CN105190823B - 多x射线束管 - Google Patents

多x射线束管 Download PDF

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Publication number
CN105190823B
CN105190823B CN201480008739.5A CN201480008739A CN105190823B CN 105190823 B CN105190823 B CN 105190823B CN 201480008739 A CN201480008739 A CN 201480008739A CN 105190823 B CN105190823 B CN 105190823B
Authority
CN
China
Prior art keywords
ray
liquid metal
electron
ray source
jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201480008739.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN105190823A (zh
Inventor
R·K·O·贝林
M·W·弗尔梅尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of CN105190823A publication Critical patent/CN105190823A/zh
Application granted granted Critical
Publication of CN105190823B publication Critical patent/CN105190823B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/10—Drive means for anode (target) substrate

Landscapes

  • X-Ray Techniques (AREA)
CN201480008739.5A 2013-02-13 2014-01-29 多x射线束管 Expired - Fee Related CN105190823B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361764043P 2013-02-13 2013-02-13
US61/764,043 2013-02-13
PCT/IB2014/058627 WO2014125389A1 (en) 2013-02-13 2014-01-29 Multiple x-ray beam tube

Publications (2)

Publication Number Publication Date
CN105190823A CN105190823A (zh) 2015-12-23
CN105190823B true CN105190823B (zh) 2017-11-17

Family

ID=50156815

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480008739.5A Expired - Fee Related CN105190823B (zh) 2013-02-13 2014-01-29 多x射线束管

Country Status (5)

Country Link
US (1) US9767982B2 (https=)
EP (1) EP2956954B1 (https=)
JP (1) JP6277204B2 (https=)
CN (1) CN105190823B (https=)
WO (1) WO2014125389A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103171819B (zh) 2013-04-16 2015-11-25 葛兰素史克（中国）投资有限公司 给液器
JP7171190B2 (ja) * 2014-11-11 2022-11-15 コーニンクレッカ フィリップス エヌ ヴェ 線源－検出器装置
US10117629B2 (en) * 2014-12-03 2018-11-06 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College High energy grating techniques
WO2017019782A1 (en) * 2015-07-27 2017-02-02 Rensselaer Polytechnic Institute Combination of an x-ray tube and a source grating with electron beam manipulation
US10660595B2 (en) 2016-06-16 2020-05-26 Koninklijke Philips N.V. Apparatus for x-ray imaging an object
WO2018134347A1 (en) * 2017-01-19 2018-07-26 Koninklijke Philips N.V. X-ray source arrangement for generating x-ray radiation
EP3385976A1 (en) * 2017-04-05 2018-10-10 Excillum AB Vapour monitoring
ES3023841T3 (en) 2018-05-25 2025-06-03 Micro X Ltd A device and method for applying beamforming signal processing to rf modulated x-rays
US11237483B2 (en) * 2020-06-15 2022-02-01 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for controlling droplet in extreme ultraviolet light source
EP4075474A1 (en) * 2021-04-15 2022-10-19 Excillum AB Liquid jet target x-ray source

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003303764A (ja) * 2002-04-12 2003-10-24 Gigaphoton Inc Ｌｐｐ光源装置
CN1466860A (zh) * 2000-07-28 2004-01-07 产生x-光或euv辐射的方法和装置
US20040159802A1 (en) * 2003-02-13 2004-08-19 Christian Ziener Arrangement for the generation of intensive short-wave radiation based on a plasma
CN102768931A (zh) * 2012-07-30 2012-11-07 深圳大学 用于大视场x射线相衬成像的x射线源

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
US6831963B2 (en) * 2000-10-20 2004-12-14 University Of Central Florida EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions
US6711233B2 (en) * 2000-07-28 2004-03-23 Jettec Ab Method and apparatus for generating X-ray or EUV radiation
EP1731099A1 (en) 2005-06-06 2006-12-13 Paul Scherrer Institut Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source
SE530094C2 (sv) * 2006-05-11 2008-02-26 Jettec Ab Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans
GB2441578A (en) 2006-09-08 2008-03-12 Ucl Business Plc Phase Contrast X-Ray Imaging
US7693256B2 (en) 2008-03-19 2010-04-06 C-Rad Innovation Ab Phase-contrast X-ray imaging
US7929667B1 (en) * 2008-10-02 2011-04-19 Kla-Tencor Corporation High brightness X-ray metrology
CN102651994A (zh) 2009-12-10 2012-08-29 皇家飞利浦电子股份有限公司 微分相位对比成像系统的校准
JP5944413B2 (ja) 2011-02-07 2016-07-05 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． ダイナミックレンジを増大する微分位相コントラスト撮像装置及び方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1466860A (zh) * 2000-07-28 2004-01-07 产生x-光或euv辐射的方法和装置
JP2003303764A (ja) * 2002-04-12 2003-10-24 Gigaphoton Inc Ｌｐｐ光源装置
US20040159802A1 (en) * 2003-02-13 2004-08-19 Christian Ziener Arrangement for the generation of intensive short-wave radiation based on a plasma
CN102768931A (zh) * 2012-07-30 2012-11-07 深圳大学 用于大视场x射线相衬成像的x射线源

Also Published As

Publication number Publication date
WO2014125389A1 (en) 2014-08-21
EP2956954B1 (en) 2017-03-15
CN105190823A (zh) 2015-12-23
JP2016511924A (ja) 2016-04-21
US20150380200A1 (en) 2015-12-31
JP6277204B2 (ja) 2018-02-07
US9767982B2 (en) 2017-09-19
EP2956954A1 (en) 2015-12-23

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Granted publication date: 20171117

Termination date: 20200129