CN102749676A - Cross waveguide based on linear tapered multimode interference principle - Google Patents

Cross waveguide based on linear tapered multimode interference principle Download PDF

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CN102749676A
CN102749676A CN2012102020231A CN201210202023A CN102749676A CN 102749676 A CN102749676 A CN 102749676A CN 2012102020231 A CN2012102020231 A CN 2012102020231A CN 201210202023 A CN201210202023 A CN 201210202023A CN 102749676 A CN102749676 A CN 102749676A
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waveguide
taper
wave guide
straight wave
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CN102749676B (en
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乐孜纯
李锐
董文
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Zhejiang University of Technology ZJUT
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Abstract

The invention discloses a cross waveguide based on a linear tapered multimode interference principle. The cross waveguide comprises a vertical portion and a horizontal portion, each of the vertical portion and the horizontal portion is composed of a front straight waveguide area, a front tapered waveguide area, a tapered multimode interference area, a rear tapered waveguide area and a rear straight waveguide area which are sequentially connected, the horizontal portion and the vertical portion are perpendicularly crossed, and a crossed area is located in the tapered multimode interference area. The cross waveguide based on the linear tapered multimode interference principle has the advantage of being low in loss and crosstalk and small in size.

Description

A kind of right-angled intersection waveguide based on the linear taper multimode interference principle
Technical field
The invention belongs to the optical communication technique field, in the optical device that contains the right-angled intersection waveguiding structure, as micro-ring resonant wave filter that contains the right-angled intersection waveguiding structure and micro-ring resonant wavelength division multiplexer etc.
Technical background
The silicon-based nano waveguide is to make one of important materials of integrated-type optic communication device; The refringence of its waveguide core district and covering is very big; Therefore help constraining light in the core district, the size of waveguide can be made very for a short time, more adapts to the superintegrated requirement of extensive integrated optical circuit.And owing to adopt silica-based waveguides, with the COMS process compatible of present standard.Optical waveguide is basic photonic interconnections device.For the waveguide of sub-micron rank silicon-based nano, its loss is very little, is approximately 1.7dB/cm, intersects each other but work as two waveguides, when forming the waveguide of right-angled intersection framework, because the scattering of light meeting brings extra loss in cross architecture.For the waveguide of traditional plane criss-cross construction, we must consider its insertion loss and crosstalk.Particularly for high-index material such as SOI (Silicon On Insulator), to insert loss and crosstalk very seriously, the performance that this has not only influenced the right-angled intersection waveguide has also restricted it in the optical device Application for Field.Therefore, develop that to have low insertion loss be the actual demand of application with low right-angled intersection waveguide of crosstalking, have very important significance.In recent years, some researcher studies the right-angled intersection waveguide, particularly insertion loss that reduces the right-angled intersection waveguide and the method for crosstalking is studied.For example adopt the waveguide of the vertical stratification of multilayer can well reduce because the insertion loss and the (Hatakeyama that crosstalks that right-angled intersection is introduced; Loss-less multilevel crossing of busline waveguide in vertically coupled microring resonator filter; IEEE Photonics Technology Letters; 2004; 16 (2): 473-475), but the many of complicacy are wanted in the manufacture craft opposite planar waveguide of multilayer vertical stratification waveguide, and it is high not only to make difficulty and cost.In addition, in order to reduce the insertion loss of introducing by criss-cross construction and to crosstalk, proposed multiple-mode interfence MMI (multimode interference) is used for the right-angled intersection waveguide; Existing scheme has right-angled intersection waveguiding structure (Chen, H.and A.W.Poon, the Low-loss multimode-interference-based crossings for silicon wire waveguides based on the rectangle multimode interference principle; IEEE Photonics Technology Letters, 2006,18 (21): 2260-2262), based on the right-angled intersection waveguiding structure (Fukazawa of oval multimode interference principle; T.; Et al., Low loss intersection of Si photonic wire waveguides, Japanese Journal of Applied Physics; 2004,43 (2): 646-647).Crosstalk though these schemes can reduce the scattering loss and the inhibition of right-angled intersection waveguiding structure, criss-cross construction length is unfavorable for that all greater than 10 microns the monolithic of extensive integrated optical circuit is integrated.
Summary of the invention
Be big, the serious problem of crosstalking of insertion loss that overcomes right-angled intersection waveguiding structure in the prior art; And physical dimension big with the deficiency of making difficulty, the right-angled intersection waveguide that the present invention has provided a kind of low-loss, lowly crosstalks, size is little based on the linear taper multimode interference principle.
In order to solve the problems of the technologies described above the technical scheme that provides be:
A kind of right-angled intersection waveguide based on the linear taper multimode interference principle; Said right-angled intersection waveguide comprises vertical part and lateral part; Vertically part is formed by the preceding straight wave guide zone that is connected successively, preceding taper waveguide region, taper multiple-mode interfence zone, tapered transmission line zone, back and straight wave guide zone, back with the lateral part; Said lateral part and vertically part square crossing, and the intersection region is in taper multiple-mode interfence zone.
Further; One end in the preceding straight wave guide zone of said vertical part or lateral part is the light input end mouth; Light passes through preceding taper waveguide region, taper multiple-mode interfence zone, tapered transmission line zone, back and straight wave guide zone, back successively, and an end in straight wave guide zone, said back is an optical output port.
Further again; The SOI material is all adopted in straight wave guide zone, preceding taper waveguide region, taper multiple-mode interfence zone, tapered transmission line zone, back and straight wave guide zone, back before said; Wherein, the refractive index of silicon and silicon dioxide is respectively 3.48 and 1.46, and the refringence of waveguide core district and covering is 2.02.
Technical conceive of the present invention is: the pattern of input light changes in a kind of right-angled intersection waveguiding structure based on the linear taper multimode interference principle of the present invention.The input light of single mode is single mode at straight wave guide and tapered transmission line zone; But enter into taper multiple-mode interfence zone and can occur multimode, single mode and multimode situation successively; And multimode is symmetrical, and then entering into the tapered transmission line zone becomes single mode again, exports with single mode at last.It should be noted that in the right-angled intersection center and the single mode situation occurs.The cross waveguide of linear taper is based on the center of wave guide mode field from input plane to it and the reflection certainly of output plane.Reflection certainly in right-angled intersection dot center has suppressed the expansion of wavefront, thereby has reduced the scattering loss of point of crossing and crosstalk.Because the input field is in waveguide core, it only can excite the even apotype field of symmetry, thereby in the multimode symmetric pattern, reflection is the symmetry interference certainly.
The invention has the beneficial effects as follows: 1, introduced two square crossing taper multiple-mode interfence zones at the infall of right-angled intersection waveguide; With respect to the waveguide square crossing (like the straight wave guide square crossing) of other shape, it has little, the low characteristics of crosstalking of scattering loss.2, introduce the size that two square crossing taper multiple-mode interfence zones can reduce this waveguide, help improving the light path integrated level.
Description of drawings
Fig. 1 is the structural representation that the present invention is based on the right-angled intersection waveguide of linear taper multimode interference principle.
Fig. 2 be the operation wavelength that obtains with Finite-Difference Time-Domain Method FDTD (finite-different time-domain) simulation at 1500nm between the 1600nm, the comparison diagram of crosstalking of a kind of right-angled intersection waveguide based on the linear taper multimode interference principle of the straight wave guide of conventional planar criss-cross construction and the present invention.
Fig. 3 be the operation wavelength that obtains with FDTD simulation at 1500nm between the 1600nm, the return loss comparison diagram of a kind of right-angled intersection waveguide based on the linear taper multimode interference principle of the straight wave guide of conventional planar criss-cross construction and the present invention.
Fig. 4 be the operation wavelength that obtains with FDTD simulation at 1500nm between the 1600nm, the crosstalk insertion loss comparison diagram of comparison diagram of a kind of right-angled intersection waveguide of the straight wave guide of conventional planar criss-cross construction and the present invention based on the linear taper multimode interference principle.
Embodiment
Further specify the present invention below in conjunction with accompanying drawing:
With reference to Fig. 1 ~ Fig. 4, a kind of right-angled intersection waveguide based on the linear taper multimode interference principle is made up of two same sections.One of them part is formed by straight wave guide is regional, tapered transmission line is regional, the taper multiple-mode interfence is regional, tapered transmission line is regional and straight wave guide is regional.Two parts square crossing, and the intersection region is in taper multiple-mode interfence zone.
All regions module all are based on the SOI material, and the refractive index of silicon and silicon dioxide is respectively 3.48 and 1.46.The refringence of its waveguide core district and covering is 2.02, because the refringence of waveguide core district and covering is very big, therefore helps constraining light in the core district, and the size of waveguide can be made very for a short time, more adapts to the superintegrated requirement of extensive integrated optical circuit.
Like Fig. 1, the width in straight wave guide zone is W 1, the small-bore width in tapered transmission line zone is W 1, the heavy caliber width is W 2, the heavy caliber width in taper multiple-mode interfence zone is W 3, length is L 1, small-bore width is W 4, the heavy caliber width in another tapered transmission line zone is W 5, length is L 2
In taper multiple-mode interfence zone, the bat length that we can Theoretical Calculation obtain two lowest-order patterns is:
L π p ( z ) = π ( β 0 - β 1 ) p ( z ) = 4 n r ( W i + W g ) ( W i + W g - 2 kz ) 3 λ - - - ( 1 )
β in the formula is a propagation constant, and W is a caliber size, and z is a transmission range, and κ=tan (θ) is for the regional fade rate of taper multiple-mode interfence, wherein θ is a cone angle, and λ is an operation wavelength, n γBe this regional refractive index size.The cross waveguide of linear taper is based on the center of wave guide mode field from input plane to it and the reflection certainly of output plane.Reflection certainly in right-angled intersection dot center has suppressed the expansion of wavefront, thereby has reduced the scattering loss of point of crossing and crosstalk.Because the input field is in waveguide core, it only can excite the even apotype field of symmetry, thereby in the multimode symmetric pattern, reflection is the symmetry interference certainly.The condition of reflection certainly that satisfies this situation does
Exp [ j ( β 0 - β 1 ) p z ] = Exp [ j υ ( υ + 2 ) π 3 L π p ( z ) z ] , V is even number (2)
Figure BDA00001772801400053
For even illumination; As
Figure BDA00001772801400054
p=1; 2,3 ... Produce from reflection.
The wavefront of having offset the right-angled intersection center just because of the reflection certainly of taper multi-mode interference coupler expands, and has suppressed the scattering loss of infall and crosstalks.
At physical dimension W 1Be 0.3 μ m, W 2Be 0.8 μ m, W 3Be 1.1 μ m, L 1Be 3.9 μ m, W 4Be 0.8 μ m, W 5Be 0.6 μ m, L 2Be 1 μ m, we have carried out emulation to the present invention under FDTD, and the simulation result that obtains is Fig. 2, Fig. 3, Fig. 4.
As shown in Figure 2, between the 1600nm, a kind of linearity of the present invention more helps suppressing to crosstalk based on the right-angled intersection waveguide of the taper multimode interference principle straight wave guide than conventional planar criss-cross construction operation wavelength, has reduced 30dB crosstalking to 22dB at 1500nm.
As shown in Figure 3, between the 1600nm, a kind of right-angled intersection waveguide based on the linear taper multimode interference principle of the present invention has improved 53dB to 20dB return loss than the straight wave guide of conventional planar criss-cross construction to operation wavelength at 1500nm.
As shown in Figure 4, operation wavelength at 1500nm between the 1600nm, a kind of insertion loss that has improved 0.9dB based on the right-angled intersection waveguide of linear taper multimode interference principle than the straight wave guide of conventional planar criss-cross construction of the present invention.
In addition, the length in taper multiple-mode interfence zone is merely 3.9 μ m, and the whole dimension size of xsect of the present invention is 6 μ m * 6 μ m, and this improves the light path integrated level greatly.And we use the bandwidth for transmission of FDTD simulation be at wavelength as 1500nm between the 1600nm, this also is the optical signal transmission wave band that Wave division multiplexing WDM (Wavelength Division Multiplex) technology adopts.
The described content of this instructions embodiment only is enumerating the way of realization of inventive concept; Protection scope of the present invention should not be regarded as and only limit to the concrete form that embodiment states, protection scope of the present invention also reach in those skilled in the art conceive according to the present invention the equivalent technologies means that can expect.

Claims (3)

1. right-angled intersection waveguide based on the linear taper multimode interference principle; It is characterized in that: said right-angled intersection waveguide comprises vertical part and lateral part; Vertically part is formed by the preceding straight wave guide zone that is connected successively, preceding taper waveguide region, taper multiple-mode interfence zone, tapered transmission line zone, back and straight wave guide zone, back with the lateral part; Said lateral part and vertically part square crossing, and the intersection region is in taper multiple-mode interfence zone.
2. the right-angled intersection waveguide based on the linear taper multimode interference principle as claimed in claim 1; It is characterized in that: an end in the preceding straight wave guide zone of said vertical part or lateral part is the light input end mouth; Light passes through preceding taper waveguide region, taper multiple-mode interfence zone, tapered transmission line zone, back and straight wave guide zone, back successively, and an end in straight wave guide zone, said back is an optical output port.
3. according to claim 1 or claim 2 right-angled intersection waveguide based on the linear taper multimode interference principle; It is characterized in that: the SOI material is all adopted in straight wave guide zone, preceding taper waveguide region, taper multiple-mode interfence zone, tapered transmission line zone, back and straight wave guide zone, back before said; Wherein, The refractive index of silicon and silicon dioxide is respectively 3.48 and 1.46, and the refringence of waveguide core district and covering is 2.02.
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WO2018115848A1 (en) * 2016-12-22 2018-06-28 Axenic Limited An optical waveguide crosspoint
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Cited By (23)

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CN104639259B (en) * 2013-11-07 2017-10-17 华为技术有限公司 A kind of frequency mixer, frequency mixing method and photoreceiver
CN104639259A (en) * 2013-11-07 2015-05-20 华为技术有限公司 Frequency mixer, frequency mixing method and optical receiver
CN106461873A (en) * 2014-04-30 2017-02-22 华为技术有限公司 Inverse taper waveguides for low-loss mode converters
CN106461873B (en) * 2014-04-30 2021-04-20 华为技术有限公司 Low-loss mode converter and manufacturing method thereof
CN106537199B (en) * 2014-07-16 2019-06-11 华为技术有限公司 Crossing waveguide
WO2016008116A1 (en) * 2014-07-16 2016-01-21 华为技术有限公司 Crossed waveguide
CN106537199A (en) * 2014-07-16 2017-03-22 华为技术有限公司 Crossed waveguide
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WO2017152449A1 (en) * 2016-03-11 2017-09-14 Huawei Technologies Co., Ltd. A waveguide crossing
CN108027476A (en) * 2016-03-11 2018-05-11 华为技术有限公司 A kind of waveguide intersects
CN108027476B (en) * 2016-03-11 2020-04-21 华为技术有限公司 Waveguide cross
GB2559283A (en) * 2016-12-22 2018-08-01 Axenic Ltd An optical waveguide crosspoint
GB2558347A (en) * 2016-12-22 2018-07-11 Axenic Ltd An optical waveguide crosspoint
WO2018115848A1 (en) * 2016-12-22 2018-06-28 Axenic Limited An optical waveguide crosspoint
US11175459B2 (en) 2016-12-22 2021-11-16 Isotek Microwave Limited Optical waveguide crosspoint
GB2559283B (en) * 2016-12-22 2022-03-02 Axenic Ltd An optical waveguide crosspoint
GB2558347B (en) * 2016-12-22 2022-03-02 Axenic Ltd An optical waveguide crosspoint
EP4130822A1 (en) * 2016-12-22 2023-02-08 Axenic Limited An optical waveguide crosspoint
CN108650187A (en) * 2018-06-29 2018-10-12 浙江工商大学 A kind of 4 × 4 clog-free wavelength selective routers based on cascade dual-loop resonator
CN108650187B (en) * 2018-06-29 2020-12-25 浙江工商大学 4X 4 non-blocking wavelength selection router based on series double-ring resonator
CN110031934A (en) * 2019-04-24 2019-07-19 清华-伯克利深圳学院筹备办公室 Right-angled intersection waveguide based on silica-based waveguides sub-wave length grating and multimode interference principle
CN110031934B (en) * 2019-04-24 2020-07-14 清华-伯克利深圳学院筹备办公室 Cross waveguide based on silicon-based waveguide sub-wavelength grating and multi-mode interference principle
CN115308839A (en) * 2022-08-10 2022-11-08 吉林大学 Multi-port waveguide cross device based on silicon dioxide/polymer embedded waveguide platform and preparation method thereof

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