CN105158955A - Display panel and manufacturing method thereof - Google Patents

Display panel and manufacturing method thereof Download PDF

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Publication number
CN105158955A
CN105158955A CN201510700489.8A CN201510700489A CN105158955A CN 105158955 A CN105158955 A CN 105158955A CN 201510700489 A CN201510700489 A CN 201510700489A CN 105158955 A CN105158955 A CN 105158955A
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CN
China
Prior art keywords
insulation course
touch control
control electrode
touching signals
active layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510700489.8A
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Chinese (zh)
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CN105158955B (en
Inventor
楼均辉
符鞠建
王丽花
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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Priority to CN201510700489.8A priority Critical patent/CN105158955B/en
Publication of CN105158955A publication Critical patent/CN105158955A/en
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/13338Input devices, e.g. touch panels
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136227Through-hole connection of the pixel electrode to the active element through an insulation layer
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134318Electrodes characterised by their geometrical arrangement having a patterned common electrode

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Geometry (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Position Input By Displaying (AREA)

Abstract

The invention discloses a display panel and a manufacturing method thereof, wherein the display panel comprises: a substrate base plate; the touch electrode blocks and the active layers are positioned on the same layer of the substrate base plate and are arranged in an insulated mode; and each touch signal line is electrically connected with one corresponding touch electrode block. According to the display panel and the manufacturing method thereof provided by the embodiment of the invention, the plurality of touch electrode blocks and the plurality of active layers are arranged on the same layer, so that the structure and the manufacturing process of the display panel are simplified, and the overall thickness of the display panel is reduced.

Description

A kind of display panel and preparation method thereof
Technical field
The embodiment of the present invention relates to field of liquid crystal, particularly relates to a kind of display panel and preparation method thereof.
Background technology
Along with the development of display technique, the time-sharing multiplex of touch control electrode and public electrode touch control electrode becomes one of technological means that in prior art, display panel is conventional.
Fig. 1 is display panel structure schematic diagram of the prior art.As shown in Figure 1, display panel comprises underlay substrate 10, underlay substrate 10 sets gradually thin film transistor (TFT) 11, first insulation course 12, pixel electrode 13, touching signals line 15, second insulation course 14 and be multiplexed with the touch control electrode layer 16 of public electrode, thin film transistor (TFT) 10 comprises grid 111, gate insulator 112, active layer 113, source electrode 114 and drain electrode 115.Wherein, touch control electrode layer 16 is positioned at top layer, is divided into multiple touch control electrode block, and each touch control electrode block is connected with a touching signals line 15.The preparation process of above-mentioned display panel comprises 8 masks, and whole manufacturing process is complicated.
Summary of the invention
The invention provides a kind of display panel and preparation method thereof, to simplify the preparation technology of display panel.
First aspect, embodiments provides a kind of display panel, and this display panel comprises:
Underlay substrate;
To be positioned on described underlay substrate with layer and multiple touch control electrode block of arranging of mutually insulated and multiple active layer, described touch control electrode block and active layer are positioned at same layer;
Many touching signals lines, the touch control electrode block that every bar touching signals line is corresponding with is electrically connected.
Second aspect, the embodiment of the present invention additionally provides a kind of method for making of display panel, and this method for making comprises:
Underlay substrate is made same layer and multiple touch control electrode block of mutually insulated setting and multiple active layer;
Form many touching signals lines, the touch control electrode block that every bar touching signals line is corresponding with is electrically connected.
Display panel that the embodiment of the present invention provides and preparation method thereof, by multiple touch control electrode block and multiple active layer are arranged on same layer, simplify structure and the manufacturing process of display panel, and reduces the integral thickness of display panel.
Accompanying drawing explanation
By reading the detailed description done non-limiting example done with reference to the following drawings, other features, objects and advantages of the present invention will become more obvious:
Fig. 1 is display panel structure schematic diagram of the prior art;
Fig. 2 a is the partial top view of a kind of display panel that the embodiment of the present invention provides;
Fig. 2 b is the sectional view along Fig. 2 a section line A1A2;
Fig. 3 is the structural representation of the another kind of display panel that the embodiment of the present invention provides;
Fig. 4 is the plan structure schematic diagram of another display panel that the embodiment of the present invention provides;
Fig. 5 is the cross-sectional view of another display panel that the embodiment of the present invention provides;
Fig. 6 is the schematic flow sheet of the method for making of a kind of display panel that the embodiment of the present invention provides;
Fig. 7 is the schematic flow sheet of the method for making of another display panel that the embodiment of the present invention provides;
8a-Fig. 8 h is the sectional view of each step counter structure of method for making that Fig. 7 provides;
Fig. 9 is the schematic flow sheet of the method for making of another display panel that the embodiment of the present invention provides;
10a-Figure 10 h is the sectional view of each step counter structure of method for making that Fig. 9 provides;
Figure 11 is the schematic flow sheet of the method for making of another display panel that the embodiment of the present invention provides;
Figure 12 a-Figure 12 h is the sectional view of each step counter structure of method for making that Figure 11 provides.
Embodiment
For further setting forth the present invention for the technological means reaching predetermined goal of the invention and take and effect, below in conjunction with accompanying drawing and preferred embodiment, to embodiment, structure, feature and effect thereof of a kind of display panel proposed according to the present invention and preparation method thereof, be described in detail as follows.
Embodiments provide a kind of display panel, this display panel comprises:
Underlay substrate;
To be positioned on described underlay substrate with layer and multiple touch control electrode block of arranging of mutually insulated and multiple active layer, described touch control electrode block and active layer are positioned at same layer;
Many touching signals lines, the touch control electrode block that every bar touching signals line is corresponding with is electrically connected.
Display panel that the embodiment of the present invention provides and preparation method thereof, by multiple touch control electrode block and multiple active layer are arranged on same layer, simplify structure and the manufacturing process of display panel, and reduces the integral thickness of display panel.
It is more than the core concept of the application, below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not making under creative work prerequisite, and the every other embodiment obtained, all belongs to the scope of protection of the invention.
Set forth a lot of detail in the following description so that fully understand the present invention, but the present invention can also adopt other to be different from other embodiments described here and implement, those skilled in the art can when without prejudice to doing similar popularization when intension of the present invention, therefore the present invention is by the restriction of following public specific embodiment.
Secondly, the present invention is described in detail in conjunction with schematic diagram, when describing the embodiment of the present invention in detail; for ease of explanation; the schematic diagram of indication device device architecture not makes partial enlargement according to general ratio, and described to attempt just example, and it should not limit the scope of protection of the invention at this.In addition, the three-dimensional space of length, width and height should be comprised in actual fabrication.
The embodiment of the present invention provides a kind of display panel.Fig. 2 a is the partial top view of a kind of display panel that the embodiment of the present invention provides.Fig. 2 b is the sectional view along Fig. 2 a section line A1A2.As shown in Figure 2 a and 2 b, display panel comprises underlay substrate 21, to be positioned on described underlay substrate 21 with layer and multiple touch control electrode block 23 of arranging of mutually insulated and multiple active layer 24, described touch control electrode block 23 and active layer 24 are positioned at same layer, many touching signals lines 22, the touch control electrode block 23 that every bar touching signals line 22 is corresponding with is electrically connected.
In the embodiment of the present invention, multiple touch control electrode block and multiple active layer are insulated with layer and arrange, the structure of display panel can be simplified on the one hand, reduce the thickness of display panel, arrange because multiple touch control electrode block and multiple active layer insulate with layer on the other hand, so can be formed in technique simultaneously, decrease manufacturing process, shorten preparation time, improve preparation efficiency, reduce preparation cost.
It should be noted that, in the present embodiment, touching signals line 22 adopts to be made with the metal material of touch control electrode 23 different layers, above-mentioned touching signals line 22 directly contacts electrical connection with corresponding touch control electrode block 23, in other embodiments of the invention, touching signals line can also select the material identical with touch control electrode block 23, uses same mask plate to be formed with described touch control electrode block 23 simultaneously, also can be made up of the metal material with described touch control electrode block 23 different layers.
On the basis of above-described embodiment, in figure 2b, described display panel also comprises: be positioned at the gate insulator 25 above described active layer 24 and grid 26 successively; Be positioned at the first insulation course 27 above the rete of described grid 26 place; Be positioned at source electrode above described first insulation course 27 28 and drain electrode 29, described source electrode 28 and draining 29 is connected with the source region of described active layer 24 and drain region respectively by the first insulation course 27 via hole; Be positioned at the second insulation course 30 above described source electrode 28 and drain electrode 29; Be positioned at the pixel electrode 31 above described second insulation course 30, described pixel electrode 31 is connected with described drain electrode 29 by the second insulation course 30 via hole; Described touching signals line 22 is positioned at below described touch control electrode block 23, and directly contacts with corresponding touch control electrode block 23.The line of touching signals described in the present embodiment 22 directly contacts with corresponding touch control electrode block 23, without the need to arranging insulation course via hole, therefore further simplify the manufacturing process of display panel.
As shown in Figure 3, touching signals line 22 can also be positioned at the top of described touch control electrode block 23, connects as long as can contact with touch control electrode block 23.Structure identical with Fig. 2 b in Fig. 3 still continues to use the Reference numeral in Fig. 2 b, and therefore not to repeat here.
Further, optionally, described active layer 24 can be transparent metal oxide semiconductor, described touch control electrode block 23 can be obtained by Cement Composite Treated by Plasma by transparent metal oxide semiconductor, such active layer 24 and touch control electrode block 23 can adopt same material to prepare in same preparation technology, and only need a masking process, because the transparent metal oxide resistance do not processed is higher, can not directly as touch control electrode block 23, therefore Cement Composite Treated by Plasma is carried out to transparent metal oxide, reduce its resistance value.If touching signals line 22 and touch control electrode block 23 are arranged with layer, described touching signals line 22 also adopts transparent metal oxide semiconductor, so use in same preparation technology after adopting same material to prepare active layer 24, touch control electrode block 23 and touching signals line 22, while Cement Composite Treated by Plasma is carried out to touch control electrode block 23, also plasma treatment is carried out to touching signals line 22, to reduce the resistance value of touching signals line 22.
Further, because touch control electrode block 23 adopts transparent metal oxide to obtain, so compared to adopting the resistance of conductive metal material to want high, therefore for reducing resistance, improve touch-control sensitivity, optionally, as shown in Figure 4, described display panel also comprises and arranging with layer and multiple network unit 32 of mutual insulating with described touching signals line 22.Fig. 4 is the plan structure schematic diagram of another display panel that the embodiment of the present invention provides.Described network unit 32 is with described touch control electrode block 23 one_to_one corresponding and directly contact, and each network unit 32 is electrically connected with a described touching signals line 22.Touching signals line 22 and a network unit 32 are electrically connected, for inputting touching signals for touch control electrode block 23.Network unit 32 is made up of many metal line of intersecting in length and breadth, network unit 32 and touching signals line 22 can use same material to complete in same manufacturing process, both ensure that network unit 32 and the compact siro spinning technology of touching signals line 22, in turn simplify manufacturing process.Being only shown in Fig. 4 comprises the network unit 32 of 3 row 3 row grids, and the number of grid that in reality, network unit 32 comprises is not limited to 3 row 3 and arranges, and can adjust as required.
Further, described display panel also comprises the crossing multi-strip scanning line of the insulation be arranged on described underlay substrate 21 and a plurality of data lines, for the aperture opening ratio avoiding the metal wire in network unit 32 to affect display panel, cause bad display, the orthogonal projection of described network unit 32 on described underlay substrate 21 and data line and the orthogonal projection of sweep trace on described underlay substrate 21 overlapping at least partly.Metal wire in the present embodiment in network unit 32 corresponds to sweep trace or data line is arranged, the corresponding one or more pixel cell of each grid in such network unit 32, described pixel cell refers to the region limited by a plurality of data lines and multi-strip scanning line insulation intersection.When each grid in network unit 32 corresponds to a pixel cell, the orthogonal projection of network unit 32 on described underlay substrate 21 is overlapping with data line and the orthogonal projection of sweep trace on described underlay substrate 21; When each grid in network unit 32 corresponds to multiple pixel cell, the orthogonal projection of network unit 32 on described underlay substrate 21 and data line and the orthogonal projection of sweep trace on described underlay substrate 21 partly overlap.
The touching signals line that arranges exemplary in above-described embodiment directly contacts electrical connection with touch control electrode block, restriction not to the embodiment of the present invention, in other embodiments, touching signals line 32 also can be arranged with touch control electrode block interlayer, and is connected by through hole.Fig. 5 is the cross-sectional view of another display panel that the embodiment of the present invention provides, as shown in Figure 5, described display panel comprises underlay substrate 21, to be positioned on described underlay substrate 21 with layer and multiple touch control electrode block 23 of arranging of mutually insulated and multiple active layer 24, described touch control electrode block 23 and active layer 24 are positioned at same layer, many touching signals lines 22, the touch control electrode block 23 that every bar touching signals line 22 is corresponding with is electrically connected; In addition, described display panel also comprises grid 26 between described underlay substrate 21 and described active layer 24 and gate insulator 25; Be positioned at the first insulation course 27 above described touch control electrode block 23 and described active layer 24; Be positioned at source electrode above described first insulation course 27 28 and drain electrode 29, described source electrode 28 and draining 29 is connected with the source region of described active layer 24 and drain region respectively by the first insulation course 27 via hole; Be positioned at the second insulation course 30 above described source electrode 28 and drain electrode 29; Be positioned at the pixel electrode 31 above described second insulation course 30, described pixel electrode 31 is connected with described drain electrode 29 by the second insulation course 30 via hole; Described touching signals line 22 is connected with corresponding touch control electrode block 23 with the second insulation course 30 through hole by the first insulation course 27.
Optionally, the active layer 24 of display panel shown in Fig. 5 does an etching barrier layer, and then carry out deposition and the etching of source electrode 28 and drain electrode 29, the damage to active layer 24 when can avoid etching source 28 and drain electrode 29 like this.
On the basis of above-described embodiment, optionally, display panel shown in Fig. 5 also comprises: arrange and multiple network unit of mutual insulating with layer with described touching signals line 22, described network unit is arranged by the first insulation course 27 and the second insulation course 30 through hole with described touch control electrode block 23 one_to_one corresponding and is electrically connected, and each network unit is electrically connected with a described touching signals line.Across the first insulation course 27 and the second insulation course 30 between touching signals line 22 and touch control electrode block 23, the present embodiment uses through hole to be connected with touch control electrode block 23 by touching signals line 22, described through hole runs through the first insulation course 27 and the second insulation course 30, by once etching formation.Concrete, described through hole is latticed, and described network unit covers described latticed through hole.Network unit and touching signals line 22 are arranged with layer, and need be connected with touch control electrode block 23, therefore are made by through hole corresponding with grid cell structure latticed, and network unit can be all connected with touch control electrode block 23 by latticed through hole.
It should be noted that, optionally, the touching signals line in the display panel described in the various embodiments described above can also be set to network, and the touching signals line of grid structure shape is conducive to reducing contact resistance further.The orthogonal projection of the touching signals line that grid structure shape is further set on described underlay substrate with data line and sweep trace the orthogonal projection on described underlay substrate overlapping at least partly, thus avoid the aperture opening ratio affecting display panel.
On the basis of above-described embodiment, optionally, described in the various embodiments described above, touch control electrode block 23 is multiplexed with public electrode block, to simplify preparation technology.
The embodiment of the present invention also provides a kind of method for making of display panel, and this method for making may be used for making the display panel described in each embodiment above-mentioned.Fig. 6 is the schematic flow sheet of the method for making of a kind of display panel that the embodiment of the present invention provides.As shown in Figure 6, the method for making of display panel at least comprises:
Step 61, on underlay substrate, make same layer and mutually insulated arrange multiple touch control electrode block and multiple active layer.
Optionally, in same manufacture craft, be formed with the thickness that active layer and touch control electrode block reduce overall display panel on the one hand, simplify manufacture craft on the other hand.
Step 62, form many touching signals lines, the touch control electrode block that every bar touching signals line is corresponding with is electrically connected.
The touch control electrode block that every bar touching signals line is corresponding with one is electrically connected, for providing touching signals for described touch control electrode block.
The embodiment of the present invention by preparing multiple touch control electrode block and multiple active layer in same processing step, and the touching signals line that preparation and touch control electrode one_to_one corresponding are arranged, simplify the preparation technology of display panel, achieve the independent control of each touch control electrode block.
Fig. 7 is the schematic flow sheet of the method for making of another display panel that the embodiment of the present invention provides.Fig. 8 a-Fig. 8 h is the sectional view of each step counter structure of method for making that Fig. 7 provides, and as shown in Figure 7, described method comprises:
Step 71, above underlay substrate, form many touching signals lines.
See Fig. 8 a, such as, form touching signals line 22 by magnetron sputtering or electron beam evaporation process film forming etching, specifically control by the shape of mask plate to touching signals line 22.
Step 72, on underlay substrate, make same layer and mutually insulated arrange multiple touch control electrode block and multiple active layer.
See Fig. 8 b, touch control electrode block 23 directly contacts with touching signals line 22.Optionally, be reduce manufacturing process, prepare with layer and mutually insulated arrange multiple touch control electrode blocks 23 and multiple active layer 24 time, use same material formed in same manufacture craft.Transparent metal oxide is adopted to prepare with layer in the present embodiment and multiple touch control electrode block 23 of mutually insulated setting and multiple active layer 24, carry out graphically by mask plate to transparent metal oxide, obtain same layer and multiple touch control electrode block 23 of mutually insulated setting and multiple active layer 24.
Step 73, above described active layer, order forms gate insulator and grid.
See Fig. 8 c, the preparation technology of gate insulator 25 and grid 26 both can adopt physical chemistry vapour deposition, can also adopt chemical vapor deposition, and this is not restricted for the embodiment of the present invention.
Step 74, by the region that gate insulator and grid cover, Cement Composite Treated by Plasma is not carried out to described touch control electrode block and active layer.
See Fig. 8 d, by the region that gate insulator and grid cover, Cement Composite Treated by Plasma is not carried out to touch control electrode block 23 and active layer, etching process is not avoided to cause damage to other parts, one deck photoresist can be prepared at the upper without the need to process, after treating Cement Composite Treated by Plasma, photoresist is removed.While carrying out Cement Composite Treated by Plasma to touch control electrode block 23, Cement Composite Treated by Plasma is also carried out in the source region of active layer 24 and drain region simultaneously, adds electric conductivity, can reduce follow-up with source electrode 28 and drain 29 contact resistance.
Step 75, above the rete of described grid place, form the first insulation course, and form the first insulation course via hole.
See Fig. 8 e, etch the first insulation course 27 form the first insulation course via hole 33 by photoetching, expose source region and the drain region of active layer 24.
Step 76, above described first insulation course, form source electrode and drain electrode, described source electrode and drain electrode are connected with the source region of described active layer and drain region respectively by the first insulation course via hole.
See Fig. 8 f, controlled the shape of source electrode 28 and drain electrode 29 by mask plate, form source electrode 28 and drain electrode 29 above the first insulation course 27, source electrode 28 and drain electrode 29 are electrically connected with the source region of active layer 24 and drain region respectively by the first insulation course via hole 33.
Step 77, above described source electrode and drain electrode, form the second insulation course, and form the second insulation course via hole.
See Fig. 8 g, above described source electrode 28 and drain electrode 29 place retes, form the second insulation course 30, particularly, etch the second insulation course 30 form the second insulation course via hole 34 by photoetching, expose described drain electrode 29.
Step 78, above described second insulation course, form pixel electrode, described pixel electrode is connected with described drain electrode by the second insulation course via hole.
See Fig. 8 h, the second insulation course via hole 34 runs through the second insulation course 30 and arrives drain electrode 29, and the pixel electrode 31 covered on the second insulation course via hole 34 is connected with drain electrode 29 by the second insulation course via hole 34.
Fig. 9 is the schematic flow sheet of the method for making of another display panel that the embodiment of the present invention provides.Figure 10 a-Figure 10 h is the sectional view of each step counter structure of method for making that Fig. 9 provides, and as shown in Figure 9, described method comprises:
Step 91, on underlay substrate, make same layer and mutually insulated arrange multiple touch control electrode block and multiple active layer.
Step 92, above described active layer, order forms gate insulator and grid.
Step 93, by the region that gate insulator and grid cover, Cement Composite Treated by Plasma is not carried out to described touch control electrode block and active layer.
Step 94, above touch control electrode block, form many touching signals lines.
Step 95, above the rete of described grid place, form the first insulation course, and form the first insulation course via hole.
Step 96, above described first insulation course, form source electrode and drain electrode, described source electrode and drain electrode are connected with the source region of described active layer and drain region respectively by the first insulation course via hole.
Step 97, above described source electrode and drain electrode, form the second insulation course, and form the second insulation course via hole.
Step 98, above described second insulation course, form pixel electrode, described pixel electrode is connected with described drain electrode by the second insulation course via hole.
The method for making similar process of display panel shown in the method for making of display panel shown in Fig. 9 and Fig. 7, just the former touching signals line is formed after touch control electrode block and active layer, the technique that manufacturing process uses is identical, therefore concrete mode of operation is not repeated herein, specifically refers to sectional view 10a-Figure 10 h of each step counter structure of method for making that Fig. 9 provides.
Figure 11 is the schematic flow sheet of the method for making of another display panel that the embodiment of the present invention provides.Figure 12 a-Figure 12 h is the sectional view of each step counter structure of method for making that Figure 11 provides, and as shown in figure 11, described method comprises:
Step 111, above underlay substrate, order forms grid and gate insulator.
See Figure 12 a, underlay substrate 21 forms grid 26, the shape of grid 26 controls by mask plate.After forming grid 26, above the rete of grid 26 place, form gate insulator 25.
Step 112, above described gate insulator, form same layer and mutually insulated arrange multiple touch control electrode block and multiple active layer.
See Figure 12 b, above gate insulator 25, form multiple touch control electrode block 23 and multiple active layer 24 simultaneously, adopt mask plate to carry out image conversion, make to leave gap between each touch control electrode block 23 and each active layer 24, realize insulation.
Step 113, Cement Composite Treated by Plasma is carried out to described touch control electrode block.
See Figure 12 c, Cement Composite Treated by Plasma is carried out to touch control electrode block 23.Preferably, exposed in the source region of touch control electrode block 23 and active layer 24 and drain region by mask, namely simultaneously to touch control electrode block 23, and Cement Composite Treated by Plasma is carried out in the source region of active layer 24 and drain region, to increase its electric conductivity, so reduce with source electrode 28 with drain 29 contact resistance.Concrete, can make to protect the part without the need to process with photoresist, avoid the infringement that plasma etching causes.
Step 114, above described touch control electrode block and described active layer, form the first insulation course, and form the first insulation course via hole.
See Figure 12 d, above touch control electrode block 23 and described active layer 24, form the first insulation course 27, etch the first insulation course 27 form the first insulation course via hole 33 by photoetching, expose source region and the drain region of active layer 24.
Step 115, above described first insulation course, form source electrode and drain electrode, described source electrode and drain electrode are connected with the source region of described active layer and drain region respectively by the first insulation course via hole.
See Figure 12 e, mask plate auxiliary under, on the first insulation course 27, form source electrode 28 and the drain electrode 29 of mutually insulated, described source electrode 28 and drain electrode 29 are made up of metal material, are connected respectively by the first insulation course via hole 33 with the source region on active layer 24 and drain region.
Step 116, above described source electrode and drain electrode, form the second insulation course, and form the second insulation course via hole, and cross the first insulation course and the second insulation course through hole.
See Figure 12 f, the second insulation course 30 is formed above source electrode 28 and drain electrode 29, etch the second insulation course 30 and form the second insulation course via hole 34 by photoetching and cross the first insulation course and the second insulation course through hole 35, wherein, second insulation course via hole 34 runs through the second insulation course 30 and arrives drain electrode 29, crosses the first insulation course and the second insulation course through hole 35 runs through the first insulation course 27 and the second insulation course 30 arrives touch control electrode block 23.
Step 117, above described second insulation course, form many touching signals lines, every bar touching signals line is connected by the touch control electrode block that the first insulation course is corresponding with the second insulation course through hole.
See Figure 12 g, 22 layers, touching signals line is formed above the second insulation course 30, because touching signals line 22 and touch control electrode block 23 one_to_one corresponding are arranged, so 22 layers, touching signals line is prepared on the second insulation course 30 directly over touch control electrode block 23, and be connected with touch control electrode block 23 with the second insulation course through hole 35 by running through the first insulation course.
Step 118, after formation many touching signals lines, above described second insulation course, form pixel electrode, described pixel electrode is connected with described drain electrode by the second insulation course via hole.
See Figure 12 h, the second insulation course 30 forms pixel electrode 31, pixel electrode 31 and touching signals line 22 interval are arranged, and to ensure that both are insulation, pixel electrode 31 covers the second insulation course via hole 34.
It should be noted that, about the detailed explanation of display panel structure, refer to the relevant explanation in display panel embodiment, do not repeat them here.
Multiple touch control electrode block and multiple active layer that the embodiment of the present invention is arranged with layer by using transparent metal oxide semiconductor to prepare in same processing step, simplify the manufacturing process of display panel, reduce the integral thickness of display panel.
Note, above are only preferred embodiment of the present invention and institute's application technology principle.Skilled person in the art will appreciate that and the invention is not restricted to specific embodiment described here, various obvious change can be carried out for a person skilled in the art, readjust and substitute and can not protection scope of the present invention be departed from.Therefore, although be described in further detail invention has been by above embodiment, the present invention is not limited only to above embodiment, when not departing from the present invention's design, can also comprise other Equivalent embodiments more, and scope of the present invention is determined by appended right.

Claims (17)

1. a display panel, is characterized in that, comprising:
Underlay substrate;
To be positioned on described underlay substrate with layer and multiple touch control electrode block of arranging of mutually insulated and multiple active layer, described touch control electrode block and active layer are positioned at same layer;
Many touching signals lines, the touch control electrode block that every bar touching signals line is corresponding with is electrically connected.
2. display panel according to claim 1, is characterized in that, described touching signals line is made up of the metal material with described touch control electrode different layers.
3. display panel according to claim 2, is characterized in that, described display panel also comprises:
Be positioned at the gate insulator above described active layer and grid successively;
Be positioned at the first insulation course above the rete of described grid place;
Be positioned at the source electrode above described first insulation course and drain electrode, described source electrode is connected with the source region of described active layer and drain region by the first insulation course via hole respectively with drain electrode;
Be positioned at the second insulation course of described source electrode and drain electrode top;
Be positioned at the pixel electrode above described second insulation course, described pixel electrode is connected with described drain electrode by the second insulation course via hole;
Described touching signals line is positioned at above or below described touch control electrode block, and directly contacts with corresponding touch control electrode block.
4. display panel according to claim 3, is characterized in that, also comprises:
Arrange and multiple network unit of mutual insulating with layer with described touching signals line, described network unit is with described touch control electrode block one_to_one corresponding and directly contact, and each network unit is electrically connected with a described touching signals line.
5. display panel according to claim 2, is characterized in that, described display panel also comprises:
Grid between described underlay substrate and described active layer and gate insulator;
Be positioned at the first insulation course above described touch control electrode block and described active layer;
Be positioned at the source electrode above described first insulation course and drain electrode, described source electrode is connected with the source region of described active layer and drain region by the first insulation course via hole respectively with drain electrode;
Be positioned at the second insulation course of described source electrode and drain electrode top;
Be positioned at the pixel electrode above described second insulation course, described pixel electrode is connected with described drain electrode by the second insulation course via hole;
Described touching signals line is connected with corresponding touch control electrode block with the second insulation course through hole by the first insulation course.
6. display panel according to claim 5, is characterized in that, also comprises:
Arrange and multiple network unit of mutual insulating with layer with described touching signals line, described network unit is arranged by the first insulation course and the second insulation course through hole with described touch control electrode block one_to_one corresponding and is electrically connected, the touching signals line electrical connection that each network unit is corresponding with respectively.
7. display panel according to claim 6, is characterized in that, described network unit covers described through hole.
8. display panel according to claim 2, is characterized in that, described touching signals line is network.
9. display panel according to claim 1, is characterized in that, described touch control electrode block is multiplexed with public electrode.
10. display panel according to claim 1, is characterized in that, described active layer is transparent metal oxide semiconductor, and described touch control electrode block is obtained by Cement Composite Treated by Plasma by transparent metal oxide semiconductor.
11. display panels according to claim 4 or 6, it is characterized in that, described display panel also comprises and is arranged on the multi-strip scanning line and a plurality of data lines that insulation on described underlay substrate intersects, the orthogonal projection of described network unit on described underlay substrate with data line and sweep trace the orthogonal projection on described underlay substrate overlapping at least partly.
The method for making of 12. 1 kinds of display panels, is characterized in that, comprising:
Underlay substrate is made same layer and multiple touch control electrode block of mutually insulated setting and multiple active layer;
Form many touching signals lines, the touch control electrode block that every bar touching signals line is corresponding with is electrically connected.
13. methods according to claim 12, is characterized in that, underlay substrate are made same layer and multiple touch control electrode block of mutually insulated setting and multiple active layer, comprising:
In same manufacture craft, transparent metal oxide semiconductor is adopted to be formed with active layer and touch control electrode block;
Cement Composite Treated by Plasma is carried out to described touch control electrode block.
14. methods according to claim 12, it is characterized in that, underlay substrate is made same layer and mutually insulated arrange multiple touch control electrode block and multiple active layer before, above underlay substrate, form many touching signals lines, every bar touching signals line directly contacts with a corresponding touch control electrode block and is electrically connected;
Underlay substrate is made same layer and mutually insulated arrange multiple touch control electrode block and multiple active layer after, also comprise:
Above described active layer, order forms gate insulator and grid;
By the region that gate insulator and grid cover, Cement Composite Treated by Plasma is not carried out to described touch control electrode block and active layer;
Above the rete of described grid place, form the first insulation course, and form the first insulation course via hole;
Above described first insulation course, form source electrode and drain electrode, described source electrode is connected with the source region of described active layer and drain region by the first insulation course via hole respectively with drain electrode;
Above described source electrode and drain electrode, form the second insulation course, and form the second insulation course via hole;
Above described second insulation course, form pixel electrode, described pixel electrode is connected with described drain electrode by the second insulation course via hole.
15. methods according to claim 12, is characterized in that, above underlay substrate, make same layer and mutually insulated arrange multiple touch control electrode block and multiple active layer before, also comprise:
Grid and gate insulator is formed above described underlay substrate;
Above underlay substrate, make same layer and mutually insulated arrange multiple touch control electrode block and multiple active layer after, also comprise:
Cement Composite Treated by Plasma is carried out to described touch control electrode block;
Above described touch control electrode block and described active layer, form the first insulation course, and form the first insulation course via hole;
Above described first insulation course, form source electrode and drain electrode, described source electrode is connected with the source region of described active layer and drain region by the first insulation course via hole respectively with drain electrode;
Above described source electrode and drain electrode, form the second insulation course, and form the second insulation course via hole, and cross the first insulation course and the second insulation course through hole;
Described formation many touching signals lines, the touch control electrode block that every bar touching signals line is corresponding with is electrically connected, and comprising:
Above described second insulation course, form many touching signals lines, every bar touching signals line is connected by the touch control electrode block that the first insulation course is corresponding with the second insulation course through hole;
After formation many touching signals lines, also comprise:
Above described second insulation course, form pixel electrode, described pixel electrode is connected with described drain electrode by the second insulation course via hole.
16. methods according to claim 12, is characterized in that, described touching signals line is made up of the metal material with described touch control electrode different layers.
17. methods according to claim 16, it is characterized in that, when the described touching signals line of formation, also comprise the multiple network unit being formed at described touching signals line and arranging with layer, described network unit arranges with described touch control electrode block one_to_one corresponding and is electrically connected, the touching signals line electrical connection that each network unit is corresponding with respectively.
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