TWM512458U - Filtering nozzle and cutting fluid filtering jet device of WEDM - Google Patents

Filtering nozzle and cutting fluid filtering jet device of WEDM Download PDF

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Publication number
TWM512458U
TWM512458U TW104214406U TW104214406U TWM512458U TW M512458 U TWM512458 U TW M512458U TW 104214406 U TW104214406 U TW 104214406U TW 104214406 U TW104214406 U TW 104214406U TW M512458 U TWM512458 U TW M512458U
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Taiwan
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nozzle
filter
axis
jet device
nozzles
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TW104214406U
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Chinese (zh)
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Jung-Chia Hsieh
Yu-Che Yang
Fu-Ti Lin
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Green Energy Technology Inc
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Priority to TW104214406U priority Critical patent/TWM512458U/en
Priority to CN201520832337.9U priority patent/CN205112122U/en
Publication of TWM512458U publication Critical patent/TWM512458U/en

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Filtration Of Liquid (AREA)

Abstract

A filtering nozzle adapted to be disposed at a WEDM, filtering a cutting fluid and jetting the cutting fluid to the WEDM is provided. The filtering nozzle includes a nozzle body and a 3D filter. The nozzle body includes a plurality of nozzles. The 3D filter is disposed on the nozzle body. A cutting fluid filtering jet device of WEDM having the filtering nozzle is further provided.

Description

過濾噴頭及線切割機的切割液過濾噴流裝置Cutting nozzle and wire cutting machine cutting liquid filtering jet device

本新型創作是有關於一種過濾噴頭及過濾噴流裝置,且特別是有關於一種適於過濾切割液並將切割液噴流至線切割機的過濾噴頭及線切割機的切割液過濾噴流裝置。The present invention relates to a filter nozzle and a filter jet device, and more particularly to a filter head filter jet spray device suitable for filtering a cutting liquid and spraying the cutting liquid to a filter head of a wire cutter and a wire cutter.

隨著環保意識抬頭,節能減碳的概念逐漸受眾人所重視,再生能源的開發與利用成為世界各國積極投入發展的重點。再生能源當中,由於太陽光隨處可得,且不像其他能源(如:石化能源、核能)一般會對地球產生污染,因此太陽能與可將太陽光轉換成電能的各種裝置是目前看好的明星產業。With the rise of environmental awareness, the concept of energy conservation and carbon reduction has gradually attracted the attention of the audience. The development and utilization of renewable energy has become the focus of active development in all countries of the world. Among the renewable energy sources, because solar energy is available everywhere, and unlike other energy sources (such as petrochemical energy and nuclear energy), it will generally pollute the earth. Therefore, solar energy and various devices that can convert sunlight into electric energy are currently the star industry. .

在太陽能晶片的製程中,長條型的晶棒會在晶片切割室內通過線切割機以切割出多片太陽能晶片。在這切割過程中,晶棒的局部區域會因為切割線本身的寬度等因素而損耗掉,破損的晶片會混雜在切割液中。此外,由於習知的噴頭相當笨重,需要以相當多個螺絲鎖固在線切割機的設備端,若要清除噴頭,拆除上相當困難,也容易導致螺絲滑牙。因此,為了避免這些破損晶片堵塞切割液所流通的管路,且方便進行拆卸清潔,便成為此領域研發人員亟欲解決的問題之一。In the process of solar wafers, a long strip of ingots is cut through a wire cutter in a wafer cutting chamber to cut a plurality of solar wafers. During this cutting process, the local area of the ingot is lost due to factors such as the width of the cutting line itself, and the damaged wafer is mixed in the cutting liquid. In addition, since the conventional nozzle is quite cumbersome, it is necessary to lock the device end of the inline cutting machine with a considerable number of screws. If the nozzle is to be removed, it is quite difficult to remove, and it is easy to cause the screw to slip. Therefore, in order to avoid the broken wafers clogging the pipeline through which the cutting fluid flows, and facilitating disassembly and cleaning, it has become one of the problems that researchers in this field are eager to solve.

本新型創作提供一種過濾噴頭,其在切割液通過的時候能夠過濾切割液中的碎片,以避免碎片堵塞噴頭。The novel creation provides a filter nozzle that is capable of filtering debris in the cutting fluid as it passes through to prevent debris from clogging the nozzle.

本新型創作提供一種線切割機的切割液過濾噴流裝置,其過濾噴頭除了能夠過濾切割液中的碎片之外,也容易拆卸於座體,相當方便清潔。The novel creation provides a cutting liquid filtering jet device of a wire cutting machine, which not only can filter the debris in the cutting liquid, but also is easy to disassemble to the seat body, which is quite convenient for cleaning.

本新型創作的一種過濾噴頭,適於配置在一線切割機上且適於過濾切割液並將切割液噴流至線切割機,過濾噴頭包括一噴頭本體及一立體濾網。噴頭本體包括多個噴口。立體濾網配置於噴嘴本體上。The filter nozzle of the present invention is suitable for being arranged on a wire cutter and adapted to filter the cutting fluid and spray the cutting liquid to the wire cutter. The filter nozzle comprises a nozzle body and a three-dimensional filter. The nozzle body includes a plurality of nozzles. The three-dimensional filter is disposed on the nozzle body.

在本新型創作的一實施例中,上述的立體濾網包括相連且非共平面的兩平面區塊,而形成中空三角柱的其中兩面。In an embodiment of the present novel creation, the above-described three-dimensional screen comprises two planar blocks that are connected and non-coplanar, and form two sides of the hollow triangular prism.

在本新型創作的一實施例中,上述的立體濾網的形狀為中空的半圓柱。In an embodiment of the present invention, the stereoscopic screen has a hollow semi-cylindrical shape.

在本新型創作的一實施例中,上述的立體濾網的網目孔徑小於各噴口的孔徑。In an embodiment of the present invention, the mesh aperture of the stereoscopic screen is smaller than the aperture of each nozzle.

在本新型創作的一實施例中,上述的噴頭本體沿一第一軸線延伸,噴頭本體上的這些噴口沿著第一軸線排列成至少一排,各排的兩相鄰的這些噴口之間的距離沿著第一軸線逐漸增加。In an embodiment of the present invention, the nozzle body extends along a first axis, and the nozzles on the nozzle body are arranged along the first axis in at least one row, between the two adjacent nozzles of each row. The distance gradually increases along the first axis.

本新型創作的一種線切割機的切割液過濾噴流裝置,包括一座體以及可拆卸地配置於座體的一過濾噴頭。過濾噴頭包括一噴頭本體及一立體濾網。噴頭本體包括多個噴口。立體濾網配置於噴嘴本體上。The cutting liquid filtering jet device of the wire cutting machine of the present invention comprises a body and a filtering nozzle detachably disposed on the seat body. The filter nozzle includes a nozzle body and a stereo filter. The nozzle body includes a plurality of nozzles. The three-dimensional filter is disposed on the nozzle body.

在本新型創作的一實施例中,上述的座體包括沿一第一軸線延伸的一容置凹槽,過濾噴頭沿著第一軸線可抽換地配置在容置凹槽。In an embodiment of the present invention, the seat body includes a receiving recess extending along a first axis, and the filter head is removably disposed along the first axis in the receiving recess.

在本新型創作的一實施例中,上述的立體濾網包括相連且非共平面的兩平面區塊,而形成中空三角柱的其中兩面。In an embodiment of the present novel creation, the above-described three-dimensional screen comprises two planar blocks that are connected and non-coplanar, and form two sides of the hollow triangular prism.

在本新型創作的一實施例中,上述的立體濾網的形狀為中空的半圓柱。In an embodiment of the present invention, the stereoscopic screen has a hollow semi-cylindrical shape.

在本新型創作的一實施例中,上述的立體濾網的網目孔徑小於各噴口的孔徑。In an embodiment of the present invention, the mesh aperture of the stereoscopic screen is smaller than the aperture of each nozzle.

在本新型創作的一實施例中,上述的噴頭本體沿一第一軸線延伸,噴頭本體上的這些噴口沿著第一軸線排列成至少一排,各排的兩相鄰的這些噴口之間的距離沿著第一軸線逐漸增加。In an embodiment of the present invention, the nozzle body extends along a first axis, and the nozzles on the nozzle body are arranged along the first axis in at least one row, between the two adjacent nozzles of each row. The distance gradually increases along the first axis.

基於上述,本新型創作的線切割機的切割液過濾噴流裝置及過濾噴頭透過將立體濾網配置於噴嘴本體上,混雜有碎片的切割液會先通過立體濾網再經過噴嘴本體的噴口,而可降低混雜在切割液中的碎片堵塞噴嘴本體的噴口的機率。立體濾網的網目孔徑小於各噴口的孔徑的設計,因此,尺寸較大的碎片會被阻擋在立體濾網上,以確保流入噴嘴本體的噴口內的碎片的尺寸是小於噴口的孔徑尺寸,而能夠通過噴口。立體濾網可以是中空三角柱的其中兩面或是中空的半圓柱等多種形式,立體的設計可增加過濾的面積,且避免碎片覆蓋住噴嘴本體的噴口,而影響切割液通過的流量。另外,相較於習知的噴頭整體較為笨重,需要以相當多個螺絲鎖固在線切割機的設備端,拆卸上較為不便,本新型創作的線切割機的切割液過濾噴流裝置將座體與過濾噴頭分開為兩件,座體固定於設備端,過濾噴頭沿著第一軸線可抽換地配置在容置凹槽,過濾噴頭重量輕,僅需一到兩顆螺絲便可以固定於座體,相當方便後續的清潔程序。Based on the above, the cutting liquid filtering jet device and the filtering nozzle of the wire cutting machine of the present invention are configured to dispose the three-dimensional filter on the nozzle body, and the cutting liquid mixed with the debris passes through the three-dimensional filter and then through the nozzle of the nozzle body. The probability that the debris mixed in the cutting fluid blocks the nozzle of the nozzle body can be reduced. The mesh aperture of the three-dimensional filter is smaller than the aperture of each nozzle. Therefore, the larger size debris is blocked on the three-dimensional filter to ensure that the size of the debris flowing into the nozzle of the nozzle body is smaller than the aperture size of the nozzle. Can pass through the spout. The three-dimensional filter can be in the form of two sides of the hollow triangular column or a hollow semi-cylindrical shape, and the three-dimensional design can increase the filtering area and prevent the debris from covering the nozzle of the nozzle body, thereby affecting the flow rate of the cutting liquid. In addition, compared with the conventional nozzle, the overall length of the nozzle is relatively heavy, and it is necessary to lock the device end of the online cutting machine with a relatively large number of screws, which is inconvenient to disassemble. The cutting fluid filtering jet device of the wire cutter of the present invention will be used to The filter nozzle is divided into two parts, the seat body is fixed on the device end, and the filter nozzle is replaceably arranged in the accommodating groove along the first axis. The filter nozzle is light in weight and can be fixed to the seat body only by one or two screws. Quite convenient for subsequent cleaning procedures.

為讓本新型創作的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will become more apparent and understood from the following description.

一般而言,太陽能晶片的線切割機在進行晶棒切割的過程中會需要有切割液來進行降溫與潤滑等作用,晶棒在切割過程中,晶棒的局部區域會因為切割線本身的寬度等因素而損耗掉,破損的晶片會混雜在切割液中。雖然切割液在回收回儲存槽之前會先經過過濾網進行初步過濾,但部分較為細小的碎片仍會通過此過濾網而與切割液一起回流至儲存槽中,其後,若混有細小的碎片的切割液再經由噴口噴流至線切割機時,噴口會被碎片堵塞而影響切割液流出的狀況。In general, the wire cutter of a solar wafer needs a cutting liquid for cooling and lubrication during the cutting process of the ingot. During the cutting process, the local area of the ingot is due to the width of the cutting line itself. If it is lost due to other factors, the damaged wafer will be mixed in the cutting fluid. Although the cutting fluid is first filtered through the filter before being recycled back to the storage tank, some of the finer fragments will still flow back into the storage tank together with the cutting liquid through the filter, and then if there are fine fragments mixed together When the cutting liquid is sprayed through the nozzle to the wire cutter, the nozzle is blocked by the debris and affects the flow of the cutting fluid.

本案的線切割機的切割液過濾噴流裝置可組裝在一線切割機(未繪示)的上方,線切割機可以是用來切割太陽能晶棒的線切割機。本新型創作的線切割機的切割液過濾噴流裝置可以有效地降低切割液流過時噴口堵塞的狀況,以使切割液能夠順暢地噴流至線切割機。下面將對此進行詳細的介紹。The cutting liquid filtering jet device of the wire cutting machine of the present invention can be assembled above a wire cutting machine (not shown), and the wire cutting machine can be a wire cutting machine for cutting a solar crystal ingot. The cutting liquid filtering jet device of the wire cutter of the present invention can effectively reduce the clogging of the nozzle when the cutting fluid flows, so that the cutting fluid can be smoothly sprayed to the wire cutter. This will be described in detail below.

圖1是依照本新型創作的一實施例的一種線切割機的切割液過濾噴流裝置的過濾噴頭拆裝於座體的示意圖。圖2是圖1的不同視角的示意圖。圖3是圖1的線切割機的切割液過濾噴流裝置的座體的示意圖。圖4是圖1的線切割機的切割液過濾噴流裝置的過濾噴頭的示意圖。圖5是圖4的噴嘴本體的示意圖。圖6是圖4的立體濾網的示意圖。1 is a schematic view of a filter head of a cutting liquid filtering jet device of a wire cutting machine disassembled and assembled to a seat body according to an embodiment of the present invention. Figure 2 is a schematic illustration of the different perspectives of Figure 1. Fig. 3 is a schematic view showing the seat body of the cutting liquid filtering jet flow device of the wire cutter of Fig. 1. 4 is a schematic view of a filter head of a cutting fluid filtration jet device of the wire cutter of FIG. 1. Figure 5 is a schematic illustration of the nozzle body of Figure 4. Figure 6 is a schematic illustration of the three-dimensional screen of Figure 4.

請參閱圖1至圖6,線切割機的切割液過濾噴流裝置10包括一座體20以及可拆卸地配置於座體20的一過濾噴頭100。座體20可透過螺接的方式固定於線切割機的設備端5,當然,座體20固定於線切割機的設備端5的方式並不以此為限制。座體20包括沿一第一軸線A1延伸的一容置凹槽22,如圖1與圖2所示,過濾噴頭100沿著第一軸線A1可抽換地配置在容置凹槽22。需說明的是,在圖1與圖2中,為了顯示過濾噴頭100可拆卸地配置於座體20,而特別繪示出過濾噴頭100拆裝到一半的示意圖,實際安裝完成之後,過濾噴頭100會整個容納在座體20的容置凹槽22內,且為了清楚顯示過濾噴頭100,圖1的線切割機的設備端5以虛線表示。Referring to FIGS. 1 to 6 , the cutting fluid filtering jet device 10 of the wire cutting machine includes a body 20 and a filter head 100 detachably disposed on the base body 20 . The seat body 20 can be fixed to the device end 5 of the wire cutter by means of screwing. Of course, the manner in which the base body 20 is fixed to the device end 5 of the wire cutter is not limited thereto. The seat body 20 includes a receiving recess 22 extending along a first axis A1. As shown in FIGS. 1 and 2, the filter head 100 is removably disposed along the first axis A1 in the receiving recess 22. It should be noted that, in FIG. 1 and FIG. 2 , in order to show that the filter head 100 is detachably disposed on the seat body 20 , a schematic view of the filter head 100 being disassembled to half is specifically illustrated. After the actual installation is completed, the filter head 100 is filtered. Will be housed entirely within the receiving recess 22 of the base 20, and for clarity of the filter head 100, the device end 5 of the wire cutter of Figure 1 is shown in phantom.

相較於習知的噴頭(未繪示)整體較為笨重,需要以相當多個螺絲鎖固在線切割機的設備端5,拆卸上較為不便,本實施例的線切割機的切割液過濾噴流裝置10將座體20與過濾噴頭100分開為兩件,過濾噴頭100可抽換地配置在容置凹槽22,由於過濾噴頭100重量輕,僅需一到兩顆螺絲便可以固定於座體20,相當方便拆卸,較容易進行後續的清潔程序。Compared with the conventional nozzle (not shown), the overall length of the nozzle (not shown) is relatively heavy, and it is necessary to lock the device end 5 of the inline cutting machine with a relatively large number of screws, which is inconvenient to disassemble, and the cutting liquid filtering jet device of the wire cutting machine of the embodiment 10, the seat body 20 and the filter nozzle 100 are separated into two pieces, and the filter head 100 is replaceably disposed in the accommodating recess 22. Since the filter head 100 is light in weight, only one or two screws are needed to be fixed to the base body 20, It is quite easy to disassemble and it is easier to carry out subsequent cleaning procedures.

在本實施例中,過濾噴頭100包括一噴頭本體110及一立體濾網120。噴頭本體110包括多個噴口112,切割液(未繪示)可通過噴口112噴流於線切割機上。立體濾網120配置於噴嘴本體110上,且覆蓋這些噴口112。立體濾網120可以增加過濾的面積,且避免碎片覆蓋住噴嘴本體110的噴口112,而影響切割液通過的流量。在本實施例中,立體濾網120包括相連且非共平面的兩平面區塊,而形成中空三角柱的其中兩面。當然,立體濾網120的形式並不以此為限制。In the embodiment, the filter head 100 includes a head body 110 and a three-dimensional screen 120. The nozzle body 110 includes a plurality of nozzles 112 through which a cutting fluid (not shown) can be sprayed onto the wire cutter. The three-dimensional screen 120 is disposed on the nozzle body 110 and covers the nozzles 112. The steric screen 120 can increase the area of filtration and prevent debris from covering the spout 112 of the nozzle body 110, thereby affecting the flow of cutting fluid. In the present embodiment, the three-dimensional screen 120 includes two planar blocks that are connected and non-coplanar to form two sides of the hollow triangular prism. Of course, the form of the stereoscopic screen 120 is not limited thereto.

在本實施例中,立體濾網120的網目孔徑小於各噴口112的孔徑,此配置可使得尺寸較大的碎片會被阻擋在立體濾網120上,以確保流入噴嘴本體110的噴口112內的碎片的尺寸是小於噴口112的孔徑尺寸,而能夠通過噴口112。本實施例的過濾噴頭100透過將立體濾網120配置於噴嘴本體110上,混雜有碎片的切割液會先通過立體濾網120再經過噴嘴本體110的噴口112,而可降低混雜在切割液中的碎片堵塞噴嘴本體110的噴口112的機率。In the present embodiment, the mesh aperture of the stereoscopic screen 120 is smaller than the aperture of each of the nozzles 112. This configuration allows larger-sized fragments to be blocked on the stereoscopic screen 120 to ensure flow into the nozzles 112 of the nozzle body 110. The size of the fragments is smaller than the aperture size of the spout 112 and can pass through the spout 112. The filter head 100 of the embodiment is configured to dispose the three-dimensional screen 120 on the nozzle body 110, and the cutting liquid mixed with the debris first passes through the three-dimensional screen 120 and then passes through the nozzle 112 of the nozzle body 110, thereby reducing mixing in the cutting fluid. The debris blocks the probability of the spout 112 of the nozzle body 110.

此外,如圖5所示,在本實施例中,噴頭本體110沿第一軸線A1延伸,噴頭本體110上的這些噴口112沿著第一軸線A1排列成至少一排(在圖5中是排列成兩排),各排的兩相鄰的這些噴口112之間的距離沿著第一軸線A1逐漸增加。更清楚地說,在圖5中,切割液是在噴嘴本體110的上方從右方沿著第一軸線往左方流,且從噴頭本體110的噴口112上方通過噴口112向下流,為了使整排的噴口112所噴流出的切割液的流量均勻,在各排中,越靠近圖面上右方的兩相鄰噴口112之間的距離越大。In addition, as shown in FIG. 5, in the present embodiment, the head body 110 extends along the first axis A1, and the nozzles 112 on the head body 110 are arranged in at least one row along the first axis A1 (arranged in FIG. 5). In two rows, the distance between the two adjacent nozzles 112 of each row gradually increases along the first axis A1. More specifically, in FIG. 5, the cutting liquid flows to the left from the right along the first axis above the nozzle body 110, and flows downward from the nozzle 112 of the head body 110 through the nozzle 112, in order to make the whole The flow rate of the cutting liquid discharged from the discharge port 112 of the row is uniform, and the distance between the two adjacent nozzles 112 on the right side of the drawing is larger in each row.

如此一來,當切割液在噴嘴本體110的上方從右方沿著第一軸線A1往左方流時,雖然一開始靠近圖面的右方的切割液較多,部分的切割液在經過右方的噴口112時會向下流,而使得能夠流至左方的切割液變少,但圖面的右方的噴口112數量少且間距大,圖面的左方的噴口112數量多且間距小,能夠通過圖面的右方的噴口112的切割液的流量會接近於能夠通過圖面的左方的噴口112的切割液的流量,而使得整排的噴口112所噴流出的切割液的流量均勻,以達到控制切割液的流量的效果。In this way, when the cutting liquid flows to the left from the right along the first axis A1 above the nozzle body 110, although the cutting liquid on the right side near the drawing surface is large, part of the cutting liquid passes through the right. The square spout 112 will flow downward, so that the cutting fluid flowing to the left side is reduced, but the number of the spouts 112 on the right side of the drawing is small and the spacing is large, and the number of the spouts 112 on the left side of the drawing is large and the spacing is small. The flow rate of the cutting liquid that can pass through the nozzle 112 on the right side of the drawing surface is close to the flow rate of the cutting liquid that can pass through the nozzle 112 on the left side of the drawing surface, so that the flow rate of the cutting liquid discharged from the entire row of nozzles 112 flows. Uniform to achieve the effect of controlling the flow rate of the cutting fluid.

圖7是依照本新型創作的另一實施例的過濾噴頭的立體濾網的示意圖。請參閱圖7,圖7的立體濾網220與圖6的立體濾網120的主要差異在於,圖7的立體濾網220的形狀為中空的半圓柱。本實施例的立體濾網220透過立體結構的形式可以增加過濾的面積,且避免碎片覆蓋住噴嘴本體110(繪示於圖5)的噴口112,而影響切割液通過的流量。當然,立體濾網220的形式並不以上述為限制,只要是非平面的形式均可。7 is a schematic illustration of a three-dimensional screen of a filter head in accordance with another embodiment of the present invention. Referring to FIG. 7, the main difference between the three-dimensional screen 220 of FIG. 7 and the three-dimensional screen 120 of FIG. 6 is that the three-dimensional screen 220 of FIG. 7 has a hollow semi-cylindrical shape. The three-dimensional screen 220 of the present embodiment can increase the filtering area by the form of a three-dimensional structure, and avoids the debris covering the nozzle 112 of the nozzle body 110 (shown in FIG. 5), thereby affecting the flow rate of the cutting liquid. Of course, the form of the stereoscopic screen 220 is not limited to the above, as long as it is in a non-planar form.

綜上所述,本新型創作的線切割機的切割液過濾噴流裝置及過濾噴頭透過將立體濾網配置於噴嘴本體上,混雜有碎片的切割液會先通過立體濾網再經過噴嘴本體的噴口,而可降低混雜在切割液中的碎片堵塞噴嘴本體的噴口的機率。立體濾網的網目孔徑小於各噴口的孔徑的設計,因此,尺寸較大的碎片會被阻擋在立體濾網上,以確保流入噴嘴本體的噴口內的碎片的尺寸是小於噴口的孔徑尺寸,而能夠通過噴口。立體濾網可以是中空三角柱的其中兩面或是中空的半圓柱等多種形式,立體的設計可增加過濾的面積,且避免碎片覆蓋住噴嘴本體的噴口,而影響切割液通過的流量。另外,相較於習知的噴頭整體較為笨重,需要以相當多個螺絲鎖固在線切割機的設備端,拆卸上較為不便,本新型創作的線切割機的切割液過濾噴流裝置將座體與過濾噴頭分開為兩件,座體固定於設備端,過濾噴頭沿著第一軸線可抽換地配置在容置凹槽,過濾噴頭重量輕,僅需一到兩顆螺絲便可以固定於座體,相當方便後續的清潔程序。In summary, the cutting liquid filtering jet device and the filtering nozzle of the wire cutting machine of the present invention are arranged on the nozzle body through the three-dimensional filter screen, and the cutting liquid mixed with the debris passes through the three-dimensional filter mesh and then through the nozzle of the nozzle body. Moreover, the probability that the debris mixed in the cutting liquid blocks the nozzle of the nozzle body can be reduced. The mesh aperture of the three-dimensional filter is smaller than the aperture of each nozzle. Therefore, the larger size debris is blocked on the three-dimensional filter to ensure that the size of the debris flowing into the nozzle of the nozzle body is smaller than the aperture size of the nozzle. Can pass through the spout. The three-dimensional filter can be in the form of two sides of the hollow triangular column or a hollow semi-cylindrical shape, and the three-dimensional design can increase the filtering area and prevent the debris from covering the nozzle of the nozzle body, thereby affecting the flow rate of the cutting liquid. In addition, compared with the conventional nozzle, the overall length of the nozzle is relatively heavy, and it is necessary to lock the device end of the online cutting machine with a relatively large number of screws, which is inconvenient to disassemble. The cutting fluid filtering jet device of the wire cutter of the present invention will be used to The filter nozzle is divided into two parts, the seat body is fixed on the device end, and the filter nozzle is replaceably arranged in the accommodating groove along the first axis. The filter nozzle is light in weight and can be fixed to the seat body only by one or two screws. Quite convenient for subsequent cleaning procedures.

雖然本新型創作已以實施例揭露如上,然其並非用以限定本新型創作,任何所屬技術領域中具有通常知識者,在不脫離本新型創作的精神和範圍內,當可作些許的更動與潤飾,故本新型創作的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the novel creation, and any person skilled in the art can make some changes without departing from the spirit and scope of the novel creation. Retouching, the scope of protection of this new creation is subject to the definition of the scope of the patent application attached.

A1‧‧‧第一軸線
5‧‧‧線切割機的設備端
10‧‧‧線切割機的切割液過濾噴流裝置
20‧‧‧座體
22‧‧‧容置凹槽
100‧‧‧過濾噴頭
110‧‧‧噴頭本體
112‧‧‧噴口
120、220‧‧‧立體濾網
A1‧‧‧first axis
5‧‧‧ Equipment end of wire cutting machine
10‧‧‧ Cutting fluid filtering jet device for wire cutting machine
20‧‧‧ body
22‧‧‧ accommodating grooves
100‧‧‧Filter nozzle
110‧‧‧ sprinkler body
112‧‧‧ spout
120, 220‧‧‧Three-dimensional filter

圖1是依照本新型創作的一實施例的一種線切割機的切割液過濾噴流裝置的過濾噴頭拆裝於座體的示意圖。 圖2是圖1的不同視角的示意圖。 圖3是圖1的線切割機的切割液過濾噴流裝置的座體的示意圖。 圖4是圖1的線切割機的切割液過濾噴流裝置的過濾噴頭的示意圖。 圖5是圖4的噴嘴本體的示意圖。 圖6是圖4的立體濾網的示意圖。 圖7是依照本新型創作的另一實施例的過濾噴頭的立體濾網的示意圖。1 is a schematic view of a filter head of a cutting liquid filtering jet device of a wire cutting machine disassembled and assembled to a seat body according to an embodiment of the present invention. Figure 2 is a schematic illustration of the different perspectives of Figure 1. Fig. 3 is a schematic view showing the seat body of the cutting liquid filtering jet flow device of the wire cutter of Fig. 1. 4 is a schematic view of a filter head of a cutting fluid filtration jet device of the wire cutter of FIG. 1. Figure 5 is a schematic illustration of the nozzle body of Figure 4. Figure 6 is a schematic illustration of the three-dimensional screen of Figure 4. 7 is a schematic illustration of a three-dimensional screen of a filter head in accordance with another embodiment of the present invention.

A1‧‧‧第一軸線 A1‧‧‧first axis

5‧‧‧線切割機的設備端 5‧‧‧ Equipment end of wire cutting machine

10‧‧‧線切割機的切割液過濾噴流裝置 10‧‧‧ Cutting fluid filtering jet device for wire cutting machine

20‧‧‧座體 20‧‧‧ body

22‧‧‧容置凹槽 22‧‧‧ accommodating grooves

100‧‧‧過濾噴頭 100‧‧‧Filter nozzle

110‧‧‧噴頭本體 110‧‧‧ sprinkler body

120‧‧‧立體濾網 120‧‧‧Three-dimensional filter

Claims (11)

一種過濾噴頭,適於配置在一線切割機上且適於過濾切割液並將該切割液噴流至該線切割機,該過濾噴頭包括: 一噴頭本體,包括多個噴口;以及 一立體濾網,配置於該噴嘴本體上。A filter nozzle adapted to be disposed on a wire cutter and adapted to filter cutting fluid and spray the cutting fluid to the wire cutter, the filter nozzle comprising: a nozzle body including a plurality of nozzles; and a stereo filter, Disposed on the nozzle body. 如申請專利範圍第1項所述的過濾噴頭,其中該立體濾網包括相連且非共平面的兩平面區塊,而形成中空三角柱的其中兩面。The filter head of claim 1, wherein the three-dimensional screen comprises two planar blocks that are connected and non-coplanar to form two sides of the hollow triangular prism. 如申請專利範圍第1項所述的過濾噴頭,其中該立體濾網的形狀為中空的半圓柱。The filter head of claim 1, wherein the three-dimensional screen has a hollow semi-cylindrical shape. 如申請專利範圍第1項所述的過濾噴頭,其中該立體濾網的網目孔徑小於各該噴口的孔徑。The filter head of claim 1, wherein the mesh size of the three-dimensional screen is smaller than the diameter of each of the nozzles. 如申請專利範圍第1項所述的過濾噴頭,其中該噴頭本體沿一第一軸線延伸,該噴頭本體上的該些噴口沿著該第一軸線排列成至少一排,各排的兩相鄰的該些噴口之間的距離沿著該第一軸線逐漸增加。The filter head according to claim 1, wherein the nozzle body extends along a first axis, and the nozzles on the nozzle body are arranged along the first axis in at least one row, and two adjacent rows The distance between the spouts gradually increases along the first axis. 一種線切割機的切割液過濾噴流裝置,包括: 一座體;以及 一過濾噴頭,可拆卸地配置於該座體,該過濾噴嘴包括: 一噴頭本體,包括多個噴口;以及 一立體濾網,配置於該噴嘴本體上。A cutting liquid filtering jet device of a wire cutting machine, comprising: a body; and a filter nozzle detachably disposed on the seat body, the filter nozzle comprising: a nozzle body including a plurality of nozzles; and a three-dimensional screen Disposed on the nozzle body. 如申請專利範圍第6項所述的線切割機的切割液過濾噴流裝置,其中該座體包括沿一第一軸線延伸的一容置凹槽,該過濾噴頭沿著該第一軸線可抽換地配置在該容置凹槽。The cutting fluid filtering jet device of the wire cutting machine according to claim 6, wherein the seat body comprises a receiving groove extending along a first axis, the filtering nozzle is replaceably along the first axis Configured in the receiving groove. 如申請專利範圍第6項所述的線切割機的切割液過濾噴流裝置,其中該立體濾網包括相連且非共平面的兩平面區塊,而形成中空三角柱的其中兩面。The cutting liquid filtering jet device of the wire cutting machine according to claim 6, wherein the three-dimensional screen comprises two planar blocks which are connected and non-coplanar, and form two sides of the hollow triangular column. 如申請專利範圍第6項所述的線切割機的切割液過濾噴流裝置,其中該立體濾網的形狀為中空的半圓柱。The cutting liquid filtering jet device of the wire cutting machine according to claim 6, wherein the three-dimensional screen has a hollow semi-cylindrical shape. 如申請專利範圍第6項所述的線切割機的切割液過濾噴流裝置,其中該立體濾網的網目孔徑小於各該噴口的孔徑。The cutting liquid filtering jet device of the wire cutting machine according to claim 6, wherein the mesh size of the three-dimensional screen is smaller than the diameter of each of the nozzles. 如申請專利範圍第6項所述的線切割機的切割液過濾噴流裝置,其中該噴頭本體沿一第一軸線延伸,該噴頭本體上的該些噴口沿著該第一軸線排列成至少一排,各排的兩相鄰的該些噴口之間的距離沿著該第一軸線逐漸增加。The cutting liquid filtering jet device of the wire cutting machine according to claim 6, wherein the nozzle body extends along a first axis, and the nozzles on the nozzle body are arranged in at least one row along the first axis. The distance between the two adjacent nozzles of each row gradually increases along the first axis.
TW104214406U 2015-09-04 2015-09-04 Filtering nozzle and cutting fluid filtering jet device of WEDM TWM512458U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI695770B (en) * 2018-11-30 2020-06-11 環球晶圓股份有限公司 Slurry sprayer
US11752665B2 (en) 2018-11-30 2023-09-12 Globalwafers Co., Ltd. Slurry sprayers, adjustable supports for same, and methods for slicing a silicon ingot

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI695755B (en) * 2018-11-30 2020-06-11 環球晶圓股份有限公司 Adjustable support of slurry sprayer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI695770B (en) * 2018-11-30 2020-06-11 環球晶圓股份有限公司 Slurry sprayer
US11752665B2 (en) 2018-11-30 2023-09-12 Globalwafers Co., Ltd. Slurry sprayers, adjustable supports for same, and methods for slicing a silicon ingot

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