CN208574418U - A kind of exhaust gas processing device of diffusion furnace - Google Patents
A kind of exhaust gas processing device of diffusion furnace Download PDFInfo
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- CN208574418U CN208574418U CN201821039535.XU CN201821039535U CN208574418U CN 208574418 U CN208574418 U CN 208574418U CN 201821039535 U CN201821039535 U CN 201821039535U CN 208574418 U CN208574418 U CN 208574418U
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- filter
- washer
- cooling tube
- processing device
- exhaust gas
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Abstract
The utility model discloses a kind of exhaust gas processing device of diffusion furnace, including coldplate, at least a filter, cooling tube, air-washer；Tail gas of diffusion furnace successively enters last row device after cooling tube, filter, air-washer；The cooling tube is placed on coldplate, and coldplate is for the cooling tail gas for passing through cooling tube；The air-washer is built-in with scrubbing solution.The tail gas of diffusion furnace can remove the solid impurity (boron oxide or phosphorous oxide etc.) of the overwhelming majority after the exhaust gas processing device of the utility model, reduce the influence of solid impurity (boron oxide or phosphorous oxide etc.) to line clogging, apparatus of repair parts is few, and maintenance time is short.
Description
Technical field
The utility model relates to technical field of solar batteries more particularly to a kind of exhaust gas processing devices of diffusion furnace.
Background technique
Solar energy is most cleaning, the most potential endless energy.Crystal silicon solar batteries are by large-scale application in each
A field, good stability, higher photoelectric conversion efficiency and the technique being constantly progressive are the bases of its high speed development, are improved
Efficiency is the common objective of domestic and international technical field research.With the development of process technology, N-type crystal silicon battery is high-efficient with its,
The high advantage of cost performance, the increasingly attention by market.Wherein, boron diffusing procedure is important during manufacture of solar cells
Link, guarantee boron diffusion technology stability and reduce process production cost be research emphasis.
Currently, it is source that most of boron diffusion facilities, which select liquid brominated boron, boron bromide is taken out of by nitrogen and enters furnace body；Tail
Gas need to cool down the unreacted source for removing liquid, and residue is discharged by vacuum pump pump drainage to last row device.
Conventional boron bromide vent gas treatment can remove exhausted big several boron bromides in tail gas, but still have a small amount of residue boron oxide
Last row pipeline can be entered back into as vacuum pump drainage enters after pipeline, the pump housing.It can gradually save bit by bit boron oxide granule in these pipelines, one
Blocking will be generated after the section time.The maintenance period of the pump housing is very short at present, needs frequent maintenance shut-downs cleaning maintenance；And it is conventional
Boron diffusion tails clear reason, need to dismantle within about one month pump and carry out cleaning and maintenance, need the time several hours to half a day every time, occupy compared with
More production times.
Utility model content
The purpose of the utility model is to provide a kind of exhaust gas processing devices of diffusion furnace, both can be used for phosphorus diffusion, can also
To be spread for boron.The tail gas of diffusion furnace can remove the boron oxide of the overwhelming majority or phosphorous oxide after the device, reduce
The influence of boron oxide or phosphorous oxide to line clogging, apparatus of repair parts is few, and maintenance time is short.
To achieve the above object, using following technical scheme:
A kind of exhaust gas processing device of diffusion furnace, including coldplate, at least a filter, cooling tube, air-washer；Diffusion
Furnace exhaust gas successively enters last row device after cooling tube, filter, air-washer；The cooling tube is placed on coldplate, cold
But plate is for the cooling tail gas for passing through cooling tube；The air-washer is built-in with scrubbing solution.
Preferably, the exhaust gas processing device further includes the pump housing；The pump housing both ends respectively through a pipeline respectively with filter,
Air-washer connection, the pump housing are used to tail gas pumping to air-washer side from coldplate side.
Preferably, the filter is set as two, respectively first filter, the second filter；First filtering
Device both ends are respectively connect with cooling tube, the second filter through a pipeline respectively, wherein the pipeline of cooling tube and first filter one end
Through connector detachable connection.
Preferably, being equipped with the first filter core in the first filter, the second filter core is equipped in the second filter；Described first
The aperture of filter core is greater than the aperture of the second filter core.
Preferably, several water pipes are equipped in the coldplate, for cooling to the tail gas in cooling tube after water flowing.
Preferably, the top of the air-washer is equipped with scrubbing solution inlet valve, lower side is equipped with going out for scrubbing solution
Water valve.
Preferably, the air-washer is additionally provided with tail gas outlet, tail gas outlet is connected to last row device through pipeline.
Preferably, the coldplate, filter, cooling tube, air-washer, the pump housing and all pipelines are all made of acid corrosion-resistant
Material.
Using the above scheme, the beneficial effects of the utility model are:
1) a part of solid particle in cooling tube energy absorption tail gas (boron oxide or phosphorous oxide etc.), while in coldplate
The exhaust temperature of filter is lowered under effect；
2) two-stage filter filters, can be reduced most of boron oxide in tail gas perhaps phosphorous oxide reduce boron oxide or
Influence of the phosphorous oxide to line clogging；
3) apparatus of repair parts is few, only need to remind or regularly replace cooling quartz ampoule, filter core according to software；
4) maintenance time is short, can replace maintenance in boat disengaging, have little influence on normal production.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Wherein, description of drawing identification:
1-coldplate, 2-cooling tubes,
3-air-washers, the 4-pump housings,
5-first filters, the 6-the second filter,
7-pipelines, 8-connectors,
31-inlet valves, 32-outlet valves,
33-tail gas outlets, the 51-the first filter core,
61-the second filter core.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
Shown in referring to Fig.1, the utility model provides a kind of exhaust gas processing device of diffusion furnace, including coldplate 1, at least one
Filter, cooling tube 2, air-washer 3；Tail gas of diffusion furnace successively enters last row after cooling tube 2, filter, air-washer 3
Device；The cooling tube 2 is placed on coldplate 1, and coldplate 1 is for the cooling tail gas for passing through cooling tube 2；The air-washer 3
It is built-in with scrubbing solution.
Wherein, the exhaust gas processing device further includes the pump housing 4；4 both ends of the pump housing respectively through a pipeline 7 respectively with filtering
Device, air-washer 3 connect, and the pump housing 4 is used to tail gas pumping to 3 side of air-washer from 1 side of coldplate.
The filter is set as two, respectively first filter 5, the second filter 6；5 liang of the first filter
Hold it is each connect respectively with cooling tube 2, the second filter 6 through a pipeline 7, the wherein pipeline of cooling tube 2 and 5 one end of first filter
Through 8 detachable connection of connector.It is equipped with the first filter core 51 in the first filter 5, the second filter is equipped in the second filter 6
Core 61；The aperture of first filter core 51 is greater than the aperture of the second filter core 61.Several water pipes are equipped in the coldplate 1,
For cooling to the tail gas in cooling tube 2 after water flowing.
The top of the air-washer 3 is equipped with scrubbing solution inlet valve 31, and lower side is equipped with the outlet valve of scrubbing solution
32.The air-washer 3 is additionally provided with tail gas outlet 33, and tail gas outlet 33 is connected to last row device through pipeline 7.The cooling
Plate 1, filter 5/6, cooling tube 2, air-washer 3, the pump housing 4 and all pipelines 7 are all made of acid corrosion-resistant material.
Utility model works principle:
Exhaust gas processing device in the utility model is boron diffusion exhaust gas processing device easy to maintain, is particularly suitable for chlorine
Change the boron diffusion of boron gas.
Tail gas by the cooling tube 2 that is placed on coldplate 1 (cooling tube 2 in the present embodiment is using quartz material), then
Filter 5/6, the pump housing 4, air-washer 3 are sequentially entered, last row is finally entered.The pipeline of cooling tube 2 and 5 one end of first filter
7 through 8 detachable connection of connector, in order to disassembling, assembling and replacing cooling tube 2.The middle part of cooling tube 2 uses annular design, so that tail
Gas has two paths to lead to filter 5/6.
Cooling tube 2: tail gas is by the quartzy cooling tube 2 that is placed on coldplate 1, due to the water cooling effect in coldplate 1,
Exhaust temperature decline, partial oxidation boron or phosphorous oxide are cooled into granular absorption in quartzy 2 inner wall of cooling tube, and the overwhelming majority exists
Lead to filter 5/6 under the swabbing action of the pump housing 4.
Filter 5/6: the tail of most boron oxides or phosphorous oxide and low content boron chloride or phosphorus oxychloride is carried
Gas pass through two-stage filter 5/6, wherein the aperture of the first filter core 51 and the second filter core 61 can be set to it is identical can also be different,
51 aperture of the first filter core in the present embodiment is greater than the aperture of the second filter core 61, and most boron oxides or phosphorous oxide are by two-stage
Filter core 51/61 filters, and extremely low content boron oxide (or phosphorous oxide) and boron chloride (or phosphorus oxychloride) lead to gas washing by the pump housing 4 and fill
Set 3.Wherein, the first filter core 51, the second filter core 61 can using glass fabric, general fibre cloth, active carbon or other one
The porous material that can be used as filtering a bit is made.
Air-washer 3: the gas containing boron oxide (or phosphorous oxide) and boron chloride (or phosphorus oxychloride) passes through air-washer
3, water, the aqueous solution containing alkaline matters such as sodium hydroxide, sodium carbonate, boron oxide (or phosphorous oxide) and chlorination can be used in scrubbing solution
Boron (or phosphorus oxychloride) is all absorbed due to reaction by solution.Air-washer 3 has the inlet and outlet of separate valve, can timing
Replace the solution in air-washer 3.Tail gas after air-washer 3 is directly discharged into exhaust emissions processing pipeline 7.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle
Within the scope of shield.
Claims (8)
1. a kind of exhaust gas processing device of diffusion furnace, which is characterized in that including coldplate, at least a filter, cooling tube, gas washing
Device；Tail gas of diffusion furnace successively enters last row device after cooling tube, filter, air-washer；The cooling tube is placed in cold
But on plate, coldplate is for the cooling tail gas for passing through cooling tube；The air-washer is built-in with scrubbing solution.
2. the exhaust gas processing device of diffusion furnace according to claim 1, which is characterized in that the exhaust gas processing device also wraps
Include the pump housing；The pump housing both ends are respectively connect with filter, air-washer through a pipeline respectively, and the pump housing is used for tail gas from coldplate
Side pumps to air-washer side.
3. the exhaust gas processing device of diffusion furnace according to claim 2, which is characterized in that the filter is set as two
It is a, respectively first filter, the second filter；The first filter both ends respectively through a pipeline respectively with cooling tube, second
Filter connection, wherein cooling tube and the pipeline of first filter one end are through connector detachable connection.
4. the exhaust gas processing device of diffusion furnace according to claim 3, which is characterized in that be equipped in the first filter
First filter core, the second filter is interior to be equipped with the second filter core；The aperture of first filter core is greater than the aperture of the second filter core.
5. the exhaust gas processing device of diffusion furnace according to claim 4, which is characterized in that be equipped in the coldplate several
Water pipe, for cooling to the tail gas in cooling tube after water flowing.
6. the exhaust gas processing device of diffusion furnace according to claim 5, which is characterized in that set at the top of the air-washer
There is scrubbing solution inlet valve, lower side is equipped with the outlet valve of scrubbing solution.
7. the exhaust gas processing device of diffusion furnace according to claim 6, which is characterized in that the air-washer is additionally provided with tail
Gas outlet, tail gas outlet are connected to last row device through pipeline.
8. the exhaust gas processing device of diffusion furnace according to claim 7, which is characterized in that the coldplate, filter, cold
But pipe, air-washer, the pump housing and all pipelines are all made of acid corrosion-resistant material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821039535.XU CN208574418U (en) | 2018-06-29 | 2018-06-29 | A kind of exhaust gas processing device of diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821039535.XU CN208574418U (en) | 2018-06-29 | 2018-06-29 | A kind of exhaust gas processing device of diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208574418U true CN208574418U (en) | 2019-03-05 |
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ID=65508375
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821039535.XU Active CN208574418U (en) | 2018-06-29 | 2018-06-29 | A kind of exhaust gas processing device of diffusion furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113856363A (en) * | 2021-08-30 | 2021-12-31 | 中石化宁波工程有限公司 | Dust overflow-proof automatic exhaust device of totally-enclosed air cushion conveyor |
-
2018
- 2018-06-29 CN CN201821039535.XU patent/CN208574418U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113856363A (en) * | 2021-08-30 | 2021-12-31 | 中石化宁波工程有限公司 | Dust overflow-proof automatic exhaust device of totally-enclosed air cushion conveyor |
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Address after: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |