CN104404625B - A kind of exhaust gas processing device for the diffusion system that reduces pressure - Google Patents
A kind of exhaust gas processing device for the diffusion system that reduces pressure Download PDFInfo
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- CN104404625B CN104404625B CN201410658151.6A CN201410658151A CN104404625B CN 104404625 B CN104404625 B CN 104404625B CN 201410658151 A CN201410658151 A CN 201410658151A CN 104404625 B CN104404625 B CN 104404625B
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- tail gas
- bottle
- diffusion system
- reduces pressure
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Abstract
A kind of exhaust gas processing device for the diffusion system that reduces pressure, which includes the crystal reaction tube that tail gas is exported for receiving decompression diffusion system（1）, the quartz reaction bottom of the tube is provided with tail gas delivery line（2）, the tail gas delivery line（2）Jing tail gas condensation devices（3）, in tail gas and bottle（4）It is connected to outwards extract the vacuum pump of tail gas（5）.Apparatus of the present invention complete cooling, gas-liquid separation and the collection of tail gas Metaphosphoric acid by tail gas condensation device, by process being further neutralized to acid ingredient remaining in tail gas with bottle in tail gas, the tail gas to the diffusion system that reduces pressure that can efficiently, easy is processed, on the one hand impact of the high temperature corrosion tail gas to vacuum pump can be greatly reduced, improve the service life of vacuum pump, extend maintenance period, on the other hand, tail gas discharges more clean environment firendly after treatment.
Description
Technical field
The present invention relates to a kind of be used for electronic semi-conductor's technique, particularly crystal silicon solar energy battery production equipment special neck
The decompression diffusion system exhaust gas processing device in domain, for reduce pressure diffusion system high-temperature acidic tail gas condensed and neutralization at
Reason.
Background technology
Diffusion furnace is mainly used for being doped semiconductor crystal wafer under the high temperature conditions, will element phosphor, boron diffuse into
Silicon chip, so as to the type of impurity, concentration and distribution in quasiconductor is varied and controlled, to set up different electrical characteristics regions.
In photovoltaic industry, diffusion furnace is used for the preparation of solaode PN junction, spreads the quality of PN junction for solar-electricity
The conversion efficiency in pond has a major impact, and is the deciding factor of solar cell properties.
Solar energy production line traditional at present mainly prepares the PN junction of solaode using normal pressure diffusion technique, that is, spread
It is normal pressure or pressure-fired in stove reaction tube.As solaode develops to efficient, inexpensive direction, silicon chip surface doping content
Constantly reduce, the junction depth of PN junction is more and more shallow, and square resistance more and more higher, the control of normal pressure diffusion couple silicon chip uniform doping are got over
Come poorer, it is difficult to prepare high-quality superficial face PN junction.It is low pressure, molecule in boiler tube in decompression diffusion technique diffusion furnace reaction tube
Free travel is long, and the uniformity of air-flow is good, and PN junction prepares quality height, additionally, the decompression diffusion also absorption efficiency with chemicals
Height, production capacity is big, the advantage that cost is saved, and is the trend of following diffusion technique development.
Decompression diffusion with conventional atmospheric diffusion maximum it is different be tail gas process.In conventional atmospheric diffusion process,
Exhaust emissions relies primarily on crystal reaction tube inside and outside differential pressure and " extrudes " from tail gas delivery line（I.e. process gas constantly passes through in a steady stream
Air inlet is sent in crystal reaction tube, is made pressure-fired is produced in quartz ampoule, and is atmospheric pressure at tail gas delivery line, and pipe is inside and outside to be produced
Pressure reduction is given birth to）, vent gas treatment mode is simple.And in decompression diffusion, in order to form the subnormal ambient in crystal reaction tube, need
Rear ventilation is increased by vacuum pump（It is evacuated i.e. toward outside quartz ampoule）, and pressure regulator is equipped with, form specific negative pressure in pipe
Environment.Vacuum pump is the critical component of decompression diffusion furnace, and when just having derived crystal reaction tube due to gas, temperature is very high, and is had very
Strong acid and corrosivity, tail gas are directly entered the corrosion that vacuum pump easily causes parts in vacuum pump, affect vacuum pump
Service life, causes vacuum pump to damage when serious, additionally, undressed high-temperature acid corrosive gas directly passes through vacuum pumping
Go out to be emitted into the external world and can cause air pollution.
The content of the invention
The technical problem to be solved is, not enough for prior art, there is provided one kind can efficiently, it is easily right
Decompression diffusion system tail gas is processed, and impact of the high temperature corrosion tail gas to vacuum pump is greatly decreased, and improves vacuum pump
Service life, extend maintenance period exhaust gas processing device.
To solve above-mentioned technical problem, a kind of exhaust gas processing device for the diffusion system that reduces pressure of the present invention, including for
The crystal reaction tube that decompression diffusion system exports tail gas is received, the quartz reaction bottom of the tube is provided with tail gas delivery line, and the tail gas is led
Outlet pipe is connected with the intake interface of tail gas condensation device, in the exhaust port of tail gas condensation device and tail gas and bottle air inlet connecting
Mouthful it is connected, is connected with the vacuum pump for outside extraction tail gas with the exhaust port of bottle in tail gas.
Polytetrafluoro joint is connected by and bottle, vacuum pump between in the tail gas delivery line, tail gas condensation device, tail gas.
The tail gas condensation device is entwined by multi-circle spiral flow pipe, is provided with tail gas condensation device in the middle part of the multi-circle spiral flow pipe
Intake interface, the upper orifice and lower nozzle of the multi-circle spiral flow pipe respectively constitute the exhaust port and waste liquid row of tail gas condensation device
Put mouth.The Main Function of tail gas condensation device is cooling, gas-liquid separation and the collection for realizing diffusion system high-temperature tail gas Metaphosphoric acid.
The serpentine pipe external diameter of the tail gas condensation device is 20mm, and wall thickness is 2mm.
The central diameter of the multi-circle spiral flow pipe of the tail gas condensation device is 190mm, and the number of turns is 12.
Support column is provided between the multi-circle spiral flow pipe of the tail gas condensation device.
Intake interface, the bottom of bottle in bottleneck setting exhaust port, and the tail gas with bottle are set with the bottom of bottle of bottle in the tail gas
Mesh plate is equipped with position of bottleneck, tail gas adsorption agent between two mesh plates, is placed with.
NaOH granule and activated carbon of the tail gas adsorption agent using alkalescence, when in tail gas is by tail gas with bottle, in tail gas
In the presence of adsorbent, in tail gas, the toxic gas such as remaining acid ingredient, chlorine are further neutralized.
In the tail gas and bottle bottle cap be dismountable flange-type structure, rubber seal is provided between bottle cap and bottle, is made
The replacing of tail gas adsorption agent and the cleaning of mesh plate are very convenient, and maintenance process is simple.
Made using gas refining quartz material with bottle in the tail gas condensation device and tail gas, anticorrosion is transparent to also allow for tail
The monitoring of gas disposal process.
In technical solution of the present invention, diffusion system high-temperature tail gas are derived by the tail gas delivery line of quartz reaction bottom of the tube, so
Tail gas condensation device is entered to from the intake interface of tail gas condensation device afterwards, in tail gas condensation device after multi-circle spiral flow pipe
Discharge from the exhaust port of tail gas condensation device, in the process, exhaust emissions path is extended, in the presence of air-cooled,
High-temperature tail gas are sufficiently cooled, the Metaphosphoric acid (H in tail gas3PO4) complete gas-liquid separation and condense into liquid, the Metaphosphoric acid of liquid
The bottom of tail gas condensation device is precipitated to downwards along helical pipe, is come together at discard solution discharge port.Discard solution discharge port is provided with plug
Device, when tail washings is collected it is a certain amount of when, the discharge of Metaphosphoric acid tail washings, apparatus structure are conveniently accomplished by turning on end cap
Simply, it is easy to maintenance.
Diffusion tail gas is after tail gas condensation device, although the most of Metaphosphoric acid in tail gas has carried out gas-liquid separation, but
Acid ingredient is remained in tail gas also, the present invention is by completing at the neutralization of remaining acid composition in tail gas with bottle in tail gas
Reason.
Compared with prior art, the positive effect of the present invention is：
（1）Diffusion tail gas is reduced to diffusion furnace key element --- the corrosion of vacuum pump of reducing pressure, vacuum pump is improved
Service life, prolongation maintenance period.
The present invention arranges tail gas condensation device and tail gas neutralization between the tail gas delivery line and vacuum pump of crystal reaction tube
Bottle, is respectively utilized to complete condensation and the neutralisation treatment of high-temperature acidic tail gas, by processing impact of the later tail gas to vacuum pump
Reduce, the service life of vacuum pump and maintenance period extend.
（2）Diffusion exhaust emissions is more cleaned, environmental protection.
After treatment, the most of Metaphosphoric acid in tail gas has carried out gas-liquid separation to the diffusion tail gas of the present invention, then passes through
In tail gas and after bottle, in tail gas, remaining acid ingredient is further neutralized process, and after vent gas treatment, diffusion exhaust emissions is more
Cleaning, environmental protection.
（3）It is simple structure, easy to maintenance
Tail gas condensation device is extended exhaust emissions path by multi-circle spiral flow pipe winding arrangement, in air-cooled effect
Lower high-temperature tail gas to be carried out sufficiently cool, without the need for complicated water-cooling structure, simple structure is easy to implement, and promotes easy.
Tail gas condensation device is provided with discard solution discharge port, when tail washings is collected it is a certain amount of when, it is convenient by end cap to turn on
The discharge for completing Metaphosphoric acid tail washings, in tail gas and bottle bottle cap be dismountable flange-type structure, the replacing of tail gas adsorption agent
Very convenient with the cleaning of mesh plate, maintenance process is simple.
Description of the drawings
Fig. 1 is a kind of exhaust gas processing device overall construction drawing for the diffusion system that reduces pressure of the present invention.
Fig. 2 is the front view of tail gas condensation device of the present invention.
Fig. 3 is the top view of tail gas condensation device of the present invention.
Fig. 4 is the 3 d effect graph of tail gas condensation device of the present invention.
Fig. 5 is in tail gas of the present invention and the structural representation of bottle.
Fig. 6 is in tail gas of the present invention and the mesh plate structure chart of bottle.
Specific embodiment
Following description is done to the specific embodiment of the present invention below in conjunction with the accompanying drawings.
As shown in figs 1 to 6, a kind of exhaust gas processing device for the diffusion system that reduces pressure of the present invention by crystal reaction tube 1,
It is placed in the tail gas delivery line 2 of the quartz reaction bottom of the tube, tail gas condensation device 3, tail gas and bottle 4, vacuum pump 5, connecting tube
Road and joint 6 etc. are constituted.In device, the annexation of each part is：The tail gas delivery line 2 of crystal reaction tube 1 is filled with tail gas condensing
Put 3 intake interface 31 to be connected, the exhaust port 32 of tail gas condensation device 3 is connected with the intake interface 41 of bottle 4 with tail gas
Connect, be connected with vacuum pump 5 with the exhaust port 42 of bottle 4 in tail gas, i.e., in the tail gas delivery line 2 and vacuum of crystal reaction tube 1
Successively arrange between pump 5 in tail gas condensation device 3 and tail gas and bottle 4.Each interface is connected by polytetrafluoro joint.
The tail gas condensation device 3 is entwined by multi-circle spiral flow pipe, is made using gas refining quartz material, and centre is provided with a glass
Glass straight tube is connected with multi-circle spiral flow pipe, and device is in integrally spring-like, wherein, intermediate glass straight tube constitutes tail gas condensation device 3
Intake interface 31, multi-circle spiral flow pipe upper orifice and lower nozzle respectively constitute the exhaust port 32 and discharging of waste liquid of tail gas condensation device
Mouth 33.During specific design, the caliber of serpentine pipe is according to diffusion system exhaust flow parameter determination, tail gas exhaust（Vacuum pump is toward stone
It is evacuated outside English pipe）Flow is bigger, and serpentine pipe latus rectum also accordingly should increase, for solar energy industry diffusion furnace, tail gas condensing
Device 3 takes external diameter 20mm, and wall thickness 2mm is generally possible to meet and requires.Tail gas condensation device 3 two other important parameter is spiral
Tube hub diameter and the number of turns, increase serpentine pipe central diameter and increase the number of turns and can extend exhaust emissions path, in same wind
Cooling effect can be lifted under the conditions of cold air convection, can be determined according to site layout project space and cooling requirement, general spiral
Tube hub diameter takes 190mm, and the number of turns takes 12 and disclosure satisfy that requirement.In order to strengthen the spiral coil intensity of tail gas condensation device 3,
The glass support cylinder of a diameter of 5mm can be adopted between each circle of the quartzy spiral coil of gas refining to carry out increasing weldering reinforcement, additionally, for side
Just site layout project, the intake interface 31 of tail gas condensation device 3, exhaust port 32, the direction of discard solution discharge port 33, length can bases
Practical layout situation is adjusted.
Made using gas refining quartz material with bottle 4 in the tail gas, in tail gas, net is equipped with the bottom of bottle and position of bottleneck of bottle 4
Orifice plate 43, is placed with tail gas adsorption agent 44 between two mesh plates, to be further neutralized to acid ingredient remaining in tail gas
Process.In actual enforcement, tail gas adsorption agent 44 can adopt the NaOH granules of alkalescence, to neutralize the acidity unit remained in tail gas
Element, and activated carbon can be filled, for eliminating the toxic gas such as the chlorine in tail gas.In tail gas and the bottle cap 45 of bottle 4 is detachable
Flange-type structure, rubber seal 47 is provided between bottle cap 45 and bottle 46, for the sealing of bottle cap 45, rear tail gas is taken apart and is inhaled
Attached dose 44 of replacing and the cleaning of mesh plate 43 are very convenient.
Above one embodiment of the present invention is described, but the present invention is not limited to above-mentioned embodiment, ability
The those of ordinary skill in domain can be making kind on the premise of without departing from present inventive concept after the content for understanding such scheme
Plant change.
Claims (8)
1. a kind of exhaust gas processing device for the diffusion system that reduces pressure, which is included for receiving decompression diffusion system output tail gas
Crystal reaction tube（1）, the quartz reaction bottom of the tube is provided with tail gas delivery line（2）, it is characterised in that the tail gas delivery line（2）With
Tail gas condensation device（3）Intake interface（31）It is connected, the exhaust port of tail gas condensation device（32）With in tail gas and bottle（4）
Intake interface（41）It is connected, the exhaust port in tail gas with bottle（42）With the vacuum pump for outwards extracting tail gas（5）Phase
Connection；The tail gas condensation device is entwined by multi-circle spiral flow pipe, and the intake interface of the tail gas condensation device is located at multi-circle spiral flow
The middle part of pipe, the upper orifice of the multi-circle spiral flow pipe constitute the exhaust port of tail gas condensation device（32）, under the multi-circle spiral flow pipe
The mouth of pipe constitutes the discard solution discharge port of tail gas condensation device（33）, middle part intake interface of the tail gas from multi-circle spiral flow pipe（31）Into,
Exhaust port of the tail gas from tail gas condensation device after multi-circle spiral flow pipe（32）Discharge, in the process, tail gas is sufficiently cool
And the Metaphosphoric acid in tail gas completes gas-liquid separation and condenses into liquid, the Metaphosphoric acid of liquid is precipitated to downwards tail gas along multi-circle spiral flow pipe
The discard solution discharge port of condensing units（33）Place；In the tail gas and bottle（4）Bottom of bottle and position of bottleneck be equipped with mesh plate（43）, two
The tail gas adsorption agent being made up of the NaOH granules of alkalescence is placed between mesh plate（44）.
2. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterised in that the tail gas is cold
The serpentine pipe external diameter of solidifying device is 20mm, and wall thickness is 2mm.
3. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterised in that the tail gas is cold
The central diameter of the multi-circle spiral flow pipe of solidifying device is 190mm, and the number of turns is 12.
4. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterised in that the tail gas is cold
Support column is provided between the multi-circle spiral flow pipe of solidifying device.
5. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterised in that in the tail gas
And bottle（4）Bottom of bottle be set to intake interface（41）, bottleneck is set to exhaust port（42）.
6. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterised in that the tail gas is inhaled
Contain activated carbon in attached dose.
7. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterised in that in the tail gas
With the bottle cap of bottle（45）For dismountable flange-type structure, rubber seal between bottle cap and bottle, is provided with.
8. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterised in that the tail gas is cold
Made using gas refining quartz material with bottle in solidifying device and tail gas.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410658151.6A CN104404625B (en) | 2014-11-18 | 2014-11-18 | A kind of exhaust gas processing device for the diffusion system that reduces pressure |
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| CN201410658151.6A CN104404625B (en) | 2014-11-18 | 2014-11-18 | A kind of exhaust gas processing device for the diffusion system that reduces pressure |
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| CN104404625A CN104404625A (en) | 2015-03-11 |
| CN104404625B true CN104404625B (en) | 2017-03-29 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105194949B (en) * | 2015-09-28 | 2017-06-13 | 湖南红太阳光电科技有限公司 | A kind of tail gas vacuum acid removal filter for the diffusion furnace that depressurizes |
| CN105289033A (en) * | 2015-10-22 | 2016-02-03 | 湖南红太阳光电科技有限公司 | Tail gas recover and filtration device for decompression diffusion system |
| CN106563338B (en) * | 2016-11-11 | 2019-08-16 | 中国电子科技集团公司第四十八研究所 | A kind of low pressure tail gas of diffusion furnace processing unit |
| CN107824001A (en) * | 2017-12-13 | 2018-03-23 | 无锡正隆星源电子科技有限公司 | Diffusion furnace emission-control equipment |
| CN110354650A (en) * | 2019-07-30 | 2019-10-22 | 云南雷允上理想药业有限公司 | A kind of vacuum system dehumidifying unit |
| CN111883462A (en) * | 2020-07-29 | 2020-11-03 | 无锡尚德太阳能电力有限公司 | Method for monitoring blockage state of silicon solar cell diffusion tail gas quartz tube |
| CN113941220A (en) * | 2021-10-13 | 2022-01-18 | 唐宁 | Water-containing metaphosphoric acid dryer |
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| CN101221999A (en) * | 2008-01-28 | 2008-07-16 | 常州天合光能有限公司 | Solar battery diffusion technology and equipment thereof |
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| CN103710758A (en) * | 2013-12-31 | 2014-04-09 | 北京七星华创电子股份有限公司 | Pressure control system and control method for reaction chamber of negative pressure diffusion furnace |
| CN203855684U (en) * | 2014-04-01 | 2014-10-01 | 中国电子科技集团公司第四十八研究所 | Reduced pressure diffusion furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3554219B2 (en) * | 1998-03-31 | 2004-08-18 | キヤノン株式会社 | Exhaust device and exhaust method, deposited film forming device and deposited film forming method |
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- 2014-11-18 CN CN201410658151.6A patent/CN104404625B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101220518A (en) * | 2007-01-12 | 2008-07-16 | 中国电子科技集团公司第四十八研究所 | Tail gas collecting device for high temperature diffusion system |
| CN101221999A (en) * | 2008-01-28 | 2008-07-16 | 常州天合光能有限公司 | Solar battery diffusion technology and equipment thereof |
| CN103710758A (en) * | 2013-12-31 | 2014-04-09 | 北京七星华创电子股份有限公司 | Pressure control system and control method for reaction chamber of negative pressure diffusion furnace |
| CN203855684U (en) * | 2014-04-01 | 2014-10-01 | 中国电子科技集团公司第四十八研究所 | Reduced pressure diffusion furnace |
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