CN202878512U - Fixed-diamond wire sawing machine and slurry pipe thereof - Google Patents
Fixed-diamond wire sawing machine and slurry pipe thereof Download PDFInfo
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- CN202878512U CN202878512U CN 201220463448 CN201220463448U CN202878512U CN 202878512 U CN202878512 U CN 202878512U CN 201220463448 CN201220463448 CN 201220463448 CN 201220463448 U CN201220463448 U CN 201220463448U CN 202878512 U CN202878512 U CN 202878512U
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- slurry pipe
- interface
- slurry
- steel wire
- diamond wire
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Abstract
The utility model discloses a fixed-diamond wire sawing machine and a slurry pipe of the fixed-diamond wire sawing machine. The slurry pipe comprises a hollow pipe body, a first port and a second port, wherein the first port and the second port are formed in the pipe body, the first port is used for connection with a force pump, the second port is used for connection with a connecting spraying head, openings are formed in two ends of the pipe body, and plugging devices are arranged at the positions of the openings. According to designs that the openings are formed in the two ends of the pipe body and the detachable plugging devices are arranged at the positions of the openings, convenience is provided for personnel to disassemble the plugging devices at regular periods so as to clean foreign matters such as silica powders attached in the pipe body, the new slurry pipe is not required to be replaced, and therefore service life of the slurry pipe is prolonged. In addition, probability of the silica powders mixed up with a cooling liquid is also reduced, and therefore wire breaking probability of a diamond wire is reduced to a certain degree, dosage of the diamond wire is reduced, and sawing quality of silicon blocks is improved. On the basis, further disclosed is fixed-diamond wire sawing machine. The fixed-diamond wire sawing machine comprises the slurry pipe.
Description
Technical field
The present invention relates to the multi-wire saw technical field, particularly a kind of golden steel wire excavation machine and slurry pipe thereof.
Background technology
Gold steel wire evolution technology is present more advanced silico briquette process technology in the world, and its principle is that the golden steel wire by a high-speed motion drives the cutting blade material that is attached on the steel wire hard brittle materials such as semiconductor are rubbed, thereby reaches the cutting purpose.Line cutting technology is compared with traditional knife saw sheet, grinding wheel and inner circle cutting has that efficient is high, production capacity is high, the precision advantages of higher.
In the cutting process to workpiece, steel wire is by the guiding of tens guide rollers, form a bracing cable net at the main line roller, and workpiece to be processed is realized the feeding of workpiece by the rise and fall of work stage, and under the effect of compression pump, be assemblied in automatic spraying device on the equipment with the cutting position of spray coolant to golden steel wire and workpiece, driving cooling fluid by golden steel wire moves back and forth, utilize the grinding function of golden steel wire that workpiece is produced cutting, the hard brittle materials such as semiconductor once are cut into simultaneously 16 or 25 cuboids, cooling fluid plays the effect at Cooling and Lubricator cutting position simultaneously.
As everyone knows, golden steel wire excavation machine produces a large amount of silica flours when cutting, and silica flour flows with cooling fluid.Because cooling fluid is to recycle, like this, silica flour is easy to be attached on the pipeline of carrying cooling fluid, is easy to form at this thinner pipeline of slurry pipe and stops up, and causes golden steel wire broken string and cut quality problem.Obviously, carry the slurry pipe of cooling fluid, have very important effect for service life and the cut quality of golden steel wire.
Traditional slurry pipe is square hollow stainless steel tube, and two ends are closed design.Because two ends are closed design, when being stopped up by silica flour in the pipeline, can't periodic cleaning, the slurry pipe that can only more renew.
In view of this, demand the Optimal Structure Designing for existing slurry pipe urgently, solving the problem that slurry pipe in the prior art can't periodic cleaning, thereby prolong the service life of slurry pipe, and then the broken string probability that reduces golden steel wire to be prolonging its service life, and the cut quality that improves silicon chip.
The utility model content
For defects, the purpose of this utility model is to provide a kind of slurry pipe, can't clear up the problem of adhering to silica flour in it to solve in the prior art closed at both ends formula slurry pipe, thereby prolong the service life of slurry pipe, so prolong golden steel wire service life, improve the cut quality of silicon chip.On this basis, the utility model also provides a kind of golden steel wire excavation machine that comprises above-mentioned slurry pipe.
The slurry pipe that the utility model provides comprises hollow body, and is arranged on the described body:
First interface is used for being communicated with compression pump;
The second interface is used for being connected with shower nozzle; Wherein, described body two ends have opening, and the plugging device that removably connects of described opening part setting.
Preferably, the inner hole section shape of described body is specially closed smooth curve.
Preferably, described first interface and described the second interface are concrete is oppositely arranged along the axis direction perpendicular to described body.
Preferably, described the second interface is specially a plurality of along described body length direction successively spaced set.
Preferably, described first interface is arranged at the middle part of described body.
Preferably, described first interface comprises the stiff end and the link that with described compression pump be connected fixing with described body; On the direction along described canned paragraph to link, described link comprises a plurality of round platforms that set gradually, and the upper bottom surface diameter of each described round platform is less than the bottom surface diameter of adjacent described round platform.
Preferably, the material of described body is stainless-steel seamless pipe.
The utility model also provides a kind of golden steel wire excavation machine, comprise compression pump, with the slurry pipe that described compression pump is communicated with, described slurry pipe is specially aforesaid slurry pipe.
Preferably, described shower nozzle specifically comprises the canned paragraph that is connected with described the second interface and is provided with the sprinkling section of jet hole, and described jet hole is communicated with described the second interface by described canned paragraph.
Preferably, the sectional area of described jet hole is along the flow direction of slurry and increases progressively trend.
The slurry pipe that the utility model provides comprises hollow body, and is arranged at first interface and the second interface on the body.Wherein, first interface is used for the Bonding pressure pump, and the second interface is used for connecting shower nozzle; The two ends of this body have opening, and at opening part plugging device are set.After gold steel wire excavation machine started, compression pump pumped into the cooling fluid in the slurry cylinder of slurry chamber in the body of slurry pipe, and cooling fluid is sprayed to the cutting position of golden steel wire and workpiece in the body by shower nozzle under action of hydraulic force, plays the effect of Cooling and Lubricator.Cooling fluid after the use flows into slurry cylinder, is pumped in the body by compression pump again, so recycles.
Compare to closed at both ends formula slurry pipe of the prior art, both ends open and opening part arrange the design of detachable plugging device in the utility model, can make things convenient for the employee regularly pull down plugging device cleaning body included silica flour, and the slurry pipe that need not more to renew, thereby prolonged service life of slurry pipe.Therefore, prolong to a certain extent the service life of golden steel wire, improved the cut quality of silicon chip.
In the preferred version of the present utility model, the inner hole section shape of slurry pipe body is specially the smooth curve of sealing.Can reduce silica flour adhering on inboard wall of tube body by this design, and not be difficult to the dead angle cleared up in when cleaning, thereby further reduce the probability that adheres to of silica flour, reduce the impact on slurry pipe sprinkling amount.
In the another preferred version of the present utility model, the second interface that be used for to connect shower nozzle is specially a plurality of along the length direction of body successively spaced set.The equally spaced a plurality of set-up modes of the second interface, can make by compression pump and pump into cooling fluid in the body under action of hydraulic force, by the cutting position that is sprayed to diverse location place gold steel wire and workpiece in the shower nozzle with identical sprinkling amount, thereby guaranteed the even distribution of cooling fluid on whole gauze, thereby guaranteed the cut quality of silicon chip.
Description of drawings
Fig. 1 shows the front view of slurry pipe in the specific embodiment;
Fig. 2 shows the A-A cutaway view among Fig. 1;
Fig. 3 shows slurry pipe and plugging device assembling schematic diagram among Fig. 1;
Fig. 4 shows the local enlarged diagram of B among Fig. 1;
Fig. 5 shows slurry pipe and shower nozzle assembling schematic diagram among Fig. 1;
Fig. 6 shows the front view of shower nozzle among Fig. 5;
Fig. 7 shows the top view of Fig. 6;
Fig. 8 shows the C-C cutaway view of Fig. 7.
Among the figure:
1 body, 11 first interfaces, 111 canned paragraphs, 112 linkage sections, 12 second interfaces, 13 openings, 2 plugging devices, 3 shower nozzles, 31 canned paragraphs, 32 spray section, 321 jet holes, 33 changeover portions.
The specific embodiment
Core of the present utility model provides a kind of slurry pipe, can't clear up the problem of adhering to silica flour in the slurry pipe to solve in the prior art, thereby prolong the service life of slurry pipe, finally realizes prolonging golden steel wire service life, improves the purpose of silicon chip cut quality.On this basis, the utility model also provides a kind of golden steel wire excavation machine that comprises above-mentioned slurry pipe.
Be without loss of generality, specify the specific embodiment of slurry pipe below in conjunction with Figure of description.
See also Fig. 1, Fig. 2 and Fig. 5, wherein, Fig. 1 shows the front view of slurry pipe in the specific embodiment, and Fig. 2 shows the A-A cutaway view among Fig. 1, and Fig. 5 Fig. 5 shows slurry pipe and shower nozzle assembling schematic diagram among Fig. 1.
The slurry pipe that the utility model provides comprises hollow body 1, and the first interface 11 and second that is arranged on the body 1 connects 12 mouthfuls.Wherein, first interface 11 is used for Bonding pressure pump (not shown), and the second interface 12 is used for connecting shower nozzle 3; The two ends of this body 1 have opening 13, and at opening 13 places plugging device 2 are set.After gold steel wire excavation machine starts, compression pump pumps into the cooling fluid in the slurry cylinder in the body 1 of slurry pipe, cooling fluid is sprayed to the cutting position of golden steel wire and workpiece in the body by shower nozzle under action of hydraulic force, driving cooling fluid by golden steel wire moves back and forth, utilize the grinding function of golden steel wire that workpiece is produced cutting, the hard brittle materials such as semiconductor once are cut into simultaneously 16 or 25 cuboids, cooling fluid plays the effect at Cooling and Lubricator cutting position simultaneously.Cooling fluid after the use flows into the slurry cylinder that is positioned at slurry chamber, is pumped in the body by compression pump again, so recycles.
Compare to closed at both ends formula slurry pipe of the prior art, the design that the slurry pipe body both ends open that provides in this programme and opening part arrange detachable plugging device, can make things convenient for the employee regularly pull down plugging device cleaning body included silica flour, and the slurry pipe that need not more to renew, thereby prolonged service life of slurry pipe.Therefore, prolong to a certain extent the service life of golden steel wire, improved the cut quality of silico briquette.
Further, as shown in Figure 2, in order to reduce silica flour adhering on inboard wall of tube body, and be not difficult to the dead angle cleared up in when cleaning, the cross section of this programme middle tube body is specially annulus, thereby has further reduced the probability that adheres to of silica flour, and then has reduced the impact on slurry pipe sprinkling amount.
Need to prove, the cross sectional shape of the body in this programme is not limited to annulus, as long as the cross sectional shape of its endoporus is specially the adhesion amount that closed smooth curve can reduce silica flour, can be circle, the regular shape such as square as for the profile of body, can certainly be irregularly shaped for heart etc., concrete shape depends on engineer's design requirement and design concept.
In addition, the plugging device 2 in this programme is specially jackscrew, is provided with screw thread at the opening part inwall of body, cooperates with the external screw thread of jackscrew during assembling.This sealing device is screwed in the volume that design in the body has not only reduced slurry pipe, avoided with excavation machine on the interference of other assemblies, and adopt this standard component of jackscrew, have interchangeability and reach by force the advantages such as cost is low.Certainly, also can adopt the plugging devices such as expansion sleeve in this programme, the concrete structure of plugging device is decided according to the concrete structure of body.
In addition, the first interface 11 in this programme is welded in the middle part of body 1, and the second interface 12 is specially 6, and along the length direction of body successively spaced set.This design can make by compression pump and pump into cooling fluid in the body under action of hydraulic force, by the cutting position that is sprayed to diverse location place gold steel wire and workpiece in the shower nozzle 3 with identical sprinkling amount, thereby guaranteed the even distribution of cooling fluid on whole gauze, thereby guaranteed the evolution quality of silico briquette.
Be appreciated that for the second interface 12 quantity that connect shower nozzle 3, different and different according to slurry pipe length, therefore, the difference of the quantity of the second interface does not consist of the restriction to the utility model protection domain.
As previously mentioned, first interface 11 in this programme comprises the canned paragraph 111 and the linkage section 112 that is connected with compression pump with body 1 welding, this linkage section is specially pagoda shape, the a plurality of round platforms that namely set gradually along first interface 11 axis directions, and the upper bottom surface diameter of each round platform is less than the bottom surface diameter of adjacent round platform.Pagoda shape linkage section 111 is connected with flexible pipe (not shown) one end, and both fix by the pipe clamp (not shown), and the flexible pipe other end is fixedly connected on the compression pump.Reduce fit clearance between the two by this connected mode with Pagoda-shaped linkage section of tapering, thereby prevented the generation of cooling fluid overflow problem.In addition, the endoporus of pipe clamp and the conical surface of round platform fit, thereby have prevented that the factor because of vibrations causes coming off of pipe clamp in the course of work.
Be appreciated that under in satisfying functional requirement and the excavation machine assembling process inter-module prerequisite that occurrence positions is interfered the connected modes such as the second interface also can adopt with compression pump and be threaded, welding.
It is emphasized that, in order to prevent that cooling fluid and air middle acid substance are to the corrosion of body, cause the generation of the excessive problem of cooling fluid in the body, body in this programme has adopted stainless-steel seamless pipe, so not only prolonged the service life of slurry pipe, and the characteristic that can be mass of stainless-steel seamless pipe, reduced processing technology and the cost of slurry pipe.Certainly, on the basis of satisfying the slurry functional requirement, this programme middle tube body also can adopt known other materials of those skilled in that art.
Except aforesaid slurry pipe, this programme also provides a kind of golden steel wire excavation machine, comprises compression pump, and the slurry pipe that is connected with this compression pump, and wherein, slurry pipe is specially aforesaid slurry pipe.Be appreciated that the interior basic function parts of this gold steel wire excavation machine and operation principle and prior art are basic identical, those skilled in the art can realize fully based on prior art, therefore this paper repeats no more.
Further, see also Fig. 6, Fig. 7 and Fig. 8, wherein, Fig. 6 shows the front view of shower nozzle among Fig. 5, and Fig. 7 shows the top view of Fig. 6, and Fig. 8 shows the C-C cutaway view of Fig. 7.
As shown in Figure 5 and Figure 6, the shower nozzle 3 in this programme specifically comprises the canned paragraph 31 that is threaded connection with the second interface 12 and the sprinkling section 32 that is provided with jet hole 321, and this jet hole 321 is communicated with the second interface 12 by canned paragraph 31.Under action of hydraulic force, slurry is sprayed on the golden steel wire of cutting work via jet hole 321 in the slurry pipe.Be appreciated that on the basis of satisfying function needs and technological requirement, the second interface is also with canned paragraph can adopt welding, bonding etc. the mode that provides in this programme is provided connects.
In addition, the spray area when spraying from jet hole 321 in order to increase slurry, with each cutting position on the even Cooling and Lubricator gold steel wire excavation machine, the sectional area of jet hole 321 is the state that increases progressively along the flow direction of slurry.Jet hole cross sectional shape in this programme is specially right-angled trapezium, and certainly, in the situation that satisfy function and processing technology requirement, the cross sectional shape of jet hole also can be other shapes such as isosceles trapezoid.Need to prove, jet hole 321 is along the axis direction setting perpendicular to sprinkling section 32 in this programme, and certainly, jet hole also can the section be arranged to and sprayed become arbitrarily angled, and this depends on the installation site of slurry pipe on golden steel wire excavation machine.
In this programme for dismounting shower nozzle easily, at canned paragraph 31 with spray that to be provided with exterior contour between the section 32 be hexagonal changeover portion 33.Therefore, only need use hexagon to finish during dismounting shower nozzle 3, guarantee the simple and fast of disassembly process.Be appreciated that in the situation that satisfy in functional requirement and the assembling process not occurrence positions and interfere, the exterior contour of this changeover portion also can other differ from the shape of this programme for cylinder etc.
The above only is preferred embodiment of the present invention, does not consist of the restriction to protection domain of the present invention.Any any modification of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., all should be included within the claim protection domain of the present invention.
Claims (10)
1. a slurry pipe comprises hollow body, and is arranged on the described body:
First interface is used for being communicated with compression pump;
The second interface is used for being connected with shower nozzle; It is characterized in that, described body two ends have opening, and the plugging device that removably connects of described opening part setting.
2. slurry pipe according to claim 1 is characterized in that, the inner hole section shape of described body is specially closed smooth curve.
3. slurry pipe according to claim 2 is characterized in that, described first interface and described the second interface are concrete to be oppositely arranged along the axis direction perpendicular to described body.
4. each described slurry pipe in 3 according to claim 1 is characterized in that, described the second interface is specially a plurality of along described body length direction successively spaced set.
5. slurry pipe according to claim 4 is characterized in that, described first interface is arranged at the middle part of described body.
6. slurry pipe according to claim 5 is characterized in that, described first interface comprises the stiff end and the link that with described compression pump be connected fixing with described body; On the direction along described canned paragraph to link, described link comprises a plurality of round platforms that set gradually, and the upper bottom surface diameter of each described round platform is less than the bottom surface diameter of adjacent described round platform.
7. slurry pipe according to claim 6 is characterized in that, the material of described body is specially stainless-steel seamless pipe.
8. golden steel wire excavation machine, comprise compression pump, with the slurry pipe that described compression pump is communicated with, it is characterized in that, described slurry pipe is specially such as the described slurry pipe of claim 1 to 7.
9. golden steel wire excavation machine according to claim 8 is characterized in that, described shower nozzle specifically comprises the canned paragraph that is connected with described the second interface and is provided with the sprinkling section of jet hole, and described jet hole is communicated with described the second interface by described canned paragraph.
10. golden steel wire excavation machine according to claim 9 is characterized in that, the sectional area of described jet hole is along the flow direction of slurry and increases progressively trend.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220463448 CN202878512U (en) | 2012-09-12 | 2012-09-12 | Fixed-diamond wire sawing machine and slurry pipe thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220463448 CN202878512U (en) | 2012-09-12 | 2012-09-12 | Fixed-diamond wire sawing machine and slurry pipe thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202878512U true CN202878512U (en) | 2013-04-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220463448 Expired - Fee Related CN202878512U (en) | 2012-09-12 | 2012-09-12 | Fixed-diamond wire sawing machine and slurry pipe thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202878512U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111251484A (en) * | 2018-11-30 | 2020-06-09 | 环球晶圆股份有限公司 | Slurry pipe structure |
-
2012
- 2012-09-12 CN CN 201220463448 patent/CN202878512U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111251484A (en) * | 2018-11-30 | 2020-06-09 | 环球晶圆股份有限公司 | Slurry pipe structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130417 Termination date: 20150912 |
|
| EXPY | Termination of patent right or utility model |