CN106766949A - A kind of tail gas of diffusion furnace cooling device - Google Patents
A kind of tail gas of diffusion furnace cooling device Download PDFInfo
- Publication number
- CN106766949A CN106766949A CN201610999802.7A CN201610999802A CN106766949A CN 106766949 A CN106766949 A CN 106766949A CN 201610999802 A CN201610999802 A CN 201610999802A CN 106766949 A CN106766949 A CN 106766949A
- Authority
- CN
- China
- Prior art keywords
- suction port
- condensing bulb
- inlet suction
- level condensing
- tail gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
Abstract
The invention discloses a kind of tail gas of diffusion furnace cooling device, including one-level condensing bulb, B-grade condensation bottle and adapter assembly, the inlet suction port and exhaust joint of the one-level condensing bulb are divided into one-level condensing bulb two ends and axis is parallel to each other, and the exhaust joint of the one-level condensing bulb is connected by the adapter assembly with the inlet suction port of B-grade condensation bottle.The present invention has the advantages that simple structure, setting height(from bottom) are adjustable, can properly increase cooling effect.
Description
Technical field
The present invention relates to diffusion furnace, more particularly to a kind of tail gas of diffusion furnace cooling device.
Background technology
In order to prevent the toxic gas that is produced during diffusion furnace normal work and corrosive gas to be directly discharged into air, it is necessary to
Cooling device is set at the quartz ampoule waste discharge mouth of diffusion furnace.In the situation that diffusion furnace body cabinet and source cabinet floor height have determined
Under, the bottle of cooling device is highly limited in a very small scope（That is radial dimension/the diameter of bottle is limited in
In very small scope）, it is restricted the cooling effect of cooling device；Meanwhile, during the installation and debugging of cooling device,
Because diffusion furnace body positioning height is not necessarily identical, therefore cooling device and quartz ampoule banjo fixing butt jointing setting height(from bottom) are also not to the utmost
It is identical, it is easily caused quartz nipple and crushes.
Additionally, existing cooling device is generally water-cooled or air-cooled condensing bulb, in order to increase contact of the tail gas with condensing bulb
Area, generally using increase condensation section length by the way of, must then be aided with the case of tail gas pumping speed is run into faster water-cooled or
It is air-cooled to can be only achieved expected cooling effect, and the excessive condensing bulb of volume is easily caused setting height(from bottom) and diffusion furnace floor height is done
Relate to, cause installation difficulty, inconvenience can be brought to operating personnel in work and maintenance.
The content of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, there is provided a kind of simple structure, setting height(from bottom)
Tail gas of diffusion furnace cooling device adjustable, that cooling effect can be properly increased.
In order to solve the above technical problems, the present invention uses following technical scheme：
A kind of tail gas of diffusion furnace cooling device, including one-level condensing bulb, B-grade condensation bottle and adapter assembly, the one-level condensing bulb
Inlet suction port and exhaust joint is divided into one-level condensing bulb two ends and axis is parallel to each other, the exhaust of the one-level condensing bulb connects
Head is connected by the adapter assembly with the inlet suction port of B-grade condensation bottle.
As the further improvement of above-mentioned technical proposal：
The adapter assembly includes inner sleeve, outer sleeve and sealing ring, and the inner sleeve is sheathed on the row of the one-level condensing bulb
On gas joint, the outer sleeve is sheathed on the inlet suction port of the B-grade condensation bottle；Or the inner sleeve is sheathed on described two
On the inlet suction port of level condensing bulb, the outer sleeve is sheathed on the exhaust joint of the one-level condensing bulb；The inner sleeve and
Outer sleeve threaded connection, the sealing ring is located at the inner sleeve end and described states between outer sleeve.
The inlet suction port of the exhaust joint of the one-level condensing bulb and B-grade condensation bottle is bimetallic tube, the inner sleeve
Cylinder and the outer sleeve are sheathed on corresponding outer tube, and the inner tube of the exhaust joint of the one-level condensing bulb is described than outer pipe range
The inner tube of the inlet suction port of B-grade condensation bottle is shorter than outer tube；Or the inner tube of the exhaust joint of the one-level condensing bulb is shorter than outer tube,
The inner tube of the inlet suction port of the B-grade condensation bottle is than outer pipe range.
The exhaust joint and the inlet suction port are quartz nipple, and the inner sleeve and the outer sleeve are poly- four
Fluorine sleeve, the sealing ring is polytetrafluoro sealing ring.
The end face that the sealing ring is fitted with the outer sleeve is plane, and the sealing ring other end is two-stage cascaded surface
And with the transition of first slope face between two-stage cascaded surface, it is oblique that the inner sleeve is provided with second near one end inwall of the sealing ring
Domatic, the inner sleeve is fitted near one end end face of the sealing ring with cascaded surface described in wherein one-level, second slope
Fitted with the first slope face in face.
Be provided with uniform flow dividing plate in B-grade condensation bottle, the uniform flow dividing plate along the B-grade condensation bottle radial arrangement,
Multiple air-vents, axis and the B-grade condensation bottle of the inlet suction port of B-grade condensation bottle are uniformly offered on the uniform flow dividing plate
Diameter parallel.
Filled with quartz condensation pearl in die cavity between the exhaust joint of the uniform flow dividing plate and B-grade condensation bottle.
Compared with prior art, the advantage of the invention is that：Tail gas of diffusion furnace cooling device disclosed by the invention, at two grades
One-level condensing bulb is set up on the basis of condensing bulb, is connected by adapter assembly between condensed in two stages bottle, the air inlet of one-level condensing bulb
Joint and exhaust joint are divided into one-level condensing bulb two ends and axis is parallel to each other so that the setting height(from bottom) of one-level condensing bulb is at it
It is adjustable between inlet suction port and exhaust joint, effectively protect the quartz ampoule of diffusion furnace and the inlet suction port of one-level condensing bulb；And
Due to condensed in two stages bottle integral installation height adjustable, can suitably increase the height of B-grade condensation bottle, so as to carry within the specific limits
Cooling effect high.
Brief description of the drawings
Fig. 1 is the main structure diagram of tail gas of diffusion furnace cooling device of the present invention.
Fig. 2 is A-A views in Fig. 1.
Fig. 3 is the enlarged drawing at B in Fig. 2.
Fig. 4 is the enlarged drawing at C in Fig. 2.
Fig. 5 is the D-D views in Fig. 2.
Each label is represented in figure：
1st, one-level condensing bulb；2nd, B-grade condensation bottle；3rd, adapter assembly；31st, inner sleeve；311st, the second slope；32nd, outer sleeve；
33rd, sealing ring；331st, cascaded surface；332nd, first slope face；4th, uniform flow dividing plate；41st, air-vent；5th, quartz condensation pearl；6th, it is vented
Joint；7th, inlet suction port.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific embodiment.
As Fig. 1 to Fig. 5 shows, the tail gas of diffusion furnace cooling device of the present embodiment, including one-level condensing bulb 1, B-grade condensation bottle 2
And adapter assembly 3, the inlet suction port 7 and exhaust joint 6 of one-level condensing bulb 1 are divided into the two ends of one-level condensing bulb 1 and axis is mutual
Parallel, the exhaust joint 6 of one-level condensing bulb 1 is connected by adapter assembly 3 with the inlet suction port 7 of B-grade condensation bottle 2.The diffusion furnace
Exhaust gas cooling device sets up one-level condensing bulb 1 on the basis of B-grade condensation bottle 2, and adapter assembly 3 is passed through between condensed in two stages bottle
Connection, the inlet suction port 7 and exhaust joint 6 of one-level condensing bulb 1 are divided into the two ends of one-level condensing bulb 1 and axis is parallel to each other, and makes
The setting height(from bottom) for obtaining one-level condensing bulb 1 is adjustable between its inlet suction port 7 and exhaust joint 6, effectively protects the stone of diffusion furnace
The inlet suction port 7 of English pipe and one-level condensing bulb 1；And due to condensed in two stages bottle integral installation height adjustable, can suitably increase by two grades
The height of condensing bulb 2, so as to improve cooling effect within the specific limits.Wherein, the exhaust joint 6 and air inlet connecting of condensed in two stages bottle
First 7 are quartz nipple；The pattern of B-grade condensation bottle 2 is identical with existing condensing bulb, and then volume is cold with respect to two grades for one-level condensing bulb 1
Solidifying bottle 2 is smaller, is mainly used in regulation integral installation highly.
Adapter assembly 3 includes inner sleeve 31, outer sleeve 32 and sealing ring 33, and inner sleeve 31 is sheathed on one-level condensing bulb 1
On exhaust joint 6, outer sleeve 32 is sheathed on the inlet suction port 7 of B-grade condensation bottle 2；Or inner sleeve 31 is sheathed on B-grade condensation bottle
On 2 inlet suction port 7, outer sleeve 32 is sheathed on the exhaust joint 6 of one-level condensing bulb 1；Inner sleeve 31 and the screw thread of outer sleeve 32
Connection, sealing ring 33 is located at the end of inner sleeve 31 and states between outer sleeve 32.In the present embodiment, inner sleeve 31 be sheathed on two grades it is cold
On the inlet suction port 7 of solidifying bottle 2, outer sleeve 32 is sheathed on the exhaust joint 6 of one-level condensing bulb 1, it is thus evident that in other embodiment
In can also be exchanged.The simple structure of adapter assembly 3, the reliability, are realizing the connection between exhaust joint 6 and inlet suction port 7
While, it is to avoid tail gas leakage and the potential safety hazard thus brought.
The inlet suction port 7 of exhaust joint 6 and the B-grade condensation bottle 2 of one-level condensing bulb 1 is bimetallic tube, inner sleeve 31 and outer
Sleeve 32 is sheathed on corresponding outer tube, and the inner tube of exhaust joint 6 is than outer pipe range, and the inner tube of inlet suction port 7 is shorter than outer tube；Or row
The inner tube of gas joint 6 is shorter than outer tube, and the inner tube of inlet suction port 7 is than outer pipe range.Exhaust joint 6 and inlet suction port 7 use bimetallic tube
And joint mutually staggers inside and outside two, adapter assembly 3 can be avoided by the effect softening transform of high-temperature tail gas, improve adapter assembly 3
Reliability and service life.In the present embodiment, the inner tube of the exhaust joint 6 of one-level condensing bulb 1 is shorter than outer tube, B-grade condensation bottle
The inner tube of 2 inlet suction port 7 in other embodiments, can also use opposite set-up mode than outer pipe range, can be two by inside and outside at
Joint staggers；The exhaust joint 6 of inlet suction port 7 and the B-grade condensation bottle 2 of one-level condensing bulb 1 equally uses bimetallic tube, keeps away
Exempt from the effect softening transform by high-temperature tail gas at this, improve reliability.
In the present embodiment, inner sleeve 31 and outer sleeve 32 are polytetrafluoro sleeve, and sealing ring 33 is polytetrafluoro sealing ring, is made
Obtain parts has service life higher in the presence of high temperature, severe corrosive tail gas.
In the present embodiment, the end face that sealing ring 33 is fitted with outer sleeve 32 is plane, and the other end of sealing ring 33 is two-stage
With the transition of first slope face 332 between cascaded surface 331 and two-stage cascaded surface 331, inner sleeve 31 is in one end of sealing ring 33
Wall is provided with the second slope 311, and inner sleeve 31 is fitted near one end end face of sealing ring 33 with wherein step face 331, the
Two slopes 311 are fitted with first slope face 332 so that have good sealing between sealing ring 33 and inner sleeve 31, can
In further avoiding tail gas from leaking to external environment condition.
In the present embodiment, uniform flow dividing plate 4 is provided with B-grade condensation bottle 2, uniform flow dividing plate 4 along B-grade condensation bottle 2 radial direction cloth
Put and multiple air-vents 41 are uniformly offered on uniform flow dividing plate 4, axis and the B-grade condensation bottle 2 of the inlet suction port 7 of B-grade condensation bottle 2
Diameter parallel, i.e., B-grade condensation bottle 2 inlet suction port 7 deviate B-grade condensation bottle 2 center, enter uniform flow through inlet suction port 7
The tail gas in die cavity between dividing plate 4 and inlet suction port 7 is uniform toward downstream flow after necessarily being buffered, and is easy to follow-up cooling
Treatment.
In the present embodiment, filled with quartz in the die cavity between the exhaust joint 6 of uniform flow dividing plate 4 and B-grade condensation bottle 2
Condensation pearl 5, flows uniformly through the tail gas after uniform flow dividing plate 4 and is contacted with quartz condensation pearl 5, and quartz condensation pearl 5 considerably increases tail gas
Foundation area, tail gas can be quickly and efficiently cooled to design temperature.
Although the present invention is disclosed above with preferred embodiment, but it is not limited to the present invention.It is any to be familiar with ability
The technical staff in domain, in the case where technical solution of the present invention scope is not departed from, all using the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible variations and modification, or the Equivalent embodiments for being revised as equivalent variations.Therefore, it is every
Without departing from the content of technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments,
Equivalent variations and modification, all should fall in the range of technical solution of the present invention protection.
Claims (7)
1. a kind of tail gas of diffusion furnace cooling device, it is characterised in that：Including one-level condensing bulb（1）, B-grade condensation bottle（2）And joint
Component（3）, the one-level condensing bulb（1）Inlet suction port（7）And exhaust joint（6）It is divided into one-level condensing bulb（1）Two ends and
Axis is parallel to each other, the one-level condensing bulb（1）Exhaust joint（6）By the adapter assembly（3）With the B-grade condensation
Bottle（2）Inlet suction port（7）Connection.
2. tail gas of diffusion furnace cooling device according to claim 1, it is characterised in that：The adapter assembly（3）Including interior
Sleeve（31）, outer sleeve（32）And sealing ring（33）, the inner sleeve（31）It is sheathed on the one-level condensing bulb（1）Exhaust connect
Head（6）On, the outer sleeve（32）It is sheathed on the B-grade condensation bottle（2）Inlet suction port（7）On；Or the inner sleeve（31）
It is sheathed on the B-grade condensation bottle（2）Inlet suction port（7）On, the outer sleeve（32）It is sheathed on the one-level condensing bulb（1）
Exhaust joint（6）On；The inner sleeve（31）With the outer sleeve（32）Threaded connection, the sealing ring（33）Located at described
Inner sleeve（31）Outer sleeve is stated with described in end（32）Between.
3. tail gas of diffusion furnace cooling device according to claim 2, it is characterised in that：The one-level condensing bulb（1）Row
Gas joint（6）With B-grade condensation bottle（2）Inlet suction port（7）It is bimetallic tube, the inner sleeve（31）With the overcoat
Cylinder（32）It is sheathed on corresponding outer tube, the one-level condensing bulb（1）Exhaust joint（6）Inner tube than outer pipe range, described two
Level condensing bulb（2）Inlet suction port（7）Inner tube it is shorter than outer tube；Or the one-level condensing bulb（1）Exhaust joint（6）Inner tube
It is shorter than outer tube, the B-grade condensation bottle（2）Inlet suction port（7）Inner tube than outer pipe range.
4. tail gas of diffusion furnace cooling device according to claim 3, it is characterised in that：The exhaust joint（6）With it is described
Inlet suction port（7）It is quartz nipple, the inner sleeve（31）With the outer sleeve（32）It is polytetrafluoro sleeve, the sealing
Circle（33）It is polytetrafluoro sealing ring.
5. the tail gas of diffusion furnace cooling device according to any one of claim 2 to 4, it is characterised in that：The sealing ring
（33）With the outer sleeve（32）The end face of laminating is plane, the sealing ring（33）Other end is two-stage cascaded surface（331）
And two-stage cascaded surface（331）Between with first slope face（332）Transition, the inner sleeve（31）Near the sealing ring（33）'s
One end inwall is provided with the second slope（311）, the inner sleeve（31）Near the sealing ring（33）One end end face with wherein
Cascaded surface described in one-level（331）Laminating, second slope（311）With the first slope face（332）Laminating.
6. tail gas of diffusion furnace cooling device according to any one of claim 1 to 4, it is characterised in that：Described two grades cold
Solidifying bottle（2）Inside it is provided with uniform flow dividing plate（4）, the uniform flow dividing plate（4）Along B-grade condensation bottle（2）Radial arrangement, it is described even
Stream dividing plate（4）On uniformly offer multiple air-vents（41）, B-grade condensation bottle（2）Inlet suction port（7）Axis and described two
Level condensing bulb（2）Diameter parallel.
7. tail gas of diffusion furnace cooling device according to claim 6, it is characterised in that：The uniform flow dividing plate（4）With it is described
B-grade condensation bottle（2）Exhaust joint（6）Between die cavity in filled with quartz condensation pearl（5）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610999802.7A CN106766949A (en) | 2016-11-14 | 2016-11-14 | A kind of tail gas of diffusion furnace cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610999802.7A CN106766949A (en) | 2016-11-14 | 2016-11-14 | A kind of tail gas of diffusion furnace cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106766949A true CN106766949A (en) | 2017-05-31 |
Family
ID=58973548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610999802.7A Pending CN106766949A (en) | 2016-11-14 | 2016-11-14 | A kind of tail gas of diffusion furnace cooling device |
Country Status (1)
| Country | Link |
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| CN (1) | CN106766949A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108050851A (en) * | 2017-11-30 | 2018-05-18 | 湖南红太阳光电科技有限公司 | A kind of decompression tail gas of diffusion furnace cooling device |
| CN110538620A (en) * | 2018-11-14 | 2019-12-06 | 北京北方华创微电子装备有限公司 | Pressure control system and pressure control method of reaction chamber |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101220518A (en) * | 2007-01-12 | 2008-07-16 | 中国电子科技集团公司第四十八研究所 | Tail gas collecting device for high temperature diffusion system |
| CN201608194U (en) * | 2009-12-14 | 2010-10-13 | 中国电子科技集团公司第四十八研究所 | Pressure self-balancing control system for reaction chamber |
| CN202034400U (en) * | 2011-04-29 | 2011-11-09 | 苏州凯西石英电子有限公司 | Quartz condensation bottle |
| CN102620080A (en) * | 2012-04-19 | 2012-08-01 | 杭州欧佩亚海洋工程有限公司 | Lining pipe joint of marine oil pipeline |
| CN102684032A (en) * | 2012-05-19 | 2012-09-19 | 林锐涛 | Pipe bus connection method |
| CN203687639U (en) * | 2013-12-11 | 2014-07-02 | 湖南红太阳光电科技有限公司 | Gas inlet device |
| WO2014101987A1 (en) * | 2012-12-28 | 2014-07-03 | Merck Patent Gmbh | Printable diffusion barriers for silicon wafers |
| CN204982138U (en) * | 2015-07-18 | 2016-01-20 | 广东爱康太阳能科技有限公司 | Solar cell diffusion tail gas controlling means |
| CN105289033A (en) * | 2015-10-22 | 2016-02-03 | 湖南红太阳光电科技有限公司 | Tail gas recover and filtration device for decompression diffusion system |
-
2016
- 2016-11-14 CN CN201610999802.7A patent/CN106766949A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101220518A (en) * | 2007-01-12 | 2008-07-16 | 中国电子科技集团公司第四十八研究所 | Tail gas collecting device for high temperature diffusion system |
| CN201608194U (en) * | 2009-12-14 | 2010-10-13 | 中国电子科技集团公司第四十八研究所 | Pressure self-balancing control system for reaction chamber |
| CN202034400U (en) * | 2011-04-29 | 2011-11-09 | 苏州凯西石英电子有限公司 | Quartz condensation bottle |
| CN102620080A (en) * | 2012-04-19 | 2012-08-01 | 杭州欧佩亚海洋工程有限公司 | Lining pipe joint of marine oil pipeline |
| CN102684032A (en) * | 2012-05-19 | 2012-09-19 | 林锐涛 | Pipe bus connection method |
| WO2014101987A1 (en) * | 2012-12-28 | 2014-07-03 | Merck Patent Gmbh | Printable diffusion barriers for silicon wafers |
| CN203687639U (en) * | 2013-12-11 | 2014-07-02 | 湖南红太阳光电科技有限公司 | Gas inlet device |
| CN204982138U (en) * | 2015-07-18 | 2016-01-20 | 广东爱康太阳能科技有限公司 | Solar cell diffusion tail gas controlling means |
| CN105289033A (en) * | 2015-10-22 | 2016-02-03 | 湖南红太阳光电科技有限公司 | Tail gas recover and filtration device for decompression diffusion system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108050851A (en) * | 2017-11-30 | 2018-05-18 | 湖南红太阳光电科技有限公司 | A kind of decompression tail gas of diffusion furnace cooling device |
| CN108050851B (en) * | 2017-11-30 | 2019-07-26 | 湖南红太阳光电科技有限公司 | A kind of decompression tail gas of diffusion furnace cooling device |
| CN110538620A (en) * | 2018-11-14 | 2019-12-06 | 北京北方华创微电子装备有限公司 | Pressure control system and pressure control method of reaction chamber |
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Application publication date: 20170531 |