CN105289033A - Tail gas recover and filtration device for decompression diffusion system - Google Patents
Tail gas recover and filtration device for decompression diffusion system Download PDFInfo
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- CN105289033A CN105289033A CN201510686888.3A CN201510686888A CN105289033A CN 105289033 A CN105289033 A CN 105289033A CN 201510686888 A CN201510686888 A CN 201510686888A CN 105289033 A CN105289033 A CN 105289033A
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- tail gas
- diffusion system
- reduces pressure
- pipe
- filtration tank
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Abstract
The invention discloses a tail gas recover and filtration device for a decompression diffusion system. The device comprises a condensation bottle connected with the decompression diffusion system, a waste discharge pipe arranged at the tail end, and a vacuum pump connected between the condensation bottle and the waste discharge pipe, wherein at least one air filtration tank is connected between the condensation bottle and the vacuum pump. The device has the advantages of being simple and reliable in structure and good in recover and filtration effect.
Description
Technical field
The present invention relates generally to the tail gas disposal technique in decompression diffusion technique, particularly relates to a kind of tail gas recycle filter for the diffusion system that reduces pressure.
Background technology
Manufactured by diffusion furnace that PN junction remains most widely used in solar cell production process, the technique of the most basic, most critical, decompression diffusion furnace is the indispensable process equipment realizing decompression diffusion technique.The composition of the corrosivity tail gas in decompression diffusion technique mainly contains chlorine, metaphosphoric acid steam etc.In existing decompression diffusion technique to the processing mode of its tail gas for arrange tail gas delivery line bottom crystal reaction tube, this tail gas delivery line is connected the vavuum pump being used for outwards extracting tail gas in tail gas condensation device, tail gas with bottle.
In prior art, exhaust gas processing device does not consider that diffusion is high-temperature technology, offgas duct temperature in boiler tube very high (diffusion technique temperature 1100 DEG C), because offgas duct contacts with condensing bulb, add that vacuum generator pumping speed is very fast, be not enough to reduce exhaust temperature fast by means of only a spiral condensing bulb mode, metaphosphoric acid is liquefied completely, namely can not reach metaphosphoric acid and maximize condensation recovery object.In addition, change activating agent with bottle inconvenience in tail gas, do not consider that convenience is safeguarded in corrective maintenance.
Summary of the invention
The technical problem to be solved in the present invention overcomes the deficiencies in the prior art, provide a kind of simple and reliable for structure, reclaim the tail gas recycle filter for the diffusion system that reduces pressure of good filtration effect.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A kind of tail gas recycle filter for the diffusion system that reduces pressure, comprising condensing bulb, the waste pipe being arranged on end and the vavuum pump be connected between condensing bulb and waste pipe for being connected with decompression diffusion system, between described condensing bulb and vavuum pump, being connected with at least one gas filtration tank.
Further improvement as technique scheme:
Described gas filtration tank comprises tank body, top cover, air inlet pipe and escape pipe, described top cover is covered on tank body top, described air inlet pipe and escape pipe are divided into the both sides of tank body, the air inlet pipe of the gas filtration tank of head end is connected with condensing bulb, the escape pipe of the gas filtration tank of end is connected with vavuum pump, and the air inlet pipe of adjacent two gas filtration tanks is connected with escape pipe.
Described tank body both sides offer side thread hole respectively, and described air inlet pipe and escape pipe are threaded with two side thread holes respectively.
Described top cover offers screw top hole, described screw top hole internal thread is connected with top blocking, and described tank base offers bottom thread hole, and described bottom thread hole internal thread is connected with bottom blocking.
Be connected by fastening bolt between top cover with tank body.
Described gas filtration tank is provided with two, and the gas filtration tank being wherein positioned at head end is provided with activated alumina and fills chamber, and the gas filtration tank being positioned at end is provided with active carbon and fills chamber.
Described vavuum pump is vacuum diaphragm pump, is connected with bellows between vacuum diaphragm pump and waste pipe.
Compared with prior art, the invention has the advantages that:
Tail gas recycle filter for the diffusion system that reduces pressure of the present invention, process gas exports tail gas after reaction in decompression diffusion system, first tail gas pass through condensing bulb, condensing bulb helix tube forms around cup, fill liquid water in cup, water-cooling spiral pipe is placed in above cup, continues through recirculated water and cool for liquid water in pipe, and dry with blower fan, condensing bulb can carry out physiochemical mutagens to the metaphosphoric acid in tail gas; And each gas filtration tank can carry out adsorption filtration to condensing bulb gas out; Tail gas after filtration is discharged by waste pipe again; In this process, vavuum pump is power source, ensures the pressure almost constant of reacting gas in decompression diffusion system.Condensing bulb of the present invention adopts the air-cooled condensing mode combined with water-cooled to reclaim metaphosphoric acid, again through gas filtration tank adsorption cleaning technique, make the reaction gas physical efficiency reduced pressure in diffusion system reach the object of metaphosphoric acid maximization condensation recovery, and its structure is simple, reliable.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention for the tail gas recycle filter of the diffusion system that reduces pressure.
Fig. 2 is the main sectional structure schematic diagram of the present invention for gas filtration tank in the tail gas recycle filter of the diffusion system that reduces pressure.
Fig. 3 is the plan structure schematic diagram of the present invention for gas filtration tank in the tail gas recycle filter of the diffusion system that reduces pressure.
In figure, each label represents:
1, condensing bulb; 2, waste pipe; 3, vavuum pump; 4, gas filtration tank; 41, tank body; 411, side thread hole; 412, bottom thread hole; 42, top cover; 421, screw top hole; 43, air inlet pipe; 44, escape pipe; 45, top blocking; 46, bottom blocking; 47, fastening bolt; 48, chamber filled by activated alumina; 49, active carbon fills chamber; 5, bellows.
Detailed description of the invention
Below with reference to Figure of description and specific embodiment, the present invention is described in further details.
Fig. 1 to Fig. 3 shows a kind of embodiment of the present invention for the tail gas recycle filter of the diffusion system that reduces pressure, comprising condensing bulb 1, the waste pipe 2 being arranged on end and the vavuum pump 3 be connected between condensing bulb 1 and waste pipe 2 for being connected with decompression diffusion system, between condensing bulb 1 and vavuum pump 3, being connected with at least one gas filtration tank 4.Process gas exports tail gas after reaction in decompression diffusion system, tail gas is first by condensing bulb 1, condensing bulb 1 helix tube forms around cup, liquid water is filled in cup, water-cooling spiral pipe is placed in above cup, continue through recirculated water in pipe to cool for liquid water, and dry with blower fan, condensing bulb 1 can carry out physiochemical mutagens to the metaphosphoric acid in tail gas; And each gas filtration tank 4 can carry out adsorption filtration to condensing bulb 1 gas out; Tail gas after filtration is discharged by waste pipe 2 again; In this process, vavuum pump 3 is power source, ensures the pressure almost constant of reacting gas in decompression diffusion system.Condensing bulb 1 of the present invention adopts the air-cooled condensing mode combined with water-cooled to reclaim metaphosphoric acid, again through gas filtration tank 4 adsorption cleaning technique, make the reaction gas physical efficiency reduced pressure in diffusion system reach the object of metaphosphoric acid maximization condensation recovery, and its structure is simple, reliable.
In the present embodiment, gas filtration tank 4 comprises tank body 41, top cover 42, air inlet pipe 43 and escape pipe 44, top cover 42 is covered on tank body 41 top, air inlet pipe 43 and escape pipe 44 are divided into the both sides of tank body 41, the air inlet pipe 43 of the gas filtration tank 4 of head end is connected with condensing bulb 1, the escape pipe 44 of the gas filtration tank 4 of end is connected with vavuum pump 3, and the air inlet pipe 43 of adjacent two gas filtration tanks 4 is connected with escape pipe 44.In this structure, after the metaphosphoric acid in condensing bulb 1 pair of tail gas carries out physiochemical mutagens, gas enters tank body 41 from air inlet pipe 43 and carries out adsorption filtration, then enters vavuum pump 3 from the escape pipe 44 of the gas filtration tank 4 of end, finally discharges from waste pipe 2; Adopt hermetically-sealed construction between top cover 42 and tank body 41 top, prevent gas from spilling, it is simple and practical.
In the present embodiment, tank body 41 both sides offer side thread hole 411 respectively, and air inlet pipe 43 and escape pipe 44 are threaded with two side thread holes 411 respectively.In this structure, side thread hole 411 the dismounting being convenient on the one hand air inlet pipe 43 and escape pipe 44 is set, can sealing effectiveness be ensured again on the other hand.
In the present embodiment, top cover 42 offers screw top hole 421, screw top hole 421 internal thread is connected with top blocking 45, offers bottom thread hole 412 bottom tank body 41, and bottom thread hole 412 internal thread is connected with bottom blocking 46.In this structure, the setting in screw top hole 421 and bottom thread hole 412 is mainly used in the replacing of sorbing material in tank body 41, does not need to remove whole tank body 41, substantially increases the convenience that sorbing material is changed; And top blocking 45 and bottom blocking 46 can carry out shutoff and sealing to screw top hole 421 and bottom thread hole 412, its structure is simple, it is ingenious to design.
In the present embodiment, be connected by fastening bolt 47 between top cover 42 with tank body 41.Such setting, is made to be formed by fastening bolt 47 between top cover 42 and tank body 41 to removably connect, is convenient to the cleaning to tank body 41.
In the present embodiment, gas filtration tank 4 is provided with two, and the gas filtration tank 4 being wherein positioned at head end is provided with activated alumina and fills chamber 48, and the gas filtration tank 4 being positioned at end is provided with active carbon and fills chamber 49.In this structure, fill out in the gas filtration tank 4 of head end and establish activated alumina, fill out in the gas filtration tank 4 of end and establish active carbon, the filter effect to tail gas can be substantially increased through the adsorption cleaning technique of activated alumina and active carbon two-stage.
In the present embodiment, vavuum pump 3 is vacuum diaphragm pump, is connected with bellows 5 between vacuum diaphragm pump and waste pipe 2.In this structure, the barrier film in vacuum diaphragm pump possesses certain loss prevention function, and the pump housing can be protected not impaired; Bellows 5 can ensure property easy to connect between vacuum diaphragm pump and waste pipe 2.
Although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention.Any those of ordinary skill in the art, when not departing from technical solution of the present invention scope, can utilize the technology contents of above-mentioned announcement to make many possible variations and modification to technical solution of the present invention, or being revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments, equivalent variations and modification, all should drop in the scope of technical solution of the present invention protection.
Claims (8)
1. the tail gas recycle filter for the diffusion system that reduces pressure, it is characterized in that: comprising condensing bulb (1), the waste pipe (2) being arranged on end and the vavuum pump (3) be connected between condensing bulb (1) and waste pipe (2) for being connected with decompression diffusion system, between described condensing bulb (1) and vavuum pump (3), being connected with at least one gas filtration tank (4).
2. the tail gas recycle filter for the diffusion system that reduces pressure according to claim 1, it is characterized in that: described gas filtration tank (4) comprises tank body (41), top cover (42), air inlet pipe (43) and escape pipe (44), described top cover (42) is covered on tank body (41) top, described air inlet pipe (43) and escape pipe (44) are divided into the both sides of tank body (41), the air inlet pipe (43) of the gas filtration tank (4) of head end is connected with condensing bulb (1), the escape pipe (44) of the gas filtration tank (4) of end is connected with vavuum pump (3), the air inlet pipe (43) of adjacent two gas filtration tanks (4) is connected with escape pipe (44).
3. the tail gas recycle filter for the diffusion system that reduces pressure according to claim 2, it is characterized in that: described tank body (41) both sides offer side thread hole (411) respectively, described air inlet pipe (43) and escape pipe (44) are threaded with two side thread holes (411) respectively.
4. the tail gas recycle filter for the diffusion system that reduces pressure according to claim 3, it is characterized in that: described top cover (42) offers screw top hole (421), described screw top hole (421) internal thread is connected with top blocking (45), described tank body (41) bottom offers bottom thread hole (412), and described bottom thread hole (412) internal thread is connected with bottom blocking (46).
5. the tail gas recycle filter for the diffusion system that reduces pressure according to claim 4, is characterized in that: be connected by fastening bolt (47) between top cover (42) with tank body (41).
6. the tail gas recycle filter for the diffusion system that reduces pressure according to any one of claim 1 to 5, it is characterized in that: described gas filtration tank (4) is provided with two, the gas filtration tank (4) being wherein positioned at head end is provided with activated alumina and fills chamber (48), and the gas filtration tank (4) being positioned at end is provided with active carbon and fills chamber (49).
7. the tail gas recycle filter for the diffusion system that reduces pressure according to any one of claim 1 to 5, is characterized in that: described vavuum pump (3) is vacuum diaphragm pump, is connected with bellows (5) between vacuum diaphragm pump and waste pipe (2).
8. the tail gas recycle filter for the diffusion system that reduces pressure according to claim 6, is characterized in that: described vavuum pump (3) is vacuum diaphragm pump, is connected with bellows (5) between vacuum diaphragm pump and waste pipe (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510686888.3A CN105289033A (en) | 2015-10-22 | 2015-10-22 | Tail gas recover and filtration device for decompression diffusion system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510686888.3A CN105289033A (en) | 2015-10-22 | 2015-10-22 | Tail gas recover and filtration device for decompression diffusion system |
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| CN105289033A true CN105289033A (en) | 2016-02-03 |
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| CN201510686888.3A Pending CN105289033A (en) | 2015-10-22 | 2015-10-22 | Tail gas recover and filtration device for decompression diffusion system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106563338A (en) * | 2016-11-11 | 2017-04-19 | 中国电子科技集团公司第四十八研究所 | Tail gas treatment device for low pressure diffusion furnace |
| CN106766949A (en) * | 2016-11-14 | 2017-05-31 | 湖南红太阳光电科技有限公司 | A kind of tail gas of diffusion furnace cooling device |
| CN109316932A (en) * | 2018-10-17 | 2019-02-12 | 张弘历 | A kind of chemical machinery with chemical products produce in toxic gas purification device |
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| US7087139B1 (en) * | 2002-08-23 | 2006-08-08 | Fina Technology, Inc. | Apparatus and method for removal of volatiles from a mass processable polymer |
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| CN201534164U (en) * | 2009-09-25 | 2010-07-28 | 江阴市东顺机械有限公司 | Water cooling device of lead plate conticaster and lead plate conticaster |
| CN201768472U (en) * | 2010-07-08 | 2011-03-23 | 石华堂 | Waste gas purification device |
| CN104404625A (en) * | 2014-11-18 | 2015-03-11 | 中国电子科技集团公司第四十八研究所 | Tail gas treating device for reduced-pressure diffusion system |
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2015
- 2015-10-22 CN CN201510686888.3A patent/CN105289033A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7087139B1 (en) * | 2002-08-23 | 2006-08-08 | Fina Technology, Inc. | Apparatus and method for removal of volatiles from a mass processable polymer |
| CN201377879Y (en) * | 2009-01-07 | 2010-01-06 | 施春建 | Split type air conditioner |
| CN201445892U (en) * | 2009-06-17 | 2010-05-05 | 江苏开源环保技术工程有限公司 | Exhaust recovery unit |
| CN201534164U (en) * | 2009-09-25 | 2010-07-28 | 江阴市东顺机械有限公司 | Water cooling device of lead plate conticaster and lead plate conticaster |
| CN201768472U (en) * | 2010-07-08 | 2011-03-23 | 石华堂 | Waste gas purification device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106563338A (en) * | 2016-11-11 | 2017-04-19 | 中国电子科技集团公司第四十八研究所 | Tail gas treatment device for low pressure diffusion furnace |
| CN106563338B (en) * | 2016-11-11 | 2019-08-16 | 中国电子科技集团公司第四十八研究所 | A kind of low pressure tail gas of diffusion furnace processing unit |
| CN106766949A (en) * | 2016-11-14 | 2017-05-31 | 湖南红太阳光电科技有限公司 | A kind of tail gas of diffusion furnace cooling device |
| CN109316932A (en) * | 2018-10-17 | 2019-02-12 | 张弘历 | A kind of chemical machinery with chemical products produce in toxic gas purification device |
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Application publication date: 20160203 |