CN105241568B - A kind of manufacture method of flexible temperature sensor - Google Patents
A kind of manufacture method of flexible temperature sensor Download PDFInfo
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- CN105241568B CN105241568B CN201510623149.XA CN201510623149A CN105241568B CN 105241568 B CN105241568 B CN 105241568B CN 201510623149 A CN201510623149 A CN 201510623149A CN 105241568 B CN105241568 B CN 105241568B
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- temperature sensor
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Abstract
The invention provides a kind of manufacture method of flexible temperature sensor, and it is related to the adhesion metal sensitive membrane in Kapton substrate and manufactures flexible temperature sensor method.The present invention solves the problems, such as the flexible face thermometric of tested thermal field, realizes the flexibilityization of temperature sensor structure.The manufacture method of the present invention is made up of following work step：Kapton gluing sensitive metal film surface treatment, which covers metal film mask lithography and replicates the sensitive resistance pattern etching cleaning laser that removes photoresist, to be adjusted the gluing overlay film of smart resistance plating pad noble metal welding lead Kapton and forms flexible temperature sensor, the temperature sensor produced with the inventive method can realize Temperature in Large Area field measurement, the ultra-thin property of sensor construction is suitable to the thermometric between two articles slit, and flexibility installation can be applied to the on-plane surface thermometric such as cylinder, the conical surface, wavy surface.
Description
Technical field
The present invention relates to a kind of manufacture method of temperature sensor, specifically a kind of flexible temperature sensor system
Make method.
Background technology
In the practical application of temperature survey, it is often necessary to measure irregular surface temperature, two articles contact surface temperature or
Temperature in narrow slit, the surface configuration usually from curved surface or concave plane of testee, such as sphere, the face of cylinder, circular conical surface and
Wavy surface etc., for practical temperature-sensitive element in the market, it is difficult to surface temperature measurement as realization.
The product of commercialization such as thermistor, thermal resistance, thermocouple etc. have structure for rigidity, are unlikely to deform, not pliable
The characteristics of folding.The ultrathin type for temperature survey is not found through retrieval while the thermal resistance achievement with certain amount of deflection feature is asked
Generation.
The content of the invention
It is an object of the invention to provide a kind of system for the flexible temperature sensor that properties of product are stable, thermal response time is short
Make method.
The object of the present invention is achieved like this：
A, with Kapton as substrate, to the uniform gluing of substrate；
B, using high-power electron beam bombardment technique, sensitive metal film surface is handled；
C, using hot extrusion technique, the Kapton substrate after step a is glued is sensitive golden with being handled through step b
Category film is combined into one；
D, beryllium oxide and boronation magnesium heat conducting coating are formed on the film of sensitive metal using sputtering vacuum process；
E, using mask photolithographic process, transfer replication sensitive resistance figure；
F, using etching technics, sensitive metal film is etched into resistor stripe；
G, using going film liquid to remove photoresist, clean；
H, using laser etching process, sensitive resistance resistance is adjusted, reaches standard requirement；
I, using chemical plating process, the electroplate precious metal on pad, pad is formed；
J, welding metal lead；
K, on metal film temperature-sensitive resistor surface, upper piece Kapton of viscose glue is covered with, forms polyimides
Film-metal film sensitive resistance-polyimide film sandwich；
L, electricity is seasoned, heat is seasoned obtains flexible temperature sensor.
The present invention can also include：
1st, described welding metal lead is carried out using soldering process, spot-welding technology, laser Welding or ultrasonic Welding.
2nd, described sensitive metal film is nickel film, aluminium film or platinum.
3rd, described etching technics is the wet-etching technology of acid corrosion, or laser, ion beam, plasma dry are carved
Etching technique.
The present invention carries for the rigid temperature sensor measurement curved surface of current commercialization or the application difficult of crawl space
A kind of new solution method gone out.
Present invention mainly solves problems with existing for conventional temperature sensor：(1) structural rigidity is big, is unlikely to deform；
(2) it is not pliable, can not measurement surface temperature (face of cylinder, circular conical surface and wavy surface etc.), two articles contact surface temperature or narrow slit
Interior temperature；(3) it is low to improve organic film heat conduction efficiency, using fast thermal transfer overcoat technology, improves thermal response time.
The novelty of the present invention is mainly reflected in：
1st, the present invention can produce the temperature sensor with flexibility characteristics, flexible 360 ° of installations, realize Temperature in Large Area
Field measurement.
2nd, the present invention can produce the temperature sensor with ultra-thin feature, and thickness is less than 0.1mm, realizes micro chink thermal field
Measurement.
3rd, the present invention uses high-power electron beam bombardment technique, realizes sensitive metal film stable physical property；Splashed using vacuum
Penetrate technique and form beryllium oxide and the fast heat conducting coating of boronation magnesium stabilisation, effectively improve thermal response time, the response time is less than 0.2s.
Brief description of the drawings
Fig. 1 is flexible temperature sensor manufacturing process block flow diagram；
Fig. 2 is square flexible temperature sensor schematic diagram；
Fig. 3 is semicircle flexible temperature sensor schematic diagram；
Fig. 4 is trapezoidal flexible temperature sensor schematic diagram；
Fig. 5 is circular flexible temperature sensor schematic diagram.
Embodiment
With reference to Fig. 1 flexible temperature sensor manufacturing process block flow diagram, the flow sum up for：Polyimides is thin
Film gluing-sensitive metal film surface treatment-metal film coated-mask lithography-duplication sensitive resistance figure-etching-cleaning is removed photoresist-swashs
Light adjusts the smart resistance-plating pad noble metal-gluing overlay film of welding lead-Kapton-formation flexible temperature sensor,
Manufacture method between each work step can be combined according to specific requirement.The present invention is done in more detail below by example
Description.
Specific embodiment 1：
1st, it is 0.02mm~0.05mm Kapton as substrate to use thickness, uniformly applies resistance to 360 DEG C of high temperature
Glue；
2nd, using high-power electron beam bombardment technique, sensitive metal nickel film is surface-treated, makes the physical of its temperature coefficient
Can be stable；
3rd, using sputtering vacuum process, sputter one layer of beryllium oxide and boronation magnesium stabilizes fast heat conducting coating.
4th, using hot extrusion technique, the Kapton of gluing and sensitive metal film are combined into one；
5th, using mask photolithographic process, transfer replication sensitive resistance figure；
6th, using ion beam etch process, beryllium oxide and boronation magnesium stabilisation coating is etched and expose metallic nickel film；
7th, using wet-etching technology, metallic nickel film is etched into resistor stripe；
8th, using going film liquid to remove photoresist, pure water cleaning, dry；
9th, sensitive resistance resistance is adjusted using laser etching process, its zero degree resistance is reached 50 Ω (or 100 Ω, 500
Ω, 1000 Ω, 2000 Ω, 5000 Ω, 10000 Ω) untill；
10th, using chemical plating process, electroplate precious metal gold or silver on pad, the fabulous pad of solderability is formed；
11st, using soldering process, spot-welding technology, laser Welding, ultrasonic Welding welding metal lead silver palladium alloy silk,
Filamentary silver, spun gold, nickel wire；
12nd, on metal film temperature-sensitive resistor surface, the Kapton of viscose glue, Kapton thickness are covered with
Polyimide film-metallic nickel film sensitive resistance-polyimide film sandwich is formed for 0.02mm~0.05mm, formation is scratched warm-natured
Spend sensor；
13rd, sensor thickness is less than 0.1mm；Sensor has flexible feature, flexible 360 °, realizes 360 ° of cylinder dresses.
14th, flexible temperature sensor electricity is seasoned, heat is seasoned, performance test screening, produces qualified flexible TEMP
Device.
Specific embodiment 2：
1st, it is 0.02mm~0.5mm Kapton as substrate to use thickness, uniformly applies resistance to 360 DEG C of high temperature
Glue；
2nd, using high-power electron beam bombardment technique, sensitive metal nickel film is surface-treated, makes the physical of its temperature coefficient
Can be stable；
3rd, using sputtering vacuum process, sputter one layer of beryllium oxide and boronation magnesium stabilizes fast heat conducting coating.
4th, using hot extrusion technique, the Kapton of gluing and sensitive metal film are combined into one；
5th, using mask photolithographic process, transfer replication sensitive resistance figure；
6th, using ion beam etch process, beryllium oxide and boronation magnesium stabilisation coating is etched and expose metallic nickel film；
7th, using dry plasma etch technique, metal platinum film is etched into resistor stripe；
8th, using wet-etching technology, metallic nickel film is etched into resistor stripe；
9th, using going film liquid to remove photoresist, pure water cleaning, dry；
10th, sensitive resistance resistance is adjusted using laser etching process, its zero degree resistance is reached 50 Ω (or 100 Ω, 500
Ω, 1000 Ω, 2000 Ω, 5000 Ω, 10000 Ω) untill；
11st, using chemical plating process, electroplate precious metal gold or silver on pad, the fabulous pad of solderability is formed；
12nd, using soldering process, spot-welding technology, laser Welding, ultrasonic Welding welding metal lead silver palladium alloy silk,
Filamentary silver, platinum filament；
13rd, on metal film temperature-sensitive resistor surface, the Kapton of viscose glue, Kapton thickness are covered with
Polyimide film-metal platinum film sensitive resistance-polyimide film sandwich is formed for 0.02mm~0.5mm, formation is scratched warm-natured
Spend sensor；
14th, flexible temperature sensor electricity is seasoned, heat is seasoned, performance test screening, produces qualified flexible TEMP
Device.
The operation principle of flexible temperature sensor provided by the invention：
Cleaning Principle of the resistance and temperature effect as flexible temperature sensor based on metal film, measure measurand temperature
When spending, metalfilmresistor value can change with temperature change, be demarcated by normal temperature source, and certain resistance corresponds to certain
Temperature, by measuring the resistance value of flexible temperature sensor, and then converse the temperature value at this moment.
Flexible temperature sensor provided by the invention, the temperature survey in the range of applicable -55 DEG C~280 DEG C；With reference to Fig. 2
To Fig. 5, circular, square, trapezoidal, triangle, sector, loop sensor structure are can be made into as needed, and thickness can be processed into small
In 0.1mm, realize the ultrathin temperature element with flexible feature, suitable for industry, agricultural, national defence, scientific research etc. field
Demand.
The foregoing is only a preferred embodiment of the present invention, these embodiments are all based on the present invention
Different implementations under general idea, and protection scope of the present invention is not limited thereto, it is any to be familiar with the art
Technical staff the invention discloses technical scope in, the change or replacement that can readily occur in, should all cover the present invention's
Within protection domain.Therefore, protection scope of the present invention should be defined by the protection domain of claims.
Claims (5)
- A kind of 1. manufacture method of flexible temperature sensor, it is characterized in that comprising the following steps：A, with Kapton as substrate, to the uniform gluing of substrate；B, using high-power electron beam bombardment technique, sensitive metal film surface is handled；C, using hot extrusion technique, the Kapton substrate after step a is glued and the sensitive metal film through step b processing It is combined into one；D, beryllium oxide and boronation magnesium heat conducting coating are formed on the film of sensitive metal using sputtering vacuum process；E, using mask photolithographic process, transfer replication sensitive resistance figure；F, using etching technics, sensitive metal film is etched into resistor stripe；G, using going film liquid to remove photoresist, clean；H, using laser etching process, sensitive resistance resistance is adjusted, reaches standard requirement；I, using chemical plating process, the electroplate precious metal on pad, pad is formed；J, welding metal lead；K, on metal film temperature-sensitive resistor surface, upper piece Kapton of viscose glue is covered with, forms polyimide film-gold Belong to film sensitive resistance-polyimide film sandwich；L, electricity is seasoned, heat is seasoned obtains flexible temperature sensor；Beryllium oxide is formed using sputtering vacuum process and boronation magnesium stabilizes fast heat conducting coating, thermal response time is effectively improved, rings It is less than 0.2s between seasonable.
- 2. the manufacture method of flexible temperature sensor according to claim 1, it is characterized in that：Described welding metal lead Carried out using soldering process, spot-welding technology, laser Welding or ultrasonic Welding.
- 3. the manufacture method of flexible temperature sensor according to claim 1 or 2, it is characterized in that：Described sensitive metal Film is nickel film, aluminium film or platinum.
- 4. the manufacture method of flexible temperature sensor according to claim 1 or 2, it is characterized in that：Described etching technics It is the wet-etching technology of acid corrosion, or laser, ion beam, dry plasma etch technique.
- 5. the manufacture method of flexible temperature sensor according to claim 3, it is characterized in that：Described etching technics is acid The wet-etching technology of corrosion, or laser, ion beam, dry plasma etch technique.
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| CN201510623149.XA CN105241568B (en) | 2015-09-26 | 2015-09-26 | A kind of manufacture method of flexible temperature sensor |
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| CN105241568B true CN105241568B (en) | 2018-03-13 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106197718B (en) * | 2016-08-31 | 2019-08-27 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of film temperature sensor and preparation method |
| CN108106748B (en) * | 2017-11-09 | 2020-12-11 | 中国电子科技集团公司第四十八研究所 | Flexible ablation resistance film and preparation method thereof |
| CN108732212B (en) * | 2018-05-23 | 2020-12-15 | 哈尔滨工程大学 | Manufacturing method of multi-effect detection integrated gas sensor, sensor and application of sensor |
| CN109211428A (en) * | 2018-08-21 | 2019-01-15 | 北京印刷学院 | temperature sensor and preparation method |
| JP7424785B2 (en) * | 2019-10-01 | 2024-01-30 | 日東電工株式会社 | Temperature sensor film, conductive film and manufacturing method thereof |
| CN112880851B (en) * | 2021-01-17 | 2024-02-06 | 西北工业大学 | Wearable temperature sensor and preparation method thereof |
| CN114018425A (en) * | 2021-11-04 | 2022-02-08 | 辽宁佳宇电子产品有限公司 | Flexible thin film platinum resistance sensor and preparation method thereof |
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| CN88102279A (en) * | 1988-04-18 | 1988-11-30 | 华东师范大学 | Aluminium titanium film resistor temperature sensor and preparation method |
| CN2136464Y (en) * | 1992-08-27 | 1993-06-16 | 清华大学 | Foil type resistance-temp. sensitive element |
| JPH11121214A (en) * | 1997-10-14 | 1999-04-30 | Murata Mfg Co Ltd | Manufacture of temperature sensor element |
| CN101290240A (en) * | 2008-04-18 | 2008-10-22 | 杭州精诚光电子有限公司 | Flexible thin film Ni resistance sensor and method for making same |
| CN202339234U (en) * | 2011-11-08 | 2012-07-18 | 北京遥测技术研究所 | Platinum film resistor |
| CN104807554A (en) * | 2015-03-03 | 2015-07-29 | 江苏多维科技有限公司 | Coppery thermal resistor thin film temperature sensor chip and manufacturing method thereof |
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2015
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN88102279A (en) * | 1988-04-18 | 1988-11-30 | 华东师范大学 | Aluminium titanium film resistor temperature sensor and preparation method |
| CN2136464Y (en) * | 1992-08-27 | 1993-06-16 | 清华大学 | Foil type resistance-temp. sensitive element |
| JPH11121214A (en) * | 1997-10-14 | 1999-04-30 | Murata Mfg Co Ltd | Manufacture of temperature sensor element |
| CN101290240A (en) * | 2008-04-18 | 2008-10-22 | 杭州精诚光电子有限公司 | Flexible thin film Ni resistance sensor and method for making same |
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