TWI695770B - Slurry sprayer - Google Patents

Abstract

A slurry sprayer includes a main body, a covering plate and a plurality of nozzles. The main body includes a tube wall, two end walls, a plurality of output holes and an input hole, wherein the tube wall and the two end walls are connected to form a trough and an opening, and the output holes are positioned on the tube wall, and arranged along a longitudinal direction of the main body. The input hole is positioned on the tube wall, and communicates with the output holes via the trough. The covering plate is detachably connected to the main body, and correspondingly covers the opening. The nozzles are disposed on the tube wall, and each of the nozzles is individually corresponding to one of the output holes.

Description

Slurry tube structure

The invention relates to a slurry tube structure; in particular, it refers to a detachable slurry tube structure.

In the general wafer manufacturing process, the crystal column is cut into a piece of wafer using diamond wire for subsequent electronic chip manufacturing process and solar wafer manufacturing process. When the diamond wire is used to cut the crystal pillar, the diamond wire will generate heat to the friction of the wafer and increase the temperature of the wafer. Therefore, it is necessary to spray the water column to cool the wafer. However, most of the traditional slurry tubes used for cooling are molded in an integrated manner. When the slurry tubes need to be cleaned inside the tube body, it will be difficult to completely remove impurities and dirt.

On the other hand, when the diamond wire is used to cut the crystal column, the diamond wire is wound on the main wheel and moves in synchronization with the main wheel. Under long-term use, the diamond wire will wear the surface of the main wheel, and the surface of the main wheel needs to be polished and smoothed before it can be used; therefore, the diameter of the main wheel will become smaller and smaller due to wear, making the diamond wire and crystal column Touched down. However, the bracket of the traditional slurry tube is fixed in the crystal column cutting machine by welding, and the position of the slurry tube cannot be adjusted, so when the diameter of the main wheel is worn, the contact position of the diamond wire and the crystal column is reduced At this time, the slurry tube cannot adjust its position accordingly, so that the conventional slurry tube cannot provide a better cooling effect for the crystal column cutting process.

Therefore, the traditional slurry tube structure or the traditional slurry tube bracket still has existing technical problems, which need to be overcome and solved.

In view of this, the object of the present invention is to provide a slurry pipe structure, which can facilitate the cleaning of the body of the slurry pipe structure by disassembling the cover plate.

In order to achieve the above object, a slurry pipe structure provided by the present invention includes a body, a cover plate and a plurality of nozzles. The body includes a pipe wall, two end walls, a plurality of discharge ports and a feed port, wherein the pipe wall and the two end walls form a long groove and an opening, and the discharge ports are along a side of the body It is arranged on the wall of the tube in the longitudinal direction; the feed port is arranged on the wall of the tube, and the feed port is connected to the discharge ports through the long groove. The cover plate is detachably connected to the body and correspondingly covers the opening. The nozzles are arranged on the wall of the tube, and each of the nozzles corresponds to a discharge port.

Another object of the present invention is to provide a slurry tube holder that can adjust the position and tilt angle of the slurry tube body to provide better cooling effect in the crystal column cutting process.

In order to achieve the above object, a slurry tube holder provided by the present invention includes a first frame body and a second frame body. The first rack system is correspondingly connected to a first end of a slurry tube. The first rack body includes a first fixed seat, a first moving member, a second moving member, and a positioning seat, wherein the first A moving element is detachably connected to the first fixing base, and the first moving element can be displaced in a first direction relative to the first fixing base; the second moving element is detachably connected to the first movement And the second moving part can be displaced in a second direction relative to the first moving part; the positioning seat is connected to the second moving part and can rotate relative to the second moving part, the slurry tube The first end is disposed on the positioning seat. The second rack system is correspondingly connected to a second end of the slurry tube. The second rack body includes a second fixed seat, a third moving member and a fourth moving member, wherein the third moving member is a Detachably connected to the second fixed base, and the third movable member can be displaced relative to the second fixed base along one of the first direction and the second direction; the fourth movable member is detachably connected to The third moving part, and the fourth moving part can be displaced relative to the third moving part along the other of the first direction and the second direction; the fourth moving part includes a support seat, the slurry tube The second end is disposed on the support base.

The effect of the present invention is that the slurry tube structure has a detachable cover plate, and compared with the traditional slurry tube structure, it can facilitate the thorough cleaning of the dead angle in the slurry tube structure. In addition, the slurry tube holder provided by the embodiment of the present invention has multiple adjustment mechanisms, so that the slurry tube holder can adjust the position and tilt angle of the slurry tube structure in accordance with the contact position of the diamond wire and the crystal column to cut the crystal column Provide better cooling effect in the process.

In order to explain the present invention more clearly, a preferred embodiment is described in detail below with reference to the drawings. Please refer to FIGS. 1 to 6, which is a slurry tube structure 1 according to a preferred embodiment of the present invention, which includes a body 100, a cover plate 110 and a plurality of nozzles 170. The body 100 includes a tube wall 120, two end walls 140, a plurality of discharge ports 160 and two feed ports 180, wherein the tube wall 120 extends along the longitudinal direction AX of the body 100, and the two end walls 140 are respectively located on the tube wall 120 And the tube wall 120 and the two end walls 140 form a long groove 122 and an opening 124.

The discharge port 160 is disposed on the tube wall 120 along the longitudinal direction AX of the body 100, and each discharge port 160 penetrates the tube wall 120 and communicates with the long groove 122. The two feed ports 180 are provided on the pipe wall 120 along the longitudinal direction AX of the body 100, and each feed port 180 penetrates the pipe wall 120 and communicates with the long slot 122; with the long slot 122, the feed port 180 and the outlet The feed ports 160 communicate with each other. 2 and 7a, the tube wall 120 includes a first area 123 and a second area 125 adjacent to the first area 123, the discharge port 160 is provided in the first area 123, and the feed port 180 is provided In the second area 125; the feed port 180 defines a projection position in the first area 123, and the projection position is between two adjacent discharge ports 160. In this embodiment, in order to equalize the pressure of each outlet 160, the two inlets 180 are arranged symmetrically, but this is not a limitation. In practice, the number of feed ports 180 can be one or more, and it can be seen that the pressure equalization demand of the feed port 160 depends; in other words, if the pressure equalization of each feed port 160 is not required, a single feed can be used Feeding through port 180, but if the pressure of each discharge port 160 is required to be equalized, it can be fed from multiple feed ports 180 as in this embodiment. In the embodiment of the present invention, each feed port 180 is connected to a feed pipe P.

Please refer to FIGS. 2 to 4. The cover 110 is detachably connected to the body 100 and covers the opening 124 correspondingly. The cover plate 110 has a plurality of cleaning holes 112, and each cleaning hole 112 corresponds to a discharge port 160, and each cleaning hole 112 communicates with the corresponding discharge port 160 through the long slot 122. As shown in FIGS. 4 and 7b, at least a part of the projection of the cleaning hole 112 on the first area 123 overlaps the discharge port 160, so that the cleaning hole 112 can be extended into the cleaning equipment C (such as a syringe) for the discharge port 160 for thorough cleaning. In the embodiment of the present invention, a seal ring (not shown) may be included between the cover plate 110 and the body 100 to enhance the sealing effect between the cover plate 110 and the body 100 and prevent liquid from flowing between the cover plate 110 and the body 100 The gap between them leaks.

In addition, the cover plate 110 has a plurality of plugs 116, and each plug 116 is detachably and correspondingly disposed in a cleaning hole 112. Since the cover plate 110 has a plurality of cleaning holes 112, there is no need to remove the cover plate 110 when cleaning the discharge port 160 separately, and only need to remove the hole plug 116 corresponding to the discharge port 160 to use the cleaning equipment C. Thoroughly clean the designated outlet 160.

Please refer to FIG. 5 to FIG. 7b, the nozzle 170 is disposed on the pipe wall 120, wherein each nozzle 170 corresponds to a discharge port 160 respectively. In this embodiment, the nozzle 170 is detachably connected to the corresponding discharge port 160 on the tube wall 120. The nozzle 170 has a channel 172 and a spraying end 174. One end of the channel 172 communicates with the discharge port 160, and the other end thereof communicates with the groove 175 of the spraying end 174. It is worth mentioning that the extending direction of the channel 172 is not parallel to the extending direction of the groove 175; in this embodiment, the extending direction of the channel 172 is perpendicular to the extending direction of the groove 175. In this embodiment, the channel 172 of the nozzle 170 and the groove 175 of the spray end 174 can also be cleaned by the cleaning equipment C; in addition, since the nozzle 170 can be detached from the body 100, the nozzle 170 can be placed in the ultrasonic oscillator The channel 172 and other dead corners are cleaned.

Please refer to FIG. 8 to FIG. 10, the slurry tube adjusting frame of the embodiment of the present invention includes a first frame body 220 and a second frame body 240, wherein the first frame body 220 is correspondingly connected to the first end of the slurry tube body 100 The second frame body 240 is connected to the second end 150 of the slurry tube body 100 correspondingly.

The first frame 220 includes a first fixed base 222, a first moving member 224, a second moving member 226 and a positioning seat 228. The first moving member 224 is detachably connected to the first fixing base 222, and the first moving member 224 can be displaced relative to the first fixing base 222 in the first direction D1. In the embodiment of the present invention, the first fixing base 222 and the first moving member 224 are adjusted relative to each other by the first adjusting mechanism 223, and the first adjusting mechanism 223 may be, for example, a combination of a lock lever and a slotted hole or A combination of a screw or nut, but not limited to this.

The second moving member 226 is detachably connected to the first moving member 224, and the second moving member 226 can be displaced by D2 relative to the first moving member 224 in the second direction; in the embodiment of the present invention, the first direction D1 and the The two directions D2 are perpendicular to each other. In detail, the first direction D1 is a lateral direction, the second direction D2 is a longitudinal direction, and the first direction D1 and the second direction D2 are perpendicular to the longitudinal direction AX of the slurry tube body 100. In practice, the first moving member 224 can be displaced relative to the first fixing base 222 in the second direction D2, and the second moving member 226 can be displaced relative to the first moving member 224 in the first direction D1. In the embodiment of the present invention, the second moving member 226 and the first moving member 224 are adjusted relative to each other by the second adjusting mechanism 225, and the second adjusting mechanism 225 may be, for example, a combination of a lock lever and an elongated hole or A combination of a screw or nut, but not limited to this.

The positioning seat 228 is connected to the second moving member 226 and can rotate relative to the second moving member 226. The first end 130 of the slurry tube body 100 is disposed on the positioning seat 228. In the embodiment of the present invention, the positioning seat 228 and the second moving member 226 are rotated by the fifth adjusting mechanism 227 relative to the second moving member 226 in the rotation direction R to adjust the positioning seat 228 in the second The inclination angle on the moving member 226, and the fifth adjustment mechanism 227 may be, for example, a combination of a lock lever and a slot, or a combination of a bolt and a nut, but not limited thereto.

The positioning seat 228 has a non-circular accommodating seat body, and the first end 130 has a non-circular contour, and the non-circular outline and the non-circular accommodating seat body cooperate with each other so that the two cannot rotate relative to each other. In the embodiment of the present invention, the positioning seat 228 is a V-shaped seat body, and the first end 130 has a rectangular outline, and the rectangular outline can cooperate with the V-shaped seat body. In addition, the first frame body 220 includes a stopper 229. When the first end 130 is placed on the positioning seat 228, the stopper 229 resists the first end 130, so that the first end 130 It is fixed between the stopper 229 and the positioning seat 228. The blocking member 229 includes a pivot 2291 and a locking member 2292. The pivot 2291 makes the blocking member 229 pivotally connected to the second moving member 226, so that the blocking member 229 can be lifted upward; the locking member 2292 is used to block The member 229 can be locked on the second moving member 226 so that the first end 130 can be fixed between the stopper 229 and the positioning seat 228. In another embodiment of the present invention, the positioning seat 228 has a groove, the first end 130 is a round rod, the round rod is placed in the groove, and the round rod and the groove are locked by a locking mechanism (not (Shown) connection, so that the round rod and the groove can be locked or rotated relative to each other.

The second frame 240 includes a second fixed seat 242, a third moving member 244 and a fourth moving member 246. The third moving member 244 is detachably connected to the second fixing base 242, and the third moving member 244 can be displaced relative to the second fixing base 242 in the first direction D1; in the embodiment of the present invention, the second fixing base 242 is The third moving member 244 adjusts the relative positions of each other by the third adjusting mechanism 243. The third adjusting mechanism 243 may be, for example, a combination of a lock rod and a slot, or a combination of a screw or a nut, but not limited thereto.

The fourth moving member 246 can be detachably connected to the third moving member 244, and the fourth moving member 246 can be displaced relative to the third moving member 244 in the second direction D2; in practice, the third moving member 244 can be relative to the second The fixing seat 242 is displaced along the second direction D2, and the fourth moving member 246 can be displaced relative to the third moving member 244 along the first direction D1. In the embodiment of the present invention, the third moving member 244 and the fourth moving member 246 are adjusted relative to each other by the fourth adjusting mechanism 245, and the fourth adjusting mechanism 245 may be, for example, a combination of a lock lever and an elongated hole or A combination of a screw or nut, but not limited to this.

The fourth moving member 246 includes a support base 2461, and the second end 150 of the slurry tube body 100 is disposed on the support base 2461. In this embodiment, the positioning seat 228 and the supporting seat 2461 are provided corresponding to each other. The support base 2461 has a groove, and the second end 150 is a round bar. The round bar is placed in the groove so that the round bar can rotate relative to the groove; thereby, when the positioning base 228 rotates, the first end 130 is adjusted When the inclination angle is 2°, the second end 150 can rotate relative to the support base 2461 simultaneously.

With the embodiment of the present invention, the slurry tube structure includes a detachable cover plate to improve the cleaning efficiency of the slurry tube structure, and can also be thoroughly cleaned for the dead corners in the slurry tube structure. In addition, the slurry tube holder provided by the embodiment of the present invention has multiple adjustment mechanisms, so that the slurry tube holder can adjust the position and tilt angle of the slurry tube structure in accordance with the contact position of the diamond wire and the crystal column to cut the crystal column Provide better cooling effect in the process.

The above is only the preferred and feasible embodiments of the present invention, and any equivalent changes in applying the description of the present invention and the scope of patent application should be included in the patent scope of the present invention.

[this invention] 1: slurry tube structure 100: Ontology 120: pipe wall 140: end wall 160: Outlet 180: feed port 122: Long slot 124: opening 123: First area 125: Second area 130: first end 150: second end 110: cover 112: Clean the hole 116: Hole plug 170: nozzle 172: channel 174: spray side 175: groove 220: first frame 222: First fixed seat 224: The first moving piece 226: Second moving piece 228: Positioning seat 223: The first adjustment mechanism 225: Second adjustment mechanism 227: Fifth adjustment mechanism 229: Stopper 2291: Pivot 2292: Lock firmware 240: second frame 242: Second fixed seat 244: Third moving piece 246: Fourth mobile 243: Third adjustment mechanism 245: Fourth adjustment mechanism 2461: Support AX: Long direction C: Cleaning equipment D1: First direction D2: Second direction P: feed tube R: direction of rotation

Fig. 1 is a top view of a slurry pipe structure according to an embodiment of the present invention, wherein the position of a long groove and a feed port are indicated by broken lines; Fig. 2 is a side view of a slurry pipe structure according to an embodiment of the present invention, wherein a long line is indicated by a dotted line 3. The position of the discharge port and the cleaning hole, and the cover plate is separated from the body; FIG. 4 is another bottom view of the slurry pipe structure according to an embodiment of the present invention, in which the positions of the long groove, the outlet and the inlet are indicated by dotted lines, and the cover plate is combined with the body; FIG. 5 is an embodiment of the present invention Another side view of the slurry tube structure, which shows the angle viewed from the first end to the second end; FIG. 6 is still another side view of the slurry tube structure of the embodiment of the invention, which is shown Viewed from the second end to the first end; Figure 7a is a cross-sectional view of the slurry pipe structure of the embodiment of the present invention; Figure 7b is another cross-sectional view of the slurry pipe structure of the embodiment of the present invention; Figure 8 is The top view of the slurry tube structure and slurry tube bracket combination of the embodiment of the invention; FIG. 9 is a cross-sectional view of FIG. 8, which is drawn according to section line 9-9; FIG. 10 is a cross-sectional view of FIG. 8, which is based on section line 10 -10 is shown.

1: slurry tube structure

100: Ontology

160: Outlet

180: feed port

130: first end

150: second end

124: opening

110: cover

112: Clean the hole

Claims (8)

A slurry pipe structure includes: a body including a pipe wall, two end walls, a plurality of discharge ports and a feed port, wherein the pipe wall and the two end walls form a long groove and an opening, and these The discharge port is provided on the pipe wall along a long direction of the body; the feed port is provided on the pipe wall, and the feed port is connected to the discharge ports through the long groove; a cover plate is removable It is connected to the body off the ground and corresponds to cover the opening; and a plurality of nozzles are provided on the wall of the tube, wherein each of the nozzles corresponds to a discharge port. The slurry pipe structure according to claim 1, wherein the nozzle is detachably connected to the pipe wall. The slurry pipe structure according to claim 1, wherein the nozzle has a channel and a spraying end, one end of the channel is connected to the discharge port, and the other end is connected to a groove of the spraying end, and the extension of the channel The direction is not parallel to the extending direction of the groove. The slurry pipe structure according to claim 3, wherein the extending direction of the channel is perpendicular to the extending direction of the groove. The slurry pipe structure according to claim 1, wherein the cover plate has a plurality of cleaning holes and a plurality of hole plugs, each of the cleaning holes corresponds to a discharge port, and each of the cleaning holes penetrates The long slot communicates with the corresponding discharge port, and each of the hole plugs is detachably and correspondingly disposed in a cleaning hole. The slurry pipe structure according to claim 5, wherein the passages of each cleaning hole, the discharge port corresponding to the cleaning hole, and the nozzle corresponding to the discharge port are in a straight line. The slurry pipe structure according to claim 1, wherein the pipe wall includes a first area and a second area adjacent to the first area, the discharge openings are provided in the first area, and The feed port is provided in the second area. The slurry pipe structure according to claim 7, wherein the feed port defines a projection position in the first area, and the projection position is between two adjacent discharge ports.

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