CN105093408B - A kind of silica-based nanowire polarization beam apparatus based on schema evolution principle - Google Patents
A kind of silica-based nanowire polarization beam apparatus based on schema evolution principle Download PDFInfo
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- CN105093408B CN105093408B CN201510607997.1A CN201510607997A CN105093408B CN 105093408 B CN105093408 B CN 105093408B CN 201510607997 A CN201510607997 A CN 201510607997A CN 105093408 B CN105093408 B CN 105093408B
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
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Abstract
The invention discloses a kind of silica-based nanowire polarization beam apparatus based on schema evolution principle, available for fields such as integrated optics and silicon based photons.Wherein vertical hybrid plasma waveguide (3) and horizontal hybrid plasma waveguide (4) are located at the both sides of tapered transitional waveguides (2) respectively, and are consistent with the spacing of tapered transitional waveguides (2)；Input waveguide (1) is connected with the lower end of tapered transitional waveguides (2), the upper end of vertical hybrid plasma waveguide (3) connects the first curved waveguides of S (5), and the first output waveguide (7) is connected in the upper end of the first curved waveguides of S (5)；The 2nd curved waveguides of S (6) are connected in the upper end of horizontal hybrid plasma waveguide (4), the second output waveguide (8) is connected in the upper end of the 2nd curved waveguides of S (6).The device has the advantages that polarization beam splitting efficiency high, loss is low, manufacturing tolerance is big, bandwidth of operation is big, while can be used to build polarization diversity scheme on piece, and unrelated transmission is polarized to realize.
Description
Technical field
The present invention relates to integrated optics technique field, and in particular to a kind of silica-based nanowire based on schema evolution principle is inclined
Shake beam splitter.
Background technology
Silicon integreted phontonics circuit technology based on silicon-on-insulator (Silicon-on-insulator, SOI) material platform
The extensive concern of researcher is received in recent years.By high index-contrast and the CMOS compatibility of SOI materials, numerous compacts
Photonic device and system can be by the manufactures of inexpensive mass, but the intrinsic high index-contrast characteristic of SOI materials can not
What is avoided introduces strongly polarization correlated, and this greatly limits its application on piece in optic communication.Therefore, efficient piece
Upper polarization diversity scheme is suggested, and polarization beam apparatus and circulator are the parts that wherein two classes are important.At present, researcher has been
Compact, high performance polarization beam apparatus are designed and manufacture through proposing a variety of waveguiding structures, including：It is directional coupler, more
Mode interference coupler, Mach-Zender interferometer, photonic crystal and array waveguide grating etc..Wherein, based on Mode Coupling principle
Directional coupler because its is simple in construction, is easily achieved, turn into design polarization beam apparatus preferred structure, but for ensure orientation
The efficient operation of coupler has strict requirements to the size of waveguide accordingly, it is necessary to meet accurate phase-matching condition, this
Manufacture to device proposes higher required precision；The bandwidth of operation of device is also limited simultaneously.Therefore, schema evolution principle quilt
It is proposed to be used to design polarization beam apparatus, but the device length obtained is longer (longer than the structure based on Mode Coupling principle
One magnitude), so needing to use new structure on the basis of larger bandwidth of operation is ensured effectively to reduce its device
Part length.
Recently, with a kind of proposition of novel waveguiding structure-hybrid plasma waveguide, received using it better than silicon substrate
Rice noodles it is strong polarization correlated, can be designed that the overall compact photonic device of structure.Hybrid plasma waveguide is common
One layer of thin low-index material, such as SiO are sequentially depositing on silica-based nanowire2, and layer of metal material formed so that its institute
The pattern that can be carried has the low loss characteristic of Medium Wave Guide simultaneously between Medium Wave Guide and metallic plasma waveguide
It is strong polarization correlated with metallic plasma waveguide.Accordingly, drilled by the excellent properties and pattern of hybrid plasma waveguide
The advantages that big bandwidth of modification structures, big manufacturing tolerance, considering that design is a kind of has that size is small, bandwidth of operation is big, polarization beam splitting
The silica-based nanowire polarization beam apparatus based on schema evolution principle of efficiency high seems critically important.
The content of the invention
Technical problem：In order to solve the deficiencies in the prior art, the present invention provides a kind of silicon substrate based on schema evolution principle
Nano wire polarization beam apparatus, using two vertically and horizontally hybrid plasma waveguide forming types develop area, have polarization point
Beam efficiency high, bandwidth of operation is big, overcomes the deficiencies in the prior art.
Technical scheme：A kind of silica-based nanowire polarization beam apparatus based on schema evolution principle of the present invention includes incoming wave
Lead, tapered transitional waveguides, vertical hybrid plasma waveguide, horizontal hybrid plasma waveguide, the curved waveguides of the first S, the 2nd S
Curved waveguide, the first output waveguide, the second output waveguide；Wherein vertical hybrid plasma waveguide and horizontal hybrid plasma
Waveguide is located at the both sides of tapered transitional waveguides respectively, and is consistent with the spacing of tapered transitional waveguides；In tapering transition ripple
The lower end led is connected with input waveguide, and the upper end of vertical hybrid plasma waveguide connects the first curved waveguides of S, curved in the first S
The upper end of type waveguide connects the first output waveguide；The 2nd curved waveguides of S are connected in the upper end of horizontal hybrid plasma waveguide,
The upper end of the 2nd curved waveguides of S connects the second output waveguide.
Adopt side in vertical hybrid plasma waveguide and horizontal hybrid plasma waveguide close to tapered transitional waveguides
With tapering transition structure, opposite side is common linear structure, and tapered transitional waveguides, vertical hybrid plasma waveguide and
The sophisticated minimum widith of horizontal hybrid plasma waveguide remains 80nm~120nm.
The spacing of first medium waveguide and metal level is 40nm~60nm in vertical hybrid plasma waveguide, level mixing
The spacing of second medium waveguide and metal cladding in plasma filled waveguide is 20nm~30nm.
The transverse electric mode signal of input exports from the curved waveguides of the 2nd S being connected with horizontal hybrid plasma waveguide and second
Waveguide is exported, and the TM mode signal of input is from the curved waveguides of the first S being connected with vertical hybrid plasma waveguide and
One output waveguide is exported.
Beneficial effect：Compared with prior art, technical scheme has the advantages that：
1st, polarization beam splitting efficiency high, bandwidth of operation are big.Compared with the polarization beam apparatus of conventional silica-based nanowire design, this hair
It is bright using polarization correlated stronger hybrid plasma waveguide so that in schema evolution area, the different polarization states signal of input
Coupling between corresponding two vertically and horizontally hybrid plasma waveguide is more easy to occur, and lower in the crosstalk of output end
(because there is larger difference between pattern).Further, since coupled zone uses schema evolution type structure design so that the device pair
The change of waveguide dimensions is insensitive, and bandwidth of operation is larger.
2nd, coupling length is relatively short.Compared to silica-based nanowire, because schema evolution area employs two vertical and water
Flat hybrid plasma waveguiding structure, the effective refractive index difference of corresponding mixed mode are larger so that coupling length reduces, and is beneficial to
Realize the compact design of device and be densely integrated.
3rd, it is easily manufactured.In schema evolution area, present invention employs tapered transitional waveguides structure so that pattern is in different ripples
It is easier to couple between leading, while the minimum widith at tapered transmission line tip remains 80nm~120nm, this will relax system to device
Make requirement.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the cross-sectional view of schema evolution area waveguiding structure in the present invention；
Have in figure：Input waveguide 1, tapered transitional waveguides 2, vertical hybrid plasma waveguide 3, horizontal hybrid plasma
Waveguide 4, the curved waveguides 5 of the first S, the curved waveguides 6 of the 2nd S, the first output waveguide 7, the second output waveguide 8, first medium waveguide
31st, metal level 32, second medium waveguide 41, metal cladding 42, substrate 9, covering 10.
Embodiment
Further explanation is done to the present invention below in conjunction with the accompanying drawings.
As shown in figure 1, a kind of silica-based nanowire polarization beam apparatus based on schema evolution principle of the present invention includes input
Waveguide 1, tapered transitional waveguides 2, vertical hybrid plasma waveguide 3, horizontal hybrid plasma waveguide 4, the first curved waveguides of S
5th, the curved waveguides 6 of the 2nd S, the first output waveguide 7, the second output waveguide 8；Wherein vertical hybrid plasma waveguide 3 and level
Hybrid plasma waveguide 4 is located at the both sides of tapered transitional waveguides 2 respectively, and keeps one with the spacing of tapered transitional waveguides 2
Cause；Input waveguide 1 is connected with the lower end of tapered transitional waveguides 2, the upper end of vertical hybrid plasma waveguide 3 connects the first S
Curved waveguide 5, the first output waveguide 7 is connected in the upper end of the curved waveguides 5 of the first S；In the upper of horizontal hybrid plasma waveguide 4
The end connection curved waveguides 6 of the 2nd S, the second output waveguide 8 is connected in the upper end of the curved waveguides 6 of the 2nd S.
The transverse electric mode signal of input is defeated from the curved waveguides 6 and second of the 2nd S being connected with horizontal hybrid plasma waveguide 4
Go out waveguide 8 to be exported, the TM mode signal of input is from the curved waveguides 5 of the first S being connected with vertical hybrid plasma waveguide 3
And first output waveguide 7 exported.
Specifically, transmission feature of the optical signal in the silica-based nanowire polarization beam apparatus of said structure is as follows：Include horizontal stroke
The incident optical signal of electric mould (TE) and TM mode (TM) enters from input waveguide 1, subsequently enters tapered transitional waveguides 2, input
Light patterns, which start gradually to extend into covering, (because the width of waveguide core layer is less and less, can not effectively support waveguide
Pattern)；Simultaneously positioned at vertical hybrid plasma waveguide 3, the horizontal hybrid plasma waveguide 4 of the both sides of tapered transitional waveguides 2
Because its mode polarization state is just orthogonal (TM, a TE), therefore will be gradually coupled in schema evolution area, the TE moulds of input
Horizontal hybrid plasma waveguide 4, the TM moulds of input will gradually be coupled to vertical hybrid plasma waveguide 3, and opposite mould
Formula coupling behavior will be unable to produce because larger difference (mode orthogonality) between pattern be present.And then in vertically mixing plasma
Bulk wave leads the 3, end of horizontal hybrid plasma waveguide 4 and connects the curved waveguides 5 of the first S, the curved waveguides 6 of the 2nd S respectively, so as to
Two different polarization states (TM and TE) are further separated, to improve polarization extinction ratio, and finally from respective output port,
That is the first output waveguide 7, the second output waveguide 8 are exported.Wherein, it is vertical mixed in order to preferably match tapered transitional waveguides 2
Close plasma filled waveguide 3, the structure of horizontal hybrid plasma waveguide 4 also uses part conic transitional structure so that they
Keep constant with the spacing of tapered transitional waveguides 2.It can be very good to realize point of input TE, TM polarization state by this structure
From, device of the present invention is based on schema evolution principle compared with tradition is based on the directional coupler of Mode Coupling type, thus with more
Big bandwidth of operation, while the change to device size insensitive has larger manufacturing tolerance；Drilled in addition with general pattern
Modification waveguiding structure develops compared to the present invention as a result of polarization correlated stronger hybrid plasma waveguide forming types
Area thus has smaller device size, is easy to integrate with other compact devices.
Fig. 2 is the cross-sectional view of silica-based nanowire polarization beam apparatus schema evolution area of the present invention waveguiding structure, and centre is company
Connect the tapered transitional waveguides 2 of input waveguide 1, right side is vertical hybrid plasma waveguide 3, including first medium waveguide 31 and gold
Belong to layer 32, left side is horizontal hybrid plasma waveguide 4, including second medium waveguide 41 and metal cladding 42, all ripples
Lead and grown on substrate 9 and covered with top covering 10.For hybrid plasma waveguide, its Medium Wave Guide and metal level
Between interval filling low-refraction clad material (generally SiO2), and spacing be 40nm~60nm (vertical mixing etc. from
Daughter waveguide) and 20nm~30nm (horizontal hybrid plasma waveguide).From figure 2 it can be seen that using this asymmetrical wave
Guide structure (vertical, horizontal hybrid plasma waveguide) and the device thus designed, it is stronger polarization correlated because existing, for
The signal of any input polarization (TE or TM) can only be coupled to specific waveguide end (TE to level mixing etc. in transmitting procedure
Gas ions waveguide, TM to vertical hybrid plasma waveguide), and other end can not be coupled to (due to used asymmetric
Waveguiding structure clearly enhances the polarization correlated of device entirety), thus with polarization beam splitting effect is good, extinction ratio is high, crosstalk
Low advantage.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (2)
- A kind of 1. silica-based nanowire polarization beam apparatus based on schema evolution principle, it is characterised in that the silicon-based nano linear polarization Beam splitter includes input waveguide (1), tapered transitional waveguides (2), vertical hybrid plasma waveguide (3), horizontal mixing plasma Bulk wave leads (4), the first curved waveguides of S (5), the 2nd curved waveguides of S (6), the first output waveguide (7), the second output waveguide (8)； Wherein vertical hybrid plasma waveguide (3) and horizontal hybrid plasma waveguide (4) are respectively positioned at tapered transitional waveguides (2) Both sides, and be consistent with the spacing of tapered transitional waveguides (2)；Incoming wave is connected with the lower end of tapered transitional waveguides (2) Lead (1), the upper end of vertical hybrid plasma waveguide (3) connects the first curved waveguides of S (5), in the first curved waveguides of S (5) Upper end connects the first output waveguide (7)；The 2nd curved waveguides of S (6) are connected in the upper end of horizontal hybrid plasma waveguide (4), The second output waveguide (8) is connected in the upper end of the 2nd curved waveguides of S (6)；Close to tapered transitional waveguides (2) in the vertical hybrid plasma waveguide (3) and horizontal hybrid plasma waveguide (4) Side use tapering transition structure, opposite side is common linear structure, and tapered transitional waveguides (2), vertical mixing etc. The sophisticated minimum widith of gas ions waveguide (3) and horizontal hybrid plasma waveguide (4) remains 80nm~120nm.
- A kind of 2. silica-based nanowire polarization beam apparatus based on schema evolution principle as claimed in claim 1, it is characterised in that First medium waveguide (31) and the spacing of metal level (32) are 40nm~60nm in vertical hybrid plasma waveguide (3), horizontal Second medium waveguide (41) and the spacing of metal cladding (42) in hybrid plasma waveguide (4) are 20nm~30nm.
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Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105467520B (en) * | 2015-12-15 | 2018-04-17 | 武汉邮电科学研究院 | Wideband polarization based on tapered waveguide directional coupler point/bundling device |
| CN105759355B (en) * | 2016-05-17 | 2019-09-03 | 东南大学 | A kind of on piece integrated-type polarization beam apparatus and its polarization beam splitting method |
| CN106405733B (en) * | 2016-10-26 | 2019-02-15 | 浙江大学 | A kind of polarization beam splitting-bundling device |
| EP3561561B1 (en) * | 2018-04-26 | 2022-04-13 | Huawei Technologies Co., Ltd. | Optical splitter including a trident structure |
| CN111913251B (en) * | 2019-05-09 | 2022-07-01 | 南京邮电大学 | Hybrid plasmon waveguide capable of simultaneously supporting TE (transverse electric) mode and TM (transverse magnetic) mode |
| CN110780381B (en) * | 2019-12-02 | 2021-01-15 | 中国科学院半导体研究所 | Polarization beam splitter with asymmetric three-waveguide structure and preparation method thereof |
| CN111239896A (en) * | 2020-03-26 | 2020-06-05 | 北京爱杰光电科技有限公司 | Active polarization rotator realized based on mixed surface plasma groove waveguide |
| CN112596156A (en) * | 2020-12-18 | 2021-04-02 | 海南师范大学 | GOI or SOI based beam splitting/combining waveguide and preparation method thereof |
| CN112596282B (en) * | 2020-12-23 | 2022-07-08 | 东南大学 | Broadband adjustable splitting ratio polarization rotation beam splitter based on SOI |
| CN112904477B (en) * | 2021-03-05 | 2022-05-10 | 东南大学 | Polarization insensitive optical power divider based on shallow etching multimode interference coupler |
| CN113109902A (en) * | 2021-04-20 | 2021-07-13 | 中国科学院半导体研究所 | Lithium niobate thin film polarization concentrator on chip and preparation method thereof |
| CN114415289B (en) * | 2022-01-29 | 2023-04-28 | 福州大学 | Low-loss wide-bandwidth wavelength multiplexing/de-multiplexing device based on silicon nitride platform |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102841407A (en) * | 2012-09-20 | 2012-12-26 | 电子科技大学 | Waveguide type polarizing beam splitter |
| CN103018832A (en) * | 2012-12-31 | 2013-04-03 | 江苏大学 | Polarization beam splitter |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8873899B2 (en) * | 2013-03-14 | 2014-10-28 | Cisco Technology, Inc. | Modal rotation in optical waveguides |
| JP6107948B2 (en) * | 2013-06-07 | 2017-04-05 | 日本電気株式会社 | Waveguide mode conversion element, polarization separator, and optical device |
-
2015
- 2015-09-22 CN CN201510607997.1A patent/CN105093408B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102841407A (en) * | 2012-09-20 | 2012-12-26 | 电子科技大学 | Waveguide type polarizing beam splitter |
| CN103018832A (en) * | 2012-12-31 | 2013-04-03 | 江苏大学 | Polarization beam splitter |
Non-Patent Citations (1)
| Title |
|---|
| Proposal for Compact Polarization Splitter Using Asymmetrical Three-Guide Directional Coupler;Yin Xu 等;《IEEE PHOTONICS TECHNOLOGY LETTERS》;20150315;第27卷(第6期);第655页左栏第2段至657页左栏第2段、图1-7 * |
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