CN217887468U

CN217887468U - Diffusion furnace tail gas collecting device

Info

Publication number: CN217887468U
Application number: CN202221424637.XU
Authority: CN
Inventors: 王天齐; 梁立成; 罗显凯
Original assignee: Jiangsu Huaheng New Energy Co ltd
Current assignee: Jiangsu Huaheng New Energy Co ltd
Priority date: 2022-06-08
Filing date: 2022-06-08
Publication date: 2022-11-25
Anticipated expiration: 2032-06-08

Abstract

The utility model discloses a diffusion furnace tail gas collection device, be used for filtering the filtration of diffusion furnace tail gas including a plurality of, and a plurality of filtration parallel connection, each promptly filtration's input all is linked together, each with the tail gas calandria of diffusion furnace filtration's output all is linked together with air exhaust device. The utility model discloses can be under the prerequisite that does not influence system's work, conveniently debug alone and maintain every filtration to guarantee the normal course of work of diffusion furnace, simultaneously, the user can cool down the treatment or carry out the change of coolant liquid to the coolant liquid, and easy operation has improved work efficiency.

Description

Diffusion furnace tail gas collecting device

Technical Field

The utility model relates to a diffusion furnace technical field specifically is a diffusion furnace tail gas collection device.

Background

In the field of semiconductor manufacturing or solar cells, a diffusion furnace is a diffusion apparatus commonly used in a diffusion process, and process gases of the diffusion process generally refer to oxygen, nitrogen, and source gases (such as phosphorus oxychloride, boron tribromide, and the like). The process gas is chemically reacted in the diffusion furnace tube, and the exhaust gas (residual process gas and gas generated after the reaction) discharged from the diffusion furnace tube is referred to as tail gas. Contain a large amount of metaphosphoric acid steam in the tail gas, the metaphosphoric acid steam forms solid-state metaphosphoric acid easily in the cold and hot handing-over department of quartzy exhaust pipe, and solid-state metaphosphoric acid blocks up quartzy exhaust pipe easily, and simultaneously, solid-state metaphosphoric acid is extremely strong to quartzy corrosivity, leads to quartzy exhaust pipe to block up and corrode the perforation, must pull down the quartz capsule and reprocess, and the result of use is poor.

Chinese patent with application number CN201720566162.0 discloses a diffusion furnace tail gas cylinder, including the cooling bottle that is used for holding the cooling water, the cooling bottle is connected with intake pipe and outlet duct, the one end of intake pipe is connected with the exhaust pipe after the diffusion, the other end of intake pipe immerges in the cooling water in the cooling bottle, the one end of outlet duct is connected with updraft ventilator, the other end of outlet duct stretches into just be located the top of cooling water in the cooling bottle, the intake pipe with be provided with between the outlet duct and prevent that the cooling water from flowing into the anti-reflux unit of intake pipe. However, this structure has the following disadvantages:

1. although a certain amount of metaphosphoric acid can be filtered out by the structure, the metaphosphoric acid in the tail gas cannot be continuously dissolved after the metaphosphoric acid dissolved in the cooling water reaches a saturated state, and if a user replaces a cooling bottle, the continuous discharge of the tail gas needs to be stopped, even the work of the diffusion furnace needs to be stopped, so that the work process of the diffusion furnace is influenced;

2. in its working process, because the cooling water in the cooling bottle can not be changed, and constantly carries out heat exchange with the tail gas of high temperature, the cooling effect can descend gradually, when the cooling water is close to the temperature of tail gas, just can't play refrigerated effect again.

SUMMERY OF THE UTILITY MODEL

The technique that exists is not enough to the aforesaid, the utility model aims at providing a diffusion furnace tail gas collection device can be under the prerequisite that does not influence system work, conveniently debug alone and maintain every filtration to guarantee the normal course of work of diffusion furnace, simultaneously, the user can cool down the treatment or carry out the change of coolant liquid to the coolant liquid, and easy operation has improved work efficiency.

In order to solve the technical problem, the utility model adopts the following technical scheme.

The utility model provides a diffusion furnace tail gas collection device, be used for filtering the filtration of diffusion furnace tail gas including a plurality of, and a plurality of filtration parallel connection, each promptly filtration's input all is linked together, each with the tail gas calandria of diffusion furnace filtration's output all is linked together with air exhaust device.

Preferably, the filter structure comprises a collecting tank for containing the absorption liquid, an air inlet pipe and an exhaust pipe are arranged on the collecting tank, one end of the air inlet pipe is arranged in the collecting tank and is positioned below the liquid level of the absorption liquid, and the other end of the air inlet pipe is communicated with the tail gas exhaust pipe; one end of the exhaust pipe is arranged at the upper end of the collecting tank and communicated with the inside of the collecting tank, and the other end of the exhaust pipe is communicated with the input end of the air exhaust device;

and under the negative pressure action of the air extractor, the diffusion furnace tail gas in the tail gas exhaust pipe passes through the air inlet pipe, the absorption liquid and the exhaust pipe and is exhausted through the exhaust device.

Preferably, one end of the air inlet pipe, which is positioned inside the collecting tank, is arranged at the bottom of the collecting tank.

Preferably, the air inlet pipe is provided with a one-way valve, and under the action of the one-way valve, the flow direction of the diffusion furnace tail gas in the air inlet pipe can only flow from one end close to the tail gas exhaust pipe to one end close to the absorption liquid.

Preferably, each exhaust pipe is provided with a valve.

Preferably, the number of the filter structures is not less than two.

Preferably, a cooling tank is arranged below the filtering structures, cooling liquid is arranged in the cooling tank, and all the filtering structures are placed in the cooling liquid all the time during work.

The utility model relates to a diffusion furnace tail gas collection device's beneficial effect specifically as follows:

1. the utility model discloses be provided with a plurality of parallel connection's filtration, each filtration's work does not influence each other, diffusion furnace tail gas can carry out tail gas filtration or collection through arbitrary one filtration, after absorption liquid dissolves metaphosphoric acid and reaches saturated condition in one of them filtration, the user can carry out this filtration pause work and carry out the change of absorption liquid, then make it continue to carry out work again, in order to guarantee the normal working process of diffusion furnace, can be under the prerequisite that does not influence system's work, the convenience is debugged and is maintained every filtration alone.

2. The utility model discloses in a plurality of filtration all place in the coolant liquid in the cooling bath, cooling time is of a specified duration, under the prerequisite that does not influence filtration work, the user can cool down or carry out the change of coolant liquid to the coolant liquid, easy operation has improved work efficiency.

3. The utility model discloses well check valve has avoided the suck-back of absorption liquid, has prolonged the life of equipment.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic diagram of a specific structure of an embodiment of the present invention.

Description of reference numerals:

1. the device comprises a filter structure, 2, absorption liquid, 3, a collecting tank, 4, an air inlet pipe, 5, an exhaust pipe, 6, a tail gas exhaust pipe, 7, an air extractor, 8, a one-way valve, 9, a valve, 10, a cooling pool, 11 and cooling liquid.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Example (b):

as shown in fig. 1 and fig. 2, the utility model provides a diffusion furnace tail gas collection device, including a plurality of filter structures 1 connected in parallel, filter structure 1 is used for filtering the metaphosphoric acid in the diffusion furnace tail gas, and the work of each filter structure 1 is not influenced mutually, and diffusion furnace tail gas can carry out the collection of metaphosphoric acid through arbitrary one filter structure 1, the utility model discloses can conveniently debug and maintain each filter structure 1 alone under the prerequisite that does not influence system work; the number of the filter structures 1 in this embodiment is two (in practical application, the number of the filter structures 1 can be increased appropriately according to the working conditions).

Specifically, the method comprises the following steps:

the filtering structure 1 comprises a collecting tank 3 for containing the absorption liquid 2, and an air inlet pipe 4 and an exhaust pipe 5 are arranged on the collecting tank 3; furthermore, one end of an air inlet pipe 4 is communicated with a tail gas exhaust pipe 6 of the diffusion furnace, and the other end of the air inlet pipe 4 is arranged inside the collecting tank 3 and is positioned below the liquid level of the absorption liquid 2 and close to the bottom of the collecting tank 3, so that the gas entering the collecting tank 3 is fully mixed with the absorption liquid 2; one end of the exhaust pipe 5 is arranged at the upper end of the collecting tank 3 and is communicated with the interior of the collecting tank 3, the other end of the exhaust pipe 5 is communicated with the input end of the air extraction device 7, the air extraction device 7 generates negative pressure, and the filtered tail gas is led out to the air extraction device 7 through the exhaust pipe 5 and then is discharged;

wherein, the absorption liquid 2 in this embodiment is a weakly alkaline liquid with pH not less than 7 and not more than 9, and the liquid can play a main absorption and filtration role on metaphosphoric acid, phosphorus pentoxide and phosphorus trichloride in the tail gas of the diffusion furnace.

Wherein, the air extracting device 7 in this embodiment is an air pump.

In order to avoid absorbing liquid 2 from being sucked back into the diffusion furnace, the air inlet pipe 4 is provided with the check valve 8, the air flowing direction inside the check valve 8 is that the tail gas of the diffusion furnace in the air inlet pipe 4 flows to the end close to the absorbing liquid 2 from the end close to the tail gas exhaust pipe 6, and the tail gas of the diffusion furnace in the air inlet pipe 4 cannot flow to the end close to the tail gas exhaust pipe 6 from the end close to the absorbing liquid 2.

In order to control the suspension work and the continuous work of the filtering structure 1 conveniently, each exhaust pipe 5 is provided with a valve 9; when the valve 9 is opened, the filtering structure 1 can work normally; when the valve 9 is closed, the filter structure 1 can only be suspended.

In order to prolong the cooling time of the absorption liquid 2, a cooling pool 10 is arranged below the filter structure 1, cooling liquid 11 is arranged in the cooling pool 10, and all the filter structures 1 are always placed in the cooling liquid 11 during work; meanwhile, the cooling liquid 11 is convenient to replace due to the design.

When the diffusion furnace is used specifically, a user checks whether the pipeline of each filtering structure 1 is connected correctly, then all the valves 9 are opened, under the negative pressure action of the air extractor 7, the tail gas of the diffusion furnace is exhausted through the exhaust device after passing through the tail gas exhaust pipe 6, the air inlet pipe 4, the absorption liquid 2 and the exhaust pipe 5, in the process, the tail gas of the diffusion furnace is fully mixed with the absorption liquid 2 after encountering the absorption liquid 2, and the absorption liquid 2 fully absorbs metaphosphoric acid in the tail gas of the diffusion furnace; in order to avoid losing the filtering effect after the metaphosphoric acid dissolved in the absorption liquid 2 reaches a saturated state, a user can regularly and sequentially replace the absorption liquid 2 in each collecting tank 3; when replacing, the user firstly closes the valve 9 corresponding to the filter structure 1 of the absorption liquid 2 to be replaced, slowly takes out the corresponding collection tank 3, replaces the absorption liquid 2, then installs and resets the collection tank 3, and then opens the closed valve 9.

It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. The utility model provides a diffusion furnace tail gas collection device, its characterized in that includes a plurality of filtration (1) that is used for filtering diffusion furnace tail gas, and a plurality of filtration (1) parallel connection, each promptly filtration (1) the input all is linked together with the tail gas calandria (6) of diffusion furnace, each the output of filtration (1) all is linked together with air exhaust device (7).

2. The tail gas collection device of the diffusion furnace according to claim 1, wherein the filter structure (1) comprises a collection tank (3) for containing the absorption liquid (2), the collection tank (3) is provided with an air inlet pipe (4) and an air outlet pipe (5), one end of the air inlet pipe (4) is arranged in the collection tank (3) and is located below the liquid level of the absorption liquid (2), and the other end of the air inlet pipe (4) is communicated with the tail gas exhaust pipe (6); one end of the exhaust pipe (5) is arranged at the upper end of the collecting tank (3) and is communicated with the interior of the collecting tank (3), and the other end of the exhaust pipe (5) is communicated with the input end of the air extraction device (7);

and under the negative pressure action of the air extraction device (7), the diffusion furnace tail gas in the tail gas exhaust pipe (6) passes through the air inlet pipe (4), the absorption liquid (2) and the exhaust pipe (5) and then is exhausted through the exhaust device.

3. The tail gas collecting device of the diffusion furnace according to claim 2, wherein one end of the gas inlet pipe (4) positioned inside the collecting tank (3) is arranged at the bottom of the collecting tank (3).

4. The diffusion furnace tail gas collection device of claim 2, wherein the air inlet pipe (4) is provided with a one-way valve (8), and under the action of the one-way valve (8), the flow direction of the diffusion furnace tail gas in the air inlet pipe (4) can only flow from one end close to the tail gas exhaust pipe (6) to one end close to the absorption liquid (2).

5. A diffusion furnace off-gas collection device according to claim 2, characterized in that each of said exhaust pipes (5) is provided with a valve (9).

6. A diffusion furnace off-gas collection device according to claim 1, characterized in that the number of filter structures (1) is not less than two.

7. The diffusion furnace tail gas collection device according to any one of claims 1 to 6, characterized in that a cooling pool (10) is arranged below the filter structure (1), a cooling liquid (11) is arranged in the cooling pool (10), and all the filter structures (1) are placed in the cooling liquid (11) all the time during operation.