CN105142867A - Wire saw - Google Patents
Wire saw Download PDFInfo
- Publication number
- CN105142867A CN105142867A CN201480023427.1A CN201480023427A CN105142867A CN 105142867 A CN105142867 A CN 105142867A CN 201480023427 A CN201480023427 A CN 201480023427A CN 105142867 A CN105142867 A CN 105142867A
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- China
- Prior art keywords
- cut
- line
- induction installation
- broken string
- scroll saw
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention relates to a wire saw (1), preferably a wafer cutting saw, comprising: a cutting wire (3), preferably forming a wire web, for cutting a workpiece (2), application means (6) for applying a cutting fluid to the cutting wire (3), wire breakage sensing means (8) for detecting a broken cutting wire (3), a shield (7) for shielding the wire breakage sensing means (8) from the cutting fluid coming from the application means (6), wherein the application means (6), the wire breakage sensing means (8) and the shield (7) form within the wire saw (1) a constructional unit (10).
Description
Technical field
The present invention relates to scroll saw, this scroll saw comprises:
-line of cut, is preferably formed the gauze for cut workpiece,
-bringing device, it is for being applied to line of cut by cutting liquid,
-broken string induction installation, it is for the line of cut of detection of broken,
-guard shield, it is not subject to the impact from the cutting liquid of bringing device for the protection of broken string induction installation.
Background technology
In the scroll saw adopting line and abrasive material, the wafer such as used in solar cell or semi-conductor industry cuts from blocks (also referred to as block material or ingot).Usually, abrasive suspension is in slurries (being also referred to as cutting liquid in this application), and slurries are such as supplied to gauze by means of injection apparatus.Nowadays, the wafer using the fixed-abrasive being directly attached to line of cut to cut gets more and more.This line is such as called as diamond wire.In addition, in the case of the latter, cutting liquid such as can be used for the cutting of high-quality and the object for cooling.
JP2004114249A prior art discloses a kind of scroll saw as immediate, this scroll saw have slurries supply, thread break detector and for the protection of thread break detector not by the protective device that slurries affect.Slurries supply is arranged in the top of the gauze for cut workpiece, and protective device is arranged between top gauze and bottom gauze, and thread break detector is arranged in the below of bottom gauze.Because be difficult to enter these parts, so the maintenance of these parts and replacing are very expensive and time-consuming.
Line of cut is grounded, and the conductivity detection bar being applied in voltage be positioned at and be arranged on gauze below and with gauze electric insulation.The fracture of line of cut is detected by the line of cut ruptured the caused pressure drop that to contact with test rod by detecting.Such technical scheme has some shortcomings:
When removing the protective device between otch (for clean), splashproof device (between top gauze and bottom gauze) easily and line of cut touch.Line may rupture or run out of the groove in line deflector roll.This is by the life-span of running time and line of cut of adversely affecting saw.
Thread break detector installs inconvenience for operator.Be difficult to enter and clean.Because thread break detector is coated with the separation layer of fragment, so unclean detector may cause thread break detector fault, the line therefore touched with ground can not be set up and the connection needed for ground.
The slurries supply of injection apparatus form is sprayed wide.Lacking control can cause coarse fluid flow to distribute.Therefore fluid can set up conduction stream between gauze and thread break detector, thus causes the less desirable stopping of scroll saw.
In manufacture with during safeguarding, three parts (thread break detector, slurries, splashproof device) are processed.
Nozzle being dirty is even blocked and must regularly carry out checking and clearing up.This is equally applicable to thread break detector: fluid deposition on thread break detector, make and contact resistance between breaking larger.
JP9262829A discloses a kind of scroll saw with slurries feedway.In order to reduce the generation of wafer crackle during cutting, plate is arranged on the side of slurries feedway.Plate prevents excessive slurries from arriving the workpiece that will be cut.
JP11070456A discloses a kind of scroll saw with cutting liquid nozzle, and this cutting liquid nozzle is installed along the gauze in the region between online deflector roll and workpiece path.During cutting process, cutting liquid sprays to gauze.
JP2000218501A discloses a kind of scroll saw.In order to provide the scroll saw being easy to safeguard, by pair of brackets cut-off rule deflector roll.Thus, the slurries being supplied to line row only spread to the inside of support.For arranging that the conduit of circuit or pipeline transportation is arranged between pedestal.Thus, slurries directly do not splash pipeline and circuit.
DE112008002790T5 discloses a kind of scroll saw, and this scroll saw has slurries supply and for preventing slurries from spattering moveable protective device to workpiece.This protective device can comprise the component preventing slurries from splashing of plate, tabular or bulk.
US2011048396A1 discloses a kind of scroll saw with slurries barrier plate, and this slurries barrier plate is extending on the direction of gauze.Slurries barrier plate is fixed to datum pivotly.
In prior art, the appearance of problem is due to manufacture expensive and consuming time, inspection and maintenance, particularly cleaning procedure.The layout of cutting liquid bringing device, guard shield and broken string induction installation does not allow conveniently to enter (drain process, long downtime).In addition, the quality of wafer is subject to spattering the adverse effect of insecure detectability of the thread break detector to the cutting liquid of workpiece and prior art.
The object of the invention is to solve this problem and provide a kind of scroll saw, this scroll saw allows: conveniently enter all parts (broken string induction installation, guard shield and cutting liquid bringing device), in above-mentioned any part, there will not be the line loss caused by process mistake bad and accurate fluid flow preferably on whole gauze distributes thus causes higher wafer quality.
Special in cut crystal field, cut quality is absolutely necessary.This comprises reliably cutting (applying of cutting liquid) and reliably detects the aspect of broken string (broken string induction installation).
This object is realized by scroll saw as above, and wherein, bringing device, broken string induction installation and guard shield form construction unit in scroll saw.
Three functions are attached in a unit by solution of the present invention.This allows to build closely is convenient to process with joint space-efficient parts in manufacture and clean period.The function of construction unit is as follows: utilize cutting liquid to lubricate line of cut: such as provide slurries and/or cooling to gauze and/or clean (diamond) line; The line of cut of detection of broken also prevents cutting liquid to be applied to broken string induction installation, and therefore prevents from covering induction installation and/or prevent from conducting electricity stream at bringing device and/or set up between line of cut and broken string induction installation, and all these is among a small circle.Usually, guard shield prevents cutting liquid along the block material, ingot or the central layer that cause all directions of (direct or indirect) fluid distrbution less desirable and out of control to spray to gauze and/or will be cut.
Guard shield is arranged between bringing device and broken string induction installation, that is, bringing device and broken string induction installation are arranged in the opposite side of guard shield.Therefore, the guard shield region that induction installation and cutting liquid stream (such as, being configured as spray cone or shower nozzle) extend through between bringing device with line of cut of breaking separates.
Guard shield be adapted to protect broken string induction installation by directly from bringing device and indirectly (namely via line of cut and/or line deflector roll) from the impact of the cutting liquid of bringing device.In the case of the latter, the cutting liquid from bringing device is offset and/or conveying towards broken string induction installation by line of cut and/or line deflector roll.Cutting liquid spills gauze and/or line deflector roll.
In order to protect fracture induction installation not by the impact directly from the cutting liquid of bringing device, guard shield is arranged between bringing device and broken string induction installation.In order to protect broken string induction installation by the impact indirectly from the cutting liquid of bringing device-arrange near line of cut (gauze) via line of cut and/or line deflector roll-guard shield.
The object of guard shield is the amount of the cutting liquid reduced on the direction towards broken string induction installation.The effect of guard shield is that the electrical conductivity that the line of cut making to be communicated with by cutting liquid and the Conductivity Ratio broken between induction installation are communicated with by the disconnection portion contacting the induction installation that breaks is much smaller.Although the guard shield providing complete (100%) is preferred, not necessarily.Guard shield at least provides significant difference (cutting liquid and broken string) in electrical conductivity.
Bringing device can be any device guiding cutting liquid towards line of cut, such as, with the form such as injector, shower nozzle.Cutting liquid can be for improvement of cutting process, for cooling package (preferred line of cut) and/or any fluid of preventing assembly from damaging.Cutting liquid such as can comprise the slurries with abrasive material and/or cooling liquid etc.
If broken string induction installation is made up of conductive material and forms a part for electrical contact detector, following examples are preferred.Broken string induction installation must the cutting liquid electric insulation with leaving bringing device (such as, injector head) as much as possible as a part for detector.
Broken string induction installation should be placed on electrically insulating material.Or guard shield can be made up of electrically insulating material, broken string induction installation is installed on it.
Guard shield can cover, and (inner and/or outside) has insulating materials, to prevent from forming conduction stream when cutting liquid is fallen.
Guard shield be placed as make cutting liquid (such as, injector, shower nozzle) do not create from gauze to broken string induction installation conduction stream.
Preferably, between line of cut and guard shield, only form little gap, this gap is less than the distance between line of cut and broken string induction installation.Here, guard shield is made up of insulating materials or is coated with insulating materials is particularly advantageous.Compared with broken string induction installation, guard shield extends closer to line of cut, that is, the distance between line of cut and guard shield is less than the distance between line of cut and broken string induction installation.In like fashion, the cutting liquid entered by the gap between line of cut with guard shield can not contact broken string induction installation immediately.
Guard shield preferably has wall shape structure (preferably adapting to the local shape of gauze) to be prevented as covered broken string induction installation from the cutting liquid of bringing device.
Preferably, in order to obtain construction unit closely, bringing device, broken string induction installation and guard shield towards identical line of cut portion and next-door neighbour arrange each other, most preferably, they are installed to each other.
Preferably, the same side that the bringing device of construction unit, guard shield and broken string induction installation are arranged in line of cut is formed.This allows simple structure and installment, and allows all component being removed construction unit by single operation step.' the same side at line of cut ' comprises such options: the assembly of construction unit can be arranged in inside or the outside of the loop that line of cut (net) is formed.
The feature of other alternate embodiment of the present invention is the following fact: form the bringing device of construction unit, guard shield and broken string induction installation and be arranged in the region identical, adjacent with line of cut portion and/or towards the same section of line of cut or section.Preferably, the bringing device of construction unit, guard shield and broken string induction installation next-door neighbour is formed each other.
Preferably, bringing device, guard shield and broken string induction installation are along the moving direction arranged in succession of line of cut.This allows joint space-efficient structure and provides reliable operation for all component of the construction unit relevant with line of cut.Preferably, the induction installation that breaks is arranged on the upstream of applying program along the moving direction of line of cut, and (downstream is the direction of line movement; Line of cut only moves along a direction).The anti-fluid of this layout is thrown on broken string induction installation.
' direction ' (device characterization by double-head arrow) of line of cut movement is also with pilgrim's pattern (pilgrimmode) definition, and namely line of cut is alternately mobile along contrary direction.
Preferably, bringing device, guard shield and broken string induction installation are directly adjacent arranges each other.
Preferably, form the bringing device of construction unit, guard shield and broken string induction installation to be supported in scroll saw by common supporting construction.Because all component of construction unit is installed to base construction all jointly, so production, maintenance and maintenance are all very simple.
Preferably, bringing device comprises the injection apparatus for cutting liquid being sprayed to line of cut.Injection apparatus allows towards the controllable of line of cut/gauze and uniform cutting liquid distribution.The width that injection apparatus can comprise along described gauze is arranged and utilizes cutting liquid (such as, cooling fluid or slurries (abrasive material)) to lubricate multiple nozzles of gauze.
Preferably, the induction installation that breaks is arranged on guard shield.This allows closely with firm structure.
Preferably, bringing device is arranged on guard shield.This also constitutes compact with joint space-efficient technical scheme.
Preferably, bringing device is surrounded by the housing towards line of cut opening, and wherein guard shield is formed by housing wall, and wherein preferred bringing device is arranged on housing.Housing is provide space constraint towards the cutting liquid stream of line of cut (spray cone, nozzle), and provides the guard shield of housing wall form simultaneously.This technical scheme combines these functions thus in this fashion for clarity.
Preferably, the induction installation that breaks is formed by for the conductive material of electrical contact between the line of cut of detection of broken and broken string induction installation.When induction installation is broken in contact of breaking, broken string induction installation is a part for the detector forming circuit.Guard shield prevents cutting liquid from setting up and be electrically connected between line of cut with broken string induction installation, and prevents electric current from flowing to broken thread detector via cutting liquid from line of cut/gauze.From line of cut/gauze, via cutting liquid, the resistance arrived in the stream of broken string induction installation should be more much bigger than the resistance via broken string, preferably large at least 2 times, more preferably large at least 5 times or preferably large at least 10 times.
Preferably, the induction installation that breaks is formed by the bar extended perpendicular to line of cut.Bar at least has the length corresponding with the width of gauze (gauze is perpendicular to the elongation in line of cut direction).Here, broken string can be detected in any position of whole gauze.
Preferably, construction unit is towards the line deflector roll of scroll saw.In this region, construction unit is entered easily.Wherein, the broken string inductor as broken string induction installation is usually located at the below (according to prior art) of gauze, finds that it also can the placement of abutment line deflector roll make conveniently to enter (according to a preferred embodiment of the invention).In addition, not so responsive by the line of cut portion of line guide rolls support to mechanical stress.Cutting liquid can be ejected on gauze, and in gauze, cutting liquid is applied on line deflector roll.This such as by making line match, line shifted onto on one side, make wafer not bery smooth etc. to prevent gauze weakened.In addition, because line deflector roll covers wired, so fluid can not be injected in the groove of line deflector roll.
Preferably, construction unit is releasably attached to scroll saw.Due to each assembly need not be removed separately, so inspection and maintenance is simple.Term ' dismountable ' construction unit should be understood to construction unit and can to remove completely from scroll saw and/or construction unit (relative to scroll saw) can move in scroll saw, such as, move between operating position and maintenance position.
Preferably, construction unit is arranged on movably in scroll saw and construction unit can preferably moved by means of guide or pivot between the operating position and the maintenance position of principle line of cut of line of cut.Which ensure that construction unit is advanced according to the path limited in scroll saw, thus reduce the bad probability of line loss.The stream of the definition in wire as described below sees the probability that minimizing line loss is bad.In addition, at operating position place, between construction unit and line of cut (gap), there is less distance, but at maintenance position place, the distance from line of cut to construction unit is certainly larger.
Preferably, at the maintenance position place of construction unit, the opening of housing preferably enters the direction line of cut dorsad of opening along the operator in scroll saw, at the operating position place of construction unit, the opening surface of housing is to line of cut.This makes to enter the object for safeguarding, cleaning and maintenance best, and there is not the risk damaging line of cut.
Preferably, construction unit can be rotatable, makes at inspection position or maintenance position place, and bringing device (such as, nozzle) and broken string induction installation conveniently enter and/or stretch out from scroll saw as seen or even.Similarly, prevent line of cut from damaging during safeguarding by this way.
Preferably; scroll saw has at least two construction units, each at least two construction units comprises bringing device for cutting liquid being applied to line of cut, be used for the broken string induction installation of the line of cut of detection of broken and for the protection of broken string induction installation by the guard shield from the impact of the cutting liquid of bringing device.Such as, construction unit can towards line deflector roll and other construction unit can towards the second line deflector roll, thus obtain on whole gauze evenly cutting liquid distribution.
Preferably, bringing device comprises the control device being applied to the speed of line of cut for controlling cutting liquid.Can enter from the outside of structural units and adjustment control device (such as, bolt) can be easy to.
Preferably, construction unit according to the present invention is arranged into cutting room near the access door of scroll saw.
In the alternative saying of preferred embodiment, scroll saw (such as using fixed-abrasive or slurries) has containing construction unit, and this construction unit comprises:
-for cutting liquid (cooling fluid, slurries etc.), for described cutting liquid being ejected into the injection unit on line of cut,
-broken string induction installation, it is included in the conductive material on the first electromotive force and the line of cut on the second electromotive force, and wherein, conductive material is placed to make to break contact it and the change flowed through in the broken string electric current of induction installation or its electromotive force for detecting broken string.
-for the guard shield of injection apparatus,
Wherein, broken string induction installation and injection apparatus are arranged on the opposite side of guard shield.
Guard shield prevent cutting liquid or slurries (directly or indirectly) to be ejected into gauze and anti-fluid set up from injection apparatus to broken string induction installation conduction stream.Otherwise electric current may flow to broken string inductor from gauze via medium.From gauze via cutting liquid arrive broken string induction stream path in resistance should than via broken string resistance much bigger, that is, at least 2 times greatly, preferably large 5 times or preferably large 10 times.
The feature of the present embodiment is the spatial distribution of assembly (closing up), frame for movement (the common erecting device for all component of construction unit), that is, each assembly does not have the erecting device of himself of the pedestal being installed to scroll saw.
Preferably, this scroll saw is wafer cutting line saw and the gauze of line of cut formation for ingot, block material or central layer being cut into multiple wafer.
Summary of the invention
Accompanying drawing explanation
Other embodiments of the invention are shown in accompanying drawing and claim.Reference numerals list forms a part for disclosure.Now with reference to accompanying drawing, the present invention is described in detail.In the accompanying drawings:
Fig. 1 illustrates according to scroll saw of the present invention,
Fig. 2 illustrates the scroll saw of construction unit away from Fig. 1 of line of cut pivotable,
Fig. 3 illustrates that construction unit is positioned at the details of the scroll saw at operating position place,
Fig. 4 illustrates that construction unit is positioned at the scroll saw of the Fig. 3 at maintenance position place,
Fig. 5 illustrates according to construction unit of the present invention and supporting construction thereof,
Fig. 6 illustrates the cross section of the construction unit at operating position place.
Detailed description of the invention
Fig. 1 illustrates the scroll saw 1 of wafer cast-cutting saw form, and this scroll saw comprises the line of cut 3 formed for the gauze of cut workpiece 2 (such as, ingot, block material or central layer), and workpiece movable is through gauze (vertical arrow).Supported by line deflector roll 4 and drive line of cut 3.The moving direction of line of cut is represented by arrow M.Note, for diamond wire, this line moves along both direction usually.In this case, the arrow M in Fig. 1 will point to left side and right side.According to the present invention; scroll saw 1 has construction unit 10; this construction unit comprise bringing device 6 for cutting liquid (such as, slurries, cooling fluid and/or cleaning solution) being applied to line of cut 3, for the broken string induction installation 8 of the line of cut 3 of detection of broken and for the protection of broken string induction installation 8 by the guard shield 7 from the impact of the cutting liquid of bringing device 6.
Broken string induction installation 8 is preferably placed in the upstream of guard shield 7.First, by this way, transmit cutting liquid by gauze away from induction installation 8, and secondly, broken string may be easier to touch induction device 8.If line of cut 3 runs along both direction (pilgrim's pattern), the induction installation 8 that so breaks can be arranged on the upstream and downstream of bringing device 6.In this case, each that can arrange in two guard shields, 7, two guard shields induction installation 8 that will break separates with bringing device 6.
If arrange two (or more) construction units 10, the induction installation 8 that so breaks can be arranged on not homonymy (that is, one be wherein arranged on downstream and one is wherein arranged on upstream), as shown in Figure 2.The same side placed them in as shown in Figure 1 also may be enough.One or more construction unit 10 can be set, and they need not be identical.
Form the same side that the bringing device 6 of construction unit 10, guard shield 7 and broken string induction installation 8 are arranged in described line of cut 3.
Bringing device 6, guard shield 7 and broken string induction installation 8 are along the moving direction M arranged in succession of line of cut 3.Here, guard shield 7 region that induction installation 8 and bringing device 6 or cutting liquid stream 19 (Fig. 6) extend past from bringing device 6 to gauze of breaking separates.
As shown in Figure 1, the induction installation 8 that breaks is parts of detector.Measurement mechanism 20 is electrically connected to line of cut 3 (such as via line deflector roll 4), and is electrically connected to broken string induction installation 8.Can by being measured the electrical contact that such as resistance, voltage change or electric current detect broken string and break between induction between 8 by measurement mechanism 20.
Between line the deflector roll 4 and gathering-device 5 with U-shaped profile is arranged for collecting chip (sliver of wafer) and wafer (that is, from the wafer itself that the maintenance post of attaching workpiece 2 is separated).If these large container portion (non-swarf) drop on the bottom of gauze, they will damage line deflector roll 4 and line of cut 3.
Fig. 1 illustrates the construction unit 10 of the next-door neighbour's line of cut 3 being in operating position.Fig. 2 illustrates that the one in construction unit 10 is positioned at the maintenance position separated with line of cut 3.In an illustrated embodiment, construction unit 10 is rotatably installed in scroll saw 1, is namely pivotally mounted to the pedestal of scroll saw 1.
Fig. 3 and Fig. 4 shown in stereogram according to scroll saw 1 of the present invention.Construction unit 10 also comprises electrical insulation 9, and broken string induction installation 8 is arranged on electrical insulation.Broken string induction installation 8 is made by for the conductive material of electrical contact between the line of cut 3 of detection of broken and broken string induction installation 8.In the present embodiment, the induction installation 8 that breaks is formed by the longitudinal rod extended perpendicular to line of cut 3.The length of bar at least corresponds to the width of gauze 3.Electrical insulation 9 makes other electrical component of bar and construction unit 10 insulate.
As can be seen from Fig. 3 and Fig. 4, such construction unit 10 is extending longitudinally along the width of gauze.
Other assembly 10 (such as, electrical insulation, housing etc.) of bringing device 6, guard shield 7 and break induction installation 8 and construction unit 10 is supported in scroll saw 1 by common supporting construction 11.Construction unit 10 is connected to the pedestal 14 of scroll saw 1 by common supporting construction 11.In addition, line deflector roll 4 is installed in rotation on pedestal 14.Construction unit 10 is installed to scroll saw 1 as a Whole-dismountable.In order to this object, as long as common supporting construction 11 is departed from from pedestal 14.
Construction unit 10 also comprises for receiving the cutting liquid entrance 15 of cutting liquid and being applied to the control device 16 of the speed of gauze for controlling cutting liquid.
In the embodiment of Fig. 3 and Fig. 4, construction unit 10 is arranged in scroll saw 1 movably, and construction unit 10 can be moved between the operating position (Fig. 3) of line of cut 3 and the maintenance position (Fig. 4) away from line of cut 3 close.Supporting construction 11 comprises guide 12, and this guide preferably coordinates with adjusting device 13, with the operating position of accurately adjustment structure unit 10.Guide 12 is supporting construction unit 10 slidably.
Or pivot can be used for construction unit 10 to move to maintenance position from operating position, and vice versa (schematically showing in the embodiment of Fig. 1 and Fig. 2).
Preferably, at the maintenance position place of construction unit 10, the opening of housing 18 is preferably along the direction line of cut 3 (Fig. 2) dorsad of the service port of the operator in scroll saw 1, and at the operating position place of construction unit 10, the opening surface of this housing is to line of cut 3.
Fig. 5 illustrates at operating position place towards the construction unit 10 of the side of gauze and supporting construction thereof.
Bringing device 6 comprises the multiple injection apparatus 17 for cutting liquid being ejected into line of cut 3 of form of nozzle.
Bringing device 6 is surrounded by the housing 18 towards gauze opening.Fig. 6 illustrate the opening surface of housing 18 to-at least at the operating position of construction unit 10 place-line of cut.Guard shield 7 is formed by housing 18 wall, and bringing device 6 is arranged on housing 18.
As can be seen from the sectional view of Fig. 6, broken string induction installation 8 is arranged on guard shield 7 via electrical insulation 9.
Bringing device 6 comprises the control device 16 (such as, with the form of adjustment screw) of position for controlling or regulate bringing device 6.
In another embodiment, bringing device 6 can comprise the control device being applied to the speed of line of cut 3 for controlling cutting liquid.When from the peripheral operation control device of construction unit 10, control device changes the quantity of jet hole.
Fig. 6 illustrates the gap between line of cut 3 and guard shield 7, and wherein, gap is less than the distance between line of cut 3 and broken string induction installation 8.Compared with broken string induction installation 8, guard shield 7 closely extends towards line of cut 3, that is, the distance between line of cut 3 and guard shield 7 is less than the distance between line of cut 3 and broken string induction installation 8.By this way, the cutting liquid in the gap between line of cut 3 with guard shield 7 does not directly contact the induction installation 8 that breaks.
Guard shield 7 is arranged between bringing device 6 and broken string induction installation 8, that is, bringing device 6 and broken string induction installation 8 are arranged in the opposite side of guard shield 7.Therefore, guard shield 7 will break region that induction installation 8 and cutting liquid stream 19 (such as, being configured as spray cone or shower nozzle) extend through between bringing device 6 and line of cut 3 separately.
In addition, the outlet 21 for cutting liquid can be seen in Fig. 6.This outlet 21 prevention unit 10 is full of cutting liquid.
In as can be seen from Fig. 1 to Fig. 4, construction unit 10-at its operating position place-towards the line deflector roll 4 of scroll saw 1.
Preferred scroll saw 1 has at least two construction units 10, each wherein comprises bringing device 6 for cutting liquid being applied to line of cut 3, be used for detecting the broken string induction installation 8 of the line of cut 3 broken and for the protection of broken string induction installation 8 by the guard shield 7 from the impact of the cutting liquid of bringing device 6.This allows cutting liquid more uniformly distribute towards gauze and allow more reliable burn out detection.
The present invention is not limited to shown embodiment.Supporting construction, space layout, head and other assembly can be changed within the scope of the invention.
Reference numerals list
1 scroll saw
2 workpiece
3 lines of cut
4 line deflector rolls
5 gathering-devices
6 bringing devices
7 guard shields
8 broken string induction installations
9 electrical insulations
10 construction units
11 supporting constructions
12 guides
13 adjusting devices
14 pedestals
15 fluid intakes
16 control device
17 injection apparatus
18 housings
19 cutting liquid streams
20 measurement devices
21 cutting liquid outlets
The moving direction of M line of cut 3
The width of W gauze
Claims (15)
1. a scroll saw (1), preferred wafer cast-cutting saw, it comprises:
-line of cut (3), it is preferably formed the gauze for cut workpiece (2),
-bringing device (6), it is for being applied to described line of cut (3) by cutting liquid,
-broken string induction installation (8), its line of cut for detection of broken (3),
-guard shield (7), it is not subject to the impact from the described cutting liquid of described bringing device (6) for the protection of described broken string induction installation (8),
Wherein, described bringing device (6), described broken string induction installation (8) and described guard shield (7) form construction unit (10).
2. scroll saw according to claim 1, wherein, the same side that the described bringing device (6) of described construction unit (10), described guard shield (7) and broken string induction installation (8) are arranged in described line of cut (3) is formed.
3. scroll saw according to claim 1 and 2, wherein, described broken string induction installation (8), described guard shield (7) and described bringing device (6) are along moving direction (M) arranged in succession of described line of cut (3).
4. the scroll saw according to aforementioned any one claim, wherein, form the described bringing device (6) of described construction unit (10), described guard shield (7) and described broken string induction installation (8) to be supported in described scroll saw (1) by common supporting construction (11).
5. the scroll saw according to aforementioned any one claim, wherein, between described line of cut (3) and described guard shield (7), form gap, described gap is less than the distance between described line of cut (3) and described broken string induction installation (8).
6. the scroll saw according to aforementioned any one claim, wherein, described bringing device (6) comprises the injection apparatus (17) for described cutting liquid being ejected into described line of cut (3).
7. the scroll saw according to aforementioned any one claim, wherein, described broken string induction installation (8) is installed on described guard shield (7) and/or wherein said bringing device (6) is installed on guard shield (7).
8. the scroll saw according to aforementioned any one claim, wherein, described bringing device (6) is surrounded by housing (18), at the operating position place of described construction unit (10), described housing (18) is towards described line of cut (3) opening, and wherein said guard shield (7) is formed by the wall of described housing (18), and wherein, preferably described bringing device (6) is installed on described housing (18).
9. the scroll saw according to aforementioned any one claim, wherein, described broken string induction installation (8) is formed by the conductive material for the electrical contact between the line of cut (3) of detection of broken and described broken string induction installation (8), and/or wherein, described broken string induction installation (8) is formed by the bar extended perpendicular to described line of cut (3).
10. the scroll saw according to aforementioned any one claim, wherein, described construction unit (10) is towards the line deflector roll (4) of described scroll saw (1).
11. scroll saws according to aforementioned any one claim, wherein, described construction unit (10) is releasably attached to described scroll saw (1).
12. scroll saws according to aforementioned any one claim, wherein, described construction unit (10) is arranged in described scroll saw (1) movably, and described construction unit (10) can preferably be moved between the operating position and the maintenance position away from described line of cut (3) of contiguous described line of cut (3) by means of guide (12) or pivot.
13. according to Claim 8 or scroll saw according to claim 12, wherein, at the described maintenance position place of described construction unit (10), the opening of described housing (18) is preferably along the direction described line of cut (3) dorsad of the operator's service port in described scroll saw (1), at the described operating position place of described construction unit (10), the opening surface of described housing (18) is to described line of cut (3).
14. scroll saws according to aforementioned any one claim; wherein; described scroll saw (1) has at least two construction units (10), each in described at least two construction units (10) all comprise bringing device (6) for described cutting liquid being applied to described line of cut (3), for the broken string induction installation (8) of the line of cut (3) of detection of broken and for the protection of described broken string induction installation (8) by the guard shield (7) from the impact of the described cutting liquid of described bringing device (6).
15. scroll saws according to above-mentioned any one claim, wherein, described bringing device (6) comprises the control device (16) being applied to the speed of described line of cut (3) for controlling described cutting liquid.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13002170.2 | 2013-04-24 | ||
| EP13002170 | 2013-04-24 | ||
| PCT/IB2014/000428 WO2014174350A1 (en) | 2013-04-24 | 2014-03-26 | Wire saw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105142867A true CN105142867A (en) | 2015-12-09 |
Family
ID=48190050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480023427.1A Pending CN105142867A (en) | 2013-04-24 | 2014-03-26 | Wire saw |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN105142867A (en) |
| WO (1) | WO2014174350A1 (en) |
Cited By (3)
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| CN105563670A (en) * | 2015-12-17 | 2016-05-11 | 浙江昊能光电有限公司 | Alarm device on silicon wafer slicer |
| CN108044820A (en) * | 2018-01-25 | 2018-05-18 | 湖南宇晶机器股份有限公司 | Simple and practical multi-line cutting machine broken wire protecting equipment |
| CN109414774A (en) * | 2016-06-30 | 2019-03-01 | 硅电子股份公司 | Restore the method and apparatus of the line sawing process of workpiece after accidental interruption |
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| WO2017091945A1 (en) * | 2015-11-30 | 2017-06-08 | Rhodia Operations | Wafering process for water based slurries |
| TWI695770B (en) * | 2018-11-30 | 2020-06-11 | 環球晶圓股份有限公司 | Slurry sprayer |
| CN114714525B (en) * | 2022-03-18 | 2023-09-05 | 浙江晶盛机电股份有限公司 | Parallel line detection method, parallel line detection optical device and parallel line detection system |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2014174350A1 (en) | 2014-10-30 |
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