CN105300524A - Polarization axis detector, polarization measurement device and method, and polarized light irradiation device - Google Patents

Abstract

The present invention provides a polarization axis detector, a polarization measurement device and method, and a polarized light irradiation device. The light from a light source changes with the illuminance of time, the polarization axis of the polarized light may be measured with a high precision. The polarization axis detector comprises a first polarized light detection part (311) having a rotary detection polarizer (311a) configured to detect the polarization axis and a first illuminance sensor (311b) configured to detect the illuminance information of the polarized light from the light source through the detection polarizer (311a); and a second polarized light detection part (312) arranged in parallel with the first polarized light detection part (311) and having a second illuminance sensor (312a) configured to directly detection the illuminance information of the polarized light from the light source. The polarization measurement device is configured to calculate the polarization property of the polarized light from the light source according to the illuminance information detected by the first polarized light detection part (311) and the illuminance information detected by the second polarized light detection part (312).

Description

Polarization axle detecting device, polarimetry device and method, polarized light illumination device

Technical field

The present invention relates to the polarization axle detecting device of the polarization axle for measuring polarized light, polarimetry device, polarimetry method and polarized light illumination device.

Background technology

In recent years, about the orientation process taking liquid crystal panel as the alignment films of liquid crystal display cells of representative or the oriented layer of field angle compensate film etc., adopt technology that the polarized light irradiating predetermined wavelength carries out orientation, that be called as light orientation.

The irradiation unit used in light orientation, possesses light source and polarizer usually, makes the light of light source by polarizer, and irradiates the polarized light obtained thus.In light orientation technology, it is very important for whether becoming desired polarization axle from the polarization axle (axle of the polarized light photoirradiated surface) of the polarized light of irradiation unit irradiation.Therefore, after the angle initialization of polarizer is predetermined angle, actually carries out polarizing light irradiation and measure polarization axle, if do not become desired polarization axle, then needing the operation carrying out correcting polarizer angle.

As existing polarization axle assay method, there is the technology that such as patent documentation 1 is recorded.In the art, except the first polarizer that irradiation unit possesses, the second polarizer for detecting polarization axle is also set, while make the second polarizer rotate, while detect the light that have passed the first polarizer and the second polarizer successively, according to this testing result, measure the polarization characteristic of polarized light.Specifically, obtain the periodically variable change curve of the light quantity of detection light when expression second polarizer rotates, measure polarization axle and extinction ratio, as above-mentioned polarization characteristic according to this change curve.

Patent documentation 1: Japanese Unexamined Patent Publication 2014-20890 publication

In the technology that above-mentioned patent documentation 1 is recorded, utilize discharge lamp as light source.In the discharge lamp, there is the rheological parameters' change with time of the light quantity caused by fluctuation of electric arc, during making the 2nd polarizer rotate, light quantity is moment change also.But, in the technology that above-mentioned patent documentation 1 is recorded, owing to not considering the fluctuation of the electric arc of this discharge lamp, so the estimating precision of the polarization axle of polarized light is low.

Summary of the invention

At this, problem of the present invention is, a kind of polarization axle detecting device, polarimetry device, polarimetry method and polarized light illumination device are provided, when the illumination of the light from light source changes in time, also can detect the polarization axle of polarized light accurately.

In order to solve above-mentioned problem, a kind of polarization axle detecting device of the present invention, detect the polarization axle from the polarized light of light source irradiation, comprise: the first polarized light detection portion, there is the rotatable detection polarizer for detecting described polarization axle and detect the first illuminance transducer that have passed the illuminance information of the polarized light from described light source of described detection polarizer; And the second polarized light detection portion, there is second illuminance transducer of direct-detection from the illuminance information of the polarized light of described light source, be set up in parallel with described first polarized light detection portion.

Like this, detection is set up in parallel with the first polarized light detection portion not by the second polarized light detection portion of the polarized light from light source of detection polarizer.Therefore, it is possible to utilize 2 polarized light detection portions to watch the fluctuation of identical polarized light, the illuminance information of the polarized light detected by the second polarized light detection portion can be set to the reference value of the illuminance information of the polarized light detected by the first polarized light detection portion.Therefore, even if when causing the illumination from the polarized light of light source temporally to change because of the output deviation of light source or fluctuation etc., the detection of the polarization axle considering the variation of this illumination can also be carried out.

In addition, in above-mentioned polarization axle detecting device, preferred described light source is linear light source, and described first illuminance transducer and described second illuminance transducer arrange along the direction arrangement that described linear light source extends.

Like this, when light source is set to linear light source, 2 illuminance transducers are arranged on the direction that the illumination change of linear light source is few, so the dependence in each place can be reduced, obtain the measurement result that reliability is high.

In addition, the polarimetry device of a kind of mode of the present invention, possesses: any one polarization axle detecting device above-mentioned, and polarized light determination part, measure described polarized light according to the illuminance information that described polarization axle detecting device detects, described polarized light determination part possesses: rotation control unit, and described detection polarizer is rotated to multiple specified angle, illuminance information correction portion, brightness value after computing correction is carried out according to detection brightness value and reference illumination value, described detection brightness value is the illuminance information detected by described first illuminance transducer at described multiple specified angle, described reference illumination value is the illuminance information that the detection of this detection brightness value carried out with described first illuminance transducer is synchronously detected by described second illuminance transducer, after described correction, brightness value changes by the illumination in time of the polarized light from described light source irradiation the error caused carried out revised brightness value to what comprise in described detection brightness value, and polarization characteristic operational part, the polarized light angular characteristics of the relation after the anglec of rotation that computing represents described detection polarizer and the correction that calculated by described illuminance information correction portion between brightness value, according to this polarized light angular characteristics, computing is from the polarization characteristic of the polarized light of described light source.

Like this, use the reference illumination value detected by the second polarized light detection portion, change to the illumination in time of the polarized light from light source comprised in the detection brightness value detected by the first polarized light detection portion the error caused to revise, so the polarized light angular characteristics that have modified above-mentioned error can be calculated.Therefore, even if during making detection polarizer rotate, when polarized light variation from light source, still can the polarization characteristic of this polarized light of computing accurately.

In addition, in above-mentioned polarimetry device, the described detection brightness value that preferred described illuminance information correction portion will be detected by described first illuminance transducer, divided by the described reference illumination value that the detection with this detection brightness value is synchronously detected by described second illuminance transducer, thus brightness value after revising described in computing.Like this, the better simply gimmick that division is such can be utilized, suitably the error caused be changed to the illumination detecting the polarized light from light source comprised in brightness value and revise.

In addition, in above-mentioned polarimetry device, preferred described illuminance information correction portion is by from the described detection brightness value detected by described first illuminance transducer, the mean value deducting each reference illumination value detected by described second illuminance transducer at described multiple specified angle and the difference of described reference illumination value synchronously detected by described second illuminance transducer with the detection of described detection brightness value, thus brightness value after revising described in computing.Like this, utilize subtraction and the such better simply gimmick of mean value calculation, can suitably to detect comprise in brightness value change by the illumination of the polarized light from light source the error caused and revise.

In addition, in above-mentioned polarimetry device, preferred described polarization characteristic operational part possesses polarization axle angle operational part, this polarization axle angle operational part is according to described polarized light angular characteristics, determine that the illumination of the polarized light from described light source that have passed described detection polarizer becomes the anglec of rotation of the described detection polarizer of extreme value, according to the determined anglec of rotation, the polarization axle angle of polarized light described in computing is used as described polarization characteristic.Thereby, it is possible to computing polarization axle angle accurately.

In addition, in above-mentioned polarimetry device, preferred described polarization characteristic operational part possesses extinction ratio operational part, this extinction ratio operational part is according to described polarized light angular characteristics, determine maximal value and the minimum value of the illumination of the polarized light from described light source that have passed described detection polarizer, according to determined maximal value and minimum value, the extinction ratio of polarized light described in computing is as described polarization characteristic.Thereby, it is possible to computing extinction ratio accurately.

In addition, the polarimetry method of a kind of mode of the present invention, measure the polarized light from light source irradiation, comprise the steps: to be used in the detection polarizer detecting polarization axle and rotate to multiple specified angle, each specified angle detect have passed the polarized light from described light source of described detection polarizer illuminance information, namely detect brightness value; And have passed the illuminance information of the polarized light from described light source of described detection polarizer in timing synchronization with detection, direct-detection is not by the illuminance information of the polarized light from described light source of described detection polarizer, i.e. reference illumination value.

Like this, synchronously the polarized light from light source that have passed detection polarizer is detected and not by the polarized light from light source of detection polarizer.Therefore, be set to the reference value detecting brightness value with reference to brightness value, even if when the illumination of the polarized light from light source temporally changes, also can carry out the detection of the polarization axle considering the variation of this illumination.

In addition, in above-mentioned polarimetry method, comprise the steps: the described detection brightness value according to detecting at described multiple specified angle and described reference illumination value, computing changes brightness value after the correction that the error that causes revises to what comprise in described detection brightness value by the illumination in time of the polarized light from described light source irradiation; Computing represents the polarized light angular characteristics of the relation after the anglec of rotation of described detection polarizer and described correction between brightness value; And carry out the polarization characteristic of computing from the polarized light of described light source according to described polarized light angular characteristics.

Like this, reference illumination value can be used to change to the illumination in time detecting the polarized light from light source comprised in brightness value the error caused revise.Therefore, it is possible to calculate the polarized light angular characteristics revised above-mentioned error.Therefore, even if during detection rotates with polarizer, when the polarized light from light source has changed, the polarization characteristic of this polarized light still can be detected accurately.

In addition, the polarized light illumination device of a kind of mode of the present invention, irradiates polarized light to alignment films and carries out light orientation, having: linear light source; Multiple polarizer, arranges along the direction that described linear light source extends; Illumination part, irradiates and utilizes described polarizer by the polarized light after the light polarization of described linear light source; And the polarimetry device described in above-mentioned any one, measure the polarized light that described illumination part irradiates.

Thus, polarimetry device can measure the polarization characteristic of the polarized light irradiated from illumination part accurately.Therefore, it is possible to judge whether the polarization axle of the polarized light irradiated from illumination part becomes required polarization axle rightly.

Invention effect

In polarization axle detecting device of the present invention, the first polarized light detection portion that have passed the polarized light from light source of detection polarizer with detection is set up in parallel detection not by the second polarized light detection portion of the polarized light from light source of detection polarizer.Therefore, even if when the illumination of the polarized light from light source temporally changes, the detection of the polarization axle considering the variation of this illumination can be carried out.

In addition, in the polarimetry device possessing this polarization axle detecting device, the reference illumination value detected by the second polarized light detection portion can be used, the detection brightness value detected by the first polarized light detection portion is revised, even if so during detection rotates with polarizer, when polarized light variation from light source, can the polarization characteristic of this polarized light of computing accurately.

Accompanying drawing explanation

Fig. 1 is the Sketch figure of the polarized light illumination device that present embodiment is shown.

Fig. 2 is the sectional view in the direction orthogonal with long side direction of illumination part.

Fig. 3 is the sectional view of the long side direction of illumination part.

Fig. 4 is the figure of the configuration that polarizer is shown.

Fig. 5 is the stereographic map of the major part that polarization axle detecting device is shown.

Fig. 6 is the cross-sectional perspective view of the major part that polarization axle detecting device is shown.

Fig. 7 is the schematic diagram of the formation that the first polarized light detection portion is shown.

Fig. 8 is the block diagram of the formation that polarimetry device is shown.

Fig. 9 is the process flow diagram that the polarimetry treatment step performed by control part is shown.

Figure 10 is the figure of an example of the angular characteristics that polarized light is shown.

Figure 11 is the figure of the effect for illustration of present embodiment.

Description of reference numerals:

10A, 10B ... illumination part; 11 ... discharge lamp; 12 ... catoptron; 13A, 13B ... polarizer unit; 13Aa, 13Ba ... polarizer; 13Ab, 13Bb ... framework; 14 ... lampshade; 20 ... trucking department; 21 ... worktable; 22 ... guide; 23 ... electromagnet; 30 ... polarimetry device; 31 ... polarization axle detecting device; 311 ... first polarized light detection portion; 311a ... detect with polarizer (device for testing light); 311b ... first illuminance transducer; 311c ... light accepting part; 311d ... support unit; 311e ... rotary actuator; 311f ... rotor; 311g ... peristome; 311h ... cool-air feed portion; 312 ... second polarized light detection portion; 312a ... second illuminance transducer; 312b ... light accepting part; 312c ... support unit; 312d ... peristome; 312e ... 32 ... X-direction trucking department; 33 ... Y-direction trucking department; 34 ... control part; 34a ... rotor control part; 34b ... input signal converter section; 34c ... polarization characteristic operational part; 34d ... image displaying part; 34e ... carrying control part; 35 ... monitor; 100 ... polarized light illumination device

Embodiment

Based on accompanying drawing, embodiments of the present invention are described below.

Fig. 1 is the Sketch figure of the polarized light illumination device that present embodiment is shown.

Polarized light illumination device 100 possesses the trucking department 20 of illumination part 10A and 10B and carrying workpiece W.At this, workpiece W is the rectangular substrate being formed with optical alignment film, being such as processed into the size of liquid crystal panel.

Polarized light illumination device 100 irradiates the polarized light (the light of polarization) of predetermined wavelength from illumination part 10A and 10B, and by trucking department 20, workpiece W is moved linearly, the optical alignment film to workpiece W irradiates above-mentioned polarized light, carries out light orientation process simultaneously.

Illumination part 10A and 10B possesses respectively as the discharge lamp 11 of linear light source and by the catoptron 12 of the light of discharge lamp 11 reflection.In addition, illumination part 10A possesses the polarizer unit 13A being configured at its light emitting side, and illumination part 10B possesses the polarizer unit 13B being configured at its light emitting side.In addition, illumination part 10A and 10B possesses lampshade 14 respectively.Discharge lamp 11, catoptron 12 and polarizer unit 13A (or 13B) are incorporated in lampshade 14.

Illumination part 10A and illumination part 10B are under the state making the long side direction of discharge lamp 11 consistent with the direction (Y-direction) in the carrying direction (X-direction) being orthogonal to workpiece W, and the carrying direction (X-direction) along workpiece W is set up in parallel.

At this, the concrete formation of illumination part 10A is described.

Fig. 2 is the sectional view in the direction orthogonal with long side direction that illumination part 10A is shown, Fig. 3 is the sectional view of the long side direction of illumination part 10A.Illumination part 10A and illumination part 10B has identical formation, so formation of illumination part 10A is described at this.

Discharge lamp 11 is long arc discharge lamps of strip.Discharge lamp 11 irradiates the ultraviolet light of such as wavelength 200nm ~ 400nm.

As the material of optical alignment film, the material of the light orientation of known wavelength 254nm, the material of light orientation of use wavelength 313nm, the material etc. by the light orientation of wavelength 365nm, the kind wavelength as required of light source is suitably selected.

In addition, as light source, the linear light source configured by LED or the LD alinement shape of irradiating ultraviolet light can be used.In this case, the orientation of LED, LD is equivalent to the long side direction of lamp.

The radiating light of catoptron 12 in the future self discharge lamp 11, to the reflection of predetermined direction, as shown in Figure 2, be cross section is oval chute shape condenser.Catoptron 12 is configured to, and its long side direction is consistent with the long side direction of discharge lamp 11.

Lampshade 14 has the light exit wound of bullet 14a passed through for the light irradiated from illumination part 10A in its bottom surface.Be provided with polarizer unit 13A at light exit wound of bullet 14a, this polarizer unit 13A has the polarizer for making the light polarization by light exit wound of bullet 14a.

As shown in Figure 4, polarizer unit 13A by being arranged multiple polarizer 13Aa and forming in framework 13Ab.Like this, immediately below discharge lamp 11, multiple polarizer 13Aa is arranged along the long side direction of this discharge lamp 11.

Polarizer 13Aa is wire grid type polarizer, and the number of polarizer 13Aa is suitably selected according to the size in the region of irradiation polarized light.In addition, each polarizer 13Aa is configured to light transmission shaft respectively towards same direction.

Polarizer unit 13B also has the formation identical with polarizer unit 13A.

But, when adopting 2 lamp-based illumination part being arranged in 2 sections, as shown in Figure 4, in the mode that the seam of the seam of polarizer 13Aa and polarizer 13Ba does not overlap each other on the carrying direction (X-direction) of workpiece W, the polarizer 13Ba of polarizer unit 13B is configured in the upper staggered positions in the direction (Y-direction) orthogonal with carrying direction.Thus, illumination part 10A and 10B can irradiate polarized light with uniform energy distribution.

Turn back to Fig. 1, trucking department 20 possesses: the electromagnet 23 by methods such as vacuum suction workpiece W being adsorbed the flat worktable 21 kept, 2 guides 22 extended along the moving direction of worktable 21 and the travel mechanism as an example formation worktable 21.

At this, as above-mentioned travel mechanism, adopt such as magnetic levitation motor operations platform.Magnetic levitation motor operations platform makes moving body (worktable) float on plane platen (platen) by air, this platen is provided with go plate-like the salient pole of kicker magnet, magnetic force is applied to moving body, change the magnetic force between moving body and the salient pole of platen, thus make moving body (worktable) mobile.

Worktable 21 is configured to one edge direction towards movable workbench direction (X-direction), and is reciprocally supported movably under the state that compensate for linearity by guide 22.

In this manual, the moving direction of worktable 21 is X-directions, and the horizontal direction vertical with X-direction is Y-direction, and vertical is Z-direction.In addition, workpiece W is rectangle, with direction towards X-direction, another side towards the posture of Y-direction, be held on worktable 21.

The mobile route of worktable 21 is designed to by immediately below illumination part 10A and 10B.So, trucking department 20 workpiece W is transported to by illumination part 10A and 10B irradiate polarized light irradiation position and by this irradiation position.In the process that this passes through, light orientation process is carried out to the optical alignment film of workpiece W.

In addition, polarized light illumination device 100 possesses polarimetry device 30.The Y-direction trucking department 33 that polarimetry device 30 possesses polarization axle detecting device 31, carried in the Y direction by polarization axle detecting device 31 for the X-direction trucking department 32 carried in the X direction along guide 22 by polarization axle detecting device 31 and being used for.In addition, this polarimetry device 30, except polarization axle detecting device 31, X-direction trucking department 32, Y-direction trucking department 33, also possesses control part 34 described later and monitor 35.

Polarization axle detecting device 31 detects the polarization axle (axle of the polarized light photoirradiated surface) of the polarized light irradiated from illumination part 10A and 10B.

X-direction trucking department 32 is the travel mechanisms making polarization axle detecting device 31 movement in the X direction, such as, have the structure identical with above-mentioned trucking department 20.That is, the mobile route of polarization axle detecting device 31 is designed to by immediately below illumination part 10A and 10B.Polarization axle detecting device 31 is transported to the irradiation position being irradiated polarized light by illumination part 10A and 10B by X-direction trucking department 32 in the X direction.

Y-direction trucking department 33 is the travel mechanisms making polarization axle detecting device 31 movement in the Y direction.Y-direction trucking department 33 makes polarization axle detecting device 31 (the assortment direction of the polarizer of polarizer unit 13A and 13B) upper movement be in the Y direction in the state of irradiating the irradiation position of polarized light by illumination part 10A and 10B at polarization axle detecting device 31 under.

In the present embodiment, immediately below each polarizer of polarizer unit 13A and 13B, (middle position of each polarizer) is as the position (hereinafter referred to as " polarimetry position ") measuring polarization axle, and polarization axle detecting device 31 is at each polarimetry position finding polarization axle.

The concrete formation of polarization axle detecting device 31 is described referring to Fig. 5 and Fig. 6.

Polarization axle detecting device 31 possesses the first polarized light detection portion 311 and the second polarized light detection portion 312.

First polarized light detection portion 311 possesses detection polarizer (hereinafter referred to " the device for testing light ") 311a for detecting polarization axle and the first illuminance transducer 311b for detecting the polarized light that have passed detection polarizer 311a.First illuminance transducer 311b possesses the light accepting part 311c (Fig. 6) for accepting the polarized light that have passed detection polarizer 311a.Light accepting part 311c is fixed to the framework of polarization axle detecting device 31 by support material 311d.

Fig. 7 is the schematic diagram of the formation that the first polarized light detection portion 311 is shown.Shown in this Fig. 7 by the first polarized light detection portion 311 detect from illumination part 10A irradiate polarized light time structure.

As shown in Figure 7, from the light (radiating light L1) of the discharge lamp 11 of illumination part 10A, by polarizer unit 13A, by linear polarization, this polarized light L2 incides detection polarizer 311a.Light accepting part 311c will now have passed the light of detection polarizer 311a as detection light L3 light.

Detection polarizer 311a is such as wire grid type polarizer.In addition, as long as detect with polarizer 311a linear polarization device, arbitrary polarizer can be used.

In addition, detection polarizer 311a is configured to, with its normal direction S for turning axle, rotate freely within the scope of the detection assay more than 180 °.The rotation of detection polarizer 311a is specified by the anglec of rotation θ from the reference position P0 preset.

When the anglec of rotation θ of detection polarizer 311a is the direction of the light transmission shaft T1 of the polarizer 13Aa the forming polarizer unit 13A angle consistent with the direction of the light transmission shaft T2 of detection polarizer 311a, maximum by the illumination of the light of light accepting part 311c light.In addition, when the anglec of rotation θ of detection polarizer 311a is the light transmission shaft T2 angle orthogonal with light transmission shaft T1, minimum by the illumination of the light of light accepting part 311c light.

That is, periodically changed according to the anglec of rotation of detection polarizer 311a by the illumination of the light of light accepting part 311c light.Therefore, by making detection polarizer 311a rotate, while monitor by the illumination of the light of light accepting part 311c light, the polarization axle angle of the polarized light irradiated from illumination part 10A, 10B can be measured.

In order to be configured to rotatable by detection polarizer 311a, the first polarized light detection portion 311 possesses the rotating mechanism for making to detect use polarizer 311a rotation.This rotating mechanism such as possesses the rotary actuator 311e shown in Fig. 5 and Fig. 6 and is fixed to the rotor 311f on rotary actuator 311e.

Rotary actuator 311e is carried out drived control by control part 34 described later.Detect and be fixed on rotor 311f with polarizer 311a, control part 34 couples of rotary actuator 311e carry out drived control, and rotor 311f is rotated, and thus, detect and rotate with polarizer 311a.Thus, detection polarizer 311a is relative with the first illuminance transducer 311b (light accepting part 311c) rotates.

In addition, as shown in Figure 6, the first illuminance transducer 311b has the peristome 311g of restriction to the incident light of light accepting part 311c.Peristome 311g is formed as following shape: polarizer unit 13A, 13B of illumination part 10A, 10B also make the light of oblique incidence pass through and generate polarized light, in order to the polarized light that the composition obtaining these oblique incidences produces, incident angle is made to be that the polarized light of such as 0 ° ~ 65 ° of scopes incides light accepting part 311c.

In addition, the first polarized light detection portion 311 possesses the cooling body for cooling the first illuminance transducer 311b.This cooling body is such as air cooling mode, possesses the cool-air feed portion 311h obtaining cold air from outside.

In addition, cooling body also can adopt water-cooling pattern.But, consider the impact etc. when water-cooled valve is damaged, preferably adopt air cooling mode.

In addition, the second polarized light detection portion 312 except do not possess detection polarizer 311a in the first polarized light detection portion 311 and for this detection polarizer 311a is rotated rotating mechanism except, there is the formation identical with the first polarized light detection portion 311.

That is, as shown in Figure 5 and Figure 6, second polarized light detection portion 312 possesses the second illuminance transducer 312a, and the polarized light from illumination part 10A, 10B is directly incident on the second illuminance transducer 312a, and detects the illumination of this polarized light by the second illuminance transducer 312a.Second illuminance transducer 312a possesses the light accepting part 312b (Fig. 6) directly accepted from the polarized light of illumination part 10A, 10B.

Second illuminance transducer 312a supported portion part 312c supports in the mode that the height and position of light accepting part 312b is identical with the height and position of the light accepting part 311c of the first illuminance transducer 311b.Support unit 312c is fixed to the framework of polarized light detection device 31.

In addition, as shown in Figure 6, the second illuminance transducer 312a has the peristome 312d suppressed to the incident light of light accepting part 312b.In the same manner as above-mentioned peristome 311f, peristome 312d is formed as being the shape that the polarized light of such as 0 ° ~ 65 ° of scopes incides light accepting part 312b by incident angle.

In addition, the second polarized light detection portion 312 possesses the cooling body for cooling the second illuminance transducer 312a.This cooling body such as adopts air cooling mode, possesses the cool-air feed portion 312e obtaining cold air from outside.

In addition, cooling body also can adopt water-cooling pattern.But, consider the impact etc. when water-cooled valve is damaged, preferably adopt air cooling mode.

Second illuminance transducer 312a preferably has sensitivity at the wave band identical with the first illuminance transducer 311b.But, as long as the radiating light of discharge lamp 11 can be detected simultaneously, also sensitivity can be had at different wave bands.

Specifically, the first illuminance transducer 311b and the second illuminance transducer 312a preferably has sensitivity at the wave band of such as 200nm ~ 400nm.More particularly, the preferred easily measurement example of the first illuminance transducer 311b and the second illuminance transducer 312a is as the illumination of 254nm, 313nm, 365nm wavelength.

In addition, the light accepting part 311c of the first illuminance transducer 311b and the light accepting part 312b of the second illuminance transducer 312a is set up in parallel along the tube axial direction (long side direction) of discharge lamp 11.The tube axial direction of discharge lamp 11 is identical with making the Y-direction of polarization axle detecting device 31 movement.

This is because light illumination change on caliber direction of radiating from discharge lamp 11 is large, and on tube axial direction, illumination change is little.Like this, by being set up in parallel along the tube axial direction (long side direction) of discharge lamp 11 by light accepting part 311c and light accepting part 312b, the illumination that can reduce the light that the first illuminance transducer 311b and the second illuminance transducer 312a detects is poor.

In addition, be explained above the situation that the first polarized light detection portion 311 and the second polarized light detection portion 312 have the cooling body for cooling light accepting part respectively, but also transmit via the downside of Y-direction trucking department 32 grade from polarization axle test section 31 from the heat that discharge lamp 11 radiates.Therefore, also heat insulating member can be set in the bottom of the framework of polarization axle test section 31, or rotating mechanism is floated.

Next, the control part 34 forming polarimetry device 30 is described.

Fig. 8 is the block diagram of the formation that polarimetry device 30 is shown.

As mentioned above, polarimetry device 30 possesses polarization axle detecting device 31, X-direction trucking department 32, Y-direction trucking department 33, control part 34 and monitor 35.

Control part 34 possesses rotor control part 34a, input signal converter section 34b, polarization characteristic operational part 34c, image displaying part 34d and carrying control part 34e.

Rotor control part 34a exports the driving instruction being used for rotary actuator 311d being carried out to drived control to the first polarized light detection portion 311.In the present embodiment, in each polarimetry position, make device for testing light 311a rotate to multiple specified angle in the rotation angle range θ 1≤θ≤θ 2 preset, the first illuminance transducer 311b measures polarized light at each specified angle.Rotation angle range strides across the angle of the illumination of polarized light that the first illuminance transducer 311b detects device for testing light 311a minimum in theory, and (setting reference value θ a) is set as the scope of such as ± 20 °.

Such as, when setting reference value θ a and being set to 120 °, rotation angle range is 100 °≤θ≤140 °.

In addition, in the present embodiment, in above-mentioned rotation angle range, such as, except θ=θ a, the angle position measuring polarized light with 10 ° of scales is also set.That is, when rotation angle range is 100 °≤θ≤140 °, with θ=θ 1=100 °, θ=110 °, θ=130 °, θ=θ 2=140 ° measure polarized light.Rotor control part 34a, in order to device for testing light 311a is set to the some of above-mentioned 4 angle positions, exports driving instruction to rotary actuator 311d.

Input signal converter section 34b output detections brightness value (illuminometer numerical value) Cd and reference illumination value (illuminometer numerical value) Cr, polarization characteristic operational part 34c is outputted to after being amplified by these detection signals, above-mentioned detection brightness value Cd is the illuminance information that the first illuminance transducer 311b detects, above-mentioned reference illumination value Cr is the illuminance information that the second illuminance transducer 312a detects.

At this, the first illuminance transducer 311b and the second illuminance transducer 312a detects the illumination of the light accepted in same timing, and input signal converter section 34b is configured to input 2 detection signals simultaneously detected by 2 sensors.

Polarization characteristic operational part 34c according to the illuminance information inputted from input signal converter section 34b, the polarization characteristic of the polarized light that computing is irradiated from illumination part 10A, 10B.In the present embodiment, as above-mentioned polarization characteristic, polarization characteristic operational part 34c measures polarization axle angle and extinction ratio.

Polarization characteristic by polarization characteristic operational part 34c computing is outputted to monitor 35 by image displaying part 34d.

Carrying control part 34e carries out drived control to X-direction trucking department 32 and Y-direction trucking department 33, makes polarization axle detector 31 move to predetermined polarimetry position along XY direction.

Control part 34 and monitor 35 are arranged on the position away from polarization axle detecting device 31, X-direction trucking department 32 and Y-direction trucking department 33, in order to avoid be subject to the impact (mainly the impact of heat) of the ultraviolet light radiated from discharge lamp 11.Control part 34 exports driving instruction by not shown cable to polarization axle detecting device 31 or obtains detection signal etc. from polarization axle detecting device 31.

Fig. 9 is the process flow diagram of the example that the polarimetry treatment step that control part 34 performs is shown.This polarimetry process illustrates the determination step of the polarized light on predetermined polarimetry position.

First, in step sl, control part 34 exports driving instruction from rotor control part 34a to rotary actuator 311d, and device for testing light 311a is rotated to specified angle.At this, the initial value of specified angle is set to θ=θ 1.

Then, in step s 2, control part 34 obtains from the first illuminance transducer 311b and detects brightness value Cd, obtains reference illumination value Cr, transfer to step S3 from the second illuminance transducer 312a.

In step s3, by the detection brightness value Cd that obtains in described step S2 divided by reference illumination value Cr, calculate brightness value Cc (Cc=Cr/Cd) after revising.After this correction, brightness value Cc changes by the illumination in time of reference illumination value Cr to the light detecting the origin self discharge lamp 11 comprised in brightness value Cd the error caused to have carried out revised value.

Then, in step s 4 which, control part 34 judges whether that the whole angle positions presetting complete illumination photometry.And, when being judged as not completing illumination photometry, resetting specified angle, transferring to described step S1, when being judged as completing illumination photometry, transferring to step S5.

In step s 5, control part 34, according to brightness value Cc after the correction of each angle position calculated in described step S3, calculates the polarization axle of polarized light.

In the present embodiment, carry out curve fitting (curvefitting) according to brightness value Cc after each correction, obtain the anglec of rotation representing device for testing light 311a and the polarized light angular characteristics (hereinafter referred to as " angular characteristics ") revising the relation between rear brightness value Cc.This polarized light angle property list have passed the cyclical variation of the illumination of the polarized light of device for testing light 311a when showing and device for testing light 311a is rotated, be the appropriate characteristics above-mentioned illumination being changed the error correction caused.Then, polarization axle angle is calculated by the angular characteristics obtained.

At this, as fitting function, use such as Acos ²the function of (θ+B)+C.In addition, as fitting function, also other functions can be used.

Figure 10 is the figure of the example that above-mentioned angular characteristics is shown.At this, measure 4 points that the angle position of polarized light is θ=120 ° ± 10 °, θ=120 ° ± 20 °.

In this Figure 10, the longitudinal axis is monitor illuminometer numerical value [%], and transverse axis is the anglec of rotation θ [degree] of device for testing light 311a.Dotted line in figure is reference illumination value Cr, and some a ~ d is the point being depicted in brightness value Cc after correction that each angle position calculates.In addition, curve F is the value according to these 4 measuring point a ~ d, is carried out curve fitting and obtains the curve that constant A, B, C obtain, be equivalent to above-mentioned polarized light angular characteristics by least square method and Newton method.

In this angular characteristics F, the minimum angle of monitor illuminometer numerical value is the anglec of rotation of the light transmission shaft of the device for testing light 311a device for testing light 311a actual orthogonal with the light transmission shaft of polarizer 13Aa (or 13Ba).In addition, being the maximum angle of monitor illuminometer numerical value from the angle after the angle that monitor illuminometer numerical value is minimum has deducted 90 °, is the anglec of rotation of the light transmission shaft of the device for testing light 311a device for testing light 311a in fact consistent with the light transmission shaft of polarizer 13Aa (or 13Ba).

At this, the minimum angle of monitor illuminometer numerical value is the parameter B obtained by above-mentioned curve, comprises and offsets predetermined bias angle theta b relative to setting reference value θ a and become (B=θ a+ θ b).So control part 34, according to angle (θ a+ θ b), exports actual polarization axle angle (direction of the light transmission shaft of polarizer 13Aa, 13Ba).

As mentioned above, the anglec of rotation of device for testing light 311a is specified by the angle θ relative to reference position P0.And in the same manner as device for testing light 311a, when polarization axle angle is specified by the angle relative to reference position P0, control part 34 will deduct the angle after 90 ° from angle (θ a+ θ b) and export as the polarization axle angle of reality.In addition, when polarization axle angle is specified by the angle relative to the position that offset by 90 ° from reference position P0, angle (θ a+ θ b) directly exports as actual polarization axle angle by control part 34.

Then, in step s 6, it is minimum angle (θ a+ θ b) that device for testing light 311a is rotated to the monitor illuminometer numerical value calculated in described step S5 by control part 34, transfers to step S7.

In the step s 7, control part 34 obtains from the first illuminance transducer 311b and detects brightness value Cd (the measuring point e of Figure 10), is set to the minimal illumination of polarized light, transfers to step S8.

In step s 8, control part 34 device for testing light 311a is rotated to calculate in described step S5, monitor illuminometer numerical value is minimum angle (θ a+ θ b-90 °), transfers to step S9.

In step s 9, control part 34 obtains from the first illuminance transducer 311b and detects brightness value Cd (the measuring point f of Figure 10), it can be used as the maximal illumination of polarized light, transfers to step S10.

In step slo, control part 34 calculates extinction ratio according to the minimal illumination obtained in described step S7 and the ratio (maximal illumination/minimal illumination) of the maximal illumination obtained in described step S9.

In step s 11, control part 34 exports the polarization axle angle of computing among described step S5 and the extinction ratio of computing in described step S10 from image displaying part 34d to monitor 35.Thus, monitor 35 shows the measurement result of polarization characteristic.

In addition, the step S1 ~ S4 of Fig. 9 is corresponding with rotation control unit, and step S5 ~ S10 is corresponding with polarization characteristic operational part.In addition, step S5 is corresponding with polarization axle angle operational part, and step S6 ~ S10 is corresponding with extinction ratio operational part.

Then, action and the effect of present embodiment are described.

First, control part 34 pairs of X-direction trucking departments 32 and Y-direction trucking department 33 carry out drived control, immediately below the polarizer 13Aa of most end being positioned at Y-direction among multiple polarizer 13Aa polarized light detector 31 being configured in polarizer unit 13A.Like this, polarized light detection device 31 is configured in the irradiation area of the polarized light of the polarizer 13Aa of the determination object that have passed as polarization characteristic by control part 34.

When setting reference value θ a=120 °, when device for testing light 311a is θ=120 °, the illumination of the polarized light that the first illuminance transducer 311b detects should be minimum.Therefore, first, control part 34 couples of rotary actuator 311d carry out drived control, device for testing light 311a are rotated to θ=θ a-20 °=100 °.

Then, in this condition, by the illumination of the first illuminance transducer 311b and the second illuminance transducer 312a Simultaneously test polarized light, control part 34 obtains the illuminance information measured by these 2 sensors.That is, namely the illuminance information that control part 34 obtains from the first illuminance transducer 311b the polarized light that have passed device for testing light 311a detects brightness value Cd, obtains not by illuminance information and the reference illumination value Cr of the polarized light of device for testing light 311a from the second illuminance transducer 312a.

Then, control part 34 couples of rotary actuator 311d carry out drived control, make the position of device for testing light 311a from θ=100 ° rotate to θ=110 °.Then, in this position, control part 34 obtains the detection brightness value Cd and reference illumination value Cr that utilize the first illuminance transducer 311b and the second illuminance transducer 312a to measure.

Then, control part 34 makes device for testing light 311a rotate to θ=130 ° and θ=140 ° respectively, similarly obtains the detection brightness value Cd and reference illumination value Cr that are measured by the first illuminance transducer 311b and the second illuminance transducer 312a.

Then, control part 34, according to the detection brightness value Cd obtained in each angle position and reference illumination value Cr, calculates the angular characteristics shown in Figure 10.

Detect the brightness value that brightness value Cd is the polarized light that have passed device for testing light 311a, so brightness value changes according to the light transmission shaft angulation of the light transmission shaft of polarizer 13Aa and device for testing light 311a.Therefore, by making the anglec of rotation θ of device for testing light 311a change the variation monitoring and detect brightness value Cd, the angular characteristics of the relation between the anglec of rotation representing device for testing light 311a and the illuminance information of the polarized light that have passed device for testing light 311a can be calculated.

But, due to light quantity moment change according to the fluctuation of electric arc of the discharge lamp 11 as light source, so during the anglec of rotation θ changing device for testing light 311a, there will be the phenomenon changed from the light quantity of the radiating light of discharge lamp 11.

Therefore, when not considering the fluctuation of the electric arc of this discharge lamp and directly use detection brightness value Cd to calculate angular characteristics, can calculate the angular characteristics that the illumination in time containing the light irradiated from discharge lamp 11 changes the error caused, polarimetry precision significantly declines.

So, in the present embodiment, utilize the first illuminance transducer 311b to measure the illumination that have passed the polarized light from illumination part of device for testing light 311a, utilize the second illuminance transducer 312a to measure not by the illumination of the polarized light from illumination part of device for testing light 311a simultaneously.That is, both utilizations detect the fluctuation of identical electric arc, thus the reference illumination value Cr obtained by the second illuminance transducer 312a is used as the reference value of the detection brightness value Cd obtained by the first illuminance transducer 311b.

The detection brightness value Cd that obtains from the first illuminance transducer 311b divided by the reference illumination value Cr obtained from the second illuminance transducer 312a, thus can to revise detecting the error that the illumination caused by the fluctuation of the electric arc variation that comprises in brightness value Cd produces by control part 34.And based on revised brightness value (after revising brightness value Cc), the gimmick of use curve matching calculates the angular characteristics F shown in Figure 10.

As mentioned above, the detection brightness value Cd of Simultaneously test and reference illumination value Cr, the surging condition of electric arc is identical.Therefore, revising rear brightness value Cc by using, even if electric arc change during device for testing light 311a rotates, still precision can calculate angular characteristics well.

When control part 34 calculates the angular characteristics F shown in Figure 10, calculate polarization axle angle according to this angular characteristics F.Specifically, according to angular characteristics F, determine that the illumination of the polarized light that have passed device for testing light 311a is the anglec of rotation (θ a+ θ b) of minimum device for testing light 311a, export actual polarization axle angle according to this anglec of rotation.

Then, control part 34 use angle characteristic F calculates the extinction ratio of polarized light.First, control part 34, in order to detect the minimal illumination of polarized light, carries out drived control to rotary actuator 311d, device for testing light 311a is rotated to θ=(θ a+ θ b).In this condition, control part 34 obtains detection brightness value Cd (the measuring point e of Figure 10) as minimal illumination value from the first illuminance transducer 311b.

Then, control part 34, in order to detect the maximal illumination of polarized light, carries out drived control to rotary actuator 311d, device for testing light 311a is rotated to θ=(θ a+ θ b-90 °).In this condition, control part 34 obtains detection brightness value Cd (the measuring point f of Figure 10) as maximal illumination value from the first illuminance transducer 311b.

Then, control part 34 calculates extinction ratio according to minimal illumination value and the ratio (maximal illumination value/minimal illumination value) of maximal illumination value.

By above process, obtain the polarization characteristic being positioned at the polarized light of the polarizer 13Aa of the most end of Y-direction that have passed among multiple polarizer 13Aa of polarizer unit 13A.Then, control part 34 pairs of Y-direction trucking departments 33 carry out drived control, are configured to by polarized light detection device 31 immediately below the polarizer 13Aa adjacent with the polarizer 13Aa determining polarization characteristic before.Like this, the determination object of polarization characteristic is switched successively to measure polarization characteristic.

When completing measuring polarization characteristics to whole polarizer 13Aa of polarizer unit 13A, control part 34 pairs of X-direction trucking departments 33 and Y-direction trucking department 33 carry out drived control, immediately below the polarizer 13Ba of most end being positioned at Y-direction among multiple polarizer 13Ba polarized light detection device 31 being configured in polarizer unit 13B.And, same with the situation of polarizer unit 13A, respectively polarization characteristic is measured to each polarizer 13Ba.

In fixed point, detect as described above and detect brightness value Cd and reference illumination value Cr, based on detection brightness value Cd, polarization axle angle is measured to the data that reference illumination value Cr revises, and the results are shown in the α of Figure 11.At this, the longitudinal axis of Figure 11 is polarization axle angle, and transverse axis is the mensuration number of times of polarization axle angle.As shown in experimental result α, in the present embodiment, the polarization axle angle be measured to almost does not have deviation, and standard deviation 3 σ is 0.004.That is, the polarization axle angle be measured to has 99.7% to be included in so minimum deviation range at ± 0.004 °.

As comparative example, do not carry out the correction based on reference illumination value Cr as in the present embodiment, only use and detect brightness value Cd mensuration polarization axle angle.The results are shown in the β of Figure 11.

As shown in experimental result β, in a comparative example, measurement result changes, and occurs very large outstanding value once in a while.This is because, device for testing light 311a rotated and during 4 mensuration polarized lights that angle is different, produces the fluctuation of electric arc, can not stably measure polarization axle angle.Like this, the deviation that measurement result occurs because of the fluctuation of electric arc can be understood intuitively.

In addition, after the measurement result of comparative example being added up, standard deviation 3 σ of the polarization axle angle be measured to is 0.035.That is, the polarization axle angle be measured to has ± 0.035 ° of such deviation.

In polarized light illumination device 100, from the view point of the precision prescribed of light luminous intensity distribution process, preferably by polarization axle angle relative to setting value adjust to ± 0.05 ° within.That is, the precision prescribed of preferred polarimetry is about ± 0.01 °.But, in above-mentioned comparative example, the precision prescribed of polarimetry can not be met.

In the present embodiment, except the first polarized light detection portion 311 with device for testing light, also possess the second polarized light detection portion 312 of the not direct-detection polarized light via device for testing light, utilize the first polarized light detection portion 311 and the second polarized light detection portion 312 to detect identical polarized light simultaneously.

Therefore, the illuminance information detected by the second polarized light detection portion 312 is set to the benchmark illuminance information of polarized light, to comprise in the illuminance information detected by the first polarized light detection portion 311, illumination in time that the fluctuation of the electric arc of discharge lamp 11 causes changes the error caused and revises.Therefore, it is possible to calculate the periodically variable angular characteristics of the illumination of detection light when making the device for testing light 311a in the first polarized light detection portion 311 rotate accurately, polarization axle angle and extinction ratio can be calculated accurately.

In addition, the first polarized light detection portion 311 and the second polarized light detection portion 312 configure along the long side direction of discharge lamp 11.Like this, owing to being arranged on the direction that the illumination change of discharge lamp 11 is few, so the dependence to place can be reduced, the measurement result that reliability is high can be obtained.

Particularly, when have employed the lamp of more than 2 lamp-based as light source, if the first polarized light detection portion 311 and the second polarized light detection portion 312 are arranged on the caliber direction of lamp, then easily be subject to the impact of the light radiated from the lamp adjacent with the lamp of determination object, the measurement result that reliability is high can not be obtained.In the present embodiment, first polarized light detection portion 311 and the second polarized light detection portion 312 are configured on the long side direction of discharge lamp 11, even if so when have employed the lamp of more than 2 lamp-based as light source, the high measurement result of reliability also can be obtained.

In addition, the first polarized light detection portion 311 and the second polarized light detection portion 312 use being configured under the state immediately below discharge lamp 11, and heat condition is harsh.Such as, when holding member device for testing light 311a kept with formation such as aluminium, be subject to the impact of the ultraviolet light (heat) radiated from discharge lamp 11, this holding member thermal expansion, relative offset between device for testing light 311a and light accepting part 311c, the illumination of the light that light accepting part 311c detects likely changes.

In the present embodiment, in the first polarized light detection portion 311 and the second polarized light detection portion 312, the cooling body for cooling the first illuminance transducer 311b and the second illuminance transducer 312a is respectively arranged with, so stably polarized light can be detected.

In addition, when the illuminance information detected by the first polarized light detection portion 311 (detecting brightness value Cd) being revised according to the illuminance information detected by the second polarized light detection portion 312 (reference illumination value Cr), brightness value Cd will be detected divided by reference illumination value Cr, thus calculate to the electric arc by discharge lamp 11 fluctuate the variation of the illumination in time generation caused the correction revised of error after brightness value Cc.Like this, can by fairly simple gimmick correcting said error.

In addition, the measuring point of polarized light is across 4 points in the predetermined rotation angle range of setting reference value θ a, and the illumination of the detection light that this setting reference value θ a is set to when the device for testing light 311a in the first polarized light detection portion 311 is rotated is minimum.And, according to the illuminance information of this 4 each measuring point, calculate the periodically variable angular characteristics of the illumination of the detection light represented when the device for testing light 311a in the first polarized light detection portion 311 is rotated.

Like this, in the calculating of angular characteristics, be used in the illumination detecting light is the illuminance information that minimum approximate angle is measured to, so can calculate the angular characteristics of the impact that inhibit noise contribution.

In addition, owing to arranging the second polarized light detection portion directly measured from the polarized light of illumination part 10A, 10B, so while the polarization axle angle measuring polarized light and extinction ratio, the illumination of polarized light can also be measured.Like this, can carry out the mensuration of polarization characteristic of polarized light and the mensuration of the illumination of polarized light, efficiency is higher simultaneously.

As mentioned above, in the present embodiment, even if when employing the light source of the illumination variation had in time, also can not by the impact of this illumination variation simply and measure polarization axle angle and the extinction ratio of polarized light accurately.

Therefore, it is possible to suitably judge whether the polarization axle of the polarized light irradiated from illumination part becomes required polarization axle.And, when not becoming required polarization axle, can carry out, in order to be set as that required polarization axle adjusts the process of the arrangement angles of the polarizer of illumination part etc., suitable light orientation process can being carried out.

(variation)

In the above-described embodiment, describe and calculate detecting brightness value Cd the situation revising rear brightness value Cc divided by reference illumination value Cr, but such as also can adopt other modes.

Below, alternatively, illustrate that use subtraction and mean value carry out the mode revised.

First, in θ=θ a ± 20 °, θ=θ a ± 10 ° amount to 4 points, the first polarized light detection portion 311 and the second polarized light detection portion 312 measure detection brightness value Cd and reference illumination value Cr respectively.At this, the detection brightness value Cd be measured to is set to Cd1, Cd2, Cd3, Cd4, the reference illumination value Cr be measured at each specified angle is set to Cr1, Cr2, Cr3, Cr4 at each specified angle.

Then, control part 34 calculates the mean value Cra of the reference illumination value Cr1 ~ Cr4 be measured at each specified angle, calculates from detecting value that difference that brightness value Cdn deducted mean value Cra and reference illumination value Crn obtains as revising brightness value Cc afterwards.That is, after revising, brightness value Cc is Cc1=Cd1-(Cra-Cr1), Cc2=Cd2-(Cra-Cr2), Cc3=Cd3-(Cra-Cr3), Cc4=Cd4-(Cra-Cr4).

Process after the step S5 of process afterwards and Fig. 9 is identical.That is, control part 34, according to brightness value Cc1 ~ Cc4 after correction, is carried out curve fitting by least square method and Newton method, obtains fitting function Acos ²constant A, B, C of (θ+B)+C.Control part 34 is adopted and is calculated polarized light angular characteristics in this way.

In this case, according to detect comprise in brightness value Cd change by the fluctuate illumination in time that causes of the electric arc of discharge lamp 11 brightness value that the error that causes revises, obtain polarized light angular characteristics, polarization axle angle and extinction ratio can be measured accurately.

In addition, in the above-described embodiment, to illustrate in θ=θ a ± 20 ° and a ° place, θ=θ a ± 10 utilizes for 4 times the first polarized light detection portion 311 to measure the situation of illumination each 1 time altogether, but mensuration number of times suitably can set according to allowing minute.Calculating based on least square method also can be carried out when measuring point is 3, so measuring number of times also can be 3 times.When determining at 4, using 4 groups 3 combinations, carrying out angular characteristics etc. to each group, thus improve the precision of measurement result.In addition, measuring number of times can certainly be more than 5 times.

In addition, in above-mentioned embodiment, describing the situation rotating device for testing light 311a when carrying out illumination photometry with 10 ° of scales, also suitably can set unit angle.

In addition, in the above-described embodiment, describe the situation at 1 place of central authorities polarimetry position being set in each polarizer 13Aa, 13Ba, but consider the deviation of the polarization axle angle in 1 polarizer, also polarimetry position, many places can be set for each polarizer.In this case, also can be average etc. by being weighted the measurement result of each polarimetry position, calculate final polarization characteristic.

In addition, in the above-described embodiment, the polarization axle angle that also can arrange according to being measured to by polarimetry device 30 automatically adjusts the angle of polarizer 13Aa and polarizer 13Ba and makes the polarization axle angle of polarizer 13Aa and polarizer 13Ba become the mechanism of required polarization axle angle.In addition, the angular setting of polarizer 13Aa and polarizer 13Ba also manually can be carried out by operator.

In addition, in the above-described embodiment, describe the situation by support unit 311d, the light accepting part 311c of the first illuminance transducer 311b being fixed to the framework of polarization axle detecting device 31, but light accepting part 311c also can be configured to rotate together with device for testing light 311a.Wherein, in order to stably measure illumination, preferably as embodiment described above, light accepting part 311c is fixed, make that device for testing light 311a is relative with light accepting part 311c to be rotated.

In addition, in the above-described embodiment, describing the situation of the discharge lamp 11 adopting 2 lamp-based as light source, but also can adopt 1 lamp-based, also can be more than 3 lamp-based.

In addition, in the above-described embodiment, describe and use as workpiece W the situation of the liquid crystal panel of optical alignment film of defining, also can be such as, the such workpiece being wound into the bar-shape on roller of field angle compensate film.

Claims (10)

1. a polarization axle detecting device, detects the polarization axle of the polarized light from light source irradiation, it is characterized in that, possess:

First polarized light detection portion, has the rotatable detection polarizer for detecting described polarization axle and detects the first illuminance transducer that have passed the illuminance information of the polarized light from described light source of described detection polarizer; And

Second polarized light detection portion, has second illuminance transducer of direct-detection from the illuminance information of the polarized light of described light source, is set up in parallel with described first polarized light detection portion.

2. polarization axle detecting device according to claim 1, is characterized in that,

Described light source is linear light source,

Described first illuminance transducer and described second illuminance transducer arrange along the direction arrangement that described linear light source extends.

3. a polarimetry device, is characterized in that, possesses:

Polarization axle detecting device described in claim 1 or 2; And

Polarized light determination part, measures described polarized light according to the illuminance information that described polarization axle detecting device detects,

Described polarized light determination part possesses:

Rotation control unit, rotates to multiple specified angle by described detection polarizer;

Illuminance information correction portion, brightness value after computing correction is carried out according to detection brightness value and reference illumination value, described detection brightness value is the illuminance information detected by described first illuminance transducer at described multiple specified angle, described reference illumination value is the illuminance information that the detection of this detection brightness value carried out with described first illuminance transducer is synchronously detected by described second illuminance transducer, after described correction, brightness value changes by the illumination in time of the polarized light from described light source irradiation the error caused carried out revised brightness value to what comprise in described detection brightness value, and

Polarization characteristic operational part, the polarized light angular characteristics of the relation after the anglec of rotation that computing represents described detection polarizer and the correction that calculated by described illuminance information correction portion between brightness value, according to this polarized light angular characteristics, computing is from the polarization characteristic of the polarized light of described light source.

4. polarimetry device according to claim 3, is characterized in that,

The described detection brightness value that described illuminance information correction portion will be detected by described first illuminance transducer, divided by the described reference illumination value that the detection with this detection brightness value is synchronously detected by described second illuminance transducer, thus brightness value after revising described in computing.

5. polarimetry device according to claim 3, is characterized in that,

Described illuminance information correction portion is by from the described detection brightness value detected by described first illuminance transducer, the mean value deducting each reference illumination value detected by described second illuminance transducer at described multiple specified angle and the difference of described reference illumination value synchronously detected by described second illuminance transducer with the detection of described detection brightness value, thus brightness value after revising described in computing.

6. the polarimetry device according to any one of claim 3 ~ 5, is characterized in that,

Described polarization characteristic operational part possesses polarization axle angle operational part, this polarization axle angle operational part is according to described polarized light angular characteristics, determine that the illumination of the polarized light from described light source that have passed described detection polarizer becomes the anglec of rotation of the described detection polarizer of extreme value, according to the determined anglec of rotation, the polarization axle angle of polarized light described in computing is as described polarization characteristic.

7. the polarimetry device according to any one of claim 3 ~ 6, is characterized in that,

Described polarization characteristic operational part possesses extinction ratio operational part, this extinction ratio operational part is according to described polarized light angular characteristics, determine maximal value and the minimum value of the illumination of the polarized light from described light source that have passed described detection polarizer, according to determined maximal value and minimum value, the extinction ratio of polarized light described in computing is as described polarization characteristic.

8. a polarimetry method, measures the polarized light from light source irradiation, comprises the steps:

Be used in and detect the detection polarizer of polarization axle and rotate to multiple specified angle, each specified angle detect have passed the polarized light from described light source of described detection polarizer illuminance information, namely detect brightness value;

Have passed the illuminance information of the polarized light from described light source of described detection polarizer in timing synchronization with detection, direct-detection is not by the illuminance information of the polarized light from described light source of described detection polarizer, i.e. reference illumination value.

9. polarimetry method according to claim 8, comprises the steps:

According to the described detection brightness value detected at described multiple specified angle and described reference illumination value, computing changes brightness value after the correction that the error that causes revises to what comprise in described detection brightness value by the illumination in time of the polarized light from described light source irradiation;

Computing represents the polarized light angular characteristics of the relation after the anglec of rotation of described detection polarizer and described correction between brightness value;

The polarization characteristic of computing from the polarized light of described light source is carried out according to described polarized light angular characteristics.

10. a polarized light illumination device, irradiates polarized light to alignment films and carries out light orientation, it is characterized in that having:

Linear light source;

Multiple polarizer, arranges along the direction that described linear light source extends;

Illumination part, irradiates and utilizes described polarizer by the polarized light after the light polarization of described linear light source; And

Polarimetry device described in any one of claim 3 ~ 7, measures the polarized light that described illumination part irradiates.