CN203099851U - Dry purification device for waste gas of CVD (chemical vapor deposition) online plated function films - Google Patents

Dry purification device for waste gas of CVD (chemical vapor deposition) online plated function films Download PDF

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Publication number
CN203099851U
CN203099851U CN 201220714232 CN201220714232U CN203099851U CN 203099851 U CN203099851 U CN 203099851U CN 201220714232 CN201220714232 CN 201220714232 CN 201220714232 U CN201220714232 U CN 201220714232U CN 203099851 U CN203099851 U CN 203099851U
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China
Prior art keywords
pipeline
waste gas
connects
dry
dry type
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Withdrawn - After Issue
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CN 201220714232
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Chinese (zh)
Inventor
彭寿
单传丽
甘治平
王东
石丽芬
金良茂
张家林
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China Triumph International Engineering Co Ltd
Bengbu Glass Industry Design and Research Institute
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China Triumph International Engineering Co Ltd
Bengbu Glass Industry Design and Research Institute
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Priority to CN 201220714232 priority Critical patent/CN203099851U/en
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Abstract

The utility model relates to a dry purification device for waste gas of CVD (chemical vapor deposition) online plated function films. The dry purification device comprises a gas source pipeline H, a combustor (2) and an ultra-high-temperature electrostatic dust collector (4) are sequentially arranged at the front end of the air source pipeline H, and an activated-carbon-fiber purifier (8) is arranged at the rear end of the pipeline. The dry purification device is characterized in that a dry-type deacidifying device (5) and a bag-type dust collector (7) are further arranged on the pipeline. The dry purification device has the advantages that by a dry purification method, water pollution hidden dangers caused by existing wet purification devices are eliminated, operation cost is reduced, and service life of the device is prolonged; the device has wide application prospect, and can fully and efficiently purify mordant waste gas with complex components and high temperatures, no matter combustible or non-combustible; and the device can treat plated film waste gas with high temperature, acidity, dust, heavy metal and the like simultaneously, purification efficiency is high, and purification efficiency higher than 99.99% can be achieved.

Description

The online plating functional membrane of a kind of CVD waste gas dry cleaning device
Technical field
The utility model relates to a kind of industrial waste gas treatment system, the online plating functional membrane of particularly a kind of CVD waste gas dry cleaning device.
Background technology
In recent years, along with the continuous development of urban industry, atmosphere pollution is serious day by day, and air quality further worsens, and environmental problem has become global problem.Can produce a large amount of waste gas in the online plating functional membrane of the CVD production process, this exhaust gas constituents more complicated, concentration is higher, temperature is higher and have severe corrosive, and is very big to the harm of environment and human body.Must carry out purified treatment ability safety dumping, this just requires the cleaning system stability of the online plating functional membrane of CVD waste gas good, safe and efficient, operating cost is low, can satisfy continuously the generation of avoiding other pollutions in production processing requirements, the waste gas that can handle high temperature highly corrosive and complicated component and the processing procedure.
The cleaning system that CVD on-line coating waste gas is commonly used has wet cleaning system, condensation absorption method cleaning system and biological method purification system etc. at present, wherein wet cleaning system, it is a kind of processing method the most commonly used, it has advantages such as the efficient of removal height, treatment process maturation, but in cleaning system, there is alkali lye spray column device, the a large amount of alkali lye of this device use removes the sour gas in the waste gas, can produce the problem of water treatment later on again at the removal sour gas, has improved cost virtually.Because there is the adding of liquid also can make the acid gas in the waste gas become acid solution, the corrosion that this has just caused cleaning equipment has reduced its service life, has also influenced the ordinary production of the online plating functional membrane of float glass.The condensation absorption method is by operating temperature being controlled at below the VOC boiling point and the VOC condensation is got off, this kind method each material in can high efficiency recovery waste gas, it is turned waste into wealth, but this cleaning system need be controlled accurately to the temperature and pressure of waste gas, difficulty is bigger, and is lower for the on-line coating exhaust-gas treatment efficient of complicated component.Though bioanalysis effect when the purifying low-concentration organic pollution is obvious, have that vapour lock is big, degradation rate is slow, equipment volume is huge, for handling shortcomings such as high concentration high-temperature gas effect is not remarkable.The all certain limitation of above-mentioned several processing method, and can't satisfy the requirement of the online plating functional membrane of CVD exhaust-gas treatment.Through extensively retrieval, still find no relevant technical scheme.
The utility model content
The purpose of this utility model is can not satisfy the requirement of handling high temperature, acidity, dust-laden and fluorine-containing plated film waste gas simultaneously in order to solve present stage CVD on-line coating waste gas purification apparatus, and in purification process, can produce shortcomings such as water pollution, and the online plating functional membrane of a kind of CVD waste gas dry cleaning device that proposes.
To achieve these goals, the utility model has adopted following technical scheme: the online plating functional membrane of a kind of CVD waste gas dry cleaning device, comprise gas source pipe H, gas source pipe H connects the combustion chamber, on gas source pipe H, connect the frequency conversion exhaust gas fan, connect a burner respectively in the both sides of combustion chamber, burner connects by the external fuel of fuel channel.The combustion chamber connects the superhigh temperature electrostatic precipitator by pipeline, is provided with discharging opening in the lower end of superhigh temperature electrostatic precipitator.The superhigh temperature electrostatic precipitator connects the NACF clarifier by pipeline, the NACF clarifier is discharged into purified gas in the atmosphere by pipeline, on pipeline, be provided with air-introduced machine, it is characterized in that also comprising: on the pipeline between superhigh temperature electrostatic precipitator and the NACF clarifier, also set gradually dry type deacidifying device and sack cleaner, the side ports D of dry type deacidifying device is by the port E of pipeline connection sack cleaner, and the effect of sack cleaner is to collect dust granules thing in the waste gas.
The lower port A of dry type deacidifying device is connected with the port B of superhigh temperature electrostatic precipitator by pipeline, and the top port C of dry type deacidifying device is connected with supplying the alkali storehouse by pipeline N, connects recovery bin by pipeline M below the dry type deacidifying device.
The port F of sack cleaner connects the NACF clarifier by pipeline, and the lower end of sack cleaner is provided with discharging opening G.
On the basis of technique scheme, following further technical scheme can be arranged: the inside of described dry type deacidifying device is respectively equipped with front spoiler and rear spoiler.On pipeline N, be provided with alkali material pump, alkaline starch in the alkali material pump confession alkali storehouse is by in tubing pump such as the dry type deacidifying device, the alkalescence starch sprays from top to bottom and the fluorine-containing plated film waste gas of acidity is carried out depickling goes fluorine to purify, and can make reaction more abundant because of be provided with spoiler in the dry type deacidifying device.Be provided with the recovery pump on pipeline M, the recovery pump is drawn into reacted reactant in the recovery bin and reclaims.
Advantage of the present utility model is: the device that the utility model provides adopts the dry cleaning method, has eliminated existing wet cleaning device and has produced the hidden danger that water pollutes, and has reduced operating cost, has improved the service life of equipment; This device application prospect is extensive, for complicated component, and the higher mordant waste gas of temperature, no matter flammable or not flammable, can both carry out purified treatment fully efficiently; This device can be handled high temperature, acidity, dust-laden simultaneously and contain plated film waste gas such as heavy metal, and the purification efficiency height, can reach the purification efficiency more than 99.99%.
Description of drawings
Fig. 1 is a basic structure schematic diagram of the present utility model.
The specific embodiment
As shown in Figure 1, the online plating functional membrane of a kind of CVD waste gas dry cleaning device that the utility model provides, comprise gas source pipe H, gas source pipe H connects combustion chamber 2, on gas source pipe H, connect frequency conversion exhaust gas fan 1,2 both sides connect a burner 3 respectively in the combustion chamber, and burner connects by fuel channel 14 external fuel.Combustion chamber 2 connects superhigh temperature electrostatic precipitator 4 by pipeline, is provided with discharging opening in the lower end of superhigh temperature electrostatic precipitator 4.Superhigh temperature electrostatic precipitator 4 connects NACF clarifier 8 by pipeline, and NACF clarifier 8 connects air-introduced machine 9 by pipeline, it is characterized in that also comprising:
A, also set gradually dry type deacidifying device 5 and sack cleaner 7 on the pipeline between superhigh temperature electrostatic precipitator 4 and the NACF clarifier 8, the side ports D of dry type deacidifying device 5 connects the port E of sack cleaner 7 by pipeline.
The lower port A of dry type deacidifying device 5 wants to be connected with the port B of superhigh temperature electrostatic precipitator 4 by pipeline, the top port C of dry type deacidifying device 5 is connected with supplying alkali storehouse 11 by pipeline N, on pipeline N, be provided with alkali material pump 10b, connect recovery bin 12 by pipeline M below dry type deacidifying device 5, pipeline M is provided with and reclaims pump 10a.Be respectively equipped with front spoiler 6a and rear spoiler 6b in the inside of dry type deacidifying device 5, front spoiler 6a and rear spoiler 6b are arranged on the bottom of dry type deacidifying device 5.
The port F of b, sack cleaner 7 connects NACF clarifier 8 by pipeline, and the lower end of sack cleaner 7 is provided with discharging opening G.
Operation principle
The waste gas that the CVD on-line coating produces is drawn into the combustion chamber through gas source pipe H by the frequency conversion exhaust gas fan, open the fuel channel valve, the automatic ignition device startup is carried out the combustion high temperature decomposition to nonflammable plated film waste gas after feeding fuel, and the organic matter in the plated film waste gas is carried out pyrolysis.The bottom of combustion chamber is provided with an ash hole, and plated film waste gas burning rear section dust settling is discharged via ash hole and reclaimed the secondary utilization.
The gas outlet, lower end of combustion chamber connects superhigh temperature electrostatic precipitator air inlet, high-temp waste gas after handling through the burning high-efficiency electrostatic dust remover that directly enters corrosion-and high-temp-resistant of need not lowering the temperature carries out electrostatic precipitation, plated film waste gas via electrostatic precipitation after 99% dust granules thing be removed, discharge by electrostatic precipitator lower end ash hole.
The gas outlet of superhigh temperature electrostatic precipitator connects the air inlet of dry type deacidifying device lower end, through the plated film waste gas behind the electrostatic precipitation enter from bottom to top contain spoiler the dry type deacidifying device, under the effect of spoiler, make the flow velocity that enters waste gas in the dry type deacidifying device retarded, increase the turbulivity of gas, to reach the purpose that abundant reaction purifies.Dry type deacidifying device top charging aperture connects one for the alkali storehouse, is drawn into the dry type deacidifying device for the alkaline starch in the alkali storehouse by alkali material pump and sprays from top to bottom and the fluorine-containing plated film waste gas of acidity is carried out depickling go fluorine to purify.Dry type deacidifying device lower end also connects a recovery bin, and reaction reactant later is drawn in the recovery bin via the recovery pump and reclaims.
The gas outlet of dry type deacidifying device connects the sack cleaner air inlet, pass through in the waste gas after fluorine is removed in the dry type depickling and carrying reaction particles thing and part unreacted ground caustic, enter sack cleaner and carry out final dusting, the dust granules thing of collection is discharged by sack cleaner bottom ash hole.
The gas outlet of sack cleaner connects the NACF clarifier, and the preferred NACF of its active carbon is as adsorbent, and the fast treatment effect of its rate of adsorption can guarantee that well treatment and purification is complete.Waste gas carries out adsorption treatment after entering this NACF clarifier, the toxic and harmful of remaining trace in the absorption waste gas, and the gas that adsorption treatment is crossed is discharged in the atmosphere by the gas outlet connection air-introduced machine of this NACF clarifier.

Claims (2)

1. the online plating functional membrane of CVD waste gas dry cleaning device, comprise gas source pipe H, on gas source pipe H, connect frequency conversion exhaust gas fan (1), gas source pipe H connects combustion chamber (2), on combustion chamber (2), be provided with burner (3), combustion chamber (2) connects superhigh temperature electrostatic precipitator (4) by pipeline, superhigh temperature electrostatic precipitator (4) connects NACF clarifier (8) by pipeline, NACF clarifier (8) connects air-introduced machine (9) by pipeline, it is characterized in that also comprising:
A, dry type deacidifying device (5) and sack cleaner (7) on the pipeline between superhigh temperature electrostatic precipitator (4) and the NACF clarifier (8), have also been set gradually, the side ports D of dry type deacidifying device (5) connects the port E of sack cleaner (7) by pipeline, the lower port A of dry type deacidifying device (5) is connected by the port B of pipeline with superhigh temperature electrostatic precipitator (4), the top port C of dry type deacidifying device (5) is connected with supplying alkali storehouse (11) by pipeline N, connects recovery bin (12) in the below of dry type deacidifying device (5) by pipeline M;
The port F of b, sack cleaner (7) connects NACF clarifier (8) by pipeline, and the lower end of sack cleaner (7) is provided with discharging opening G.
2. the online plating functional membrane of a kind of CVD according to claim 1 waste gas dry cleaning device, it is characterized in that: the inside of described dry type deacidifying device (5) is respectively equipped with front spoiler (6a) and rear spoiler (6b), be provided with alkali material pump (10b) on pipeline N, pipeline M is provided with and reclaims pump (10a).
CN 201220714232 2012-12-22 2012-12-22 Dry purification device for waste gas of CVD (chemical vapor deposition) online plated function films Withdrawn - After Issue CN203099851U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220714232 CN203099851U (en) 2012-12-22 2012-12-22 Dry purification device for waste gas of CVD (chemical vapor deposition) online plated function films

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Application Number Priority Date Filing Date Title
CN 201220714232 CN203099851U (en) 2012-12-22 2012-12-22 Dry purification device for waste gas of CVD (chemical vapor deposition) online plated function films

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CN203099851U true CN203099851U (en) 2013-07-31

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103017178A (en) * 2012-12-22 2013-04-03 蚌埠玻璃工业设计研究院 Waste gas dry purifying device for CVD (chemical vapor deposition) on-line function film plating
CN109289422A (en) * 2018-11-14 2019-02-01 东台中玻特种玻璃有限公司 Online Low-E glass barrier layer exhaust treatment system and exhaust gas treating method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103017178A (en) * 2012-12-22 2013-04-03 蚌埠玻璃工业设计研究院 Waste gas dry purifying device for CVD (chemical vapor deposition) on-line function film plating
CN103017178B (en) * 2012-12-22 2016-04-13 蚌埠玻璃工业设计研究院 A kind of CVD plates functional membrane waste gas dry cleaning device online
CN109289422A (en) * 2018-11-14 2019-02-01 东台中玻特种玻璃有限公司 Online Low-E glass barrier layer exhaust treatment system and exhaust gas treating method

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AV01 Patent right actively abandoned

Granted publication date: 20130731

Effective date of abandoning: 20160413

C25 Abandonment of patent right or utility model to avoid double patenting