CN204286742U - Miniature thin-film platinum resistance heat flux sensor - Google Patents
Miniature thin-film platinum resistance heat flux sensor Download PDFInfo
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- CN204286742U CN204286742U CN201420778902.3U CN201420778902U CN204286742U CN 204286742 U CN204286742 U CN 204286742U CN 201420778902 U CN201420778902 U CN 201420778902U CN 204286742 U CN204286742 U CN 204286742U
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Abstract
The utility model provides a kind of miniature thin-film platinum resistance heat flux sensor, it comprises platinum resistance film, substrate of glass, silverskin lead-in wire and wire, described substrate of glass is the cylindrical glass rod of diameter 1mm ± 0.05mm, described platinum resistance film is be plated in the in-line film on described substrate of glass end face, described silverskin lead-in wire is for be plated in described substrate of glass two silverskin lines laterally symmetrically, article two, the described silverskin respective one end that goes between overlaps with described platinum resistance film respectively, and the respective other end is welded with described wire respectively.Utilize microsensor of the present utility model, can make relatively to diminish on the impact of the geometric parameter of original model because of the installation of sensor, thus measurement result deviation is diminished than original size sensor, the reproducibility error of experimental data diminishes.Large area curved profile region heat flow measurement precision improves.
Description
Technical field
The utility model relates to a kind of for model in wind tunnel surface heat flow measurement mechanism, particularly a kind of compact size for shock tunnel Aerodynamic Heating environmental test, manufacture craft advanced person, and diameter is the miniature thin-film platinum resistance heat flux sensor of 1mm.
Background technology
The measuring technique of based thin film resistance heat flow sensor as a kind of important method of Aerodynamic Heating environment measurement in shock tunnel, development and innovation in decades.On the one hand, in order to unit area obtains more data, the integrated trend becoming Sensor Technology Development.On the other hand, install to reduce sensor the measuring error brought, sensor miniaturization is also being constantly brought forth new ideas as research direction always, from diameter 5mm the earliest, to diameter 2mm, though be from temperature-sensitive original paper technique to silver slurry retouch be coated with technique had rapid progress.Particularly diameter is less than the sensor of 2mm, and the cylindrical glass substrate fabrication technology being less than 2mm diameter is also just ripe in recent years.Current film platinum resistor sensor minimum diameter 1.5mm, and due to technique backwardness, platinum resistance resistance is less, measuring accuracy is not enough.For the development of diameter 1mm platinum sensor, except improving except glass machining technique in substrate of glass, the preparation technology of thermistor film more to improve.
Summary of the invention
In order to reduce in shock tunnel thermal environmental test, the measuring error caused installed by model and sensor.The utility model provides the miniature thin-film platinum resistance heat flux sensor of a kind of diameter 1mm, realizes making platinum resistance lines at diameter 1mm cylinder end face, thus realize the making of microsensor by change size of foundation base and thermistor preparation technology.
Miniature thin-film platinum resistance heat flux sensor of the present utility model comprises: platinum resistance film, substrate of glass, silverskin lead-in wire and wire, described substrate of glass is the cylindrical glass rod of diameter 1mm ± 0.05mm, described platinum resistance film is be plated in the in-line film on described substrate of glass end face, described silverskin lead-in wire is for be plated in described substrate of glass two silverskin lines laterally symmetrically, article two, the described silverskin respective one end that goes between overlaps with described platinum resistance film respectively, and the respective other end is welded with described wire respectively.
Preferred described platinum resistance thin-film width is 0.1mm.
The beneficial effects of the utility model are: in shock tunnel thermal environmental test process, when measuring the region hot-fluid that curvature of curved surface is large, model is little, the geometric parameter that the appearance of microsensor makes the installation of sensor destroy original model diminishes relatively, result in measurement result deviation to diminish than original size sensor, the reproducibility error of experimental data diminishes.Large area curved profile region heat flow measurement precision improves.
Accompanying drawing explanation
Fig. 1 is the sectional view of the platinum resistance heat flux sensor structure of the utility model miniature thin-film.
Fig. 2 is the schematic diagram of platinum resistance film shape on substrate end face.
Embodiment
As shown in Figure 1 and Figure 2, the utility model comprises: platinum resistance film 1, substrate of glass 2, silverskin lead-in wire 3, wire 4.
Substrate of glass 2 for diameter be 1mm ± 0.05mm cylindrical glass rod, first sputter coating technology is utilized to carry out plated film to glass bar circular end face, namely, one deck platinum resistance film will be deposited on substrate end face 21 by ion beam sputter depositing method, by adopting certain filming parameter and time, ensure identical with original coated film deposition thickness.And utilize existing Technology for Heating Processing to heat-treat platinum resistance film.
Then design silver-plated film jig, silver-plated film goes between 3 in glass bar both sides to use sputter coating, replaces original silver slurry lead-in wire technique.That is, adopt ion beam sputter depositing method in the side of cylindrical glass rod, deposit two silverskin lead-in wires, 3, two silverskin, the 3 respective one end that go between symmetrically and overlap with platinum resistance film on substrate end face 21 respectively.
Again by the new cut jig of design, the glass bar of overall for end face plated film is installed on cutting jig, laser process equipment is utilized to repair type cutting to platinum metal film, two silverskin lead-in wire 3 overlap between 2, leave the plated film that width is " one " font lines of 0.05mm, thus form platinum resistance film 1, then semi-manufacture Laser Processing obtained continue to utilize existing sensor manufacturing process to carry out finished product making.Platinum resistance film 1 resistance value should remain on 20 ± 3 ohm.Two silverskin laterally of platinum resistance film 1 and cylindrical glass rod go between 3 vertical, and go between with two silverskin and 3 form series relationship.Article two, go between 3 respective one end and platinum resistance film 1 of silverskin overlaps, and the respective other end draws wire 4 respectively, and wire 4 and silverskin go between and 3 to weld, thus composition series circuit, forms a complete thermal sensing element.
Above preferred implementation of the present utility model is illustrated, but the utility model is not limited to above-described embodiment.To one skilled in the art, in the category described in claims, various modification or fixed case can be expected apparently, certainly also belong to technology category of the present utility model.
Claims (2)
1. a miniature thin-film platinum resistance heat flux sensor, it is characterized in that, comprise: platinum resistance film, substrate of glass, silverskin lead-in wire and wire, described substrate of glass is the cylindrical glass rod of diameter 1mm ± 0.05mm, described platinum resistance film is be plated in the in-line film on described substrate of glass end face, described silverskin lead-in wire is for be plated in described substrate of glass two silverskin lines laterally symmetrically, article two, the described silverskin respective one end that goes between overlaps with described platinum resistance film respectively, and the respective other end is welded with described wire respectively.
2. miniature thin-film platinum resistance heat flux sensor according to claim 1, is characterized in that: described platinum resistance thin-film width is 0.1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420778902.3U CN204286742U (en) | 2014-12-10 | 2014-12-10 | Miniature thin-film platinum resistance heat flux sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420778902.3U CN204286742U (en) | 2014-12-10 | 2014-12-10 | Miniature thin-film platinum resistance heat flux sensor |
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| Publication Number | Publication Date |
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| CN204286742U true CN204286742U (en) | 2015-04-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201420778902.3U Active CN204286742U (en) | 2014-12-10 | 2014-12-10 | Miniature thin-film platinum resistance heat flux sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104458191A (en) * | 2014-12-10 | 2015-03-25 | 中国航天空气动力技术研究院 | Miniature thin film platinum resistor heat flux transducer and manufacturing method thereof |
| CN105606331A (en) * | 2015-12-18 | 2016-05-25 | 中国航天空气动力技术研究院 | Film platinum resistor heat flux sensor with flexible substrate, and manufacturing method for film platinum resistor heat flux sensor |
-
2014
- 2014-12-10 CN CN201420778902.3U patent/CN204286742U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104458191A (en) * | 2014-12-10 | 2015-03-25 | 中国航天空气动力技术研究院 | Miniature thin film platinum resistor heat flux transducer and manufacturing method thereof |
| CN105606331A (en) * | 2015-12-18 | 2016-05-25 | 中国航天空气动力技术研究院 | Film platinum resistor heat flux sensor with flexible substrate, and manufacturing method for film platinum resistor heat flux sensor |
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