CN206463722U - The vent gas treatment tapping equipment of MO sources production - Google Patents
The vent gas treatment tapping equipment of MO sources production Download PDFInfo
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- CN206463722U CN206463722U CN201621408262.2U CN201621408262U CN206463722U CN 206463722 U CN206463722 U CN 206463722U CN 201621408262 U CN201621408262 U CN 201621408262U CN 206463722 U CN206463722 U CN 206463722U
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- sources
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- gas
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 238000010079 rubber tapping Methods 0.000 title claims abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000001179 sorption measurement Methods 0.000 claims abstract description 16
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 15
- 239000003599 detergent Substances 0.000 claims abstract description 14
- 230000008676 import Effects 0.000 claims description 14
- 238000005201 scrubbing Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 48
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 7
- 239000000126 substance Substances 0.000 abstract description 7
- 150000001412 amines Chemical class 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 239000005416 organic matter Substances 0.000 abstract description 5
- 239000005446 dissolved organic matter Substances 0.000 abstract description 4
- 150000002170 ethers Chemical class 0.000 abstract description 4
- 238000004880 explosion Methods 0.000 abstract description 4
- 239000007788 liquid Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 238000000926 separation method Methods 0.000 abstract description 4
- 239000002912 waste gas Substances 0.000 abstract description 4
- 238000002485 combustion reaction Methods 0.000 abstract description 3
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
The purpose of this utility model is to provide a kind of vent gas treatment tapping equipment of MO sources production, MO sources production tail gas, which enters, initially enters low-temperature condenser, large amount of organic and MO sources are frozen into liquid collection processing, pre-separation is carried out to harmful substance in tail gas, dissolved organic matter and MO sources are remained organic detergent tower again afterwards, remaining tail gas is separated again, ethers and amine organic matter is removed, prevents and the mixed combustion of MO sources and risk of explosion;Enter inorganic detergency tower afterwards and remove metal particulate and a small amount of MO sources steam, trace organic substance and MO sources waste gas are removed by active carbon adsorption column, pass through centrifugal blower, residual exhaust is discharged into high level, such tail gas Integrated Processing Unit, residual gas is nitrogen, can directly be discharged, the problem of no safe and environmentally friendly;And set and take tracheae to carry out taking gas to detect to the tail gas of each step process.
Description
Technical field
The utility model is related to MO sources production field, more particularly to the vent gas treatment tapping equipment that a kind of MO sources are produced.
Background technology
MOCVD device has wide application in terms of LED illumination, blue-green Laser, solar cell.Metal is organic
Compound(MO sources)It is the supportive raw material of MOCVD industries.Substantial amounts of ethers, amine can be discharged in MO production processes at this stage
Type organic, the mixed gas material such as MO sources steam, MO sources oxidation particle, general exhaust gas processing device can not effectively be covered above-mentioned
Material, tail gas residual quantity is big, difficulty up to standard;MO sources have hypergolic, while large amount of organic has flammable attribute in tail gas,
Incorrect vent gas treatment mode can cause tail gas to be ignited, the danger for occurring fire and blast.
Existing application method shortcoming:Current conventional method is, with the MO sources in diluted acid or pure water absorption tail gas, to use activated carbon
Adsorb other organic matters.Because tail gas is without pretreatment, content of organics is very big, and activated carbon consumption is huge and is difficult to reach
Effect;MO sources concentration is high in gaseous mixture, meets water or vigorous reaction easily occurs for acid;At present, the documents and materials that can be retrieved do not have
It is related to the open report of MO sources production vent gas treatment scheme.Therefore solve the above problems and just seem particularly significant.
Utility model content
To solve the above problems, the utility model provides a kind of vent gas treatment tapping equipment of MO sources production, the production of MO sources
Tail gas, which enters, initially enters low-temperature condenser, and large amount of organic and MO sources are frozen into liquid collection processing, to nuisance in tail gas
Matter carries out pre-separation, and dissolved organic matter and MO sources are remained organic detergent tower again afterwards, and remaining tail gas is separated again, ether is removed
Class and amine organic matter, are prevented and the mixed combustion of MO sources and risk of explosion;Enter inorganic detergency tower afterwards and remove metal particulate
With a small amount of MO sources steam, trace organic substance and MO sources waste gas are removed by active carbon adsorption column, by centrifugal blower, by remaining tail
Gas is discharged into high level, such tail gas Integrated Processing Unit, and residual gas is nitrogen, can directly be discharged, without safety
And the problem of environmental protection, solve produced problem in background technology.
The purpose of this utility model is to provide a kind of vent gas treatment tapping equipment of MO sources production, includes cryogenic condensation
Device, the low-temperature condenser is laterally set, and low-temperature condenser bottom left is provided with air inlet, and low-temperature condenser top right side is set
It is equipped with gas outlet;From left to right be disposed with the right side of low-temperature condenser longitudinally disposed organic detergent tower, inorganic detergency tower and
Active carbon adsorption column;Organic detergent tower, inorganic detergency tower and active carbon adsorption column left bottom are respectively arranged with the first import,
Two imports and triple feed inlet;First outlet, the are respectively arranged with the top of organic detergent tower, inorganic detergency tower and active carbon adsorption column
Two outlets and the 3rd outlet;The first connecting tube is connected between air inlet and the first import, between first outlet and the second import
The second connecting tube is connected with, the 3rd connecting tube is connected between second outlet and triple feed inlet.
Further improvement is that:Centrifugal blower, the 3rd outlet and centrifugal blower are provided with the right side of the active carbon adsorption column
Between be connected with the 4th connecting tube, be provided with escape pipe on the right side of centrifugal blower.
Further improvement is that:First connecting tube, the second connecting tube, the 3rd connecting tube and the 4th connecting tube are removable
Unload.
Further improvement is that:Connect in first connecting tube, the second connecting tube, the 3rd connecting tube and the 4th connecting tube
It is connected to and takes tracheae, takes air pipe sleeve to take gas hood.
The beneficial effects of the utility model:The utility model MO sources production tail gas, which enters, initially enters low-temperature condenser, greatly
Amount organic matter and MO sources are frozen into liquid collection processing, and pre-separation is carried out to harmful substance in tail gas, and organic detergent tower is again afterwards
Secondary dissolved organic matter and MO source residual, separates, removes ethers and amine organic matter, prevent from mixing with MO sources again to remaining tail gas
Burning and risk of explosion;Enter inorganic detergency tower afterwards and remove metal particulate and a small amount of MO sources steam, pass through charcoal absorption
Post removes trace organic substance and MO sources waste gas, by centrifugal blower, residual exhaust is discharged into high level, such tail gas is comprehensive
Processing unit is closed, residual gas is nitrogen, can directly be discharged, the problem of no safe and environmentally friendly;And set and take tracheae pair
The tail gas of each step process carries out taking gas to detect.
Brief description of the drawings
Fig. 1 is schematic diagram of the present utility model.
Wherein:1- low-temperature condensers, 2- air inlets, 3- gas outlets, 4- organic detergent towers, 5- inorganic detergency towers, 6- activity
Charcoal adsorption column, the imports of 7- first, the imports of 8- second, 9- triple feed inlets, 10- first outlets, 11- second outlets, 12- the 3rd goes out
Mouthful, the connecting tubes of 13- first, the connecting tubes of 14- second, the connecting tubes of 15- the 3rd, 16- centrifugal blowers, the connecting tubes of 17- the 4th, 18- goes out
Tracheae, 19- takes tracheae, and 20- takes gas hood.
Embodiment
In order to deepen to understand of the present utility model, below in conjunction with embodiment, the utility model is described in further detail,
The embodiment is only used for explaining the utility model, does not constitute the restriction to the utility model protection domain.
As shown in figure 1, the present embodiment provides a kind of vent gas treatment tapping equipment of MO sources production, include low-temperature condenser
1, the low-temperature condenser 1 is laterally set, and the bottom left of low-temperature condenser 1 is provided with air inlet 2, the top right of low-temperature condenser 1
Side is provided with gas outlet 3;The right side of low-temperature condenser 1 is from left to right disposed with longitudinally disposed organic detergent tower 4, without machine washing
Wash tower 5 and active carbon adsorption column 6;Organic detergent tower 4, inorganic detergency tower 5 and the left bottom of active carbon adsorption column 6 are respectively arranged with
First import 7, the second import 8 and triple feed inlet 9;Organic detergent tower 4, inorganic detergency tower 5 and the top of active carbon adsorption column 6 are respectively
It is provided with first outlet 10, the outlet of second outlet 11 and the 3rd 12;The first connection is connected between the import 7 of air inlet 2 and first
Pipe 13, is connected with the second connecting tube 14 between the import 8 of first outlet 10 and second, connects between second outlet 11 and triple feed inlet 9
It is connected to the 3rd connecting tube 15.The right side of active carbon adsorption column 6 is provided with centrifugal blower 16, the 3rd outlet 12 and centrifugal blower 16
Between be connected with the 4th connecting tube 17, the right side of centrifugal blower 16 is provided with escape pipe 18.First connecting tube 13, second is connected
Pipe 14, the 3rd connecting tube 15 and the 4th connecting tube 17 are detachable.First connecting tube 13, the second connecting tube the 14, the 3rd connect
It is respectively connected with the connecting tube 17 of adapter 15 and the 4th and takes tracheae 19, is taken and be cased with taking gas hood 20 outside tracheae 19.
MO sources production tail gas, which enters, initially enters low-temperature condenser 1, and large amount of organic and MO sources are frozen at liquid collection
Reason, pre-separation is carried out to harmful substance in tail gas, and dissolved organic matter and MO sources are remained organic detergent tower 4 again afterwards, to remnants
Tail gas is separated again, is removed ethers and amine organic matter, is prevented and the mixed combustion of MO sources and risk of explosion;Enter afterwards without machine washing
Wash tower 5 and remove metal particulate and a small amount of MO sources steam, trace organic substance and MO sources waste gas are removed by active carbon adsorption column 6,
By centrifugal blower 16, residual exhaust is discharged into high level, such tail gas Integrated Processing Unit, residual gas is nitrogen
Gas, can directly be discharged, the problem of no safe and environmentally friendly;And setting takes the tail gas of each step process of 19 pairs of tracheae to carry out
Gas is taken to detect.
Claims (4)
1. a kind of vent gas treatment tapping equipment of MO sources production, includes low-temperature condenser(1), it is characterised in that:The low temperature
Condenser(1)Laterally set, low-temperature condenser(1)Bottom left is provided with air inlet(2), low-temperature condenser(1)Top right side
It is provided with gas outlet(3);Low-temperature condenser(1)Right side is from left to right disposed with longitudinally disposed organic detergent tower(4), nothing
Machine scrubbing tower(5)And active carbon adsorption column(6);Organic detergent tower(4), inorganic detergency tower(5)And active carbon adsorption column(6)Left side
Bottom is respectively arranged with the first import(7), the second import(8)With triple feed inlet(9);Organic detergent tower(4), inorganic detergency tower
(5)And active carbon adsorption column(6)Top is respectively arranged with first outlet(10), second outlet(11)With the 3rd outlet(12);Enter
Gas port(2)With the first import(7)Between be connected with the first connecting tube(13), first outlet(10)With the second import(8)Between connect
It is connected to the second connecting tube(14), second outlet(11)With triple feed inlet(9)Between be connected with the 3rd connecting tube(15).
2. the vent gas treatment tapping equipment of MO sources production as claimed in claim 1, it is characterised in that:The active carbon adsorption column
(6)Right side is provided with centrifugal blower(16), the 3rd outlet(12)With centrifugal blower(16)Between be connected with the 4th connecting tube(17),
Centrifugal blower(16)Right side is provided with escape pipe(18).
3. the vent gas treatment tapping equipment of MO sources production as claimed in claim 2, it is characterised in that:First connecting tube
(13), the second connecting tube(14), the 3rd connecting tube(15)With the 4th connecting tube(17)It is detachable.
4. the vent gas treatment tapping equipment of MO sources production as claimed in claim 2, it is characterised in that:First connecting tube
(13), the second connecting tube(14), the 3rd connecting tube(15)With the 4th connecting tube(17)On be respectively connected with and take tracheae(19), take tracheae
(19)It is cased with taking gas hood outside(20).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621408262.2U CN206463722U (en) | 2016-12-21 | 2016-12-21 | The vent gas treatment tapping equipment of MO sources production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621408262.2U CN206463722U (en) | 2016-12-21 | 2016-12-21 | The vent gas treatment tapping equipment of MO sources production |
Publications (1)
Publication Number | Publication Date |
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CN206463722U true CN206463722U (en) | 2017-09-05 |
Family
ID=59712174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201621408262.2U Active CN206463722U (en) | 2016-12-21 | 2016-12-21 | The vent gas treatment tapping equipment of MO sources production |
Country Status (1)
Country | Link |
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CN (1) | CN206463722U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109578811A (en) * | 2019-01-31 | 2019-04-05 | 苏州普耀光电材料有限公司 | A kind of recycling and processing device and recovery and treatment method of the source MO container filling clout |
CN111389183A (en) * | 2020-05-06 | 2020-07-10 | 黎月清 | Organic waste gas treatment device |
CN114191929A (en) * | 2021-12-24 | 2022-03-18 | 常州化工设计院有限公司 | Chemical tail gas treatment process |
-
2016
- 2016-12-21 CN CN201621408262.2U patent/CN206463722U/en active Active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109578811A (en) * | 2019-01-31 | 2019-04-05 | 苏州普耀光电材料有限公司 | A kind of recycling and processing device and recovery and treatment method of the source MO container filling clout |
CN109578811B (en) * | 2019-01-31 | 2024-05-14 | 苏州普耀光电材料有限公司 | Recovery processing device and recovery processing method for residual materials of MO source filling container |
CN111389183A (en) * | 2020-05-06 | 2020-07-10 | 黎月清 | Organic waste gas treatment device |
CN114191929A (en) * | 2021-12-24 | 2022-03-18 | 常州化工设计院有限公司 | Chemical tail gas treatment process |
CN114191929B (en) * | 2021-12-24 | 2022-12-06 | 常州化工设计院有限公司 | Chemical tail gas treatment process |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: No. 88 Baoshun Road, Economic and Technological Development Zone, Wuhu City, Anhui Province, 241000 Patentee after: Anhui Yagesheng Electronic New Materials Co.,Ltd. Address before: 241009 No.26 chizhushan Road, Wuhu Economic and Technological Development Zone, Anhui Province Patentee before: ANHUI ARGOSUN NEW ELECRONIC MATERIALS Co.,Ltd. |
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CP03 | Change of name, title or address |