CN104404625A - Tail gas treating device for reduced-pressure diffusion system - Google Patents
Tail gas treating device for reduced-pressure diffusion system Download PDFInfo
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- CN104404625A CN104404625A CN201410658151.6A CN201410658151A CN104404625A CN 104404625 A CN104404625 A CN 104404625A CN 201410658151 A CN201410658151 A CN 201410658151A CN 104404625 A CN104404625 A CN 104404625A
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Abstract
The invention discloses a tail gas treating device for a reduced-pressure diffusion system. The device comprises a quartz reaction tube (1) for receiving tail gas output by the reduced-pressure diffusion system, wherein a tail gas leading-out tube (2) is arranged at the bottom of the quartz reaction tube and connected with a vacuum pump (5) for pumping the tail gas outwards through a tail gas condensation device (3) and a tail gas neutralization bottle (4). According to the device, cooling, gas-liquid separation and collection of tail gas metaphosphoric acid are finished through the tail gas condensation device, and residual acidic components in the tail gas are further neutralized through the tail gas neutralization bottle, so that the tail gas of the reduced-pressure diffusion system can be treated efficiently and conveniently, on one hand, the effect caused by the high-temperature corrosive tail gas on the vacuum pump can be substantially reduced, the service life and the maintenance period of the vacuum pump are prolonged, and on the other hand, the tail gas is cleaner and more environment-friendly when emitted after treated.
Description
Technical field
The present invention relates to a kind of for electronic semi-conductor's technique, particularly crystal silicon solar energy battery produces the decompression diffusion system exhaust gas processing device in equipment special field, for carrying out condensation and neutralizing treatment to decompression diffusion system high-temperature acidic tail gas.
Background technology
Diffusion furnace main application is adulterated to semiconductor crystal wafer under the high temperature conditions, enters silicon chip by element phosphor, boron diffusion, thus change and control the type of impurity in semi-conductor, concentration and distribution, to set up different electrical characteristic regions.In photovoltaic industry, diffusion furnace is used for the preparation of solar cell PN junction, and the quality of diffusion PN junction has material impact for the efficiency of conversion of solar cell, is the deciding factor of solar cell properties.
Solar energy production line traditional at present mainly adopts normal pressure diffusion technique to prepare the PN junction of solar cell, is namely normal pressure or pressure-fired in diffusion furnace reaction tubes.Along with solar cell is to efficient, low cost future development, silicon chip surface doping content constantly reduces, and the junction depth of PN junction is more and more shallow, and square resistance is more and more higher, the control of normal pressure diffusion couple silicon chip uniform doping worse and worse, is difficult to prepare high-quality shallow surperficial PN junction.Be low pressure in decompression diffusion technique diffusion furnace reaction tubes, in boiler tube, molecule free stroke is long, the good uniformity of air-flow, PN junction preparation quality is high, and in addition, the assimilated efficiency that decompression diffusion also has chemical is high, the advantage that production capacity is large, cost is economized is the trend of following diffusion technique development.
Decompression diffusion spreads the maximum different process being tail gas from conventional atmospheric.In conventional atmospheric diffusion process, exhaust emissions mainly relies on crystal reaction tube inside and outside differential pressure " to extrude " from tail gas delivery line, and (established technology gas is sent in crystal reaction tube by inlet mouth continuously, make to produce pressure-fired in silica tube, and tail gas delivery line place is normal atmosphere, pressure reduction is created inside and outside pipe), vent gas treatment mode is simple.And in decompression diffusion, in order to form the subnormal ambient in crystal reaction tube, need to increase rear ventilation (namely bleeding outside silica tube) by vacuum pump, and be equipped with pressure-regulator, form specific subnormal ambient in pipe.Vacuum pump is the key part of decompression diffusion furnace, because when gas has just derived crystal reaction tube, temperature is very high, and there is very strong acidity and corrodibility, tail gas directly enters the corrosion that vacuum pump easily causes component in vacuum pump, affect the work-ing life of vacuum pump, cause vacuum pump to damage time serious, in addition, undressed high-temperature acid corrosive gases is directly disposed to the external world by vacuum pump extraction can cause atmospheric pollution.
Summary of the invention
Technical problem to be solved by this invention is, not enough for prior art, one is provided efficiently, easily to process decompression diffusion system tail gas, and significantly reduce high temperature corrosion tail gas to the impact of vacuum pump, improve the work-ing life of vacuum pump, extend the exhaust gas processing device of maintenance intervals.
For solving the problems of the technologies described above, a kind of exhaust gas processing device for the diffusion system that reduces pressure of the present invention, comprise the crystal reaction tube exporting tail gas for receiving decompression diffusion system, tail gas delivery line is provided with bottom this crystal reaction tube, this tail gas delivery line is connected with the intake interface of tail gas condensation device, the exhaust port of tail gas condensation device is connected with the intake interface of bottle with tail gas, is connected in tail gas with the exhaust port of bottle with the vacuum pump for outwards extracting tail gas.
In this tail gas delivery line, tail gas condensation device, tail gas and bottle, connection between vacuum pump adopt polytetrafluoro joint.
This tail gas condensation device is entwined by multi-circle spiral flow pipe, and the middle part of this multi-circle spiral flow pipe is provided with the intake interface of tail gas condensation device, and the upper orifice of this multi-circle spiral flow pipe and lower nozzle form exhaust port and the discard solution discharge port of tail gas condensation device respectively.The Main Function of tail gas condensation device realizes the cooling of diffusion system high-temperature tail gas metaphosphoric acid, gas-liquid separation and collection.
The spiral tube external diameter of this tail gas condensation device is 20mm, and wall thickness is 2mm.
The central diameter of the multi-circle spiral flow pipe of this tail gas condensation device is 190mm, and the number of turns is 12.
Pillar stiffener is provided with between the multi-circle spiral flow pipe of this tail gas condensation device.
In this tail gas and bottle bottle at the bottom of intake interface is set, bottleneck arranges exhaust port, and in this tail gas and bottle bottle at the bottom of and position of bottleneck be equipped with mesh plate, be placed with tail gas adsorption agent between two mesh plates.
This tail gas adsorption agent adopts NaOH particle and the gac of alkalescence, when tail gas by tail gas and bottle time, under the effect of tail gas adsorption agent, the toxic gas such as acidic component, chlorine remaining in tail gas is neutralized further.
In this tail gas and the bottle cap of bottle be dismountable flange-type structure, be provided with rubber seal between bottle cap and bottle, make the clean very convenient of the replacing of tail gas adsorption agent and mesh plate, maintenance process is simple.
Gas refining quartz material is all adopted to make with bottle in this tail gas condensation device and tail gas, protection against corrosion, the transparent monitoring being also convenient to vent gas treatment process.
In technical solution of the present invention, diffusion system high-temperature tail gas is derived by the tail gas delivery line bottom crystal reaction tube, then tail gas condensation device is entered to from the intake interface of tail gas condensation device, discharge through the exhaust port of multi-circle spiral flow Guan Houcong tail gas condensation device in tail gas condensation device, in the process, exhaust emissions path is extended, under air-cooled effect, high-temperature tail gas is sufficiently cooled, the metaphosphoric acid (H in tail gas
3pO
4) complete gas-liquid separation and condense into liquid, liquid metaphosphoric acid is precipitated to the bottom of tail gas condensation device downwards along helical pipe, come together in discard solution discharge port place.Discard solution discharge port is provided with end cap, when tail washings is collected a certain amount of, turns on the discharge that end cap can complete metaphosphoric acid tail washings easily, and apparatus structure is simple, easy to maintenance.
Diffusion tail gas, after tail gas condensation device, although the most of metaphosphoric acid in tail gas has carried out gas-liquid separation, has also remained acidic component in tail gas, and the present invention is by completing the neutralizing treatment to remaining acid composition in tail gas with bottle in tail gas.
Compared with prior art, positively effect of the present invention is:
(1) decrease diffusion tail gas to decompression diffusion furnace key element---the corrosion of vacuum pump, improve the work-ing life of vacuum pump, extend maintenance intervals.
The present invention arranges in tail gas condensation device and tail gas and bottle between the tail gas delivery line and vacuum pump of crystal reaction tube, condensation and the neutralizing treatment of high-temperature acidic tail gas are respectively used to, reduce the impact of vacuum pump by processing later tail gas, the work-ing life of vacuum pump and maintenance intervals extend.
(2) make that diffusion exhaust emissions is more clean, environmental protection.
After treatment, the most of metaphosphoric acid in tail gas has carried out gas-liquid separation to diffusion tail gas of the present invention, then through in tail gas and after bottle, acidic component remaining in tail gas carries out neutralizing treatment further, and after vent gas treatment, diffusion exhaust emissions is more clean, environmental protection.
(3) structure is simple, easy to maintenance
Tail gas condensation device makes exhaust emissions path be extended by multi-circle spiral flow pipe winding arrangement, fully can cool under air-cooled effect to high-temperature tail gas, and without the need to the water-cooling structure of complexity, structure is simple, is easy to implement, and promotes easily.
Tail gas condensation device is provided with discard solution discharge port, when tail washings is collected a certain amount of, turn on the discharge that end cap can complete metaphosphoric acid tail washings easily, in tail gas and the bottle cap of bottle be dismountable flange-type structure, the replacing of tail gas adsorption agent and the clean very convenient of mesh plate, maintenance process is simple.
Accompanying drawing explanation
Fig. 1 is a kind of exhaust gas processing device overall construction drawing for the diffusion system that reduces pressure of the present invention.
Fig. 2 is the front view of tail gas condensation device of the present invention.
Fig. 3 is the vertical view of tail gas condensation device of the present invention.
Fig. 4 is the 3 d effect graph of tail gas condensation device of the present invention.
Fig. 5 is in tail gas of the present invention and the structural representation of bottle.
Fig. 6 is in tail gas of the present invention and the mesh plate structure iron of bottle.
Embodiment
Below in conjunction with accompanying drawing, following description is done to the specific embodiment of the present invention.
As shown in figs 1 to 6, a kind of exhaust gas processing device for the diffusion system that reduces pressure of the present invention by crystal reaction tube 1, be placed in tail gas delivery line 2, tail gas condensation device 3, tail gas and bottle 4 bottom described crystal reaction tube, vacuum pump 5, connecting tube and joint 6 etc. form.In device, the annexation of each parts is: the tail gas delivery line 2 of crystal reaction tube 1 is connected with the intake interface 31 of tail gas condensation device 3, the exhaust port 32 of tail gas condensation device 3 is connected with the intake interface 41 of bottle 4 with tail gas, be connected with vacuum pump 5 with the exhaust port 42 of bottle 4 in tail gas, namely successively arrange in tail gas condensation device 3 and tail gas and bottle 4 between the tail gas delivery line 2 and vacuum pump 5 of crystal reaction tube 1.The connection of each interface adopts polytetrafluoro joint.
This tail gas condensation device 3 is entwined by multi-circle spiral flow pipe, gas refining quartz material is adopted to make, centre is provided with a glass straight tube and is connected with multi-circle spiral flow pipe, device entirety is in spring-like, wherein, intermediate glass straight tube forms the intake interface 31 of tail gas condensation device 3, and multi-circle spiral flow pipe upper orifice and lower nozzle form exhaust port 32 and the discard solution discharge port 33 of tail gas condensation device respectively.During specific design, the caliber of spiral tube is determined according to diffusion system exhaust flow parameter, tail gas exhaust (vacuum pump is bled outside silica tube) flow is larger, spiral tube latus rectum also answers corresponding increase, for sun power industry diffusion furnace, tail gas condensation device 3 gets external diameter 20mm, and wall thickness 2mm generally can meet the demands.Two other important parameter of tail gas condensation device 3 is spiral tube central diameter and the number of turns, increase spiral tube central diameter and increase the number of turns and can extend exhaust emissions path, cooling performance can be promoted under same air-cooled convection of air condition, can determine according to site layout project space and cooling requirement, general spiral tube central diameter gets 190mm, and the number of turns is got 12 and can be met the demands.In order to strengthen the spiral pipe intensity of tail gas condensation device 3, gas refine quartzy spiral pipe respectively enclose between diameter can be adopted to be that the glass support cylinder of 5mm carries out increasing weldering and strengthens, in addition, conveniently site layout project, can adjusting according to practical layout situation towards, length of the intake interface 31 of tail gas condensation device 3, exhaust port 32, discard solution discharge port 33.
In this tail gas and bottle 4 adopt gas to refine quartz material to make, in tail gas and at the bottom of the bottle of bottle 4 and position of bottleneck be equipped with mesh plate 43, be placed with tail gas adsorption agent 44 between two mesh plates, to carry out neutralizing treatment further to acidic component remaining in tail gas.When reality is implemented, tail gas adsorption agent 44 can adopt the NaOH particle of alkalescence, with in and acid element residual in tail gas, and can admixture gac, for eliminating the toxic gases such as chlorine in tail gas.In tail gas and the bottle cap 45 of bottle 4 be dismountable flange-type structure, be provided with rubber seal 47 between bottle cap 45 and bottle 46, for the sealing of bottle cap 45, take the replacing of rear tail gas adsorption agent 44 and the clean very convenient of mesh plate 43 apart.
Be described one embodiment of the present invention above, but the present invention is not limited to above-mentioned embodiment, those of ordinary skill in the art can also make many variations after the content understanding such scheme under the prerequisite not departing from present inventive concept.
Claims (9)
1. the exhaust gas processing device for the diffusion system that reduces pressure, it comprises the crystal reaction tube (1) exporting tail gas for receiving decompression diffusion system, tail gas delivery line (2) is provided with bottom this crystal reaction tube, it is characterized in that, this tail gas delivery line (2) is connected with the intake interface (31) of tail gas condensation device (3), the exhaust port (32) of tail gas condensation device is connected with the intake interface (41) of bottle (4) with tail gas, is connected in tail gas with the exhaust port (42) of bottle with the vacuum pump (5) for outwards extracting tail gas.
2. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterized in that, this tail gas condensation device is entwined by multi-circle spiral flow pipe, the middle part of this multi-circle spiral flow pipe is provided with the intake interface (31) of tail gas condensation device, and the upper orifice of this multi-circle spiral flow pipe and lower nozzle form exhaust port (32) and the discard solution discharge port (33) of tail gas condensation device respectively.
3. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 2, it is characterized in that, the spiral tube external diameter of this tail gas condensation device is 20mm, and wall thickness is 2mm.
4. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 2, it is characterized in that, the central diameter of the multi-circle spiral flow pipe of this tail gas condensation device is 190mm, and the number of turns is 12.
5. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 2, is characterized in that, be provided with pillar stiffener between the multi-circle spiral flow pipe of this tail gas condensation device.
6. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, it is characterized in that, in this tail gas and at the bottom of the bottle of bottle (4), intake interface (41) is set, bottleneck arranges exhaust port (42), and in this tail gas and bottle (4) bottle at the bottom of and position of bottleneck be equipped with mesh plate (43), be placed with tail gas adsorption agent (44) between two mesh plates.
7. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 6, is characterized in that, this tail gas adsorption agent adopts NaOH particle and the gac of alkalescence.
8. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 6, is characterized in that, in this tail gas and the bottle cap (45) of bottle be dismountable flange-type structure, be provided with rubber seal between bottle cap and bottle.
9. a kind of exhaust gas processing device for the diffusion system that reduces pressure as claimed in claim 1, is characterized in that, in this tail gas condensation device and tail gas and bottle all adopt gas to refine quartz material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410658151.6A CN104404625B (en) | 2014-11-18 | 2014-11-18 | A kind of exhaust gas processing device for the diffusion system that reduces pressure |
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| CN201410658151.6A CN104404625B (en) | 2014-11-18 | 2014-11-18 | A kind of exhaust gas processing device for the diffusion system that reduces pressure |
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| CN104404625A true CN104404625A (en) | 2015-03-11 |
| CN104404625B CN104404625B (en) | 2017-03-29 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105194949A (en) * | 2015-09-28 | 2015-12-30 | 湖南红太阳光电科技有限公司 | Tail gas vacuum acid-removing filter for decompression diffusion furnace |
| CN105289033A (en) * | 2015-10-22 | 2016-02-03 | 湖南红太阳光电科技有限公司 | Tail gas recover and filtration device for decompression diffusion system |
| CN106563338A (en) * | 2016-11-11 | 2017-04-19 | 中国电子科技集团公司第四十八研究所 | Tail gas treatment device for low pressure diffusion furnace |
| CN107824001A (en) * | 2017-12-13 | 2018-03-23 | 无锡正隆星源电子科技有限公司 | Diffusion furnace emission-control equipment |
| CN110354650A (en) * | 2019-07-30 | 2019-10-22 | 云南雷允上理想药业有限公司 | A kind of vacuum system dehumidifying unit |
| CN111883462A (en) * | 2020-07-29 | 2020-11-03 | 无锡尚德太阳能电力有限公司 | Method for monitoring blockage state of silicon solar cell diffusion tail gas quartz tube |
| CN113941220A (en) * | 2021-10-13 | 2022-01-18 | 唐宁 | Water-containing metaphosphoric acid dryer |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010007174A1 (en) * | 1998-03-31 | 2001-07-12 | Junichiro Hashizume | Exhaust process and film depositing method using the exhaust process |
| CN101220518A (en) * | 2007-01-12 | 2008-07-16 | 中国电子科技集团公司第四十八研究所 | Tail gas collecting device for high temperature diffusion system |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105194949A (en) * | 2015-09-28 | 2015-12-30 | 湖南红太阳光电科技有限公司 | Tail gas vacuum acid-removing filter for decompression diffusion furnace |
| CN105289033A (en) * | 2015-10-22 | 2016-02-03 | 湖南红太阳光电科技有限公司 | Tail gas recover and filtration device for decompression diffusion system |
| CN106563338A (en) * | 2016-11-11 | 2017-04-19 | 中国电子科技集团公司第四十八研究所 | Tail gas treatment device for low pressure diffusion furnace |
| CN106563338B (en) * | 2016-11-11 | 2019-08-16 | 中国电子科技集团公司第四十八研究所 | A kind of low pressure tail gas of diffusion furnace processing unit |
| CN107824001A (en) * | 2017-12-13 | 2018-03-23 | 无锡正隆星源电子科技有限公司 | Diffusion furnace emission-control equipment |
| CN110354650A (en) * | 2019-07-30 | 2019-10-22 | 云南雷允上理想药业有限公司 | A kind of vacuum system dehumidifying unit |
| CN111883462A (en) * | 2020-07-29 | 2020-11-03 | 无锡尚德太阳能电力有限公司 | Method for monitoring blockage state of silicon solar cell diffusion tail gas quartz tube |
| CN113941220A (en) * | 2021-10-13 | 2022-01-18 | 唐宁 | Water-containing metaphosphoric acid dryer |
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| CN104404625B (en) | 2017-03-29 |
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