CN105241568A - Manufacturing method of flexible temperature sensor - Google Patents
Manufacturing method of flexible temperature sensor Download PDFInfo
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- CN105241568A CN105241568A CN201510623149.XA CN201510623149A CN105241568A CN 105241568 A CN105241568 A CN 105241568A CN 201510623149 A CN201510623149 A CN 201510623149A CN 105241568 A CN105241568 A CN 105241568A
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- temperature sensor
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Abstract
The invention provides a manufacturing method of a flexible temperature sensor, and relates to a method for manufacturing a flexible temperature sensor by attaching a metal-sensitive membrane on a polyimide film substrate, for the purposes of solving the problem of temperature measurement of the flexible surface of a detected temperature field and realizing flexibility of a temperature-sensitive structure. The manufacturing method is composed of the following steps of polyimide film gluing, sensitive metal film surface processing, metal film coating, mask photoetching, sensitive resistance pattern copying, etching, cleaning and degumming, fine resistance laser adjustment, precious metal pad electroplating, wire welding, polyimide film gluing and coating and flexible temperature sensor formation. The temperature sensor manufactured by use of the method provided by the invention can realize large-area temperature field measurement, the ultrathin sensor structure is suitable for temperature measurement of a slit between two objects, and the sensor can be applied to non-planar temperature measurement of a cylindrical surface, a conical surface, wave surface and the like through flexible installation.
Description
Technical field
What the present invention relates to is a kind of manufacture method of temperature sensor, specifically a kind of flexible temperature sensor manufacture method.
Background technology
In thermometric practical application, usually need to measure temperature in irregular surface temperature, two articles surface of contact temperature or narrow slit, the surface configuration of testee is usually curved surface or concave plane, such as sphere, the face of cylinder, circular conical surface and wavy surface etc., with regard to practical thermal sensing element in the market, be difficult to realize such surface temperature measurement.
Commercial product is rigidity as thermistor, thermal resistance, thermopair etc. have structure, not yielding, unpliant feature.Do not find that the thermal resistance achievement simultaneously for the ultrathin type of temperature survey with certain amount of deflection feature is come out through retrieval.
Summary of the invention
The object of the present invention is to provide the manufacture method of the flexible temperature sensor that a kind of properties of product are stablized, thermal response time is short.
The object of the present invention is achieved like this:
A, with Kapton as substrate, to the even gluing of substrate;
B, employing high-power electron beam bombardment technique, process film surface, sensitive metal;
C, employing hot extrusion technique, be combined into one the Kapton substrate after step a gluing and the sensitive metal film through step b process;
D, employing sputtering vacuum process form beryllia and boronation magnesium heat conducting coating on the film of sensitive metal;
E, employing mask photolithographic process, transfer replication sensitive resistance figure;
F, employing etching technics, etch resistor stripe by sensitive metal film;
G, striping liquid is utilized to remove photoresist, cleaning;
H, utilize laser etching process, adjustment sensitive resistance resistance, makes it reach standard-required;
I, utilize chemical plating process, electroplate precious metal on pad, form pad;
J, weld metal go between;
K, at metal film temperature-sensitive resistor on the surface, is covered with upper slice Kapton of viscose glue, forms polyimide film-metal film sensitive resistance-polyimide film sandwich construction;
L, electricity are seasoned, heat is seasoned obtains flexible temperature sensor.
The present invention can also comprise:
1, described weld metal lead-in wire utilizes soldering process, spot-welding technology, Laser Welding (LBW) technique or ultrasonic bond technique to carry out.
2, described sensitive metal film is nickel film, aluminium film or platinum.
3, described etching technics is the wet-etching technology of acid corrosion, or laser, ion beam, dry plasma etch technique.
The present invention is directed to the application difficult of current commercial rigid temperature sensor measurement curved surface or crawl space and a kind of new solution proposed.
The present invention mainly solves the following problem that conventional temperature sensor exists: (1) structural rigidity is large, not yielding; (2) not easily bend, cannot temperature in measured surface temperature (face of cylinder, circular conical surface and wavy surface etc.), two articles surface of contact temperature or narrow slit; (3) improve organic film heat conduction efficiency low, adopt fast thermal transfer overcoat technology, improve thermal response time.
Novelty of the present invention is mainly reflected in:
1, the present invention can produce the temperature sensor with flexibility characteristics, and flexible 360 ° of installations, realize Temperature in Large Area field measurement.
2, the present invention can produce the temperature sensor with ultra-thin feature, and thickness is less than 0.1mm, realizes micro chink temperature field measurement.
3, the present invention adopts high-power electron beam bombardment technique, realizes sensitive metal film stable physical property; Adopt sputtering vacuum process to form beryllia and the fast heat conducting coating of boronation magnesium stabilization, effectively improve thermal response time, the response time is less than 0.2s.
Accompanying drawing explanation
Fig. 1 is flexible temperature sensor manufacturing process block flow diagram;
Fig. 2 is square flexible temperature sensor schematic diagram;
Fig. 3 is semicircle flexible temperature sensor schematic diagram;
Fig. 4 is trapezoidal flexible temperature sensor schematic diagram;
Fig. 5 is circular flexible temperature sensor schematic diagram.
Embodiment
The flexible temperature sensor manufacturing process block flow diagram of composition graphs 1, this flow process sum up for: Kapton gluing-sensitive metal film surface treatment-metal film coated-mask lithography-copy sensitive resistance figure-etching-cleaning to remove photoresist-laser adjusts smart resistance-plating pad noble metal-welding lead-Kapton gluing overlay film-formation flexible temperature sensor, and the manufacture method between each work step can carry out combination in any according to specific requirement.Below by example, the present invention is described in more detail.
Specific embodiment 1:
1, adopt thickness be the Kapton of 0.02mm ~ 0.05mm as substrate, evenly apply resistance to 360 DEG C of high-temp glue;
2, adopt high-power electron beam bombardment technique, to sensitive metal nickel film surface treatment, make the stable physical property of its temperature coefficient;
3, sputtering vacuum process is adopted, sputtering one deck beryllia and the fast heat conducting coating of boronation magnesium stabilization.
4, adopt hot extrusion technique, the Kapton of gluing and sensitive metal film are combined into one;
5, mask photolithographic process is adopted, transfer replication sensitive resistance figure;
6, adopt ion beam etch process, beryllia and boronation magnesium stabilization coating are etched and expose metallic nickel film;
7, adopt wet-etching technology, metallic nickel film is etched resistor stripe;
8, utilize striping liquid to remove photoresist, pure water cleans, and dries;
9, laser etching process is utilized to adjust sensitive resistance resistance, till making its zero degree resistance reach 50 Ω (or 100 Ω, 500 Ω, 1000 Ω, 2000 Ω, 5000 Ω, 10000 Ω);
10, utilize chemical plating process, pad is electroplated Precious Metals-Gold or silver, form the pad that weldability is fabulous;
11, soldering process, spot-welding technology, Laser Welding (LBW) technique, ultrasonic bond technique weld metal lead-in wire silver palladium alloy silk, filamentary silver, spun gold, nickel wire is utilized;
12, at metal film temperature-sensitive resistor on the surface, be covered with the Kapton of viscose glue, Kapton thickness is that 0.02mm ~ 0.05mm forms polyimide film-metallic nickel film sensitive resistance-polyimide film sandwich construction, forms flexible temperature sensor;
13, sensor thickness is less than 0.1mm; Sensor has flexible feature, flexible 360 °, realizes 360 ° of cylinder dresses.
14, flexible temperature sensor electricity is seasoned, heat is seasoned, performance test screening, produces qualified flexible temperature sensor.
Specific embodiment 2:
1, adopt thickness be the Kapton of 0.02mm ~ 0.5mm as substrate, evenly apply resistance to 360 DEG C of high-temp glue;
2, adopt high-power electron beam bombardment technique, to sensitive metal nickel film surface treatment, make the stable physical property of its temperature coefficient;
3, sputtering vacuum process is adopted, sputtering one deck beryllia and the fast heat conducting coating of boronation magnesium stabilization.
4, adopt hot extrusion technique, the Kapton of gluing and sensitive metal film are combined into one;
5, mask photolithographic process is adopted, transfer replication sensitive resistance figure;
6, adopt ion beam etch process, beryllia and boronation magnesium stabilization coating are etched and expose metallic nickel film;
7, adopt dry plasma etch technique, metal platinum film is etched resistor stripe;
8, adopt wet-etching technology, metallic nickel film is etched resistor stripe;
9, utilize striping liquid to remove photoresist, pure water cleans, and dries;
10, laser etching process is utilized to adjust sensitive resistance resistance, till making its zero degree resistance reach 50 Ω (or 100 Ω, 500 Ω, 1000 Ω, 2000 Ω, 5000 Ω, 10000 Ω);
11, utilize chemical plating process, pad is electroplated Precious Metals-Gold or silver, form the pad that weldability is fabulous;
12, soldering process, spot-welding technology, Laser Welding (LBW) technique, ultrasonic bond technique weld metal lead-in wire silver palladium alloy silk, filamentary silver, platinum filament is utilized;
13, at metal film temperature-sensitive resistor on the surface, be covered with the Kapton of viscose glue, Kapton thickness is that 0.02mm ~ 0.5mm forms polyimide film-metal platinum film sensitive resistance-polyimide film sandwich construction, forms flexible temperature sensor;
14, flexible temperature sensor electricity is seasoned, heat is seasoned, performance test screening, produces qualified flexible temperature sensor.
The principle of work of flexible temperature sensor provided by the invention:
Based on the resistance and temperature effect of metal film as the Cleaning Principle of flexible temperature sensor, when measuring measurand temperature, metalfilmresistor value can change along with temperature variation, demarcated by standard temperature source, the temperature that certain resistance is corresponding certain, by measuring the resistance value of flexible temperature sensor, and then converse the temperature value in this moment.
Flexible temperature sensor provided by the invention, the temperature survey within the scope of applicable-55 DEG C ~ 280 DEG C; Composition graphs 2 to Fig. 5, can be made into circle, square, trapezoidal, triangle, fan-shaped, loop sensor structure as required, thickness can be processed into and be less than 0.1mm, realizes the ultrathin temperature element with flexible feature, be applicable to industry, agricultural, national defence, scientific research etc. the demand in field.
The above; be only the present invention's preferably embodiment; these embodiments are all based on the different implementations under general idea of the present invention; and protection scope of the present invention is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (5)
1. a manufacture method for flexible temperature sensor, is characterized in that comprising the following steps:
A, with Kapton as substrate, to the even gluing of substrate;
B, employing high-power electron beam bombardment technique, process film surface, sensitive metal;
C, employing hot extrusion technique, be combined into one the Kapton substrate after step a gluing and the sensitive metal film through step b process;
D, employing sputtering vacuum process form beryllia and boronation magnesium heat conducting coating on the film of sensitive metal;
E, employing mask photolithographic process, transfer replication sensitive resistance figure;
F, employing etching technics, etch resistor stripe by sensitive metal film;
G, striping liquid is utilized to remove photoresist, cleaning;
H, utilize laser etching process, adjustment sensitive resistance resistance, makes it reach standard-required;
I, utilize chemical plating process, electroplate precious metal on pad, form pad;
J, weld metal go between;
K, at metal film temperature-sensitive resistor on the surface, is covered with upper slice Kapton of viscose glue, forms polyimide film-metal film sensitive resistance-polyimide film sandwich construction;
L, electricity are seasoned, heat is seasoned obtains flexible temperature sensor.
2. the manufacture method of flexible temperature sensor according to claim 1, is characterized in that: described weld metal lead-in wire utilizes soldering process, spot-welding technology, Laser Welding (LBW) technique or ultrasonic bond technique to carry out.
3. the manufacture method of flexible temperature sensor according to claim 1 and 2, is characterized in that: described sensitive metal film is nickel film, aluminium film or platinum.
4. the manufacture method of flexible temperature sensor according to claim 1 and 2, is characterized in that: described etching technics is the wet-etching technology of acid corrosion, or laser, ion beam, dry plasma etch technique.
5. the manufacture method of flexible temperature sensor according to claim 3, is characterized in that: described etching technics is the wet-etching technology of acid corrosion, or laser, ion beam, dry plasma etch technique.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510623149.XA CN105241568B (en) | 2015-09-26 | 2015-09-26 | A kind of manufacture method of flexible temperature sensor |
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| CN201510623149.XA CN105241568B (en) | 2015-09-26 | 2015-09-26 | A kind of manufacture method of flexible temperature sensor |
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| CN105241568B CN105241568B (en) | 2018-03-13 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106197718A (en) * | 2016-08-31 | 2016-12-07 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of film temperature sensor and preparation method |
| CN108106748A (en) * | 2017-11-09 | 2018-06-01 | 中国电子科技集团公司第四十八研究所 | A kind of flexibility ablation resistance film and preparation method thereof |
| CN108732212A (en) * | 2018-05-23 | 2018-11-02 | 重庆海士测控技术有限公司 | A kind of manufacturing method, sensor and its application of manifold effect detection integrated gas sensors manufacturing method |
| CN109211428A (en) * | 2018-08-21 | 2019-01-15 | 北京印刷学院 | temperature sensor and preparation method |
| WO2021065503A1 (en) * | 2019-10-01 | 2021-04-08 | 日東電工株式会社 | Temperature sensor film, conductive film, and method for producing same |
| CN112880851A (en) * | 2021-01-17 | 2021-06-01 | 西北工业大学 | Wearable temperature sensor and preparation method thereof |
| CN114018425A (en) * | 2021-11-04 | 2022-02-08 | 辽宁佳宇电子产品有限公司 | Flexible thin film platinum resistance sensor and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106197718A (en) * | 2016-08-31 | 2016-12-07 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of film temperature sensor and preparation method |
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| CN108732212A (en) * | 2018-05-23 | 2018-11-02 | 重庆海士测控技术有限公司 | A kind of manufacturing method, sensor and its application of manifold effect detection integrated gas sensors manufacturing method |
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| CN109211428A (en) * | 2018-08-21 | 2019-01-15 | 北京印刷学院 | temperature sensor and preparation method |
| WO2021065503A1 (en) * | 2019-10-01 | 2021-04-08 | 日東電工株式会社 | Temperature sensor film, conductive film, and method for producing same |
| CN112880851A (en) * | 2021-01-17 | 2021-06-01 | 西北工业大学 | Wearable temperature sensor and preparation method thereof |
| CN112880851B (en) * | 2021-01-17 | 2024-02-06 | 西北工业大学 | Wearable temperature sensor and preparation method thereof |
| CN114018425A (en) * | 2021-11-04 | 2022-02-08 | 辽宁佳宇电子产品有限公司 | Flexible thin film platinum resistance sensor and preparation method thereof |
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| CN105241568B (en) | 2018-03-13 |
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