JP2000218501A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire saw with easy maintenance. SOLUTION: Both ends of group roller 18A to (18C) are partitioned by a pair of spindle brackets 62, 62. Thereby, a slurry supplied to a wire row is scattered only to the inside of the spindle brackets 62, 62. A duct 74 for wiring or piping is provided between the spindle brackets 62, 62. Thereby, the slurry is not splashed directly to the piping and wiring and then the maintenance becomes easy.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a wire saw.
In particular, the present invention relates to a wire saw for cutting an ingot of a hard brittle material such as silicon, glass, and ceramic into many wafers.

[0002]

2. Description of the Related Art A wire saw cuts a large number of wafers simultaneously by running a wire row formed by winding a wire around a plurality of groove rollers and pressing an ingot while applying a slurry to the wire row. It is a device to do. By the way, in this wire saw, in order to prevent the cutting accuracy from being lowered due to the thermal deformation of the groove roller, cooling water is supplied to the shaft support portion of the groove roller to prevent the groove roller from being thermally deformed. The cooling water supplied to the shaft support of the groove roller is supplied to the shaft support of each groove roller from a cooling water supply device via a cooling water supply pipe.
A cooling water supply pipe for supplying the cooling water was exposed in the processing chamber. The flow rate of the cooling water supplied to the shaft support of the groove roller is controlled based on the output signal of a temperature sensor installed on the shaft support of the groove roller. The cable for the temperature sensor installed in the processing chamber was also barely wired in the processing chamber in the same manner as the cooling water supply pipe.

[0003]

For this reason, the slurry is directly applied to the cooling water supply pipe and the cable, and the replacement and the maintenance are extremely troublesome. The present invention has been made in view of such circumstances, and has as its object to provide a wire saw that is easy to maintain.

[0004]

According to the present invention, in order to achieve the above object, a wire array formed by winding a wire around a plurality of groove rollers is run, and a machining liquid is supplied to the wire array. By pressing the ingot,
In a wire saw for cutting the ingot into a plurality of wafers, an oil pan is provided below the plurality of groove rollers and collects a working fluid supplied to the wire row, and both ends of the plurality of groove rollers. And a duct formed in the oil pan and accommodating a pipe or cable to be piped or wired from one end to the other end of the groove roller.

[0005] According to the present invention, by dividing both ends of the groove roller by the partition walls, the scattering of the slurry supplied to the wire row can be stopped inside the partition walls. Also, when pipes (or cables) are piped (or wired) from one end of the groove roller to the other end, the pipes (or cables) are passed through the ducts, thereby forming pipes (or cables).
No slurry is directly applied to the, making maintenance easier.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The preferred embodiments of the wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. First, the outline of the wire saw will be described. As shown in FIG.
The wire saw 10 of the present embodiment mainly includes a wire saw main body 11 that cuts an ingot In, and a slurry supply unit 42 that supplies slurry to a cut portion of the wire saw main body 11.

The wire saw body 11 is provided with a pair of wire reels 12 (only one side is shown in FIG. 1), and the wire 14 fed from one side of the wire reel 12 has a large number of guide rollers 16, 16. Four groove rollers 1 through a wire running path formed by ...
Guided by 8A, 18B, 18C, 18D. Then, a horizontal wire row 20 is formed by being wound around the four groove rollers 18A to 18D at a constant pitch. The wire 14 forming the wire row 20 is guided by a guide reel on the other side (not shown) arranged symmetrically with respect to the wire row 20 so as to be guided by a wire reel on the other side (not shown). Then, it is wound on a wire reel on the other side.

A wire guide device 22 and a dancer roller unit 24 are provided on the wire running paths formed on both sides of the wire row 20 by the guide rollers 16, 16, respectively (only one side is shown). . The wire guiding device 22 guides the wire 14 to be unwound from the wire reel 12 at a constant pitch, and guides the wire 14 to be wound around the wire reel 12 at a constant pitch. The dancer roller unit 24
The wire 14 is wound around a dancer roller, which is movably supported up and down with a dead weight, to apply a certain tension to the wire 14.

The four groove rollers 18A to 18D
One of the groove rollers 18C and the pair of wire reels 12 are respectively provided with a motor 2
6, 28 are connected. The wire 14 wound between the pair of wire reels 12 is a motor 26,
By driving the motors 28 in synchronization with each other, the vehicle travels at a high speed. As a result, the wire array 20 travels at a high speed.

A work feed table 30 is provided above the wire row 20. The work feed table 30 is slidably provided on a vertically extending feed base 32. By driving a work feed motor 34 installed on the feed base 32, the work feed table 30 is perpendicular to the wire row 20. To go up and down. The ingot In, which is a workpiece, is mounted below the work feed table 30 in a state where the crystal orientation is aligned.

On the other hand, an oil pan 36 is provided below the wire row 20. As described later, the slurry supplied to the wire row 20 at the time of processing is collected by the oil pan 36. A recovery pipe (not shown) is connected to the oil pan 36, and the other end of the recovery pipe is connected to a slurry recovery tank 40. Therefore, the oil pan 36
The slurry collected in the tank is stored in a slurry collection tank 40 through the collection pipe.

The slurry supply unit 42 is configured by mounting a slurry tank 46, a heat exchanger 50, a supply pump 52, a flow meter 54, and the like on a movable carriage 44.
A pipe (not shown) is connected to the slurry tank 46, and the other end of the pipe is connected to the slurry collection tank 40 via a collection pump (not shown). The slurry stored in the slurry collection tank 40 is sent to the slurry tank 46 by being pumped up by the collection pump.

On the other hand, the slurry collected in the slurry tank 46 is supplied to a supply pump 52 installed in the slurry tank 46.
The liquid is sent to a slurry nozzle (not shown) installed above the wire row 20 and is ejected from the slurry nozzle toward the wire row 20. The slurry sprayed from the slurry nozzle is processed and then collected by the oil pan 36 as described above.
Then, it is returned to the slurry tank 46 through 0. That is, the slurry is circulated and supplied.

Note that the slurry stored in the slurry tank 46 is circulated and supplied to the heat exchanger 50, and is adjusted so as to be constantly at a constant temperature. In the wire saw 10 configured as described above, the ingot I
n is cut as follows. That is, first, the ingot In is mounted on the work feed table 30. Next, the motors 26 and 28 are driven synchronously to reciprocate the wire 14 at high speed. Thereby, the wire row 20 reciprocates at high speed. Next, the work feed table 30 is lowered toward the wire row 20. At the same time, the supply pump 52 is driven to inject a slurry from the slurry nozzle (not shown) toward the wire row 20. As a result, the ingot In is pressed against the high-speed running wire row 20 and is simultaneously cut into a number of wafers by the lapping action of the slurry supplied to the wire row 20.

Next, the configuration of the main part of the wire saw according to the present invention will be described in detail. As shown in FIG. 2, each of the four groove rollers 18A to 18D is rotatably supported with both ends sandwiched between a pair of spindles. The pair of spindles are rotatably supported by a pair of bearing units 60A to 60D, respectively, and the bearing units 60A to 60D are supported by a pair of spindle brackets (partition walls) 62, 62.

The spindle brackets 62, 62 are vertically erected on the oil pan 36 at a predetermined interval. Both ends of the groove rollers 18A to 18D are separated from the outer space by the spindle brackets 62, 62, thereby preventing the slurry supplied to the wire row 20 from scattering into the outer space. As shown in FIG. 3, the oil pan 36 is formed in a rectangular box shape, and has a slurry recovery port 64 at the center thereof. On both sides of the collection port 64, inclined plates 66, 66 which are inclined toward the collection port 64 are attached. The slurry dropped from the wire row 20 is applied to the inclined plates 66, 6
6, flows into the collection port 64, and is collected in the slurry collection tank 40 via the collection pipe 68.

Here, as shown in FIG.
6 and 66 are formed with a predetermined length from the recovery port 64. For this reason, grooves 70 are provided between both side surfaces 36A, 36A of the oil pan 36 on both sides of the inclined plates 66, 66.
70 is formed. Openable and closable covers 72, 72 are attached to the upper openings of the grooves 70, 70. By attaching the covers 72, 72, the grooves 70, 70 are opened.
Are ducts 74, 74 whose both ends are open. Since the upper portions of the ducts 74, 74 are shielded by the covers 72, 72, even if the slurry supplied to the wire row 20 drops, the inside is not contaminated.

Since the groove rollers 18A to 18D supported as described above rotate at a high speed during cutting, the bearing units 60A to 60D, which are support portions thereof, generate heat and become high in temperature. And this bearing unit 60A
The heat generation of ~ 60D causes thermal deformation on the groove rollers 18A ~ 18D, which causes a reduction in cutting accuracy. Therefore, cooling water is supplied to each of the bearing units 60A to 60D to prevent the groove rollers from being thermally deformed.

The cooling water supplied to the bearing units 60A to 60D is supplied from a cooling water circulating supply device (not shown) to the bearing units 60A to 60D via cooling water supply pipes. From the lower side into the processing chamber. Similarly, each bearing unit 60
Cables for temperature sensors installed in A to 60D, air piping for air purging, and the like are also guided into the processing chamber from below the oil pan 36. The oil pan 36 has inlet portions 76A to 76D for guiding these pipes and cables from below the oil pan 36 to the space above the oil pan 36 at four positions outside the mounting positions of the spindle brackets 62, 62. Is formed.

The entrances 76A to 76D are each formed in a rectangular box shape, and lids 78A to 78D that can be opened and closed are attached to the upper openings. Lids 78A-7
As shown in FIG. 5, 8D is screwed to the upper ends of the inlets 76A to 76D via a rubber packing 80.
Thereby, the inside of the inlet portions 76A to 76D is sealed. The pipe 82 and the cable 84 introduced from the lower side of the oil pan 36 to the entrances 76A to 76D are connected to the lid 78A.
７８78D are introduced into the space above the oil pan 36 via sealable joints and connectors such as a partition reducer 86, a waterproof connector 88, and the like.

As described above, the inlets 76A to 76D for pipes and cables are formed at four locations on the oil pan 36. One inlet 76A to 76D allows the same kind of pipe group or cable from one inlet 76A to 76D. It is preferable to perform piping or wiring so that the group is taken out in terms of maintenance and handling. Therefore, wiring or piping is performed so that the same type of pipe group or cable group is taken out from one of the inlet portions 76A to 76D. The pipe or cable taken out is guided from one end of the groove rollers 18A to 18D to the other end, that is, the groove rollers 18A to 1D.
When leading to the space on the opposite side across 8D, as shown in FIG. 6, it is guided through the inside of a duct 74 formed in the oil pan 36.

For example, cooling water is supplied to each bearing unit 60A.
All the cooling water supply pipes for supplying to
Let's say you take it out of A. In this case, the cooling water supply pipe taken out from the inlet 76A is connected to the groove rollers 18A-1A.
When piping to the bearing units 60 </ b> A to 60 </ b> D on the opposite side across 8 </ b> D, piping is performed through the duct 74. Also,
For example, it is assumed that all the cables of the temperature sensors installed in each of the bearing units 60A to 60D are taken out from the inlet 76B. In this case as well, the cable of the temperature sensor taken out from the entrance 76B is connected to the groove rollers 18A to 18A in the same manner as described above.
When piping to the bearing units 60 </ b> A to 60 </ b> D on the opposite side across D, piping is performed through the duct 74.

By laying or laying pipes and cables in this way, contamination of the pipes and cables by the slurry is prevented. That is, as described above, both ends of the groove rollers 18A to 18D are partitioned by the spindle brackets 62,62. Therefore, the scattering of the slurry is caused by the spindle bracket 6
It is stopped only inside 2, 62 and does not fly outside. Since the inlets 76A to 76D are provided outside the spindle brackets 62, 62, the slurry is not directly applied. Therefore, the slurry is not directly applied to the pipes and cables taken out from the inlets 76A to 76D.

Also, when a pipe or a cable is guided from one end of the groove rollers 18A to 18D to the other end, since the pipe or cable is guided through the ducts 74, 74 formed in the oil pan 36, the slurry is not directly applied. Absent. Therefore, according to the wire saw of the present embodiment, piping or wiring can be performed such that slurry does not directly fall on pipes and cables. This allows the operator to easily perform maintenance work and replacement work during maintenance, replacement of pipes and the like.

Although the ducts 74 are formed integrally with the oil pan 36 in the wire saw of this embodiment, they may be formed independently of the oil pan 36. Note that, as in the present embodiment, the ducts 74, 74 are formed integrally with the oil pan 36 by effectively utilizing the empty space of the oil pan 36, so that the entire apparatus can be made compact. Also, as in the present embodiment, the duct 7
By forming the openings 4 and 74 so that they can be opened and closed, piping and wiring can be easily performed.

Further, in the present embodiment, an example has been described in which the cooling water supply pipe, the air pipe for air purging, and the cable for the temperature sensor are piped or wired. However, the present invention is not limited to this, and can be applied to all pipes or cables guided from the lower side of the oil pan 36 to the space above the oil pan 36.

[0027]

As described above, according to the wire saw according to the present invention, by dividing both ends of the groove roller with the partition walls, the slurry supplied to the wire row scatters only inside the partition walls. In addition, by arranging the pipe from one end of the groove roller to the other end via the duct, slurry is not directly applied to the pipe, and maintenance is facilitated.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the entire configuration of a wire saw.

FIG. 2 is a side view showing a configuration of an oil pan.

FIG. 3 is a perspective view showing a configuration of an oil pan.

FIG. 4 is a front sectional view showing a configuration of an oil pan.

FIG. 5 is a side sectional view showing a configuration of an entrance portion.

FIG. 6 is a perspective view showing a configuration of a main part of an oil pan.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Wire saw 14 ... Wire 18A-18D ... Groove roller 20 ... Wire row 36 ... Oil pan 60A-60D ... Bearing unit 62 ... Spindle bracket (partition) 70 ... Groove 72 ... Cover 74 ... Duct 76A-76D ... Inlet part 78A- 78B ... lid

Claims (3)

[Claims] 1. A wire array formed by winding a wire around a plurality of groove rollers is run, and an ingot is pressed while supplying a processing liquid to the wire array.
In a wire saw that cuts the ingot into a plurality of wafers, an oil pan is provided below the plurality of groove rollers and collects a working fluid supplied to the wire row, and both ends of the plurality of groove rollers. And a duct formed in the oil pan and accommodating a pipe or cable to be piped or wired from one end to the other end of the groove roller. 2. The duct according to claim 1, wherein the duct includes a groove formed in the oil pan, and an openable and closable cover member for shielding an upper opening of the groove. Wire saw. 3. The wire saw according to claim 1, wherein an inlet for guiding the pipe or cable into a space above the oil pan is formed outside a partition wall of the oil pan.