribution measurement male tab realizes synchronous online measurement of internal temperature, heat flux and current density distribution of the fuel cell, can be mounted inside the fuel cell as an independent component, does not require special modification on the structure of the fuel cell, and is adaptable to fuel cell flow field plates with parallel flow channels, S-shaped flow channels, staggered flow channels or channels of other shapes.
Description
Technical field
The present invention relates to a kind of fuel battery inside temperature-heat flow density-electric current distribution measures inserted sheet, belong to fuel
Battery detecting technical field.
Background technology
The parameter of fuel battery inside can reflect the situation of change of heat and mass in fuel cell operation, for
Grasp fuel cell optimal operating condition and optimizing heat and mass transfer process has important meaning.Many research worker are directed to fuel electricity
Temperature within pond, heat flow density and electric current density expand the measurement of multiple methods, to explore in fuel cell operation
The mechanism of heat and mass and the method that raising fuel battery performance need to be looked for.
The uniformity coefficient in fuel battery inside temperature field largely has influence on electrification on fuel cell membrane electrode surface
Learn the uniformity degree of reaction, thus having had influence on the performance of fuel cell;The whether reasonable of fuel cell structure design can be right
The release of its internal heat produces important impact, and the quality of heat transfer also can affect the distribution in temperature field;In fuel cell
The local current densities in portion can reflect the factors such as reactant flow, water out behavior, contact resistance to fuel battery performance
Impact, can predict the water logging situation of fuel battery inside by measuring the local current densities of fuel battery inside, and gas divides
Sorrow of separation condition;It can therefore be seen that temperature, heat flow density and electric current density have very big shadow to the heat and mass of fuel battery inside
Ring, contribute to finding the approach of enhanced fuel inside battery heat and mass by measuring this parameter, improve the performance of fuel cell.
The measurement of temperature, traditional method is mainly by micro temperature sensor, thermoelectricity occasionally thermal resistance embedment fuel electricity
In the runner in pond, or it is integrated with the membrane electrode hot pressing of fuel cell, not only processing and fabricating is difficult for these methods, and thermometric is first
The implantation of part also destroys the integrally-built air-tightness of fuel cell, or even reduces the active area of membrane electrode, and then affects
Arrive the performance of fuel cell;Electric current density measures, and main method has sub- battery method, local film-electrode method, magnet ring group method etc., this
A little methods need the pole plate to fuel cell or flow-field plate to be processed transforming or split membrane electrode assembly, difficulty of processing mostly
Greatly, complex process, cost of manufacture are high.And the parameter of fuel battery inside is measured one by one, undoubtedly increased measurement work
Complexity and workload, the stable of fuel battery performance is also had a great impact, therefore making being capable of same pacing simultaneously
The measurement apparatus of amount fuel battery inside many kinds of parameters are necessary.
Fuel battery inside temperature-heat flow density-electric current distribution measurement the inserted sheet of the present invention is capable of synchronization and exists
Line measures the distribution situation of fuel battery inside temperature, heat flow density and electric current density, independent of tested fuel cell it is not necessary to
Special transformation being carried out to the structure of tested fuel cell, decreasing the dismounting number of times to fuel cell, thus reducing due to many
The cost that parameter distribution measures and brings increases and workload increases, and decreases the destruction to fuel battery performance.
Content of the invention
It is an object of the invention to provide a kind of energy synchronization on-line measurement fuel battery inside Temperature Distribution, heat flow density are divided
Cloth and the device of electric current distribution., independent of tested fuel cell, structure is simple, easy to make, need not be to fuel for this device
Inside battery structure carries out special transformation, simplifies fuel battery inside temperature, heat flow density and electric current distribution measurement
Step.
For realizing above-mentioned technical purpose, technical scheme is as follows: fuel battery inside temperature-heat flow density-electricity
Current density distribution measuring inserted sheet, including conductive substrate 1, crack 2, muscle 3, temperature-heat flow density-electric current density translocation sensor 4,
Lead 5, location hole 7;Described crack 2, muscle 3 are arranged on conductive substrate 1, and muscle 3 is located between two adjacent cracks 2, crack 2 and muscle
3 shape and size are identical with the shape and size of fuel cell flow field board upper runner and ridge respectively, the position of crack 2 and muscle 3
Corresponding with fuel cell flow field board runner and ridge respectively;Described temperature-heat flow density-electric current density translocation sensor 4 is arranged
On muscle 3;One end of lead 5 is connected with the wiring exit of temperature-heat flow density-electric current density translocation sensor 4, the other end
Extend to the edge of conductive substrate 1 and amplify formation pin 6;Location hole 7 is symmetrical, be uniformly arranged on conductive substrate 1 surrounding, in order to
Conductive substrate 1 is fixed on fuel cell flow field board;During fuel cell assembling, fuel battery inside temperature-heat flow density-electricity
Current density distribution measuring inserted sheet is arranged in the middle of fuel cell flow field board and membrane electrode, and it is provided with temperature-heat flow density-electric current
Density translocation sensor 4 facing to membrane electrode side and intimate contact therewith.
Described temperature-heat flow density-electric current density translocation sensor 4 is to be steamed on muscle 3 using vacuum evaporation coating film method
Seven layer films of plating: ground floor is thick 0.08-0.12 μm of silicon dioxide insulating layer 15, the second layer is that evaporation is exhausted in silicon dioxide
The thick copper coating 16 for 0.1-0.12 μm in edge layer 15, third layer is evaporation thickness on silicon dioxide insulating layer 15 is 0.1-0.12
μm nickel coating 17;Described copper coating 16 includes film thermocouple copper coating and thin film heat-flow meter copper coating simultaneously;Described nickel plating
Layer 17 includes film thermocouple nickel coating and thin film heat-flow meter nickel coating simultaneously;Described film thermocouple copper coating and thin film thermoelectric
Even nickel coating be shaped as strip, mesophase mutually overlaps, and lap-joint constitutes film thermocouple hot junction node 29, and head end is thin film
Thermocouple wiring exit 30;The shape of described thin film heat-flow meter copper coating and thin film heat-flow meter nickel coating is respectively parallel to each other
Tetragon, and head and the tail mutually overlap, and lap-joint constitutes thermoelectric pile, including node 31 on thin film heat-flow meter and thin film hot-fluid
The lower node 32 of meter, head end is thin film heat-flow meter wiring exit 33;4th layer is evaporation above copper coating 16 and nickel coating 17
Thickness be 0.08-0.12 μm of silicon dioxide layer of protection 18, layer 5 is the dioxy on thin film heat-flow meter corresponding to node 31
Above SiClx coating, evaporation thick layer is 1.2-2.0 μm of silicon dioxide thickness thermoresistance layer 19, and layer 6 is that previously coating is basic
The thick layer of upper evaporation is that 1.5-2.0 μm of electric current density measures copper coating 20, and layer 7 is to measure copper coating in electric current density
20 top evaporation thick layers are that 0.1-0.12 μm of electric current density measures gold plate 21;Described electric current density measures copper coating 20 He
Electric current density measurement gold plate 21 is overlapped, constitutes the electric current density measurement coat of metal 34, and head end measures for electric current density
Coat of metal wiring exit 35.
Described film thermocouple wiring exit 30, thin film heat-flow meter wiring exit 33 and electric current density measurement metal-plated
Layer wiring exit 35 all makes circular, and is all arranged in the same side of silicon dioxide insulating layer 15.
The shape of described conductive substrate 1 can make squarely, circle, polygon, trapezoidal, triangle, irregular figure;Lead
On electric substrate 1, the shape of crack 2 can be snakelike crack, parallel crack, poroid crack, staggered crack.
The thin film thermoelectric even summation thin film being made up of copper and mickel in described temperature-heat flow density-electric current density translocation sensor 4
Heat-flow meter coat of metal material can also be substituted from tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt, and metal mixed may also be employed
Thing material such as copper and constantan substitute.
Film thermocouple copper coating and film thermocouple nickel in described temperature-heat flow density-electric current density translocation sensor 4
The shape of coating is to be set according to the shape of mask, its shape can also for ellipse, arc, waveform, rhombus and
Irregularly shaped, the shape after mutually overlapping can be arc, waveform, zigzag.
Thin film heat-flow meter copper coating and thin film heat-flow meter nickel in described temperature-heat flow density-electric current density translocation sensor 4
The shape of coating is to be set according to the shape of mask, and its shape can be also strip, arc, rhombus, and head and the tail mutually overlap
Shape afterwards can be zigzag, arc, waveform, z font.
Described silicon dioxide thickness thermoresistance layer 19 may be additionally located at the top of node 32 under thin film heat-flow meter.
Thin film heat-flow meter in described temperature-heat flow density-electric current density translocation sensor 4 at least includes a pair of thin film heat
Node 32 under node 31 on flowmeter, thin film heat-flow meter.
The shape of described electric current density measurement copper coating 20 and electric current density measurement gold plate 21 is the shape according to mask
And set, its shape can be square, circular, oval, trapezoidal.
Described film thermocouple wiring exit 30, thin film heat-flow meter wiring exit 32 and electric current density measurement metal-plated
Layer wiring exit 35 can respectively relative to the both sides being arranged in silicon dioxide insulating layer 15, its shape also can be made as ellipse
Shape, rectangle, trapezoidal, triangle.
The width of lead 5 is 0.1-0.2mm, is amplified in the edge of conductive substrate 1, forms pin 6.
Lead 5 is to be constituted using the four-level membrane of vacuum evaporation coating film method evaporation: ground floor is thick 0.08-0.12 μm
Lead silicon dioxide insulating layer 36, the second layer is thick 0.1-0.12 μm of lead copper coating 37, and third layer is thick 0.1-0.12 μm
Lead gold plate 38, last layer is thick 0.05-0.1 μm of lead silicon dioxide layer of protection 39;Wherein, at pin 6 not
Evaporation lead silicon dioxide layer of protection 39.
Compared with prior art, the present invention has the advantages that.
Fuel battery inside temperature-heat flow density-electric current distribution measurement the inserted sheet of the present invention, in the muscle of conductive substrate
On be disposed with temperature-heat flow density-electric current density translocation sensor, can realize to fuel cell in fuel cell operation
The synchro measure of internal temperature, heat flow density and electric current distribution;When assembling with fuel cell, this invention device is arranged in combustion
In the middle of material cell flow field plate and membrane electrode, its structure independent with tested fuel cell it is not necessary to fuel cell flow field board or pole
The other structures such as plate carry out special transformation, reduce by the impact implanted to fuel battery performance of measurement apparatus;Meanwhile, this dress
Put structure simple, easy to make, applied widely, parallel fluid channels, serpentine flow path, stagger mode runner or other can be adapted to and do not advise
The then fuel cell flow field board of flow channel shape.
Brief description
Fig. 1 is that fuel battery inside temperature-heat flow density-electric current distribution parallel crack measurement inserted sheet is subjective to be illustrated
Figure;
Fig. 2 is that on fuel battery inside temperature-heat flow density-electric current distribution measurement inserted sheet, single temperature-hot-fluid is close
The subjective schematic diagram of degree-electric current density translocation sensor;
Fig. 3 is that on fuel battery inside temperature-heat flow density-electric current distribution measurement inserted sheet, single temperature-hot-fluid is close
The Making programme figure of degree-electric current density translocation sensor;
Fig. 4 is temperature-heat flow density-electricity on fuel battery inside temperature-heat flow density-electric current distribution measurement inserted sheet
The section subjectivity schematic diagram of current density translocation sensor lead;
Fig. 5 is that fuel battery inside temperature-heat flow density-electric current distribution staggered crack measurement inserted sheet is subjective to be illustrated
Figure;
Fig. 6 is that the snakelike single crack measurement inserted sheet of fuel battery inside temperature-heat flow density-electric current distribution is subjective to be illustrated
Figure;
Fig. 7 is that fuel battery inside temperature-snakelike pair of heat flow density-electric current distribution crack measurement inserted sheet is subjective to be illustrated
Figure;
In figure, 1, conductive substrate, 2, crack, 3, muscle, 4, temperature-heat flow density-electric current density translocation sensor, 5, draw
Line, 6, pin, 7, location hole;
8-14 is temperature-heat flow density-electric current density translocation sensor each coating mask: 8, silicon dioxide insulating layer is covered
Film, 9, copper coating mask, 10, nickel coating mask, 11, silicon dioxide layer of protection mask, 12, silicon dioxide thickness thermoresistance layer mask,
13rd, electric current density measurement copper coating mask, 14, electric current density measurement gold plate mask;
15-21 is temperature-heat flow density-electric current density each coating of translocation sensor according to mask evaporation: 15, dioxy
SiClx insulating barrier, 16, copper coating, 17, nickel coating, 18, silicon dioxide layer of protection, 19, silicon dioxide thickness thermoresistance layer, 20, electric current
Density measure copper coating, 21, electric current density measurement gold plate;
22-28 is the manufacturing process of temperature-heat flow density-electric current density translocation sensor: 22, step one, 23, step
Two, 24, step 3,25, step 4,26, step 5,27, step 6,28, step 7;
29th, film thermocouple hot junction node, 30, film thermocouple wiring exit, 31, node on thin film heat-flow meter, 32,
Node under thin film heat-flow meter, 33, thin film heat-flow meter wiring exit, 34, the electric current density measurement coat of metal, 35, electric current density
Measurement coat of metal wiring exit;
36th, lead silicon dioxide insulating layer, 37, lead copper coating, 38, lead gold plate, 39, the protection of lead silicon dioxide
Layer.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
With reference to shown in Fig. 1, the fuel battery inside temperature-heat flow density-electric current distribution of the present invention measures inserted sheet, bag
Include conductive substrate 1, crack 2, muscle 3, temperature-heat flow density-electric current density translocation sensor 4, lead 5, pin 6, location hole 7;
Crack 2 and muscle 3 are arranged on conductive substrate 1, its with tested fuel cell flow field board on runner and ridge in shape and size
Identical, position is mutually corresponding, is disposed with temperature-heat flow density-electric current density translocation sensor 4 on muscle 3;Lead 5 one end with
Temperature-heat flow density-electric current density translocation sensor 4 is connected, and the other end extends to the edge of conductive substrate 1, for transmitting temperature
The signal of telecommunication that degree-heat flow density-electric current density translocation sensor 4 produces;Pin 6 be arranged in conductive substrate 1 edge and with draw
Line 5 is connected;It is disposed with location hole 7 in the surrounding of conductive substrate, facilitate this temperature-heat flow density-electric current distribution measurement to insert
The positioning of piece and fuel cell flow field board and fixation.It is the mating shapes with tested fuel cell, the shape of conductive substrate 1 can
Make squarely, circle, polygon, trapezoidal, triangle etc..During measurement, this measurement inserted sheet is implanted fuel cell flow field board and film
Between electrode assemblie, it is fixed on fuel cell flow field board by location hole 7, be disposed with temperature-heat flow density-electric current close
Degree translocation sensor 4 facing to fuel cell membrane electrode assembly direction, and be in close contact with membrane electrode assembly, crack 2 and combustion
Runner on material cell flow field plate is corresponding, and muscle 3 is corresponding with the ridge on fuel cell flow field board, so that the implantation of measurement inserted sheet
Do not affect reactant to the diffusion in membrane electrode direction.Meanwhile, it is arranged in temperature-heat flow density-the electric current density on measurement inserted sheet
Translocation sensor 4 measures to the temperature of fuel battery inside, heat flow density and electric current density, and the signal of telecommunication of generation passes through to draw
Line 5 is transferred to pin 6, and the data input pin of data acquisition equipment is connected with pin 6 and can collect the electricity of measurement inserted sheet output
Signal, and calculate the distribution analyzing fuel battery inside Temperature Distribution, heat flux distribution and electric current density.
With reference to shown in Fig. 2, temperature-heat flow density of the present invention-electric current density translocation sensor 4 is by adopting vacuum
Seven layer films that evaporation coating method is deposited with the muscle 3 of conductive substrate 1 are constituted: ground floor is thick 0.08-0.12 μm of dioxy
SiClx insulating barrier 15, the second layer is the evaporation thick copper coating 16 for 0.1-0.12 μm, third layer on silicon dioxide insulating layer 15
For evaporation, on silicon dioxide insulating layer 15, thickness is 0.1-0.12 μm of nickel coating 17, and the 4th layer is in copper coating 16 and nickel coating
The thickness of 17 top evaporations is 0.08-0.12 μm of silicon dioxide layer of protection 18, and layer 5 is node 31 institute on thin film heat-flow meter
Above corresponding silicon dioxide coating, evaporation thick layer is 1.2-2.0 μm of silicon dioxide thickness thermoresistance layer 19, and layer 6 is formerly
On the basis of front coating, the thick layer of evaporation is 1.5-2.0 μm of electric current density measurement copper coating 20, and layer 7 is in electric current density
Measurement copper coating 20 top evaporation thick layer is that 0.1-0.12 μm of electric current density measures gold plate 21;Because copper and gold are heat
Good conductor, heat conductivity is very high, and the electric current density measurement copper coating being in addition deposited with and electric current density measurement gold plate are all very thin,
Therefore it is deposited with the electric current density on thin film heat-flow meter and film thermocouple upper strata and measure the coat of metal to thin film heat-flow meter and thin film
The interference of thermocouple measurement precision can be ignored.
Thin film heat-flow meter copper coating, thin film heat-flow meter nickel coating, silicon dioxide layer of protection 18 and silicon dioxide thickness thermoresistance layer
19 constitute complete thin film heat-flow meter, and to realize the measurement of heat flow density, its measuring principle is: first by copper coating and nickel coating
Tail mutually overlaps composition thermoelectric pile, due to the silicon dioxide thermoresistance layer on node under node and thin film heat-flow meter on thin film heat-flow meter
Thickness is different, so that thermoelectric pile produces thermoelectric force, its thickness difference with silicon dioxide thermoresistance layer on upper node and lower node
Correlation, and heat flow density is related to the temperature difference, silicon dioxide thermoresistance layer thickness difference and heat conductivity, due to silicon dioxide heat conductivity
It is known that therefore the size of heat flow density can be calculated.
Fig. 3 is the Making programme figure of single temperature-heat flow density-electric current density translocation sensor: 8-14 is temperature-hot-fluid
Density-electric current density translocation sensor each coating mask, 15-21 is the temperature-heat flow density-electric current density according to mask evaporation
Each coating of translocation sensor, 22-28 is the manufacturing process of temperature-heat flow density-electric current density translocation sensor.Basis first
Silicon dioxide insulating layer mask 8 is deposited with layer of silicon dioxide insulating barrier 15, as the dielectric substrate of sensor, thus completing step
One 22;Step 2 23 is to be deposited with one layer of copper coating 16 according to copper coating mask 9 on silicon dioxide insulating layer 15, and step 3 24 is
One layer of nickel coating 17 is deposited with silicon dioxide insulating layer 15 according to nickel coating mask 10;Wherein, copper coating 16 includes simultaneously
Film thermocouple copper coating and thin film heat-flow meter copper coating, nickel coating 17 includes film thermocouple nickel coating and thin film heat simultaneously
Flowmeter nickel coating;Step 4 25 is to be steamed according to silicon dioxide layer of protection mask 11 above institute's copper facing coating 16 and nickel coating 17
Plating layer of silicon dioxide protective layer 18, its i.e. protective layer as film thermocouple, and the silicon dioxide as thin film heat-flow meter
Thin thermoresistance layer;Step 5 26 is thick according to silicon dioxide above the silicon dioxide coating corresponding to node 31 on thin film heat-flow meter
Thermoresistance layer mask 12 evaporation layer of silicon dioxide thickness thermoresistance layer 19, wherein thin film heat-flow meter copper coating, thin film heat-flow meter nickel coating,
Silicon dioxide layer of protection 18 and silicon dioxide thickness thermoresistance layer 19 constitute complete thin film heat-flow meter it is achieved that the survey of heat flow density
Amount;Step 6 27 measures copper coating mask 13 on the basis of previously coating according to electric current density, is deposited with a Lyer current density
Measurement copper coating 20, step 7 28 is to measure in electric current density to measure gold plate mask according to electric current density above copper coating 20
14 evaporation one Lyer current density measurement gold plate 21;Wherein electric current density measurement copper coating 20 and electric current density measurement gold plate 21
Overlapped, constitute the electric current density measurement coat of metal 34 it is achieved that the measurement of electric current density;Temperature is constituted by above step
Degree-heat flow density-electric current density translocation sensor, external measuring circuit data collecting device can achieve in fuel cell
The synchro measure of portion's Temperature Distribution, heat flux distribution and electric current distribution.
Wherein, the copper coating 16 that step 2 23 is deposited with includes film thermocouple copper coating and thin film heat-flow meter copper simultaneously
Coating, equally, the nickel coating 17 that step 3 24 is deposited with includes film thermocouple nickel coating and the plating of thin film heat-flow meter nickel simultaneously
Layer.Film thermocouple copper coating and film thermocouple nickel coating be shaped as strip, mesophase mutually overlaps, and lap-joint constitutes thin
Film hot thermocouple leaf 29, in order to realize temperature survey;Its film thermocouple copper coating and the shape of film thermocouple nickel coating
Shape is to be set according to the shape of mask, and its shape can also be ellipse, arc, waveform, rhombus and irregular shape
The other shapes such as shape, the shape after mutually overlapping can be arc, waveform, zigzag etc..Thin film heat-flow meter copper coating and thin film
The tetragon that the shape of heat-flow meter nickel coating is respectively parallel to each other, head and the tail mutually overlap, and lap-joint constitutes thermoelectric pile, wherein extremely
Include node 32, wherein thin film heat-flow meter copper coating and thin film heat under node 31 and thin film heat-flow meter on a pair of thin film heat-flow meter less
The shape of flowmeter nickel coating is to be set according to the shape of mask, and its shape can also be strip, arc, rhombus etc., thin
After the overlap joint of film heat-flow meter copper coating and thin film heat-flow meter nickel coating shape can for zigzag, arc, waveform, z font etc. its
Its shape;Silicon dioxide thickness thermoresistance layer 19 may be additionally located at the top of node 32 under thin film heat-flow meter.Thin film thermoelectric even summation thin film heat
Coat of metal material in flowmeter also can substitute for tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt etc., and metal mixed may also be employed
Thing material such as copper and constantan substitute.The electric current density measurement copper coating 20 that step 6 27 and step 7 28 complete and electric current density are surveyed
The shape of amount gold plate 21 changes also dependent on the shape of mask, can be rectangle, ellipse, circle, triangle, trapezoidal, no
The other shapes such as regular figure.
The head end of film thermocouple is film thermocouple wiring exit 30, and the head end of thin film heat-flow meter is thin film heat-flow meter
Wiring exit 33, the head end that electric current density measures the coat of metal measures coat of metal wiring exit 35 for electric current density, its
Effect, for convenience of being connected with lead 5, enters the conduction of horizontal electrical signal.Film thermocouple wiring exit 30, thin film heat-flow meter wiring
The shape of exit 33 and electric current density measurement coat of metal wiring exit 35 can be not only the shape shown in Fig. 3, also can make
As other shapes such as ellipse, rectangle, trapezoidal, trianglees, its position can be arranged in the same of silicon dioxide insulating layer 15
Side, both sides being arranged in silicon dioxide insulating layer 15 that also can be relative, that is, when thin film heat-flow meter wiring exit 33 is located at dioxy
During the upside of SiClx insulating barrier 15, film thermocouple wiring exit 30 and electric current density measure coat of metal wiring exit 35
It is arranged in the opposite side of the silicon dioxide insulating layer 15 relative with thin film heat-flow meter wiring exit 33, to facilitate sensor lead
5 arrangements on conductive substrate.
With reference to shown in Fig. 4, the width of lead 5 is 0.1-0.2mm, is amplified in the edge of conductive substrate 1, formation connects
Wire pin 6, is attached with external measuring circuit and equipment with facilitating.This lead is using vacuum evaporation coating film method evaporation
Four-level membrane is constituted: ground floor is thick 0.08-0.12 μm of lead silicon dioxide insulating layer 36, and the second layer is thick 0.1-0.12 μm
Lead copper coating 37, third layer is thick 0.1-0.12 μm of lead gold plate 38, and last layer is thick 0.05-0.1 μm draws
Line silicon dioxide layer of protection 39;Wherein, it is not deposited with lead silicon dioxide layer of protection 39 at wiring pin 6.
Fig. 5 is that fuel battery inside temperature-heat flow density-electric current distribution staggered crack measurement inserted sheet is subjective to be illustrated
Figure, the crack 2 on its conductive substrate 1 and muscle 3 are mutually corresponding with the runner on staggered fluid flow on channel plate and ridge, two adjacent cracks
Temperature-heat flow density-electric current density translocation sensor 4 is disposed with the muscle 3 between 2, one end of lead 5 is close with temperature-hot-fluid
The wiring exit of degree-electric current density translocation sensor 4 connects, and the other end extends to the outward flange of conductive substrate 1 and amplifies shape
Become pin 6, for the transmission of temperature-heat flow density-electric current density translocation sensor 4 signal of telecommunication.
Fig. 6 is that the snakelike single crack measurement inserted sheet of fuel battery inside temperature-heat flow density-electric current distribution is subjective to be illustrated
Figure, the crack 2 on its conductive substrate 1 and muscle 3 are mutually corresponding with the runner on snakelike single channel flow field and ridge, two adjacent cracks
Temperature-heat flow density-electric current density translocation sensor 4 is disposed with the muscle 3 between 2, one end of lead 5 is close with temperature-hot-fluid
The wiring exit of degree-electric current density translocation sensor 4 connects, and the other end extends to the outward flange of conductive substrate 1 and amplifies shape
Become pin 6, for the transmission of temperature-heat flow density-electric current density translocation sensor 4 signal of telecommunication.
Fig. 7 is that fuel battery inside temperature-snakelike pair of heat flow density-electric current distribution crack measurement inserted sheet is subjective to be illustrated
Figure, the crack 2 on its conductive substrate 1 and muscle 3 are mutually corresponding with the runner in snakelike dual pathways flow-field plate and ridge, two adjacent cracks
Temperature-heat flow density-electric current density translocation sensor 4 is disposed with the muscle 3 between 2, one end of lead 5 is close with temperature-hot-fluid
The wiring exit of degree-electric current density translocation sensor 4 connects, and the other end extends to the outward flange of conductive substrate 1 and amplifies shape
Become pin 6, for the transmission of temperature-heat flow density-electric current density translocation sensor 4 signal of telecommunication.
Fuel battery inside temperature-heat flow density-electric current distribution using the present invention measures inserted sheet, can be convenient
Realize the distribution situation of synchronous on-line measurement fuel battery inside temperature, heat flow density and electric current density;This measurement apparatus and quilt
Survey fuel cell independently it is not necessary to special transformation is carried out to the structure of fuel cell, structure is simple, easy to make, range
Extensively, you can realize the measurement of individual fuel cells internal temperature, heat flow density and electric current distribution, also can achieve fuel cell
The measurement of heap internal temperature, heat flow density and electric current density.
Claims (10)
1. fuel battery inside temperature-heat flow density-electric current distribution measurement inserted sheet, including conductive substrate (1), crack (2),
Muscle (3), temperature-heat flow density-electric current density translocation sensor (4), lead (5), location hole (7);Described crack (2), muscle (3)
It is arranged on conductive substrate (1), muscle (3) is located between two adjacent cracks (2), the shape and size of crack (2) and muscle (3) are respectively
Identical with the shape and size of fuel cell flow field board upper runner and ridge, the position of crack (2) and muscle (3) respectively with fuel cell
Flow field plate runner is corresponding with ridge;It is characterized in that: described temperature-heat flow density-electric current density translocation sensor (4) is arranged on
On muscle (3);One end of lead (5) is connected with the wiring exit of temperature-heat flow density-electric current density translocation sensor (4), separately
One end extends to the edge of conductive substrate (1) and amplifies formation pin (6);Location hole (7) is symmetrical, be uniformly arranged on conductive substrate
(1) surrounding, in order to be fixed on conductive substrate (1) on fuel cell flow field board;During fuel cell assembling, fuel battery inside temperature
Degree-heat flow density-electric current distribution measurement inserted sheet is arranged in the middle of fuel cell flow field board and membrane electrode, and it is provided with temperature
Degree-heat flow density-electric current density translocation sensor (4) facing to membrane electrode side and intimate contact therewith;
Described temperature-heat flow density-electric current density translocation sensor (4) is in the upper steaming of muscle (3) using vacuum evaporation coating film method
Seven layer films of plating: ground floor is thick 0.08-0.12 μm of silicon dioxide insulating layer (15), the second layer is evaporation in silicon dioxide
The upper thick copper coating (16) for 0.1-0.12 μm of insulating barrier (15), third layer is that evaporation is in the upper thickness of silicon dioxide insulating layer (15)
0.1-0.12 μm of nickel coating (17);Described copper coating (16) includes film thermocouple copper coating and the plating of thin film heat-flow meter copper simultaneously
Layer;Described nickel coating (17) includes film thermocouple nickel coating and thin film heat-flow meter nickel coating simultaneously;Described film thermocouple copper
Coating and film thermocouple nickel coating be shaped as strip, mesophase mutually overlaps, and lap-joint constitutes film thermocouple hot junction knot
Point (29), head end is film thermocouple wiring exit (30);Described thin film heat-flow meter copper coating and thin film heat-flow meter nickel coating
The tetragon that is respectively parallel to each other of shape, and head and the tail mutually overlap, and lap-joint constitutes thermoelectric pile, including thin film hot-fluid
Node (32) under node (31) and thin film heat-flow meter on meter, head end is thin film heat-flow meter wiring exit (33);4th layer be
Above copper coating (16) and nickel coating (17), the thickness of evaporation is 0.08-0.12 μm of silicon dioxide layer of protection (18), and layer 5 is
Above the silicon dioxide layer of protection (18) corresponding to node (31) on thin film heat-flow meter, evaporation thick layer is the two of 1.2-2.0 μm
Silicon oxide thickness thermoresistance layer (19), layer 6 is the thick layer of previously evaporation on the basis of coating is 1.5-2.0 μm of electric current density
Measurement copper coating (20), layer 7 is to measure the electricity for 0.1-0.12 μm for the evaporation thick layer above copper coating (20) in electric current density
Current density measurement gold plate (21);Described electric current density measurement copper coating (20) and electric current density measurement gold plate (21) phase mutual respect
Folded, constitute the electric current density measurement coat of metal (34), head end is electric current density measurement coat of metal wiring exit (35);
Described film thermocouple wiring exit (30), thin film heat-flow meter wiring exit (33) and electric current density measurement metal-plated
Layer wiring exit (35) all makes circular, and is all arranged in the same side of silicon dioxide insulating layer (15).
2. fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet, and it is special
Levy and be: the shape of described conductive substrate (1) makes squarely, circle, polygon, trapezoidal or triangle;On conductive substrate (1)
Crack (2) be shaped as snakelike crack, parallel crack, poroid crack or staggered crack.
3. a kind of fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet,
It is characterized in that: the film thermocouple being made up of copper and mickel in described temperature-heat flow density-electric current density translocation sensor (4)
Substitute with thin film heat-flow meter coat of metal material selection tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt, or using copper and constantan
Metal mixture material substitution.
4. a kind of fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet,
It is characterized in that: film thermocouple copper coating and thin film heat in described temperature-heat flow density-electric current density translocation sensor (4)
The shape of galvanic couple nickel coating is to be set according to the shape of mask, and it is shaped as ellipse, arc, waveform or rhombus, phase
It is shaped as arc, waveform or zigzag after mutually overlapping.
5. a kind of fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet,
It is characterized in that: thin film heat-flow meter copper coating and thin film heat in described temperature-heat flow density-electric current density translocation sensor (4)
The shape of flowmeter nickel coating is to be set according to the shape of mask, and it is shaped as strip, arc or rhombus, head and the tail phase lap
It is shaped as zigzag, arc, waveform or z font after connecing.
6. a kind of fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet,
It is characterized in that: described silicon dioxide thickness thermoresistance layer (19) may be additionally located at the top of node (32) under thin film heat-flow meter.
7. a kind of fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet,
It is characterized in that: the thin film heat-flow meter in described temperature-heat flow density-electric current density translocation sensor (4) at least includes a pair
Node (32) under node (31) on thin film heat-flow meter, thin film heat-flow meter.
8. a kind of fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet,
It is characterized in that: it is according to mask that described electric current density measures copper coating (20) and the shape of electric current density measurement gold plate (21)
Shape and set, it is shaped as square, circular, oval or trapezoidal.
9. a kind of fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet,
It is characterized in that: described film thermocouple wiring exit (30), thin film heat-flow meter wiring exit (33) and electric current density are surveyed
Amount coat of metal wiring exit (35) can respectively relative to the both sides being arranged in silicon dioxide insulating layer (15), its shape can also
It is made as ellipse, rectangle, trapezoidal or triangle.
10. a kind of fuel battery inside temperature-heat flow density-electric current distribution according to claim 1 measures inserted sheet,
It is characterized in that: the width of lead (5) is 0.1-0.2mm, is amplified in the edge of conductive substrate (1), forms pin
(6);
Lead (5) is to be constituted using the four-level membrane of vacuum evaporation coating film method evaporation: ground floor is thick 0.08-0.12 μm draws
Line silicon dioxide insulating layer (36), the second layer is thick 0.1-0.12 μm of lead copper coating (37), and third layer is thick 0.1-0.12 μ
The lead gold plate (38) of m, last layer is thick 0.05-0.1 μm of lead silicon dioxide layer of protection (39);Wherein, in pin
(6) place is not deposited with lead silicon dioxide layer of protection (39).
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CN104359572B true CN104359572B (en) | 2017-02-01 |
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Citations (3)
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CN102116680A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion sheet for measuring internal temperature distribution of fuel cell |
CN102116679A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion piece for measuring transient heat flow density distribution in fuel cell |
CN102157743A (en) * | 2011-02-18 | 2011-08-17 | 北京工业大学 | Transient temperature distribution sensor in fuel cell |
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CN102116680A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion sheet for measuring internal temperature distribution of fuel cell |
CN102116679A (en) * | 2011-02-18 | 2011-07-06 | 北京工业大学 | Insertion piece for measuring transient heat flow density distribution in fuel cell |
CN102157743A (en) * | 2011-02-18 | 2011-08-17 | 北京工业大学 | Transient temperature distribution sensor in fuel cell |
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