CN105300524B - Polarize axis detector, polarimetry device and method, polarized light illumination device - Google Patents
Polarize axis detector, polarimetry device and method, polarized light illumination device Download PDFInfo
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- 238000005286 illumination Methods 0.000 title claims abstract description 191
- 238000000711 polarimetry Methods 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000001514 detection method Methods 0.000 claims abstract description 205
- 230000010287 polarization Effects 0.000 claims abstract description 155
- 230000008033 biological extinction Effects 0.000 claims description 16
- 238000012937 correction Methods 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 abstract description 55
- 230000008859 change Effects 0.000 description 22
- 238000001816 cooling Methods 0.000 description 15
- 238000010891 electric arc Methods 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 11
- 239000000203 mixture Substances 0.000 description 10
- 238000012545 processing Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 6
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- 238000010586 diagram Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
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- 238000003556 assay Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000012857 repacking Methods 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/31—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter and a light receiver being disposed at the same side of a fibre or waveguide end-face, e.g. reflectometers
- G01M11/3181—Reflectometers dealing with polarisation
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- Chemical & Material Sciences (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
One kind polarization axis detector, polarimetry device, polarimetry method and polarized light illumination device, when the light from light source exists and changed with the illumination of time, remain to the polarization axle of high precision test polarised light.Polarization axis detector possesses：First polarized light detection portion (311), the first illuminance transducer (311b) of the illuminance information of the polarised light from light source of detection polarizer (311a) is passed through with the rotatable detection polarizer (311a) and detection for being used to detect polarization axle；And the second polarized light detection portion (312), it is set up in parallel with the first polarized light detection portion (311), there is the second illuminance transducer (312a) of the directly illuminance information of polarised light of the detection from light source.The illuminance information that the illuminance information and the second polarized light detection portion (312) that polarimetry device detects according to the first polarized light detection portion (311) detect is come the polarization characteristic of polarised light of the computing from light source.
Description
Technical field
The present invention relates to the polarization axis detector of the polarization axle for determining polarised light, polarimetry device, polarimetry
Method and polarized light illumination device.
Background technology
In recent years, on using liquid crystal panel as the alignment films of the liquid crystal display cells of representative or the orientation of visual field angle compensation film
The orientation process of layer etc., using the polarised light of irradiation predetermined wavelength come technology being orientated, being referred to as light orientation.
The irradiation unit used in light orientation, is generally configured with light source and polarizer, makes the light of light source by polarizer, and shine
Penetrate thus obtained polarised light.In light orientation technology, the polarization axle of the polarised light irradiated from irradiation unit is (on photoirradiated surface
The axle of polarised light) whether it is very important as desired polarization axle.Therefore, it is predetermined by the angle initialization of polarizer
It is actual to carry out polarizing light irradiation and determine polarization axle after angle, if not turning into desired polarization axle, need to carry out
The operation of correcting polarizer angle.
As existing polarization axle assay method, the technology that for example patent document 1 is recorded be present.In the art, except
Outside the polarizer of irradiation unit possessed first, also set up for detecting the second polarizer of polarization axle, while making second inclined
The device that shakes rotates, while detection has passed sequentially through the light of the first polarizer and the second polarizer, according to the testing result, measure polarization
The polarization characteristic of light.Specifically, the periodically variable change of the light quantity of detection light when representing the rotation of the second polarizer is obtained
Change curve, polarization axle and extinction ratio are determined according to the change curve, as above-mentioned polarization characteristic.
Patent document 1：Japanese Unexamined Patent Publication 2014-20890 publications
In the technology that above-mentioned patent document 1 is recorded, discharge lamp is utilized as light source.In the discharge lamp, electric arc be present
The rheological parameters' change with time of the caused light quantity of fluctuation, during the 2nd polarizer is rotated, also the moment changes light quantity.But above-mentioned
In the technology that patent document 1 is recorded, the fluctuation of the electric arc due to not accounting for the discharge lamp, so the survey of the polarization axle of polarised light
It is low to determine precision.
The content of the invention
Here, the problem of the present invention is, there is provided one kind polarization axis detector, polarimetry device, polarimetry method
And polarized light illumination device, the light from light source illumination change over time it is dynamic in the case of, also can accurately examine
Survey the polarization axle of polarised light.
In order to solve above-mentioned problem, a kind of polarization axis detector of the invention, detect from the inclined of the polarised light of light source irradiation
Shake axle, including：First polarized light detection portion, have be used for detect the polarization axle rotatable detection polarizer and
Detection has passed through the first illuminance transducer of the illuminance information of the polarised light from the light source of the detection polarizer；With
And the second polarized light detection portion, second illumination with the illuminance information for directly detecting the polarised light from the light source sense
Device, it is set up in parallel with the first polarized light detection portion.
Like this, detection is set up in parallel with the first polarized light detection portion not by detection polarizer from the inclined of light source
Shake the second polarized light detection portion of light.Therefore, it is possible to watch the fluctuation of identical polarised light, energy using 2 polarized light detection portions
It is enough that the illuminance information of the polarised light detected by the second polarized light detection portion is set to what is detected by the first polarized light detection portion
The a reference value of the illuminance information of polarised light.Therefore, cause even in the output deviation because of light source or fluctuation etc. from the inclined of light source
Shake light illumination temporally change in the case of, can also account for the illumination variation polarization axle detection.
In addition, in above-mentioned polarization axis detector, preferably described light source is linear light source, first illuminance transducer
The direction extended with second illuminance transducer along the linear light source, which arranges, to be arranged.
Like this, when light source being set into linear light source, by 2 illuminance transducers in the few side of the illumination change of linear light source
It is arranged upwards, so the dependence in each place can be reduced, obtains the high measurement result of reliability.
In addition, a kind of polarimetry device of mode of the present invention, possesses：Any one above-mentioned polarization axis detector；With
And refractive index measured by the polarised light portion, the polarised light, the polarization are determined according to the illuminance information that detects of polarization axis detector
Light measurement portion possesses：Rotation control unit, the detection is rotated into multiple specified angles with polarizer；Illuminance information correction portion,
According to detection brightness value and reference illumination value come brightness value after computing amendment, the detection brightness value is at the multiple specified angle
The illuminance information detected by first illuminance transducer is spent, the reference illumination value is entered with first illuminance transducer
The illuminance information that the detection of the capable detection brightness value is synchronously detected by second illuminance transducer, shines after the amendment
Angle value is that the illumination with the time by the polarised light irradiated from the light source included in the detection brightness value is changed to cause
Error be corrected after brightness value；And polarization characteristic operational part, computing represent the rotation of the detection polarizer
The polarised light angular characteristicses of relation after angle and the amendment calculated by the illuminance information correction portion between brightness value, according to
The polarised light angular characteristicses, the polarization characteristic of polarised light of the computing from the light source.
Like this, using the reference illumination value detected by the second polarized light detection portion, to by the first polarized light detection portion
Error caused by the illumination variation with the time of the polarised light from light source included in the detection brightness value detected is repaiied
Just, so the polarised light angular characteristicses that have modified above-mentioned error can be calculated.Therefore, even in making detection be rotated with polarizer
During, in the case that the polarised light from light source changes, it still is able to the polarization characteristic of the accurately computing polarised light.
In addition, in above-mentioned polarimetry device, preferably described illuminance information correction portion will be passed by first illumination
The detection brightness value that sensor detects, divided by with the detection of the detection brightness value synchronously by second illuminance transducer
The reference illumination value detected, so as to brightness value after amendment described in computing.Like this, can utilize simpler as division
Single gimmick, suitably the illumination of the polarised light from light source to being included in detection brightness value change caused by error repair
Just.
In addition, in above-mentioned polarimetry device, preferably described illuminance information correction portion from by described first by shining
The detection brightness value that degree sensor detects, subtracts and is detected in the multiple specified angle by second illuminance transducer
The average value of each reference illumination value arrived and with it is described detection brightness value detection synchronously by second illuminance transducer examine
The difference of the reference illumination value measured, so as to brightness value after amendment described in computing.Like this, subtraction and mean value calculation are utilized
Such better simply gimmick, suitably the illumination by the polarised light from light source included in detection brightness value can be changed
Caused error is modified.
In addition, in above-mentioned polarimetry device, preferably described polarization characteristic operational part possesses polarization axle angle computing
Portion, the polarization axle angle operational part is according to the polarised light angular characteristicses, it is determined that having passed through coming from for the detection polarizer
The illumination of the polarised light of the light source turns into the anglec of rotation of the detection polarizer of extreme value, according to the identified anglec of rotation
Degree, the polarization axle angle of polarised light described in computing are used as the polarization characteristic.Thereby, it is possible to accurately computing to polarize shaft angle
Degree.
In addition, in above-mentioned polarimetry device, preferably described polarization characteristic operational part possesses extinction ratio operational part, should
Extinction ratio operational part according to the polarised light angular characteristicses, it is determined that passed through the detection polarizer from the light source
The maximum and minimum value of the illumination of polarised light, according to identified maximum and minimum value, the delustring of polarised light described in computing
It is used for the polarization characteristic.Thereby, it is possible to accurately computing extinction ratio.
In addition, a kind of polarimetry method of mode of the present invention, determines the polarised light from light source irradiation, including following step
Suddenly：The detection for being used in detection polarization axle rotates to multiple specified angles with polarizer, has passed through institute in the detection of each specified angle
State the illuminance information of the polarised light from the light source of detection polarizer, detect brightness value；And pass through with detection
In timing synchronization, directly detection does not pass through institute to the illuminance information of the polarised light from the light source of the detection polarizer
State illuminance information, the i.e. reference illumination value of the polarised light from the light source of detection polarizer.
Like this, synchronous detection has passed through the polarised light from light source of detection polarizer and not by detection polarization
The polarised light from light source of device.Therefore, reference illumination value is set to detect to a reference value of brightness value, even in from light source
In the case that the illumination of polarised light temporally changes, the detection of the polarization axle of illumination variation can have also been accounted for.
In addition, in above-mentioned polarimetry method, comprise the following steps：Detected according in the multiple specified angle
The detection brightness value and the reference illumination value, computing to it is described detection brightness value in include by from the light source irradiate
Polarised light the illumination with the time change caused by brightness value after the amendment that is corrected of error；Computing represents the detection
With the polarised light angular characteristicses of the relation between brightness value after the anglec of rotation of polarizer and the amendment；And according to described inclined
Angular of shaking characteristic carrys out the polarization characteristic of polarised light of the computing from the light source.
Like this, can use reference illumination value to detection brightness value in include the polarised light from light source with the time
Illumination change caused by error be modified.Therefore, it is possible to calculate the polarised light angle being corrected to above-mentioned error
Characteristic.Therefore, during detection is rotated with polarizer, in the case that the polarised light from light source varies by, it still is able to
Accurately detect the polarization characteristic of the polarised light.
In addition, a kind of polarized light illumination device of mode of the present invention, irradiates polarised light to alignment films and carries out light orientation,
Have：Linear light source；Multiple polarizers, arranged along the direction of linear light source extension；Illumination part, irradiate described in utilizing
Polarizer is by the polarised light after the light polarization of the linear light source；And the polarimetry device described in any of the above-described, measure
The polarised light of the illumination part irradiation.
Thus, polarimetry device can accurately determine the polarization characteristic of the polarised light from illumination part irradiation.Cause
Whether this, can rightly judge the polarization axle of the polarised light from illumination part irradiation turns into required polarization axle.
Invention effect
In the polarization axis detector of the present invention, the polarised light from light source of detection polarizer is passed through with detection
First polarized light detection portion is set up in parallel the second polarised light for detecting the not polarised light from light source by detection polarizer
Test section.Therefore, in the case that the illumination of the polarised light from light source temporally changes, the photograph can have been accounted for
Spend the detection of the polarization axle changed.
In addition, in possessing the polarimetry device of the polarization axis detector, can use by the second polarized light detection portion
The reference illumination value detected, the detection brightness value detected by the first polarized light detection portion is modified, so even in
, being capable of accurately computing polarised light in the case that polarised light from light source changes during detection is rotated with polarizer
Polarization characteristic.
Brief description of the drawings
Fig. 1 is the sketch structure figure for the polarized light illumination device for showing present embodiment.
Fig. 2 is the sectional view in the direction orthogonal with long side direction of illumination part.
Fig. 3 is the sectional view of the long side direction of illumination part.
Fig. 4 is the figure for the configuration example for showing polarizer.
Fig. 5 is the stereogram for showing to polarize the major part of axis detector.
Fig. 6 is the cross-sectional perspective view for showing to polarize the major part of axis detector.
Fig. 7 is the schematic diagram for the composition for showing the first polarized light detection portion.
Fig. 8 is the block diagram for the composition for showing polarimetry device.
Fig. 9 is the flow chart for showing the polarimetry processing step by control unit execution.
Figure 10 is the figure of an example of the angular characteristicses for showing polarised light.
Figure 11 is the figure for illustrating the effect of present embodiment.
Description of reference numerals：
10A, 10B ... illumination part；11 ... discharge lamps；12 ... speculums；13A, 13B ... polarizer unit；13Aa、
13Ba ... polarizers；13Ab, 13Bb ... framework；14 ... lampshades；20 ... trucking departments；21 ... workbench；22 ... guides；23 ... electricity
Magnet；30 ... polarimetry devices；31 ... polarization axis detectors；311 ... first polarized light detection portions；311a ... detections polarize
Device (device for testing light)；The illuminance transducers of 311b ... first；311c ... light accepting parts；311d ... supporting members；311e ... is rotatably activated
Device；311f ... rotors；311g ... opening portions；311h ... cool-air feeds portion；312 ... second polarized light detection portions；312a ... second
Illuminance transducer；312b ... light accepting parts；312c ... supporting members；312d ... opening portions；312e ... 32 ... X-direction trucking departments；
33 ... Y-direction trucking departments；34 ... control units；34a ... rotor control units；34b ... input signal converter sections；34c ... polarization characteristics
Operational part；34d ... image displaying parts；34e ... carries control unit；35 ... monitors；100 ... polarized light illumination devices
Embodiment
Below based on brief description of the drawings embodiments of the present invention.
Fig. 1 is the sketch structure figure for the polarized light illumination device for showing present embodiment.
Polarized light illumination device 100 possesses illumination part 10A and 10B and carries workpiece W trucking department 20.Here, work
Part W be formed with optical alignment film, for example be processed into liquid crystal panel size rectangular substrate.
Polarized light illumination device 100 irradiates the polarised light (light polarized) of predetermined wavelength from illumination part 10A and 10B,
Workpiece W is moved linearly by trucking department 20 simultaneously, irradiate above-mentioned polarised light to workpiece W optical alignment film, carry out at light orientation
Reason.
Illumination part 10A and 10B possess as the discharge lamp 11 of linear light source and reflect the light of discharge lamp 11 respectively
Speculum 12.In addition, illumination part 10A possesses polarizer unit 13A, illumination part the 10B tool for being configured at its light emitting side
The standby polarizer unit 13B for being configured at its light emitting side.In addition, illumination part 10A and 10B possess lampshade 14 respectively.Discharge lamp
11st, speculum 12 and polarizer unit 13A (or 13B) are incorporated in lampshade 14.
Illumination part 10A and illumination part 10B makes the long side direction of discharge lamp 11 and is being orthogonal to workpiece W carrying direction
In the state of the direction (Y-direction) of (X-direction) is consistent, it is set up in parallel along workpiece W carrying direction (X-direction).
Here, explanation illumination part 10A specific composition.
Fig. 2 is the sectional view in the direction orthogonal with long side direction for showing illumination part 10A, and Fig. 3 is illumination part 10A
The sectional view of long side direction.Illumination part 10A and illumination part 10B have identical composition, so illustrating illumination part herein
10A composition.
Discharge lamp 11 is the long arc discharge lamp of strip.Discharge lamp 11 irradiates the ultraviolet of such as wavelength 200nm~400nm
Light.
Material as optical alignment film, it is known that with the material of wavelength 254nm light orientation, the light orientation with wavelength 313nm
Material, with wavelength 365nm material of light orientation etc., the wavelength that the species of light source is as needed suitably selects.
In addition, as light source, can use the linear light source of the LED or LD alinements shape configuration of irradiating ultraviolet light.
In this case, long side direction of LED, LD orientation equivalent to lamp.
The radiating light of speculum self discharge in 12 future lamp 11 reflects to predetermined direction, as shown in Fig. 2 being that section is ellipse
The chute shape condenser of shape.Speculum 12 is configured as, and its long side direction is consistent with the long side direction of discharge lamp 11.
Lampshade 14 has the light exit wound of bullet 14a for passing through from the light of illumination part 10A irradiations in its bottom surface.In light exit wound of bullet
14a is provided with polarizer unit 13A, and polarizer unit 13A has the polarization for being used for making the light polarization by light exit wound of bullet 14a
Device.
As shown in figure 4, polarizer unit 13A is by the way that multiple polarizer 13Aa are arranged and structure in framework 13Ab
Into.Like this, it is arranged in the underface of discharge lamp 11, long side directions of multiple polarizer 13Aa along the discharge lamp 11.
Polarizer 13Aa is wire grid type polarizer, and polarizer 13Aa number is according to the size in the region of irradiation polarised light
And suitably select.In addition, each polarizer 13Aa is each configured to light transmission shaft towards same direction.
Polarizer unit 13B also has to be formed with polarizer unit 13A identicals.
But in the case where illumination part is arranged in 2 sections of 2 lamp-based by use, as shown in figure 4, with polarizer 13Aa
Seam and polarizer 13Ba the mode that is not overlapped each other on workpiece W carrying direction (X-direction) of seam, by polarizer list
First 13B polarizer 13Ba configures with carrying staggered positions on the orthogonal direction (Y-direction) in direction.Thus, illumination part
10A and 10B can irradiate polarised light with uniform Energy distribution.
Fig. 1 is returned to, trucking department 20 possesses：The methods of passing through vacuum suction adsorbs workpiece W the flat work kept
Make platform 21,2 guides 22 extended along the moving direction of workbench 21 and form workbench 21 as an example
The electromagnet 23 of travel mechanism.
Here, as above-mentioned travel mechanism, using such as magnetic suspension motor operations platform.Magnetic suspension motor operations platform passes through sky
Gas makes moving body (workbench) float on plane platen (platen), and go plate-like is provided with strong magnetic on the platen
The salient pole of body, magnetic force is applied to moving body, changes the magnetic force between moving body and the salient pole of platen, so that moving body (work
Platform) it is mobile.
Workbench 21 is configured to one edge direction and existed towards movable workbench direction (X-direction), and by guide 22
It compensate for by being reciprocally moveable supporting in the state of linearity.
In this manual, the moving direction of workbench 21 is X-direction, and the horizontal direction vertical with X-direction is Y-direction,
Vertical is Z-direction.In addition, workpiece W is rectangle, with the direction on one side towards X-direction, another side towards Y-direction posture,
It is held on workbench 21.
The mobile route of workbench 21 is designed to the underface by illumination part 10A and 10B.Then, trucking department 20
Workpiece W is transported to the irradiation position of polarised light is irradiated and by the irradiation position by illumination part 10A and 10B.Pass through at this
During, light orientation processing is carried out to workpiece W optical alignment film.
In addition, polarized light illumination device 100 possesses polarimetry device 30.Polarimetry device 30 possesses polarization shaft detection
Device 31, for the X-direction trucking department 32 carried in the X direction along guide 22 of axis detector 31 will to be polarized and for will
The Y-direction trucking department 33 that polarization axis detector 31 is carried in the Y direction.In addition, the polarimetry device 30 is except polarizing repacking
Survey outside device 31, X-direction trucking department 32, Y-direction trucking department 33, be also equipped with control unit 34 and monitor 35 described later.
Polarization axis detector 31 detects the polarization axle from the polarised light of illumination part 10A and 10B irradiation (on photoirradiated surface
The axle of polarised light).
X-direction trucking department 32 is the travel mechanism for making polarization axis detector 31 move in the X direction, for example, with it is above-mentioned
The identical of trucking department 20 construction.That is, the mobile route of polarization axis detector 31 is designed to by illumination part 10A
With 10B underface.Polarization axis detector 31 is transported to by illumination part 10A and 10B by X-direction trucking department 32 in the X direction
Irradiate the irradiation position of polarised light.
Y-direction trucking department 33 is the travel mechanism for making polarization axis detector 31 move in the Y direction.Y-direction trucking department 33
It is in be irradiated in the state of the irradiation position of polarised light by illumination part 10A and 10B in polarization axis detector 31 and makes polarization repacking
Device 31 is surveyed to move on (the matching somebody with somebody column direction of polarizer unit 13A and 13B polarizer) in the Y direction.
In the present embodiment, by the underface (center of each polarizer of polarizer unit 13A and 13B each polarizer
Position) respectively as the position (hereinafter referred to as " polarimetry position ") of measure polarization axle, polarization axis detector 31 is in each polarization
The measure that locates polarization axle.
Illustrate the specific composition for polarizing axis detector 31 referring to Fig. 5 and Fig. 6.
Polarization axis detector 31 possesses the first polarized light detection portion 311 and the second polarized light detection portion 312.
First polarized light detection portion 311 possesses for detecting the detection of polarization axle with polarizer (hereinafter referred to as " device for testing light ")
311a and the first illuminance transducer 311b for detecting the polarised light for having passed through detection polarizer 311a.First illumination
Sensor 311b possesses the light accepting part 311c (Fig. 6) for receiving the polarised light for having passed through detection polarizer 311a.Light accepting part
311c is fixed to the framework of polarization axis detector 31 by support material 311d.
Fig. 7 is the schematic diagram for the composition for showing the first polarized light detection portion 311.Shown in the Fig. 7 by the first polarised light
Test section 311 detect from illumination part 10A irradiation polarised light when construction.
As shown in fig. 7, the light (radiating light L1) of the discharge lamp 11 from illumination part 10A by polarizer unit 13A and
By linear polarization, polarised light L2 incides detection polarizer 311a.Light accepting part 311c will now pass through detection polarization
Device 311a light is as detection light L3 light.
Detection is such as wire grid type polarizer with polarizer 311a.In addition, as long as polarizer 311a straight lines are used in detection
Polarizer, arbitrary polarizer can be used.
In addition, detection is configured to using its normal direction S as rotary shaft with polarizer 311a, the detection assay more than 180 °
In the range of rotate freely.Detection is advised with polarizer 311a rotation by the anglec of rotation θ from reference position P0 set in advance
It is fixed.
Detection is with the light transmission shaft T1 that polarizer 311a anglec of rotation θ is the polarizer 13Aa for forming polarizer unit 13A
Direction with detecting with the consistent angle in polarizer 311a light transmission shaft T2 direction when, by the photograph of the light of light accepting part 311c light
Degree is maximum.In addition, when detection with polarizer 311a anglec of rotation θ is the light transmission shaft T2 angles orthogonal with light transmission shaft T1, by by
The illumination of the light of light portion 311c light is minimum.
It is that is, all with the polarizer 311a anglec of rotation according to detection by the illumination of the light of light accepting part 311c light
Change to phase property.Therefore, rotate detection polarizer 311a by one side, while monitoring by the light of light accepting part 311c light
Illumination, the polarization axle angle of the polarised light from illumination part 10A, 10B irradiation can be determined.
In order to which detection is configured into rotatable with polarizer 311a, the first polarized light detection portion 311 possesses for making detection
The rotating mechanism rotated with polarizer 311a.The rotating mechanism for example possess rotary actuator 311e shown in Fig. 5 and Fig. 6 and
The rotor 311f being fixed on rotary actuator 311e.
Rotary actuator 311e is driven control by control unit 34 described later.Detection is fixed on polarizer 311a
On rotor 311f, control unit 34 is driven control to rotary actuator 311e, rotates rotor 311f, and thus, detection is used
Polarizer 311a rotates.Thus, detection is rotated against with polarizer 311a and the first illuminance transducer 311b (light accepting part 311c).
In addition, as shown in fig. 6, the first illuminance transducer 311b has limitation to the opening portion of light accepting part 311c incident light
311g.The shape that opening portion 311g is formed as：Illumination part 10A, 10B polarizer unit 13A, 13B also enter inclination
The light penetrated is by generating polarised light, in order to obtain polarised light caused by the composition of these oblique incidences, makes incidence angle for for example
The polarised light of 0 °~65 ° of scopes incides light accepting part 311c.
In addition, the first polarized light detection portion 311 possesses the cooling body for cooling down the first illuminance transducer 311b.This is cold
But mechanism is, for example, air cooling mode, is possessed from the outside cool-air feed portion 311h for obtaining cold air.
In addition, cooling body can also use water-cooling pattern.But, it is contemplated that influence during water-cooled valve breakage etc., preferably
Using air cooling mode.
In addition, the second polarized light detection portion 312 is not except possessing the detection polarizer in the first polarized light detection portion 311
311a and for make detection polarizer 311a rotate rotating mechanism outside, have and the phase of the first polarized light detection portion 311
Same composition.
That is, as shown in Figure 5 and Figure 6, the second polarized light detection portion 312 possesses the second illuminance transducer 312a, come
It is directly incident on the second illuminance transducer 312a from illumination part 10A, 10B polarised light, and by the second illuminance transducer 312a
Detect the illumination of the polarised light.Second illuminance transducer 312a, which possesses, directly receives the polarised light from illumination part 10A, 10B
Light accepting part 312b (Fig. 6).
Second illuminance transducer 312a is supported by part 312c and sensed with light accepting part 312b height and position and the first illumination
Device 311b light accepting part 311c height and position identical mode supports.Supporting member 312c is fixed to polarized light detection device 31
Framework.
In addition, as shown in fig. 6, the second illuminance transducer 312a has the opening portion for suppressing the incident light to light accepting part 312b
312d.In the same manner as above-mentioned opening portion 311f, opening portion 312d is formed as the polarization for such as 0 °~65 ° scopes by incidence angle
Light incides light accepting part 312b shape.
In addition, the second polarized light detection portion 312 possesses the cooling body for cooling down the second illuminance transducer 312a.This is cold
But mechanism possesses from the outside cool-air feed portion 312e for obtaining cold air for example with air cooling mode.
In addition, cooling body can also use water-cooling pattern.But, it is contemplated that influence during water-cooled valve breakage etc., preferably
Using air cooling mode.
Second illuminance transducer 312a preferably has sensitivity with the first illuminance transducer 311b identical wave bands.But
As long as the radiating light of discharge lamp 11 can be detected simultaneously, there can also be sensitivity in different wave bands.
Specifically, the first illuminance transducer 311b and the second illuminance transducer 312a are preferably in such as 200nm~400nm
Wave band there is sensitivity.More specifically, the first illuminance transducer 311b and the second illuminance transducer 312a are preferably easily determined
Such as the illumination of 254nm, 313nm, 365nm wavelength.
In addition, the first illuminance transducer 311b light accepting part 311c and the second illuminance transducer 312a light accepting part 312b edges
The tube axial direction (long side direction) for discharge lamp 11 is set up in parallel.The tube axial direction of discharge lamp 11 is with moving polarization axis detector 31
Dynamic Y-direction is identical.
Because from discharge lamp 11 radiate light on caliber direction illumination change it is big, on tube axial direction illumination become
Change small.Like this, by the way that the tube axial direction (long side direction) of light accepting part 311c and light accepting part 312b along discharge lamp 11 is arranged side by side
Set, the illumination that can reduce the light of the first illuminance transducer 311b and the second illuminance transducer 312a detections is poor.
In addition, be explained above the first polarized light detection portion 311 and the second polarized light detection portion 312 has for cold respectively
But the situation of the cooling body of light accepting part, but the heat radiated from discharge lamp 11 also via the grade of Y-direction trucking department 32 from polarization axle
Transmit the downside of test section 31.Accordingly it is also possible to set heat insulating member in the bottom of the framework of polarization axle test section 31, or make
Rotating mechanism floats.
Next, explanation forms the control unit 34 of polarimetry device 30.
Fig. 8 is the block diagram for the composition for showing polarimetry device 30.
As described above, polarimetry device 30 possesses polarization axis detector 31, X-direction trucking department 32, Y-direction trucking department
33rd, control unit 34 and monitor 35.
Control unit 34 possesses rotor control unit 34a, input signal converter section 34b, polarization characteristic operational part 34c, image and shown
Show portion 34d and carry control unit 34e.
Rotor control unit 34a is exported for being driven to rotary actuator 311d to the first polarized light detection portion 311
The driving instruction of control.In the present embodiment, in each polarimetry position, device for testing light 311a is made in the anglec of rotation set in advance
1≤θ of degree range Theta≤inward turnings of θ 2 go to multiple specified angles, and the first illuminance transducer 311b determines polarised light in each specified angle.
Illumination in theory minimum device for testing light 311a of the rotation angle range across the first illuminance transducer 311b polarised lights detected
Angle (setting a reference value θ a) and be set as such as ± 20 ° of scope.
For example, in the case where setting a reference value θ a are set to 120 °, rotation angle range is 100 °≤θ≤140 °.
In addition, in the present embodiment, in above-mentioned rotation angle range, such as in addition to θ=θ a, also set with
The angle position of 10 ° of scale measure polarised lights.That is, in the case where rotation angle range is 100 °≤θ≤140 °, with
θ=θ 1=100 °, θ=110 °, θ=130 °, θ=θ 2=140 ° measure polarised lights.Rotor control unit 34a is in order to by device for testing light
311a is set to some of above-mentioned 4 angle positions, is instructed to rotary actuator 311d output drivings.
Input signal converter section 34b outputs detection brightness value (illumination count value) Cd and reference illumination value (illumination count value)
Cr, it is the first illumination sensing that polarization characteristic operational part 34c, above-mentioned detection brightness value Cd are output to after these detection signals are amplified
The illuminance information that device 311b is detected, above-mentioned reference illumination value Cr are the illuminance informations that the second illuminance transducer 312a is detected.
Here, the first illuminance transducer 311b and the second illuminance transducer 312a detects received light in same timing
Illumination, input signal converter section 34b are configured to 2 detection signals that input is detected simultaneously by by 2 sensors.
Polarization characteristic operational part 34c is according to the illuminance information inputted from input signal converter section 34b, and computing is from illumination part
The polarization characteristic of the polarised light of 10A, 10B irradiation.In the present embodiment, as above-mentioned polarization characteristic, polarization characteristic operational part
34c determines polarization axle angle and extinction ratio.
Polarization characteristic by polarization characteristic operational part 34c computings is output to monitor 35 by image displaying part 34d.
Carry control unit 34e and control is driven to X-direction trucking department 32 and Y-direction trucking department 33, detect polarization axle
Device 31 is moved to predetermined polarimetry position along XY directions.
Control unit 34 and monitor 35 are arranged on to be carried away from polarization axis detector 31, X-direction trucking department 32 and Y-direction
The position in portion 33, in order to avoid influenceed (the mainly influence of heat) by the ultraviolet light radiated from discharge lamp 11.Control unit 34 passes through
Cable (not shown) to obtain detection signal to the instruction of the polarization output driving of axis detector 31 or from polarization axis detector 31
Deng.
Fig. 9 is the flow chart for an example for showing the polarimetry processing step that control unit 34 performs.The polarimetry
Processing shows the determination step of the polarised light on predetermined polarimetry position.
First, in step sl, control unit 34 refers to from rotor control unit 34a to rotary actuator 311d output drivings
Order, specified angle is rotated to by device for testing light 311a.Here, the initial value of specified angle is set to θ=θ 1.
Then, in step s 2, control unit 34 obtains detection brightness value Cd from the first illuminance transducer 311b, is shone from second
Spend sensor 312a and obtain reference illumination value Cr, be transferred to step S3.
In step s3, by the detection brightness value Cd obtained in the step S2 divided by reference illumination value Cr, amendment is calculated
Brightness value Cc (Cc=Cr/Cd) afterwards.Brightness value Cc is included with reference illumination value Cr to detecting in brightness value Cd after the amendment
The light of origin self discharge lamp 11 with the time illumination change caused by error be corrected after value.
Then, in step s 4, control unit 34 judges whether to complete illumination survey in whole angle positions set in advance
It is fixed.Moreover, in the case where being judged as not completing illumination photometry, specified angle is reset, the step S1 is transferred to, is sentencing
In the case of breaking to complete illumination photometry, step S5 is transferred to.
In step s 5, control unit 34 is according to brightness value after the amendment of each angle position calculated in the step S3
Cc, calculate the polarization axle of polarised light.
In the present embodiment, carried out curve fitting (curvefitting) according to brightness value Cc after each amendment, obtain table
Show device for testing light 311a the anglec of rotation and relation between brightness value Cc after amendment polarised light angular characteristicses (hereinafter referred to as
" angular characteristicses ").The polarised light angle personality presentation has passed through device for testing light 311a polarised light when rotating device for testing light 311a
The cyclically-varying of illumination, be by above-mentioned illumination change caused by error correction appropriate characteristics.Then, the angle by obtaining
Spend property calculation polarization axle angle.
Here, as fitting function, such as Acos is used2(θ+B)+C function.In addition, as fitting function, also can
Use other functions.
Figure 10 is the figure for an example for showing above-mentioned angular characteristicses.Here, measure polarised light angle position for θ=
120 ° ± 10 °, 4 points of θ=120 ° ± 20 °.
In the Figure 10, the longitudinal axis is monitor illumination count value [%], and transverse axis is device for testing light 311a anglec of rotation θ
[degree].Dotted line in figure is reference illumination value Cr, and point a~d is to be depicted in brightness value Cc after the amendment that each angle position calculates
Point.In addition, curve F is according to this 4 measuring point a~d value, is carried out curve fitting and obtained by least square method and Newton method
The curve that constant A, B, C are obtained, equivalent to above-mentioned polarised light angular characteristicses.
In angular characteristicses F, the minimum angle of monitor illumination count value is device for testing light 311a light transmission shaft and polarization
The actual orthogonal device for testing light 311a of device 13Aa (or 13Ba) the light transmission shaft anglec of rotation.In addition, counted from monitor illumination
The angle that the minimum angle of value has been subtracted after 90 ° is the maximum angle of monitor illumination count value, is device for testing light 311a printing opacity
The axle device for testing light 311a actually consistent with polarizer 13Aa (or 13Ba) the light transmission shaft anglec of rotation.
Here, the angle of monitor illumination count value minimum is the parameter B obtained by above-mentioned curve matching, including phase
Predetermined bias angle theta b is offset for setting a reference value θ a and is turned into (B=θ a+ θ b).Then, control unit 34 is according to angle (θ a+ θ
B), actual polarization axle angle (direction of polarizer 13Aa, 13Ba light transmission shaft) is exported.
As described above, the device for testing light 311a anglec of rotation is provided by the angle, θ relative to reference position P0.Moreover, with
Similarly, in the case where polarization axle angle is by the angle regulation relative to reference position P0, control unit 34 will by device for testing light 311a
The angle after 90 ° is subtracted from angle (θ a+ θ b) to export as the polarization axle angle of reality.In addition, in polarization axle angle by phase
In the case that the angle of position for offset by 90 ° from reference position P0 provides, control unit 34 directly makees angle (θ a+ θ b)
Exported for the polarization axle angle of reality.
Then, in step s 6, control unit 34 rotates to device for testing light 311a in the step S5 monitoring calculated
Device illumination count value is minimum angle (θ a+ θ b), is transferred to step S7.
In the step s 7, control unit 34 obtains detection brightness value Cd (Figure 10 measuring points from the first illuminance transducer 311b
E), the minimal illumination of polarised light is set to, is transferred to step S8.
In step s 8, device for testing light 311a is rotated in the step S5 calculate, monitor and shone by control unit 34
Count value is spent for minimum angle (θ a+ θ b-90 °), is transferred to step S9.
In step s 9, control unit 34 obtains detection brightness value Cd (Figure 10 measuring points from the first illuminance transducer 311b
F), as the maximal illumination of polarised light, it is transferred to step S10.
In step slo, control unit 34 is according to the minimal illumination obtained in the step S7 and in the step S9
The ratio between maximal illumination of acquirement (maximal illumination/minimal illumination) calculates extinction ratio.
In step s 11, control unit 34 exports the computing in the step S5 from image displaying part 34d to monitor 35
Polarization axle angle and in the step S10 computing extinction ratio.Thus, the measure knot of polarization characteristic is shown on monitor 35
Fruit.
In addition, Fig. 9 step S1~S4 is corresponding with rotation control unit, step S5~S10 is corresponding with polarization characteristic operational part.
In addition, step S5 is corresponding with polarization axle angle operational part, step S6~S10 is corresponding with extinction ratio operational part.
Then, action and the effect of present embodiment are illustrated.
First, control unit 34 is driven control to X-direction trucking department 32 and Y-direction trucking department 33, and polarised light is detected
Device 31 configures the polarizer 13Aa's positioned at the most end of Y-direction among polarizer unit 13A multiple polarizer 13Aa
Underface.Like this, control unit 34 configures polarized light detection device 31 in the inclined of the measure object by being used as polarization characteristic
Shake device 13Aa polarised light irradiation area.
In the case where setting a reference value θ a=120 °, when device for testing light 311a is θ=120 °, the first illuminance transducer 311b
The illumination of the polarised light detected should be minimum.Therefore, first, control unit 34 is driven control to rotary actuator 311d
System, θ=θ a-20 °=100 ° are rotated to by device for testing light 311a.
Then, in this condition, polarization is determined by the first illuminance transducer 311b and the second illuminance transducer 312a simultaneously
The illumination of light, control unit 34 are obtained by the illuminance information of this 2 sensor measure.That is, control unit 34 is from the first illumination
The illuminance information that sensor 311b obtains the polarised light for having passed through device for testing light 311a detects brightness value Cd, is sensed from the second illumination
It is not reference illumination value Cr by the illuminance information of device for testing light 311a polarised light that device 312a, which is obtained,.
Then, control unit 34 is driven control to rotary actuator 311d, makes positions of the device for testing light 311a from θ=100 °
Put and rotate to θ=110 °.Then, in the position, control unit 34 obtains to be passed using the first illuminance transducer 311b and the second illumination
The detection brightness value Cd and reference illumination value Cr of sensor 312a measure.
Then, control unit 34 makes device for testing light 311a rotate to θ=130 ° and θ=140 ° respectively, similarly obtains by first
The detection brightness value Cd and reference illumination value Cr of illuminance transducer 311b and the second illuminance transducer 312a measure.
Then, control unit 34 calculates figure according to the detection brightness value Cd and reference illumination value Cr obtained in each angle position
Angular characteristicses shown in 10.
Detection brightness value Cd is the brightness value for the polarised light for having passed through device for testing light 311a, so brightness value is according to polarizer
13Aa light transmission shaft and device for testing light 311a light transmission shaft angulation and change.Therefore, make device for testing light 311a's by one side
Anglec of rotation θ changes can calculate the anglec of rotation for representing device for testing light 311a with leading to while monitoring detection brightness value Cd variation
The angular characteristicses for the relation crossed between the illuminance information of device for testing light 311a polarised light.
However, due to light quantity moment change according to the fluctuation of electric arc of the discharge lamp 11 as light source, so changing
During device for testing light 311a anglec of rotation θ, it may appear that from the phenomenon of the light quantity change of the radiating light of discharge lamp 11.
Therefore, the fluctuation of the electric arc of the discharge lamp is not considered and directly calculates angular characteristicses using detection brightness value Cd
When, can calculate contain from discharge lamp 11 irradiate light with the time illumination change caused by error angular characteristicses, partially
The measurement accuracy that shakes is remarkably decreased.
Then, in the present embodiment, coming from for device for testing light 311a has been passed through using the first illuminance transducer 311b measure
The illumination of the polarised light of illumination part, while light is not come from by device for testing light 311a using the second illuminance transducer 312a measure
The illumination of the polarised light of irradiation portion.That is, the fluctuation of identical electric arc is detected using both, so that will be by the second illumination
The reference illumination value Cr that sensor 312a is obtained is used as by the obtained detection brightness value Cd of the first illuminance transducer 311b benchmark
Value.
Control unit 34 is by the detection brightness value Cd obtained from the first illuminance transducer 311b divided by from the second illuminance transducer
The reference illumination value Cr that 312a is obtained, so as to become to illumination caused by the fluctuation as electric arc included in detection brightness value Cd
Error caused by dynamic is modified.Moreover, being based on revised brightness value (brightness value Cc after amendment), the hand of curve matching is used
Method calculates the angular characteristicses F shown in Figure 10.
As described above, the detection brightness value Cd and reference illumination value Cr, the surging condition of electric arc that determine simultaneously are identical.Cause
This, by using brightness value Cc after amendment, electric arc changes during device for testing light 311a rotates, and still is able to precision well
Calculate angular characteristicses.
When control unit 34 calculates the angular characteristicses F shown in Figure 10, polarization axle angle is calculated according to angular characteristicses F.Tool
Say, according to angular characteristicses F, it is determined that the illumination for having passed through device for testing light 311a polarised light is minimum device for testing light 311a rotation body
Gyration (θ a+ θ b), actual polarization axle angle is exported according to the anglec of rotation.
Then, control unit 34 calculates the extinction ratio of polarised light using angular characteristicses F.First, control unit 34 is in order to detect
The minimal illumination of polarised light, control is driven to rotary actuator 311d, device for testing light 311a is rotated into θ=(θ a+ θ b).
In this condition, control unit 34 obtains detection brightness value Cd (Figure 10 as minimal illumination value from the first illuminance transducer 311b
Measuring point e).
Then, control unit 34 is driven control to detect the maximal illumination of polarised light to rotary actuator 311d,
Device for testing light 311a is rotated into θ=(θ a+ θ b-90 °).In this condition, control unit 34 obtains from the first illuminance transducer 311b
Detection brightness value Cd (Figure 10 measuring point f) as maximal illumination value.
Then, control unit 34 is counted according to the ratio between minimal illumination value and maximal illumination value (maximal illumination value/minimal illumination value)
Calculate extinction ratio.
Handled more than, passed through among polarizer unit 13A multiple polarizer 13Aa positioned at Y-direction
The polarization characteristic of the polarizer 13Aa of most end polarised light.Then, control unit 34 is driven control to Y-direction trucking department 33
System, the polarizer 13Aa adjacent with the polarizer 13Aa for determining polarization characteristic before is being configured to just by polarized light detection device 31
Lower section.Like this, the measure object for switching polarization characteristic successively determines polarization characteristic.
When whole polarizer 13Aa to polarizer unit 13A complete measuring polarization characteristics, control unit 34 is to X-direction
Trucking department 33 and Y-direction trucking department 33 are driven control, and polarized light detection device 31 is configured in the multiple of polarizer unit 13B
The underface of the polarizer 13Ba positioned at the most end of Y-direction among polarizer 13Ba.Moreover, with polarizer unit 13A's
Situation is same, and polarization characteristic is determined respectively to each polarizer 13Ba.
In fixed point, detect as described above detect brightness value Cd and reference illumination value Cr, based on detection brightness value
Data that Cd is corrected to reference illumination value Cr determine polarization axle angle, and the results are shown in Figure 11 α.Here,
Figure 11 longitudinal axis is polarization axle angle, and transverse axis is the measure number of polarization axle angle.As shown in experimental result α, in this embodiment party
In formula, the polarization axle angle being measured to almost does not have deviation, and the σ of standard deviation 3 is 0.004.That is, the polarization axle being measured to
Angle has 99.7% to be included in such minimum deviation range at ± 0.004 °.
As comparative example, the amendment based on reference illumination value Cr is not carried out as in the present embodiment, is only shone using detection
Angle value Cd determines polarization axle angle.It the results are shown in Figure 11 β.
As shown in experimental result β, in a comparative example, measurement result changes, and occurs very big prominent value once in a while.This be because
To rotate device for testing light 311a and the fluctuation of electric arc being produced during 4 points of different measure polarised lights of angle, it is impossible to be stable
Ground determines polarization axle angle.Like this, can intuitively understand because of the fluctuation of electric arc and the deviation of measurement result appearance.
In addition, after the measurement result of comparative example is counted, the σ of standard deviation 3 for the polarization axle angle being measured to is
0.035.That is, the polarization axle angle being measured to has deviation as ± 0.035 °.
In polarized light illumination device 100, from the viewpoint of precision prescribed of the light with light processing, shaft angle will be preferably polarized
Degree is adjusted within ± 0.05 ° relative to setting value.That is, it is preferred that the precision prescribed of polarimetry is ± 0.01 ° or so.
But in above-mentioned comparative example, it is impossible to meet the precision prescribed of polarimetry.
In the present embodiment, in addition to the first polarized light detection portion 311 with device for testing light, it is also equipped with not via inspection
Light device and directly detect the second polarized light detection portion 312 of polarised light, utilize the first polarized light detection portion 311 and the second polarised light
Test section 312 detects identical polarised light simultaneously.
Therefore, the illuminance information detected by the second polarized light detection portion 312 is set to the benchmark illuminance information of polarised light,
Caused by fluctuation to electric arc included in the illuminance information that is detected as the first polarized light detection portion 311, discharge lamp 11 with
Error caused by the illumination of time changes is modified.Make the first polarized light detection portion 311 therefore, it is possible to accurately calculate
The periodically variable angular characteristicses of the illumination of detection light when device for testing light 311a rotates, can accurately calculate polarization shaft angle
Degree and extinction ratio.
In addition, the long side direction of the first polarized light detection portion 311 and the second polarized light detection portion 312 along discharge lamp 11 is matched somebody with somebody
Put.Like this, due to being arranged on the few direction of the illumination change in discharge lamp 11, so the dependence to place can be reduced
Property, the high measurement result of reliability can be obtained.
Particularly, in the case where employing the lamp of more than 2 lamp-based as light source, if the first polarized light detection portion 311
It is arranged with the second polarized light detection portion 312 on the caliber direction of lamp, then easily by from adjacent with the lamp of measure object
Lamp radiation light influence, it is impossible to obtain the high measurement result of reliability.In the present embodiment, by the first polarized light detection
Polarized light detection portion 312 of portion 311 and second configures on the long side direction of discharge lamp 11, so being employed even in as light source
In the case of lamps more than 2 lamp-based, the high measurement result of reliability can be also obtained.
In addition, the first polarized light detection portion 311 and the second polarized light detection portion 312 are being configured at the underface of discharge lamp 11
In the state of use, heat condition is harsh.For example, form the situation to the device for testing light 311a holding members kept with aluminium etc.
Under, influenceed by the ultraviolet light (heat) radiated from discharge lamp 11, the holding member thermal expansion, device for testing light 311a and light accepting part
Relative offset between 311c, the illumination for the light that light accepting part 311c is detected are possible to change.
In the present embodiment, it is respectively arranged with the first polarized light detection portion 311 and the second polarized light detection portion 312
For cooling down the first illuminance transducer 311b and the second illuminance transducer 312a cooling body, so can stably detect partially
Shake light.
In addition, according to the illuminance information (reference illumination value Cr) detected by the second polarized light detection portion 312 to by first
When the illuminance information (detection brightness value Cd) that polarized light detection portion 311 detects is modified, by detection brightness value Cd divided by ginseng
Brightness value Cr is examined, so as to calculate to being carried out caused by the electric arc fluctuation as discharge lamp 11 with error caused by the illumination variation of time
Brightness value Cc after the amendment of amendment.Like this, fairly simple gimmick correcting said error can be used.
In addition, the measuring point of polarised light is across 4 points in setting a reference value θ a predetermined rotation angle range, the setting
The illumination of detection light when a reference value θ a are set to rotate the device for testing light 311a in the first polarized light detection portion 311 is minimum.
Moreover, according to the illuminance information of this 4 each measuring point, calculate and represent to rotate the device for testing light 311a in the first polarized light detection portion 311
When detection light illumination periodically variable angular characteristicses.
Like this, the photograph that is measured to for minimum approximate angle of illumination in detection light is used in the calculating of angular characteristicses
Information is spent, so the angular characteristicses for the influence for inhibiting noise contribution can be calculated.
Further, since the second polarized light detection portion for directly determining the polarised light from illumination part 10A, 10B, institute are set
With while the polarization axle angle and extinction ratio of polarised light is determined, additionally it is possible to determine the illumination of polarised light.Like this, Neng Goutong
The measure of the measure of the polarization characteristic of Shi Jinhang polarised lights and the illumination of polarised light, efficiency are higher.
As described above, in the present embodiment, even in having used the light source with the illumination variation with the time
Under, can not also be changed by the illumination is influenceed and polarization axle angle and delustring simple and that accurately determine polarised light
Than.
Therefore, it is possible to suitably judge whether the polarization axle of the polarised light from illumination part irradiation turns into required polarization
Axle.Moreover, in the case where not turning into required polarization axle, can carry out adjusting light to be set as required polarization axle
The processing of the arrangement angles of the polarizer of irradiation portion etc., appropriate light orientation processing can be carried out.
(variation)
In the above-described embodiment, illustrate detection brightness value Cd divided by reference illumination value Cr calculating illumination after amendment
Value Cc situation, but for example can also use other modes.
Below, alternatively, the mode being modified using subtraction and average value is illustrated.
First, amount at 4 points in θ=θ a ± 20 °, θ=θ a ± 10 °, the first polarized light detection portion 311 and the second polarised light
Test section 312 determines detection brightness value Cd and reference illumination value Cr respectively.Here, the detection being measured in each specified angle is shone
Angle value Cd is set to Cd1, Cd2, Cd3, Cd4, by the reference illumination value Cr being measured in each specified angle be set to Cr1, Cr2, Cr3,
Cr4。
Then, control unit 34 calculates the average value Cra for the reference illumination value Cr1~Cr4 being measured in each specified angle, meter
Calculate from detection brightness value Cdn and subtracted value that average value Cra and reference illumination value Crn difference obtains as brightness value after correcting
Cc.That is, brightness value Cc is Cc1=Cd1- (Cra-Cr1), Cc2=Cd2- (Cra-Cr2), Cc3=after amendment
Cd3- (Cra-Cr3), Cc4=Cd4- (Cra-Cr4).
Processing afterwards is identical with the processing after Fig. 9 step S5.That is, control unit 34 is according to illumination after amendment
Value Cc1~Cc4, is carried out curve fitting by least square method and Newton method, obtains fitting function Acos2(θ+B)+C constant
A、B、C.Control unit 34 calculates polarised light angular characteristicses in this way.
In this case, according to caused by the electric arc fluctuation by discharge lamp 11 to being included in detection brightness value Cd at any time
Between illumination change caused by the brightness value that is corrected of error, obtain polarised light angular characteristicses, can accurately determine
Polarization axle angle and extinction ratio.
In addition, in the above-described embodiment, illustrate each 1 time 4 utilization altogether at θ=θ a ± 20 ° and θ=θ a ± 10 °
First polarized light detection portion 311 determines the situation of illumination, but measure number can suitably be set according to permission minute.It is based on
The calculating of least square method can also be carried out when measuring point is 3, so measure number can also be 3 times.Determining at 4 points
In the case of, combined using 4 groups 3 points, angular characteristicses etc. are carried out to each group, so as to improve the precision of measurement result.In addition, measure
Number can certainly be more than 5 times.
In addition, in above-mentioned embodiment, illustrate to rotate device for testing light 311a feelings with 10 ° of scales when carrying out illumination photometry
Condition, it can also suitably set unit angle.
In addition, in the above-described embodiment, illustrate polarimetry position being set in each polarizer 13Aa, 13Ba
Situation at the 1 of centre, but in view of the deviation of the polarization axle angle in 1 polarizer, can also be set for each polarizer
Many places polarimetry position.In this case, can also be average by being weighted to the measurement result of each polarimetry position
Deng calculating final polarization characteristic.
In addition, in the above-described embodiment, it can also set according to the polarization shaft angle being measured to by polarimetry device 30
Degree carrys out adjust automatically polarizer 13Aa and polarizer 13Ba angle and makes polarizer 13Aa and polarizer 13Ba polarization shaft angle
Degree turns into the mechanism of required polarization axle angle.In addition, polarizer 13Aa and polarizer 13Ba angle adjustment can also be by operating
Person is carried out manually.
In addition, in the above-described embodiment, illustrate by supporting member 311d by the first illuminance transducer 311b by
Light portion 311c is fixed to the situation of the framework of polarization axis detector 31, but light accepting part 311c can also be configured to and device for testing light
311a rotates together.Wherein, in order to stably determine illumination, preferably as embodiment described above, light accepting part 311c is fixed,
Rotate against device for testing light 311a and light accepting part 311c.
In addition, in the above-described embodiment, the situation using the discharge lamp 11 of 2 lamp-based as light source is illustrated, but also may be used
More than using 1 lamp-based or 3 lamp-based.
In addition, in the above-described embodiment, illustrate to use the feelings for the liquid crystal panel for foring optical alignment film as workpiece W
The workpiece of condition or the bar-shape for example, as visual field angle compensation film being wound on roller.
Claims (7)
1. a kind of polarimetry device, it is characterised in that possess：
Polarize axis detector；And
Refractive index measured by the polarised light portion,
The polarization axis detector possesses：
First polarized light detection portion, there is the rotatable detection for detecting the polarization axle of the polarised light from light source irradiation to use inclined
Shake device and detection passed through the detection polarizer the polarised light from the light source illuminance information the first illumination
Sensor；And
Second polarized light detection portion, there is the second illumination sensing for the illuminance information for directly detecting the polarised light from the light source
Device, it is set up in parallel with the first polarized light detection portion,
The refractive index measured by the polarised light portion determines the polarised light according to the illuminance information that detects of polarization axis detector, and it has
It is standby：
Rotation control unit, the detection is rotated into multiple specified angles with polarizer；
Illuminance information correction portion, according to detection brightness value and reference illumination value come brightness value after computing amendment, the detection illumination
Value is the illuminance information detected in the multiple specified angle by first illuminance transducer, the reference illumination value be with
What the detection for the detection brightness value that first illuminance transducer is carried out synchronously was detected by second illuminance transducer
Illuminance information, brightness value is to being included in the detection brightness value by the polarised light that is irradiated from the light source after the amendment
Brightness value after being corrected with error caused by the illumination variation of time；And
Polarization characteristic operational part, computing represent the anglec of rotation of the detection polarizer and transported by the illuminance information correction portion
The polarised light angular characteristicses of relation after the amendment calculated between brightness value, according to the polarised light angular characteristicses, computing comes from institute
State the polarization characteristic of the polarised light of light source.
2. polarimetry device according to claim 1, it is characterised in that
The detection brightness value that the illuminance information correction portion will be detected by first illuminance transducer, divided by with the inspection
The reference illumination value that the detection of brightness value is synchronously detected by second illuminance transducer is surveyed, so as to be repaiied described in computing
Brightness value after just.
3. polarimetry device according to claim 1, it is characterised in that
The illuminance information correction portion is by from the detection brightness value detected by first illuminance transducer, subtracting
The average value for each reference illumination value that the multiple specified angle is detected by second illuminance transducer and with the detection
The difference for the reference illumination value that the detection of brightness value is synchronously detected by second illuminance transducer, so as to described in computing
Brightness value after amendment.
4. the polarimetry device according to any one of claims 1 to 3, it is characterised in that
The polarization characteristic operational part possesses polarization axle angle operational part, and the polarization axle angle operational part is according to the angle of polarization
Characteristic is spent, it is determined that the illumination for having passed through the polarised light from the light source of the detection polarizer turns into the inspection of extreme value
The anglec of rotation of survey polarizer, according to the identified anglec of rotation, described in the polarization axle angle conduct of polarised light described in computing
Polarization characteristic.
5. polarimetry device according to claim 1, it is characterised in that
The polarization characteristic operational part possesses extinction ratio operational part, the extinction ratio operational part according to the polarised light angular characteristicses,
It is determined that the maximum and minimum value of the illumination of the polarised light from the light source of the detection polarizer are passed through, according to institute
The maximum and minimum value of determination, the extinction ratio of polarised light is as the polarization characteristic described in computing.
6. a kind of polarimetry method, the polarised light from light source irradiation is determined, is comprised the following steps：
The detection for being used in detection polarization axle rotates to multiple specified angles with polarizer, has passed through institute in the detection of each specified angle
State the illuminance information of the polarised light from the light source of detection polarizer, detect brightness value；
With detection passed through the detection polarizer the polarised light from the light source illuminance information in timing synchronization,
Directly detect illuminance information, the i.e. reference illumination value of the not polarised light from the light source by the detection polarizer；
According to the detection brightness value and the reference illumination value detected in the multiple specified angle, computing is to the inspection
The error as caused by the illumination variation with the time of the polarised light irradiated from the light source included is surveyed in brightness value to be repaiied
Brightness value after positive amendment；
The angle of polarization of relation after the anglec of rotation of the computing expression detection polarizer and the amendment between brightness value
Spend characteristic；
According to the polarised light angular characteristicses come the polarization characteristic of polarised light of the computing from the light source.
7. a kind of polarized light illumination device, irradiate polarised light to alignment films and carry out light orientation, it is characterised in that have：
Linear light source；
Multiple polarizers, arranged along the direction of linear light source extension；
Illumination part, irradiation utilize the polarizer by the polarised light after the light polarization of the linear light source；And
Polarimetry device described in any one of Claims 1 to 5, determine the polarised light of the illumination part irradiation.
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| CN112763069B (en) * | 2019-11-01 | 2023-08-29 | 锐光凯奇(镇江)光电科技有限公司 | Polarized light direction detector |
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